US20130207315A1 - Fludic channel system and method for fabricating fine structure - Google Patents
Fludic channel system and method for fabricating fine structure Download PDFInfo
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- US20130207315A1 US20130207315A1 US13/800,428 US201313800428A US2013207315A1 US 20130207315 A1 US20130207315 A1 US 20130207315A1 US 201313800428 A US201313800428 A US 201313800428A US 2013207315 A1 US2013207315 A1 US 2013207315A1
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- Prior art keywords
- fine structure
- rail
- fluidic channel
- fluid
- guide
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/22—Component parts, details or accessories; Auxiliary operations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0075—Manufacture of substrate-free structures
- B81C99/0095—Aspects relating to the manufacture of substrate-free structures, not covered by groups B81C99/008 - B81C99/009
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2035—Exposure; Apparatus therefor simultaneous coating and exposure; using a belt mask, e.g. endless
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0156—Lithographic techniques
- B81C2201/0159—Lithographic techniques not provided for in B81C2201/0157
Definitions
- the described technology relates generally to a fluidic channel system and a method for fabricating a fine structure.
- Fine structures such as microstructures and nanostructures have applications in various fields such as photonic materials, micro-electromechanical systems (MEMS), biomaterials, self-assembly, etc.
- MEMS micro-electromechanical systems
- Recently, as an example of a technique for producing such fine structures a continuous-flow lithography technique was proposed (D. Dendukuri, D. Pregibon, J. Collins, T. Hatton and P. Doyle, “Continuous-Flow Lithography for High-Throughput Microparticle Synthesis”, Nature Materials, vol. 5, pp. 365-369, 2006; US Patent Publication No. 2007-0105972, “Microstructure Synthesis by Flow Lithography and Polymerization).
- a photocurable fluid flowing in a microfluidic channel is exposed to a predetermined shape of light such that the photocurable liquid is selectively cured, thereby continuously producing a variety of free-floating microstructures.
- a fluidic channel system includes a light projection apparatus, a fluidic channel, and a rail.
- the light projection apparatus provides light.
- a photocurable fluid which is selectively cured by the light, flows inside the fluidic channel.
- a fine structure which is to be formed by curing the photocurable fluid moves along the rail.
- a fluidic channel system in another embodiment, includes a fluidic channel, a fine structure, and a rail.
- the fine structure is positioned inside the fluidic channel. The fine structure moves along the rail.
- a method for fabricating a fine structure includes providing a photocurable fluid to a fluidic channel having a rail along which a fine structure can move. Further, the method includes producing a fine structure by irradiating the photocurable fluid with light such that the photocurable fluid is selectively cured. Further, the method includes moving the fine structure along the rail.
- a method for conveying a fine structure includes providing a fluid to a fluidic channel having a rail along which a fine structure can move. Further, the method includes moving the fine structure having a guide along the rail. The guide prevents the fine structure from coming off of the rail.
- FIGS. 1 and 4 are diagrams for explaining a fluidic channel system according to one embodiment
- FIG. 2 is diagrams for explaining that a fine structure 130 flows in a different direction from a flow direction of a fluid 112 in the fluidic channel system shown in FIG. 1 ;
- FIG. 3 is diagrams showing a process of fabricating a fluidic channel 110 shown in FIG. 1 ;
- FIG. 5 is diagrams for explaining a modified embodiment of a rail adopted in the fluidic channel system shown in FIG. 1 ;
- FIGS. 6 to 11 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and one embodiment of a method of fabricating a fine structure, which show an example in which the width of a rail is changed such that a fine structure can be easily moved along the rail;
- FIGS. 12 to 17 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure, which show an example in which a fine structure passes through an interface between fluids;
- FIGS. 18 to 21 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure, which show another example in which a fine structure passes through an interface between fluids;
- FIGS. 22 to 25 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure, which show an example in which a one-dimensional array of fine structures is formed at an end of a rail;
- FIGS. 26 to 28 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure, which show another example in which a one-dimensional array of fine structures is formed at an end of a rail;
- FIGS. 29 to 32 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure, which show an example in which a two-dimensional array of fine structures is formed at ends of rails;
- FIGS. 33 to 40 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure, which show another example in which a two-dimensional array of fine structures is formed at ends of rails;
- FIGS. 41 to 47 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure, which show still another example in which a two-dimensional array of fine structures is formed at ends of rails;
- FIGS. 48 to 50 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure, which show still another example in which a two-dimensional array of fine structures is formed at ends of rails;
- FIGS. 51 to 53 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and an example of a method for conveying a fine structure, which show an example in which the movement direction of a fine structure is determined in accordance with the position of a guide;
- FIGS. 54 and 55 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , which show an example of an entrance portion of a rail;
- FIGS. 56 to 60 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , which show an example in which a magnetic field is applied to a fluidic channel;
- FIG. 61 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown in FIG. 1 , which show an example in which the fine structure includes a latch;
- FIG. 62 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown in FIG. 1 , which show an example in which the fine structure includes a spacer;
- FIG. 63 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown in FIG. 1 , which show an example in which the guide includes a wedge-shaped end;
- FIGS. 64 and 65 are diagrams for explaining the function of the wedge-shaped end of the guide according to one embodiment
- FIG. 66 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown in FIG. 1 , which show an example in which a fine structure is used as a package of a microchip.
- FIGS. 67 to 69 are diagrams for explaining an example of a method for fabricating a package
- FIG. 70 is a diagram for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown in FIG. 1 , which show an example in which a fine structure is used as a carrier;
- FIGS. 71 and 72 are diagrams for explaining an example in which microbeads are carried by a carrier
- FIGS. 73 and 74 are diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown in FIG. 1 , which show an example of a fine structure which can reduce friction with a rail;
- FIGS. 75 and 76 are diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown in FIG. 1 , which show an example in which a fine structure having a guide is formed inside a fluidic channel in which no rail is disposed;
- FIGS. 77 to 79 are diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown in FIG. 1 , which show another example in which a fine structure having a guide is formed inside a fluidic channel in which no rail is disposed;
- FIGS. 80 and 81 are diagrams for explaining another example of a method of fabricating a fine structure, which show a method for aligning a fine structure with a rail by expanding a guide;
- FIGS. 82 to 85 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure, which show an example in which a fine structure moves along a plurality of rails;
- FIGS. 86 to 89 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure, which show an example in which a fine structure is erected.
- FIG. 1 is diagrams for explaining a fluidic channel system according to one embodiment.
- FIG. 1 is a perspective view of the fluidic channel system
- (h) of FIG. 1 is a perspective view of a fine structure 130
- (c) of FIG. 1 is an opened-up plan view of a fluidic channel 110
- (d) of FIG. 1 is a diagram showing a shape 150 of light provided to the fluidic channel 110 .
- the fluidic channel system includes a fluid channel 110 , a rail 120 , a fine structure 130 , and a light projection apparatus 140 .
- the fluidic channel 100 As a material of the fluidic channel 100 , a variety of materials or mixtures may be used.
- the fluidic channel 100 may be formed of poly-dimethyl siloxane (PDMS) or glass.
- PDMS poly-dimethyl siloxane
- a fluid 112 exists inside the fluidic channel 100 .
- the fluid 112 may be used for conveying the fine structure 130 .
- the fluid 112 may be a liquid, liquid solution, liquid mixture, or supercritical fluid.
- the fluid 112 may be powder or particles which do not have a predetermined shape as a whole.
- the fluid 112 when there is relatively little need to have a force for conveying a fine structure, the fluid 112 may be a gas.
- the fluid 112 may be a photocurable fluid.
- the fluid 112 may be used for producing and conveying the fine structure 130 .
- the production of the fine structure 130 may be performed by radiating light onto the fluid 112 such that the fluid 112 is selectively cured.
- the photocurable fluid a mixture of polyethylene glycol (400) diacrylate (PEG-DA of Sigma Aldrich Co.) and a known photoinitiator may be used.
- PEG-DA polyethylene glycol diacrylate
- other known materials or mixtures cured by radiating visible rays, infrared rays, or ultraviolet rays may be used.
- the fluid 112 may include cells, nanostructures, or particles dispersed therein.
- the fine structure 130 obtained by curing the fluid 112 includes cells, nanostructures, or particles.
- the rail 120 along which the fine structure 130 can move is positioned inside the fluidic channel 110 .
- (a) of FIG. 1 shows that the rail 120 is positioned on one surface of the fluidic channel 110 , is formed in a groove shape, and has a rectangular cross-section.
- the position, shape, and cross-sectional shape of the rail 120 are not limited thereto and various other positions and shape are possible.
- As the fine structure 130 moves along the rail 120 it may move in a different direction from the flow direction of the fluid 112 flowing in the fluidic channel 110 , depending on the position and the shape of the rail 120 .
- the fine structure 130 When the fine structure 130 does not move along the rail 120 , it may diffuse in a perpendicular direction (+X or ⁇ X direction) to the flow direction (+Y or ⁇ Y direction) of the fluid 112 . Since the rail 120 limits the position of the fine structure 130 in the perpendicular direction (+X or ⁇ X direction), the diffusion of the fine structure 130 is prevented.
- the fine structure 130 is positioned inside the fluidic channel 110 .
- the fine structure 130 may be a microstructure or nanostructure.
- the microstructure is a structure of which at least one of length, width, and height is equal to or more than 1 ⁇ m and less than 1 mm, or a structure corresponding thereto.
- the nanostructure is a structure of which at least one of length, width, and height is equal to or more than 1 nm and less than 1 ⁇ m, or a structure corresponding thereto.
- the fine structure 130 may be produced by photocuring the fluid 112 .
- a guide 132 may be produced at the same time as the fine structure 130 . That is, light may be provided to the fluidic channel 110 having the rail 120 positioned therein, thereby producing the fine structure 130 having the guide 132 provided thereon.
- the guide 132 may have a shape corresponding to the rail 120 .
- the guide 132 may have a protrusion shape.
- the guide 132 may have a groove shape.
- the guide 132 also has a rectangular cross-section.
- the guide 132 also has a triangular cross-section.
- the guide 132 also has a triangular cross-section.
- the guide 132 also has a semi-circular cross-section.
- the fine structure 130 having the guide 132 provided thereon may be injected into the fluidic channel 110 from the outside of the fluidic channel 110 .
- the fluidic channel system may not include the light projection apparatus 140 .
- the fine structure 130 having the guide 132 provided thereon may be produced in a separate fluidic channel to be delivered to the fluidic channel 110 shown in FIG. 1 .
- the fine structure 130 produced in a separate fluidic channel may be put into a container such as a beaker and then delivered to the fluidic channel 110 shown in FIG. 1 .
- the fine structure 130 when the fine structure 130 is produced in a separate fluidic channel, the fine structure 130 may be fabricated in such a manner that the guide 132 is positioned on or under the fine structure 130 .
- the fine structure 130 when the fine structure 130 is delivered to the fluidic channel 110 shown in FIG. 1 through the container, the fine structure 130 may be turned over. As a result, the guide 132 may be positioned at the top side or the bottom side of the fine structure 130 .
- a separate technique may be required, which can extract the guide 132 positioned at either one of the top side and the bottom side of the fine structure 130 . Such a technique will be described below separately.
- the fine structure 130 having the guide 132 may be produced by methods other than photocuring of the fluid.
- silicon may be patterned to produce the fine structure 130 having the guide 132 provided thereon.
- both the guide 132 and the fine structure 130 are formed of silicon.
- a separate material (for example, photoresist) other than silicon may be deposited on silicon that is used as the fine structure 130 and the separate material is patterned to form the guide 132 .
- the guide 132 provided on the fine structure 130 prevents the fine structure 130 from coming off of the rail 120 .
- the guide 132 is positioned on one surface of the fine structure 130 , is formed in a protrusion shape, and has a rectangular cross-section.
- the position, shape, and cross-sectional shape of the guide 132 are not limited thereto.
- the light projection apparatus 140 provides light to the fluidic channel 110 .
- the light may be provided by the light projection apparatus 140 in various ways.
- the light projection apparatus 140 may provide light having a shape 150 shown in (d) of FIG. 1 to the fluidic channel 110 by using a photomask or spatial light modulator.
- the light projection apparatus 140 may provide light to the fluidic channel 110 through scanning In this case, while the fluid 112 flows, the light may be provided to the fluid 112 .
- the flow of the fluid may be stopped, and while light is not provided to the fluid, the fluid may flow.
- at least a region of the fluidic channel 110 may be transparent.
- FIG. 2 is diagrams for explaining a movement direction of the fine structure 130 and a flow direction of the fluid 112 in the fluidic channel system shown in FIG. 1 .
- (a) to (c) of FIG. 2 are opened-up plan views of the fluidic channel system.
- a movement direction 210 of the fine structure 130 is different from a flow direction 212 of the fluid 112 , and there is an angle difference 214 between the movement direction 210 of the fine structure 130 and the flow direction 212 of the fluid 112 .
- FIG. 2 is diagrams for explaining a movement direction of the fine structure 130 and a flow direction of the fluid 112 in the fluidic channel system shown in FIG. 1 .
- (a) to (c) of FIG. 2 are opened-up plan views of the fluidic channel system.
- a movement direction 210 of the fine structure 130 is different from a flow direction 212 of the fluid 112 , and there is an angle difference 214 between the movement direction 210 of the fine structure 130 and the flow direction 212 of the fluid 112
- a movement direction 220 of the fine structure 130 is different from a flow direction 222 of the fluid 112 , and there is an angle difference 224 between the movement direction 220 of the fine structure 130 and the flow direction 222 of the fluid 122 .
- a movement direction 230 of the fine structure 130 substantially coincides with a flow direction 230 of the fluid 112 .
- the rail 120 may be formed in a sine wave shape to be disposed in the fluidic channel system.
- a position of the fine structure 130 in a parallel direction (+Y or ⁇ Y direction) to the flow direction (+Y or ⁇ Y direction) of the fluid 112 can be controlled by the flow of the fluid.
- a position of the fine structure 130 in a perpendicular direction (+X or ⁇ X direction) to the flow direction of the fluid 112 cannot be controlled by the flow of the fluid 112 .
- the fine structure 130 may diffuse in the perpendicular direction (+X or ⁇ X direction).
- the fine structure 130 can be prevented from diffusing in the perpendicular direction (+X or ⁇ X direction), and the position of the fine structure 130 in the perpendicular direction (+X or ⁇ X direction) can be accurately controlled.
- FIG. 3 is diagrams showing a process of fabricating the fluidic channel 110 shown in FIG. 1 .
- a silicon substrate 310 is prepared.
- photoresist 320 is applied onto the silicon substrate 310 .
- the photoresist 320 may be SU-8 photoresist, for example.
- the photoresist 320 is patterned to form a main channel layer 325 .
- the patterning of the phororesist 320 includes a step ((c) of FIG. 3 ) of aligning a photomask 330 and exposing the photoresist 320 , and a step ((d) of FIG.
- additional photoresist 320 ′ is applied onto the silicon substrate 310 and the main channel layer 325 .
- the additional photoresist 320 ′ is patterned to form a rail layer 325 ′.
- the patterning of the additional photoresist 320 ′ includes a step ((f) of FIG. 3 ) of aligning an additional photomask 330 ′ and exposing the photoresist 320 ′, and a step ((g) of FIG. 3 ) of developing the additional photoresist 320 ′.
- the silicon substrate 310 having the main channel layer 325 and the rail layer 325 ′ formed thereon is put into an aluminum container 350 , and uncured thermosetting polymer, for example, uncured PDMS 340 is introduced onto the silicon substrate 310 .
- uncured PDMS 340 is converted into the cured PDMS 360 .
- the aluminum container 350 is disposed on a hot plate and maintained at a temperature of about 150° C. for a proper time, for example, about ten minutes.
- the cured PDMS 360 is obtained by the 2 layer mold fabricating process described with reference to (a) to (i) of FIG. 3 .
- a glass substrate 380 coated with PDMS 370 is prepared separately from the above-described process ((a) to (i) of FIG. 3 ).
- the cured PDMS 360 obtained by the process of (a) to (i) of FIG. 3 is coupled to the PDMS 370 applied onto the glass substrate 380 , thereby forming the fluidic channel 110 having the rail 120 provided thereon.
- the fluidic channel 110 includes the PDMS 360 and 370 and the glass substrate 380 .
- the step (shown in (d) of FIG. 3 ) of developing the photoresist 320 may be omitted. That is, after the photoresist 320 is applied and exposed, the additional photoresist 320 ′ is applied and exposed. Then, the photoresist 320 and the additional photoresist 320 ′ may be simultaneously developed to form the main channel layer 325 and the rail layer 325 ′.
- various other types of containers may be used instead of the aluminum container 350 shown in (h) and (i) of FIG. 3 .
- a glass Petri dish may be used.
- the fluidic channel system may further include a camera 410 , a processor 420 , a demagnification lens 430 , a beam splitter 440 , and an illuminator 450 , in addition to the fluidic channel 110 , the rail 120 , the fine structure 130 , and the light projection apparatus 140 shown in FIG. 1 .
- the camera 410 photographs the fluidic channel 110 .
- the camera 410 may include an image lens 412 and an image sensor 414 .
- the image lens 412 receives light from the beam splitter 440 , and then delivers the received light to the image sensor 414 such that an image can be formed in the image sensor 414 .
- the image sensor 414 generates an electrical signal corresponding to the incident light.
- the electrical signal output from the camera 410 may be provided to the processor 420 .
- the processor 420 determines the shape of light and the light projection apparatus 140 provide the beam splitter 440 with the light having the shape.
- the processor 420 determines the shape of light based on the electrical signal output from the camera 410 .
- the processor 420 may determines a proper shape of the light based on an image of the chip delivered from the camera 410 .
- the processor 420 may determine a proper shape of light according to an image of a fine structure delivered from the camera 410 .
- the processor 420 may be, for example, a personal computer (PC) or notebook computer.
- the processor 420 may be omitted.
- the demagnification lens 430 demagnifies light provided from the light projection apparatus 140 , and then provides the light to the fluidic channel 110 .
- a 10 ⁇ , 20 ⁇ , or 60 ⁇ objective lens may be used.
- the beam splitter 440 delivers the light provided from the light projection apparatus 140 to the fluidic channel 110 through the demagnification lens 430 . Further, the beam splitter 440 delivers to the camera 410 an image delivered from the fluidic channel 110 through the demagnification lens 430 .
- the beam splitter 440 may be a half mirror.
- the illuminator 450 provides illumination such that the camera 410 can secure an image of the fluidic channel 110 . Since a cured fine structure and an uncured fluid have a small difference in refractive index, off-axis illumination may be used so that the cured fine structure can be seen more clearly.
- the light projection apparatus 140 includes a light source 142 and a spatial light modulator 144 .
- the light source 142 may be, for example, an ultraviolet light source, visible light source, or infrared light source.
- the light source 142 may include, for example, an ultraviolet light source collimator 146 and an ultraviolet filter 148 .
- the ultraviolet light source collimator 146 serves to output parallel ultraviolet light.
- the ultraviolet light source collimator 146 may include, for example, a 200W UV lamp (not shown) and a fiber-based light guide system (not shown).
- the ultraviolet filter 148 serves to select ultraviolet light from light provided from the ultraviolet light source collimator 146 and then provide the selected ultraviolet light to the spatial light modulator 144 .
- the spatial light modulator 144 serves to modulate the light provided from the light source 142 in accordance with a signal provided from the processor 420 .
- the spatial light modulator 144 may be, in an example, a digital micromirror array manufactured in a two-dimensional array type, as shown in FIG. 4 .
- the spatial light modulator 144 may be manufactured in a one-dimensional array type, or may be manufactured using a liquid crystal display (LCD) or the like instead of the micromirror array.
- the light projection apparatus 140 may be implemented in various other ways not shown in the drawing.
- FIG. 5 is a diagram for explaining modified embodiments of the rail adopted in the fluidic channel system shown in FIG. 1 .
- (a) to (i) of FIG. 5 are cross-sectional views of fluidic channels having a fine structure positioned therein.
- cross-sections of a rail 510 and a guide 512 have triangular shapes.
- cross-sections of a rail 520 and a guide 522 have semi-circular shapes.
- a cross-section of a rail 530 has a protrusion shape
- a cross-section of a guide 532 has a groove shape. Referring to (d) of FIG.
