TWI626382B - Synthetic jet device and method for fabricating the same - Google Patents

Abstract

A system and method for reducing the resonant frequency in a synthetic jet device to have less noise and reduce vibration is disclosed. A synthetic jet flow device includes: a first plate, a second plate spaced from the first plate, coupled to the first plate and the second plate, and positioned between the first plate and the second plate Forming a chamber and including therein a spacer assembly, and an actuator member coupled to at least one of the first plate or the second plate to selectively cause deflection thereof, wherein the first plate And the second plate is at least partially formed of a non-metallic material.

Description

Synthetic jet flow device and method of manufacturing same Cross-reference to related applications

This application is a non-provisional application of the U.S. Provisional Patent Application Serial No. 61/787,738, filed on March 15, 2013, which is hereby incorporated by reference.

Synthetic jet actuators are a widely used technique that produces a fluid synthesis jet that affects the flow of the fluid on a surface to disperse heat from the surface. A typical synthetic jet actuator includes an outer casing defining an interior chamber. There is a hole in one of the walls of the outer casing. The actuator is further comprised with a mechanism in or around the housing for periodically changing the volume within the interior chamber such that a series of fluid scrolls are generated and projected from the bore of the housing into an external environment. An example of a volume change mechanism can include, for example, a piston positioned in a jet housing to move fluid into or out of the bore or as a flexible diaphragm of one of the walls of the housing during reciprocation of the piston. The flexible diaphragm is typically actuated by a piezoelectric actuator or other suitable member.

Typically, a control system is used to generate the tune motion of the volume varying mechanism. When the mechanism reduces the volume of the chamber, fluid is ejected from the chamber through the aperture. As the fluid passes through the aperture, the sharp edges of the aperture separate the flow to create a vortex surface that is entrained in the vortex. These vortexes are removed from the edge of the hole at their own self-induced velocity. As the mechanism increases the chamber volume, the surrounding fluid is drawn into the chamber at a greater distance from the distance hole. Since the vortex system has been removed from the edge of the hole, it is not affected by the surrounding fluid entering the chamber. When the vortex travels away from the hole At the same time, they synthesize a fluid jet, a "synthesis jet".

It will be appreciated that one of the disadvantages of the noise-based synthetic jet operation is the use of a dual cooling jet (DCJ) of an actuator (i.e., piezoelectric actuator) on each of the two surfaces of the device. The DCJ is typically excited in or near its mechanical resonance mode to optimize electrical to mechanical switching and to achieve maximum deflection at the minimum mechanical energy input. While the DCJ operation is optimized when operating in or near its mechanical resonance mode, it will be appreciated that operating the DCJ at a particular frequency can generate significant amounts of noise when the device's track is determined by the drive frequency portion of the device.

A metallized piezoelectric actuator is typically used to construct a composite jet (including DCJ) having a number of variations that are bonded to a metal or metal sheet using a conductive adhesive. Electrical connection to the piezoelectric actuator is achieved by connecting to the metallized exposed piezoelectric side and to the plate material. Solder or conductive adhesives are commonly used. Next, the two sheets are adhered together along the circumference of the opening away from the opening to form a jet. After actuation of the piezoelectric actuator, the gas permeable aperture is drawn in or diverged to create a net positive airflow.

One of the disadvantages of metal plates or metal sheets is that they are very expensive and their stiffness causes higher resonance frequencies to increase DCJ operating noise. In addition, the metal mass can cause increased vibration. Further, the resonance frequency of the DCJ can be increased due to the metal plate.

Accordingly, it would be desirable to provide a synthetic jet (such as DCJ) having one of the plates that are fabricated to have a lower resonant frequency to reduce noise. It would also be desirable for such panels to have a reduced quality that provides one of the lower vibrations.

According to an aspect of the present invention, a synthetic jet flow device includes: a first plate, a second plate spaced apart from the first plate, coupled to the first plate and the second plate, and positioned on the first plate and the second plate An actuator member that forms a chamber and includes a spacer assembly therein and is coupled to at least one of the first or second panel to selectively cause deflection thereof, wherein the first panel And the second plate is at least partially formed of a non-metallic material.

