US20140087084A1 - Apparatus and method for generating a layer system - Google Patents

Apparatus and method for generating a layer system Download PDF

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Publication number
US20140087084A1
US20140087084A1 US14/032,408 US201314032408A US2014087084A1 US 20140087084 A1 US20140087084 A1 US 20140087084A1 US 201314032408 A US201314032408 A US 201314032408A US 2014087084 A1 US2014087084 A1 US 2014087084A1
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Prior art keywords
particle
particles
coating
reservoir
plasma jet
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Abandoned
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US14/032,408
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English (en)
Inventor
Stefan Nettesheim
Klaus Forster
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Maschinenfabrik Reinhausen GmbH
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Reinhausen Plasma GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Assigned to REINHAUSEN PLASMA GMBH reassignment REINHAUSEN PLASMA GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FORSTER, KLAUS, NETTESHEIM, STEFAN
Publication of US20140087084A1 publication Critical patent/US20140087084A1/en
Assigned to MASCHINENFABRIK REINHAUSEN GMBH reassignment MASCHINENFABRIK REINHAUSEN GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: REINHAUSEN PLASMA GMBH
Abandoned legal-status Critical Current

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Classifications

    • C23C4/127—
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/01—Selective coating, e.g. pattern coating, without pre-treatment of the material to be coated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/14—Arrangements for controlling delivery; Arrangements for controlling the spray area for supplying a selected one of a plurality of liquids or other fluent materials or several in selected proportions to a spray apparatus, e.g. to a single spray outlet
    • B05B12/1418—Arrangements for controlling delivery; Arrangements for controlling the spray area for supplying a selected one of a plurality of liquids or other fluent materials or several in selected proportions to a spray apparatus, e.g. to a single spray outlet for supplying several liquids or other fluent materials in selected proportions to a single spray outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/16—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
    • B05B7/22—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc
    • B05B7/222—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc using an arc
    • B05B7/226—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc using an arc the material being originally a particulate material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying

Definitions

  • the invention relates to a coating apparatus for coating a substrate with a plasma generator.
  • the invention relates to a method for coating a.
  • the layers are either applied onto a compact substrate via the melted phase (thermal spraying) or via the vapor (PVD) or gas (CVD) phase, or are directly connected with a compact substrate material as compact parts by means of an auxiliary substance (soldering) or by simultaneous application of pressure and temperature (diffusion welding).
  • Various material combinations can be applied onto a substrate in this way.
  • a powder consisting of a mixture of several types of material is used.
  • many material combinations can be applied even on substrates of complex shape, given a corresponding control of the nozzles.
  • a very wear resistant but brittle material can be embedded into an elastic matrix.
  • sinter powders comprising a mixture of plural fine grained metallic components during the coating process.
  • a method and an apparatus are known wherein by means of a plasma a multilayered structure is applied onto a substrate.
  • the properties of the individual layers can be chosen from within a wide range.
  • precursor materials in the form of powder, gases, or liquids, which then are chemically or physically changed in the plasma in such a way that they are deposited as a cluster in the nano or microscale range on the substrate.
  • precursor materials in the form of powder, gases, or liquids
  • German patent document DE 10 2008 053 640 B3 discloses a coating method in which a layer is sprayed onto an object.
  • the spray material is melted from wires by an electric arc.
  • a filler material can be supplied to the spray jet via an injector.
  • the object of the present invention is to provide an apparatus for coating a substrate, wherein the properties of the coating to be applied are changeable during the coating process.
  • a coating apparatus tier coating a substrate comprising
  • a further object of the invention is to provide a method by which the possibilities of coating substrates become more varied.
  • a coating apparatus for coating a substrate comprises a plasma generator for generating a plasma jet, wherein the plasma jet exits from a coating head of the plasma generator.
  • Particles from a first particle reservoir can be supplied to the plasma jet via a transport pipe.
  • a second particle reservoir is provided from which particles can also be supplied via the transport pipe to the plasma jet.
  • a supply control device in the transport pipe allows setting the amount of particles from the first particle reservoir relative to the amount of particles from the second particle reservoir.
  • this ratio of amounts of particles can be varied even during the coating process. This also makes possible the generation of a changing layer profile on the surface of the substrate.
  • a controller for controlling the amount of particle mixture supplied to the plasma jet is provided.
  • the controller may be configured in such a way that the amount of supplied particles can be varied over a wide range, even during the coating process.
  • the controller may be a switch or configured to exhibit a switching function so that by this switch the supply of particles to the plasma jet may be allowed or interrupted.
  • a plurality of particle reservoirs is provided.
  • the particle reservoirs therein may be mixed with respect to their relative amounts by a common supply control device or may be applied onto the surface of the substrate with corresponding separate coating heads.
  • each particle reservoir Preferentially for each particle reservoir there is provided at least one separate process by which a fluidized powder is generated from the particle reservoirs.
  • the particle reservoir and the corresponding process gas form a respective particle supply unit.
  • the particle supply unit may comprise a process gas control unit for controlling the mixing relation between the particles and the process gas.
  • the coating apparatus may comprise at least a second coating head and a further particle supply unit corresponding to the second coating head.
  • the particle supply unit therein exhibits a further particle reservoir, a process gas, and a process gas control unit.
  • the coating is done with a coating apparatus having a plasma generator for generating a plasma jet and also having a coating head, from which the plasma jet exits.
  • a coating apparatus having a plasma generator for generating a plasma jet and also having a coating head, from which the plasma jet exits.
  • the substrate particles are supplied to the plasma jet from a first particle reservoir via a transport pipe.
  • particles from a second particle reservoir are mixed with those from the first particle reservoir by a supply control device and then fed into the transport pipe together and supplied to the plasma jet as a particle mixture.
  • the plasma jet, together with the particle mixture is then directed onto the surface of the substrate for forming the coating.
  • the particles from the first particle reservoir may be fluidized with a first process gas and the particles from the second particle reservoir may be fluidized with a second process gas.
  • the fraction of particles from the first particle reservoir within the mixture can be set between 10% and 90%, and the fraction of particles from the second particle reservoir can be set between 10% and 90%. Furthermore it is possible to vary the amount of particles from the first particle reservoir relative to the amount of particles from the second particle reservoir during the coating of the substrate by changing the mixing ratio between the first and second particles during the application.
  • the coating is done with a coating apparatus having a plasma generator for generating a plasma jet and also having a coating head from which the plasma jet exits.
  • the substrate is coated by supplying particles from a first particle reservoir via a transport pipe to the plasma jet at a first supply location and supplying particles from a second particle reservoir to the plasma jet at a second supply location in such a way that on the substrate a first layer of particles from the first particle reservoir and a second layer of particles from the second particle reservoir are formed.
  • the first and second supply location may also be chosen in such a way that a gradient layer or a compound layer is formed on the substrate.