- rails 540 are respectively formed on two surfaces of a fluidic channel 544 facing each other. Further, guides 542 are respectively positioned facing each other inside the rails 540 formed on two surfaces of the fluidic channel 544 .
- a rail 550 is positioned inside a fluidic channel 554 so as not to come in contact with an inner surface of the fluidic channel 554 .
- the rail 550 has a bar shape connected along the fluidic channel 554 . Further, a guide 552 having a hole shape is formed inside a fine structure 556 .
- a rail 560 is provided inside a fluidic channel 564 , but a fine structure 566 does not have a protrusion, groove, or hole. Therefore, it looks like the fine structure 566 does not have a portion which is to be named as a guide. However, since the fine structure 566 does not come off of the rail 560 because of its shape, it can be understood that the fine structure 566 itself functions as a guide. Further, since the fine structure 566 does not come off of the rail 560 because of the lower portion of the fine structure 566 , it can be understood that the lower portion of the fine structure 566 corresponds to a guide.
- the width of a protrusion-shaped guide 572 increases toward the outside of a fluidic channel 574
- the width of a groove-shape rail 570 increases toward the outside of the fluidic channel 574
- the width of a groove-shaped guide 582 decreases toward the outside of a fluidic channel 584
- the width of a protrusion-shaped rail 580 decreases toward the outside of the fluidic channel 584 . Since the guide 572 or 582 and the rail 570 or 580 are formed in such a manner that their widths change toward the outside as shown in (g) and (h) of FIG.
- FIG. 5 shows an example in which the widths of the guide 572 or 582 and the rail 570 or 580 continuously change. However, the widths of the guide 572 or 582 and the rail 570 or 580 may change discontinuously, different from (g) and (h) of FIG. 5 . Such examples are illustrated in (i) and (j) of FIG. 5 . Referring to (i) of FIG. 5 , two fine structures 576 A and 576 B are positioned inside a fluidic channel 574 A.
- the first fine structure 576 A moves along a rail 570 A positioned at an upper surface of the fluidic channel 574 A
- the second fine structure 576 B moves along a rail 570 B positioned at a lower surface of the fluidic channel 574 A.
- the fine structure 576 A or 576 B has a guide 572 A or 572 B protruding in a T shape, and the rail 570 A or 570 B recessed in a T shape is positioned inside the fluidic channel 574 A.
- the fine structure 576 A or 576 B moves along the rail 570 A or 570 B without coming off. Further, the two fine structures 576 A and 576 B can be moved simultaneously along the upper and lower portions of the fluidic channel 574 A. Further, four rails may be formed at four surfaces of the fluidic channel 574 A such that four fine structures can be moved along the four rails formed at the upper and lower and left and right surfaces of the fluidic channel 574 A, respectively. Referring to (j) of FIG.
- a fine structure 586 A has a guide 582 A recessed in a T shape, and a rail 580 A protruding in a T shape is positioned inside a fluidic channel 584 A. Therefore, although the internal height of the fluidic channel 584 A is larger than the sum of the thickness of the fine structure 586 A and the height of the guide 582 A, the fine structure 586 A moves along the rail 580 A without coming off.
- the guide serves to prevent the fine structure from coming off of the rail
- the cross-sectional shape of the guide does not necessarily have to coincide with that of the rail.
- the guide may have a rectangular or semi-circular cross-section.
- the guide may have a triangular or semi-circular cross-section.
- the guide may have a triangular or rectangular cross-section.
- (k) of FIG. 5 shows an example in which the cross-sectional shape of the guide does not coincide with that of the rail. Referring to (k) of FIG. 5 , while the rail 590 has a rectangular cross-section, the guide 592 has a semi-circular cross-section. In this case, a fine structure 596 having the guide 592 provided thereon moves along but does not come off of the rail 590 .
- FIGS. 6 to 11 are diagrams for explaining one embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and one embodiment of a method of fabricating a fine structure.
- FIGS. 6 to 11 show examples in which the width of a rail is changed such that a fine structure can be easily moved along the rail.
- (a) of each of FIGS. 6 to 11 is an opened-up plan view of a fluidic channel
- (b) of each of FIGS. 6 to 11 is a cross-sectional view of the fluidic channel, taken along the dashed line of (a) of each of FIGS. 6 to 11 .
- a photocurable fluid 612 flows through a fluidic channel 610 having a groove-shaped rail 620 mounted therein, and the width W 1 of the rail 620 in a region where a fine structure is produced is set to be smaller than the width W 2 of the rail 620 in a region where the fine structure moves.
- light is radiated onto the photocurable fluid 612 to form a fine structure 630 having a protrusion-shaped guide 632 .
- the width W 3 of the guide 632 formed in such a manner is slightly smaller than the width W 1 of the rail.
- the fine structure 630 is moved along the rail 620 into the region having a relatively large width W 2 by the flow of the photocurable fluid 612 .
- the rail 620 is not too tight for the guide 632 , the movement of the fine structure 630 is not hindered by friction between the guide 632 and the rail 620 .
- the fine structure 630 may not be moved at all. In this case, when the width W 2 of the rail 620 in the region where the fine structure 630 moves is larger than the width W 1 of the rail 620 in the region where the fine structure 630 is produced, such a phenomenon can be prevented.
- the width W 2 of the rail 620 in the region where the fine structure 630 moves is larger than the width W 1 of the rail 620 in the region where the fine structure 630 is produced, it does not necessarily mean that the width W 2 of the rail 620 in the entire region where the fine structure 630 moves is larger than the width W 1 of the rail 620 in the region where the fine structure 630 is produced, but that the width W 2 of the rail 620 in a portion of the region where the fine structure 630 moves is larger than the width W 1 of the rail 620 in the region where the fine structure 630 is produced.
- the width of the rail 620 in a curved portion of the region where the fine structure 630 moves may be larger than that in the region where the fine structure 630 is produced.
- a photocurable fluid 912 flows through a fluidic channel 910 having a protrusion-shaped rail 920 mounted thereon, and the width W 4 of the rail 920 in a region where a fine structure is produced is set to be larger than the width W 5 of the rail 920 in a region where the fine structure moves.
- light is radiated onto the photocurable fluid 912 to form a fine structure 930 having a groove-shaped guide 932 .
- the guide 932 formed in such a manner has a slightly larger width W 6 than the width W 4 of the rail.
- the fine structure 930 is moved along the rail 920 into the region having a relatively small width W 5 by the flow of the photocurable fluid 912 .
- the rail 920 is not too tight for the guide 932 , the fine structure 930 moves smoothly.
- the width W 5 of the rail 920 in the region where the fine structure 930 moves is smaller than the width W 4 of the rail 920 in the region where the fine structure 930 is produced, it does not necessarily mean that the width W 5 of the rail 920 in the entire region where the fine structure 930 moves is smaller than the width W 4 of the rail 920 in the region where the fine structure 930 is produced, but that the width W 5 of the rail 920 in a portion of the region where the fine structure 930 moves is smaller than the width W 4 of the rail 920 in the region where the fine structure 930 is produced.
- the width of the rail 920 in a curved portion of the region where the fine structure 930 moves may be smaller than that in the region where the fine structure 930 is produced.
- the width of the rail 620 or 920 in the region where the fine structure 630 or 930 is produced may be set to be different from in the region where the fine structure 630 or 930 moves. In this case, the fine structure 630 or 930 can move more easily.
- Such a technical idea can be applied to another rail having a different shape.
- the width of the rail 550 shown in (e) of FIG. 5 in a region where the fine structure 556 moves may be set to be smaller than that in a region where the fine structure 556 is produced. Then, the fine structure 556 can move more easily.
- FIGS. 12 to 17 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure.
- FIGS. 12 to 17 show an example in which a fine structure passes through an interface between fluids.
- (a) of each of FIGS. 12 to 17 is an opened-up plan view of a fluidic channel
- (b) of each of FIGS. 12 to 17 is a cross-sectional view of the fluidic channel, taken along the dashed line of (a) of each of FIGS. 12 to 17 .
- first and second fluids 1212 A and 1212 B flow along a fluidic channel 1210 , and an interface 1214 is formed between the fluids 1212 A and 1212 B.
- the first fluid 1212 A is introduced into a third passage 1216 C positioned in the fluidic channel 1210 through a first passage 1216 A positioned in the fluidic channel 1210
- the second fluid 1212 B is introduced into the third passage 1216 C through a second passage 1216 B positioned in the fluidic channel 1210 .
- a rail 1220 is formed to intersect the interface 1214 .
- the first and second fluids 1212 A and 1212 B may be a photocurable fluid. Constituents of the fluids 1212 A and 1212 B may be different from each other.
- constituents of the fluids 1212 A and 1212 B may be the same as each other, but components (for example, nanostructures or particles) dispersed in the fluids 1212 A and 1212 B may be different from each other.
- two fluids 1212 A and 1212 B flow, but three or more fluids may flow.
- FIG. 13 light is radiated onto the first fluid 1212 A to form a fine structure 1230 having a guide 1232 provided thereon. Since the fine structure 1230 is formed by curing the first fluid 1212 A, the fine structure 1230 includes a first polymer 1230 A formed by curing the first fluid 1212 A.
- the fine structure 1230 moves along a rail 1220 , the fine structure 1230 moves from the first fluid 1212 A through the interface 1214 to the second fluid 1212 B. If the rail 1220 is not provided, the produced fine structure 1230 will move along the first fluid 1212 A. In this embodiment, since the rail 1220 and the guide 1232 are provided to intersect the interface 1214 , the fine structure 1230 can move from the first fluid 1212 A through the interface 1214 between the first and second fluids 1212 A and 1212 B to the second fluid 1212 B. Referring to FIG. 15 , light is radiated onto the second fluid 1212 B to form a second polymer 1230 B.
- the fine structure 1230 includes the first polymer 1230 A and the second polymer 1230 B formed by curing the second fluid 1212 B.
- the fine structure 1230 moves from the second fluid 1212 B through the interface 1214 to the first fluid 1212 A.
- light is radiated onto the first fluid 1212 A to form a third polymer 1230 C.
- the fine structure 1230 includes the first polymer 1230 A, the second polymer 1230 B, and the third polymer 1230 C formed by curing the first fluid 1212 A.
- the fine structure 1230 can be controlled to pass through the interface 1214 between the fluids 1212 A and 1212 B. Further, when the fluidic channel 1210 having the rail 1220 disposed therein is used, it is possible to form the fine structure 1230 composed of different materials 1230 A and 1230 B.
- FIGS. 18 to 21 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure.
- FIGS. 18 to 21 show another example in which a fine structure passes through an interface between fluids.
- FIGS. 18 to 21 are opened-up plan views of a fluidic channel.
- a first fluid 1812 A flows along a first passage 1816 A positioned inside a fluidic channel 1810
- a second fluid 1812 B flows along a second passage 1816 B positioned inside the fluidic channel 1810
- a third fluid 1812 C flows along a third passage 1816 C positioned inside the fluidic channel 1810
- a first interface 1814 A is formed between the first and second fluids 1812 A and 1812 B
- a second interface 1814 B is formed between the first and third fluids 1812 A and 1812 C.
- all the fluids 1812 A to 1812 C are photocurable, but some or all of the fluids 1812 A to 1812 C may not be photocurable.
- a second rail 1820 B intersects the first interface 1814 A to join a first rail 1820 A
- a third rail 1820 C intersects the second interface 1814 B to join the first rail 1820 A.
- first to third fine structures 1830 A to 1830 C having a guide provided thereon.
- the first fine structure 1830 A, the second fine structure 1830 B, and the third fine structure 1830 C are formed by curing the first photocurable fluid 1812 A, the second photocurable fluid 1812 B, and the third photocurable fluid 1812 C, respectively.
- the fine structures 1830 A to 1830 C may be formed simultaneously or sequentially according to a specific order.
- the second fine structure 1830 B moves along the second rail 1820 B
- the second fine structure 1830 moves from the second fluid 1812 B through the first interface 1814 A to the first fluid 1812 A.
- the third fine structure 1830 C moves along the third rail 1820 C
- the third fine structure 1830 C moves from the third fluid 1812 C through the second interface 1814 B to the first fluid 1812 A.
- the first fine structure 1830 A moves along the first rail 1820 A inside the first fluid 1812 A.
- the fine structures 1830 B and 1830 C can move from the second and third fluids 1812 B and 1812 C through the interfaces 1814 A and 1814 B to the first fluid 1812 A.
- the second and third fine structures 1830 B and 1830 C move to the first rail 1820 A to move along the first rail 1820 A.
- the first fine structure 1830 A also moves along the first rail 1820 A.
- the fine structures 1830 B and 1830 C can be controlled to pass through the interfaces 1814 A and 1814 B.
- the fine structures 1830 A to 1830 C formed in the respective rails 1820 A to 1820 C can be controlled in such a manner that they move to one rail 1820 A to move along the rail 1820 A.
- FIGS. 22 to 25 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure.
- FIGS. 22 to 25 show an example in which a one-dimensional array of fine structures is formed at an end of a rail.
- (a) of each of FIGS. 22 , 23 and 24 , and FIG. 25 are opened-up plan views of a fluidic channel.
- (b) and (c) of FIG. 22 are cross-sectional views of the fluidic channel shown in (a) of FIG. 22 , taken along lines M-M′ and N-N′.
- (b) of FIG. 24 is a cross-sectional view of the fluidic channel shown in (a) of FIG. 24 , taken along line O-O′.
- a fluid 2212 flows through a fluidic channel 2210 .
- the fluid 2212 may be a photocurable fluid.
- a rail 2220 is positioned inside the fluidic channel 2210 , and the rail 2220 has an end 2222 .
- FIG. 23 shows an example in which the fine structures 2230 A to 2230 C are formed by curing the one fluid 2212 .
- the fine structures 2230 A to 2230 C may be produced from a variety of fluids.
- the first fine structure 2230 A may be formed while a first photocurable fluid flows
- the second fine structure 2230 B may be formed while a second photocurable fluid flows
- the third fine structure 2230 C may be formed while a third photocurable fluid flows.
- the fine structures 2230 A to 2230 C may be produced from different fluids in different passages positioned in the fluidic channel 2210 , and the produced fine structures 2230 A to 2230 C may be moved to one passage.
- the fine structures 2230 A to 2230 C meet the end 2222 of the rail 2220 while moving along the fluid 2212 , they are stopped. More specifically, the first fine structure 2230 A is stopped at the end of the rail 2222 , the second fine structure 2230 B is stopped behind the first fine structure 2230 A, and the third fine structure 2230 C is stopped behind the second fine structure 2230 B. As shown in FIG. 24 , when the rail 2220 having the end 2222 provided therein is used, it is possible to easily form a one-dimensional array 2233 of the fine structures 2230 A to 2230 C.
- additional light may be radiated to form a fine structure 2235 for fixation, which integrates the one-dimensional array 2233 , as shown in FIG. 25 .
- Fluid used for forming the fine structure 2235 for fixation may be the same as or different from the fluid used for forming the one-dimensional array 2233 .
- the one-dimensional array 2233 may be formed while the first photocurable fluid flows, and the fine structure 2235 for fixation may be formed while the second photocurable fluid flows.
- FIGS. 26 to 28 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure.
- FIGS. 26 to 28 show another example in which a one-dimensional array of fine structures is formed at an end of a rail.
- FIGS. 26 to 28 are opened-up plan views of a fluidic channel.
- a fluid 2612 flows through a fluidic channel 2610 .
- the fluid 2612 may be a photocurable fluid.
- a rail 2620 is positioned inside the fluidic channel 2610 , and the rail 2620 has an end 2622 .
- fine structures 2630 A to 2630 C having a guide.
- Each of the fine structures may have latches such that they are coupled to an adjacent fine structure.
- the fine structures 2630 A to 2630 C include male latches 2636 A to 2636 C and female latches 2637 A to 2637 C, respectively.
- the male latch 2636 A, 2636 B, or 2636 C and the female latch 2637 A, 2637 B, or 2637 C are shaped so that they are easy to couple and hard to separate.
- the fine structures 2630 A to 2630 C meet the end 2622 of the rail 2620 while moving along the 2612 , they are stopped. Then, a one-dimensional array of the fine structures 2630 A to 2630 C is formed. While the fine structures 2630 A to 2630 C are stopped at the end of the rail 2620 , the first female latch 2637 A is coupled to the second male latch 2636 B, and the second female latch 2637 A is coupled to the third male latch 2636 C. Since the fine structures 2630 A to 2630 C are coupled through the male latches 2536 A to 2636 C and the female latches 2637 A to 2637 C, the fine structures 2630 A to 2630 C may be integrated, without such a separate integration process as shown in FIG.
- the latches 2636 A to 2636 C and 2637 A to 2637 C are flexible, the male latches 2636 A to 2636 C and the female latches 2637 A to 2637 C can be easily coupled.
- the integration process as shown in FIG. 25 may be additionally performed.
- FIGS. 29 to 32 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure.
- FIGS. 29 to 32 show an example in which a two-dimensional array of fine structures is formed at ends of rails.
- FIGS. 29 to 32 are opened-up plan views of a fluidic channel.
- a fluid 2912 flows through a fluidic channel 2910 .
- the fluid 2912 may be a photocurable fluid.
- Rails 2920 A to 2920 C are positioned inside the fluidic channel 2910 , and have ends 2922 A to 2922 C, respectively.
- FIG. 30 shows an example in which the fine structures 2930 A to 2930 J are formed by curing one kind of fluid 2912 .
- the fine structures 2930 A to 2930 J may be produced from various fluids. For example, while first to third photocurable fluids flow in parallel to one another, the fine structures 2930 A to 2930 J may be formed.
- the second, fifth, and eighth fine structures 2930 B, 2930 E, and 2930 H may be formed by curing the first photocurable fluid
- the third, sixth, and seventh fine structures 2930 C, 2930 F, and 2930 I may be formed by curing the second photocurable fluid
- the fourth, seventh, and tenth fine structures 2930 D, 2930 G, and 2930 J may be formed by curing the third photocurable fluid
- the first fine structure 2930 A may be formed by curing the first to third photocurable fluids.
- additional light may be radiated to form a fine structure 2935 for fixation, which integrates the two-dimensional array 2934 , as shown in FIG. 32 .
- the fluid used for forming the fine structure 2935 for fixation may be the same as or different from the fluid used for forming the two-dimensional array 2934 .
- FIGS. 33 to 40 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure.
- FIGS. 33 to 40 show another example in which a two-dimensional array of fine structures is formed at ends of rails.
- (a) of FIG. 33 and FIGS. 34 to 40 are opened-up plan views of a fluidic channel.
- (b) and (c) of FIG. 33 are cross-sectional views of the fluidic channel shown in (a) of FIG. 33 , taken along lines P-P′ and Q-Q′.
- a fluid 3312 flows through a fluidic channel 3310 .
- First to fourth passages 3316 A to 3316 D are positioned inside the fluidic channel 3310 .
- the fluid 3312 may be a photocurable fluid.
- Rails 3320 A and 3320 B are positioned inside the fluidic channel 3310 and have ends 3322 A and 3322 B, respectively.
- first fine structures 3330 A having first guides 3332 A.
- the first fine structures 3330 A move to the left side along the first rail 3320 A and are then stopped at the end 3322 A of the first rail 3320 A.
- a one-dimensional array 3333 A of the first fine structures 3330 A is formed.
- the fluid 3312 introduced through the first passage 3316 A is discharged through the second passage 3316 B.
- the one-dimensional array 3333 A of the first fine structures 3330 A moves downward along the second rails 3320 B and is then stopped at the ends 3322 B of the second rails 3320 B.
- the fluid 3312 introduced through the fourth passage 3316 D is discharged through the third passage 3316 C.
- second fine structures 3330 B are formed and then moved to the right side to form a one-dimensional array 3333 B of the second fine structures 3330 B.
- the one-dimensional array 3333 B of the second fine structures 3330 B is moved downward to come in contact with the one-dimensional array 3333 A of the first fine structures 3330 A.
- the rails 3320 A and 3320 B having the ends 3322 A and 3322 B are used, it is possible to form a two-dimensional array 3334 of the fine structures 3330 A and 3330 B.
- additional light is radiated to form a fine structure 3335 for fixation which integrates the two-dimensional array 3334 , as shown in FIG. 40 .