In accordance with another aspect of the present invention, a method of making a synthetic jet flow device includes: constructing a first plate and a second plate at least in part from a non-metallic material; attaching an actuator element to the first plate or At least one of the two plates selectively causing its deflection; and positioning the first plate relative to the second plate via a spacer assembly, the spacer assembly securing the first plate to the second plate in a spaced configuration to form a The chamber contains a hole therein. The method also includes attaching an electrical connector to the actuator element and a respective one of the first plate and the second plate to which the actuator element is attached to selectively apply a voltage to the actuation Component.

According to still another aspect of the present invention, a synthetic jet flow device includes: a first plate spaced apart from the first plate to form a second plate of a chamber, and coupled to at least one of the first plate or the second plate An actuator element that selectively causes its deflection to change the volume of one of the chambers. Each of the first board and the second board includes a first material (including an electrically insulating, non-metallic material) and a second material (including a conductive material), and the second material is formed as a filler material, a metal The layer and one of the leads formed internally or externally provided on or in the first material.

These and other advantages and features will be more readily apparent from the following description of the preferred embodiments of the invention.

10‧‧‧Synthetic jet assembly

12‧‧‧Synthetic jet

14‧‧‧Installation bracket

16‧‧‧Shell

18‧‧‧Circuit Driver

20‧‧‧Cave/Internal Chamber

22‧‧‧ gas/fluid

24‧‧‧ first board

26‧‧‧ second board

28‧‧‧Parts components/polyoxygen

30‧‧‧ hole

32‧‧‧ External environment/external volume

34‧‧‧Actuator

36‧‧‧Actuator

38‧‧‧Flexible diaphragm/first composite structure

40‧‧‧Flexible diaphragm/second composite structure

42‧‧‧Controller Assembly/Control Unit System

44‧‧‧ arrow

46‧‧‧ surrounding fluid / ambient gas

48‧‧‧ arrow

50‧‧‧ arrow

52‧‧‧ arrow

54‧‧‧ device

60‧‧‧Non-metal plate/substrate

62‧‧‧Non-metal substrate

64‧‧‧ catalyst

68‧‧‧Electric conduit/electrical connectors/flexible circuit leads

70‧‧‧Non-metal plate/PCB blank

72‧‧‧Kapton board

74‧‧‧Electrical leads

76‧‧‧ top surface

78‧‧‧Non-metal plate

80‧‧‧Internal wiring

82‧‧‧Non-metallic materials/double-folded panels

84‧‧‧Bridge section

86‧‧‧First board/board part

88‧‧‧Second board/board part

90‧‧‧Continuous leads

92‧‧‧ lead

94‧‧‧Non-metal plate

96‧‧‧Metal holes

98‧‧‧ front surface

100‧‧‧Back surface

102‧‧‧Sputter line contact

The drawings depict embodiments that are presently contemplated for carrying out the invention.

In the drawings: Figures 1 and 2 are diagrams of a synthetic jet assembly that can be used in one of the embodiments of the present invention.

Figure 3 is a cross-sectional view of the synthetic jet of Figures 1 and 2 depicting the jet as a control system for the diaphragm to travel inwardly and toward the aperture.

Figure 4 is a cross-sectional view of the synthetic jet of Figures 1 and 2 depicting the jet as a control system that causes the diaphragm to travel outwardly and away from the aperture.

Figure 5 illustrates a process for establishing a synthetic jet containing one of the non-metallic plates therein, in accordance with an embodiment of the present invention.

6 illustrates a process for establishing a one of synthetic jets containing a non-metallic plate therein, in accordance with an embodiment of the present invention.

7 illustrates a procedure for establishing a non-metallic plate for fabricating a synthetic jet in accordance with an embodiment of the present invention.

Figure 8 illustrates a procedure for establishing a non-metallic plate for fabricating a synthetic jet in accordance with an embodiment of the present invention.

