US20140366576A1 - Process for Recovery and Purification of Nitrous Oxide - Google Patents

Process for Recovery and Purification of Nitrous Oxide Download PDF

Info

Publication number
US20140366576A1
US20140366576A1 US14/295,724 US201414295724A US2014366576A1 US 20140366576 A1 US20140366576 A1 US 20140366576A1 US 201414295724 A US201414295724 A US 201414295724A US 2014366576 A1 US2014366576 A1 US 2014366576A1
Authority
US
United States
Prior art keywords
gas stream
unit
gas
volume
combinations
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
US14/295,724
Other versions
US10464813B2 (en
Inventor
Guohua Xiu
Peng Zhang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Versum Materials US LLC
Original Assignee
Air Products and Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN201320375675.5U external-priority patent/CN203639158U/en
Priority claimed from CN201310262637.3A external-priority patent/CN104229760B/en
Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc
Assigned to AIR PRODUCTS AND CHEMICALS, INC. reassignment AIR PRODUCTS AND CHEMICALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: XIU, GUOHUA, ZHANG, PENG
Publication of US20140366576A1 publication Critical patent/US20140366576A1/en
Assigned to CITIBANK, N.A., AS COLLATERAL AGENT reassignment CITIBANK, N.A., AS COLLATERAL AGENT PATENT SECURITY AGREEMENT Assignors: VERSUM MATERIALS US, LLC
Assigned to VERSUM MATERIALS US, LLC reassignment VERSUM MATERIALS US, LLC ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: AIR PRODUCTS AND CHEMICALS, INC.
Assigned to VERSUM MATERIALS US, LLC reassignment VERSUM MATERIALS US, LLC RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: CITIBANK, N.A., AS AGENT
Application granted granted Critical
Publication of US10464813B2 publication Critical patent/US10464813B2/en
Expired - Fee Related legal-status Critical Current
Adjusted expiration legal-status Critical

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J1/00Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
    • F25J1/0002Processes or apparatus for liquefying or solidifying gases or gaseous mixtures characterised by the fluid to be liquefied
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/46Removing components of defined structure
    • B01D53/54Nitrogen compounds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D47/00Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/12Washers with plural different washing sections
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/26Drying gases or vapours
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34Chemical or biological purification of waste gases
    • B01D53/74General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/75Multi-step processes
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/20Nitrogen oxides; Oxyacids of nitrogen; Salts thereof
    • C01B21/22Nitrous oxide (N2O)
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J1/00Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25JLIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J1/00Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
    • F25J1/02Processes or apparatus for liquefying or solidifying gases or gaseous mixtures requiring the use of refrigeration, e.g. of helium or hydrogen ; Details and kind of the refrigeration system used; Integration with other units or processes; Controlling aspects of the process
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02CCAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00Capture or disposal of greenhouse gases
    • Y02C20/10Capture or disposal of greenhouse gases of nitrous oxide (N2O)