  • the second layer or gradient layer or compound layer in a further embodiment of this method is covered with a further layer, wherein particles from a third particle reservoir are fed into a further transport pipe, then are supplied to the second plasma jet of a second coating head, and then are applied onto the second layer of particles from the second particle reservoir or onto the gradient layer or onto the compound layer.
  • the properties of the layer to be applied may be varied over a wide range.
  • functional compound layers may be applied.
  • the thickness and the composition of the compound layer therein may be controlled in such a way that the desired electrical, mechanical and chemical properties can be tailored.
  • plural layers, including with different properties, and gradient layers may be generated on the substrate.
  • a coating apparatus for coating a substrate has at least a first plasma generator and at least a second plasma generator each of which generating a plasma jet.
  • the first plasma generator has a coating head from which the plasma jet exits.
  • the second plasma generator has a coating head from which the plasma jet exits.
  • a first particle reservoir is connected with a transport pipe for supplying particles stored in the first particle reservoir to the plasma jet of the first plasma generator.
  • At least a second particle reservoir is provided and configured to supply particles from the second reservoir via the transport pipe to the plasma jet of the first plasma generator in a particle mixture with the particles from the first particle reservoir.
  • a least a third particle reservoir is connected with a transport pipe for supplying particles stored in the third particle reservoir to the plasma jet of the second plasma generator.
  • a supply control device is provided for setting an amount of the particles fed from the first particle reservoir into the transport pipe to a first injector relative to the amount of the particles fed from the second particle reservoir into the transport pipe to a second injector, wherein the first injector and the second injector are arranged in relation to the plasma jet of the first plasma generator.
  • a further supply control device is provided for setting an amount of the particles fed from the third particle reservoir into the transport pipe to a third injector arranged in relation to the plasma jet of the second plasma generator.
  • FIG. 1 is a schematic coating apparatus with a plasma module for providing a plasma jet
  • FIG. 2 is a schematic further embodiment of a coating apparatus with two plasma modules, wherein each of which provides a plasma jest;
  • FIG. 3 a through c are examples of layers that may be formed with the coating apparatus, in schematic representation
  • FIG. 4 is a schematic representation of a possible layered structure on a substrate after a coating
  • FIG. 5 is a schematic representation of the principle of a gradient layer by a depth profile
  • FIG. 6 is a schematic representation of an example of a conductive coating formed with the coating apparatus.
  • FIG. 1 schematically shows a coating apparatus 10 for coating a substrate
  • the coating apparatus 10 has a plasma module with a coating head 26 , a source for a plasma process gas 56 and a power supply 58 .
  • the coating head 26 has a plasma chamber 60 in which an electric arc 20 is started between two electrodes 62 and 64 . Electrical energy is supplied to this electric arc 20 from the power supply 58 for sustaining it, so that, depending on the modulation of the power supply 58 , a continuous plasma jet 22 or a pulsed plasma jet 22 is generated, which exits on the exit side 26 A of the coating head 26 .
  • a plasma process gas 56 may be supplied, so that the plasma process gas 56 streams through the plasma chamber 60 in a controlled manner.
  • a mixture of process gas 30 , 32 and particles may be supplied to the plasma jet 22 via an injector 66 , which here is shown as an external injector.
  • the particles may be partially molten by the high energy density in the plasma jet 22 . In this way they can be deposited on the surface 12 a of the substrate 12 as first layer 50 . As the substrate 12 and the coating head 26 are moveable relative to each other, a continuous layer 50 can be formed on the substrate 12 .
  • the particle mixture supplied to the injector 66 in the embodiment of the invention shown in FIG. 1 is provided by a first particle supply unit 34 and a second particle supply unit 36 .
  • a process gas control unit 38 , 42 is provided in the particle supply units 34 , 36 , respectively.
  • the process gas control unit the fractions of particles in the respective process gas 30 , 32 can be controlled independently of each other. if necessary different process gases 30 , 32 may be used in each particle supply unit 34 , 36 , the process gases being adapted to the particles in the particle reservoirs. From the mixture of particles and process gases 30 , 32 fluids are generated, which can be mixed in varying amounts relative to each other by a supply control device 18 .
  • the mixture depends on the layer 50 desired on the substrate 12 .
  • the mixing ratio of the particles is chosen such that the fraction of the particle mixture with particles from the first particle reservoir 14 is set between 10% and 90%, and that the fraction of particles from the second particle reservoir 16 is set between 10% and 90%.
  • the supply control device 18 therein is configured such that a ratio which is constant in time between the amount of particles from the first particle reservoir 14 and the amount of particles from the second particle reservoir 16 can be set for the particle mixture. Furthermore also supply control devices 18 may be employed by which in addition or exclusively a time-varying mixing relation can be set. During the supply of particles it is also possible, at least temporarily, to set the relative amount of one of the particle types to 0 , so that for a specific part of the surface of the substrate 12 the applied first layer 50 contains only particles from one particle reservoir.
  • the supply control device 18 may for example be media adder. Therein two fluids may be supplied as two or more partial streams to one or more mixing chambers within the media adder, in which the mixing occurs.
  • the mixing reaction may be controlled, wherein also a time-varying mixing ratio can be set,
  • the mixture is then usually released through an opening in the bottom or top of the mixing chamber and supplied to the transport pipe 24 , which for example may be a system of hoses.