9 illustrates a procedure for establishing one of a dual folded non-metallic plate structure for fabricating a synthetic jet in accordance with an embodiment of the present invention.

Figure 10 illustrates a procedure for establishing a dual folded non-metallic plate structure for fabricating a synthetic jet in accordance with an embodiment of the present invention.

Figure 11 illustrates a procedure for establishing a non-metallic plate structure for fabricating a synthetic jet in accordance with an embodiment of the present invention.

Embodiments of the present invention are directed to a synthetic jet flow device having a non-metallic plate that provides a lower resonant frequency for noise reduction and vibration reduction.

1 through 4 illustrate one common configuration of a synthetic jet assembly 10 for use in an embodiment of the present invention for better understanding of the objectives of the present invention, along with the movement of various components during its operation. Although a particular synthetic jet assembly 10 is illustrated in FIGS. 1-4, it will be appreciated that embodiments of the present invention may be incorporated into a synthetic jet assembly of a variable configuration, and thus the synthetic jet assembly 10 is unintentionally It is intended to limit the scope of the invention. As an example, a synthetic jet assembly that does not include a mounting bracket for fixed positioning of a synthetic jet is considered to be within the scope of the present invention.

Referring first to Figure 1, the synthetic jet assembly 10 is shown to include a synthetic jet 12 (one of which is depicted in Figure 2) and a mounting bracket 14. In an embodiment, although it is recognized that the mounting bracket can be constructed to have a different shape/contour (such as one of the semi-circular brackets configured to receive a circular synthetic jet 12 therein), the mounting bracket 14 series A u-shaped mounting bracket attached to one of the body or outer casing 16 of the synthetic jet 12 is attached at one or more locations. A circuit driver 18 can be externally positioned or attached to the mounting bracket 14. Alternatively, circuit driver 18 can be remotely located from composite jet assembly 10.

Referring now to Figures 1 and 2 together, as shown therein, the outer casing 16 of the synthetic jet 12 defines and partially encloses an interior chamber or cavity 20 having a gas or fluid 22 therein. Although the outer casing 16 and the inner chamber 20 may actually employ any geometric configuration in accordance with various embodiments of the present invention, for purposes of discussion and understanding, the outer casing 16 is shown in the cross-section of FIG. 2 as including a first Plate 24 and a second plate 26 (alternatively referred to as sheets or foils) are maintained in a spaced relationship by spacer elements 28 positioned between them. In an embodiment, the spacer element 28 maintains a spacing of about 1 mm between the first plate 24 and the second plate 26. One or more apertures 30 are formed between the first panel 24 and the second panel 26 and the sidewalls of the spacer member 28 to place the interior chamber 20 in fluid communication with a surrounding external environment 32. In an alternate embodiment, the spacer element 28 includes a front surface (not shown) having one or more apertures 30 formed therein.

According to various embodiments, the first plate 24 and the second plate 26 may be formed from a metal, plastic, glass, and/or ceramic. Likewise, the spacer element 28 can be formed from a metal, plastic, glass, and/or ceramic. Suitable for metal containing materials such as nickel, aluminum, copper and molybdenum, or alloys such as stainless steel, brass, bronze and the like. Suitable for polymers and plastics including thermoplastics (such as polyolefins, polycarbonates, thermosets, epoxies, urethanes, acrylic polymers, polyoxyl, polyimine and photoresist) And other elastic plastics. Suitable ceramics include, for example, titanates (such as barium titanate, barium titanate, and lead zirconium titanate) and molybdates. In addition, various other components of the synthetic jet 12 can also be formed from metal.

