US20140271277A1 - Synthetic jet with non-metallic blade structure - Google Patents
Synthetic jet with non-metallic blade structure Download PDFInfo
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- US20140271277A1 US20140271277A1 US14/206,376 US201414206376A US2014271277A1 US 20140271277 A1 US20140271277 A1 US 20140271277A1 US 201414206376 A US201414206376 A US 201414206376A US 2014271277 A1 US2014271277 A1 US 2014271277A1
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Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
- F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F7/00—Pumps displacing fluids by using inertia thereof, e.g. by generating vibrations therein
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Definitions
- Synthetic jet actuators are a widely-used technology that generates a synthetic jet of fluid to influence the flow of that fluid over a surface to disperse heat away therefrom.
- a typical synthetic jet actuator comprises a housing defining an internal chamber. An orifice is present in a wall of the housing.
- the actuator further includes a mechanism in or about the housing for periodically changing the volume within the internal chamber so that a series of fluid vortices are generated and projected in an external environment out from the orifice of the housing.
- volume changing mechanisms may include, for example, a piston positioned in the jet housing to move fluid in and out of the orifice during reciprocation of the piston or a flexible diaphragm as a wall of the housing.
- the flexible diaphragm is typically actuated by a piezoelectric actuator or other appropriate means.
- a control system is used to create time-harmonic motion of the volume changing mechanism.
- fluid is ejected from the chamber through the orifice.
- sharp edges of the orifice separate the flow to create vortex sheets that roll up into vortices. These vortices move away from the edges of the orifice under their own self-induced velocity.
- ambient fluid is drawn into the chamber from large distances from the orifice. Since the vortices have already moved away from the edges of the orifice, they are not affected by the ambient fluid entering into the chamber. As the vortices travel away from the orifice, they synthesize a jet of fluid, i.e., a “synthetic jet.”
- acoustic noise is one negative aspect of synthetic jet operation, including dual cooling jets (DCJs) that employ an actuator (i.e., piezoelectric actuator) on each of opposing surfaces of the device.
- DCJs are typically excited at or near their mechanical resonance mode(s) in order to optimize electrical to mechanical conversion and so as to achieve maximum deflection at minimal mechanical energy input. While DCJ operation is optimized when operated at or near their mechanical resonance mode(s), it is recognized that operating the DCJ at certain frequencies can generate a substantial amount of acoustic noise, as the acoustic signature of the device is in part determined by the drive frequency of the device.
- Synthetic jets of many variants are typically constructed using a metalized piezo-actuator bonded to a metallic plate or blade with an electrically conductive adhesive. Electrical connections to the piezo-actuator are achieved by connecting to the metalized exposed piezo side and connecting to the plate material. Solders or conductive adhesives are typically used. Two of these plates are then adhered together along the perimeter leaving an orifice opening to form the jet. Upon actuation of the piezo-actuators, air is inhaled and exhaled through the orifice causing a net positive air flow.
- metallic plates or blades are expensive and their stiffness causes higher resonant frequencies that increase DCJ operating noise.
- the metal mass can cause increased vibration.
- the resonant frequency of the DCJ can be increased due to the metallic plates.
- a synthetic jet device includes a first plate, a second plate spaced apart from the first plate, a spacing component coupled to and positioned between the first and second plates to form a chamber and including an orifice therein, and an actuator element coupled to at least one of the first or second plates to selectively cause deflection thereof, wherein the first and second plates are formed at least in part of a non-metallic material.
- a method of fabricating a synthetic jet device includes constructing a first plate and a second plate at least in part of a non-metallic material, attaching an actuator element to at least one of the first and second plates to selectively cause deflection thereof, and positioning the first plate relative to the second plate by way of a spacing component, the spacing component securing the first plate to the second plate in a spaced apart arrangement to form a chamber and including an orifice therein.
- the method also includes attaching electrical connections to the actuator element and the respective one of the first and second plates to which the actuator element is attached so as to enable a selective applying of voltage to the actuator element.
- a synthetic jet device in accordance with yet another aspect of the invention, includes a first plate, a second plate spaced apart from the first plate to form a chamber, and an actuator element coupled to at least one of the first or second plates to selectively cause deflection thereof so as to change a volume of the chamber.
- Each of the first and second plates includes a first material comprising an electrically insulating, non-metallic material and a second material comprising an electrically conductive material, the second material being formed as one of a filler material, a metalizing layer, and internally or externally formed leads provided on or in the first material.
- FIGS. 1 and 2 are views of a synthetic jet assembly useable with embodiments of the invention.
- FIG. 3 is a cross-section of the synthetic jet of FIGS. 1 and 2 depicting the jet as the control system causes the diaphragms to travel inward, toward the orifice.
- FIG. 4 is a cross-section of the synthetic jet of FIGS. 1 and 2 depicting the jet as the control system causes the diaphragms to travel outward, away from the orifice.
- FIG. 5 illustrates a build-up process for fabricating a synthetic jet that includes non-metallic plates therein, according to an embodiment of the invention.
- FIG. 6 illustrates a build-up process for fabricating a synthetic jet that includes non-metallic plates therein, according to an embodiment of the invention.
- FIG. 7 illustrates a build-up process for fabricating non-metallic plates of a synthetic jet, according to an embodiment of the invention.
- FIG. 8 illustrates a build-up process for fabricating non-metallic plates of a synthetic jet, according to an embodiment of the invention.
- FIG. 9 illustrates a build-up process for fabricating a double-folded non-metallic plate structure of a synthetic jet, according to an embodiment of the invention.
- FIG. 10 illustrates a build-up process for fabricating double-folded non-metallic plate structure of a synthetic jet, according to an embodiment of the invention.
- FIG. 11 illustrates a build-up process for fabricating non-metallic plates of a synthetic jet, according to an embodiment of the invention.
- Embodiments of the invention are directed to a synthetic jet device having non-metallic plates that provide for a lower resonant frequency for less noise, as well as lower vibration.