- Fluid used for forming the fine structure 3335 for fixation may be the same as or different from the fluid used for forming the two-dimensional array 3334 .
- FIGS. 41 to 47 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure.
- FIGS. 41 to 47 show still another example in which a two-dimensional array of fine structures is formed at ends of rails.
- FIGS. 41 to 47 are opened-up plan views of a fluidic channel.
- a fluid 4112 flows through a fluidic channel 4110 .
- First to fourth passages 4116 A to 4116 D are positioned inside the fluidic channel 4110 .
- Rails 4120 A and 4120 B are positioned inside the fluidic channel 4110 , and have ends 4122 A and 4122 B.
- first fine structures 4130 A having guides 4132 A provided thereon are sequentially formed and then moved to the right side to form a one-dimensional array 4133 A of the first fine structures 4130 A.
- the one-dimensional array 4133 A of the first fine structures 4130 A is moved downward along the second rails 4120 B and stopped at the ends 4122 B of the second rails 4120 B.
- FIGS. 42 to 44 show an example in which the first fine structures 4130 A having the guides 4132 A are sequentially formed at a start portion of the first rail 4120 A.
- the first fine structures 4130 A having the guides 4132 A may be produced outside the fluidic channel 4120 to be delivered into the fluidic channel 4120 .
- second fine structures 4130 B are formed and moved to the right side to form a one-dimensional array 4133 B of the second fine structures 4130 B.
- the one-dimensional array 4133 B of the second fine structures 4130 B is moved downward to come in contact with the one-dimensional array 4133 A of the first fine structures 4130 A.
- the rails 4120 A and 4120 B having the ends 4122 A and 4122 B are used, it is possible to form a two-dimensional array 4134 of the fine structures 4130 A and 4130 B. Since the fine structures 4130 A and 4130 B are coupled through latches, the fine structures 4130 A and 4130 B can be integrated without the integration process shown in FIG. 40 .
- FIGS. 48 to 50 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure.
- FIGS. 48 to 50 show still another example in which a two-dimensional array of fine structures is formed at ends of rails.
- FIGS. 48 to 50 are opened-up plan views of a fluidic channel.
- a fluid 4812 is positioned inside a fluidic channel 4810 .
- the fluid 4812 may be a photocurable fluid.
- First to fourth passages 4816 A to 4816 D are positioned inside the fluidic channel 4810 .
- rails 4820 A to 4820 C are disposed in parallel to one another.
- the rails 4820 A to 4820 C have ends 4822 A to 4822 C.
- first to third fluids 4812 A to 4812 C delivered through the first passages 4816 A are discharged through the second passage 4816 B. Therefore, the first to third fluids 4812 A to 4812 C cross the rails 4820 A to 4820 C.
- An interface 4814 A is formed between the first and second fluids 4812 A and 4812 B, and an interface 4814 B is formed between the second and third fluids 4812 B and 4812 C.
- the same pressure is applied to the third and fourth passages 4816 C and 4816 D. In this state, light is radiated to form fine structures 4830 A to 48301 .
- the first to third fine structures 4830 A to 4830 C are formed by photocuring the first fluid 4812 A
- the fourth to sixth fine structures 4830 D to 4830 F are formed by photocuring the second fluid 4812 B
- the seventh to ninth fine structures 4830 G to 4830 I are formed by photocuring the third fluid 4812 C.
- the fine structures 4830 A to 4830 I meet the ends 4822 A to 4822 C of the rails 4820 A to 4820 C while moving along the fourth fluid 4812 D, they are stopped at the ends 4822 A to 4822 C.
- the fluid 4812 D may be the same as or different from any one of the first to third fluids 4812 A to 4812 C.
- a two-dimensional array 4834 of the fine structures 4830 A to 4830 I is formed. After the two-dimensional array 4834 is formed, an integration process similar to the process shown in FIG. 32 may be additionally performed.
- the fine structures belonging to each line of the two-dimensional array 4834 are produced by photocuring the same fluid.
- the fine structures 4830 A to 4830 C belonging to the first line are produced by photocuring the first fluid 4812 A
- the fine structures 4830 D to 4830 F belonging to the second line are produced by photocuring the second fluid 4812 B
- the fine structures 4830 G to 4830 I belonging to the third line are produced by photocuring the third fluid 4812 C.
- the fine structures belonging to each line of the two-dimensional array may be produced by the photocuring of different fluids. In one example, when a certain fine structure, for example, the fine structure 4830 B, is not produced in the step described in FIG.
- the fine structures 4830 A, 4830 E, and 4830 C belonging to the first line in the step described in FIG. 50 are produced by photocuring the first, second, and first fluids 4812 A, 4812 B, and 4812 A.
- the fine structures 4830 B, 4830 C, and 4830 F are not produced in the step described in FIG. 49
- the fine structures 4830 A, 4840 E, and 4830 I belonging to the first line in the step described in FIG. 50 are produced by photocuring the first, second, and third fluids 4812 A, 4812 B, and 4812 C.
- FIGS. 51 to 53 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and an example of a method for conveying a fine structure.
- FIGS. 51 to 53 show an example in which the movement direction of a fine structure is determined in accordance with the position of a guide.
- (a) of FIG. 51 is an opened-up plan view of a fluidic channel 5110
- (b) to (d) of FIG. 51 are cross-sectional views of the fluidic channel 5110 of (a) of FIG. 51 , taken along lines R-R′, S-S′, and T-T′, respectively.
- a fluid 5112 is present inside the fluidic channel 5110 .
- First to third passages 5116 A to 5116 C are positioned inside the fluidic channel 5110 .
- the first rail 5120 A is positioned in an upper portion of the fluidic channel 5110 and passes through the first and second passages 5116 A and 5116 B.
- the second rail 5120 B is positioned in a lower portion of the fluidic channel 5110 and passes through the first and third passages 5116 A and 5116 C.
- FIG. 52 is an opened-up plan view of the fluidic channel 5110
- (b) and (c) of FIG. 52 are cross-sectional views of first and second fine structures 5130 A and 5130 B.
- at least one first fine structure 5130 A and at least one second fine structure 5130 B flow along the first passage 5116 A of the fluidic channel 5110 .
- the first fine structure 5130 A has a guide 5132 A positioned on the top surface thereof
- the second fine structure 5130 B has a guide 5132 B positioned on the bottom surface thereof.
- FIG. 53 is an opened-up plan view of the fluidic channel 5110 .
- the first fine structure 5130 A has the guide 5132 A positioned on the top surface thereof, the first fine structure 5130 A moves along the first rail 5120 A positioned in the upper portion of the fluidic channel 5110 . Since the first rail 5120 A is formed in the direction of the second passage 5116 B, the first fine structure 5130 A moves to the second passage 5116 B. Further, since the second fine structure 5130 B has the guide 5132 B positioned on the bottom surface thereof, the second fine structure 5130 B moves along the second rail 5120 B positioned in the lower portion of the fluidic channel 5110 . Since the second rail 5120 B is formed in the direction of the third passage 5116 C, the second fine structure 5130 B moves to the third passage 5116 C.
- the rails 5120 A and 5120 B are formed in the upper and lower portions of the fluidic channel 5110 such that their advancing directions are set to be different from each other, it is possible to divide the fine structures 5130 A and 5130 B depending on the position of the guide provided thereon. Further, when a large quantity of fine structures fabricated outside is injected into the fluidic channel, fine structures having a guide positioned on the top surface thereof and fine structures having a guide positioned on the bottom surface thereof may be mixed. In this case, when the above-described fluidic channel 5110 is used, it is possible to extract either the fine structures having a guide positioned on the top surface thereof or the fine structures having a guide positioned on the bottom surface thereof.
- FIG. 54 is diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , which show an example of an entrance portion of a rail.
- (a) of FIG. 54 is an opened-up plan view of a fluidic channel 5410 .
- (b) to (d) of FIG. 54 are cross-sectional views of the fluidic channel 5410 of (a) of FIG. 54 , taken along lines U-U′, V-V′, and W-W′.
- fine structures 5430 A to 5430 C are positioned inside the fluidic channel 5401 and have guides 5432 A to 5432 C, respectively.
- the fluidic channel 5410 includes a region 5410 A where a rail 5420 is not formed, an entrance portion 5410 B, and a region 5410 C where the rail 5420 is formed.
- the entrance portion 5410 B has one or more inclined surfaces 5424 .
- the inclined surfaces 5424 serve to lead the guides of the fine structures such that the guides enter into the rail.
- the Y-directional orientation of the fine structure 5430 A positioned in the region 5410 A where the rail 5420 is not formed is not limited. However, the orientation of the fine structure 5430 B positioned in the entrance portion 5410 B is limited by the inclined surfaces 5432 .
- the distance between the inclined surfaces 5432 decreases toward the region 5410 C where the rail 5420 is formed.
- the fine structure 5430 B approaches the region 5410 C where the rail 5420 is formed, the Y-directional orientation of the fine structure 5430 B approaches the rail 5420 . In the region 5410 C where the rail 5420 is formed, the fine structure 5430 C moves along the rail 5420 .
- FIG. 55 is a diagram for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , which show a modified example of the entrance portion of the rail of (a) of FIG. 54 .
- a fluid 5512 flows inside a fluidic channel 5510 which includes a region 5510 A where the rail 5520 is not formed, an entrance portion 5510 B, and a region 5510 C where the rail 5520 is formed.
- the entrance portion 5510 B shown in FIG. 55 has only one inclined surface 5524 .
- FIGS. 56 and 57 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , which show an example in which a magnetic field is applied to a fluidic channel.
- FIG. 56 shows a state before fine structures 5630 A and 5630 B pass through a diverging point 5624 .
- a rail is positioned inside the fluidic channel 5610 and includes first to third branches 5620 A to 5620 C.
- the first to third branches 5620 A to 5620 C join together at the diverging point.
- the fine structures 5630 A and 5630 B move along a flow of a fluid 5612 .
- the fine structures 5630 A and 5630 B have magnetic materials provided thereon.
- the magnetic materials may be formed in various shapes, such as particle shapes.
- At least one first fine structure 5830 A and at least one second fine structure 5830 B have different polarity from each other.
- a magnetic field is applied to the fluidic channel 5610 , or specifically, around the diverging point 5624 .
- FIG. 56 shows an example in which the magnetic field is applied by two magnets 5640 A and 5640 B positioned outside the fluidic channel 5610 .
- this may be modified in various manners. In one modified example, only one magnet 5640 A or 5640 B may be used to apply a magnetic field. In another modified example, the magnet 5640 A or 5640 B may be positioned inside the fluidic channel 5610 .
- the magnet 5640 A or 5640 B may be an electromagnet or permanent magnet.
- the fine structures 5630 A and 5630 B include magnetic materials, an attractive or repulsive force due to the magnetic field is applied to the fine structures.
- the first fine structure 5630 A receives a magnetic force in the direction of the first magnet 5640 A
- the second fine structure 5630 B receives a magnetic force in the direction of the second magnet 5640 B.
- FIG. 57 shows a state after the fine structures 5630 A and 5630 B pass through the diverging point 5624 .
- the first fine structure 5630 A which moves along the first branch 5620 A to reach the diverging point 5624 is moved to the second branch 5620 B by the magnetic force applied in the direction of the first magnet 5640 A.
- the second fine structure 5630 B which moves along the first branch 5620 A to reach the diverging point 5624 is moved to the third branch 5620 C by the magnetic force applied in the direction of the second magnet 5640 B.
- the fine structures 5630 have magnetic materials provided thereon and a magnetic field is applied to the fluidic field, the advancing direction of the fine structures 5630 A and 5630 B at the diverging point 5624 can be controlled.
- FIGS. 58 and 59 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , which show another example in which a magnetic field is applied to a fluidic channel.
- FIG. 58 shows a state in which a first fine structure 5830 A passes through a diverging point 5824 .
- a rail is positioned inside the fluidic channel 5810 and includes first to third branches 5820 A to 5820 C.
- the first to third branches 5820 A to 5820 C join at the diverging point 5824 .
- the fine structures 5830 A and 5830 B move along a flow of a fluid 5812 .
- the fine structures 5830 A and 5830 B include magnetic materials 5834 A and 5834 B, for example, magnetic particles, provided thereon.
- the magnetic materials 5834 A and 5834 B may be paramagnetic materials.
- a magnetic field which changes with time is applied to the fluidic channel 5810 , more specifically, around the diverging point 5824 . While the first fine structure 5830 A passes through the diverging point 5824 , a first magnet 5840 A is turned on, and a second magnet 5840 B is turned off. Therefore, as an attractive force is applied by the first magnet 5840 A, the first fine structure 5830 A moves to the second branch 5820 B.
- FIG. 59 shows a state in which the second fine structure 5830 B passes through the diverging point 5824 .
- the second magnet 5840 B is turned on and the first magnet 5840 A is turned off. Therefore, as an attractive force is applied by the second magnet 5840 B, the second fine structure 5830 B is moved to the third branch 5820 C.
- the fine structures 5830 have magnetic materials provided thereon and a magnetic field is applied to the fluidic channel 5810 , the advancing direction of the fine structures 5830 A and 5830 B at the diverging point 5824 can be controlled.
- FIG. 59 shows a state in which the second fine structure 5830 B passes through the diverging point 5824 .
- the fine structure 5830 A or 5830 B passes through the diverging point 5824 , any one of the two magnets 5840 A and 5840 B is turned on and the other turned off in order to control the advancing direction of the fine structure 5830 A or 5830 B through the attractive force generated by the magnet 5840 A or 5840 B.
- this example may be modified in various manners.
- the fine structures 5830 A and 5830 B include ferromagnetic materials having the same polarity, and the polarity of the electromagnet 5840 A or 5840 B is changed to change the direction of an attractive or repulsive force generated by the electromagnet 5840 A or 5840 B.
- the advancing direction of the fine structure 5830 A or 5830 B can be controlled.
- the polarity of the electromagnet 5840 A or 5840 B can be changed by changing the direction of a current provided to the electromagnet 5840 A or 5840 B.
- an electric field may be applied to the fluidic channel, instead of the magnetic field.
- the fine structure should have electric charge.
- the fine structures having electric charges are moved to any one of two branches in accordance with the electric field formed in the fluidic channel.
- FIG. 60 is a diagram for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , which shows still another example in which a magnetic field is applied to a fluidic channel.
- a fine structure 6030 having magnetic materials 6034 provided thereon is moved by a magnetic field applied across a fluidic channel.
- the magnetic materials 6034 may be paramagnetic materials.
- the fine structure 6030 is moved toward the magnet 6040 . Since the fine structure 6030 is moved by the magnetic field, the fine structure 6030 can be moved even when a fluid 6012 does not flow. Further, the fine structure 6030 can be moved against the flow of the fluid 6012 .
- the fluid 6012 may flow in the opposite direction to the direction of the magnet 6040 , and the fine structure 6030 may be moved in the direction of the magnet 6040 . Since a force moving the fine structure 6030 is provided by the magnet 6040 or the magnetic field, the fluid 6012 does not need to provide the force moving the fine structure 6030 . Therefore, a gas may be used as the fluid 6012 . In the case of gas, a rate at which a force moving the fine structure 6030 is provided is relatively low. By changing the magnetic field applied across the fluidic channel 6010 according to time, it is possible to control the movement direction of the fine structure 6030 according to time. Further, when a plurality of electromagnets are used, the movement of the fine structure 6030 can be controlled by a similar method as is used to control a magnetic levitation propulsion train.
- an electric field may be applied to the fluidic channel, instead of the magnetic field.
- the fine structure should have electric charges. Since an electric force causes the fine structure to move, the fluid does not need to provide a force to move the fine structure. Therefore, a gas may be used as the fluid. Since the fine structure is moved by the electric field, the fine structure can be moved even when the fluid does not flow. Further, the fine structure can be moved against the flow of the fluid.
- FIG. 61 is diagrams for explaining one embodiment of the fine structure which can be adopted in the fluidic channel system shown in FIG. 1 , which show an example in which the fine structure includes a latch.
- (a) to (d) of FIG. 61 are opened-up plan views of a fine structure.
- the fine structure 6110 includes a latch 6120 .
- the fine structure 6110 can be coupled to at least one adjacent fine structure through the latch 6120 .
- the shape of the latch 6120 can be modified in various manners. Modified examples of the latch are shown in (b) to (d) of FIG. 61 .
- FIG. 62 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown in FIG. 1 , which show an example in which the fine structure includes a spacer.
- (a) to (c) of FIG. 62 are opened-up plan views of fine structures.
- a fine structure 6210 includes a spacer 6220 .
- the spacer 6220 serves to adjust a distance between the fine structure 6210 and an adjacent fine structure, that is, a distance between the center of the fine structure 6210 and the center of an adjacent fine structure 6210 .
- the spacer 6220 has a bar shape, but the shape of the spacer 6220 may be modified in various manners. Modified examples of the spacer 6220 are shown in (b) and (c) of FIG. 62 .
- FIG. 63 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown in FIG. 1 , which show an example in which the guide includes a wedge-shaped end.
- (a) of FIG. 63 is a perspective view of a fine structure having a wedge-shaped end
- (b) of FIG. 63 is an opened-up plan view of the fine structure.
- a guide 6320 of a fine structure 6310 has a wedge-shaped end 6330 .
- a tip 6340 of the wedge-shaped end 6330 leans in any one direction of both side surfaces of the 6320 .
- FIG. 63 is a perspective view of a fine structure having a recessed wedge
- (d) of FIG. 63 is an opened-up plan view of the fine structure of (c) of FIG. 63 .
- a guide 6370 of the fine structure 6360 has a wedge-shaped end 6380 , and a tip 6390 of the wedge-shaped end 6380 leans in any one direction of both side surfaces.
- FIGS. 64 and 65 are diagrams for explaining the function of the wedge-shaped end of the guide according to one embodiment.
- FIG. 64 is an opened-up plan view of a fluidic channel, showing a state before fine structures 6430 A and 6430 B pass through a diverging point 6424 .
- FIG. 65 is an opened-up plan view of the fluidic channel, showing a state after the fine structures 6430 A and 6430 B pass through the diverging point 6424 .
- a fluid 6412 flows inside a fluidic channel 6410 .
- the fluid 6412 may be a photocurable fluid.
- a rail 6420 includes first to third branches 6420 A to 6420 C.
- the first to third branches 6420 A to 6420 C join at the diverging point 6424 .
- the first fine structure 6430 A includes a guide 6432 A having a wedge-shaped end, and a tip 6434 A of the wedge-shaped end leans toward the second branch 6420 B.
- the second fine structure 6430 B includes a guide 6432 B having a wedge-shaped end, and a tip 6434 B of the wedge-shaped end leans toward the third branch 6420 C.
- the first fine structure 6430 A having the tip 6434 A leaning toward the second branch 6420 B is moved to the second branch 6420 B. Further, the second fine structure 6430 B having the tip 6434 B leaning toward the third branch 6420 C is moved to the third branch 6420 C. In this way, the advancing direction of the fine structures 6430 A and 6430 B at the diverging point 6424 can be controlled.
- FIG. 66 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown in FIG. 1 , which show an example in which a fine structure is used as a package of a microchip.
- (a) of FIG. 66 is a perspective view of a fine structure formed by radiating light from the bottom of a microchip, and (b) of FIG. 66 is an opened-up plan view of the fine structure of (a) of FIG. 66 .
- (c) of FIG. 66 is a perspective view of a fine structure formed by radiating light from the top of a microchip, and (d) of FIG. 66 is an opened-up plan view of the fine structure of (c) of FIG. 66 .
- FIG. 66 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown in FIG. 1 , which show an example in which a fine structure is used as a package of a microchip.
- (a) of FIG. 66 is a perspective
- a package 6610 or 6660 covers the bottom and side surfaces of the microchip 6620 or 6670 .
- a microchip means a chip which has an area of less than 1 mm 2 .
- the microchip may have a size of 100 ⁇ m ⁇ 100 ⁇ m ⁇ 20 ⁇ m.
- the microchip 6620 or 6670 may be a light emitting diode (LED) chip, a radio frequency identification (RFID) chip, or a complementary metal-oxide semiconductor (CMOS) chip.
- the package 6610 or 6660 includes a guide 6630 or 6680 .
- FIGS. 67 to 69 are diagrams for explaining an example of a method of fabricating a package.