According to an exemplary embodiment, the actuators 34, 36 are coupled to the respective first and second plates 24, 26 to form a first composite structure and a second composite or flexible membrane 38, 40, etc. Driver 18 is controlled via a controller assembly or control unit system 42. Thus, the synthetic jet 12 is constructed as a DCJ. In order to control the diaphragms 38, 40, each flexible diaphragm 38, 40 A metal layer can be provided and one of the metal electrodes can be placed adjacent to the metal layer such that the diaphragms 38, 40 can be moved by an electrical bias imposed between one of the electrodes and the metal layer. As shown in FIG. 1, in an embodiment, controller assembly 42 is electrically coupled to driver 18, which is coupled directly to mounting bracket 14 of synthetic jet 12. In an alternate embodiment, control unit system 42 is integrated into one of the drivers 18 that are located distally from the synthesizing jet 12. Moreover, control system 42 can be configured to generate an electrical bias by any suitable device, such as, for example, a computer, logic processor, or signal generator.

In one embodiment, the actuators 34, 36 are piezoelectric motion (pressure) devices that are actuated by applying a harmonic AC voltage to cause the piezoelectric actuator to rapidly expand and contract. During operation, control system 42 transmits a charge to piezoelectric actuators 34, 36 via driver 18, which or otherwise undergoes mechanical stress and/or strain in response to the charge. The stress/strain of the piezoelectric actuators 34, 36 causes deflection of the respective first and second plates 24, 26 such that a one-time or periodic motion is achieved to vary the volume of the internal chamber 20 between the plates 24, 26. . According to an embodiment, the spacer element 28 can also be made flexible and deformable to change the volume of the interior chamber 20. The resulting volume change in internal chamber 20 causes one of the gas or other fluid between internal chamber 20 and outer volume 32 to be interchanged, as described in detail with respect to Figures 3 and 4 .

The piezoelectric actuators 34, 36 can be single crystal or dual crystal devices, in accordance with various embodiments of the present invention. In a single crystal embodiment, the piezoelectric actuators 34, 36 can be coupled to plates 24, 26 formed of a material, including metal, plastic, glass, or ceramic. In a dual crystal embodiment, one or more of the piezoelectric actuators 34, 36 can be a dual crystal actuator coupled to the plates 24, 26 formed of piezoelectric material. In an alternate embodiment, the dual crystals can include a single actuator 34, 36 and the plates 24, 26 are second actuators.

The components of the synthetic jet 12 can be adhered together or otherwise attached to each other using an adhesive, solder, and the like. In one embodiment, a thermoset adhesive or a conductive adhesive is used to bond the actuators 34, 36 to the first and second plates 24, 26 to form the first composite structure 38 and the second composite structure 40. In the case of a conductive adhesive, an adhesive can be used A conductive filler such as silver, gold, and the like is filled to attach a wire (not shown) to the synthetic jet 12. Suitable adhesives may have one hardness in the range of 100 Shore A hardness or less, and may include, for example, polyfluorene oxide, polyurethane, thermoplastic rubber, and the like such that one operation of 120 degrees or more can be achieved. temperature.

In an embodiment of the invention, the actuators 34, 36 may comprise devices other than piezoelectric motion devices, such as hydraulic, pneumatic, magnetic, electrostatic, and ultrasonic materials. Thus, in such embodiments, control system 42 is configured to actuate respective actuators 34, 46 in a corresponding manner. For example, if an electrostatic material is used, control system 42 can be configured to provide a fast alternating electrostatic voltage to actuators 34, 36 to actuate and flex the respective first and second plates 24, 26.

The operation of synthesizing the jet 12 will be described with reference to FIGS. 3 and 4. Referring first to FIG. 3, the composite jet 12 is illustrated as actuators 34, 36 that are controlled such that the first plate 24 and the second plate 26 move outward relative to the interior chamber 20, as depicted by arrow 44. . As the first plate 24 and the second plate 26 flex outwardly, the internal volume of the interior chamber 20 increases and ambient fluid or gas 46 rushes into the interior chamber 20 as depicted by the set of arrows 48. The actuators 34, 36 are controlled by the control system 42 such that as the first plate 24 and the second plate 26 move outwardly from the interior chamber 20, the scroll train has been removed from the edge of the bore 30 and is therefore not inhaled The surrounding fluid 46 in the interior chamber 20 is affected. At the same time, a jet of one of the surrounding fluids 46 is synthesized by a vortex that produces a strong mist of the surrounding fluid 46 that is drawn a large distance from the aperture 30.

