US20130337720A1 - Depositing Apparatus and Method for Manufacturing Organic Light Emitting Diode Display Using the Same - Google Patents
Depositing Apparatus and Method for Manufacturing Organic Light Emitting Diode Display Using the Same Download PDFInfo
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- US20130337720A1 US20130337720A1 US13/677,031 US201213677031A US2013337720A1 US 20130337720 A1 US20130337720 A1 US 20130337720A1 US 201213677031 A US201213677031 A US 201213677031A US 2013337720 A1 US2013337720 A1 US 2013337720A1
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- deposition
- deposition source
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- deposition material
- angle control
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
- C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Definitions
- the present invention relates to a deposition apparatus and a method for manufacturing an organic light emitting diode (OLED) display using the deposition apparatus. More particularly, the present invention relates to a deposition apparatus that controls the emission direction of a deposition material using an angle control method, and a method for manufacturing an OLED display.
- OLED organic light emitting diode
- an organic light emitting display has a wide viewing angle, excellent contrast, and a fast response speed, and thus it has been in the limelight as the next-generation display device.
- the organic light emitting display has a structure in which an emission layer is inserted between an anode and a cathode so as to realize colors with a theory that light emission occurs from re-combination of holes and electrons emitted from the anode and the cathode in the emission layer.
- high efficient light emission cannot be acquired with such a structure, and intermediate layers such as an electron injection layer (EIL), an electron transport layer (ETL), a hole transport layer (HTL), and a hole injection layer (HIL) may be selectively additionally inserted between the respective electrodes and the emission layer.
- EIL electron injection layer
- ETL electron transport layer
- HTL hole transport layer
- HIL hole injection layer
- a vacuum deposition method is used, and thus metal used as an organic material or an electrode forms a thin film on a flat plate by depositing the corresponding material in a vacuum condition.
- a substrate on which an organic film is grown is disposed in the vacuum chamber, a fine metal mask (FMM) having a pattern that is the same as a pattern of a thin film to be formed is attached, and the organic material is vaporized or sublimated using a deposition source unit and is thus deposited on the substrate.
- FMM fine metal mask
- a spray angle needs to be controlled according to a characteristic of the deposition material or a pattern of the mask, and the spray angle needs to be controlled so as not to be changed as time passes.
- One aspect of the present invention provides a deposition apparatus the can form a uniform thin film by compensating for a deposition angle that is changed as process time is increased.
- another aspect of the present invention provides a method for manufacturing an OLED display that can form a uniform thickness of a deposited thin film by compensating for a constant deposition angle by controlling an angle of an angle control member.
- a deposition system includes a deposition source emitting a deposition material and an angle control member disposed on both sides of the deposition source and controlling an emission direction angle of the deposition material.
- the angle control member includes a housing having an internal space opened in an emission direction of the deposition material and a sliding member, a first end of which is inserted into the internal space and a second end of which is disposed on an emission path of the deposition material and is movable forward and backward in the emission direction of the deposition material along the internal space.
- the deposition source is preferably a linear deposition source, a spray nozzle of which sprays the deposition material and is linearly arranged in a first direction, the angle control member being formed along the first direction.
- the deposition source is preferably provided in plural and is arranged side by side in the first direction, the angle control member being disposed between the deposition sources.
- the deposition source preferably further includes a driver connected to the sliding member so as to move the sliding member forward/backward in the emission direction of the deposition material.
- the driver preferably interworks with sliding members of a pair of angle control members disposed in the outermost edge of the deposition source so as to make the sliding members move forward/backward by the same distance.
- the driver preferably interworks with the sliding members of the angle control members disposed between the deposition sources so as to make the sliding members move forward/backward by the same distance.
- a second end disposed in an emission path of the deposition material is preferably bent in a direction that crosses the movement direction of the sliding member.
- a method for manufacturing an OLED display includes: preparing a deposition source that emits a deposition material; preparing a housing disposed on both sides of the deposition source and having an inner space opened in an emission direction of the deposition material, and an angle control member including a sliding member, a second end of which is disposed on an emission path of the deposition material, and moving forward/backward in the emission direction of the deposition material along the inner space; disposing a substrate so as to be opposite the deposition source and the angle control member; controlling an emission direction angle of the deposition material by moving the sliding member forward or backward with respect to the emission direction of the deposition material; and forming a thin film on the substrate by emitting the deposition material onto the substrate.