- (a) of FIG. 67 is a perspective view of a fluidic channel 6710
- (b) of FIG. 67 is an opened-up plan view of the fluidic channel 6710
- (c) of FIG. 67 is a perspective view of a microchip 6750 .
- a microchip 6750 is provided inside the fluidic channel 6710 .
- a fluid 6712 flows inside the fluidic channel 6710 .
- the fluid 6712 may be a photocurable fluid.
- the fluidic channel 6710 includes a rail 6720 .
- FIG. 68 is a diagram showing an example of an image photographed by the camera 410 (refer to FIG. 4 ), and (b) of FIG. 68 is a diagram showing an example of the shape of light determined by the processor 420 (refer to FIG. 4 ).
- the shape 6820 of light suitable for a package may be obtained by expanding a region 6810 corresponding to the microchip into a predetermined range.
- (a) of FIG. 69 is a perspective view of the fluidic channel 6710 receiving light having the determined shape 6820
- (b) of FIG. 69 is an opened-up plan view of the fluidic channel 6710
- (c) of FIG. 69 is a perspective view of a packaged chip 6730 .
- the package 6730 may be formed by providing light to the fluidic channel 6710 .
- the package 6730 may be formed by curing the fluid 6712 .
- a guide 6732 may be formed at the same time as the package 6730 .
- FIG. 70 is a diagram for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown in FIG. 1 , which show an example in which a fine structure is used as a carrier.
- (a) and (b) of FIG. 70 are opened-up plan views of fine structures.
- microbeads, cells, nanostructures, or particles may be carried by a carrier.
- the carrier 7010 surrounds microbeads 7014 .
- the carrier 7010 is formed by radiating light onto a fluid in which the microbeads 7014 are dispersed
- the carrier 7010 surrounding the microbeads 7014 can be formed as shown in the drawing. Since the carrier 7010 surrounds the microbeads 7014 , the microbeads 7014 are moved by the movement of the carrier 7010 .
- the position of the carrier 7010 can be easily controlled by a guide 7012 and a rail. As a result, the positions of the microbeads 7014 can be easily controlled.
- a carrier 7020 surrounds microbeads 7024 .
- the carrier 7020 includes an entrance 7026 .
- the entrance 7026 is shaped so that the microbeads 7024 easily enter the carrier 7020 but have difficulty coming out. For example, the microbeads 7024 enter the carrier 7020 through the entrance 7026 , are moved together with the carrier 7020 , and then are discharged from the carrier 7020 .
- FIGS. 71 and 72 are diagrams for explaining an example in which microbeads are carried by a carrier.
- FIGS. 71 and 72 are opened-up plan views of a fluidic channel.
- a carrier 7130 having a guide 7132 is positioned at an end 7122 of a rail 7120 .
- Microbeads 7136 are dispersed in a fluid 7112 .
- the fluid 7112 flows to the left side along the fluidic channel 7110 .
- An entrance 7134 of the carrier 7130 is opened by the fluid 7112 flowing to the left side, and the microbeads 7136 are accumulated in the carrier 7130 .
- FIG. 71 is diagrams for explaining an example in which microbeads are carried by a carrier.
- FIGS. 71 and 72 are opened-up plan views of a fluidic channel.
- a carrier 7130 having a guide 7132 is positioned at an end 7122 of a rail 7120 .
- Microbeads 7136 are
- no microbeads 7136 are dispersed in the fluid 7112 .
- the fluid 7112 flows to the right side along the fluidic channel 7110 .
- the entrance 7134 of the carrier 7130 is closed by the fluid 7112 flowing to the right side, and the microbeads 7136 are moved to the right side together with the carrier 7130 .
- FIG. 73 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown in FIG. 1 , which show an example of a fine structure which can reduce friction with a rail.
- (a) of FIG. 73 is a diagram showing a shape 7340 of light radiated onto a fluidic channel 7310 .
- (b) of FIG. 73 is a diagram showing a fine structure 7330 formed by photocuring a fluid 7312 .
- (c) of FIG. 73 is an opened-up plan view of the fluidic channel 7310 . Referring to FIG. 73 , when light having the shape 7340 shown in (a) of FIG.
- the fine structure 7330 having an opening 7334 passing through the fine structure 7330 shown in (b) of FIG. 73 is formed by photocuring the fluid 7312 .
- the fine structures 7330 have a discontinuous guide 7332 , friction between the guide 7332 and the rail 7320 decreases. Further, the discontinuity of the guide 7332 increases flexibility. When the flexibility of the guide 7332 increases, the fine structure 7330 can pass through a curved rail more easily.
- FIG. 74 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown in FIG. 1 , which show another example of a fine structure which can reduce friction with a rail.
- (a) of FIG. 74 is a diagram showing a shape 7440 of light radiated onto a fluidic channel 7410 .
- (b) of FIG. 74 is an opened-up plan view of the fluidic channel 7410 in which a fine structure formed by photocuring a fluid 7412 is disposed.
- (c) of FIG. 74 is a cross-sectional view of the fluidic channel 7410 of (b) of FIG. 74 , taken along a line AA-AA′. Referring to FIG.
- light provided to the fluidic channel 7410 includes a transparent region 7442 and a semi-transparent region 7444 .
- the semi-transparent region 7444 may be implemented using cross stripes, for example.
- a portion of the fluid 7412 onto which the semi-transparent region 7444 of light is radiated is cured to have a smaller thickness than a portion of the fluid 7412 onto which the transparent region 7442 of light is radiated. Therefore, when the photocuring is performed, a guide 7432 having a small width is formed as shown in (c) of FIG. 74 . Forming the guide 7432 in such a manner reduces friction between the guide 7432 and the rail 7420 . Even when the rail 7420 has a curved shape, the guide 7432 can easily pass through the rail 7420 .
- FIGS. 75 and 76 are diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown in FIG. 1 .
- the fine structure is formed inside the fluidic channel having the rail disposed therein.
- a fine structure having a guide is formed inside a fluidic channel in which no rail is disposed.
- (a) of FIG. 75 is an opened-up plan view of the fluidic channel 7510
- (b) of FIG. 75 is a cross-sectional view of the fluidic channel 7510 of (a) of FIG. 75 , taken along a line X-X′.
- a fluid 7512 is present inside the fluidic channel 7510 and no rail is positioned.
- FIG. 76 is an opened-up plan view of the fluidic channel 7510 .
- (b) of FIG. 76 is a diagram showing an example of the shape 7540 of light provided to the fluidic channel 7510 shown in (a) of FIG. 76 .
- (c) of FIG. 76 is a cross-sectional view of the fluidic channel 7510 of (a) of FIG. 76 , taken along a line X-X′.
- light provided to the fluidic channel 7510 includes a transparent region 7542 and a semi-transparent region 7544 .
- the semi-transparent region 7544 may be implemented using cross stripes, for example.
- the fine structure 7530 is formed by the photocuring, a potion of the fluid 7512 to which the semi-transparent region 7544 of light is provided is cured to have a smaller thickness than a portion of the fluid 7512 to which the transparent region 7542 of light is provided. Therefore, when the light having the transparent region 7542 and the semi-transparent region 7544 is radiated onto the fluidic channel 7510 , the fine structure having a guide 7532 can be formed even through no rail is formed in the fluidic channel 7510 .
- FIGS. 77 to 79 are diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown in FIG. 1 .
- a fine structure having a guide is formed inside a fluidic channel in which no rail is disposed.
- (a) of FIG. 77 is an opened-up plan view of a fluidic channel 7710 .
- (b) of FIG. 77 is a cross-sectional view of the fluidic channel 7710 of (a) of FIG. 77 , taken along a line Y-Y′.
- (c) of FIG. 77 is a cross-sectional view of the fluidic channel 7710 of (a) of FIG. 77 , taken along a line Z-Z′.
- a fluid 7712 is positioned inside the fluidic channel 7710 and no rail is disposed.
- the fluidic channel 7710 includes a first region 7710 A where the internal height is relatively small and a second region 7710 B where the internal height is relatively large.
- (a) of FIG. 78 is an opened-up plan view of the fluidic channel 7710 .
- (b) of FIG. 78 is a diagram showing an example of the shape 7740 A of light provided to the fluidic channel 7710 shown in (a) of FIG. 78 .
- (c) of FIG. 78 is a cross-sectional view of the fluidic channel 7710 of (a) of FIG. 78 , taken along a line Y-Y′.
- FIG. 78 light having the shape 7740 A corresponding to the fine structure 7730 is provided to a first region 7710 A, thereby forming a portion corresponding to a body of the fine structure 7730 . Since the fine structure 7730 is formed in the first region 7710 A, the fine structure 7730 has a thickness corresponding to the internal height of the first region 7710 A.
- FIG. 79 is an opened-up plan view of the fluidic channel 7710 .
- (b) of FIG. 79 is a diagram showing an example of the shape 7740 B of light provided to the fluidic channel 7710 shown in (a) of FIG. 79 .
- FIG. 79 is a cross-sectional view of the fluidic channel 7710 of (a) of FIG. 79 , taken along a line Z-Z′. Referring to FIG. 79 , light having the shape B corresponding to a guide 7732 is provided to the fine structure 7730 moved to the second region 7710 B along the flow of the fluid 7712 , thereby forming a guide 7732 .
- FIGS. 80 and 81 are diagrams for explaining another example of a method of fabricating a fine structure, which show a method for aligning a fine structure with a rail by expanding a guide.
- FIGS. 80 and 81 are opened-up plan views of a fluidic channel 8010 .
- fine structures 8030 A to 8030 C are positioned at ends 8022 A to 8022 C of rails 8020 A to 8020 C. Since the width of guides 8032 A to 8032 C is considerably smaller than that of the rails 8020 A to 8020 C, some guides 8032 A and 8032 B may not be aligned with the rails 8020 A and 8020 B. That is, the guides 8032 A and 8032 B may not be disposed in parallel to the rails 8020 A and 8020 B.
- the guides 8032 A to 8032 C when the guides 8032 A to 8032 C are expanded, the guides 8032 A to 8032 C can be aligned with the rails 8020 A to 8020 C.
- the guides 8032 A to 8032 C may be expanded by various methods.
- the guides 8032 A to 8032 C may be fabricated by photocuring PEG-DA as an example of the fluid 8012 , and a separate fluid 8012 ′ having higher acidity than PEG-DA may be introduced into the fluidic channel 8010 to react with the guides 8032 A to 8032 C.
- the expansion process may be performed on one fine structure or on a one- or two-dimensional array of fine structures.
- FIGS. 82 and 83 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure, which show an example in which a fine structure moves along a plurality of rails.
- a fluid 8212 flows inside a fluidic channel 8210 .
- Two rails 8220 A and 8220 B are positioned inside the fluidic channel 8210 , and a distance between the rails 8220 A and 8220 B changes.
- a fine structure 8230 has a spring shape and is positioned across the two rails 8220 A and 8220 B.
- the fine structure 8230 has two guides 8232 A and 8232 B.
- the fine structure 8230 When the fine structure 8230 is positioned in a region where the distance between the rails 8220 A and 8220 B is relatively large ( FIG. 82 ), the fine structure 8230 extends. When the fine structure 8203 is positioned in a region where the distance between the rails 8220 A and 8220 B is relatively small ( FIG. 83 ), the fine structure 8230 contracts. As such, when the fine structure 8230 is positioned across the plurality of rails 8220 A and 8220 B, the spring-type fine structure 8230 capable of extending and contracting may be applied. As a result, the fine structure 8230 can be moved along the rails 8220 A and 8220 B, regardless of increase or decrease in the distance between the rails 8220 A and 8220 B.
- FIGS. 84 and 85 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure, which show another example in which a fine structure moves along a plurality of rails.
- a fluid 8412 flows inside a fluidic channel 8410 .
- Two rails 8420 A and 8420 B positioned inside the fluidic channel 8410 join to connect to one rail 8420 C.
- the fine structure 8430 is positioned across the two rails 8420 A and 8420 B and has two guides 8432 A and 8432 B.
- the fine structure 8430 is moved along the flow of the fluid 8412 into the one rail 8420 C at a diverging point, and the two guides 8432 A and 8432 B are positioned in one rail 8420 C. In this state, the fine structure 8430 is turned about 90 degrees compared with the state of FIG. 84 . As described above, the fine structure 8430 positioned across the two rails 8420 A and 8420 B can be moved to one rail 8420 C along the flow of the fluid 8412 . At this time, the fine structure 8430 is turned about 90 degrees.
- FIGS. 86 to 89 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown in FIG. 1 , and another embodiment of a method of fabricating a fine structure, which show an example in which a fine structure is erected.
- FIG. 86 is an opened-up plan view of a fluidic channel 8610 .
- (b) of FIG. 86 is an opened-up side view of the fluidic channel 8610 shown in (a) of FIG. 86 .
- (c) of FIG. 86 is a cross-sectional view of the fluidic channel 8610 of (a) of FIG. 86 , taken along a line AB-AB′.
- (d) of FIG. 86 is a cross-sectional view of the fluidic channel 8610 of (a) of FIG. 86 , taken along a line AC-AC′.
- a fluid 8612 flows inside the fluidic channel 8610 .
- the fluidic channel 8610 includes first and second regions 8610 A and 8610 B.
- a groove-shaped rail 8620 is formed in either side of the second region 8610 B, and the internal height of the second region 8610 B is larger than that of the first region 8610 A.
- FIG. 87 is an opened-up plan view of the fluidic channel 8610 .
- (b) of FIG. 87 is an opened-up side view of the fluidic channel 8610 shown in (a) of FIG. 87 .
- a fine structure 8630 moves along the flow of the fluid 8612 in the first region 8610 A of the fluidic channel 8610 .
- the fine structure 8630 is laid inside the rail of the first region 8610 A, and has a guide 8632 positioned at either side surface thereof.
- FIG. 88 is an opened-up plan view of the fluidic channel 8610
- FIG. 88 is an opened-up side view of the fluidic channel 8610 shown in (a) of FIG. 88 .
- FIG. 88 when the fine structure 8630 enters the second region 8610 B of the fluidic channel 8610 , the fine structure 8610 is erected.
- some of the fluid 8612 entering the second region 8610 B from the first region 8610 A flows in the upward direction of the second region 8610 B.
- Such a flow of the fluid 8612 erects the fine structure 8630 .
- the rail 8620 and the guide 8632 serve to set a path of the fine structure 8630 and to rotate the fine structure 8630 .
- FIG. 89 is an opened-up plan view of the fluidic channel 8610
- (b) of FIG. 89 is an opened-up side view of the fluidic channel 8610 shown in (a) of FIG. 89 .
- the flow of the fluid 8612 in the second region 8010 B completely erects the fine structure 8030 .
- the fluidic channel system according to the above-described embodiments can be changed, modified, and remodeled, as will be described below.
- a single light projection apparatus or a plurality of light projection apparatuses may be mounted on the system.
- the light projection apparatus may be mounted to be fixed to the fluidic channel.
- the light projection apparatus may be mounted to move linearly around the fluidic channel or along a two- or three-dimensional path.
- fine structures can be simultaneously produced in different portions of a single fluidic channel or a plurality of fluidic channels.
- the movable light projection apparatus it is possible to produce a fine structure having an arbitrary shape in an arbitrary portion inside the fluidic channel. Further, when a movable light projection apparatus is used, it is possible to produce a fine structure having a three-dimensional shape, which cannot be produced by a fixed light projection apparatus.
- the system can produce a fine structure having a variety of physical, electrical, or chemical properties by adjusting the intensity or wavelength of light radiated from the light projection apparatus. Further, when a mixture of different photocurable fluids flows inside the fluidic channel or different photocurable fluids flow while forming an interface, the system adjusts the wavelength of light radiated from the light projection apparatus temporally or spatially, so that different photocuring reactions are sequentially performed inside the fluidic channel. Then, a fine structure of which each portion has a different property may be formed.
- the rail can be configured to be suitable for moving, arranging, or coupling the fine structure, in consideration of various characteristics of a photocurable material and the fine structure produced from the photocurable material.
- a rail is configured in such a manner that the fine structure produced through a predetermined path can physically move via the path. If necessary, the fine structure may be configured to be arranged based on the path or to be coupled based on the path or arrangement. Such a rail can move, arrange, or couple the fine structure, without forming a specific portion in the fine structure.
- a rail forms a predetermined path
- a fine structure includes a portion having a predetermined shape, and the rail is configured to physically move the fine structure to the path by using the portion.
- the fine structure may be configured to be arranged based on the path or the shape of the portion, or to be coupled based on the path or arrangement.
- a rail forms a predetermined path, and a chemical, electrical, or magnetic attractive force or a chemical, electrical, or magnetic repulsive force is generated depending on the chemical, electrical, or magnetic property of a produced fine structure. Then, the fine structure can be moved to the path by the attractive or repulsive force.
- the fine structure may be configured to be arranged based on the path or the shape of the portion, or to be coupled based on the path or arrangement.
- a fluidic channel system using electromagnetic wave curing, unlike the embodiments of the fluidic system using photocuring. That is, it is possible to configure a fluidic channel system in which the light projection apparatus is replaced with an electron beam generator, the photocurable fluid is replaced with an electromagnetic wave curable fluid, and a proper processor is used.
- the electromagnetic wave curable fluid may be acryl, methylmethacrylate (MMA), stylen, PEG or the like. Further, according to some embodiments, it is possible to configure a fluidic channel system using electric curing.
- a fluidic channel system to which the above-described various embodiments are applied and in which the light projection apparatus is replaced with an electric energy generator, the photocurable fluid is replaced with an electrically curable fluid, and a proper processor is used.
- the electrically curable fluid may be MMA or stylen which is polymerized in an electrochemical reaction such as oxidization or reduction at an electrode.
- it is possible to configure a fluidic channel system using thermal curing That is, it is possible to configure a fluidic channel system to which the above-described various embodiments are applied and in which the light projection apparatus is replaced with a heat energy source, the photocurable fluid is replaced with thermally curable fluid, and a proper processor is used.
- the thermally curable fluid may be acryl, MMA, stylen, PEG, or the like. Further, according to some embodiments, it is possible to configure a fluidic channel system using magnetic curing. That is, it is possible to a fluidic channel system to which the above-described various embodiments are applied and in which the light projection apparatus is replaced with a magnetic energy generator, the photocurable fluid is replaced with magnetically curable fluid, and a proper processor is used.
- the magnetically curable fluid may be a mixture of magnetic particles and a thermally curable material. When the mixture reacts with a magnetic field, the magnetic particles are heated by an induced electromotive force to polymerize the thermally curable material therearound. Therefore, the mixture can be used as the magnetically curable fluid.
- a fluidic channel system using particle energy curing. That is, it is possible to configure a fluidic channel system to which the above-described various embodiments are applied and in which the light projection apparatus is replaced with a particle energy generator, the photocurable fluid is replaced with particle energy curable fluid, and a proper process is used.
- the particle energy curable fluid may be acryl, MMA, stylen, PEG, or the like.
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Abstract
A fluidic channel system is provided. The fluidic channel system includes a light projection apparatus, a fluidic channel, and a rail. The light projection apparatus provides light. A photocurable fluid, which is selectively cured by the light, flows inside the fluidic channel. A fine structure which is to be formed by curing the photocurable fluid moves along the rail.
Description
- The present application is a Divisional Application of co-pending U.S. patent application Ser. No. 12/681,698 (filed on Apr. 5, 2010) under 35 U.S.C. §120, which is a National Stage Patent Application of PCT International Patent Application No. PCT/KR2008/005787 (filed on Oct. 1, 2008) under 35 U.S.C. §371, which claims priority to Korean Patent Application Nos. 10-2007-0100472 (filed on Oct. 5, 2007), 10-2008-0075302 (filed on Jul. 31, 2008), and 10-2008-0075190 (filed on Jul. 31, 2008), which are all hereby incorporated by reference in their entirety.
- The described technology relates generally to a fluidic channel system and a method for fabricating a fine structure.
- Fine structures such as microstructures and nanostructures have applications in various fields such as photonic materials, micro-electromechanical systems (MEMS), biomaterials, self-assembly, etc. Recently, as an example of a technique for producing such fine structures, a continuous-flow lithography technique was proposed (D. Dendukuri, D. Pregibon, J. Collins, T. Hatton and P. Doyle, “Continuous-Flow Lithography for High-Throughput Microparticle Synthesis”, Nature Materials, vol. 5, pp. 365-369, 2006; US Patent Publication No. 2007-0105972, “Microstructure Synthesis by Flow Lithography and Polymerization). In the continuous-flow lithography technique, a photocurable fluid flowing in a microfluidic channel is exposed to a predetermined shape of light such that the photocurable liquid is selectively cured, thereby continuously producing a variety of free-floating microstructures.