4 depicts the synthetic jet 12 as being controlled such that the first and second plates 24, 26 are deflected inwardly into the actuators 34, 36 in the interior chamber 20, as depicted by arrow 50. The internal volume of the internal chamber 20 is reduced, and the fluid 22 is ejected as a cooling jet in a direction indicated by the set of arrows 52 through the aperture 30 toward a device 54 to be cooled, such as, for example, a light emitting diode. As fluid 22 exits inner chamber 20 through aperture 30, the flow separates at the sharp edges of aperture 30 and creates a vortex surface that is rolled into the vortex and begins to move away from the edge of aperture 30.

Although the synthetic jets of Figures 1 through 4 are shown and described as having a single Holes, however, it is contemplated that embodiments of the invention may include a plurality of orifice synthesis jet actuators. Additionally, while the synthetic jet actuators of Figures 1-4 are shown and described as having actuator elements included on each of the first and second plates, it is contemplated that embodiments of the invention may only A single actuator element that is positioned on one of the plates. Furthermore, it is also contemplated that the composite jet plate may be provided in a circular, rectangular or alternatively shaped configuration, rather than in a square configuration as illustrated herein.

In accordance with an embodiment of the present invention, a synthetic jet flow device is provided that includes a plate or sheet that is formed partially or entirely of a non-metallic material and is therefore often referred to hereinafter as a "non-metallic plate." The plates may be formed from any of a number of suitable non-metallic materials that are selected and adjusted to set the stiffness and thus the resonant frequency of the synthetic jet. Insofar as a particular non-metallic material is selected (some or all of which are formed by such, etc.), the plates can be fabricated to have a lower resonant frequency for less noise and a reduced quality to provide lower vibration .

According to an embodiment of the invention, the non-metallic material from which the plate is partially or wholly formed may be a number of suitable non-metallic materials such as, but not limited to, polyethylene, polypropylene, polystyrene, polyvinyl chloride and poly Tetrafluoroethylene (PTFE), polyethylene terephthalate (PET), polyethylene (PE), high density polyethylene (HDPE), polyvinyl chloride (PVC), polyvinylidene chloride (PVDC), Low Density Polyethylene (LDPE), Polypropylene (PP), Polystyrene (PS), Impact Resistant Polystyrene (HIPS), Polydecylamine (PA), Acrylonitrile Butadiene Styrene (ABS) , polycarbonate (PC) polycarbonate / acrylonitrile - butadiene - styrene (PC / ABS), polyurethane (PU), epoxy resin and combinations thereof (including various thermoplastics, thermosets and filling One of the forms of a combination of thermoplastics or thermosets. The plastic filler can contain conductive and insulating fillers such as silver particles, ceramics, glass, and the like. In forming the sheet, customary practices such as casting or injection molding may be employed.

In some embodiments of the invention, a metal coating is applied to a plate formed from a non-metallic material. In other embodiments of the invention, the plate may be (via using a filler) Made fully electrically conductive so that no metal coating is required.

Referring to Figure 5, a procedure for establishing one of a non-metallic sheet 60 (and synthetic jet 12) is shown in accordance with an embodiment of the present invention. In a first step of the procedure, a non-metallic and electrically insulating material or substrate 60 is provided, such as one of the thermoplastic or thermoset materials illustrated above. In the next step, the non-metallic substrate 62 is immersed in a catalyst (e.g., palladium catalyst) (as indicated at 64) to initiate surface/backside protection of the panel. Next, a conductive metallic material, such as copper or nickel, is applied via electroless plating in the next step (as indicated at 66) to form the final structure of the non-metallic sheet 60. After electroplating, a conductive epoxy (e.g., Ag epoxy) is utilized to secure the one-pressure electric actuators 34, 36 to the plate 60. Finally, an electrical conduit 68, such as a wire or flexible circuit material, is attached to the piezo actuators 34, 36 and plate 60. Next, an adhesive, such as polyoxymethylene, can be used to join the two sheets 60 of the synthetic jet together, wherein the polyoxane forming the spacer elements 28 between the two plates of the synthetic jet 12 is formed.