Definitions

  • Nitrous oxide is a by-product in nitric acid production process. Nitrous oxide is also produced in large volumes as a by-product in the synthesis of adipic acid; one of the two reactants used in nylon manufacture.
  • Adipic acid is a dicarboxylic acid manufactured by a two-stage process.
  • the first stage of manufacturing usually involves the oxidation of cyclohexane to form a mixture of cyclohexanone and cyclohexanol.
  • the second stage involves oxidizing the mixture with nitric acid to produce adipic acid. Nitrous oxide is generated as a by-product of the nitric acid oxidation stage.
  • N 2 O the by-product from the synthesis of adipic acid can become a major commercial source for N 2 O.
  • recovering N 2 O from the off gas stream from the synthesis of adipic acid requires the removal of various impurities; such as, higher oxides of nitrogen, carbon dioxide, carbon monoxide, nitrogen, oxygen, argon, moisture, and organic impurities.
  • impurities such as, higher oxides of nitrogen, carbon dioxide, carbon monoxide, nitrogen, oxygen, argon, moisture, and organic impurities.
  • much of the off gas stream is decomposed before release for environmental protection.
  • a conventional nitrous oxide purification system and process is described in EP 0636576 A1. More specifically, the processes starts with compressing a nitrous oxide feed gas that contains nitrogen, oxygen and water in a compressor. A portion of nitrous oxide, free of water, is conveyed to a heat exchanger where it is condensed to a liquid. The liquid gas is directed to the top of a rectification column for further condensation and returned to the bottom of the rectification column. A second mixed gas-liquid nitrous oxide portion is directed from the heat exchanger to the bottom of the rectifying column as a heating source to vaporize the liquid. The same nitrous oxide is then directed out of the bottom of the column and introduced to the middle of the column. The final product is taken from the bottom of the column having the requisite purity.
  • An invention relates to processes for the separation of nitrous oxide from feed streams containing mixtures thereof with oxygen and nitrogen is described in U.S. Pat. No. 6,080,226.
  • the feed stream comprising nitrous oxide is purified by a pressure swing adsorption (PSA) process employing a co-purge with an oxygen-lean stream to produce a high purity nitrous oxide stream.
  • PSA pressure swing adsorption
  • Nitrous oxide is selectively adsorbed, thus the first effluent stream contains N 2 and O 2 .
  • the high purity nitrous oxide stream can be incorporated in a complex for the production of adipic acid to recover nitrous oxide from a dilute waste stream and pass the recovered nitrous oxide to a process for the production of phenol from an aromatic hydrocarbon.
  • Unreacted nitrous oxide from the phenol production step acid can be recovered in a second, or vent PSA step, and combined with the recovery of byproduct nitrous oxide waste streams from the production of adipic for the overall recovery of nitrous oxide, thereby significantly reducing nitrous oxide emissions from the production of adipic acid.
  • U.S. Pat. No. 6,348,083 B1 teaches an installation and a process for the recovery and/or purification of the nitrous oxide contained in a waste gas.
  • the waste gas contains at least one portion of the nitrous oxide (N 2 O) and at least one other gaseous compound.
  • the process further teaches that: (a) at least one nitrous oxide portion contained in the flow of waste gas is separated by permeation, and (b) at least a portion of the gaseous nitrous oxide separated in step (a) is recovered.
  • the source of the flow of waste gas is an industrial unit using an industrial process giving off the waste gas, preferably a unit for the production of adipic acid, a unit for the production of nitrous oxide, a unit for the production of glycoxylic acid or a unit for the production of nitric acid.
  • U.S. Pat. No. 6,370,911 B1 provided a system and method for nitrous oxide purification, wherein the nitrous oxide product can be used in semiconductor manufacturing.
  • the system and process involve a first sub-system having a purification tank for holding a liquefied nitrous oxide; a vaporizer in communication with the purification tank to receive, vaporize and convey a nitrous oxide vapor back to the purification tank; a distillation column disposed on a distal end of the purification tank to receive a nitrous oxide vapor; a condenser disposed on the distillation column, wherein light impurities are removed and a nitrous oxide devoid of light impurities is conveyed and converted into vapor in said vaporizer.
  • a second sub-system having a first dry bed vessel is disposed downstream of the vaporizer to receive the vapor and reacting the acid gas therein; a second dry bed vessel downstream of the said first dry bed vessel for removing water and ammonia in the vapor.
  • the invention allows for the removal of impurities and particulates, such that an ultra pure nitrous oxide product having a purity of 99.9998% or higher can be delivered to a point of use.
  • a new N 2 O production scheme will be provided to purify the off gas stream or a waste gas flow containing nitrous oxide, by combination of wet scrubber absorption process, adsorption process, flash drum, and/or cryogenic distillation processes with reflux.
  • the invention produces different levels of grade of nitrous oxide for different useful purposes.
  • the invention provides a system for producing different grade of N 2 O, the system comprising:
  • a compressor having at least one stage of compression to compress the gas stream to a preset pressure
  • a cooling and dry unit to remove the moisture or water from the gas stream
  • an adsorption unit to remove the heavy impurities, the moisture or water and the organic compounds from the gas stream
  • a buffer tank to store the gas stream out from the adsorption unit
  • a liquefaction unit to at least partially liquefy the gas stream out from the buffer tank to a gas mixture containing N 2 O and non-condensation gas, and a liquid mixture;
  • a releaser to release the gas mixture back to the adsorption unit and to pass the liquid mixture to a distillation unit
  • the distillation unit to remove the light impurities and the organic compounds from the liquid mixture through distillation; release a vapor phase gas containing N 2 O and non-condensation gas back to the compressor; and generate purified liquid N 2 O;
  • the invention provides another system for producing different grade of N 2 O, the system comprising:
  • a cooling and dry unit to remove the moisture or water from the gas stream
  • an adsorption unit to remove the heavy impurities, the moisture or water and the organic compounds from the gas stream
  • a buffer tank to store the gas stream from the adsorption unit
  • a liquefaction unit to at least partially liquefy the gas stream out from the buffer tank to a gas mixture containing N 2 O and non-condensation gas, and a liquid mixture;
  • a releaser to release the gas mixture back to the adsorption unit and to pass the liquid mixture to a distillation unit
  • the distillation unit to remove the light impurities and the organic compounds from the liquid mixture through distillation; release a vapor phase gas containing N 2 O and non-condensation gas back to the compressor; and generate purified liquid N 2 O;
  • distillation unit comprising at least one flash drum, at least one distillation column with reflux, or combinations thereof.
  • the invention provides a process of recovering and purifying nitrous oxide (N 2 O), comprising
  • the invention provides a process of recovering and purifying nitrous oxide (N 2 O), comprising
  • the gas stream contains 5.0 to 99.9%; preferably 25.0 to 60.0% N 2 O by volume.
  • the different grade of purified N 2 O ranges from 99.9% to 99.9999% purity.
  • the light impurities is selected from the group consisting of N 2 , O 2 , NO, CO, Ar, H 2 , methane, C 2 and combinations thereof; and heavy impurities is selected from the group consisting of CO 2 , NO 2 , CO, H 2 O, C 2 + and combinations thereof, the organic compound is selected from the group consisting of methane, C 2 + , CH 4 , C 2 , and combinations thereof; and the non-condensation gas is selected from the group consisting of Ar, N 2 , O 2 , CO, NO, methane and combinations thereof.
  • the gas mixture is used to regenerate the adsorption unit.
  • the adsorption unit comprising at least two parallel adsorption beds and each bed having at least one layer adsorbents; and two parallel adsorption beds are alternately used in continuous swing operation.
  • the distillation unit comprising at least one flash drum, at least one distillation column, or combinations thereof.
  • FIG. 1 illustrates a schematic diagram of a system for recovering and purifying N 2 O from the off gas stream containing N 2 O.
  • FIG. 2( a ) shows phase diagram of N 2 O and CO 2 at 1.0 MPa.
  • FIG. 2( b ) shows the phase diagram of N 2 O and CO 2 at 2.5 MPa.
  • This invention is aimed at recovering and purifying nitrous oxide (N 2 O) from a N 2 O containing gas stream to produce different purification grades of nitrous oxide.
  • the source of the gas stream can be from any process, such as, from an industrial process.
  • a good example of an industrial process is the off gas stream from the production of adipic acid.
  • the source of the gas stream contains 5.0 to 99.9% nitrous oxide by volume, preferably 20 to 70.0% by volume of nitrous oxide, more preferably 25.0 to 60.0% of nitrous oxide by volume.
  • the off gas stream from adipic acid production plant which uses nitric acid as oxidant, usually contains 28.0-55.0% nitrous oxide by volume.
  • the main impurities in the N 2 O enriched stream include but not limited to, N 2 , O 2 , H 2 , Ar, NOx (NO and NO 2 ), CO, CO 2 , moisture, methane, and other trace organic compounds.
  • the impurities having molecular mass being equal or bigger than N 2 O are hereinafter referred to as heavy impurities.
  • the light impurities include but not limited to N 2 , O 2 , NO, CO, Ar, H 2 .
  • the heavy impurities include but not limited to CO 2 , NO 2 , H 2 O.
  • the organic compounds include but not limited to C 2 + , CH 4 and C 2 . Generally, methane and C 2 incorporate into the light impurities, while C 2 + to heavy impurities.
  • FIG. 1 illustrates a schematic diagram of a system for recovering and purifying N 2 O in accordance with exemplary embodiments of present invention.
  • the system for recovering and purifying nitrous oxide comprises ten units.
  • the input gas to the system is called “off gas stream”since it is the off gas stream from other process, such as, from adipic acid production plant.
  • the units 2 , 3 and 4 in FIG. 1 are corresponding to the wet scrubbing absorption unit, the compressor unit, and the cool and dry unit, respectively. Those three units are mainly to remove heavy impurities and moisture from the off gas stream 1 .
  • the heavy impurities can be removed by wet scrubbing; and moisture can be removed by cool and dry unit after boosting pressure.
  • the units 5 and 6 in FIG. 1 are corresponding to an adsorption unit and a buffer tank, respectively.
  • the adsorption unit 5 is to further remove heavy impurities, moisture and organic compounds to trace levels.
  • the gas stream from unit 5 is store in the buffer tank 6 .
  • the liquefaction unit 7 in FIG. 1 is to at least partially liquefy the process gas stream from the buffer tank 6 into a gas mixture containing N 2 O gas and non-condensation gas and a liquid mixture.
  • the releaser unit 8 releases the gas mixture back to unit 5 .
  • the gas mixture is used as the regeneration gas in unit 5 .
  • Unit 8 also feeds the liquid mixture to the distillation unit 9 .
  • the non-condensation gas includes but not limited to Ar, N 2 , O 2 , CO, NO, methane.
  • the impurities in the stream are removed by releasing them as part of the non-condensation gas.
  • the distillation unit 9 in FIG. 1 comprises at least one flash drum, at least one distillation column with reflux, or combinations of a flash drum, or flash drums and a distillation column with reflux, or distillation columns with reflux.
  • Unit 9 removes light impurities through distillation for producing nitrous oxide having the predefined purity.
  • Unit 9 also releases or recycles a vapor phase gas containing N 2 O and non-condensation gas to unit 3 .
  • the storage tank unit 10 in FIG. 1 stores and distributes the final purified nitrous oxide with different purity grades from unit 9 .
  • heavy impurities such as NO 2 and CO 2 are removed by combination of using absorption from caustic and water wet scrubbers in the wet scrubbing absorption unit 2 ; and adsorption from the adsorption unit 5 .
  • NO 2 and CO 2 can be removed by using adsorption unit 5 alone.
  • the molecular mass of carbon dioxide is almost the same as nitrous oxide (CO 2 : 44.01 and N 2 O: 44.01).
  • CO 2 concentration level in the final product should be controlled by wet scrubbing and adsorption processes along with the removal of other heavy impurities such as NO 2 .
  • the light impurities CO and NO are removed through the combination of the liquefaction unit 7 and the releaser unit 8 , after liquefied as part of the non-condensation gases. They can be further controlled to trace level by flash distillation or continuous distillation with reflux activated with removal of methane, argon, oxygen and nitrogen.
  • Flash distillation is a single-stage continuous operation where a liquid mixture is partially vaporized: the vapor produced and the residual liquid are in equilibrium, which are then separated and removed.
  • the feed is preheated before entering the flash drum. As such, part of the feed may be vaporized.
  • the heated mixture then flows through a pressure-reducing valve to the flash drum, and separation between the vapor and liquid takes place.
  • Flash distillation is used most for separation components that boil at widely different temperature. It is not effective in separating components of comparable volatility or of trace level, which requires the use of continuous distillation with reflux.
  • CO carbon monoxide
  • catalytic conversion of carbon monoxide to carbon dioxide over catalyst may be applied, in which oxygen existing in the gas stream. Then the product CO 2 is removed by caustic and water wet scrubbers.
  • Ozone For high concentrations of NO and NO 2 , ozone could be introduced before wet scrubbing process. Ozone will rapidly oxidize insoluble NO and NO 2 to soluble oxidized compounds such as N 2 O 5 . Ozone is produced on site and on demand by passing oxygen through an ozone generator.
  • organic compounds in gas stream which could be from production plant or from compressor (lubricating oil).
  • organic compounds C 2 + (C 2 + means organic compounds having carbon number over two) can be removed by adsorption in adsorption unit 5 to trace level.
  • Trace CH 4 and C 2 (C 2 means organic compounds having carbon number equal two) can be removed by flash distillation or continuous distillation with reflux in unit 9 along with other light impurities.
  • Present invention removes most part of heavy impurities including but not limited to CO 2 and NO 2 by wet scrubbing absorption unit 2 and controls heavy impurities to trace level in the products by adsorption unit 5 .
  • Most part of Ar, N 2 and O 2 in the N 2 O enriched stream can be separated by releaser 8 as non-condensation gases after liquefying.
  • the flash drum or distillation column with reflux is used to further purify and lower the light impurities concentration such as CO, NO, Ar, CH 4 , N 2 and O 2 to meet the allowed limited amount the product.