- In one embodiment, a fluidic channel system includes a light projection apparatus, a fluidic channel, and a rail. The light projection apparatus provides light. A photocurable fluid, which is selectively cured by the light, flows inside the fluidic channel. A fine structure which is to be formed by curing the photocurable fluid moves along the rail.
- In another embodiment, a fluidic channel system includes a fluidic channel, a fine structure, and a rail. The fine structure is positioned inside the fluidic channel. The fine structure moves along the rail.
- In still another embodiment, a method for fabricating a fine structure includes providing a photocurable fluid to a fluidic channel having a rail along which a fine structure can move. Further, the method includes producing a fine structure by irradiating the photocurable fluid with light such that the photocurable fluid is selectively cured. Further, the method includes moving the fine structure along the rail.
- In yet another embodiment, a method for conveying a fine structure includes providing a fluid to a fluidic channel having a rail along which a fine structure can move. Further, the method includes moving the fine structure having a guide along the rail. The guide prevents the fine structure from coming off of the rail.
- The above and other objects, features and advantages of the present disclosure will become more apparent to those of ordinary skill in the art by describing in detail embodiments thereof with reference to the attached drawings, in which:
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FIGS. 1 and 4 are diagrams for explaining a fluidic channel system according to one embodiment; -
FIG. 2 is diagrams for explaining that afine structure 130 flows in a different direction from a flow direction of afluid 112 in the fluidic channel system shown inFIG. 1 ; -
FIG. 3 is diagrams showing a process of fabricating afluidic channel 110 shown inFIG. 1 ; -
FIG. 5 is diagrams for explaining a modified embodiment of a rail adopted in the fluidic channel system shown inFIG. 1 ; -
FIGS. 6 to 11 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and one embodiment of a method of fabricating a fine structure, which show an example in which the width of a rail is changed such that a fine structure can be easily moved along the rail; -
FIGS. 12 to 17 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure, which show an example in which a fine structure passes through an interface between fluids; -
FIGS. 18 to 21 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure, which show another example in which a fine structure passes through an interface between fluids; -
FIGS. 22 to 25 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure, which show an example in which a one-dimensional array of fine structures is formed at an end of a rail; -
FIGS. 26 to 28 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure, which show another example in which a one-dimensional array of fine structures is formed at an end of a rail; -
FIGS. 29 to 32 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure, which show an example in which a two-dimensional array of fine structures is formed at ends of rails; -
FIGS. 33 to 40 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure, which show another example in which a two-dimensional array of fine structures is formed at ends of rails; -
FIGS. 41 to 47 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure, which show still another example in which a two-dimensional array of fine structures is formed at ends of rails; -
FIGS. 48 to 50 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure, which show still another example in which a two-dimensional array of fine structures is formed at ends of rails; -
FIGS. 51 to 53 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and an example of a method for conveying a fine structure, which show an example in which the movement direction of a fine structure is determined in accordance with the position of a guide; -
FIGS. 54 and 55 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , which show an example of an entrance portion of a rail; -
FIGS. 56 to 60 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , which show an example in which a magnetic field is applied to a fluidic channel; -
FIG. 61 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown inFIG. 1 , which show an example in which the fine structure includes a latch; -
FIG. 62 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown inFIG. 1 , which show an example in which the fine structure includes a spacer; -
FIG. 63 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown inFIG. 1 , which show an example in which the guide includes a wedge-shaped end; -
FIGS. 64 and 65 are diagrams for explaining the function of the wedge-shaped end of the guide according to one embodiment; -
FIG. 66 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown inFIG. 1 , which show an example in which a fine structure is used as a package of a microchip. -
FIGS. 67 to 69 are diagrams for explaining an example of a method for fabricating a package; -
FIG. 70 is a diagram for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown inFIG. 1 , which show an example in which a fine structure is used as a carrier; -
FIGS. 71 and 72 are diagrams for explaining an example in which microbeads are carried by a carrier; -
FIGS. 73 and 74 are diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown inFIG. 1 , which show an example of a fine structure which can reduce friction with a rail; -
FIGS. 75 and 76 are diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown inFIG. 1 , which show an example in which a fine structure having a guide is formed inside a fluidic channel in which no rail is disposed; -
FIGS. 77 to 79 are diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown inFIG. 1 , which show another example in which a fine structure having a guide is formed inside a fluidic channel in which no rail is disposed; -
FIGS. 80 and 81 are diagrams for explaining another example of a method of fabricating a fine structure, which show a method for aligning a fine structure with a rail by expanding a guide; -
FIGS. 82 to 85 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure, which show an example in which a fine structure moves along a plurality of rails; and -
FIGS. 86 to 89 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure, which show an example in which a fine structure is erected. - It will be readily understood that the components of the present disclosure, as generally described and illustrated in the Figures herein, could be arranged and designed in a wide variety of different configurations. Thus, the following more detailed description of the embodiments of apparatus and methods in accordance with the present disclosure, as represented in the Figures, is not intended to limit the scope of the disclosure, as claimed, but is merely representative of certain examples of embodiments in accordance with the disclosure. The presently described embodiments will be best understood by reference to the drawings, wherein like parts are designated by like numerals throughout. Moreover, the drawings are not necessarily to scale, and the size and relative sizes of the layers and regions may have been exaggerated for clarity. It will also be understood that when an element or layer is referred to as being “on,” another element or layer, the element or layer may be directly on the other element or layer or intervening elements or layers may be present. As used herein, the term “and/or” may include any and all combinations of one or more of the associated listed items.
- When a continuous flow lithography technique is used to form a fine structure, microstructures having various shapes, sizes, and chemical compositions can be produced quickly and easily. In the conventional continuous flow lithography technique, however, it is difficult to control the shapes and positions of the produced microstructures in real time. For example, in the continuous flow lithography technique proposed in the above-mentioned patent documents, the position of the fabricated microstructure along the axis of fluid flow can be controlled by the fluid flow, but the position of the microstructure perpendicular to the fluid flow cannot be controlled.
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FIG. 1 is diagrams for explaining a fluidic channel system according to one embodiment. - (a) of
FIG. 1 is a perspective view of the fluidic channel system, (h) ofFIG. 1 is a perspective view of afine structure 130, (c) ofFIG. 1 is an opened-up plan view of afluidic channel 110, and (d) ofFIG. 1 is a diagram showing ashape 150 of light provided to thefluidic channel 110. Referring toFIG. 1 , the fluidic channel system includes afluid channel 110, arail 120, afine structure 130, and alight projection apparatus 140. - As a material of the fluidic channel 100, a variety of materials or mixtures may be used. For example, the fluidic channel 100 may be formed of poly-dimethyl siloxane (PDMS) or glass. Inside the fluidic channel 100, a fluid 112 exists. The fluid 112 may be used for conveying the
fine structure 130. In an example, the fluid 112 may be a liquid, liquid solution, liquid mixture, or supercritical fluid. In another example, the fluid 112 may be powder or particles which do not have a predetermined shape as a whole. In still another example, when there is relatively little need to have a force for conveying a fine structure, the fluid 112 may be a gas. In still another example, the fluid 112 may be a photocurable fluid. In this case, the fluid 112 may be used for producing and conveying thefine structure 130. The production of thefine structure 130 may be performed by radiating light onto the fluid 112 such that the fluid 112 is selectively cured. As the photocurable fluid, a mixture of polyethylene glycol (400) diacrylate (PEG-DA of Sigma Aldrich Co.) and a known photoinitiator may be used. Alternatively, other known materials or mixtures cured by radiating visible rays, infrared rays, or ultraviolet rays may be used. The fluid 112 may include cells, nanostructures, or particles dispersed therein. In this case, thefine structure 130 obtained by curing the fluid 112 includes cells, nanostructures, or particles. - The
rail 120 along which thefine structure 130 can move is positioned inside thefluidic channel 110. (a) ofFIG. 1 shows that therail 120 is positioned on one surface of thefluidic channel 110, is formed in a groove shape, and has a rectangular cross-section. However, the position, shape, and cross-sectional shape of therail 120 are not limited thereto and various other positions and shape are possible. As thefine structure 130 moves along therail 120, it may move in a different direction from the flow direction of the fluid 112 flowing in thefluidic channel 110, depending on the position and the shape of therail 120. This does not mean that thefine structure 130 always moves in a different direction from the flow direction of the fluid 112, but that thefine structure 130 may move in a different direction from the flow direction of the fluid 112 in at least a region of thefluidic channel 110. Further, this does not mean that the movement of thefine structure 130 is determined regardless of the flow of the fluid 112, but that the movement of thefine structure 130 is determined by the disposition of therail 120 as well as the flow of thefluid 112. As thefine structure 130 moves along therail 120, it is possible to prevent thefine structure 130 from diffusing. When thefine structure 130 does not move along therail 120, it may diffuse in a perpendicular direction (+X or −X direction) to the flow direction (+Y or −Y direction) of thefluid 112. Since therail 120 limits the position of thefine structure 130 in the perpendicular direction (+X or −X direction), the diffusion of thefine structure 130 is prevented. - The
fine structure 130 is positioned inside thefluidic channel 110. For example, thefine structure 130 may be a microstructure or nanostructure. The microstructure is a structure of which at least one of length, width, and height is equal to or more than 1 μm and less than 1 mm, or a structure corresponding thereto. The nanostructure is a structure of which at least one of length, width, and height is equal to or more than 1 nm and less than 1 μm, or a structure corresponding thereto. - According to one embodiment, the
fine structure 130 may be produced by photocuring thefluid 112. In this case, aguide 132 may be produced at the same time as thefine structure 130. That is, light may be provided to thefluidic channel 110 having therail 120 positioned therein, thereby producing thefine structure 130 having theguide 132 provided thereon. Theguide 132 may have a shape corresponding to therail 120. For example, when therail 120 has a groove shape, theguide 132 may have a protrusion shape. Alternatively, when therail 120 has a protrusion shape, theguide 132 may have a groove shape. Further, when therail 120 has a rectangular cross-section, theguide 132 also has a rectangular cross-section. When therail 120 has a triangular cross-section, theguide 132 also has a triangular cross-section. When therail 120 has a semi-circular cross-section, theguide 132 also has a semi-circular cross-section. - According to another embodiment, the
fine structure 130 having theguide 132 provided thereon may be injected into thefluidic channel 110 from the outside of thefluidic channel 110. In this case, the fluidic channel system may not include thelight projection apparatus 140. In an example, thefine structure 130 having theguide 132 provided thereon may be produced in a separate fluidic channel to be delivered to thefluidic channel 110 shown inFIG. 1 . At this time, thefine structure 130 produced in a separate fluidic channel may be put into a container such as a beaker and then delivered to thefluidic channel 110 shown inFIG. 1 . In this case, when thefine structure 130 is produced in a separate fluidic channel, thefine structure 130 may be fabricated in such a manner that theguide 132 is positioned on or under thefine structure 130. However, when thefine structure 130 is delivered to thefluidic channel 110 shown inFIG. 1 through the container, thefine structure 130 may be turned over. As a result, theguide 132 may be positioned at the top side or the bottom side of thefine structure 130. In this case, a separate technique may be required, which can extract theguide 132 positioned at either one of the top side and the bottom side of thefine structure 130. Such a technique will be described below separately. - According to other embodiments, the
fine structure 130 having theguide 132 may be produced by methods other than photocuring of the fluid. In one example, silicon may be patterned to produce thefine structure 130 having theguide 132 provided thereon. In this case, both theguide 132 and thefine structure 130 are formed of silicon. In another example, a separate material (for example, photoresist) other than silicon may be deposited on silicon that is used as thefine structure 130 and the separate material is patterned to form theguide 132. - The
guide 132 provided on thefine structure 130 prevents thefine structure 130 from coming off of therail 120. In the drawing, theguide 132 is positioned on one surface of thefine structure 130, is formed in a protrusion shape, and has a rectangular cross-section. However, the position, shape, and cross-sectional shape of theguide 132 are not limited thereto. - The
light projection apparatus 140 provides light to thefluidic channel 110. The light may be provided by thelight projection apparatus 140 in various ways. In one example, thelight projection apparatus 140 may provide light having ashape 150 shown in (d) ofFIG. 1 to thefluidic channel 110 by using a photomask or spatial light modulator. In another example, thelight projection apparatus 140 may provide light to thefluidic channel 110 through scanning In this case, while the fluid 112 flows, the light may be provided to thefluid 112. In still another example, while light is provided to the fluid, the flow of the fluid may be stopped, and while light is not provided to the fluid, the fluid may flow. In order for the light provided by thelight projection apparatus 140 to reach the fluid 112, at least a region of thefluidic channel 110 may be transparent. -
FIG. 2 is diagrams for explaining a movement direction of thefine structure 130 and a flow direction of the fluid 112 in the fluidic channel system shown inFIG. 1 . (a) to (c) ofFIG. 2 are opened-up plan views of the fluidic channel system. Referring to (a) ofFIG. 2 , amovement direction 210 of thefine structure 130 is different from aflow direction 212 of the fluid 112, and there is anangle difference 214 between themovement direction 210 of thefine structure 130 and theflow direction 212 of thefluid 112. Further, referring to (b) ofFIG. 2 , amovement direction 220 of thefine structure 130 is different from aflow direction 222 of the fluid 112, and there is anangle difference 224 between themovement direction 220 of thefine structure 130 and theflow direction 222 of the fluid 122. Referring to (c) ofFIG. 2 , amovement direction 230 of thefine structure 130 substantially coincides with aflow direction 230 of thefluid 112. - As shown in
FIG. 2 , therail 120 may be formed in a sine wave shape to be disposed in the fluidic channel system. When therail 120 is not provided, a position of thefine structure 130 in a parallel direction (+Y or −Y direction) to the flow direction (+Y or −Y direction) of the fluid 112 can be controlled by the flow of the fluid. However, a position of thefine structure 130 in a perpendicular direction (+X or −X direction) to the flow direction of the fluid 112 cannot be controlled by the flow of thefluid 112. Further, thefine structure 130 may diffuse in the perpendicular direction (+X or −X direction). Therefore, as the fluidic channel system is provided with therail 120, thefine structure 130 can be prevented from diffusing in the perpendicular direction (+X or −X direction), and the position of thefine structure 130 in the perpendicular direction (+X or −X direction) can be accurately controlled. -
FIG. 3 is diagrams showing a process of fabricating thefluidic channel 110 shown inFIG. 1 . In (a) ofFIG. 3 , asilicon substrate 310 is prepared. In (b) ofFIG. 3 ,photoresist 320 is applied onto thesilicon substrate 310. Thephotoresist 320 may be SU-8 photoresist, for example. In (c) and (d) ofFIG. 3 , thephotoresist 320 is patterned to form amain channel layer 325. The patterning of thephororesist 320 includes a step ((c) ofFIG. 3 ) of aligning aphotomask 330 and exposing thephotoresist 320, and a step ((d) ofFIG. 3 ) of developing thephotoresist 320. In (e) ofFIG. 3 ,additional photoresist 320′ is applied onto thesilicon substrate 310 and themain channel layer 325. In (f) and (g) ofFIG. 3 , theadditional photoresist 320′ is patterned to form arail layer 325′. The patterning of theadditional photoresist 320′ includes a step ((f) ofFIG. 3 ) of aligning anadditional photomask 330′ and exposing thephotoresist 320′, and a step ((g) ofFIG. 3 ) of developing theadditional photoresist 320′. In (h) ofFIG. 3 , thesilicon substrate 310 having themain channel layer 325 and therail layer 325′ formed thereon is put into analuminum container 350, and uncured thermosetting polymer, for example,uncured PDMS 340 is introduced onto thesilicon substrate 310. In (i) ofFIG. 3 , theuncured PDMS 340 is converted into the curedPDMS 360. To cure the PDMS, thealuminum container 350 is disposed on a hot plate and maintained at a temperature of about 150° C. for a proper time, for example, about ten minutes. As such, the curedPDMS 360 is obtained by the 2 layer mold fabricating process described with reference to (a) to (i) ofFIG. 3 . - In (j) of
FIG. 3 , aglass substrate 380 coated withPDMS 370 is prepared separately from the above-described process ((a) to (i) ofFIG. 3 ). In (k) ofFIG. 3 , the curedPDMS 360 obtained by the process of (a) to (i) ofFIG. 3 is coupled to thePDMS 370 applied onto theglass substrate 380, thereby forming thefluidic channel 110 having therail 120 provided thereon. Thefluidic channel 110 includes thePDMS glass substrate 380. - According to another embodiment, the step (shown in (d) of
FIG. 3 ) of developing thephotoresist 320 may be omitted. That is, after thephotoresist 320 is applied and exposed, theadditional photoresist 320′ is applied and exposed. Then, thephotoresist 320 and theadditional photoresist 320′ may be simultaneously developed to form themain channel layer 325 and therail layer 325′. - According to still another embodiment, various other types of containers may be used instead of the
aluminum container 350 shown in (h) and (i) ofFIG. 3 . For example, a glass Petri dish may be used. - According to some embodiments, as shown in
FIG. 4 , the fluidic channel system may further include acamera 410, aprocessor 420, ademagnification lens 430, abeam splitter 440, and anilluminator 450, in addition to thefluidic channel 110, therail 120, thefine structure 130, and thelight projection apparatus 140 shown inFIG. 1 . Referring toFIG. 4 , thecamera 410 photographs thefluidic channel 110. Thecamera 410 may include animage lens 412 and an image sensor 414. Theimage lens 412 receives light from thebeam splitter 440, and then delivers the received light to the image sensor 414 such that an image can be formed in the image sensor 414. The image sensor 414 generates an electrical signal corresponding to the incident light. To determine the shape of light provided by thelight projection apparatus 140 based on the image photographed by thecamera 410, the electrical signal output from thecamera 410 may be provided to theprocessor 420. - The
processor 420 determines the shape of light and thelight projection apparatus 140 provide thebeam splitter 440 with the light having the shape. When the shape of the light provided by thelight projection apparatus 140 is determined based on the image photographed by thecamera 410, theprocessor 420 determines the shape of light based on the electrical signal output from thecamera 410. In an example, when a package is formed by radiating light onto a chip (not shown) injected into thefluidic channel 110, theprocessor 420 may determines a proper shape of the light based on an image of the chip delivered from thecamera 410. In another example, when additional light needs to be radiated onto a fine structure produced by light provided from thelight projection apparatus 140, theprocessor 420 may determine a proper shape of light according to an image of a fine structure delivered from thecamera 410. Theprocessor 420 may be, for example, a personal computer (PC) or notebook computer. In still another example, when the shape of light provided by thelight projection apparatus 140 does not change with time, that is for example, when thelight projection apparatus 140 uses a predetermined photomask, theprocessor 420 may be omitted. - The
demagnification lens 430 demagnifies light provided from thelight projection apparatus 140, and then provides the light to thefluidic channel 110. As examples of thedemagnification lens 430, a 10×, 20×, or 60× objective lens may be used. - The
beam splitter 440 delivers the light provided from thelight projection apparatus 140 to thefluidic channel 110 through thedemagnification lens 430. Further, thebeam splitter 440 delivers to thecamera 410 an image delivered from thefluidic channel 110 through thedemagnification lens 430. For example thebeam splitter 440 may be a half mirror. - The
illuminator 450 provides illumination such that thecamera 410 can secure an image of thefluidic channel 110. Since a cured fine structure and an uncured fluid have a small difference in refractive index, off-axis illumination may be used so that the cured fine structure can be seen more clearly. - The
light projection apparatus 140 includes alight source 142 and a spatial light modulator 144. Thelight source 142 may be, for example, an ultraviolet light source, visible light source, or infrared light source. Thelight source 142 may include, for example, an ultravioletlight source collimator 146 and an ultraviolet filter 148. The ultravioletlight source collimator 146 serves to output parallel ultraviolet light. The ultravioletlight source collimator 146 may include, for example, a 200W UV lamp (not shown) and a fiber-based light guide system (not shown). The ultraviolet filter 148 serves to select ultraviolet light from light provided from the ultravioletlight source collimator 146 and then provide the selected ultraviolet light to the spatial light modulator 144. The spatial light modulator 144 serves to modulate the light provided from thelight source 142 in accordance with a signal provided from theprocessor 420. The spatial light modulator 144 may be, in an example, a digital micromirror array manufactured in a two-dimensional array type, as shown inFIG. 4 . Alternatively, the spatial light modulator 144 may be manufactured in a one-dimensional array type, or may be manufactured using a liquid crystal display (LCD) or the like instead of the micromirror array. As described above, thelight projection apparatus 140 may be implemented in various other ways not shown in the drawing. -
FIG. 5 is a diagram for explaining modified embodiments of the rail adopted in the fluidic channel system shown inFIG. 1 . (a) to (i) ofFIG. 5 are cross-sectional views of fluidic channels having a fine structure positioned therein. Referring to (a) ofFIG. 5 , cross-sections of arail 510 and aguide 512 have triangular shapes. Referring to (b) ofFIG. 5 , cross-sections of arail 520 and aguide 522 have semi-circular shapes. Referring to (c) ofFIG. 5 , a cross-section of arail 530 has a protrusion shape, and a cross-section of aguide 532 has a groove shape. Referring to (d) ofFIG. 5 , rails 540 are respectively formed on two surfaces of afluidic channel 544 facing each other. Further, guides 542 are respectively positioned facing each other inside therails 540 formed on two surfaces of thefluidic channel 544. Referring to (e) ofFIG. 5 , arail 550 is positioned inside afluidic channel 554 so as not to come in contact with an inner surface of thefluidic channel 554. Therail 550 has a bar shape connected along thefluidic channel 554. Further, aguide 552 having a hole shape is formed inside afine structure 556. - Referring to (f) of