- FIGS. 1-4 illustrate a general structure of a synthetic jet assembly 10 useable with embodiments of the present invention, along with the movement of various components during operation thereof, for purposes of better understanding the invention. While a specific synthetic jet assembly 10 is illustrated in FIGS. 1-4 , it is recognized that embodiments of the invention may be incorporated into synthetic jet assemblies of varied constructions, and thus the synthetic jet assembly 10 is not meant to limit the scope of the invention. As an example, synthetic jet assemblies that do not include a mounting bracket for securing positioning a synthetic jet are considered to be within the scope of the invention.
- the synthetic jet assembly 10 is shown as including a synthetic jet 12 , a cross-section of which is illustrated in FIG. 2 , and a mounting bracket 14 .
- mounting bracket 14 is a u-shaped mounting bracket that is affixed to a body or housing 16 of synthetic jet 12 at one or more locations, although it is recognized that the mounting bracket may be constructed as a bracket having a different shape/profile, such as a semi-circular bracket configured to receive a circular synthetic jet 12 therein.
- a circuit driver 18 can be externally located or affixed to mounting bracket 14 . Alternatively, circuit driver 18 may be remotely located from synthetic jet assembly 10 .
- housing 16 of synthetic jet 12 defines and partially encloses an internal chamber or cavity 20 having a gas or fluid 22 therein. While housing 16 and internal chamber 20 can take virtually any geometric configuration according to various embodiments of the invention, for purposes of discussion and understanding, housing 16 is shown in cross-section in FIG. 2 as including a first plate 24 and a second plate 26 (alternately referred to as blades or foils), which are maintained in a spaced apart relationship by a spacer element 28 positioned therebetween. In one embodiment, spacer element 28 maintains a separation of approximately 1 mm between first and second plates 24 , 26 .
- One or more orifices 30 are formed between first and second plates 24 , 26 and the side walls of spacer element 28 in order to place the internal chamber 20 in fluid communication with a surrounding, exterior environment 32 .
- spacer element 28 includes a front surface (not shown) in which one or more orifices 30 are formed.
- first and second plates 24 , 26 may be formed from a metal, plastic, glass, and/or ceramic.
- spacer element 28 may be formed from a metal, plastic, glass, and/or ceramic.
- Suitable metals include materials such as nickel, aluminum, copper, and molybdenum, or alloys such as stainless steel, brass, bronze, and the like.
- Suitable polymers and plastics include thermoplastics such as polyolefins, polycarbonate, thermosets, epoxies, urethanes, acrylics, silicones, polyimides, and photoresist-capable materials, and other resilient plastics.
- Suitable ceramics include, for example, titanates (such as lanthanum titanate, bismuth titanate, and lead zirconate titanate) and molybdates.
- various other components of synthetic jet 12 may be formed from metal as well.
- actuators 34 , 36 are coupled to respective first and second plates, 24 , 26 to form first and second composite structures or flexible diaphragms 38 , 40 , which are controlled by driver 18 via a controller assembly or control unit system 42 .
- the synthetic jet 12 is thus constructed as a DCJ.
- each flexible diaphragm 38 , 40 may be equipped with a metal layer and a metal electrode may be disposed adjacent to the metal layer so that diaphragms 38 , 40 may be moved via an electrical bias imposed between the electrode and the metal layer.
- controller assembly 42 is electronically coupled to driver 18 , which is coupled directly to mounting bracket 14 of synthetic jet 12 .
- control unit system 42 is integrated into a driver 18 that is remotely located from synthetic jet 12 .
- control system 42 may be configured to generate the electrical bias by any suitable device, such as, for example, a computer, logic processor, or signal generator.
- actuators 34 , 36 are piezoelectric motive (piezomotive) devices that may be actuated by application of a harmonic alternating voltage that causes the piezomotive devices to rapidly expand and contract.
- control system 42 transmits an electric charge, via driver 18 , to piezoelectric actuators 34 , 36 , which undergo mechanical stress and/or strain responsive to the charge.
- the stress/strain of piezomotive actuators 34 , 36 causes deflection of respective first and second plates 24 , 26 such that a time-harmonic or periodic motion is achieved that changes the volume of the internal chamber 20 between plates 24 , 26 .
- spacer element 28 can also be made flexible and deform to change the volume of internal chamber 20 .
- the resulting volume change in internal chamber 20 causes an interchange of gas or other fluid between internal chamber 20 and exterior volume 32 , as described in detail with respect to FIGS. 3 and 4 .
- Piezomotive actuators 34 , 36 may be monomorph or bimorph devices, according to various embodiments of the invention.
- piezomotive actuators 34 , 36 may be coupled to plates 24 , 26 formed from materials including metal, plastic, glass, or ceramic.
- one or both piezomotive actuators 34 , 36 may be bimorph actuators coupled to plates 24 , 26 formed from piezoelectric materials.
- the bimorph may include single actuators 34 , 36 , and plates 24 , 26 are the second actuators.
- the components of synthetic jet 12 may be adhered together or otherwise attached to one another using adhesives, solders, and the like.
- a thermoset adhesive or an electrically conductive adhesive is employed to bond actuators 34 , 36 to first and second plates, 24 , 26 to form first and second composite structures 38 , 40 .
- an adhesive may be filled with an electrically conductive filler such as silver, gold, and the like, in order to attach lead wires (not shown) to synthetic jet 12 .
- Suitable adhesives may have a hardness in the range of Shore A hardness of 100 or less and may include as examples silicones, polyurethanes, thermoplastic rubbers, and the like, such that an operating temperature of 120 degrees or greater may be achieved.
- actuators 34 , 36 may include devices other than piezoelectric motive devices, such as hydraulic, pneumatic, magnetic, electrostatic, and ultrasonic materials.
- control system 42 is configured to activate respective actuators 34 , 36 in corresponding fashion.
- control system 42 may be configured to provide a rapidly alternating electrostatic voltage to actuators 34 , 36 in order to activate and flex respective first and second plates 24 , 26 .
- synthetic jet 12 is illustrated as actuators 34 , 36 are controlled to cause first and second plates 24 , 26 to move outward with respect to internal chamber 20 , as depicted by arrows 44 .
- actuators 34 , 36 are controlled by control system 42 so that when first and second plates 24 , 26 move outward from internal chamber 20 , vortices are already removed from edges of orifice 30 and thus are not affected by the ambient fluid 46 being drawn into internal chamber 20 .