Referring to the procedure illustrated and described in Figure 5, the process is replaced with electroless plating (such as evaporation or sputtering techniques) that can be used to deposit metal. Next, electroplating can follow whether a thicker metal is desired. A typical metallization scheme may include palladium activated electroless copper or nickel plating, sputtering or evaporation of Ti, Cr, TiW, Cu, Ni, Au, Al, followed by electroplating of a thicker Cu over a thinner Au layer or Ni (if it is necessary to prevent oxidation). Sputtering or evaporation processes typically begin with the deposition of Ti, Cr or TiW to promote metal adhesion. The finished metal can be patterned (if desired) using shadow masking or general lithographic patterns and etching steps. In another embodiment, the plates may be cast from a piezoelectric polymer material, metallized on both sides, and polarized to form an integral actuator plate.

Referring now to Figure 6, another example of a non-metallic or metal plate 70 (and a procedure for establishing one of the synthetic jets 12) is shown in accordance with one embodiment of the present invention. The non-metallic sheet 70 of Figure 6 is formed as a thinner single-sided copper coated glass reinforced epoxy laminate (e.g., FR4 PCB blank), hereinafter referred to as a copper coated PCB blank. In manufacturing In the synthetic jet 12, a copper coated PCB blank 70 is provided, and then a conductive epoxy (e.g., Ag epoxy) and piezoelectric actuators 34, 36 are applied thereto, wherein the epoxy will The piezoelectric actuators 34, 36 are fixed to the copper coated non-metal plate 70. Next, an electrical conduit 68, such as a urethane coated wire, is attached to the piezoelectric element and the copper coated PCB blank 70 (eg, soldered, conductive epoxy bonded or mechanically attached), along the board An adhesive (such as polyoxynium 28) is applied to one of the perimeters 70 to bond the two plates of the synthetic jet 12 together, and the polyoxygen 28 seals the plates 70 together with a void or aperture therein.

In other embodiments of the invention, the non-metallic sheet of synthetic jet 12 may be formed from Kapton® or another suitable dielectric material. An embodiment in which a Kapton plate is utilized to form a non-metallic plate is provided in Figure 7, wherein a procedure for establishing one of the panels is illustrated. As shown in the setup procedure of FIG. 7, for each non-metal plate, a bare Kapton plate 72 is first provided, wherein one of the conductive leads is followed by a sputtered lead, a Kapton connector, a wire or a conductive epoxy. The form is formed on its top surface 76. In a step below the setup procedure, a piezoelectric actuator 34, 36 is placed over each of the Kapton plates 72 for electrical coupling to the conductive leads 74. Finally, an electrical connector 68 is provided for connection to the piezoelectric actuators 34, 36 and the conductive leads 68. Next, an adhesive, such as polyoxymethylene, can be used to join the two plates of the synthetic jet together, wherein the polyxenium oxygen forms a spacer element between the two plates of the synthetic jet.

In another embodiment in which a Kapton board is utilized, and as shown in the setup procedure of Figure 8, a non-metal plate 78 is provided, each of which is constructed as a Kapton circuit in which a thicker layer of Kapton is connectable therein. The internal wiring 80 to the piezoelectric actuators 34, 36. The internal wiring may be completely covered by Kapton and partially exposed at the piezoelectric actuators 34, 36 and lead contacts (to be connected to the electrical conduit 68), or may be fully exposed.