  • the system offers the flexibility of producing different grades of N 2 O, such as industrial grade, medicinal grade, and electronic grade with purity ranging from 90% to 99.999 + % to meet different requirements from different customers.
  • the process uses the system shown in FIG. 1 for recovering and purifying N 2 O is described in detail below.
  • the N 2 O enriched off gas stream 1 is fed to the wet scrubbing absorption unit 2 to remove most part of NO 2 and CO 2 .
  • the wet scrubbing unit comprises of caustic scrubber, an acid scrubbing unit, water scrubber and combinations thereof in series. NO 2 and CO 2 will be controlled to preset values at the outlet of the wet scrubbing unit 2 , for example, less than 500 ppm (ppm means 10 ⁇ 6 by volume).
  • one or multi-stage compressor unit 3 is used to boost the gas stream to a preset pressure.
  • the compressed pressure of the gas stream is mainly determined by the pressure requirement for the product and the pressure drop across whole production process.
  • the inlet pressure of the off gas stream from the adipic acid production process is usually about 0.12-0.20 MPa.
  • the pressure needs to be boosted to 2.0 to 5.0 MP, preferably 2.0 to 4.0 MP; more preferably 3.0 MPa to 4.0 MPa before the gas stream enters adsorption unit 5 .
  • the saturation pressure of nitrous oxide N 2 O is 1.801 MPa at temperature of ⁇ 20° C.
  • the operation pressure should be over 3.602 MPa to liquefy N 2 O at ⁇ 20° C., if the inert gas (non-condensation gas such as argon, nitrogen and oxygen) is about 50.0% of the total gas mixture.
  • the pressure drop passing through different operation units should be taken into account too.
  • the gas stream is mixed with another stream (vapor) coming from the unit 9 at the inlet of the second stage of the compressor unit 3 (for a compressor has at least two stages).
  • the mixed gas stream then passes through the cold and dry unit 4 .
  • Unit 4 further decreases the temperature and removes condensed water or mist.
  • the adsorption unit 5 comprises at least two adsorption beds.
  • the one- or multi-layer beds are packed with different kind of adsorbents, such as activated carbon, active alumina, and 13X molecular sieve.
  • the adsorption unit 5 removes moisture, CO 2 and NO 2 to a requisite level, and removes trace organic compounds which probably come from the off gas stream or compressor lubricant.
  • the adsorption unit can also be used to remove trace hydrocarbons C 2 + .
  • inorganic molecular sieve could be used to replace activated carbon to remove trace organic compounds for safety reason.
  • two parallel adsorption beds can be alternately used for continuous operation: one is in adsorption, another one is in regeneration.
  • the adsorption process is a critical step to lower the concentrations of CO 2 and NO 2 to the requisite values in the product.
  • the gas stream from unit 5 is then stored in a buffer tank unit 6 .
  • the liquefier in the liquefaction unit 7 will partially liquefy the gas stream from unit 6 .
  • the two phase fluid stream containing both gas and liquid from the liquefaction unit 7 is fed to the releaser unit 8 .
  • Unit 8 separates the non-condensation gas, mainly argon, nitrogen and oxygen with trace CO, NO and methane.
  • the non-condensation gas is then sent (or released) back to adsorption unit 5 to regenerate the spent adsorption beds (purging and cooling down).
  • the liquid mixture from the bottom of the releaser unit 8 is fed to distillation unit 9 , the flash drum or distillation column with reflux.
  • the light hydrocarbons methane and C 2 which are difficult to be removed completely by adsorption, can be removed by flash distillation along with other light impurities such as CO and NO in unit 9 .
  • a vapor containing N 2 O over 90% by volume and non-condensation gas from unit 9 is sent (or recycled) back to the second stage of the compressor 3 .
  • the liquid phase that is the purified liquid N 2 O, from the bottom of unit 9 is sent to unit 10 for storage or distribution.
  • Purpose of the heat exchange between the liquid mixture out of the releaser unit 8 and the gas stream from adsorption unit 5 are to increase the temperature of the liquid mixture to feed to unit 9 and to lower the temperature for the gas stream for liquefaction.
  • the gas stream is stored in buffer tank 6 and is liquefied by refrigerator in unit 7 .
  • the temperature of the liquid mixture after heat exchange is a critical parameter to determine the light impurities level in the product. How much of light impurities is removed to the vapor (and remained in the liquid) depends on the condition of the feed to unit 9 , i.e. how much of the feed is entering as vapor state, which in turn is controlled by the amount of heating. In other words, the degree of vaporization affects the concentration (distribution) of light impurities in vapor phase and liquid phase.
  • the N 2 O enriched off gas stream with pressure 0.15 MPa is fed to the caustic wet scrubber to remove most part of NO 2 and CO 2 .
  • the water scrubber is added to clean caustic droplets from the gas stream.
  • the pressure drop across the two wet scrubbings is about 0.05 MPa.
  • NO2 and CO 2 are to be less than 500.0 ppm after scrubbing process.
  • the pumps are used to feed the caustic solution and water to the upper part of the scrubbers, respectively.
  • the gas stream is mixed with the vapor (95.6% N 2 O by volume with pressure 1.0 MPa and temperature ⁇ 39.7° C.) from the distillation unit 9 rights before the second stage of the compressor.
  • Two-stage compressor is adopted to boost the pressure from 0.10 MPa to 1.0 MPa (first stage) and to 3.04 MPa (second stage).
  • the cooling agent is water for cooling down the compressed gas stream from 139.2° C. to 38.0° C.
  • Cool and dry unit is used to cool down the gas to 10° C. and remove the condensation water.
  • One heat exchanger is used to further lower the temperature of the gas stream to ⁇ 1.0° C. through heat exchange between the gas stream and the non-condensation gas from the releaser unit 8 (32.6% N 2 O by volume with pressure 1.1 MPa and temperature ⁇ 66.1° C.).
  • the non-condensation gas after the heat exchange is then used for regeneration of the spent adsorption beds (purge, regeneration, heating, and cooling) in the adsorption unit 5 .
  • the gas stream from buffer tank 6 is used to repressurize the spent adsorption bed for next cycle.
  • the two parallel adsorption beds are multi-layers beds packed with activated carbon, active alumina, 13X molecular sieve for the removal of organic compounds (C 2 + ), moisture, carbon dioxide, nitrogen dioxide, respectively.
  • the critical parameters for the gas stream out of the adsorption bed are: the concentration of CO 2 is less than 1.0 ppm and NO 2 is less than 0.5 ppm.
  • the two parallel adsorption beds are in swing operation; one is in adsorption, another one is in regeneration.
  • the gas stream out of the adsorption bed with ⁇ 1° C. is fed to another heat exchanger, wherein the gas stream undergoes the heat exchange with the saturated liquid from the bottom of the releaser unit 8 to heat and increase the temperature to a preset value (from ⁇ 66.4° C. to ⁇ 39.7° C.) for flash evaporation at the distillation unit 9 .
  • the liquid temperature (or the pressure) is critical to the successful operation of the flash drum.
  • the gas stream with ⁇ 29.2° C. is stored in the buffer tank 6 .
  • the gas stream from the buffer tank 6 is then sent to the liquefaction unit 7 and is liquefied by refrigerator in the liquefaction unit 7 .
  • the two phase fluid stream from the liquefaction unit 7 is fed to the releaser unit 8 to separate and remove the non-condensation gas, mainly nitrogen, argon, and oxygen with trace of CO, NO and organic compounds such as methane.
  • the non-condensation gas is fed to the adsorption unit to cool down the gas stream.
  • the liquid stream from the bottom of the releaser unit 8 with increased temperature is sent to the flash drum.
  • the flash fraction (about 60%) depends on the operation conditions and the restricted concentration for the impurities in the final products.
  • the vapor with trace of non-condensation gas is fed and mixed with the gas stream in the second stage of the compressor.
  • the liquid phase is the product and is sent to liquid tank unit 10 .
  • the off gas stream from an adipic acid production plant which uses nitric acid as oxidant, usually contains 28.0-55.0% nitrous oxide by volume.
  • Compositions from an off gas stream from a typical adipic acid plant was listed in the Table 1. The similar off gas stream was used in the following simulations.
  • N 2 O enriched off gas stream from the said adipic acid plant was mixed with air first to produce dilute HNO 3 by oxidation of NOx and passing through 3 sequential water scrubbers, then the gas stream was sent into the droplet separator to separate the droplet and aerosols.
  • the analytical result for the off-gas stream shown in Table 1 was from the off gas stream after the droplet separator in the plant with dry base.
  • the NO was the main component in NOx in Table 1.
  • the initial fraction of N 2 O, in the gas stream was 47.42%, raised to 49.10% after wet scrubbing, to 54.66% after adsorption, to 98.81% in liquid phase in the releaser unit, and to 99.92% after the flash drum.
  • the 99.92% N 2 O liquid was stored as the product.
  • the N 2 O recovery ratio was 53.53%, where the recovery ratio was defined as the N 2 O mass fraction in the product to that in the off gas.
  • the initial fraction was 6.50%, reduced to 0.27% by wet scrubbing, then further reduced to 0.51 ppm by adsorption. After flash, the final fraction in the product was 0.94 ppm.
  • CO the initial fraction was 0.21%. CO was difficult to be removed effectively by wet scrubbing and adsorption. Very small amount of CO could dissolve in water. CO can be removed by adsorption, however it was not economic compared to flash distillation. CO was released as non-condensation gas in releaser and reduced to 45.6 ppm, and further reduced to 2.46 ppm after flash in the product.
  • the initial fraction was 50.0 ppm. NO was difficult to be reduced by wet scrubbing and adsorption. Very small amount of NO could dissolve in water. NO was released as non-condensation gas in the releaser and reduced to 6.0 ppm, and reduced to 0.944 ppm after flash in the product.
  • the initial fraction was 999.0 ppm; no matter how much water it contains, H 2 O in the gas stream will become nearly saturation after scrubbing. After cool and dry unit, the fraction of water will be reduced, and water was further reduced to 0.685 ppm by adsorption, the fraction of water in the product was about 2.75 ppm.
  • the initial fraction was 3.90%.
  • O 2 was difficult to be reduced by wet scrubbing and adsorption (very small amount of O 2 could dissolve in water), O 2 was released as non-condensation gas in the releaser and reduced to 0.22%, and further reduced to 240 ppm after flash in the product.
  • N 2 the initial fraction was 41.86%. N 2 was difficult to be reduced by wet scrubbing and adsorption (very small amount of N 2 could dissolve in water), N 2 was released as non-condensation gas in the releaser and reduced to 0.97%, and further reduced to 542.0 ppm after flash in the product.
  • critical parameters for successful operation includes the compressor discharge pressure, the CO 2 and H 2 O concentrations after adsorption, the temperature and pressure in liquefier, the inlet temperature and pressure in the flash drum.
  • the initial fraction was 47.42%, after wet scrubbing, was raised to 49.10%, then to 56.52% after adsorption, to 98.81% after releaser unit, and to 99.9993% after distillation, and was stored as the product.
  • the N 2 O recovery ratio was 52.82%.
  • the initial fraction was 6.50% and was reduced to 0.27% by wet scrubbing, then further reduced to 0.485 ppm by adsorption.
  • the final fraction in product was 0.781 ppm.
  • the initial fraction was 0.21%. CO was released as non-condensation gas in the releaser and reduced to 45.3 ppm, and further reduced to nearly zero ppm in the product.
  • the initial fraction was 50.0 ppm. NO was released as non-condensation gas in the releaser and reduced to 6 ppm, and becomes nearly zero ppm in the product.
  • the initial fraction was 1000 ppm. After cool and dry unit, it will be reduced, and further to 1.46 ppm after adsorption, the water fraction in the product was about 6.23 ppm.
  • the initial fraction was 3.9%.
  • O 2 was released as non-condensation gas in the releaser and reduced to 0.22%, and further reduced to about zero ppm after distillation.
  • N 2 the initial fraction was 41.86%. N 2 was released as non-condensation gas in the releaser and reduced to 0.96%, and further reduced to about zero ppm after distillation.
  • critical parameters for successful operation includes the compressor discharge pressure, the outlet concentration of CO 2 and H 2 O after adsorption, the outlet temperature out of liquefier, the pressure in releaser unit, the theoretical tray number of distillation column and the reflux ratio, column operation pressure, and inlet feed temperature to the distillation column.
  • a system comprises a compressor, cool and dry unit, adsorption unit, liquefier and releaser, and flash drum, was used to produce 99.9% N 2 O without wet scrubbing process. This was a simplified process which can produce qualified product.
  • N 2 O the initial fraction was 47.42%.
  • N 2 O was raised to 54.89% after adsorption, to 98.80% after the releaser unit, to 99.91% after the flash drum.
  • the N 2 O recovery ratio was 53.53%.
  • the initial fraction was 6.50% and was reduced to 63.3 ppm by adsorption. After flash, the final fraction in product was 112.0 ppm.
  • the length of adsorption column should be longer to handle the removing of CO 2 without scrubbing unit.
  • the initial fraction was 0.21%, CO may be removed by adsorption; flash process was adopted in this process. CO was released as non-condensation gas in the releaser and reduced to 45.5 ppm, and further reduced to 2.37 ppm in the product.
  • the initial fraction was 50.0 ppm. NO was released as non-condensation gas in the releaser and reduced to 6.0 ppm, and to be 0.91 ppm in the product.
  • the initial fraction was 1000 ppm. After cool and dry unit, the fraction will be reduced, and to be 0.097 ppm after adsorption. The water fraction in the product was about 0.39 ppm.
  • the initial fraction was 3.9%.
  • O 2 may be removed by adsorption; flash process was adopted in this process.
  • O 2 was released as non-condensation gas in the releaser and reduced to 0.22%, and further reduced to about 234 ppm in the flash drum.
  • N 2 the initial fraction was 41.86%. N 2 could be removed by adsorption; flash was adopted in this process. N 2 was released as non-condensation gas in the releaser and reduced to 0.97%, and further reduced to 523.0 ppm in the flash drum.
  • critical parameters for successful operation includes the compressor discharge pressure, the outlet concentration of CO 2 and H 2 O from adsorption, the outlet temperature out of the liquefier, the releaser pressure, the operation pressure and the feed temperature to the flash drum.
  • distillation was not effective to remove CO 2 from N 2 O.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Environmental & Geological Engineering (AREA)
  • Emergency Medicine (AREA)
  • Inorganic Chemistry (AREA)
  • Biomedical Technology (AREA)
  • General Engineering & Computer Science (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Drying Of Gases (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Gas Separation By Absorption (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Treating Waste Gases (AREA)