  • the transport pipe 24 also materials different from hoses can be used, like for example metal pipes, depending on the particles which are to be used for coating the substrate 12 . Via the transport pipe 24 the particle mixture reaches the injector 66 .
  • a controller 28 may be provided, by which the amount of particle mixture supplied to the injector 66 is controlled.
  • Control may include a throttling of the particle stream or a dynamical switching process, i.e. controlled blocking and opening of the path to the transport pipe 24 in the controller 28 .
  • Thickness and material composition can be dynamically set via the supply rates of the particle supply units 34 , 36 and the controller 28 . In this way the composition of a layer may also be dynamically changed during an active coating process.
  • FIG. 2 schematically shows a further embodiment of the apparatus for coating a substrate 12 .
  • injectors 66 , 68 correspond to the coating head 26 .
  • the particles from the particle supply units 34 , 36 are fluidized in the desired fractions.
  • the particles from the particle supply unit 34 are separately supplied to a first injector 66 and enter the plasma jet 22 at a first supply location 46 .
  • the particles from the particle supply unit 36 are supplied to a second injector 68 and enter the plasma jet 22 at a second supply location 48 .
  • Upstream from the injectors 66 , 68 respective supply control devices 18 may be provided, the action of which has already been described in the context of FIG. 1 .
  • two separate layers 50 , 52 double layer
  • independent of each other can be generated on the surface 12 a of the substrate 12 , the properties of which may be different (see FIG. 6 ).
  • both the double layer and the gradient layer 54 can be applied onto the substrate 12 in one process step.
  • the injectors 66 , 68 and therefore depending on the position of the supply locations 46 , 48 relative to the plasma jet 22 a wide range of effects can be achieved. These depend on the injection taking place in different regions of the plasma jet 22 . These regions differ by jet velocity, temperature, and plasma composition. Depending on the fluid dynamical mixing of the material streams, multi layers or mixed layers result ( FIG. 3 ).
  • FIG. 2 there is furthermore schematically shown that the process carried out with the coating head 26 can be extended, To this end a further coating head 27 can be added to the coating apparatus 10 .
  • a plasma process gas 56 and a power supply 58 are provided for this coating head 27 on its feed side 27 E.
  • a third particle supply unit 37 which in turn has a particle reservoir 15 and a process gas 33 .
  • the process gas control unit 44 the ratio of process gas 33 and particles from the particle reservoir 15 can be set.
  • the amount of particles from the particle reservoir 15 can be controlled.
  • a third layer 53 can be deposited onto the second layer 52 .
  • the coating apparatus 10 may be provided with a further coating head 26 and two injectors 66 , 68 , which correspond to the one described above, instead of the simple coating head 27 described.
  • FIG. 3 a schematically shows a layered structure which may be formed with a coating apparatus 10 according to FIG. 2 . Therein a first layer 50 , a second layer 52 , and a third layer 53 have been applied onto the substrate 12 .
  • FIG. 3 b schematically shows a so called compound layer 55 , which may be formed with a coating apparatus 10 according to FIG. 1 or 2 .
  • the particles from the particle reservoirs 14 , 16 are mixed by a mixing process ( FIG. 1 ) or by an adequate choice of the supply locations 46 , 48 in such a way that an as homogeneous as possible distribution of the particle types within the volume of the applied compound layer 55 results.
  • FIG. 3 c schematically shows a gradient layer 54 which can be formed with the coating apparatus 10 according to FIG. 2 .
  • the supply locations 46 , 48 are chosen in such a way that the amount of particles in y-direction decreases or increases, respectively.
  • FIG. 4 schematically shows that it is possible to create various transitions in the sequence of layers to be applied onto the substrate 12 .
  • the shown sequence of layers is formed during a single coating run through a suitable configuration of the coating apparatus 10 .
  • segment A three different materials with the particles r, s, t are deposited with a fixed ratio onto the substrate as a layer.
  • segment B later in time during the same coating process, the layer thickness of the compound layer 55 is reduced continuously, and a cover layer of phase u applied on the compound layer 55 .
  • segment C the layer thickness of the entire multilayer is reduced, until in segment D the layer is interrupted completely and thus the substrate 12 is not covered by a layer at this location.
  • segment E the layer thickness of the phase u is increased continuously and in regions F transitions into a gradient layer 54 , in which at the surface of the phase u the material r is embedded at the highest concentration.
  • FIG. 5 schematically shows the principle of the design of a gradient layer by means of a depth profile.
  • the material composition starts from a layer material S 1 having the highest concentration at the transition point to the substrate 12 .
  • the layer material S 1 decreases continuously, reaching essentially the value zero at the surface.
  • the layer material S 2 essentially has the value 0 at the transition point to the substrate 12 and continuously increases towards the surface.
  • FIG. 6 shows a particular application of the coating apparatus 10 according to the invention and the method according to the invention for coating a substrate 12 with the example of a conductive layer 74 and an insulating layer 72 . Both layers are applied onto a substrate 12 with the coating apparatus 10 . Therein the conductive layer 74 is applied onto the substrate 12 as a strip-like structure. The conductive strip formed this way is to be protected towards the outside by an insulating layer 72 in the region KO. Therein the insulating layer may be interrupted in the regions K 1 and K 2 to facilitate the formation of a contact.
US14/032,408 2012-09-21 2013-09-20 Apparatus and method for generating a layer system Abandoned US20140087084A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012108919.1 2012-09-21
DE102012108919.1A DE102012108919A1 (de) 2012-09-21 2012-09-21 Vorrichtung und Verfahren zur Erzeugung eines Schichtsystems