FIG. 5 , arail 560 is provided inside afluidic channel 564, but afine structure 566 does not have a protrusion, groove, or hole. Therefore, it looks like thefine structure 566 does not have a portion which is to be named as a guide. However, since thefine structure 566 does not come off of therail 560 because of its shape, it can be understood that thefine structure 566 itself functions as a guide. Further, since thefine structure 566 does not come off of therail 560 because of the lower portion of thefine structure 566, it can be understood that the lower portion of thefine structure 566 corresponds to a guide. - Referring to (g) of
FIG. 5 , the width of a protrusion-shapedguide 572 increases toward the outside of afluidic channel 574, and the width of a groove-shape rail 570 increases toward the outside of thefluidic channel 574. Referring to (h) ofFIG. 5 , the width of a groove-shapedguide 582 decreases toward the outside of afluidic channel 584, and the width of a protrusion-shapedrail 580 decreases toward the outside of thefluidic channel 584. Since theguide rail FIG. 5 , it is possible to prevent thefine structure fluidic channel FIG. 5 show an example in which the widths of theguide rail guide rail FIG. 5 . Such examples are illustrated in (i) and (j) ofFIG. 5 . Referring to (i) ofFIG. 5 , twofine structures fluidic channel 574A. The firstfine structure 576A moves along arail 570A positioned at an upper surface of thefluidic channel 574A, and the secondfine structure 576B moves along arail 570B positioned at a lower surface of thefluidic channel 574A. Thefine structure guide rail fluidic channel 574A. Therefore, although the internal height of thefluidic channel 574A is larger than the sum of the thickness of thefine structure guide fine structure rail fine structures fluidic channel 574A. Further, four rails may be formed at four surfaces of thefluidic channel 574A such that four fine structures can be moved along the four rails formed at the upper and lower and left and right surfaces of thefluidic channel 574A, respectively. Referring to (j) ofFIG. 5 , afine structure 586A has aguide 582A recessed in a T shape, and arail 580A protruding in a T shape is positioned inside afluidic channel 584A. Therefore, although the internal height of thefluidic channel 584A is larger than the sum of the thickness of thefine structure 586A and the height of theguide 582A, thefine structure 586A moves along therail 580A without coming off. - Although the guide serves to prevent the fine structure from coming off of the rail, the cross-sectional shape of the guide does not necessarily have to coincide with that of the rail. In one example, even when the rail has a triangular cross-section, the guide may have a rectangular or semi-circular cross-section. In another example, even when the rail has a rectangular cross-section, the guide may have a triangular or semi-circular cross-section. In still another example, even when the rail has a semi-circular cross-section, the guide may have a triangular or rectangular cross-section. (k) of
FIG. 5 shows an example in which the cross-sectional shape of the guide does not coincide with that of the rail. Referring to (k) ofFIG. 5 , while therail 590 has a rectangular cross-section, theguide 592 has a semi-circular cross-section. In this case, afine structure 596 having theguide 592 provided thereon moves along but does not come off of therail 590. -
FIGS. 6 to 11 are diagrams for explaining one embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and one embodiment of a method of fabricating a fine structure. In particular,FIGS. 6 to 11 show examples in which the width of a rail is changed such that a fine structure can be easily moved along the rail. (a) of each ofFIGS. 6 to 11 is an opened-up plan view of a fluidic channel, and (b) of each ofFIGS. 6 to 11 is a cross-sectional view of the fluidic channel, taken along the dashed line of (a) of each ofFIGS. 6 to 11 . - Referring to
FIG. 6 , aphotocurable fluid 612 flows through afluidic channel 610 having a groove-shapedrail 620 mounted therein, and the width W1 of therail 620 in a region where a fine structure is produced is set to be smaller than the width W2 of therail 620 in a region where the fine structure moves. Referring toFIG. 7 , light is radiated onto thephotocurable fluid 612 to form afine structure 630 having a protrusion-shapedguide 632. The width W3 of theguide 632 formed in such a manner is slightly smaller than the width W1 of the rail. Referring toFIG. 8 , thefine structure 630 is moved along therail 620 into the region having a relatively large width W2 by the flow of thephotocurable fluid 612. When therail 620 is not too tight for theguide 632, the movement of thefine structure 630 is not hindered by friction between theguide 632 and therail 620. In particular, when theguide 632 has a large length and therail 620 is curved, thefine structure 630 may not be moved at all. In this case, when the width W2 of therail 620 in the region where thefine structure 630 moves is larger than the width W1 of therail 620 in the region where thefine structure 630 is produced, such a phenomenon can be prevented. When the width W2 of therail 620 in the region where thefine structure 630 moves is larger than the width W1 of therail 620 in the region where thefine structure 630 is produced, it does not necessarily mean that the width W2 of therail 620 in the entire region where thefine structure 630 moves is larger than the width W1 of therail 620 in the region where thefine structure 630 is produced, but that the width W2 of therail 620 in a portion of the region where thefine structure 630 moves is larger than the width W1 of therail 620 in the region where thefine structure 630 is produced. For example, the width of therail 620 in a curved portion of the region where thefine structure 630 moves may be larger than that in the region where thefine structure 630 is produced. - Referring to
FIG. 9 , aphotocurable fluid 912 flows through afluidic channel 910 having a protrusion-shapedrail 920 mounted thereon, and the width W4 of therail 920 in a region where a fine structure is produced is set to be larger than the width W5 of therail 920 in a region where the fine structure moves. Referring toFIG. 10 , light is radiated onto thephotocurable fluid 912 to form afine structure 930 having a groove-shapedguide 932. Theguide 932 formed in such a manner has a slightly larger width W6 than the width W4 of the rail. Referring toFIG. 11 , thefine structure 930 is moved along therail 920 into the region having a relatively small width W5 by the flow of thephotocurable fluid 912. When therail 920 is not too tight for theguide 932, thefine structure 930 moves smoothly. When the width W5 of therail 920 in the region where thefine structure 930 moves is smaller than the width W4 of therail 920 in the region where thefine structure 930 is produced, it does not necessarily mean that the width W5 of therail 920 in the entire region where thefine structure 930 moves is smaller than the width W4 of therail 920 in the region where thefine structure 930 is produced, but that the width W5 of therail 920 in a portion of the region where thefine structure 930 moves is smaller than the width W4 of therail 920 in the region where thefine structure 930 is produced. For example, the width of therail 920 in a curved portion of the region where thefine structure 930 moves may be smaller than that in the region where thefine structure 930 is produced. - As described above, in order to increase the distance between the
guide rail rail fine structure fine structure fine structure rail 550 shown in (e) ofFIG. 5 in a region where thefine structure 556 moves may be set to be smaller than that in a region where thefine structure 556 is produced. Then, thefine structure 556 can move more easily. -
FIGS. 12 to 17 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure. In particular,FIGS. 12 to 17 show an example in which a fine structure passes through an interface between fluids. (a) of each ofFIGS. 12 to 17 is an opened-up plan view of a fluidic channel, and (b) of each ofFIGS. 12 to 17 is a cross-sectional view of the fluidic channel, taken along the dashed line of (a) of each ofFIGS. 12 to 17 . - Referring to
FIG. 12 , two different kinds of first andsecond fluids fluidic channel 1210, and aninterface 1214 is formed between thefluids first fluid 1212A is introduced into athird passage 1216C positioned in thefluidic channel 1210 through afirst passage 1216A positioned in thefluidic channel 1210, and thesecond fluid 1212B is introduced into thethird passage 1216C through asecond passage 1216B positioned in thefluidic channel 1210. Arail 1220 is formed to intersect theinterface 1214. The first andsecond fluids fluids fluids fluids fluids FIG. 13 , light is radiated onto thefirst fluid 1212A to form afine structure 1230 having aguide 1232 provided thereon. Since thefine structure 1230 is formed by curing thefirst fluid 1212A, thefine structure 1230 includes afirst polymer 1230A formed by curing thefirst fluid 1212A. Referring toFIG. 14 , since thefine structure 1230 moves along arail 1220, thefine structure 1230 moves from thefirst fluid 1212A through theinterface 1214 to thesecond fluid 1212B. If therail 1220 is not provided, the producedfine structure 1230 will move along thefirst fluid 1212A. In this embodiment, since therail 1220 and theguide 1232 are provided to intersect theinterface 1214, thefine structure 1230 can move from thefirst fluid 1212A through theinterface 1214 between the first andsecond fluids second fluid 1212B. Referring toFIG. 15 , light is radiated onto thesecond fluid 1212B to form asecond polymer 1230B. Then, thefine structure 1230 includes thefirst polymer 1230A and thesecond polymer 1230B formed by curing thesecond fluid 1212B. Referring toFIG. 16 , as thefine structure 1230 moves along therail 1220, thefine structure 1230 moves from thesecond fluid 1212B through theinterface 1214 to thefirst fluid 1212A. Referring toFIG. 17 , light is radiated onto thefirst fluid 1212A to form athird polymer 1230C. Then, thefine structure 1230 includes thefirst polymer 1230A, thesecond polymer 1230B, and thethird polymer 1230C formed by curing thefirst fluid 1212A. - As shown in the drawings, when the
fluidic channel 1210 having therail 1220 disposed therein is used, thefine structure 1230 can be controlled to pass through theinterface 1214 between thefluids fluidic channel 1210 having therail 1220 disposed therein is used, it is possible to form thefine structure 1230 composed ofdifferent materials -
FIGS. 18 to 21 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure. In particular,FIGS. 18 to 21 show another example in which a fine structure passes through an interface between fluids.FIGS. 18 to 21 are opened-up plan views of a fluidic channel. - Referring to
FIG. 18 , afirst fluid 1812A flows along afirst passage 1816A positioned inside afluidic channel 1810, asecond fluid 1812B flows along asecond passage 1816B positioned inside thefluidic channel 1810, and athird fluid 1812C flows along athird passage 1816C positioned inside thefluidic channel 1810. Afirst interface 1814A is formed between the first andsecond fluids second interface 1814B is formed between the first andthird fluids fluids 1812A to 1812C are photocurable, but some or all of thefluids 1812A to 1812C may not be photocurable. Asecond rail 1820B intersects thefirst interface 1814A to join afirst rail 1820A, and athird rail 1820C intersects thesecond interface 1814B to join thefirst rail 1820A. - Referring to
FIG. 19 , light is radiated to form first to thirdfine structures 1830A to 1830C having a guide provided thereon. The firstfine structure 1830A, the secondfine structure 1830B, and the thirdfine structure 1830C are formed by curing the first photocurable fluid 1812A, the secondphotocurable fluid 1812B, and the thirdphotocurable fluid 1812C, respectively. Thefine structures 1830A to 1830C may be formed simultaneously or sequentially according to a specific order. - Referring to
FIG. 20 , as the secondfine structure 1830B moves along thesecond rail 1820B, the second fine structure 1830 moves from thesecond fluid 1812B through thefirst interface 1814A to thefirst fluid 1812A. Further, as the thirdfine structure 1830C moves along thethird rail 1820C, the thirdfine structure 1830C moves from thethird fluid 1812C through thesecond interface 1814B to thefirst fluid 1812A. Further, the firstfine structure 1830A moves along thefirst rail 1820A inside thefirst fluid 1812A. In this embodiment, since therails interfaces fine structures third fluids interfaces first fluid 1812A. - Referring to
FIG. 21 , since the second andthird rails first rail 1820A, the second and thirdfine structures first rail 1820A to move along thefirst rail 1820A. The firstfine structure 1830A also moves along thefirst rail 1820A. - As shown in the drawings, when the
fluidic channel 1810 having therails 1820A to 1820C provided therein is used, thefine structures interfaces fluidic channel 1810 having therails 1820A to 1820C provided therein is used, thefine structures 1830A to 1830C formed in therespective rails 1820A to 1820C can be controlled in such a manner that they move to onerail 1820A to move along therail 1820A. -
FIGS. 22 to 25 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure. In particular,FIGS. 22 to 25 show an example in which a one-dimensional array of fine structures is formed at an end of a rail. (a) of each ofFIGS. 22 , 23 and 24, andFIG. 25 are opened-up plan views of a fluidic channel. (b) and (c) ofFIG. 22 are cross-sectional views of the fluidic channel shown in (a) ofFIG. 22 , taken along lines M-M′ and N-N′. (b) ofFIG. 24 is a cross-sectional view of the fluidic channel shown in (a) ofFIG. 24 , taken along line O-O′. - Referring to
FIG. 22 , a fluid 2212 flows through afluidic channel 2210. The fluid 2212 may be a photocurable fluid. Arail 2220 is positioned inside thefluidic channel 2210, and therail 2220 has anend 2222. - Referring to
FIG. 23 , light is radiated to formfine structures 2230A to 2230C having a guide.FIG. 23 shows an example in which thefine structures 2230A to 2230C are formed by curing the onefluid 2212. However, thefine structures 2230A to 2230C may be produced from a variety of fluids. For example, the firstfine structure 2230A may be formed while a first photocurable fluid flows, the secondfine structure 2230B may be formed while a second photocurable fluid flows, and the thirdfine structure 2230C may be formed while a third photocurable fluid flows. Similar to the embodiment shown inFIGS. 18 to 21 , thefine structures 2230A to 2230C may be produced from different fluids in different passages positioned in thefluidic channel 2210, and the producedfine structures 2230A to 2230C may be moved to one passage. - Referring to
FIG. 24 , when thefine structures 2230A to 2230C meet theend 2222 of therail 2220 while moving along thefluid 2212, they are stopped. More specifically, the firstfine structure 2230A is stopped at the end of therail 2222, the secondfine structure 2230B is stopped behind the firstfine structure 2230A, and the thirdfine structure 2230C is stopped behind the secondfine structure 2230B. As shown inFIG. 24 , when therail 2220 having theend 2222 provided therein is used, it is possible to easily form a one-dimensional array 2233 of thefine structures 2230A to 2230C. - According to some other embodiments, additional light may be radiated to form a
fine structure 2235 for fixation, which integrates the one-dimensional array 2233, as shown inFIG. 25 . Fluid used for forming thefine structure 2235 for fixation may be the same as or different from the fluid used for forming the one-dimensional array 2233. In one example, the one-dimensional array 2233 may be formed while the first photocurable fluid flows, and thefine structure 2235 for fixation may be formed while the second photocurable fluid flows. -
FIGS. 26 to 28 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure. In particular,FIGS. 26 to 28 show another example in which a one-dimensional array of fine structures is formed at an end of a rail.FIGS. 26 to 28 are opened-up plan views of a fluidic channel. - Referring to
FIG. 26 , a fluid 2612 flows through afluidic channel 2610. The fluid 2612 may be a photocurable fluid. Arail 2620 is positioned inside thefluidic channel 2610, and therail 2620 has anend 2622. - Referring to
FIG. 27 , light is radiated to formfine structures 2630A to 2630C having a guide. Each of the fine structures may have latches such that they are coupled to an adjacent fine structure. Thefine structures 2630A to 2630C includemale latches 2636A to 2636C andfemale latches 2637A to 2637C, respectively. Themale latch female latch - Referring to
FIG. 28 , when thefine structures 2630A to 2630C meet theend 2622 of therail 2620 while moving along the 2612, they are stopped. Then, a one-dimensional array of thefine structures 2630A to 2630C is formed. While thefine structures 2630A to 2630C are stopped at the end of therail 2620, the firstfemale latch 2637A is coupled to the secondmale latch 2636B, and the secondfemale latch 2637A is coupled to the thirdmale latch 2636C. Since thefine structures 2630A to 2630C are coupled through the male latches 2536A to 2636C and thefemale latches 2637A to 2637C, thefine structures 2630A to 2630C may be integrated, without such a separate integration process as shown inFIG. 25 . Further, since thelatches 2636A to 2636C and 2637A to 2637C are flexible, the male latches 2636A to 2636C and thefemale latches 2637A to 2637C can be easily coupled. To reinforce the coupling among thefine structures 2630A to 2630C, the integration process as shown inFIG. 25 may be additionally performed. -
FIGS. 29 to 32 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure. In particular,FIGS. 29 to 32 show an example in which a two-dimensional array of fine structures is formed at ends of rails.FIGS. 29 to 32 are opened-up plan views of a fluidic channel. - Referring to
FIG. 29 , a fluid 2912 flows through afluidic channel 2910. The fluid 2912 may be a photocurable fluid.Rails 2920A to 2920C are positioned inside thefluidic channel 2910, and haveends 2922A to 2922C, respectively. - Referring to
FIG. 30 , light is radiated to formfine structures 2930A to 2930J having a guide.FIG. 30 shows an example in which thefine structures 2930A to 2930J are formed by curing one kind offluid 2912. However, thefine structures 2930A to 2930J may be produced from various fluids. For example, while first to third photocurable fluids flow in parallel to one another, thefine structures 2930A to 2930J may be formed. In this case, the second, fifth, and eighthfine structures fine structures fine structures fine structure 2930A may be formed by curing the first to third photocurable fluids. - Referring to
FIG. 31 , when thefine structures 2930A to 2930J meet theends 2922A to 2922C of therails 2920A to 2920C while moving along thefluid 2912, they are stopped at theends 2922A to 2922C. As shown inFIG. 31 , when therails 2920A to 2920C having theends 2922A to 2922C, respectively, are used, it is possible to easily form a two-dimensional array 2934 of thefine structures 2930A to 2930J. - According to some other embodiments, additional light may be radiated to form a
fine structure 2935 for fixation, which integrates the two-dimensional array 2934, as shown inFIG. 32 . The fluid used for forming thefine structure 2935 for fixation may be the same as or different from the fluid used for forming the two-dimensional array 2934. -
FIGS. 33 to 40 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure. In particular,FIGS. 33 to 40 show another example in which a two-dimensional array of fine structures is formed at ends of rails. (a) ofFIG. 33 andFIGS. 34 to 40 are opened-up plan views of a fluidic channel. (b) and (c) ofFIG. 33 are cross-sectional views of the fluidic channel shown in (a) ofFIG. 33 , taken along lines P-P′ and Q-Q′. - Referring to
FIG. 33 , a fluid 3312 flows through afluidic channel 3310. First tofourth passages 3316A to 3316D are positioned inside thefluidic channel 3310. The fluid 3312 may be a photocurable fluid.Rails fluidic channel 3310 and have ends 3322A and 3322B, respectively. - Referring to
FIG. 34 , light is radiated to form firstfine structures 3330A havingfirst guides 3332A. Referring toFIG. 35 , the firstfine structures 3330A move to the left side along thefirst rail 3320A and are then stopped at theend 3322A of thefirst rail 3320A. In this manner, a one-dimensional array 3333A of the firstfine structures 3330A is formed. During this period, the fluid 3312 introduced through thefirst passage 3316A is discharged through thesecond passage 3316B. Referring toFIG. 36 , the one-dimensional array 3333A of the firstfine structures 3330A moves downward along thesecond rails 3320B and is then stopped at theends 3322B of thesecond rails 3320B. During this period, the fluid 3312 introduced through thefourth passage 3316D is discharged through thethird passage 3316C. - Referring to
FIGS. 37 to 39 , secondfine structures 3330B are formed and then moved to the right side to form a one-dimensional array 3333B of the secondfine structures 3330B. The one-dimensional array 3333B of the secondfine structures 3330B is moved downward to come in contact with the one-dimensional array 3333A of the firstfine structures 3330A. As such, when therails ends dimensional array 3334 of thefine structures - According to some other embodiments, additional light is radiated to form a
fine structure 3335 for fixation which integrates the two-dimensional array 3334, as shown inFIG. 40 . Fluid used for forming thefine structure 3335 for fixation may be the same as or different from the fluid used for forming the two-dimensional array 3334. -
FIGS. 41 to 47 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure. In particular,FIGS. 41 to 47 show still another example in which a two-dimensional array of fine structures is formed at ends of rails.FIGS. 41 to 47 are opened-up plan views of a fluidic channel. - Referring to
FIG. 41 , a fluid 4112 flows through afluidic channel 4110. First tofourth passages 4116A to 4116D are positioned inside thefluidic channel 4110.Rails fluidic channel 4110, and have ends 4122A and 4122B. - Referring to
FIGS. 42 to 44 , firstfine structures 4130A havingguides 4132A provided thereon are sequentially formed and then moved to the right side to form a one-dimensional array 4133A of the firstfine structures 4130A. The one-dimensional array 4133A of the firstfine structures 4130A is moved downward along thesecond rails 4120B and stopped at theends 4122B of thesecond rails 4120B.FIGS. 42 to 44 show an example in which the firstfine structures 4130A having theguides 4132A are sequentially formed at a start portion of thefirst rail 4120A. However, the firstfine structures 4130A having theguides 4132A may be produced outside the fluidic channel 4120 to be delivered into the fluidic channel 4120. - Referring to
FIGS. 45 to 47 , secondfine structures 4130B are formed and moved to the right side to form a one-dimensional array 4133B of the secondfine structures 4130B. The one-dimensional array 4133B of the secondfine structures 4130B is moved downward to come in contact with the one-dimensional array 4133A of the firstfine structures 4130A. - When the
rails ends dimensional array 4134 of thefine structures fine structures fine structures FIG. 40 . -
FIGS. 48 to 50 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure. In particular,FIGS. 48 to 50 show still another example in which a two-dimensional array of fine structures is formed at ends of rails.FIGS. 48 to 50 are opened-up plan views of a fluidic channel. - Referring to
FIG. 48 , afluid 4812 is positioned inside afluidic channel 4810. The fluid 4812 may be a photocurable fluid. First tofourth passages 4816A to 4816D are positioned inside thefluidic channel 4810. Inside thefluidic channel 4810,rails 4820A to 4820C are disposed in parallel to one another. Therails 4820A to 4820C haveends 4822A to 4822C. - Referring to
FIG. 49 , first tothird fluids 4812A to 4812C delivered through thefirst passages 4816A are discharged through thesecond passage 4816B. Therefore, the first tothird fluids 4812A to 4812C cross therails 4820A to 4820C. Aninterface 4814A is formed between the first andsecond fluids interface 4814B is formed between the second andthird fluids fourth passages fine structures 4830A to 48301. The first to thirdfine structures 4830A to 4830C are formed by photocuring thefirst fluid 4812A, the fourth to sixthfine structures 4830D to 4830F are formed by photocuring thesecond fluid 4812B, and the seventh to ninthfine structures 4830G to 4830I are formed by photocuring thethird fluid 4812C. - Referring to
FIG. 50 , when thefine structures 4830A to 4830I meet theends 4822A to 4822C of therails 4820A to 4820C while moving along thefourth fluid 4812D, they are stopped at theends 4822A to 4822C. Thefluid 4812D may be the same as or different from any one of the first tothird fluids 4812A to 4812C. In this way, a two-dimensional array 4834 of thefine structures 4830A to 4830I is formed. After the two-dimensional array 4834 is formed, an integration process similar to the process shown inFIG. 32 may be additionally performed. - In the drawing, the fine structures belonging to each line of the two-
dimensional array 4834 are produced by photocuring the same fluid. Specifically, thefine structures 4830A to 4830C belonging to the first line are produced by photocuring thefirst fluid 4812A, thefine structures 4830D to 4830F belonging to the second line are produced by photocuring thesecond fluid 4812B, and thefine structures 4830G to 4830I belonging to the third line are produced by photocuring thethird fluid 4812C. However, according to another embodiment, the fine structures belonging to each line of the two-dimensional array may be produced by the photocuring of different fluids. In one example, when a certain fine structure, for example, thefine structure 4830B, is not produced in the step described inFIG. 49 , thefine structures FIG. 50 are produced by photocuring the first, second, andfirst fluids fine structures FIG. 49 , thefine structures 4830A, 4840E, and 4830I belonging to the first line in the step described inFIG. 50 are produced by photocuring the first, second, andthird fluids - The above-described methods for forming a two-dimensional array can be applied to bioanalysis in which various particles are manipulated and fluids are exchanged, self assembly by fluids, and fabrication of displays.