Abstract

This invention is aimed at recovering and purifying nitrous oxide from the gas stream containing N2O to produce different grade of nitrous oxide by combination of unit operation including, but not limited to, wet scrubbing, adsorption, liquefaction, flash distillation or continuous distillation with reflux.

Description

    BACKGROUND OF THE INVENTION
  • The classical approach to manufacturing nitrous oxide (N2O) is via ammonium nitrate decomposition. Nitrous oxide is a by-product in nitric acid production process. Nitrous oxide is also produced in large volumes as a by-product in the synthesis of adipic acid; one of the two reactants used in nylon manufacture.
  • Adipic acid is a dicarboxylic acid manufactured by a two-stage process. The first stage of manufacturing usually involves the oxidation of cyclohexane to form a mixture of cyclohexanone and cyclohexanol. The second stage involves oxidizing the mixture with nitric acid to produce adipic acid. Nitrous oxide is generated as a by-product of the nitric acid oxidation stage.
  • On the basis of experiments, the overall reaction stoichiometry for N2O production in the preparation of adipic acid was estimated at approximately 0.3 kg of N2O per kilogram of the product.
  • With such large volume, the by-product from the synthesis of adipic acid can become a major commercial source for N2O. However, recovering N2O from the off gas stream from the synthesis of adipic acid requires the removal of various impurities; such as, higher oxides of nitrogen, carbon dioxide, carbon monoxide, nitrogen, oxygen, argon, moisture, and organic impurities. Currently much of the off gas stream is decomposed before release for environmental protection.
  • Work has been done either to recover and purify nitrous oxide for different purposes or to deplete nitrous oxide from industrial off gas streams for environmental protection.
  • A conventional nitrous oxide purification system and process is described in EP 0636576 A1. More specifically, the processes starts with compressing a nitrous oxide feed gas that contains nitrogen, oxygen and water in a compressor. A portion of nitrous oxide, free of water, is conveyed to a heat exchanger where it is condensed to a liquid. The liquid gas is directed to the top of a rectification column for further condensation and returned to the bottom of the rectification column. A second mixed gas-liquid nitrous oxide portion is directed from the heat exchanger to the bottom of the rectifying column as a heating source to vaporize the liquid. The same nitrous oxide is then directed out of the bottom of the column and introduced to the middle of the column. The final product is taken from the bottom of the column having the requisite purity.
  • One of the disadvantages associated with such a system is that it is complex, as it includes three heat exchangers and two rectification sections. In addition, the compressor employed is potentially a secondary source of contamination due to the lubricating oils needed to operate it.
  • An invention relates to processes for the separation of nitrous oxide from feed streams containing mixtures thereof with oxygen and nitrogen is described in U.S. Pat. No. 6,080,226. In the process, the feed stream comprising nitrous oxide is purified by a pressure swing adsorption (PSA) process employing a co-purge with an oxygen-lean stream to produce a high purity nitrous oxide stream. Nitrous oxide is selectively adsorbed, thus the first effluent stream contains N2 and O2. The high purity nitrous oxide stream can be incorporated in a complex for the production of adipic acid to recover nitrous oxide from a dilute waste stream and pass the recovered nitrous oxide to a process for the production of phenol from an aromatic hydrocarbon. Unreacted nitrous oxide from the phenol production step acid can be recovered in a second, or vent PSA step, and combined with the recovery of byproduct nitrous oxide waste streams from the production of adipic for the overall recovery of nitrous oxide, thereby significantly reducing nitrous oxide emissions from the production of adipic acid.
  • U.S. Pat. No. 6,348,083 B1 teaches an installation and a process for the recovery and/or purification of the nitrous oxide contained in a waste gas. The waste gas contains at least one portion of the nitrous oxide (N2O) and at least one other gaseous compound. The process further teaches that: (a) at least one nitrous oxide portion contained in the flow of waste gas is separated by permeation, and (b) at least a portion of the gaseous nitrous oxide separated in step (a) is recovered. Preferably, the source of the flow of waste gas is an industrial unit using an industrial process giving off the waste gas, preferably a unit for the production of adipic acid, a unit for the production of nitrous oxide, a unit for the production of glycoxylic acid or a unit for the production of nitric acid.
  • A disadvantage associated with the systems described above and other related art systems is that they are not capable of removing carbon dioxide impurity. It is well known to those skilled in the purification art that carbon dioxide is one of the most difficult impurities to be removed from a gas containing nitrous oxide.
  • Additionally, although useful in removing nitrogen, oxygen, hydrogen, carbon monoxide, and water impurities, the systems described above and other related art systems are not capable of removing other impurities such as ammonia, and methane. Carbon monoxide, ammonia, methane and hydrogen are light impurities.
  • U.S. Pat. No. 6,370,911 B1 provided a system and method for nitrous oxide purification, wherein the nitrous oxide product can be used in semiconductor manufacturing. The system and process involve a first sub-system having a purification tank for holding a liquefied nitrous oxide; a vaporizer in communication with the purification tank to receive, vaporize and convey a nitrous oxide vapor back to the purification tank; a distillation column disposed on a distal end of the purification tank to receive a nitrous oxide vapor; a condenser disposed on the distillation column, wherein light impurities are removed and a nitrous oxide devoid of light impurities is conveyed and converted into vapor in said vaporizer. A second sub-system having a first dry bed vessel is disposed downstream of the vaporizer to receive the vapor and reacting the acid gas therein; a second dry bed vessel downstream of the said first dry bed vessel for removing water and ammonia in the vapor. A third sub-system having a product tank wherein the purified nitrous oxide vapor is re-condensed; a transferring manifold including a liquid pump, liquid filter and a bypass for distributing the purified nitrous oxide to holding vessels. The invention allows for the removal of impurities and particulates, such that an ultra pure nitrous oxide product having a purity of 99.9998% or higher can be delivered to a point of use.
  • In this invention, a new N2O production scheme will be provided to purify the off gas stream or a waste gas flow containing nitrous oxide, by combination of wet scrubber absorption process, adsorption process, flash drum, and/or cryogenic distillation processes with reflux. The invention produces different levels of grade of nitrous oxide for different useful purposes.
  • BRIEF SUMMARY OF THE INVENTION
  • In one aspect, the invention provides a system for producing different grade of N2O, the system comprising:
  • a gas stream containing N2O and impurities comprising light and heavy impurities, moisture or water, and organic compounds;
  • a wet scrubbing absorption unit to remove the heavy impurities from the gas stream;
  • a compressor having at least one stage of compression to compress the gas stream to a preset pressure;
  • a cooling and dry unit to remove the moisture or water from the gas stream;
  • an adsorption unit to remove the heavy impurities, the moisture or water and the organic compounds from the gas stream;
  • a buffer tank to store the gas stream out from the adsorption unit;
  • a liquefaction unit to at least partially liquefy the gas stream out from the buffer tank to a gas mixture containing N2O and non-condensation gas, and a liquid mixture;
  • a releaser to release the gas mixture back to the adsorption unit and to pass the liquid mixture to a distillation unit;
  • the distillation unit to remove the light impurities and the organic compounds from the liquid mixture through distillation; release a vapor phase gas containing N2O and non-condensation gas back to the compressor; and generate purified liquid N2O; and
  • a tank to store and distribute the purified liquid N2O;
  • wherein
      • the wet scrubbing absorption unit comprising a caustic scrubbing unit, an acid scrubbing unit, water scrubbing unit, or combinations thereof;
      • the distillation unit comprising at least one flash drum, at least one distillation column with reflux, or combinations thereof.
  • In another aspect, the invention provides another system for producing different grade of N2O, the system comprising:
  • a gas stream containing N2O and impurities comprising light and heavy impurities, moisture or water, and organic compounds;
      • a compressor having at least one stage of compression to compress the gas stream to a preset pressure;
  • a cooling and dry unit to remove the moisture or water from the gas stream;
  • an adsorption unit to remove the heavy impurities, the moisture or water and the organic compounds from the gas stream;
  • a buffer tank to store the gas stream from the adsorption unit;
  • a liquefaction unit to at least partially liquefy the gas stream out from the buffer tank to a gas mixture containing N2O and non-condensation gas, and a liquid mixture;
  • a releaser to release the gas mixture back to the adsorption unit and to pass the liquid mixture to a distillation unit;
  • the distillation unit to remove the light impurities and the organic compounds from the liquid mixture through distillation; release a vapor phase gas containing N2O and non-condensation gas back to the compressor; and generate purified liquid N2O; and
  • a tank for store and distribute the purified liquid N2O;
  • wherein the distillation unit comprising at least one flash drum, at least one distillation column with reflux, or combinations thereof.
  • In yet another aspect, the invention provides a process of recovering and purifying nitrous oxide (N2O), comprising
  • providing a gas stream containing N2O and impurities comprising light and heavy impurities, moisture or water, and organic compounds;
  • removing the heavy impurities from the gas stream through wet scrubbing absorption;
  • compressing the gas stream to a preset pressure by a compressor having at least one-stage of compression;
  • removing the moisture or water from the compressed gas stream through a cooling and dry unit;
  • passing the gas stream through an adsorption unit to remove the heavy impurities, the moisture or water and the organic compounds;
  • at least partially liquefying the gas stream to obtain a gas mixture containing N2O and non-condensation gas, and a liquid mixture,
      • releasing the gas mixture back to the adsorption unit;
  • conveying the liquid mixture to a distillation unit and removing the light impurities and the organic compounds from the liquid mixture, and generating purified liquid N2O;
  • releasing a vapor phase gas containing N2O and non-condensation gas back to the compressor; and
      • conveying the purified liquid N2O to a tank for storage and distribution;
      • wherein the wet scrubbing absorption removes the heavy impurities to less than 500 ppm.
  • In yet another aspect, the invention provides a process of recovering and purifying nitrous oxide (N2O), comprising
  • providing a gas stream containing N2O and impurities comprising light and heavy impurities, moisture or water, and organic compounds;
  • compressing the gas stream to a preset pressure by a compressor having at least one-stage of compression;
  • removing the moisture or water from the compressed gas stream through a cooling and dry unit;
  • passing the gas stream through an adsorption unit to remove the heavy impurities, the moisture or water and the organic compounds;
  • at least partially liquefying the gas stream to obtain a gas mixture containing N2O and non-condensation gas, and a liquid mixture,
  • releasing the gas mixture back to the adsorption unit;
  • conveying the liquid mixture to a distillation unit and removing the light impurities and the organic compounds from the liquid mixture, and generating purified liquid N2O;
  • releasing a vapor phase gas containing N2O and non-condensation gas back to the compressor; and
  • conveying the purified liquid N2O to a tank for storage and distribution.
  • The gas stream contains 5.0 to 99.9%; preferably 25.0 to 60.0% N2O by volume. The different grade of purified N2O ranges from 99.9% to 99.9999% purity.
  • The light impurities is selected from the group consisting of N2, O2, NO, CO, Ar, H2, methane, C2 and combinations thereof; and heavy impurities is selected from the group consisting of CO2, NO2, CO, H2O, C2 + and combinations thereof, the organic compound is selected from the group consisting of methane, C2 +, CH4, C2, and combinations thereof; and the non-condensation gas is selected from the group consisting of Ar, N2, O2, CO, NO, methane and combinations thereof.
  • The gas mixture is used to regenerate the adsorption unit. The adsorption unit comprising at least two parallel adsorption beds and each bed having at least one layer adsorbents; and two parallel adsorption beds are alternately used in continuous swing operation. The distillation unit comprising at least one flash drum, at least one distillation column, or combinations thereof.
  • BRIEF DESCRIPTION OF SEVERAL VIEWS OF THE DRAWINGS
  • In the accompanying drawings forming a material part of this description, there are shown:
  • FIG. 1 illustrates a schematic diagram of a system for recovering and purifying N2O from the off gas stream containing N2O.
  • FIG. 2( a) shows phase diagram of N2O and CO2 at 1.0 MPa.
  • FIG. 2( b) shows the phase diagram of N2O and CO2 at 2.5 MPa.
  • DETAILED DESCRIPTION OF THE INVENTION
  • This invention is aimed at recovering and purifying nitrous oxide (N2O) from a N2O containing gas stream to produce different purification grades of nitrous oxide. The source of the gas stream can be from any process, such as, from an industrial process. A good example of an industrial process is the off gas stream from the production of adipic acid.