- a jet of ambient fluid 46 is synthesized by vortices creating strong entrainment of ambient fluid 46 drawn from large distances away from orifice 30 .
- FIG. 4 depicts synthetic jet 12 as actuators 34 , 36 are controlled to cause first and second plates 24 , 26 to flex inward into internal chamber 20 , as depicted by arrows 50 .
- the internal volume of internal chamber 20 decreases, and fluid 22 is ejected as a cooling jet through orifice 30 in the direction indicated by the set of arrows 52 toward a device 54 to be cooled, such as, for example a light emitting diode.
- the flow separates at the sharp edges of orifice 30 and creates vortex sheets which roll into vortices and begin to move away from edges of orifice 30 .
- FIGS. 1-4 While the synthetic jet of FIGS. 1-4 is shown and described as having a single orifice therein, it is also envisioned that embodiments of the invention may include multiple orifice synthetic jet actuators. Additionally, while the synthetic jet actuators of FIGS. 1-4 are shown and described as having an actuator element included on each of first and second plates, it is also envisioned that embodiments of the invention may include only a single actuator element positioned on one of the plates. Furthermore, it is also envisioned that the synthetic jet plates may be provided in a circular, rectangular, or alternatively shaped configuration, rather than in a square configuration as illustrated herein.
- a synthetic jet device that includes plates or blades that are formed in-part or in-whole of a non-metallic material—and thus are generally referred to hereafter as “non-metallic plates.”
- the plates can be formed from any of a number of suitable non-metallic materials that may be selected and tailored to set the stiffness and thus adjust the resonant frequency of the synthetic jet. By selecting a specific non-metallic material from which to form the plates in-part or in-whole, the plates can be fabricated to have much lower resonant frequency for less noise and a reduced mass that can provide lower vibration.
- the non-metallic material from which the plate is formed in-part or in-whole can be a number of suitable non-metallic materials, such as (but not limited to): a thermoplastic or thermoset in the form of polyethylene, polypropylene, polystyrene, polyvinyl chloride, and polytetrafluoroethylene (PTFE), Polyethylene terephthalate (PET), Polyethylene (PE), High-density polyethylene (HDPE), Polyvinyl chloride (PVC), Polyvinylidene chloride (PVDC) Low-density polyethylene (LDPE), Polypropylene (PP) Polystyrene (PS), High impact polystyrene (HIPS) Polyamides (PA) Acrylonitrile butadiene styrene (ABS) Polycarbonate (PC) Polycarbonate/Acrylonitrile Butadiene Styrene (PC/ABS) Polyurethanes (PU), Epoxies and combinations thereof
- a metallic coating is applied to a plate formed of non-metallic material.
- the plate can be made sufficiently electrically conductive (via use of a filler) so that a metallic coating is not necessary.
- a build-up process for fabricating a non-metallic plate 60 is shown according to one embodiment of the invention.
- a non-metallic and electrically insulating material or substrate 60 is provided, such as a substrate formed of any of the thermoplastic or thermoset materials set forth above.
- the non-metallic substrate 62 is dipped in a catalyst (e.g., palladium catalyst), as indicated at 64 , to activate a surface/backside protect for the plate.
- a catalyst e.g., palladium catalyst
- a metallic material that is electrically conducting such as copper or nickel, is then applied via electroless plating in a next step, as indicated at 66 , to form the final structure of the non-metallic plate 60 .
- a conductive epoxy e.g., Ag epoxy
- electrical conduits 68 such as wires or flex circuit material, are attached to the piezomotive actuator 34 , 36 and the plate 60 .
- An adhesive such as silicon, can then be used to join the two plates 60 of the synthetic jet together—with the silicon forming the spacer element 28 between the two plates of the synthetic jet 12 that is formed.
- processing alternate to electroless plating can be used to deposit the metal. Electroplating can then follow if a thicker metal is desired.
- Typical metallization schemes may include palladium activated electroless copper or nickel, sputtered or evaporated Ti, Cr, TiW, Cu, Ni, Au, Al followed by thicker plating of Cu, or Ni capped with a thin Au layer (if needed to prevent oxidation). Sputtered or evaporated processes will typically start with deposition of Ti, Cr, or TiW to promote metal adhesion.
- the finished metal can be patterned if desired using shadow masking or common lithographic pattern and etch steps.
- the plate may be cast from a piezo-polymer material, metalized on both sides and polarized to form an integral actuator plate.
- non-metallic plate(s) 70 (and a build-up process for fabrication of a synthetic jet 12 ) is shown according to an embodiment of the invention.
- the non-metallic plates 70 in FIG. 6 are formed as a thin single-sided copper coated glass-reinforced epoxy laminate sheet (e.g., FR4 PCB blanks)—alternately referred to hereafter as copper coated PCB blanks.
- the copper coated PCB blanks 70 are provided and a conductive epoxy (e.g., Ag epoxy) and piezo-actuator 34 , 36 are then subsequently applied thereto, with the epoxy securing the piezo-actuator 34 , 36 to the copper coating of the non-metallic plates 70 .
- Electrical conduits 68 such as urethane coated wires, are then attached to the piezo element and the copper coated PCB blanks 70 (e.g., soldered, conductive epoxied, or mechanically attached), with an adhesive such as silicon 28 applied along a perimeter of the plates 70 used to join the two plates of the synthetic jet 12 together—the silicon 28 sealing the plates 70 together while also leaving an aperture or orifice therein.
- the non-metallic plates of the synthetic jet 12 may be formed of Kapton® or another suitable dielectric material.
- Kapton plates are utilized for forming non-metallic plates.
- FIG. 7 where a build-up process for fabrication of the plate(s) is illustrated. As shown in the build-up process of FIG. 7 , for each non-metallic plate, a bare Kapton plate 72 is first provided, with a conductive lead 74 then being formed on the top surface 76 thereof—in the form of a sputtered lead, Kapton connector, wire, or line of conductive epoxy.
- a piezo-actuator 34 , 36 is placed on each Kapton plate 72 so as to be electrically coupled to the conductive lead 74 .
- electrical connections 68 are provided for connection to the piezo-actuators 34 , 36 and the conductive leads 68 .
- An adhesive such as silicon, can then be used to join the two plates of the synthetic jet together—with the silicon forming the spacer element between the two plates of the synthetic jet.