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US20140087084A1 true US20140087084A1 (en) 2014-03-27

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US (1) US20140087084A1 (de)
EP (1) EP2711441B1 (de)
DE (1) DE102012108919A1 (de)
ES (1) ES2641835T3 (de)

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US20130004673A1 (en) * 2010-03-04 2013-01-03 Imagineering, Inc. Coat forming apparatus, and method of manufacturing a coat forming material
US20150069911A1 (en) * 2013-09-10 2015-03-12 Reinhausen Plasma Gmbh Hand-held device and method of plasma treatment of a workpiece with the hand-held device

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CN107367962A (zh) * 2017-06-28 2017-11-21 安徽信陆电子科技有限公司 一种喷涂设备自动控制系统
EP4284961A1 (de) 2021-01-29 2023-12-06 Midnex AG Verfahren und vorrichtung zur aufbringung einer metallischen beschichtung auf eine oberfläche

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US20020053605A1 (en) * 2000-11-07 2002-05-09 Asahi Sunac Corporation Painting machine for use with powder paint
US20130280505A1 (en) * 2012-04-20 2013-10-24 Reinhausen Plasma Gmbh Device and a method for marking a substrate and a marking for a substrate

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US20020053605A1 (en) * 2000-11-07 2002-05-09 Asahi Sunac Corporation Painting machine for use with powder paint
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US20130004673A1 (en) * 2010-03-04 2013-01-03 Imagineering, Inc. Coat forming apparatus, and method of manufacturing a coat forming material
US10071387B2 (en) * 2010-03-04 2018-09-11 Imagineering, Inc. Apparatus and method for coating object by supplying droplet to surface of the object while applying active species to the droplet
US20150069911A1 (en) * 2013-09-10 2015-03-12 Reinhausen Plasma Gmbh Hand-held device and method of plasma treatment of a workpiece with the hand-held device

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DE102012108919A1 (de) 2014-05-15
DE102012108919A9 (de) 2014-10-23
EP2711441B1 (de) 2017-08-02
ES2641835T3 (es) 2017-11-14
EP2711441A1 (de) 2014-03-26

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