  • The source of the gas stream contains 5.0 to 99.9% nitrous oxide by volume, preferably 20 to 70.0% by volume of nitrous oxide, more preferably 25.0 to 60.0% of nitrous oxide by volume.
  • The off gas stream from adipic acid production plant, which uses nitric acid as oxidant, usually contains 28.0-55.0% nitrous oxide by volume.
  • The main impurities in the N2O enriched stream include but not limited to, N2, O2, H2, Ar, NOx (NO and NO2), CO, CO2, moisture, methane, and other trace organic compounds.
  • The impurities having molecular mass being equal or bigger than N2O, are hereinafter referred to as heavy impurities. The impurities having molecular mass being less than N2O, are hereinafter referred to as light impurities.
  • The light impurities include but not limited to N2, O2, NO, CO, Ar, H2. The heavy impurities include but not limited to CO2, NO2, H2O. The organic compounds include but not limited to C2 +, CH4 and C2. Generally, methane and C2 incorporate into the light impurities, while C2 + to heavy impurities.
  • FIG. 1 illustrates a schematic diagram of a system for recovering and purifying N2O in accordance with exemplary embodiments of present invention. The system for recovering and purifying nitrous oxide comprises ten units. The input gas to the system is called “off gas stream”since it is the off gas stream from other process, such as, from adipic acid production plant.
  • The units 2, 3 and 4 in FIG. 1 are corresponding to the wet scrubbing absorption unit, the compressor unit, and the cool and dry unit, respectively. Those three units are mainly to remove heavy impurities and moisture from the off gas stream 1. The heavy impurities can be removed by wet scrubbing; and moisture can be removed by cool and dry unit after boosting pressure.
  • The units 5 and 6 in FIG. 1 are corresponding to an adsorption unit and a buffer tank, respectively. The adsorption unit 5 is to further remove heavy impurities, moisture and organic compounds to trace levels. The gas stream from unit 5 is store in the buffer tank 6.
  • The liquefaction unit 7 in FIG. 1 is to at least partially liquefy the process gas stream from the buffer tank 6 into a gas mixture containing N2O gas and non-condensation gas and a liquid mixture. The releaser unit 8 releases the gas mixture back to unit 5. The gas mixture is used as the regeneration gas in unit 5. Unit 8 also feeds the liquid mixture to the distillation unit 9.
  • The non-condensation gas includes but not limited to Ar, N2, O2, CO, NO, methane. Thus, the impurities in the stream are removed by releasing them as part of the non-condensation gas.
  • The distillation unit 9 in FIG. 1 comprises at least one flash drum, at least one distillation column with reflux, or combinations of a flash drum, or flash drums and a distillation column with reflux, or distillation columns with reflux. Unit 9 removes light impurities through distillation for producing nitrous oxide having the predefined purity. Unit 9 also releases or recycles a vapor phase gas containing N2O and non-condensation gas to unit 3.
  • The storage tank unit 10 in FIG. 1 stores and distributes the final purified nitrous oxide with different purity grades from unit 9.
  • In this system, heavy impurities such as NO2 and CO2 are removed by combination of using absorption from caustic and water wet scrubbers in the wet scrubbing absorption unit 2; and adsorption from the adsorption unit 5. NO2 and CO2 can be removed by using adsorption unit 5 alone.
  • The molecular mass of carbon dioxide is almost the same as nitrous oxide (CO2: 44.01 and N2O: 44.01). The boiling point difference is only 1.86° C. (N2O: −38.27° C. and CO2: −40.13° C.) at 1.0 MPa (1 MPa=106 Pa). It is hard and not effective to separate CO2 from N2O by distillation. CO2 concentration level in the final product should be controlled by wet scrubbing and adsorption processes along with the removal of other heavy impurities such as NO2.
  • Due to the molecular mass of CO and NO being less than nitrous oxide, the light impurities CO and NO are removed through the combination of the liquefaction unit 7 and the releaser unit 8, after liquefied as part of the non-condensation gases. They can be further controlled to trace level by flash distillation or continuous distillation with reflux companied with removal of methane, argon, oxygen and nitrogen.
  • Flash distillation is a single-stage continuous operation where a liquid mixture is partially vaporized: the vapor produced and the residual liquid are in equilibrium, which are then separated and removed. The feed is preheated before entering the flash drum. As such, part of the feed may be vaporized. The heated mixture then flows through a pressure-reducing valve to the flash drum, and separation between the vapor and liquid takes place.
  • Flash distillation is used most for separation components that boil at widely different temperature. It is not effective in separating components of comparable volatility or of trace level, which requires the use of continuous distillation with reflux.
  • For high concentration of carbon monoxide (CO), catalytic conversion of carbon monoxide to carbon dioxide over catalyst may be applied, in which oxygen existing in the gas stream. Then the product CO2 is removed by caustic and water wet scrubbers.
  • For high concentrations of NO and NO2, ozone could be introduced before wet scrubbing process. Ozone will rapidly oxidize insoluble NO and NO2 to soluble oxidized compounds such as N2O5. Ozone is produced on site and on demand by passing oxygen through an ozone generator.
  • There might be organic compounds in gas stream, which could be from production plant or from compressor (lubricating oil). In this system, organic compounds C2 + (C2 + means organic compounds having carbon number over two) can be removed by adsorption in adsorption unit 5 to trace level. Trace CH4 and C2 (C2 means organic compounds having carbon number equal two) can be removed by flash distillation or continuous distillation with reflux in unit 9 along with other light impurities.
  • Present invention removes most part of heavy impurities including but not limited to CO2 and NO2 by wet scrubbing absorption unit 2 and controls heavy impurities to trace level in the products by adsorption unit 5. Most part of Ar, N2 and O2 in the N2O enriched stream can be separated by releaser 8 as non-condensation gases after liquefying. The flash drum or distillation column with reflux is used to further purify and lower the light impurities concentration such as CO, NO, Ar, CH4, N2 and O2 to meet the allowed limited amount the product.
  • The system offers the flexibility of producing different grades of N2O, such as industrial grade, medicinal grade, and electronic grade with purity ranging from 90% to 99.999+% to meet different requirements from different customers.
  • The process uses the system shown in FIG. 1 for recovering and purifying N2O is described in detail below.
  • The N2O enriched off gas stream 1 is fed to the wet scrubbing absorption unit 2 to remove most part of NO2 and CO2. The wet scrubbing unit comprises of caustic scrubber, an acid scrubbing unit, water scrubber and combinations thereof in series. NO2 and CO2 will be controlled to preset values at the outlet of the wet scrubbing unit 2, for example, less than 500 ppm (ppm means 10−6 by volume).
  • After cleaning water droplets from the gas stream, one or multi-stage compressor unit 3 is used to boost the gas stream to a preset pressure.
  • Higher pressure is required for the disclosed system. If the pressure of the incoming gas stream is low, the pressure needs to be boosted before the gas stream enters the adsorption unit 5. The compressed pressure of the gas stream is mainly determined by the pressure requirement for the product and the pressure drop across whole production process.
  • For example, the inlet pressure of the off gas stream from the adipic acid production process is usually about 0.12-0.20 MPa. The pressure needs to be boosted to 2.0 to 5.0 MP, preferably 2.0 to 4.0 MP; more preferably 3.0 MPa to 4.0 MPa before the gas stream enters adsorption unit 5.
  • The saturation pressure of nitrous oxide N2O is 1.801 MPa at temperature of −20° C. The operation pressure should be over 3.602 MPa to liquefy N2O at −20° C., if the inert gas (non-condensation gas such as argon, nitrogen and oxygen) is about 50.0% of the total gas mixture. The pressure drop passing through different operation units should be taken into account too.
  • The gas stream is mixed with another stream (vapor) coming from the unit 9 at the inlet of the second stage of the compressor unit 3 (for a compressor has at least two stages). The mixed gas stream then passes through the cold and dry unit 4. Unit 4 further decreases the temperature and removes condensed water or mist.
  • The adsorption unit 5 comprises at least two adsorption beds. The one- or multi-layer beds are packed with different kind of adsorbents, such as activated carbon, active alumina, and 13X molecular sieve. The adsorption unit 5 removes moisture, CO2 and NO2 to a requisite level, and removes trace organic compounds which probably come from the off gas stream or compressor lubricant.
  • The adsorption unit can also be used to remove trace hydrocarbons C2 +.
  • In practice, inorganic molecular sieve could be used to replace activated carbon to remove trace organic compounds for safety reason. In addition, two parallel adsorption beds can be alternately used for continuous operation: one is in adsorption, another one is in regeneration. The adsorption process is a critical step to lower the concentrations of CO2 and NO2 to the requisite values in the product.
  • The gas stream from unit 5 is then stored in a buffer tank unit 6.
  • At preset pressure and temperature, the liquefier in the liquefaction unit 7 will partially liquefy the gas stream from unit 6. The two phase fluid stream containing both gas and liquid from the liquefaction unit 7 is fed to the releaser unit 8.
  • Unit 8 separates the non-condensation gas, mainly argon, nitrogen and oxygen with trace CO, NO and methane. The non-condensation gas is then sent (or released) back to adsorption unit 5 to regenerate the spent adsorption beds (purging and cooling down). The liquid mixture from the bottom of the releaser unit 8 is fed to distillation unit 9, the flash drum or distillation column with reflux.
  • The light hydrocarbons methane and C2, which are difficult to be removed completely by adsorption, can be removed by flash distillation along with other light impurities such as CO and NO in unit 9.
  • A vapor containing N2O over 90% by volume and non-condensation gas from unit 9 is sent (or recycled) back to the second stage of the compressor 3. The liquid phase that is the purified liquid N2O, from the bottom of unit 9 is sent to unit 10 for storage or distribution.
  • There are some heat exchangers and mixers (not shown in FIG. 1) for energy recovery and cooling or heating the gas stream in the process. The gas stream from every stage of compressor will be cooled by cooling water or other chilled media; the compressors in both cool and dry unit and the liquefaction unit are also cooled by cooling water or other chilled media too. The non-condensation gas and the liquid out of the releaser unit 8 and unit 9 will exchange heat with the gas stream in the process.
  • Purpose of the heat exchange between the liquid mixture out of the releaser unit 8 and the gas stream from adsorption unit 5 are to increase the temperature of the liquid mixture to feed to unit 9 and to lower the temperature for the gas stream for liquefaction. After heat exchange, the gas stream is stored in buffer tank 6 and is liquefied by refrigerator in unit 7. The temperature of the liquid mixture after heat exchange is a critical parameter to determine the light impurities level in the product. How much of light impurities is removed to the vapor (and remained in the liquid) depends on the condition of the feed to unit 9, i.e. how much of the feed is entering as vapor state, which in turn is controlled by the amount of heating. In other words, the degree of vaporization affects the concentration (distribution) of light impurities in vapor phase and liquid phase.
  • As an example, the procedure to obtain a 99.9% purity nitrous oxide production is describing in detail.
  • The N2O enriched off gas stream with pressure 0.15 MPa is fed to the caustic wet scrubber to remove most part of NO2 and CO2. The water scrubber is added to clean caustic droplets from the gas stream. The pressure drop across the two wet scrubbings is about 0.05 MPa. As the control parameters, NO2 and CO2 are to be less than 500.0 ppm after scrubbing process. The pumps are used to feed the caustic solution and water to the upper part of the scrubbers, respectively.
  • After separation of the caustic droplets, the gas stream is mixed with the vapor (95.6% N2O by volume with pressure 1.0 MPa and temperature −39.7° C.) from the distillation unit 9 rights before the second stage of the compressor.
  • Two-stage compressor is adopted to boost the pressure from 0.10 MPa to 1.0 MPa (first stage) and to 3.04 MPa (second stage). The cooling agent is water for cooling down the compressed gas stream from 139.2° C. to 38.0° C.
  • Cool and dry unit is used to cool down the gas to 10° C. and remove the condensation water.
  • One heat exchanger is used to further lower the temperature of the gas stream to −1.0° C. through heat exchange between the gas stream and the non-condensation gas from the releaser unit 8 (32.6% N2O by volume with pressure 1.1 MPa and temperature −66.1° C.). The non-condensation gas after the heat exchange is then used for regeneration of the spent adsorption beds (purge, regeneration, heating, and cooling) in the adsorption unit 5. The gas stream from buffer tank 6 is used to repressurize the spent adsorption bed for next cycle.
  • The two parallel adsorption beds are multi-layers beds packed with activated carbon, active alumina, 13X molecular sieve for the removal of organic compounds (C2 +), moisture, carbon dioxide, nitrogen dioxide, respectively. The critical parameters for the gas stream out of the adsorption bed are: the concentration of CO2 is less than 1.0 ppm and NO2 is less than 0.5 ppm. The two parallel adsorption beds are in swing operation; one is in adsorption, another one is in regeneration.