- non-metallic plates 78 are provided that are each constructed as a Kapton circuit—with a thicker layer of Kapton being provided with internal wiring 80 therein that can connect to the piezo-actuator 34 , 36 .
- the internal wiring 80 can be completely covered by Kapton and exposed locally at the piezo-actuator 34 , 36 and lead contacts (for connection of electrical conduits 68 ), or can be exposed entirely.
- the non-metallic plates of a synthetic jet are made out of a single piece of non-metallic material that is folded double at a bridge portion to form a pair of plates.
- a double-folded plate is fabricated by first providing a single piece of non-metallic material (e.g., Kapton) 82 that is folded double at a bridge portion 84 to define a pair of plate portions 86 , 88 .
- the bridge portion 84 is formed as a thin strip of material that is centered along a width of the plates 86 , 88 .
- the bridge portion 84 could instead be formed to extend a full width of the plates 86 , 88 but be configured to provide for a folding thereof to generally in define separate first and second plates 86 , 88 .
- the double-folded plate 82 includes internal electrical connections or leads formed therein that are covered and exposed locally at the piezo-actuators and lead contacts.
- the internal wiring includes a continuous lead 90 that extends between the two piezo-actuators 34 , 36 that are positioned on the respective plates 86 , 88 and connects to each of the piezo-actuators 34 , 36 —such that the number of internal leads formed in the double-folded plate is reduced.
- the number of electrical connections 68 provided for connection to the synthetic jet is also reduced, as connections 68 are only needed for each of the two piezo-actuators 34 , 36 and for the continuous conductive lead 90 that extends across the bridge portion 84 —for a total of three electrical connections 68 to the synthetic jet.
- FIG. 10 shows a double-folded plate 82 having a discontinuous lead through the bridge portion—such that two separate leads 92 are defined.
- the separate leads 92 are connected to the two piezo-actuators 34 , 36 positioned on the respective plates 86 , 88 , with electrical connections 68 being provided for connection to the two piezo-actuators 34 , 36 and for the conductive leads 92 .
- a total of four electrical connections 68 are provided for to the synthetic jet.
- FIG. 11 another example of a non-metallic plate 94 (and a build-up process for fabrication thereof) is shown according to an embodiment of the invention.
- a plate 94 is provided that is formed out of non-metallic, non-conductive material, such as Kapton.
- Each plate 94 that is provided has a metallic hole 96 formed therein that is located so as to be positioned under a respective piezo-actuator 34 , 36 that is to be positioned on the plate 94 , as shown on the front and back surfaces 98 , 100 of the plate in FIG. 11 .
- This hole 96 may be filled with a metallic insert or conductive epoxy to form an electrical connection to the backside of the piezo-actuator 34 , 36 that is positioned on the front surface 98 of a respective plate 94 .
- An electrical flex circuit or sputtered line contact 102 is formed on the back surface 100 of the plate 94 to bring the electrical signal to a position where wires or flex circuit leads 68 can be attached to the synthetic jet 12 .
- embodiments of the invention thus provide a synthetic jet assembly that incorporates non-metallic plates to lower a level of acoustic noise during operation of the synthetic jet.
- the non-metallic plates are fabricated to have a lower stiffness than metallic plates so as to provide a lower resonant frequency that generates less noise, with the plates also having a reduced mass that provides lower vibration during operation.
- the non-metallic plates may be formed of inexpensive materials such that the cost thereof is reduced as compared to metallic plates.
- a synthetic jet device includes a first plate, a second plate spaced apart from the first plate, a spacing component coupled to and positioned between the first and second plates to form a chamber and including an orifice therein, and an actuator element coupled to at least one of the first or second plates to selectively cause deflection thereof, wherein the first and second plates are formed at least in part of a non-metallic material.
- a method of fabricating a synthetic jet device includes constructing a first plate and a second plate at least in part of a non-metallic material, attaching an actuator element to at least one of the first and second plates to selectively cause deflection thereof, and positioning the first plate relative to the second plate by way of a spacing component, the spacing component securing the first plate to the second plate in a spaced apart arrangement to form a chamber and including an orifice therein.
- the method also includes attaching electrical connections to the actuator element and the respective one of the first and second plates to which the actuator element is attached so as to enable a selective applying of voltage to the actuator element.
- a synthetic jet device includes a first plate, a second plate spaced apart from the first plate to form a chamber, and an actuator element coupled to at least one of the first or second plates to selectively cause deflection thereof so as to change a volume of the chamber.
- Each of the first and second plates includes a first material comprising an electrically insulating, non-metallic material and a second material comprising an electrically conductive material, the second material being formed as one of a filler material, a metalizing layer, and internally or externally formed leads provided on or in the first material.
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Abstract
Description
- The present application is a non-provisional of, and claims priority to, U.S. Provisional Patent Application Ser. No. 61/787,738, filed Mar. 15, 2013, the disclosure of which is incorporated herein by reference.
- Synthetic jet actuators are a widely-used technology that generates a synthetic jet of fluid to influence the flow of that fluid over a surface to disperse heat away therefrom. A typical synthetic jet actuator comprises a housing defining an internal chamber. An orifice is present in a wall of the housing. The actuator further includes a mechanism in or about the housing for periodically changing the volume within the internal chamber so that a series of fluid vortices are generated and projected in an external environment out from the orifice of the housing. Examples of volume changing mechanisms may include, for example, a piston positioned in the jet housing to move fluid in and out of the orifice during reciprocation of the piston or a flexible diaphragm as a wall of the housing. The flexible diaphragm is typically actuated by a piezoelectric actuator or other appropriate means.
- Typically, a control system is used to create time-harmonic motion of the volume changing mechanism. As the mechanism decreases the chamber volume, fluid is ejected from the chamber through the orifice. As the fluid passes through the orifice, sharp edges of the orifice separate the flow to create vortex sheets that roll up into vortices. These vortices move away from the edges of the orifice under their own self-induced velocity. As the mechanism increases the chamber volume, ambient fluid is drawn into the chamber from large distances from the orifice. Since the vortices have already moved away from the edges of the orifice, they are not affected by the ambient fluid entering into the chamber. As the vortices travel away from the orifice, they synthesize a jet of fluid, i.e., a “synthetic jet.”