- the deposition source is preferably provided in plural and is arranged side by side in a first direction, and the angle control member is provided between the deposition sources, and the controlling of the emission direction angle of the deposition material preferably includes moving the sliding members, included in the pair of angle control members disposed in the outermost edge, forward/backward by the same distance.
- the deposition source is preferably provided in plural and is arranged side by side in a length direction, and the angle control member is provided between the deposition sources, and the controlling of the emission direction angle of the deposition material preferably includes moving the sliding members of the angle control members disposed between the deposition sources forward/backward the same distance.
- the deposition material is preferably an organic material forming an organic emission layer, and the thin film is preferably an organic emission layer.
- the thickness of the thin film can be uniformly formed.
- the thickness of the thin film can be uniform even by compensating the change of the emission angle.
- an organic thin film can be uniformly deposited throughout the entire pixel arrangement of the OLED display so that luminance uniformity of each pixel can be improved.
- the angle control member can be replaced without stopping the process even though the process condition is changed during the deposition process, thereby improving the manufacturing yield. Furthermore, manufacturing can be simplified and the exemplary embodiments of the present invention can be easily applied to a large-sized substrate manufacturing process, and the manufacturing yield and the deposition efficiency can be improved.
- FIG. 1 is a perspective view of a deposition apparatus according to an exemplary embodiment of the present invention.
- FIG. 2 and FIGS. 3A and 3B are schematic side views of the deposition apparatus according to the exemplary embodiment of the present invention.
- FIGS. 4A and 4B are schematic side views of a deposition apparatus according to another exemplary embodiment of the present invention.
- FIG. 5 is a flowchart of a method for manufacturing an OLED display according to the present invention.
- FIG. 6 is a flowchart of the operation of the deposition apparatus of the present invention.
- FIG. 1 is a perspective view of a deposition apparatus according to an exemplary embodiment of the present invention.
- a deposition apparatus includes a deposition source 100 ( 100 a and 100 b ) and a pair of angle control members 200 ( 200 a and 200 b ).
- FIG. 1 is provided in a vacuum chamber that maintains a sufficient degree of vacuum.
- a deposition apparatus and a substrate S, on which a thin film is formed, are provided in the vacuum chamber.
- the substrate S is disposed opposite the deposition apparatus at a distance therefrom, and the deposition apparatus and the substrate S may be disposed relative to each other while moving relative to each other.
- the substrate S may be disposed in parallel with an upper portion of the deposition apparatus, and when the deposition apparatus is disposed so as to emit the deposition material in a horizontal direction, the substrate S may be vertically disposed.
- the deposition apparatus is disposed at the bottom side of the vacuum chamber and the substrate S is disposed at a distance in the horizontal direction (i.e. y-axis direction) at the upper side of the deposition apparatus, but the present invention is not limited thereto.
- the substrate S maybe disposed in the vertical direction (i.e., z-axis direction), and thus the deposition apparatus may be disposed at a distance in the horizontal direction from the substrate.
- the deposition source 100 is a means for emitting a deposition material so as to deposit the deposition material on the substrate S, and it is provided with a space (not shown) for receiving a deposition material, such as an organic material.
- the deposition material receiving space may be formed of a ceramic material having an excellent heat emission feature, such as alumina (Al 2 O 3 ), aluminum nitride (AlN), and the like, and it is not restrictive.
- the deposition material receiving space may be formed of various materials having an excellent heat emission feature and heat resistance.
- a heater (not shown) may be formed so as to surround the external surface of the deposition material receiving space in a closely attached manner, and the heater heats the received deposition material for vaporization of the deposition material.
- Spray nozzles 110 110 a and 110 b ) that spray the vaporized or sublimated deposition material from an inner space of the deposition source are disposed on one side of the deposition source 100 , facing the substrate S.
- the substrate S may be formed in the shape of a rectangular plate for forming of the deposition material, and the deposition source 100 may be formed as a linear deposition source that is linearly arranged in a first direction (x-axis direction) so that the spray nozzles 110 become parallel to one side of the substrate S.
- the spray nozzles 110 may be arranged in a line, but it is not restrictive.
- the spray nozzles 110 may be arranged in two or more lines.
- the deposition source may be provided so as to be plural and arranged in a line, and two deposition sources 100 a and 100 b are exemplarily arranged side by side in the present exemplary embodiment.
- the pair of angle control members 200 is formed in an emission path of the deposition material emitted from the spray nozzles 110 of the deposition source 100 , and functions to control an emission direction of the spray nozzles 110 .