Referring now to Figures 9 and 10, in an additional embodiment of the present invention, a synthetic jet of non-metallic sheet is formed from a single piece of non-metallic material that is double folded at a bridging portion to form a pair of plates. Referring first to the setup procedure of Figure 9, a double folded panel is provided first. A one-piece non-metallic material (e.g., Kapton) 82 is fabricated that is double folded at a bridging portion 84 to define a pair of plate portions 86, 88. As shown in FIG. 9, the bridging portion 84 is formed as a thinner strip of one of the materials concentrated along one of the widths of the plates 86, 88. However, it will be appreciated that the bridging portion 84 can alternatively be formed to extend the full width of one of the panels 86, 88, but is configured to provide one of its folds to substantially unambiguously separate the first panel 86 from the second panel 88. . According to an exemplary embodiment, the double folded panel 82 includes internal point connectors or leads formed therein that are covered and exposed at the piezoelectric actuator and lead contacts.

In the embodiment of FIG. 9, the internal wiring includes one continuous lead 90 extending between the two piezoelectric actuators 34, 36 positioned on the respective plates 86, 88, and is coupled to the piezoelectric actuator 34, Each of 36 reduces the number of inner leads formed in the double folded panel. When only two of the two piezoelectric actuators 34, 36 and the continuous conductive leads 90 extending across the bridge portion 84 require a connector 68 (for all three electrical connections 68 to the composite jet), it is provided to the synthetic jet The number of connected electrical connectors 68 is also reduced.

In an alternate embodiment of the double folded panel of Figure 9 (and the continuous leads extending across the bridging portion shown therein), Figure 10 shows a double folded panel having one of the discontinuous leads passing through the bridging portion. 82, such that two separate leads 92 are defined. The individual leads 92 are connected to piezoelectric actuators 34, 36 positioned on respective plates 86, 88, wherein the electrical connections 68 provide connections to the two piezoelectric actuators 34, 36 and provide conductive leads 92. Thus, in the embodiment of Figure 10, all four electrical connectors 68 are provided to the synthesizing jet.

Referring now to Figure 11, another example of a non-metallic sheet 94 (and one of the procedures for creating one) is shown in accordance with one embodiment of the present invention. A plate 94 is provided which is formed from a non-metallic, non-conductive material such as Kapton. Plates 94 are provided having one of the metal apertures 96 formed therein for positioning beneath a respective piezoelectric actuator 34, 36, i.e., positioned on the plate 94, such as the plate of FIG. The front surface 98 and the rear surface 100 are shown. This aperture 96 can be filled by a metal insert or conductive epoxy to form an electrical connection to one of the back sides of the piezoelectric actuators 34, 36 positioned on the front surface 98 of a respective panel 94. Electric flexibility A circuit or sputter line contact 102 is formed on the back surface 100 of the board 94 to carry an electrical signal into where the wire or flexible circuit lead 68 can be attached to one of the synthetic jets 12.

Beneficially, therefore, embodiments of the present invention provide a synthetic jet assembly that incorporates a non-metallic sheet to reduce one of the levels of noise during operation of the synthetic jet. Non-metallic sheets are manufactured to have a lower stiffness than metal sheets to provide a lower resonant frequency to produce less noise, wherein the sheets also have a reduced quality that provides a lower vibration during operation. Non-metallic sheets can be formed from inexpensive materials such that their cost can be reduced compared to sheet metal systems.

Therefore, in accordance with an embodiment of the present invention, a synthetic jet flow device includes: a first plate, a second plate spaced from the first plate, coupled to the first plate and the second plate, and positioned on the first plate and the first An actuator member between the two plates to form a chamber and including a spacer therein, and at least one of the first plate or the second plate to selectively cause deflection thereof, wherein The one plate and the second plate are at least partially formed of a non-metallic material.

In accordance with another aspect of the present invention, a method of making a synthetic jet flow device includes: constructing a first plate and a second plate at least in part from a non-metallic material; attaching an actuator element to the first plate or At least one of the two plates selectively causing its deflection; and positioning the first plate relative to the second plate via a spacer assembly, the spacer assembly securing the first plate to the second plate in a spaced configuration to form a The chamber contains a hole therein. The method also includes attaching an electrical connector to the actuator element and a respective one of the first plate and the second plate to which the actuator element is attached to selectively apply a voltage to the actuation Component.