- It is recognized that acoustic noise is one negative aspect of synthetic jet operation, including dual cooling jets (DCJs) that employ an actuator (i.e., piezoelectric actuator) on each of opposing surfaces of the device. DCJs are typically excited at or near their mechanical resonance mode(s) in order to optimize electrical to mechanical conversion and so as to achieve maximum deflection at minimal mechanical energy input. While DCJ operation is optimized when operated at or near their mechanical resonance mode(s), it is recognized that operating the DCJ at certain frequencies can generate a substantial amount of acoustic noise, as the acoustic signature of the device is in part determined by the drive frequency of the device.
- Synthetic jets of many variants, including the DCJ, are typically constructed using a metalized piezo-actuator bonded to a metallic plate or blade with an electrically conductive adhesive. Electrical connections to the piezo-actuator are achieved by connecting to the metalized exposed piezo side and connecting to the plate material. Solders or conductive adhesives are typically used. Two of these plates are then adhered together along the perimeter leaving an orifice opening to form the jet. Upon actuation of the piezo-actuators, air is inhaled and exhaled through the orifice causing a net positive air flow.
- One drawback to metallic plates or blades is that they are expensive and their stiffness causes higher resonant frequencies that increase DCJ operating noise. In addition, the metal mass can cause increased vibration. Still further, the resonant frequency of the DCJ can be increased due to the metallic plates.
- It would therefore be desirable to provide a synthetic jet, such as a DCJ, having plates that are fabricated to have much lower resonant frequency for less noise. It would also be desirable for the plates to have a reduced mass that can provide lower vibration.
- According to one aspect of the invention, a synthetic jet device includes a first plate, a second plate spaced apart from the first plate, a spacing component coupled to and positioned between the first and second plates to form a chamber and including an orifice therein, and an actuator element coupled to at least one of the first or second plates to selectively cause deflection thereof, wherein the first and second plates are formed at least in part of a non-metallic material.
- In accordance with another aspect of the invention, a method of fabricating a synthetic jet device includes constructing a first plate and a second plate at least in part of a non-metallic material, attaching an actuator element to at least one of the first and second plates to selectively cause deflection thereof, and positioning the first plate relative to the second plate by way of a spacing component, the spacing component securing the first plate to the second plate in a spaced apart arrangement to form a chamber and including an orifice therein. The method also includes attaching electrical connections to the actuator element and the respective one of the first and second plates to which the actuator element is attached so as to enable a selective applying of voltage to the actuator element.
- In accordance with yet another aspect of the invention, a synthetic jet device includes a first plate, a second plate spaced apart from the first plate to form a chamber, and an actuator element coupled to at least one of the first or second plates to selectively cause deflection thereof so as to change a volume of the chamber. Each of the first and second plates includes a first material comprising an electrically insulating, non-metallic material and a second material comprising an electrically conductive material, the second material being formed as one of a filler material, a metalizing layer, and internally or externally formed leads provided on or in the first material.
- These and other advantages and features will be more readily understood from the following detailed description of preferred embodiments of the invention that is provided in connection with the accompanying drawings.
- The drawings illustrate embodiments presently contemplated for carrying out the invention.
- In the drawings:
-
FIGS. 1 and 2 are views of a synthetic jet assembly useable with embodiments of the invention. -
FIG. 3 is a cross-section of the synthetic jet ofFIGS. 1 and 2 depicting the jet as the control system causes the diaphragms to travel inward, toward the orifice. -
FIG. 4 is a cross-section of the synthetic jet ofFIGS. 1 and 2 depicting the jet as the control system causes the diaphragms to travel outward, away from the orifice. -
FIG. 5 illustrates a build-up process for fabricating a synthetic jet that includes non-metallic plates therein, according to an embodiment of the invention. -
FIG. 6 illustrates a build-up process for fabricating a synthetic jet that includes non-metallic plates therein, according to an embodiment of the invention. -
FIG. 7 illustrates a build-up process for fabricating non-metallic plates of a synthetic jet, according to an embodiment of the invention. -
FIG. 8 illustrates a build-up process for fabricating non-metallic plates of a synthetic jet, according to an embodiment of the invention. -
FIG. 9 illustrates a build-up process for fabricating a double-folded non-metallic plate structure of a synthetic jet, according to an embodiment of the invention. -
FIG. 10 illustrates a build-up process for fabricating double-folded non-metallic plate structure of a synthetic jet, according to an embodiment of the invention. -
FIG. 11 illustrates a build-up process for fabricating non-metallic plates of a synthetic jet, according to an embodiment of the invention. - Embodiments of the invention are directed to a synthetic jet device having non-metallic plates that provide for a lower resonant frequency for less noise, as well as lower vibration.