  • The gas stream out of the adsorption bed with −1° C. is fed to another heat exchanger, wherein the gas stream undergoes the heat exchange with the saturated liquid from the bottom of the releaser unit 8 to heat and increase the temperature to a preset value (from −66.4° C. to −39.7° C.) for flash evaporation at the distillation unit 9.
  • The liquid temperature (or the pressure) is critical to the successful operation of the flash drum. After the last heat exchange, the gas stream with −29.2° C. is stored in the buffer tank 6. The gas stream from the buffer tank 6 is then sent to the liquefaction unit 7 and is liquefied by refrigerator in the liquefaction unit 7.
  • The two phase fluid stream from the liquefaction unit 7 is fed to the releaser unit 8 to separate and remove the non-condensation gas, mainly nitrogen, argon, and oxygen with trace of CO, NO and organic compounds such as methane. The non-condensation gas is fed to the adsorption unit to cool down the gas stream. The liquid stream from the bottom of the releaser unit 8 with increased temperature is sent to the flash drum. The flash fraction (about 60%) depends on the operation conditions and the restricted concentration for the impurities in the final products. The vapor with trace of non-condensation gas is fed and mixed with the gas stream in the second stage of the compressor. The liquid phase is the product and is sent to liquid tank unit 10.
  • A person skilled in the art would understand that some detectors should be installed to monitor and test the concentrations, temperature, flow rate and pressure.
  • EXAMPLES
  • Based on the database and thermodynamic method, a series of simulations have been done by the commercial software ASPEN Plus.
  • The off gas stream from an adipic acid production plant, which uses nitric acid as oxidant, usually contains 28.0-55.0% nitrous oxide by volume. Compositions from an off gas stream from a typical adipic acid plant was listed in the Table 1. The similar off gas stream was used in the following simulations.
  • It should be pointed that the N2O enriched off gas stream from the said adipic acid plant was mixed with air first to produce dilute HNO3 by oxidation of NOx and passing through 3 sequential water scrubbers, then the gas stream was sent into the droplet separator to separate the droplet and aerosols.
  • The analytical result for the off-gas stream shown in Table 1 was from the off gas stream after the droplet separator in the plant with dry base. The NO was the main component in NOx in Table 1.
  • TABLE 1
    Analytical result for the off-gas stream (dry base)
    Results (v/v) Results (v/v)
    Item (Sample 1) (Sample 2) Test Methods
    N2O 47.47% 49.45% GC-ECD*
    N2 41.90% 40.52% GC-TCD**
    NOx*** 68 ppm 78 ppm Nitrogen Oxides Analyzer
    O2 3.90% 3.50% GC-TCD
    CO 0.21% 0.23% GC-TCD
    CO2 6.51% 6.29% GC-TCD
    Hydrocarbons <2 ppm <2 ppm GC
    *GC-ECD: Gas Chromatography- electron capture detector
    **GC-TCD: Gas Chromatography- thermal conductivity detector
    ***NOX: NO, and NO2
  • Example 1 Production of 99.9% Purity N2O
  • In this example, a system comprising wet scrubbing unit, compressor, cool and dry unit, adsorption unit, liquefier, releaser, and flash drum, was used to produce 99.9% N2O.
  • The simulation result was shown in Table 2.
  • The initial fraction of N2O, in the gas stream was 47.42%, raised to 49.10% after wet scrubbing, to 54.66% after adsorption, to 98.81% in liquid phase in the releaser unit, and to 99.92% after the flash drum. The 99.92% N2O liquid was stored as the product. The N2O recovery ratio was 53.53%, where the recovery ratio was defined as the N2O mass fraction in the product to that in the off gas.
  • For CO2, the initial fraction was 6.50%, reduced to 0.27% by wet scrubbing, then further reduced to 0.51 ppm by adsorption. After flash, the final fraction in the product was 0.94 ppm.
  • For CO, the initial fraction was 0.21%. CO was difficult to be removed effectively by wet scrubbing and adsorption. Very small amount of CO could dissolve in water. CO can be removed by adsorption, however it was not economic compared to flash distillation. CO was released as non-condensation gas in releaser and reduced to 45.6 ppm, and further reduced to 2.46 ppm after flash in the product.
  • For NO, the initial fraction was 50.0 ppm. NO was difficult to be reduced by wet scrubbing and adsorption. Very small amount of NO could dissolve in water. NO was released as non-condensation gas in the releaser and reduced to 6.0 ppm, and reduced to 0.944 ppm after flash in the product.
  • TABLE 2
    Production of 99.9% N2O
    From Feeding Wet Adsorption Liquefier Releaser Releaser Flash Flash
    Scrubbing
    To Wet Compressor Liquefier Releaser Adsorption Flash 2nd Stage Storage
    Scrubbing compressor
    Temperature 20.0 25.3 −1.0 −49.0 −66.3 −39.7 −39.7 −39.7
    (° C.)
    Pressure 0.15315 0.101325 3.041325 3.001325 1.101325 1.001325 1.001325 1.001325
    (MPa)
    Mass Flow 164.2169 153.7882 168.4743 168.4743 101.3516 67.1206 17.25173 49.86887
    (kg/hr)
    Component Fraction by Volume
    O2 0.038963 0.040383 0.038783 0.038783 0.057258 2.20E−03 7.76E−03 2.42E−04
    N2 0.418598 0.433863 0.412509 0.412509 0.615926 9.67E−03 0.035672 5.42E−04
    N2O 0.474245 0.490901 0.546589 0.546589 0.323656 0.988075 0.956375 0.999209
    H2O 9.99E−04 0.032358 6.85E−07 6.85E−07 6.76E−10 2.04E−06 1.19E−08 2.75E−06
    CO 2.10E−03 2.17E−03 2.07E−03 2.07E−03 3.09E−03 4.56E−05 1.68E−04 2.46E−06
    CO2 0.065038 2.68E−04 5.07E−07 5.07E−07 3.05E−07 9.06E−07 9.15E−07 9.04E−07
    NO 5.00E−05 5.18E−05 5.06E−05 5.06E−05 7.32E−05 5.98E−06 2.03E−05 9.44E−07
    NO2 9.99E−06 3.09E−08 2.85E−08 2.85E−08 8.59E−11 8.47E−08 1.59E−09 1.14E−07
  • For H2O, the initial fraction was 999.0 ppm; no matter how much water it contains, H2O in the gas stream will become nearly saturation after scrubbing. After cool and dry unit, the fraction of water will be reduced, and water was further reduced to 0.685 ppm by adsorption, the fraction of water in the product was about 2.75 ppm.
  • For O2, the initial fraction was 3.90%. O2 was difficult to be reduced by wet scrubbing and adsorption (very small amount of O2 could dissolve in water), O2 was released as non-condensation gas in the releaser and reduced to 0.22%, and further reduced to 240 ppm after flash in the product.
  • For N2, the initial fraction was 41.86%. N2 was difficult to be reduced by wet scrubbing and adsorption (very small amount of N2 could dissolve in water), N2 was released as non-condensation gas in the releaser and reduced to 0.97%, and further reduced to 542.0 ppm after flash in the product.
  • In the whole process, critical parameters for successful operation includes the compressor discharge pressure, the CO2 and H2O concentrations after adsorption, the temperature and pressure in liquefier, the inlet temperature and pressure in the flash drum.
  • Example 2 Production of 99.999% Purity N2O
  • In this example, a system comprising a wet scrubbing unit, compressor, cool and dry unit, adsorption unit, liquefier and releaser, and a distillation column with reflux, was used to produce 99.999% N2O. The column has 10 theoretical trays and was operating with reflux ratio 2 (reflux ratio was the ratio of the reflux to the overhead product). The final result was listed in Table 3.
  • For N2O, the initial fraction was 47.42%, after wet scrubbing, was raised to 49.10%, then to 56.52% after adsorption, to 98.81% after releaser unit, and to 99.9993% after distillation, and was stored as the product. The N2O recovery ratio was 52.82%.
  • For CO2, the initial fraction was 6.50% and was reduced to 0.27% by wet scrubbing, then further reduced to 0.485 ppm by adsorption. The final fraction in product was 0.781 ppm.
  • For CO, the initial fraction was 0.21%. CO was released as non-condensation gas in the releaser and reduced to 45.3 ppm, and further reduced to nearly zero ppm in the product.
  • For NO, the initial fraction was 50.0 ppm. NO was released as non-condensation gas in the releaser and reduced to 6 ppm, and becomes nearly zero ppm in the product.
  • TABLE 3
    Production of 99.999% N2O
    From Feeding Wet Adsorption Liquefier Releaser Releaser Distillation Distillation
    Scrubbing Column Column
    To Wet Compressor Liquefier Releaser Adsorption Column 2nd Stage Storage
    Scrubbing compressor
    Temperature 20.0 25.3 −1.0 −49.0 −66.1 −39.4 −40.0 −38.7
    (° C.)
    Pressure 0.15315 0.101325 3.041325 3.001325 1.101325 1.001325 0.98 0.97
    (MPa)
    Mass Flow 164.4003 153.7882 177.3239 177.3239 102.0083 75.31555 26.09674 49.21882
    (kg/hr)
    Component Fraction by Volume
    O2 0.038963 0.040382 0.037277 0.037277 0.05706 2.19E−03 6.26E−03 8.06E−16
    N2 0.418598 0.433868 0.395508 0.395508 0.613058 9.62E−03 0.02756 2.90E−18
    N2O 0.474245 0.490898 0.565183 0.565183 0.326736 0.988135 0.966034 0.999993
    H2O 9.99E−04 0.032357 1.46E−06 1.46E−06 1.37E−09 4.05E−06 1.03E−23 6.23E−06
    CO 2.10E−03 2.17E−03 1.98E−03 1.98E−03 3.07E−03 4.53E−05 1.30E−04 9.30E−21
    CO2 0.065038 2.68E−04 4.85E−07 4.85E−07 2.85E−07 8.40E−07 9.51E−07 7.81E−07
    NO 5.00E−05 5.18E−05 4.89E−05 4.89E−05 7.32E−05 5.95E−06 1.70E−05 1.03E−16
    NO2 9.99E−06 3.09E−08 2.79E−08 2.79E−08 8.03E−11 7.72E−08 2.40E−21 1.19E−07
  • For H2O, the initial fraction was 1000 ppm. After cool and dry unit, it will be reduced, and further to 1.46 ppm after adsorption, the water fraction in the product was about 6.23 ppm.
  • For O2, the initial fraction was 3.9%. O2 was released as non-condensation gas in the releaser and reduced to 0.22%, and further reduced to about zero ppm after distillation.
  • For N2, the initial fraction was 41.86%. N2 was released as non-condensation gas in the releaser and reduced to 0.96%, and further reduced to about zero ppm after distillation.
  • In the whole process, critical parameters for successful operation includes the compressor discharge pressure, the outlet concentration of CO2 and H2O after adsorption, the outlet temperature out of liquefier, the pressure in releaser unit, the theoretical tray number of distillation column and the reflux ratio, column operation pressure, and inlet feed temperature to the distillation column.
  • Example 3 Production of 99.9% Purity N2O without Wet Scrubbing
  • In this example, a system comprises a compressor, cool and dry unit, adsorption unit, liquefier and releaser, and flash drum, was used to produce 99.9% N2O without wet scrubbing process. This was a simplified process which can produce qualified product.
  • The result was listed in Table 4.
  • TABLE 4
    Production of 99.9% N2O without Wet Scrubbing
    From Feeding Adsorption Liquefier Releaser Releaser Flash Flash
    To Compressor Liquefier Releaser Adsorption Flash 2nd Stage Storage
    compressor
    Temperature 20.0 −1.0 −49.0 −66.3 −39.6 −39.6 −39.6
    (° C.)
    Pressure 0.15315 3.041325 3.001325 1.101325 1.001325 1.001325 1.001325
    (MPa)
    Mass Flow 164.2169 169.5656 169.5656 101.4353 68.13675 18.19446 49.94228
    (kg/hr)
    Component Fraction by Volume
    O2 0.038963 0.038587 0.038587 0.057228 2.20E−03 7.50E−03 2.34E−04
    N2 0.418598 0.410342 0.410342 0.615577 9.67E−03 0.034403 5.23E−04
    N2O 0.474245 0.548891 0.548891 0.323999 0.987945 0.957799 0.999088
    H2O 9.99E−04 9.72E−08 9.72E−08 9.53E−11 2.87E−07 1.70E−09 3.92E−07
    CO 2.10E−03 2.06E−03 2.06E−03 3.09E−03 4.55E−05 1.62E−04 2.37E−06
    CO2 0.065038 6.33E−05 6.33E−05 3.79E−05 1.13E−04 1.14E−04 1.12E−04
    NO 5.00E−05 5.04E−05 5.04E−05 7.31E−05 5.97E−06 1.97E−05 9.14E−07
    NO2 9.99E−06 9.77E−06 9.77E−06 2.93E−08 2.88E−05 5.51E−07 3.92E−05
  • For N2O, the initial fraction was 47.42%. N2O was raised to 54.89% after adsorption, to 98.80% after the releaser unit, to 99.91% after the flash drum. The N2O recovery ratio was 53.53%.
  • For CO2, the initial fraction was 6.50% and was reduced to 63.3 ppm by adsorption. After flash, the final fraction in product was 112.0 ppm. The length of adsorption column should be longer to handle the removing of CO2 without scrubbing unit.
  • For CO, the initial fraction was 0.21%, CO may be removed by adsorption; flash process was adopted in this process. CO was released as non-condensation gas in the releaser and reduced to 45.5 ppm, and further reduced to 2.37 ppm in the product.
  • For NO, the initial fraction was 50.0 ppm. NO was released as non-condensation gas in the releaser and reduced to 6.0 ppm, and to be 0.91 ppm in the product.
  • For H2O, the initial fraction was 1000 ppm. After cool and dry unit, the fraction will be reduced, and to be 0.097 ppm after adsorption. The water fraction in the product was about 0.39 ppm.
  • For O2, the initial fraction was 3.9%. O2 may be removed by adsorption; flash process was adopted in this process. O2 was released as non-condensation gas in the releaser and reduced to 0.22%, and further reduced to about 234 ppm in the flash drum.
  • For N2, the initial fraction was 41.86%. N2 could be removed by adsorption; flash was adopted in this process. N2 was released as non-condensation gas in the releaser and reduced to 0.97%, and further reduced to 523.0 ppm in the flash drum.
  • In the whole process, critical parameters for successful operation includes the compressor discharge pressure, the outlet concentration of CO2 and H2O from adsorption, the outlet temperature out of the liquefier, the releaser pressure, the operation pressure and the feed temperature to the flash drum.
  • Example 4 Distillation to Remove CO2
  • In this example, a phase analysis for CO2 and N2O was carried out. The result of T-x-y diagram under 1.0 MPa was shown in FIG. 2 a. The graph shows that boiling points for CO2 was −40.19° C. and for N2O was −39.61° C., respectively. The difference was 0.58° C., indicating that it was quite hard to separate CO2 from N2O using distillation.
  • Even under 2.5 MPa, the boiling point difference was 3.5° C. It was still hard to separate CO2 from N2O using distillation, as shown in FIG. 2 b.
  • For other heavy components, such as NO2, similar conclusion could be derived.
  • Thus, distillation was not effective to remove CO2 from N2O.
  • The foregoing examples and description of the preferred embodiments should be taken as illustrating, rather than as limiting the present invention as defined by the claims. As will be readily appreciated, numerous variations and combinations of the features set forth above can be utilized without departing from the present invention as set forth in the claims. Such variations are not regarded as a departure from the spirit and scope of the invention, and all such variations are intended to be included within the scope of the following claims.