- the deposition material is not sprayed in a straight line in the emission direction but the spray is spread widely in a frontward direction of the emission direction, and therefore the angle control members 200 are disposed on both sides of the spray nozzles 110 .
- the angle control members 200 include housings 202 ( 202 a and 202 b ) and sliding members 204 ( 204 a and 204 b ).
- the housings 202 have a predetermined-sized inner space, and the receiving space is opened in a direction in which the deposition material is emitted.
- the sliding members 204 are formed in the shape of a plate, and thus one end thereof is inserted in the inner space of the housings 202 , and the other end is disposed on the emission path of the deposition material.
- the sliding members 204 can move forward and backward in the emission direction of the deposition material along the inner space.
- An emission angle of the deposition material needs to be controlled according to a process condition such as the type of deposition material, a relationship between the deposition source 100 and the substrate S, and an internal pressure of the vacuum chamber.
- the emission angle of the deposition material can be controlled according to frontward/backward movement of the sliding members 204 .
- the angle control members 200 may be extended in the first direction. That is, the housings 202 of the angle control members 200 may also be extended in the first direction, and the sliding members 204 may be formed in the shape of a plate extended in the first direction.
- the deposition sources 100 are provided in plural, and are thus arranged side by side in the first direction.
- the angle control members 200 may be disposed not only on both sides of the deposition sources 100 but also between the respective deposition sources 100 .
- the angle control members 210 may be provided between the two deposition sources 100 a and 100 b.
- FIG. 2 and FIGS. 3A and 3B are schematic side views of the deposition apparatus according to the exemplary embodiment of the present invention.
- the deposition material when the sliding members 204 a and 204 b are moved forward as much as a height h 3 (here, h 1 ⁇ h 3 ) in the emission direction of the deposition material, the deposition material is sprayed with an angle of ⁇ 3 (here, ⁇ 1 ⁇ 3 ) by the sliding members 204 a and 204 b , and is then attached to the substrate S. That is, the emission angle of the deposition material is decreased as the sliding members 204 a , 204 b , and 214 move in the emission direction of the deposition material. As described, the emission angle of the deposition material can be controlled according to forward/backward movement of the sliding members 204 a and 204 b.
- a driver (not shown) connected to the sliding members 204 a and 204 b so as to move sliding members 204 a and 204 b forward/backward in the emission direction of the deposition material may be further provided.
- the driver is formed with such a configuration that it can generate power for linear reciprocal movement of the sliding members 204 a and 204 b .
- the driver may linearly move the sliding members 204 a and 204 b in various manners, such as a ball screw method, a cylinder method, an LM method, and the like, and the present invention is not limited thereto.
- the driver may be driven, interworking with sliding members 204 a and 204 b of a pair of angle control members 200 a and 200 b disposed in the outermost edge of the deposition sources 100 so as to control the sliding members 204 a and 204 b so that they move by the same distance.
- the deposition materials emitted in the outer direction of the deposition sources 100 a and 100 b may be deposited on the substrate S with the same emission angle of ⁇ 3 .
- the deposition materials sprayed from the deposition sources 100 a and 100 b may be laterally and symmetrically emitted with reference to the center in the y-axis direction.
- the driver may be driven, interworking with the sliding member 214 of the angle control member 210 disposed between the deposition sources 100 a and 100 b so as to control the sliding member 214 so that it moves by the same distance.
- the sliding member 214 between the deposition sources 100 a and 100 b is interworked, emission angles of deposition materials sprayed from the plurality of deposition sources 100 a and 100 b become symmetrical so that the deposition materials can be uniformly deposited.
- two deposition sources 100 a and 100 b are exemplarily illustrated, but a case in which three or more deposition sources are formed may be the same as the case in which two deposition sources are formed.
- FIGS. 4A and 4B are a schematic side views of a deposition apparatus according to another exemplary embodiment of the present invention.
- a second end disposed on an emission path of deposition materials may be bent by a predetermined length in a direction (y-axis) that crosses a movement direction of the sliding member 216 . That is, the second end of the sliding member 216 may be bent by the predetermined length in a direction crossing the movement direction of the sliding member 216 , centering a first direction as the center axis.
- emission angles of deposition materials emitted from adjacent deposition sources 100 a and 100 b may be different from each other. As shown in FIG.
- a deposition angle ⁇ 5 of the left side deposition source 100 a becomes larger than a deposition angle ⁇ 4 of the right side deposition source 100 b .