-
FIGS. 1-4 illustrate a general structure of asynthetic jet assembly 10 useable with embodiments of the present invention, along with the movement of various components during operation thereof, for purposes of better understanding the invention. While a specificsynthetic jet assembly 10 is illustrated inFIGS. 1-4 , it is recognized that embodiments of the invention may be incorporated into synthetic jet assemblies of varied constructions, and thus thesynthetic jet assembly 10 is not meant to limit the scope of the invention. As an example, synthetic jet assemblies that do not include a mounting bracket for securing positioning a synthetic jet are considered to be within the scope of the invention. - Referring first to
FIG. 1 , thesynthetic jet assembly 10 is shown as including asynthetic jet 12, a cross-section of which is illustrated inFIG. 2 , and amounting bracket 14. In one embodiment,mounting bracket 14 is a u-shaped mounting bracket that is affixed to a body orhousing 16 ofsynthetic jet 12 at one or more locations, although it is recognized that the mounting bracket may be constructed as a bracket having a different shape/profile, such as a semi-circular bracket configured to receive a circularsynthetic jet 12 therein. Acircuit driver 18 can be externally located or affixed to mountingbracket 14. Alternatively,circuit driver 18 may be remotely located fromsynthetic jet assembly 10. - Referring now to
FIGS. 1 and 2 together, and as shown therein,housing 16 ofsynthetic jet 12 defines and partially encloses an internal chamber orcavity 20 having a gas orfluid 22 therein. While housing 16 andinternal chamber 20 can take virtually any geometric configuration according to various embodiments of the invention, for purposes of discussion and understanding,housing 16 is shown in cross-section in FIG. 2 as including afirst plate 24 and a second plate 26 (alternately referred to as blades or foils), which are maintained in a spaced apart relationship by aspacer element 28 positioned therebetween. In one embodiment,spacer element 28 maintains a separation of approximately 1 mm between first andsecond plates more orifices 30 are formed between first andsecond plates spacer element 28 in order to place theinternal chamber 20 in fluid communication with a surrounding,exterior environment 32. In an alternative embodiment,spacer element 28 includes a front surface (not shown) in which one ormore orifices 30 are formed. - According to various embodiments, first and
second plates spacer element 28 may be formed from a metal, plastic, glass, and/or ceramic. Suitable metals include materials such as nickel, aluminum, copper, and molybdenum, or alloys such as stainless steel, brass, bronze, and the like. Suitable polymers and plastics include thermoplastics such as polyolefins, polycarbonate, thermosets, epoxies, urethanes, acrylics, silicones, polyimides, and photoresist-capable materials, and other resilient plastics. Suitable ceramics include, for example, titanates (such as lanthanum titanate, bismuth titanate, and lead zirconate titanate) and molybdates. Furthermore, various other components ofsynthetic jet 12 may be formed from metal as well. - According to an exemplary embodiment, actuators 34, 36 are coupled to respective first and second plates, 24, 26 to form first and second composite structures or
flexible diaphragms 38, 40, which are controlled bydriver 18 via a controller assembly orcontrol unit system 42. Thesynthetic jet 12 is thus constructed as a DCJ. For controlling thediaphragms 38, 40, eachflexible diaphragm 38, 40 may be equipped with a metal layer and a metal electrode may be disposed adjacent to the metal layer so thatdiaphragms 38, 40 may be moved via an electrical bias imposed between the electrode and the metal layer. As shown inFIG. 1 , in oneembodiment controller assembly 42 is electronically coupled todriver 18, which is coupled directly to mountingbracket 14 ofsynthetic jet 12. In an alternative embodimentcontrol unit system 42 is integrated into adriver 18 that is remotely located fromsynthetic jet 12. Moreover,control system 42 may be configured to generate the electrical bias by any suitable device, such as, for example, a computer, logic processor, or signal generator. - In one embodiment, actuators 34, 36 are piezoelectric motive (piezomotive) devices that may be actuated by application of a harmonic alternating voltage that causes the piezomotive devices to rapidly expand and contract. During operation,
control system 42 transmits an electric charge, viadriver 18, topiezoelectric actuators piezomotive actuators second plates internal chamber 20 betweenplates spacer element 28 can also be made flexible and deform to change the volume ofinternal chamber 20. The resulting volume change ininternal chamber 20 causes an interchange of gas or other fluid betweeninternal chamber 20 andexterior volume 32, as described in detail with respect toFIGS. 3 and 4 . -
Piezomotive actuators piezomotive actuators plates plates single actuators plates - The components of
synthetic jet 12 may be adhered together or otherwise attached to one another using adhesives, solders, and the like. In one embodiment, a thermoset adhesive or an electrically conductive adhesive is employed tobond actuators composite structures 38, 40. In the case of an electrically conductive adhesive, an adhesive may be filled with an electrically conductive filler such as silver, gold, and the like, in order to attach lead wires (not shown) tosynthetic jet 12. Suitable adhesives may have a hardness in the range of Shore A hardness of 100 or less and may include as examples silicones, polyurethanes, thermoplastic rubbers, and the like, such that an operating temperature of 120 degrees or greater may be achieved. - In an embodiment of the invention, actuators 34, 36 may include devices other than piezoelectric motive devices, such as hydraulic, pneumatic, magnetic, electrostatic, and ultrasonic materials. Thus, in such embodiments,
control system 42 is configured to activaterespective actuators control system 42 may be configured to provide a rapidly alternating electrostatic voltage to actuators 34, 36 in order to activate and flex respective first andsecond plates - The operation of
synthetic jet 12 is described with reference toFIGS. 3 and 4 . Referring first toFIG. 3 ,synthetic jet 12 is illustrated asactuators second plates internal chamber 20, as depicted byarrows 44. As first andsecond plates internal chamber 20 increases, and ambient fluid orgas 46 rushes intointernal chamber 20 as depicted by the set ofarrows 48.Actuators control system 42 so that when first andsecond plates internal chamber 20, vortices are already removed from edges oforifice 30 and thus are not affected by theambient fluid 46 being drawn intointernal chamber 20. Meanwhile, a jet ofambient fluid 46 is synthesized by vortices creating strong entrainment ofambient fluid 46 drawn from large distances away fromorifice 30. -
FIG. 4 depictssynthetic jet 12 asactuators second plates internal chamber 20, as depicted byarrows 50. The internal volume ofinternal chamber 20 decreases, andfluid 22 is ejected as a cooling jet throughorifice 30 in the direction indicated by the set ofarrows 52 toward adevice 54 to be cooled, such as, for example a light emitting diode. As the fluid 22 exitsinternal chamber 20 throughorifice 30, the flow separates at the sharp edges oforifice 30 and creates vortex sheets which roll into vortices and begin to move away from edges oforifice 30. - While the synthetic jet of
FIGS. 1-4 is shown and described as having a single orifice therein, it is also envisioned that embodiments of the invention may include multiple orifice synthetic jet actuators. Additionally, while the synthetic jet actuators ofFIGS. 1-4 are shown and described as having an actuator element included on each of first and second plates, it is also envisioned that embodiments of the invention may include only a single actuator element positioned on one of the plates. Furthermore, it is also envisioned that the synthetic jet plates may be provided in a circular, rectangular, or alternatively shaped configuration, rather than in a square configuration as illustrated herein. - According to embodiments of the invention, a synthetic jet device is provided that includes plates or blades that are formed in-part or in-whole of a non-metallic material—and thus are generally referred to hereafter as “non-metallic plates.” The plates can be formed from any of a number of suitable non-metallic materials that may be selected and tailored to set the stiffness and thus adjust the resonant frequency of the synthetic jet. By selecting a specific non-metallic material from which to form the plates in-part or in-whole, the plates can be fabricated to have much lower resonant frequency for less noise and a reduced mass that can provide lower vibration.