-
FIGS. 51 to 53 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and an example of a method for conveying a fine structure. In particular,FIGS. 51 to 53 show an example in which the movement direction of a fine structure is determined in accordance with the position of a guide. (a) ofFIG. 51 is an opened-up plan view of afluidic channel 5110, and (b) to (d) ofFIG. 51 are cross-sectional views of thefluidic channel 5110 of (a) ofFIG. 51 , taken along lines R-R′, S-S′, and T-T′, respectively. Referring to (a) ofFIG. 51 , afluid 5112 is present inside thefluidic channel 5110. First tothird passages 5116A to 5116C are positioned inside thefluidic channel 5110. Thefirst rail 5120A is positioned in an upper portion of thefluidic channel 5110 and passes through the first andsecond passages second rail 5120B is positioned in a lower portion of thefluidic channel 5110 and passes through the first andthird passages 5116A and 5116C. - (a) of
FIG. 52 is an opened-up plan view of thefluidic channel 5110, and (b) and (c) ofFIG. 52 are cross-sectional views of first and secondfine structures 5130A and 5130B. Referring to (a) ofFIG. 52 , at least one firstfine structure 5130A and at least one second fine structure 5130B flow along thefirst passage 5116A of thefluidic channel 5110. The firstfine structure 5130A has aguide 5132A positioned on the top surface thereof, and the second fine structure 5130B has a guide 5132B positioned on the bottom surface thereof. -
FIG. 53 is an opened-up plan view of thefluidic channel 5110. Referring toFIG. 53 , since the firstfine structure 5130A has theguide 5132A positioned on the top surface thereof, the firstfine structure 5130A moves along thefirst rail 5120A positioned in the upper portion of thefluidic channel 5110. Since thefirst rail 5120A is formed in the direction of thesecond passage 5116B, the firstfine structure 5130A moves to thesecond passage 5116B. Further, since the second fine structure 5130B has the guide 5132B positioned on the bottom surface thereof, the second fine structure 5130B moves along thesecond rail 5120B positioned in the lower portion of thefluidic channel 5110. Since thesecond rail 5120B is formed in the direction of the third passage 5116C, the second fine structure 5130B moves to the third passage 5116C. - As described above, when the
rails fluidic channel 5110 such that their advancing directions are set to be different from each other, it is possible to divide thefine structures 5130A and 5130B depending on the position of the guide provided thereon. Further, when a large quantity of fine structures fabricated outside is injected into the fluidic channel, fine structures having a guide positioned on the top surface thereof and fine structures having a guide positioned on the bottom surface thereof may be mixed. In this case, when the above-describedfluidic channel 5110 is used, it is possible to extract either the fine structures having a guide positioned on the top surface thereof or the fine structures having a guide positioned on the bottom surface thereof. -
FIG. 54 is diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , which show an example of an entrance portion of a rail. (a) ofFIG. 54 is an opened-up plan view of afluidic channel 5410. (b) to (d) ofFIG. 54 are cross-sectional views of thefluidic channel 5410 of (a) ofFIG. 54 , taken along lines U-U′, V-V′, and W-W′. Referring to (a) ofFIG. 54 ,fine structures 5430A to 5430C are positioned inside the fluidic channel 5401 and haveguides 5432A to 5432C, respectively. Thefluidic channel 5410 includes aregion 5410A where arail 5420 is not formed, anentrance portion 5410B, and aregion 5410C where therail 5420 is formed. Theentrance portion 5410B has one or moreinclined surfaces 5424. Theinclined surfaces 5424 serve to lead the guides of the fine structures such that the guides enter into the rail. The Y-directional orientation of thefine structure 5430A positioned in theregion 5410A where therail 5420 is not formed is not limited. However, the orientation of thefine structure 5430B positioned in theentrance portion 5410B is limited by the inclined surfaces 5432. The distance between the inclined surfaces 5432 decreases toward theregion 5410C where therail 5420 is formed. Therefore, as thefine structure 5430B approaches theregion 5410C where therail 5420 is formed, the Y-directional orientation of thefine structure 5430B approaches therail 5420. In theregion 5410C where therail 5420 is formed, thefine structure 5430C moves along therail 5420. -
FIG. 55 is a diagram for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , which show a modified example of the entrance portion of the rail of (a) ofFIG. 54 . Referring toFIG. 55 , a fluid 5512 flows inside a fluidic channel 5510 which includes a region 5510A where therail 5520 is not formed, an entrance portion 5510B, and a region 5510C where therail 5520 is formed. Unlike theentrance portion 5410B shown inFIG. 54 , the entrance portion 5510B shown inFIG. 55 has only oneinclined surface 5524. -
FIGS. 56 and 57 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , which show an example in which a magnetic field is applied to a fluidic channel.FIG. 56 shows a state beforefine structures point 5624. Referring toFIG. 56 , a rail is positioned inside thefluidic channel 5610 and includes first tothird branches 5620A to 5620C. The first tothird branches 5620A to 5620C join together at the diverging point. Thefine structures fluid 5612. Thefine structures fine structure 5830A and at least one secondfine structure 5830B have different polarity from each other. A magnetic field is applied to thefluidic channel 5610, or specifically, around the divergingpoint 5624.FIG. 56 shows an example in which the magnetic field is applied by twomagnets fluidic channel 5610. However, this may be modified in various manners. In one modified example, only onemagnet magnet fluidic channel 5610. Themagnet fine structures fine structure 5630A receives a magnetic force in the direction of thefirst magnet 5640A, and the secondfine structure 5630B receives a magnetic force in the direction of thesecond magnet 5640B. -
FIG. 57 shows a state after thefine structures point 5624. Referring toFIG. 57 , the firstfine structure 5630A which moves along thefirst branch 5620A to reach the divergingpoint 5624 is moved to thesecond branch 5620B by the magnetic force applied in the direction of thefirst magnet 5640A. Further, the secondfine structure 5630B which moves along thefirst branch 5620A to reach the divergingpoint 5624 is moved to thethird branch 5620C by the magnetic force applied in the direction of thesecond magnet 5640B. As described above, when the fine structures 5630 have magnetic materials provided thereon and a magnetic field is applied to the fluidic field, the advancing direction of thefine structures point 5624 can be controlled. -
FIGS. 58 and 59 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , which show another example in which a magnetic field is applied to a fluidic channel.FIG. 58 shows a state in which a firstfine structure 5830A passes through a divergingpoint 5824. Referring toFIG. 58 , a rail is positioned inside thefluidic channel 5810 and includes first tothird branches 5820A to 5820C. The first tothird branches 5820A to 5820C join at the divergingpoint 5824. Thefine structures fluid 5812. Thefine structures magnetic materials magnetic materials fluidic channel 5810, more specifically, around the divergingpoint 5824. While the firstfine structure 5830A passes through the divergingpoint 5824, afirst magnet 5840A is turned on, and asecond magnet 5840B is turned off. Therefore, as an attractive force is applied by thefirst magnet 5840A, the firstfine structure 5830A moves to thesecond branch 5820B. -
FIG. 59 shows a state in which the secondfine structure 5830B passes through the divergingpoint 5824. Referring toFIG. 59 , while the secondfine structure 5830B passes through the divergingpoint 5824, thesecond magnet 5840B is turned on and thefirst magnet 5840A is turned off. Therefore, as an attractive force is applied by thesecond magnet 5840B, the secondfine structure 5830B is moved to thethird branch 5820C. As such, when the fine structures 5830 have magnetic materials provided thereon and a magnetic field is applied to thefluidic channel 5810, the advancing direction of thefine structures point 5824 can be controlled.FIG. 59 shows an example in which when thefine structure point 5824, any one of the twomagnets fine structure magnet fine structures electromagnet electromagnet fine structure electromagnet electromagnet - According to some other embodiments in connection with the embodiment shown in FIGS. 56 to 58, an electric field may be applied to the fluidic channel, instead of the magnetic field. In this case, the fine structure should have electric charge. The fine structures having electric charges are moved to any one of two branches in accordance with the electric field formed in the fluidic channel.
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FIG. 60 is a diagram for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , which shows still another example in which a magnetic field is applied to a fluidic channel. Referring toFIG. 60 , afine structure 6030 havingmagnetic materials 6034 provided thereon is moved by a magnetic field applied across a fluidic channel. Themagnetic materials 6034 may be paramagnetic materials. InFIG. 60 , as an attractive force is applied in the direction of amagnet 6040, thefine structure 6030 is moved toward themagnet 6040. Since thefine structure 6030 is moved by the magnetic field, thefine structure 6030 can be moved even when a fluid 6012 does not flow. Further, thefine structure 6030 can be moved against the flow of thefluid 6012. For example, the fluid 6012 may flow in the opposite direction to the direction of themagnet 6040, and thefine structure 6030 may be moved in the direction of themagnet 6040. Since a force moving thefine structure 6030 is provided by themagnet 6040 or the magnetic field, thefluid 6012 does not need to provide the force moving thefine structure 6030. Therefore, a gas may be used as thefluid 6012. In the case of gas, a rate at which a force moving thefine structure 6030 is provided is relatively low. By changing the magnetic field applied across thefluidic channel 6010 according to time, it is possible to control the movement direction of thefine structure 6030 according to time. Further, when a plurality of electromagnets are used, the movement of thefine structure 6030 can be controlled by a similar method as is used to control a magnetic levitation propulsion train. - According to some other embodiments in connection with the embodiment shown in FIG. 60, an electric field may be applied to the fluidic channel, instead of the magnetic field. In this case, the fine structure should have electric charges. Since an electric force causes the fine structure to move, the fluid does not need to provide a force to move the fine structure. Therefore, a gas may be used as the fluid. Since the fine structure is moved by the electric field, the fine structure can be moved even when the fluid does not flow. Further, the fine structure can be moved against the flow of the fluid.