- the deposition angle ⁇ 4 of the left side deposition source 100 a becomes smaller than the deposition angle ⁇ 5 of the right side deposition source 100 b .
- a difference between the deposition angles of two deposition sources 100 a and 100 b adjacent to the sliding member 216 may be controlled according to a degree of bending of the sliding member 216 .
- a thin film may be formed on the substrate S by emitting different deposition materials through a plurality of deposition sources depending on the type of thin film, and in this case, emission angles of the deposition materials emitted from the respective deposition sources should be different from each other.
- the emission angles of the deposition materials emitted from the adjacent deposition sources may be set to be different from each other by bending the sliding member 214 .
- the method for manufacturing an OLED display according to the present invention includes: preparing a deposition source that emits a deposition material ( FIG. 5 , block 501 ); preparing a housing disposed on both sides of the deposition source and having an inner space opened in an emission direction of the deposition material ( FIG. 5 , block 502 ), and an angle control member including a sliding member, a second end of which is disposed on an emission path of the deposition material, and moving forward/backward in the emission direction of the deposition material along the inner space ( FIG. 5 , blocks 503 and 504 ); disposing a substrate so as to be opposite the deposition source and the angle control member ( FIG.
- FIG. 5 , block 505 controlling an emission direction angle of the deposition material by moving the sliding member forward or backward with respect to the emission direction of the deposition material ( FIG. 5 , blocks 506 and 507 ); and forming a thin film on the substrate by emitting the deposition material onto the substrate ( FIG. 5 , block 508 ).
- the deposition source is preferably provided in plural and is arranged side by side in a first direction, the angle control member is provided between the deposition sources, and the controlling of the emission direction angle of the deposition material preferably includes moving the sliding members, included in the pair of angle control members disposed in the outermost edge, forward/backward by the same distance.
- the deposition source is preferably provided in plural and is arranged side by side in a length direction, the angle control member is provided between the deposition sources, and the controlling of the emission direction angle of the deposition material preferably includes moving the sliding members of the angle control members disposed between the deposition sources forward/backward the same distance.
- the deposition material is preferably an organic material forming an organic emission layer, and the thin film is preferably an organic emission layer.
- FIG. 6 is a flow chart of the operation of the deposition apparatus of the present invention.
- the substrate S is inserted into the vacuum chamber (not shown), and the substrate S is disposed in opposition to the deposition source 100 that emits the deposition material ( FIG. 6 , block 601 ).
- a pair of angle control members 200 a and 200 b is disposed on both sides of the deposition source 100 ( FIG. 6 , block 602 ).
- the emission angle of the deposition material may need to be controlled according to deposition process conditions such as the size of the vacuum chamber or the substrate S, a distance between the substrate S and the deposition source 100 , and the like, and as previously described, the emission direction angle of the deposition material can be controlled by moving the sliding members 204 a , 204 b and 214 forward or backward in the emission direction (z-axis) of the deposition material ( FIG. 6 , blocks 603 and 604 ).
- the emission direction angle of the deposition material can be controlled according to a forward movement distance of the sliding members 204 a , 204 b and 214 .
- the emission angle of the deposition material is decreased ( FIG. 6 , block 605 ).
- the emission angle is increased ( FIG. 6 , block 606 ).
- the deposition material is then deposited on or attached to the substrate ( FIG. 6 , block 607 ).
- the sliding members 214 of the angle control members 210 disposed between the deposition sources 100 a and 100 b are interworked with each other and then move forward/backward by the same distance, or the sliding members 214 included in a pair of angle control members 210 disposed in the outermost edge are interworked with each other, and then move forward/backward by the same distance.
- the deposition material is preferably an organic material that forms a sub-pixel, that is, an organic emission layer that expresses a red color R, a green color G, and a blue color B.
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Abstract
Description
- This application makes reference to, incorporates the same herein, and claims all benefits accruing under 35 U.S.C. §119 from an application earlier filed in the Korean Intellectual Property Office on the 15 of Jun. 2012 and there duly assigned Serial No. 10-2012-0064403.
- 1. Field of the Invention
- The present invention relates to a deposition apparatus and a method for manufacturing an organic light emitting diode (OLED) display using the deposition apparatus. More particularly, the present invention relates to a deposition apparatus that controls the emission direction of a deposition material using an angle control method, and a method for manufacturing an OLED display.
- 2. Description of the Related Art
- Among display devices, an organic light emitting display has a wide viewing angle, excellent contrast, and a fast response speed, and thus it has been in the limelight as the next-generation display device.