Claims (21)

1. A system for of recovering and purifying N2O, the system comprising:
a gas stream containing N2O and impurities comprising light and heavy impurities, moisture or water, and organic compounds;
a compressor having at least one stage of compression to compress the gas stream to a preset pressure;
a cooling and drying unit to remove the moisture or water from the gas stream;
an adsorption unit to remove the heavy impurities, the moisture or water and the organic compounds from the gas stream;
a buffer tank to store the gas stream out from the adsorption unit;
a liquefaction unit to at least partially liquefy the gas stream out from the buffer tank to a gas mixture containing N2O and non-condensation gas, and a liquid mixture;
a releaser to release the gas mixture back to the adsorption unit and to pass the liquid mixture to a distillation unit;
the distillation unit to remove the light impurities and the organic compounds from the liquid mixture through distillation; release a vapor phase gas containing N2O and non-condensation gas back to the compressor; and generate purified liquid N2O; and
a tank to store and distribute the purified liquid N2O;
wherein
the distillation unit comprises at least one flash drum, at least one distillation column with reflux, or combinations thereof.
2. The system according to claim 1, wherein
the gas stream contains 5.0 to 99.9% N2O by volume;
the light impurities are selected from the group consisting of N2, O2, NO, CO, Ar, H2, methane, C2 compounds and combinations thereof;
the heavy impurities are selected from the group consisting of CO2, NO2, CO, H2O, C2 + compounds and combinations thereof;
the organic compound is selected from the group consisting of methane, C2 + compounds, CH4, C2 compounds, and combinations thereof;
the non-condensation gas is selected from the group consisting of Ar, N2, O2, CO, NO, methane and combinations thereof; and
grade of the purified liquid N2O ranging from 99.9% to 99.9999% purity.
3. The system according to claim 1, wherein the compressor having at least two stages of compression; the vapor phase gas out of the distillation unit is released to the second stage; and the preset pressure ranging from 2.0 to 5.0 MPa.
4. The system according to claim 1, wherein the adsorption unit comprising at least two parallel adsorption beds and each bed having at least one layer adsorbents; two of the at least two parallel adsorption beds are alternately used in continuous swing operation; and the gas mixture is used to regenerate the adsorption unit; wherein
the adsorbents are selected from the group consisting of molecular sieves selected from the group consisting of 13X, 3A, 4A, 5A, CaX, silica gel, calcium Y zeolite, zinc X zeolite, molecular sieve with high ratio of silica to alumina, and mixtures thereof; active alumina; activated carbon; and combinations thereof.
5. The system according to claim 1, wherein the wherein the distillation unit comprising at least one flash drum, at least one distillation column, or combinations thereof.
6. The system according to claim 1, wherein the gas stream is an off gas stream from adipic acid production process, or nitric acid production process; and the gas stream having 28.0 to 70.0% N2O by volume, 1.0 to 6.0% O2 by volume, 20.0 to 60.0% N2 by volume, 0.2 to 1.0% Ar by volume, 2 to 10.0% CO2 by volume, 0.1 to 1.0% CO by volume, 1.0 ppm to 0.5% NO2 by volume, 1.0 ppm to 1.0% NO by volume, and 1.0 ppm to 0.1% hydrocarbons by volume.
7. The system according to claim 1, further comprises a wet scrubbing absorption unit to remove the heavy impurities from the gas stream; wherein the wet scrubbing absorption unit comprises a caustic scrubbing unit, an acid scrubbing unit, water scrubbing unit, or combinations thereof.
8. A process of recovering and purifying nitrous oxide (N2O), comprising
providing a gas stream containing N2O and impurities comprising light and heavy impurities, moisture or water, and organic compounds;
compressing the gas stream to a preset pressure by a compressor having at least one-stage of compression;
removing the moisture or water from the compressed gas stream through a cooling and drying unit;
passing the gas stream through an adsorption unit to remove the heavy impurities, the moisture or water and the organic compounds;
at least partially liquefying the gas stream to obtain a gas mixture containing N2O and non-condensation gas, and a liquid mixture,
releasing the gas mixture back to the adsorption unit;
conveying the liquid mixture to a distillation unit and removing the light impurities and the organic compounds from the liquid mixture, and generating purified liquid N2O;
releasing a vapor phase gas containing N2O and non-condensation gas back to the compressor; and
conveying the purified liquid N2O to a tank for storage and distribution.
9. The process according to claim 8, wherein
the gas stream contains 5.0 to 99.9% N2O by volume;
the light impurities are selected from the group consisting of N2, O2, NO, CO, Ar, H2, methane, C2 compounds and combinations thereof;
the heavy impurities are selected from the group consisting of CO2, NO2, CO, H2O, C2 + compounds and combinations thereof,
the organic compound is selected from the group consisting of methane, C2 + compounds, CH4, C2 compounds, and combinations thereof;
the non-condensation gas is selected from the group consisting of Ar, N2, O2, CO, NO, methane and combinations thereof; and
grade of the purified liquid N2O ranging from 99.9% to 99.9999% purity.
10. The process according to claim 9, wherein the preset pressure ranging from 2.0 to 5.0 MPa.
11. The process according to claim 9, wherein the compressor having at least two stages of compression; the vapor phase gas out of the distillation unit is released to the second stage; and the preset pressure ranging from 2.0 to 4.0 MPa.
12. The process according to claim 9, wherein the adsorption unit comprising at least two parallel adsorption beds and each bed having at least one layer adsorbents; two of the at least two parallel adsorption beds are alternately used in continuous swing operation; and the gas mixture is used to regenerate the adsorption unit; wherein
the adsorbents are selected from the group consisting of molecular sieves selected from the group consisting of 13X, 3A, 4A, 5A, CaX, silica gel, calcium Y zeolite, zinc X zeolite, molecular sieve with high ratio of silica to alumina, and mixtures thereof; active alumina; activated carbon; and combinations thereof.
13. The process according to claim 9, wherein the distillation unit comprising at least one flash drum, at least one distillation column, or combinations thereof.
14. The process according to claim 9, wherein the gas stream is an off gas stream from adipic acid production process, or nitric acid production process; and the gas stream having 28.0 to 70.0% N2O by volume, 1.0 to 6.0% O2 by volume, 20.0 to 60.0% N2 by volume, 0.2 to 1.0% Ar by volume, 2 to 10.0% CO2 by volume, 0.1 to 1.0% CO by volume, 1.0 ppm to 0.5% NO2 by volume, 1.0 ppm to 1.0% NO by volume, and 1.0 ppm to 0.1% hydrocarbons by volume.
15. A process of recovering and purifying nitrous oxide (N2O), comprising
providing a gas stream containing N2O and impurities comprising light and heavy impurities, moisture or water, and organic compounds;
removing the heavy impurities from the gas stream through wet scrubbing absorption;
compressing the gas stream to a preset pressure by a compressor having at least one-stage of compression;
removing the moisture or water from the compressed gas stream through a cooling and drying unit;
passing the gas stream through an adsorption unit to remove the heavy impurities, the moisture or water and the organic compounds;
at least partially liquefying the gas stream to obtain a gas mixture containing N2O and non-condensation gas, and a liquid mixture,
releasing the gas mixture back to the adsorption unit;
conveying the liquid mixture to a distillation unit and removing the light impurities and the organic compounds from the liquid mixture, and generating purified liquid N2O;
releasing a vapor phase gas containing N2O and non-condensation gas back to the compressor; and
conveying the purified liquid N2O to a tank for storage and distribution.
16. The process according to claim 15, wherein
the gas stream contains 5.0 to 99.9% N2O by volume;
the light impurities are selected from the group consisting of N2, O2, NO, CO, Ar, H2, methane, C2 compounds and combinations thereof;
the heavy impurities are selected from the group consisting of CO2, NO2, CO, H2O, C2 + compounds and combinations thereof,
the organic compound is selected from the group consisting of methane, C2 + compounds, CH4, C2 compounds, and combinations thereof;
the non-condensation gas is selected from the group consisting of Ar, N2, O2, CO, NO, methane and combinations thereof; and
grade of the purified liquid N2O ranging from 99.9% to 99.9999% purity.
17. The process according to claim 16, wherein the preset pressure ranging from 2.0 to 5.0 MPa.
18. The process according to claim 16, wherein the compressor having at least two stages of compression; the vapor phase gas out of the distillation unit is released to the second stage; and the preset pressure ranging from 2.0 to 4.0 MPa.
19. The process according to claim 16, wherein the adsorption unit comprising at least two parallel adsorption beds and each bed having at least one layer adsorbents; two of the at least two parallel adsorption beds are alternately used in continuous swing operation; and the gas mixture is used to regenerate the adsorption unit; wherein
the adsorbents are selected from the group consisting of molecular sieves selected from the group consisting of 13X, 3A, 4A, 5A, CaX, silica gel, calcium Y zeolite, zinc X zeolite, molecular sieve with high ratio of silica to alumina, and mixtures thereof; active alumina; activated carbon; and combinations thereof.
20. The process according to claim 16, wherein the distillation unit comprising at least one flash drum, at least one distillation column, or combinations thereof.
21. The process according to claim 16, wherein
the gas stream is an off gas stream from adipic acid production process, or nitric acid production process; and the gas stream having 28.0 to 70.0% N2O by volume, 1.0 to 6.0% O2 by volume, 20.0 to 60.0% N2 by volume, 0.2 to 1.0% Ar by volume, 2 to 10.0% CO2 by volume, 0.1 to 1.0% CO by volume, 1.0 ppm to 0.5% NO2 by volume, 1.0 ppm to 1.0% NO by volume, and 1.0 ppm to 0.1% hydrocarbons by volume; and
the wet scrubbing absorption removes the heavy impurities to less than 500 ppm.
US14/295,724 2013-06-18 2014-06-04 Process for recovery and purification of nitrous oxide Expired - Fee Related US10464813B2 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
CN2013203756755 2013-06-18
CN201320375675.5U CN203639158U (en) 2013-06-18 2013-06-18 System for producing different grades of N2O (nitrous oxide)
CN2013102626373 2013-06-18
CN201310262637 2013-06-18
CN201310262637.3A CN104229760B (en) 2013-06-18 2013-06-18 recovery and purification of nitrous oxide
CN201320375675U 2013-06-18

Publications (2)

Publication Number Publication Date
US20140366576A1 true US20140366576A1 (en) 2014-12-18
US10464813B2 US10464813B2 (en) 2019-11-05

Family

ID=52002220

Family Applications (1)

Application Number Title Priority Date Filing Date
US14/295,724 Expired - Fee Related US10464813B2 (en) 2013-06-18 2014-06-04 Process for recovery and purification of nitrous oxide

Country Status (7)