According to still another aspect of the present invention, a synthetic jet flow device includes: a first plate spaced apart from the first plate to form a second plate of a chamber, and coupled to at least one of the first plate or the second plate An actuator element that selectively causes its deflection to change the volume of one of the chambers. Each of the first board and the second board includes a first material (including an electrically insulating, non-metallic material) and a second material (including a conductive material), and the second material is formed as a filler material, a metal Layer and internal formation or external topography provided on or in the first material One of the leads.

Although the present invention has been described in detail with reference to a limited number of embodiments, it should be understood that the invention is not limited to the embodiments disclosed herein. Rather, the invention can be modified to incorporate any number of variations, substitutions, substitutions, or equivalent arrangements that have not been described heretofore, but such configurations correspond to the spirit and scope of the invention. In addition, while the various embodiments of the invention have been described, it is understood that the aspects of the invention may Therefore, the invention is not to be considered as limited by the foregoing description, but only by the scope of the appended claims.

Claims (13)

A synthetic jet flow device comprising: a first plate; a second plate spaced from the first plate; a spacer assembly coupled to the first plate and the second plate and positioned on the first plate Forming a chamber between the second plates and including a hole therein; and an actuator element coupled to at least one of the first plate or the second plate to selectively cause deflection thereof; Each of the first plate and the second plate is at least partially formed by: a first material comprising an electrically insulating, non-metallic material; and a second material comprising a conductive material, the second material A lead formed or formed externally formed as a conductive filler material, or as a metallization layer, or provided on or in the first material. The synthetic jet device of claim 1, wherein the non-metallic material comprises at least one of a thermoplastic plastic and a thermoset material. The composite jet device of claim 1, wherein each of the first plate and the second plate comprises: a non-conductive, non-metallic substrate; and a conductive metallization layer applied to the non-conductive, non-metallic substrate . The composite jet device of claim 1, wherein each of the first plate and the second plate comprises a copper plated printed circuit board (PCB) blank. The synthetic jet device of claim 1, wherein each of the first plate and the second plate comprises: a flexible dielectric layer; and a conductive lead formed on or in an outer surface of the flexible dielectric layer. The synthetic jet device of claim 1, wherein each of the first plate and the second plate comprises a one-piece non-metallic material, the material being folded along one of the bridge portions to form the first plate and the second board. The composite jet device of claim 6, wherein a continuous conductive lead is internally formed in the one-piece non-metallic material and the actuation extends through the bridge to the respective first and second plates Component. The composite jet device of claim 6, wherein a discontinuous conductive lead is internally formed in the one-piece non-metallic material and extends through the bridge to the respective first and second plates Actuator component. A method of manufacturing a synthetic jet flow device, comprising: constructing a first plate and a second plate, the first plate and the second plate being at least partially constructed by: comprising an electrically insulating, non-metallic material a material, and a second material comprising a conductive material, wherein the second material is formed as a conductive filler material, or as a metallization layer, or internally formed on or in the first material or Externally formed leads; attaching an actuator element to at least one of the first plate or the second plate to selectively cause deflection thereof; the first plate being opposed to the second via a spacer assembly Positioning the plate, the spacer assembly securing the first plate to the second plate to form a chamber and including a hole therein in a spaced configuration; and attaching the electrical connector to the actuator member and the A respective one of the first plate and the second plate to which the actuator element is attached is such that a voltage is selectively applied to the actuator element. The method of claim 9, wherein the constructing the first board and the second board comprises selecting a material composition of the first board and the second board to one of the first board and the second board The stiffness is set to a desired amount to adjust the resonant frequency of one of the synthetic jet devices to a desired level. The method of claim 9, wherein the constructing the first board and the second board comprises: providing a non-conductive, non-metallic substrate; and applying a conductive metallization layer to the non-conductive, non-metallized substrate on. The method of claim 9, wherein constructing the first board and the second board comprises providing a copper plated printed circuit board (PCB) blank. The method of claim 9, wherein constructing each of the first plate and the second plate comprises providing a non-conductive, non-metallic material having one of a conductive filler material mixed therein.