- In general, the organic light emitting display has a structure in which an emission layer is inserted between an anode and a cathode so as to realize colors with a theory that light emission occurs from re-combination of holes and electrons emitted from the anode and the cathode in the emission layer. However, high efficient light emission cannot be acquired with such a structure, and intermediate layers such as an electron injection layer (EIL), an electron transport layer (ETL), a hole transport layer (HTL), and a hole injection layer (HIL) may be selectively additionally inserted between the respective electrodes and the emission layer.
- In a flat panel display, such as an organic light emitting diode (OLED) display, a vacuum deposition method is used, and thus metal used as an organic material or an electrode forms a thin film on a flat plate by depositing the corresponding material in a vacuum condition. According to the vacuum deposition method, a substrate on which an organic film is grown is disposed in the vacuum chamber, a fine metal mask (FMM) having a pattern that is the same as a pattern of a thin film to be formed is attached, and the organic material is vaporized or sublimated using a deposition source unit and is thus deposited on the substrate.
- During such a vacuum deposition method, a spray angle needs to be controlled according to a characteristic of the deposition material or a pattern of the mask, and the spray angle needs to be controlled so as not to be changed as time passes.
- The above information disclosed in this Background section is only for enhancement of an understanding of the background of the invention, and therefore it may contain information that does not form the prior art that is already known in this country to a person of ordinary skill in the art.
- One aspect of the present invention provides a deposition apparatus the can form a uniform thin film by compensating for a deposition angle that is changed as process time is increased.
- In addition, another aspect of the present invention provides a method for manufacturing an OLED display that can form a uniform thickness of a deposited thin film by compensating for a constant deposition angle by controlling an angle of an angle control member.
- A deposition system according to an exemplary embodiment of the present invention includes a deposition source emitting a deposition material and an angle control member disposed on both sides of the deposition source and controlling an emission direction angle of the deposition material. The angle control member includes a housing having an internal space opened in an emission direction of the deposition material and a sliding member, a first end of which is inserted into the internal space and a second end of which is disposed on an emission path of the deposition material and is movable forward and backward in the emission direction of the deposition material along the internal space.
- The deposition source is preferably a linear deposition source, a spray nozzle of which sprays the deposition material and is linearly arranged in a first direction, the angle control member being formed along the first direction.
- The deposition source is preferably provided in plural and is arranged side by side in the first direction, the angle control member being disposed between the deposition sources.
- The deposition source preferably further includes a driver connected to the sliding member so as to move the sliding member forward/backward in the emission direction of the deposition material.
- The driver preferably interworks with sliding members of a pair of angle control members disposed in the outermost edge of the deposition source so as to make the sliding members move forward/backward by the same distance.
- The driver preferably interworks with the sliding members of the angle control members disposed between the deposition sources so as to make the sliding members move forward/backward by the same distance.
- In the sliding member of the angle control member disposed between the deposition sources, a second end disposed in an emission path of the deposition material is preferably bent in a direction that crosses the movement direction of the sliding member.
- A method for manufacturing an OLED display according to another exemplary embodiment of the present invention includes: preparing a deposition source that emits a deposition material; preparing a housing disposed on both sides of the deposition source and having an inner space opened in an emission direction of the deposition material, and an angle control member including a sliding member, a second end of which is disposed on an emission path of the deposition material, and moving forward/backward in the emission direction of the deposition material along the inner space; disposing a substrate so as to be opposite the deposition source and the angle control member; controlling an emission direction angle of the deposition material by moving the sliding member forward or backward with respect to the emission direction of the deposition material; and forming a thin film on the substrate by emitting the deposition material onto the substrate.
- The deposition source is preferably provided in plural and is arranged side by side in a first direction, and the angle control member is provided between the deposition sources, and the controlling of the emission direction angle of the deposition material preferably includes moving the sliding members, included in the pair of angle control members disposed in the outermost edge, forward/backward by the same distance.
- The deposition source is preferably provided in plural and is arranged side by side in a length direction, and the angle control member is provided between the deposition sources, and the controlling of the emission direction angle of the deposition material preferably includes moving the sliding members of the angle control members disposed between the deposition sources forward/backward the same distance.
- The deposition material is preferably an organic material forming an organic emission layer, and the thin film is preferably an organic emission layer.
- According to the exemplary embodiments of the present invention, the thickness of the thin film can be uniformly formed. In addition, when process time is increased and thus the deposition angle is changed, the thickness of the thin film can be uniform even by compensating the change of the emission angle.