Country Link
US (1) US10464813B2 (en)
JP (1) JP5815800B2 (en)
KR (2) KR101673516B1 (en)
DE (1) DE102014008921A1 (en)
FR (1) FR3007018A1 (en)
MY (1) MY171242A (en)
TW (1) TWI542404B (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104707449A (en) * 2015-03-12 2015-06-17 福建三农化学农药有限责任公司 Dehydration method and dehydration device of cracked gas in production of hexafluoropropylene
JP2016147766A (en) * 2015-02-10 2016-08-18 昭和電工株式会社 Method for purifying nitrous oxide
CN106150567A (en) * 2016-07-26 2016-11-23 中国神华能源股份有限公司 Steam turbine synergistic device and the synergisting method of steam turbine
CN106823793A (en) * 2017-04-01 2017-06-13 平顶山市普恩科技有限公司 A kind of removing means and removal methods of adipic acid nitrogen oxide in tail gas
CN109353999A (en) * 2018-11-20 2019-02-19 天津市汇筑恒升科技有限公司 The apparatus and method of electronic-grade dental gas in recycling and purifying industrial tail gas
CN110548364A (en) * 2019-10-17 2019-12-10 清远先导材料有限公司 method and device for recovering special gas adsorbed by molecular sieve
CN110785377A (en) * 2017-06-27 2020-02-11 卡萨乐有限公司 Production method of argon and nitrogen
CN111530230A (en) * 2020-06-19 2020-08-14 庄伙金 Waste gas purifying equipment
CN115430283A (en) * 2022-09-23 2022-12-06 全椒科利德电子材料有限公司 Method for purifying nitrous oxide
WO2024033126A1 (en) * 2022-08-11 2024-02-15 Basf Se A process for the explosion-proof storage of nitrous oxide

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101858190B1 (en) * 2016-07-20 2018-05-16 한국화학연구원 Process for the recovery and purification of nitrous oxide from industrial emission gas mixtures
KR101819665B1 (en) * 2017-08-21 2018-01-17 주식회사 바우만 Nitrous oxide gas dryer
KR101952945B1 (en) * 2017-08-31 2019-02-27 한국화학연구원 Method for recorvering nitrous oxide
KR101955015B1 (en) * 2017-09-05 2019-03-07 한국화학연구원 method and APPARATUS for recovering nitrous oxide
CN109000430B (en) * 2018-06-06 2020-12-08 珠海中冠石油化工有限公司 Alkyl preparation separation refrigeration process
WO2020066639A1 (en) 2018-09-28 2020-04-02 昭和電工株式会社 Nitrous oxide purification method
KR102394306B1 (en) * 2020-05-22 2022-05-04 주식회사 에프알디 Tank for both refining and storaging high purity nitrous oxide for manufacturing semiconductor and OLED and for medical
KR102461654B1 (en) * 2020-12-02 2022-11-01 주식회사 에프알디 High purity nitrous oxide refining apparatus for manufacturing semiconductor and OLED and for medical

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2850881A (en) * 1957-01-11 1958-09-09 Coyne Chemical Company Method and apparatus for purifying nitrous oxide
US4264566A (en) * 1978-10-06 1981-04-28 Phillips Petroleum Company Temperature control for an ammonia synthesis reactor
US5759237A (en) * 1996-06-14 1998-06-02 L'air Liquide Societe Anonyme Pour L'etude Et, L'exploitation Des Procedes Georges Claude Process and system for selective abatement of reactive gases and recovery of perfluorocompound gases
US6505482B2 (en) * 1999-08-13 2003-01-14 L'Air Liquide - Societe Anonyme à Directoire et Conseil de Surveillance pour l'Etude et l'Exploitation des Procedes George Claude Nitrous oxide purification system and process
US20110023538A1 (en) * 2008-04-02 2011-02-03 Basf Se Process for purifying dinitrogen monoxide
US20110023713A1 (en) * 2008-04-02 2011-02-03 Basf Se Process for purifying n2o
US20130055729A1 (en) * 2010-02-17 2013-03-07 John Mak Configurations and methods for high pressure acid gas removal in the production of ultra-low sulfur gas
US20130312427A1 (en) * 2012-05-24 2013-11-28 Mohamed Hashi Air compression system and method

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2732267A1 (en) 1977-07-16 1979-01-25 Bayer Ag PROCESS FOR THE RECOVERY OF NITROGEN MONOXIDE
JP3294390B2 (en) 1993-07-26 2002-06-24 日本エア・リキード株式会社 Ultra high purity nitrous oxide production method and apparatus
US5849257A (en) 1996-04-03 1998-12-15 Mitsui Chemicals, Inc. Process for preparation of nitrous oxide
JP3590192B2 (en) 1996-04-25 2004-11-17 三井化学株式会社 Method for producing nitrous oxide
US6080226A (en) 1998-09-30 2000-06-27 Uop Llc Nitrous oxide purification by pressure swing adsorption
US6106593A (en) 1998-10-08 2000-08-22 Air Products And Chemicals, Inc. Purification of air
FR2789600B1 (en) 1999-02-17 2001-03-09 Air Liquide PROCESS AND PLANT FOR RECOVERING AND / OR PURIFYING NITROGEN PROTOXIDE CONTAINED IN A WASTE GAS
JP3545377B2 (en) 2001-08-07 2004-07-21 日本酸素株式会社 Apparatus and method for purifying air for air liquefaction separation
JP4031293B2 (en) 2002-06-05 2008-01-09 住友精化株式会社 Nitrous oxide recovery and purification method and recovery and purification equipment
EP1417995A1 (en) 2002-10-30 2004-05-12 Air Products And Chemicals, Inc. Process and device for adsorption of nitrous oxide from a feed gas stream

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2850881A (en) * 1957-01-11 1958-09-09 Coyne Chemical Company Method and apparatus for purifying nitrous oxide
US4264566A (en) * 1978-10-06 1981-04-28 Phillips Petroleum Company Temperature control for an ammonia synthesis reactor
US5759237A (en) * 1996-06-14 1998-06-02 L'air Liquide Societe Anonyme Pour L'etude Et, L'exploitation Des Procedes Georges Claude Process and system for selective abatement of reactive gases and recovery of perfluorocompound gases
US6505482B2 (en) * 1999-08-13 2003-01-14 L'Air Liquide - Societe Anonyme à Directoire et Conseil de Surveillance pour l'Etude et l'Exploitation des Procedes George Claude Nitrous oxide purification system and process
US20110023538A1 (en) * 2008-04-02 2011-02-03 Basf Se Process for purifying dinitrogen monoxide
US20110023713A1 (en) * 2008-04-02 2011-02-03 Basf Se Process for purifying n2o
US20130055729A1 (en) * 2010-02-17 2013-03-07 John Mak Configurations and methods for high pressure acid gas removal in the production of ultra-low sulfur gas
US20130312427A1 (en) * 2012-05-24 2013-11-28 Mohamed Hashi Air compression system and method

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016147766A (en) * 2015-02-10 2016-08-18 昭和電工株式会社 Method for purifying nitrous oxide
CN104707449A (en) * 2015-03-12 2015-06-17 福建三农化学农药有限责任公司 Dehydration method and dehydration device of cracked gas in production of hexafluoropropylene
CN106150567A (en) * 2016-07-26 2016-11-23 中国神华能源股份有限公司 Steam turbine synergistic device and the synergisting method of steam turbine
CN106823793A (en) * 2017-04-01 2017-06-13 平顶山市普恩科技有限公司 A kind of removing means and removal methods of adipic acid nitrogen oxide in tail gas
CN110785377A (en) * 2017-06-27 2020-02-11 卡萨乐有限公司 Production method of argon and nitrogen
US11104576B2 (en) * 2017-06-27 2021-08-31 Casale Sa Process for argon and nitrogen production
CN109353999A (en) * 2018-11-20 2019-02-19 天津市汇筑恒升科技有限公司 The apparatus and method of electronic-grade dental gas in recycling and purifying industrial tail gas
CN110548364A (en) * 2019-10-17 2019-12-10 清远先导材料有限公司 method and device for recovering special gas adsorbed by molecular sieve
CN111530230A (en) * 2020-06-19 2020-08-14 庄伙金 Waste gas purifying equipment
WO2024033126A1 (en) * 2022-08-11 2024-02-15 Basf Se A process for the explosion-proof storage of nitrous oxide
CN115430283A (en) * 2022-09-23 2022-12-06 全椒科利德电子材料有限公司 Method for purifying nitrous oxide

Also Published As

Publication number Publication date
US10464813B2 (en) 2019-11-05
JP2015027929A (en) 2015-02-12
MY171242A (en) 2019-10-04
DE102014008921A1 (en) 2014-12-31
TW201500101A (en) 2015-01-01
JP5815800B2 (en) 2015-11-17
TWI542404B (en) 2016-07-21
KR20160108825A (en) 2016-09-20
KR20140147048A (en) 2014-12-29
FR3007018A1 (en) 2014-12-19
KR101673516B1 (en) 2016-11-07

Similar Documents

Publication Publication Date Title
US10464813B2 (en) Process for recovery and purification of nitrous oxide
US7794523B2 (en) Method for the recovery and re-use of process gases
KR101858190B1 (en) Process for the recovery and purification of nitrous oxide from industrial emission gas mixtures
JP2008013406A (en) Method for recovering ammonia, method for reutilizing ammonia, ammonia recovery system and ammonia reutilization system
US7828939B2 (en) Method for concentrating heavy nitrogen isotope
CN104229760B (en) recovery and purification of nitrous oxide
JP2001114504A (en) Purification system and method for dinitrogen monoxide
WO1994024501A1 (en) Method of and apparatus for manufacturing various kinds of gases to be supplied to semiconductor manufacturing factories
JP6546504B2 (en) Oxygen production system and oxygen production method
CN102602899B (en) Helium purification method and device
CN203639158U (en) System for producing different grades of N2O (nitrous oxide)
KR101955015B1 (en) method and APPARATUS for recovering nitrous oxide
US20150360165A1 (en) Separation of biologically generated gas streams
CN113321184B (en) High-purity electronic-grade chlorine purification production device and technology thereof
JP2007504433A (en) Method and facility for supplying gaseous mixture containing gaseous carbon monoxide and / or at least 10% carbon monoxide
US9174853B2 (en) Method for producing high purity germane by a continuous or semi-continuous process
JP3959168B2 (en) Apparatus and method for producing and supplying nitrogen and / or oxygen and purified air
CN206886672U (en) The multi-level N of temperature production2O system
JP3532465B2 (en) Air separation device
JP4430351B2 (en) Fluorine compound gas separation and purification equipment
JP4960277B2 (en) Method for producing ultra-high purity oxygen
US20230019514A1 (en) Gas purification method and device
JP3674895B2 (en) Dry air supply system and supply method
JP2017223417A (en) Refined gas manufacturing method and refined gas manufacturing device
US6134912A (en) Method and system for separation of a mixed gas containing oxygen and chlorine

Legal Events

Date Code Title Description
AS Assignment

Owner name: AIR PRODUCTS AND CHEMICALS, INC., PENNSYLVANIA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:XIU, GUOHUA;ZHANG, PENG;REEL/FRAME:033138/0687

Effective date: 20140606

AS Assignment

Owner name: CITIBANK, N.A., AS COLLATERAL AGENT, DELAWARE

Free format text: PATENT SECURITY AGREEMENT;ASSIGNOR:VERSUM MATERIALS US, LLC;REEL/FRAME:040503/0442

Effective date: 20160930

AS Assignment

Owner name: VERSUM MATERIALS US, LLC, ARIZONA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:AIR PRODUCTS AND CHEMICALS, INC.;REEL/FRAME:041772/0733

Effective date: 20170214

STPP Information on status: patent application and granting procedure in general

Free format text: FINAL REJECTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: NOTICE OF ALLOWANCE MAILED -- APPLICATION RECEIVED IN OFFICE OF PUBLICATIONS

STPP Information on status: patent application and granting procedure in general

Free format text: PUBLICATIONS -- ISSUE FEE PAYMENT VERIFIED

AS Assignment

Owner name: VERSUM MATERIALS US, LLC, ARIZONA

Free format text: RELEASE BY SECURED PARTY;ASSIGNOR:CITIBANK, N.A., AS AGENT;REEL/FRAME:050647/0001

Effective date: 20191007

STCF Information on status: patent grant

Free format text: PATENTED CASE

FEPP Fee payment procedure

Free format text: MAINTENANCE FEE REMINDER MAILED (ORIGINAL EVENT CODE: REM.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

LAPS Lapse for failure to pay maintenance fees

Free format text: PATENT EXPIRED FOR FAILURE TO PAY MAINTENANCE FEES (ORIGINAL EVENT CODE: EXP.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362

FP Lapsed due to failure to pay maintenance fee

Effective date: 20231105