- According to embodiments of the invention, the non-metallic material from which the plate is formed in-part or in-whole can be a number of suitable non-metallic materials, such as (but not limited to): a thermoplastic or thermoset in the form of polyethylene, polypropylene, polystyrene, polyvinyl chloride, and polytetrafluoroethylene (PTFE), Polyethylene terephthalate (PET), Polyethylene (PE), High-density polyethylene (HDPE), Polyvinyl chloride (PVC), Polyvinylidene chloride (PVDC) Low-density polyethylene (LDPE), Polypropylene (PP) Polystyrene (PS), High impact polystyrene (HIPS) Polyamides (PA) Acrylonitrile butadiene styrene (ABS) Polycarbonate (PC) Polycarbonate/Acrylonitrile Butadiene Styrene (PC/ABS) Polyurethanes (PU), Epoxies and combinations thereof, including combinations of various thermoplastics, thermosets and fillers. The fillers loading the plastic can include electrically conductive and insulating fillers such as silver particles, ceramics, glasses, etc. In forming the plates, common practices such as casting or injection molding may be employed.
- In some embodiments of the invention, a metallic coating is applied to a plate formed of non-metallic material. In other embodiments of the invention, the plate can be made sufficiently electrically conductive (via use of a filler) so that a metallic coating is not necessary.
- Referring to
FIG. 5 , a build-up process for fabricating a non-metallic plate 60 (and synthetic jet 12) is shown according to one embodiment of the invention. In a first step of the process, a non-metallic and electrically insulating material orsubstrate 60 is provided, such as a substrate formed of any of the thermoplastic or thermoset materials set forth above. In a next step, thenon-metallic substrate 62 is dipped in a catalyst (e.g., palladium catalyst), as indicated at 64, to activate a surface/backside protect for the plate. A metallic material that is electrically conducting, such as copper or nickel, is then applied via electroless plating in a next step, as indicated at 66, to form the final structure of thenon-metallic plate 60. Upon plating, a conductive epoxy (e.g., Ag epoxy) is utilized to secure apiezomotive actuator plate 60. Finally,electrical conduits 68, such as wires or flex circuit material, are attached to thepiezomotive actuator plate 60. An adhesive, such as silicon, can then be used to join the twoplates 60 of the synthetic jet together—with the silicon forming thespacer element 28 between the two plates of thesynthetic jet 12 that is formed. - With respect to the process illustrated and described in
FIG. 5 , processing alternate to electroless plating, such as evaporation or sputtering techniques, can be used to deposit the metal. Electroplating can then follow if a thicker metal is desired. Typical metallization schemes may include palladium activated electroless copper or nickel, sputtered or evaporated Ti, Cr, TiW, Cu, Ni, Au, Al followed by thicker plating of Cu, or Ni capped with a thin Au layer (if needed to prevent oxidation). Sputtered or evaporated processes will typically start with deposition of Ti, Cr, or TiW to promote metal adhesion. The finished metal can be patterned if desired using shadow masking or common lithographic pattern and etch steps. In another embodiment, the plate may be cast from a piezo-polymer material, metalized on both sides and polarized to form an integral actuator plate. - Referring now to
FIG. 6 , another example of a non-metallic plate(s) 70 (and a build-up process for fabrication of a synthetic jet 12) is shown according to an embodiment of the invention. Thenon-metallic plates 70 inFIG. 6 are formed as a thin single-sided copper coated glass-reinforced epoxy laminate sheet (e.g., FR4 PCB blanks)—alternately referred to hereafter as copper coated PCB blanks. In fabrication of thesynthetic jet 12, the copper coatedPCB blanks 70 are provided and a conductive epoxy (e.g., Ag epoxy) and piezo-actuator actuator non-metallic plates 70.Electrical conduits 68, such as urethane coated wires, are then attached to the piezo element and the copper coated PCB blanks 70 (e.g., soldered, conductive epoxied, or mechanically attached), with an adhesive such assilicon 28 applied along a perimeter of theplates 70 used to join the two plates of thesynthetic jet 12 together—thesilicon 28 sealing theplates 70 together while also leaving an aperture or orifice therein. - In other embodiments of the invention, the non-metallic plates of the
synthetic jet 12 may be formed of Kapton® or another suitable dielectric material. One embodiment where Kapton plates are utilized for forming non-metallic plates is provided inFIG. 7 , where a build-up process for fabrication of the plate(s) is illustrated. As shown in the build-up process ofFIG. 7 , for each non-metallic plate, abare Kapton plate 72 is first provided, with aconductive lead 74 then being formed on thetop surface 76 thereof—in the form of a sputtered lead, Kapton connector, wire, or line of conductive epoxy. In a next step of the build-up process, a piezo-actuator Kapton plate 72 so as to be electrically coupled to theconductive lead 74. Finally,electrical connections 68 are provided for connection to the piezo-actuators - In another embodiment where Kapton plates are utilized, and as shown in the build-up process of
FIG. 8 ,non-metallic plates 78 are provided that are each constructed as a Kapton circuit—with a thicker layer of Kapton being provided withinternal wiring 80 therein that can connect to the piezo-actuator internal wiring 80 can be completely covered by Kapton and exposed locally at the piezo-actuator - Referring now to
FIGS. 9 and 10 , in additional embodiments of the invention, the non-metallic plates of a synthetic jet are made out of a single piece of non-metallic material that is folded double at a bridge portion to form a pair of plates. Referring first to the build-up process ofFIG. 9 , a double-folded plate is fabricated by first providing a single piece of non-metallic material (e.g., Kapton) 82 that is folded double at abridge portion 84 to define a pair ofplate portions FIG. 9 , thebridge portion 84 is formed as a thin strip of material that is centered along a width of theplates bridge portion 84 could instead be formed to extend a full width of theplates second plates plate 82 includes internal electrical connections or leads formed therein that are covered and exposed locally at the piezo-actuators and lead contacts. - In the embodiment of
FIG. 9 , the internal wiring includes acontinuous lead 90 that extends between the two piezo-actuators respective plates actuators electrical connections 68 provided for connection to the synthetic jet is also reduced, asconnections 68 are only needed for each of the two piezo-actuators conductive lead 90 that extends across thebridge portion 84—for a total of threeelectrical connections 68 to the synthetic jet. - In an alternative embodiment of the double-folded plate of