- According to the exemplary embodiments of the present invention, an organic thin film can be uniformly deposited throughout the entire pixel arrangement of the OLED display so that luminance uniformity of each pixel can be improved.
- In addition, according to the exemplary embodiments of the present invention, the angle control member can be replaced without stopping the process even though the process condition is changed during the deposition process, thereby improving the manufacturing yield. Furthermore, manufacturing can be simplified and the exemplary embodiments of the present invention can be easily applied to a large-sized substrate manufacturing process, and the manufacturing yield and the deposition efficiency can be improved.
- A more complete appreciation of the invention, and many of the attendant advantages thereof, will be readily apparent as the same becomes better understood by reference to the following detailed description when considered in conjunction with the accompanying drawings, in which like reference symbols indicate the same or similar components, wherein:
-
FIG. 1 is a perspective view of a deposition apparatus according to an exemplary embodiment of the present invention. -
FIG. 2 andFIGS. 3A and 3B are schematic side views of the deposition apparatus according to the exemplary embodiment of the present invention. -
FIGS. 4A and 4B are schematic side views of a deposition apparatus according to another exemplary embodiment of the present invention. -
FIG. 5 is a flowchart of a method for manufacturing an OLED display according to the present invention. -
FIG. 6 is a flowchart of the operation of the deposition apparatus of the present invention. - Hereinafter, a deposition apparatus and a method for manufacturing an OLED display according to exemplary embodiments of the present invention will be described in further detail with reference to the accompanying drawings. While this invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. Like reference numerals designate like elements throughout the drawings.
- In the drawings, the thickness of layers, films, panels, regions, etc., are exaggerated for clarity. In the drawings, the thicknesses of partial layers and regions are exaggerated for better understanding and ease of description. It will be understood that, when an element such as a layer, film, region, or substrate is referred to as being “on” another element, it can be directly on the other element or intervening elements may also be present.
- In addition, unless explicitly described to the contrary, the word “comprise” and variations such as “comprises” or “comprising” will be understood to imply the inclusion of stated elements but not the exclusion of any other elements. It will be understood that, when an element such as a layer, film, region, or substrate is referred to as being “over” or “on” another element, it can be directly on the other element or intervening elements may also be present.
-
FIG. 1 is a perspective view of a deposition apparatus according to an exemplary embodiment of the present invention. - Referring to
FIG. 1 , a deposition apparatus according to the exemplary embodiment of the present invention includes a deposition source 100 (100 a and 100 b) and a pair of angle control members 200 (200 a and 200 b). - Although a chamber is not illustrated in each drawing for better understanding and ease of description, the configuration shown in
FIG. 1 is provided in a vacuum chamber that maintains a sufficient degree of vacuum. A deposition apparatus and a substrate S, on which a thin film is formed, are provided in the vacuum chamber. The substrate S is disposed opposite the deposition apparatus at a distance therefrom, and the deposition apparatus and the substrate S may be disposed relative to each other while moving relative to each other. When the deposition apparatus is disposed so as to emit a deposition material in a vertical direction, the substrate S may be disposed in parallel with an upper portion of the deposition apparatus, and when the deposition apparatus is disposed so as to emit the deposition material in a horizontal direction, the substrate S may be vertically disposed. In the exemplary embodiment of the present invention, the deposition apparatus is disposed at the bottom side of the vacuum chamber and the substrate S is disposed at a distance in the horizontal direction (i.e. y-axis direction) at the upper side of the deposition apparatus, but the present invention is not limited thereto. The substrate S maybe disposed in the vertical direction (i.e., z-axis direction), and thus the deposition apparatus may be disposed at a distance in the horizontal direction from the substrate. - The
deposition source 100 is a means for emitting a deposition material so as to deposit the deposition material on the substrate S, and it is provided with a space (not shown) for receiving a deposition material, such as an organic material. The deposition material receiving space may be formed of a ceramic material having an excellent heat emission feature, such as alumina (Al2O3), aluminum nitride (AlN), and the like, and it is not restrictive. The deposition material receiving space may be formed of various materials having an excellent heat emission feature and heat resistance. A heater (not shown) may be formed so as to surround the external surface of the deposition material receiving space in a closely attached manner, and the heater heats the received deposition material for vaporization of the deposition material. Spray nozzles 110 (110 a and 110 b) that spray the vaporized or sublimated deposition material from an inner space of the deposition source are disposed on one side of thedeposition source 100, facing the substrate S. - The substrate S may be formed in the shape of a rectangular plate for forming of the deposition material, and the
deposition source 100 may be formed as a linear deposition source that is linearly arranged in a first direction (x-axis direction) so that thespray nozzles 110 become parallel to one side of the substrate S. As shown inFIG. 1 , thespray nozzles 110 may be arranged in a line, but it is not restrictive. Thespray nozzles 110 may be arranged in two or more lines. In addition, the deposition source may be provided so as to be plural and arranged in a line, and twodeposition sources - The pair of
angle control members 200, respectively arranged on both sides of thedeposition source 100, is formed in an emission path of the deposition material emitted from thespray nozzles 110 of thedeposition source 100, and functions to control an emission direction of thespray nozzles 110. The deposition material is not sprayed in a straight line in the emission direction but the spray is spread widely in a frontward direction of the emission direction, and therefore theangle control members 200 are disposed on both sides of thespray nozzles 110. Theangle control members 200 include housings 202 (202 a and 202 b) and sliding members 204 (204 a and 204 b). Thehousings 202 have a predetermined-sized inner space, and the receiving space is opened in a direction in which the deposition material is emitted. The slidingmembers 204 are formed in the shape of a plate, and thus one end thereof is inserted in the inner space of thehousings 202, and the other end is disposed on the emission path of the deposition material. The slidingmembers 204 can move forward and backward in the emission direction of the deposition material along the inner space. An emission angle of the deposition material needs to be controlled according to a process condition such as the type of deposition material, a relationship between thedeposition source 100 and the substrate S, and an internal pressure of the vacuum chamber. The emission angle of the deposition material can be controlled according to frontward/backward movement of the slidingmembers 204. - When the
deposition sources 100 are extended in the first direction (x-axis direction) and thespray nozzles 110 are arranged along the first direction, theangle control members 200 may be extended in the first direction. That is, thehousings 202 of theangle control members 200 may also be extended in the first direction, and the slidingmembers 204 may be formed in the shape of a plate extended in the first direction. - The deposition sources 100 are provided in plural, and are thus arranged side by side in the first direction. The
angle control members 200 may be disposed not only on both sides of thedeposition sources 100 but also between the respective deposition sources 100. For example, as shown inFIG. 1 , when twodeposition sources angle control members 210 may be provided between the twodeposition sources -
FIG. 2 andFIGS. 3A and 3B are schematic side views of the deposition apparatus according to the exemplary embodiment of the present invention. - As shown in
FIG. 2 , when slidingmembers deposition sources 100, the deposition material is sprayed with an emission angle of θ1 by the slidingmembers FIG. 3A , when the slidingmember 214 is moved forward as much as a height h2 (here, h1>h2) in the emission direction of the deposition material, the deposition material is sprayed with an angle of θ2 (here, θ1<θ2) by the slidingmember 214, and is then attached to the substrate S. In addition, as shown inFIG. 3B , when the slidingmembers members members members - A driver (not shown) connected to the sliding
members members members members - When the plurality of
deposition sources angle control members deposition sources deposition sources members angle control members deposition sources 100 so as to control the slidingmembers members deposition sources FIGS. 3A and 3B , when the outermost slidingmembers deposition sources deposition sources - Furthermore, the driver may be driven, interworking with the sliding
member 214 of theangle control member 210 disposed between thedeposition sources member 214 so that it moves by the same distance. As described, when the slidingmember 214 between thedeposition sources deposition sources deposition sources -
FIGS. 4A and 4B are a schematic side views of a deposition apparatus according to another exemplary embodiment of the present invention. - As shown in
FIGS. 4A and 4B , in a slidingmember 216 ofangle control members 210 disposed betweendeposition sources member 216. That is, the second end of the slidingmember 216 may be bent by the predetermined length in a direction crossing the movement direction of the slidingmember 216, centering a first direction as the center axis. When the slidingmember 216 is bent, emission angles of deposition materials emitted fromadjacent deposition sources FIG. 4A , when the slidingmember 216 is bent in a direction of the rightside deposition source 100 b, a deposition angle θ5 of the leftside deposition source 100 a becomes larger than a deposition angle θ4 of the rightside deposition source 100 b. On the contrary, as shown inFIG. 4B , when the slidingmember 216 is bent toward the leftside deposition source 100 a, the deposition angle θ4 of the leftside deposition source 100 a becomes smaller than the deposition angle θ5 of the rightside deposition source 100 b. In addition, a difference between the deposition angles of twodeposition sources member 216 may be controlled according to a degree of bending of the slidingmember 216. - A thin film may be formed on the substrate S by emitting different deposition materials through a plurality of deposition sources depending on the type of thin film, and in this case, emission angles of the deposition materials emitted from the respective deposition sources should be different from each other. As in the present exemplary embodiment, the emission angles of the deposition materials emitted from the adjacent deposition sources may be set to be different from each other by bending the sliding