FIG. 9 (and the continuous lead shown therein extending across the bridge portion),FIG. 10 shows a double-foldedplate 82 having a discontinuous lead through the bridge portion—such that twoseparate leads 92 are defined. The separate leads 92 are connected to the two piezo-actuators respective plates electrical connections 68 being provided for connection to the two piezo-actuators FIG. 10 , a total of fourelectrical connections 68 are provided for to the synthetic jet. - Referring now to
FIG. 11 , another example of a non-metallic plate 94 (and a build-up process for fabrication thereof) is shown according to an embodiment of the invention. Aplate 94 is provided that is formed out of non-metallic, non-conductive material, such as Kapton. Eachplate 94 that is provided has ametallic hole 96 formed therein that is located so as to be positioned under a respective piezo-actuator plate 94, as shown on the front and back surfaces 98, 100 of the plate inFIG. 11 . Thishole 96 may be filled with a metallic insert or conductive epoxy to form an electrical connection to the backside of the piezo-actuator front surface 98 of arespective plate 94. An electrical flex circuit or sputteredline contact 102 is formed on theback surface 100 of theplate 94 to bring the electrical signal to a position where wires or flex circuit leads 68 can be attached to thesynthetic jet 12. - Beneficially, embodiments of the invention thus provide a synthetic jet assembly that incorporates non-metallic plates to lower a level of acoustic noise during operation of the synthetic jet. The non-metallic plates are fabricated to have a lower stiffness than metallic plates so as to provide a lower resonant frequency that generates less noise, with the plates also having a reduced mass that provides lower vibration during operation. The non-metallic plates may be formed of inexpensive materials such that the cost thereof is reduced as compared to metallic plates.
- Therefore, according to one embodiment of the invention, a synthetic jet device includes a first plate, a second plate spaced apart from the first plate, a spacing component coupled to and positioned between the first and second plates to form a chamber and including an orifice therein, and an actuator element coupled to at least one of the first or second plates to selectively cause deflection thereof, wherein the first and second plates are formed at least in part of a non-metallic material.
- According to another aspect of the invention, a method of fabricating a synthetic jet device includes constructing a first plate and a second plate at least in part of a non-metallic material, attaching an actuator element to at least one of the first and second plates to selectively cause deflection thereof, and positioning the first plate relative to the second plate by way of a spacing component, the spacing component securing the first plate to the second plate in a spaced apart arrangement to form a chamber and including an orifice therein. The method also includes attaching electrical connections to the actuator element and the respective one of the first and second plates to which the actuator element is attached so as to enable a selective applying of voltage to the actuator element.
- According to yet another aspect of the invention, a synthetic jet device includes a first plate, a second plate spaced apart from the first plate to form a chamber, and an actuator element coupled to at least one of the first or second plates to selectively cause deflection thereof so as to change a volume of the chamber. Each of the first and second plates includes a first material comprising an electrically insulating, non-metallic material and a second material comprising an electrically conductive material, the second material being formed as one of a filler material, a metalizing layer, and internally or externally formed leads provided on or in the first material.
- While the invention has been described in detail in connection with only a limited number of embodiments, it should be readily understood that the invention is not limited to such disclosed embodiments. Rather, the invention can be modified to incorporate any number of variations, alterations, substitutions or equivalent arrangements not heretofore described, but which are commensurate with the spirit and scope of the invention. Additionally, while various embodiments of the invention have been described, it is to be understood that aspects of the invention may include only some of the described embodiments. Accordingly, the invention is not to be seen as limited by the foregoing description, but is only limited by the scope of the appended claims.
Claims (22)
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US14/206,376 US20140271277A1 (en) | 2013-03-15 | 2014-03-12 | Synthetic jet with non-metallic blade structure |
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US201361787738P | 2013-03-15 | 2013-03-15 | |
US14/206,376 US20140271277A1 (en) | 2013-03-15 | 2014-03-12 | Synthetic jet with non-metallic blade structure |
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US14/206,376 Abandoned US20140271277A1 (en) | 2013-03-15 | 2014-03-12 | Synthetic jet with non-metallic blade structure |
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US (1) | US20140271277A1 (en) |
EP (1) | EP2969229B1 (en) |
JP (1) | JP6412097B2 (en) |
KR (1) | KR20150128981A (en) |
CN (1) | CN105307776B (en) |
TW (1) | TWI626382B (en) |
WO (1) | WO2014150915A1 (en) |
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US20160095255A1 (en) * | 2014-09-29 | 2016-03-31 | Ice Computer, Inc. | Thermal piezoelectric apparatus |
US20160333871A1 (en) * | 2015-05-11 | 2016-11-17 | The Boeing Company | Synthetic vacuum generator |
WO2016195823A1 (en) * | 2015-06-02 | 2016-12-08 | Intel Corporation | Package integrated synthetic jet device |
US20170352547A1 (en) * | 2014-12-24 | 2017-12-07 | Tovis Co., Ltd. | Delay-etching member and display panel etching method by means of same |
CN108393199A (en) * | 2018-04-27 | 2018-08-14 | 清华大学 | Combining jet device |
WO2021138305A1 (en) * | 2019-12-29 | 2021-07-08 | Actasys, Inc. | Novel design and production technique of synthetic jet actuators |
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Also Published As
Publication number | Publication date |
---|---|
EP2969229A1 (en) | 2016-01-20 |
EP2969229B1 (en) | 2019-05-08 |
CN105307776A (en) | 2016-02-03 |
TW201447114A (en) | 2014-12-16 |
KR20150128981A (en) | 2015-11-18 |
JP2016514050A (en) | 2016-05-19 |
TWI626382B (en) | 2018-06-11 |
EP2969229A4 (en) | 2016-11-09 |
WO2014150915A1 (en) | 2014-09-25 |
CN105307776B (en) | 2019-07-16 |
JP6412097B2 (en) | 2018-10-24 |
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