member 214. - The method for manufacturing an OLED display according to the present invention includes: preparing a deposition source that emits a deposition material (
FIG. 5 , block 501); preparing a housing disposed on both sides of the deposition source and having an inner space opened in an emission direction of the deposition material (FIG. 5 , block 502), and an angle control member including a sliding member, a second end of which is disposed on an emission path of the deposition material, and moving forward/backward in the emission direction of the deposition material along the inner space (FIG. 5 , blocks 503 and 504); disposing a substrate so as to be opposite the deposition source and the angle control member (FIG. 5 , block 505); controlling an emission direction angle of the deposition material by moving the sliding member forward or backward with respect to the emission direction of the deposition material (FIG. 5 , blocks 506 and 507); and forming a thin film on the substrate by emitting the deposition material onto the substrate (FIG. 5 , block 508). - The deposition source is preferably provided in plural and is arranged side by side in a first direction, the angle control member is provided between the deposition sources, and the controlling of the emission direction angle of the deposition material preferably includes moving the sliding members, included in the pair of angle control members disposed in the outermost edge, forward/backward by the same distance.
- The deposition source is preferably provided in plural and is arranged side by side in a length direction, the angle control member is provided between the deposition sources, and the controlling of the emission direction angle of the deposition material preferably includes moving the sliding members of the angle control members disposed between the deposition sources forward/backward the same distance.
- The deposition material is preferably an organic material forming an organic emission layer, and the thin film is preferably an organic emission layer.
- Hereinafter, operation of a deposition apparatus and a method for manufacturing an organic light emitting diode (OLED) display according to the exemplary embodiment of the present invention will be further described.
-
FIG. 6 is a flow chart of the operation of the deposition apparatus of the present invention. - First, the substrate S is inserted into the vacuum chamber (not shown), and the substrate S is disposed in opposition to the
deposition source 100 that emits the deposition material (FIG. 6 , block 601). In addition, a pair ofangle control members FIG. 6 , block 602). - The emission angle of the deposition material may need to be controlled according to deposition process conditions such as the size of the vacuum chamber or the substrate S, a distance between the substrate S and the
deposition source 100, and the like, and as previously described, the emission direction angle of the deposition material can be controlled by moving the slidingmembers FIG. 6 , blocks 603 and 604). - The emission direction angle of the deposition material can be controlled according to a forward movement distance of the sliding
members members FIG. 6 , block 605). Conversely, as the slidingmembers FIG. 6 , block 606). The deposition material is then deposited on or attached to the substrate (FIG. 6 , block 607). - When controlling the emission angle of the deposition material, the sliding
members 214 of theangle control members 210 disposed between thedeposition sources members 214 included in a pair ofangle control members 210 disposed in the outermost edge are interworked with each other, and then move forward/backward by the same distance. - As shown in
FIG. 3A , when the slidingmember 214 of theangle control member 210 disposed between thedeposition sources deposition source 100, the emission angle of the deposition material is increased from 01 to 02 by the sliding member 214 (FIG. 6 , block 606). In addition, as shown inFIG. 3B , when the slidingmembers 214 included in the pair ofangle control members 210 disposed in the outermost edge move forward from the height h1 to the height h3 (herein, h1<h3) in the deposition material emission direction from thedeposition source 100, the deposition material is sprayed with an emission angle of θ3 (θ1<θ3) by the slidingmembers FIG. 6 , block 607). - The deposition material is preferably an organic material that forms a sub-pixel, that is, an organic emission layer that expresses a red color R, a green color G, and a blue color B.
- While this invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.
Claims (14)
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KR1020120064403A KR101942471B1 (en) | 2012-06-15 | 2012-06-15 | Depositing apparatus and method for manufacturing organic light emitting diode display using the same |
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2012
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- 2012-11-14 US US13/677,031 patent/US8616930B1/en active Active
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Also Published As
Publication number | Publication date |
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KR101942471B1 (en) | 2019-01-28 |
KR20130141188A (en) | 2013-12-26 |
US8616930B1 (en) | 2013-12-31 |
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