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FIG. 61 is diagrams for explaining one embodiment of the fine structure which can be adopted in the fluidic channel system shown inFIG. 1 , which show an example in which the fine structure includes a latch. (a) to (d) ofFIG. 61 are opened-up plan views of a fine structure. Referring to (a) ofFIG. 61 , thefine structure 6110 includes alatch 6120. Thefine structure 6110 can be coupled to at least one adjacent fine structure through thelatch 6120. The shape of thelatch 6120 can be modified in various manners. Modified examples of the latch are shown in (b) to (d) ofFIG. 61 . -
FIG. 62 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown inFIG. 1 , which show an example in which the fine structure includes a spacer. (a) to (c) ofFIG. 62 are opened-up plan views of fine structures. Referring to (a) ofFIG. 62 , afine structure 6210 includes aspacer 6220. Thespacer 6220 serves to adjust a distance between thefine structure 6210 and an adjacent fine structure, that is, a distance between the center of thefine structure 6210 and the center of an adjacentfine structure 6210. In (a) ofFIG. 62 , thespacer 6220 has a bar shape, but the shape of thespacer 6220 may be modified in various manners. Modified examples of thespacer 6220 are shown in (b) and (c) ofFIG. 62 . -
FIG. 63 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown inFIG. 1 , which show an example in which the guide includes a wedge-shaped end. (a) ofFIG. 63 is a perspective view of a fine structure having a wedge-shaped end, and (b) ofFIG. 63 is an opened-up plan view of the fine structure. Referring to (a) and (b) ofFIG. 63 , aguide 6320 of afine structure 6310 has a wedge-shapedend 6330. Atip 6340 of the wedge-shapedend 6330 leans in any one direction of both side surfaces of the 6320. Depending on the direction in which thetip 6340 of the wedge-shapedend 6330 leans, it is determined to which branch thefine structure 6310 reaching a diverging point of a rail moves. (c) ofFIG. 63 is a perspective view of a fine structure having a recessed wedge, and (d) ofFIG. 63 is an opened-up plan view of the fine structure of (c) ofFIG. 63 . Referring to (c) and (d) ofFIG. 63 , aguide 6370 of thefine structure 6360 has a wedge-shapedend 6380, and atip 6390 of the wedge-shapedend 6380 leans in any one direction of both side surfaces. -
FIGS. 64 and 65 are diagrams for explaining the function of the wedge-shaped end of the guide according to one embodiment.FIG. 64 is an opened-up plan view of a fluidic channel, showing a state beforefine structures point 6424.FIG. 65 is an opened-up plan view of the fluidic channel, showing a state after thefine structures point 6424. - Referring to
FIG. 64 , a fluid 6412 flows inside afluidic channel 6410. The fluid 6412 may be a photocurable fluid. A rail 6420 includes first tothird branches 6420A to 6420C. The first tothird branches 6420A to 6420C join at the divergingpoint 6424. The firstfine structure 6430A includes aguide 6432A having a wedge-shaped end, and atip 6434A of the wedge-shaped end leans toward thesecond branch 6420B. Further, the secondfine structure 6430B includes aguide 6432B having a wedge-shaped end, and atip 6434B of the wedge-shaped end leans toward thethird branch 6420C. - Referring to
FIG. 65 , the firstfine structure 6430A having thetip 6434A leaning toward thesecond branch 6420B is moved to thesecond branch 6420B. Further, the secondfine structure 6430B having thetip 6434B leaning toward thethird branch 6420C is moved to thethird branch 6420C. In this way, the advancing direction of thefine structures point 6424 can be controlled. -
FIG. 66 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown inFIG. 1 , which show an example in which a fine structure is used as a package of a microchip. (a) ofFIG. 66 is a perspective view of a fine structure formed by radiating light from the bottom of a microchip, and (b) ofFIG. 66 is an opened-up plan view of the fine structure of (a) ofFIG. 66 . (c) ofFIG. 66 is a perspective view of a fine structure formed by radiating light from the top of a microchip, and (d) ofFIG. 66 is an opened-up plan view of the fine structure of (c) ofFIG. 66 . Referring toFIG. 66 , apackage microchip microchip package guide -
FIGS. 67 to 69 are diagrams for explaining an example of a method of fabricating a package. (a) ofFIG. 67 is a perspective view of afluidic channel 6710, (b) ofFIG. 67 is an opened-up plan view of thefluidic channel 6710, and (c) ofFIG. 67 is a perspective view of amicrochip 6750. Referring toFIG. 67 , amicrochip 6750 is provided inside thefluidic channel 6710. A fluid 6712 flows inside thefluidic channel 6710. The fluid 6712 may be a photocurable fluid. Thefluidic channel 6710 includes arail 6720. (a) ofFIG. 68 is a diagram showing an example of an image photographed by the camera 410 (refer toFIG. 4 ), and (b) ofFIG. 68 is a diagram showing an example of the shape of light determined by the processor 420 (refer toFIG. 4 ). Referring toFIG. 68 , theshape 6820 of light suitable for a package may be obtained by expanding aregion 6810 corresponding to the microchip into a predetermined range. (a) ofFIG. 69 is a perspective view of thefluidic channel 6710 receiving light having thedetermined shape 6820, (b) ofFIG. 69 is an opened-up plan view of thefluidic channel 6710, and (c) ofFIG. 69 is a perspective view of a packagedchip 6730. Referring toFIG. 69 , thepackage 6730 may be formed by providing light to thefluidic channel 6710. Thepackage 6730 may be formed by curing thefluid 6712. Aguide 6732 may be formed at the same time as thepackage 6730. -
FIG. 70 is a diagram for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown inFIG. 1 , which show an example in which a fine structure is used as a carrier. (a) and (b) ofFIG. 70 are opened-up plan views of fine structures. For example, microbeads, cells, nanostructures, or particles may be carried by a carrier. - Referring to (a) of
FIG. 70 , thecarrier 7010 surroundsmicrobeads 7014. For example, as thecarrier 7010 is formed by radiating light onto a fluid in which themicrobeads 7014 are dispersed, thecarrier 7010 surrounding themicrobeads 7014 can be formed as shown in the drawing. Since thecarrier 7010 surrounds themicrobeads 7014, themicrobeads 7014 are moved by the movement of thecarrier 7010. The position of thecarrier 7010 can be easily controlled by aguide 7012 and a rail. As a result, the positions of themicrobeads 7014 can be easily controlled. - Referring to (b) of
FIG. 70 , acarrier 7020 surroundsmicrobeads 7024. Thecarrier 7020 includes anentrance 7026. Theentrance 7026 is shaped so that themicrobeads 7024 easily enter thecarrier 7020 but have difficulty coming out. For example, themicrobeads 7024 enter thecarrier 7020 through theentrance 7026, are moved together with thecarrier 7020, and then are discharged from thecarrier 7020. -
FIGS. 71 and 72 are diagrams for explaining an example in which microbeads are carried by a carrier.FIGS. 71 and 72 are opened-up plan views of a fluidic channel. Referring toFIG. 71 , acarrier 7130 having aguide 7132 is positioned at anend 7122 of arail 7120.Microbeads 7136 are dispersed in afluid 7112. The fluid 7112 flows to the left side along thefluidic channel 7110. Anentrance 7134 of thecarrier 7130 is opened by the fluid 7112 flowing to the left side, and themicrobeads 7136 are accumulated in thecarrier 7130. Referring toFIG. 72 , nomicrobeads 7136 are dispersed in thefluid 7112. The fluid 7112 flows to the right side along thefluidic channel 7110. Theentrance 7134 of thecarrier 7130 is closed by the fluid 7112 flowing to the right side, and themicrobeads 7136 are moved to the right side together with thecarrier 7130. -
FIG. 73 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown inFIG. 1 , which show an example of a fine structure which can reduce friction with a rail. (a) ofFIG. 73 is a diagram showing ashape 7340 of light radiated onto afluidic channel 7310. (b) ofFIG. 73 is a diagram showing afine structure 7330 formed by photocuring afluid 7312. (c) ofFIG. 73 is an opened-up plan view of thefluidic channel 7310. Referring toFIG. 73 , when light having theshape 7340 shown in (a) ofFIG. 73 is radiated onto thefluidic channel 7310, thefine structure 7330 having anopening 7334 passing through thefine structure 7330 shown in (b) ofFIG. 73 is formed by photocuring thefluid 7312. As shown in the drawings, since thefine structures 7330 have adiscontinuous guide 7332, friction between theguide 7332 and therail 7320 decreases. Further, the discontinuity of theguide 7332 increases flexibility. When the flexibility of theguide 7332 increases, thefine structure 7330 can pass through a curved rail more easily. -
FIG. 74 is diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown inFIG. 1 , which show another example of a fine structure which can reduce friction with a rail. (a) ofFIG. 74 is a diagram showing ashape 7440 of light radiated onto afluidic channel 7410. (b) ofFIG. 74 is an opened-up plan view of thefluidic channel 7410 in which a fine structure formed by photocuring a fluid 7412 is disposed. (c) ofFIG. 74 is a cross-sectional view of thefluidic channel 7410 of (b) ofFIG. 74 , taken along a line AA-AA′. Referring toFIG. 74 , light provided to thefluidic channel 7410 includes atransparent region 7442 and asemi-transparent region 7444. Thesemi-transparent region 7444 may be implemented using cross stripes, for example. When thefine structure 7430 is formed by the photocuring, a portion of the fluid 7412 onto which thesemi-transparent region 7444 of light is radiated is cured to have a smaller thickness than a portion of the fluid 7412 onto which thetransparent region 7442 of light is radiated. Therefore, when the photocuring is performed, aguide 7432 having a small width is formed as shown in (c) ofFIG. 74 . Forming theguide 7432 in such a manner reduces friction between theguide 7432 and therail 7420. Even when therail 7420 has a curved shape, theguide 7432 can easily pass through therail 7420. -
FIGS. 75 and 76 are diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown inFIG. 1 . InFIG. 1 , the fine structure is formed inside the fluidic channel having the rail disposed therein. InFIGS. 75 and 76 , however, a fine structure having a guide is formed inside a fluidic channel in which no rail is disposed. (a) ofFIG. 75 is an opened-up plan view of thefluidic channel 7510, and (b) ofFIG. 75 is a cross-sectional view of thefluidic channel 7510 of (a) ofFIG. 75 , taken along a line X-X′. Referring toFIG. 75 , afluid 7512 is present inside thefluidic channel 7510 and no rail is positioned. (a) ofFIG. 76 is an opened-up plan view of thefluidic channel 7510. (b) ofFIG. 76 is a diagram showing an example of theshape 7540 of light provided to thefluidic channel 7510 shown in (a) ofFIG. 76 . (c) ofFIG. 76 is a cross-sectional view of thefluidic channel 7510 of (a) ofFIG. 76 , taken along a line X-X′. Referring toFIG. 76 , light provided to thefluidic channel 7510 includes atransparent region 7542 and asemi-transparent region 7544. Thesemi-transparent region 7544 may be implemented using cross stripes, for example. When thefine structure 7530 is formed by the photocuring, a potion of the fluid 7512 to which thesemi-transparent region 7544 of light is provided is cured to have a smaller thickness than a portion of the fluid 7512 to which thetransparent region 7542 of light is provided. Therefore, when the light having thetransparent region 7542 and thesemi-transparent region 7544 is radiated onto thefluidic channel 7510, the fine structure having aguide 7532 can be formed even through no rail is formed in thefluidic channel 7510. -
FIGS. 77 to 79 are diagrams for explaining another embodiment of the fine structure which can be adopted in the fluidic channel system shown inFIG. 1 . InFIGS. 77 to 79 , a fine structure having a guide is formed inside a fluidic channel in which no rail is disposed. (a) ofFIG. 77 is an opened-up plan view of afluidic channel 7710. (b) ofFIG. 77 is a cross-sectional view of thefluidic channel 7710 of (a) ofFIG. 77 , taken along a line Y-Y′. (c) ofFIG. 77 is a cross-sectional view of thefluidic channel 7710 of (a) ofFIG. 77 , taken along a line Z-Z′. Referring toFIG. 77 , afluid 7712 is positioned inside thefluidic channel 7710 and no rail is disposed. Thefluidic channel 7710 includes afirst region 7710A where the internal height is relatively small and asecond region 7710B where the internal height is relatively large. (a) ofFIG. 78 is an opened-up plan view of thefluidic channel 7710. (b) ofFIG. 78 is a diagram showing an example of theshape 7740A of light provided to thefluidic channel 7710 shown in (a) ofFIG. 78 . (c) ofFIG. 78 is a cross-sectional view of thefluidic channel 7710 of (a) ofFIG. 78 , taken along a line Y-Y′. Referring toFIG. 78 , light having theshape 7740A corresponding to thefine structure 7730 is provided to afirst region 7710A, thereby forming a portion corresponding to a body of thefine structure 7730. Since thefine structure 7730 is formed in thefirst region 7710A, thefine structure 7730 has a thickness corresponding to the internal height of thefirst region 7710A. (a) ofFIG. 79 is an opened-up plan view of thefluidic channel 7710. (b) ofFIG. 79 is a diagram showing an example of theshape 7740B of light provided to thefluidic channel 7710 shown in (a) ofFIG. 79 . (c) ofFIG. 79 is a cross-sectional view of thefluidic channel 7710 of (a) ofFIG. 79 , taken along a line Z-Z′. Referring toFIG. 79 , light having the shape B corresponding to aguide 7732 is provided to thefine structure 7730 moved to thesecond region 7710B along the flow of the fluid 7712, thereby forming aguide 7732. -
FIGS. 80 and 81 are diagrams for explaining another example of a method of fabricating a fine structure, which show a method for aligning a fine structure with a rail by expanding a guide.FIGS. 80 and 81 are opened-up plan views of afluidic channel 8010. Referring toFIG. 80 ,fine structures 8030A to 8030C are positioned at ends 8022A to 8022C ofrails 8020A to 8020C. Since the width ofguides 8032A to 8032C is considerably smaller than that of therails 8020A to 8020C, someguides rails guides rails - In this case, when the
guides 8032A to 8032C are expanded, theguides 8032A to 8032C can be aligned with therails 8020A to 8020C. Such an example is shown inFIG. 81 . Theguides 8032A to 8032C may be expanded by various methods. In one example, theguides 8032A to 8032C may be fabricated by photocuring PEG-DA as an example of the fluid 8012, and a separate fluid 8012′ having higher acidity than PEG-DA may be introduced into thefluidic channel 8010 to react with theguides 8032A to 8032C. As a result, theguides 8032A to 8032C can be expanded. The expansion process may be performed on one fine structure or on a one- or two-dimensional array of fine structures. -
FIGS. 82 and 83 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure, which show an example in which a fine structure moves along a plurality of rails. Referring toFIGS. 82 and 83 , a fluid 8212 flows inside afluidic channel 8210. Tworails fluidic channel 8210, and a distance between therails fine structure 8230 has a spring shape and is positioned across the tworails fine structure 8230 has twoguides fine structure 8230 is positioned in a region where the distance between therails FIG. 82 ), thefine structure 8230 extends. When the fine structure 8203 is positioned in a region where the distance between therails FIG. 83 ), thefine structure 8230 contracts. As such, when thefine structure 8230 is positioned across the plurality ofrails fine structure 8230 capable of extending and contracting may be applied. As a result, thefine structure 8230 can be moved along therails rails -
FIGS. 84 and 85 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure, which show another example in which a fine structure moves along a plurality of rails. Referring toFIG. 84 , a fluid 8412 flows inside afluidic channel 8410. Tworails fluidic channel 8410 join to connect to onerail 8420C. Thefine structure 8430 is positioned across the tworails guides - Referring to
FIG. 85 , thefine structure 8430 is moved along the flow of the fluid 8412 into the onerail 8420C at a diverging point, and the twoguides rail 8420C. In this state, thefine structure 8430 is turned about 90 degrees compared with the state ofFIG. 84 . As described above, thefine structure 8430 positioned across the tworails rail 8420C along the flow of thefluid 8412. At this time, thefine structure 8430 is turned about 90 degrees. -
FIGS. 86 to 89 are diagrams for explaining another embodiment of the rail which can be adopted in the fluidic channel system shown inFIG. 1 , and another embodiment of a method of fabricating a fine structure, which show an example in which a fine structure is erected. - (a) of
FIG. 86 is an opened-up plan view of afluidic channel 8610. (b) ofFIG. 86 is an opened-up side view of thefluidic channel 8610 shown in (a) ofFIG. 86 . (c) ofFIG. 86 is a cross-sectional view of thefluidic channel 8610 of (a) ofFIG. 86 , taken along a line AB-AB′. (d) ofFIG. 86 is a cross-sectional view of thefluidic channel 8610 of (a) ofFIG. 86 , taken along a line AC-AC′. Referring toFIG. 86 , a fluid 8612 flows inside thefluidic channel 8610. Thefluidic channel 8610 includes first andsecond regions rail 8620 is formed in either side of thesecond region 8610B, and the internal height of thesecond region 8610B is larger than that of thefirst region 8610A. - (a) of
FIG. 87 is an opened-up plan view of thefluidic channel 8610. (b) ofFIG. 87 is an opened-up side view of thefluidic channel 8610 shown in (a) ofFIG. 87 . Referring toFIG. 87 , afine structure 8630 moves along the flow of the fluid 8612 in thefirst region 8610A of thefluidic channel 8610. As shown in the drawings, thefine structure 8630 is laid inside the rail of thefirst region 8610A, and has aguide 8632 positioned at either side surface thereof. - (a) of
FIG. 88 is an opened-up plan view of thefluidic channel 8610, and (b) ofFIG. 88 is an opened-up side view of thefluidic channel 8610 shown in (a) ofFIG. 88 . Referring toFIG. 88 , when thefine structure 8630 enters thesecond region 8610B of thefluidic channel 8610, thefine structure 8610 is erected. As shown in (b) ofFIG. 88 , some of the fluid 8612 entering thesecond region 8610B from thefirst region 8610A flows in the upward direction of thesecond region 8610B. Such a flow of the fluid 8612 erects thefine structure 8630. At this time, therail 8620 and theguide 8632 serve to set a path of thefine structure 8630 and to rotate thefine structure 8630. - (a) of
FIG. 89 is an opened-up plan view of thefluidic channel 8610, and (b) ofFIG. 89 is an opened-up side view of thefluidic channel 8610 shown in (a) ofFIG. 89 . As shown inFIG. 89 , the flow of the fluid 8612 in the second region 8010B completely erects the fine structure 8030. - The fluidic channel system according to the above-described embodiments can be changed, modified, and remodeled, as will be described below.
- According to some embodiments, a single light projection apparatus or a plurality of light projection apparatuses may be mounted on the system. According to some embodiments, the light projection apparatus may be mounted to be fixed to the fluidic channel. Alternatively, the light projection apparatus may be mounted to move linearly around the fluidic channel or along a two- or three-dimensional path. When a plurality of light projection apparatuses are used, fine structures can be simultaneously produced in different portions of a single fluidic channel or a plurality of fluidic channels. When the movable light projection apparatus is used, it is possible to produce a fine structure having an arbitrary shape in an arbitrary portion inside the fluidic channel. Further, when a movable light projection apparatus is used, it is possible to produce a fine structure having a three-dimensional shape, which cannot be produced by a fixed light projection apparatus.
- According to some embodiments, the system can produce a fine structure having a variety of physical, electrical, or chemical properties by adjusting the intensity or wavelength of light radiated from the light projection apparatus. Further, when a mixture of different photocurable fluids flows inside the fluidic channel or different photocurable fluids flow while forming an interface, the system adjusts the wavelength of light radiated from the light projection apparatus temporally or spatially, so that different photocuring reactions are sequentially performed inside the fluidic channel. Then, a fine structure of which each portion has a different property may be formed.
- According to some embodiments, the rail can be configured to be suitable for moving, arranging, or coupling the fine structure, in consideration of various characteristics of a photocurable material and the fine structure produced from the photocurable material. In one example, a rail is configured in such a manner that the fine structure produced through a predetermined path can physically move via the path. If necessary, the fine structure may be configured to be arranged based on the path or to be coupled based on the path or arrangement. Such a rail can move, arrange, or couple the fine structure, without forming a specific portion in the fine structure. In another example, a rail forms a predetermined path, a fine structure includes a portion having a predetermined shape, and the rail is configured to physically move the fine structure to the path by using the portion. If necessary, the fine structure may be configured to be arranged based on the path or the shape of the portion, or to be coupled based on the path or arrangement. In still another example, a rail forms a predetermined path, and a chemical, electrical, or magnetic attractive force or a chemical, electrical, or magnetic repulsive force is generated depending on the chemical, electrical, or magnetic property of a produced fine structure. Then, the fine structure can be moved to the path by the attractive or repulsive force. If necessary, the fine structure may be configured to be arranged based on the path or the shape of the portion, or to be coupled based on the path or arrangement.
- According to some embodiments, it is possible to configure a fluidic channel system using electromagnetic wave curing, unlike the embodiments of the fluidic system using photocuring. That is, it is possible to configure a fluidic channel system in which the light projection apparatus is replaced with an electron beam generator, the photocurable fluid is replaced with an electromagnetic wave curable fluid, and a proper processor is used. The electromagnetic wave curable fluid may be acryl, methylmethacrylate (MMA), stylen, PEG or the like. Further, according to some embodiments, it is possible to configure a fluidic channel system using electric curing. That is, it is possible to configure a fluidic channel system to which the above-described various embodiments are applied and in which the light projection apparatus is replaced with an electric energy generator, the photocurable fluid is replaced with an electrically curable fluid, and a proper processor is used. The electrically curable fluid may be MMA or stylen which is polymerized in an electrochemical reaction such as oxidization or reduction at an electrode. Further, according to some embodiments, it is possible to configure a fluidic channel system using thermal curing. That is, it is possible to configure a fluidic channel system to which the above-described various embodiments are applied and in which the light projection apparatus is replaced with a heat energy source, the photocurable fluid is replaced with thermally curable fluid, and a proper processor is used. The thermally curable fluid may be acryl, MMA, stylen, PEG, or the like. Further, according to some embodiments, it is possible to configure a fluidic channel system using magnetic curing. That is, it is possible to a fluidic channel system to which the above-described various embodiments are applied and in which the light projection apparatus is replaced with a magnetic energy generator, the photocurable fluid is replaced with magnetically curable fluid, and a proper processor is used. The magnetically curable fluid may be a mixture of magnetic particles and a thermally curable material. When the mixture reacts with a magnetic field, the magnetic particles are heated by an induced electromotive force to polymerize the thermally curable material therearound. Therefore, the mixture can be used as the magnetically curable fluid. Further, according to some embodiments, it is possible to configure a fluidic channel system using particle energy curing. That is, it is possible to configure a fluidic channel system to which the above-described various embodiments are applied and in which the light projection apparatus is replaced with a particle energy generator, the photocurable fluid is replaced with particle energy curable fluid, and a proper process is used. The particle energy curable fluid may be acryl, MMA, stylen, PEG, or the like.
- The foregoing is illustrative of the present disclosure and is not to be construed as limiting thereof. Although numerous embodiments of the present disclosure have been described, those skilled in the art will readily appreciate that many modifications are possible in the embodiments without materially departing from the novel teachings and advantages of the present disclosure. Accordingly, all such modifications are intended to be included within the scope of the present disclosure as defined in the claims. Therefore, it is to be understood that the foregoing is illustrative of the present disclosure, which is not to be construed as limited to the specific embodiments disclosed, and that modifications to the disclosed embodiments, as well as other embodiments, are intended to be included within the scope of the appended claims. The present disclosure is defined by the following claims, with equivalents of the claims to be included therein.
Claims (51)
1. A method for fabricating a fine structure, comprising:
providing a photocurable fluid to a fluidic channel having a rail along which a fine structure can move;
producing the fine structure by radiating light on the photocurable fluid such that the photocurable fluid is selectively cured; and
moving the fine structure along the rail.
2. The method according to claim 1 , wherein in moving the fine structure, as the fine structure moves along the rail, the fine structure moves in a different direction from the flow direction of the photocurable fluid flowing in the fluidic channel.
3. The method according to claim 1 , wherein in producing the fine structure, a guide which prevents the fine structure from coming off of the rail is produced.
4. The method according to claim 3 , wherein the rail has a groove shape and the guide has a protrusion shape.
5. The method according to claim 4 , wherein the width of the rail in a region where the fine structure is produced is smaller than that in a region where the fine structure moves.
6. The method according to claim 4 , wherein one end of the guide has a wedge shape, and a tip of the wedge-shaped end is not positioned at the center of the guide but rather leans in any one direction of both side surfaces of the guide.
7. The method according to claim 6 , wherein the rail diverges into two branches, and in moving the fine structure, the leaning direction of the tip of the wedge-shaped end determines to which of the two branches the fine structure is to be moved.
8. The method according to claim 3 , wherein the rail has a protrusion shape and the guide has a groove shape.
9. The method according to claim 8 , wherein the width of the rail in a region where the fine structure is produced is larger than that in a region where the fine structure moves.
10. The method according to claim 3 , wherein in producing the fine structure, the fine structure and the guide are simultaneously formed by radiating the light on a region of the fluidic channel where the rail is disposed.
11. The method according to claim 3 , wherein in producing the fine structure, the fine structure and the guide are simultaneously formed by radiating the light having a transparent region and a semi-transparent region.
12. The method according to claim 3 , wherein the fluidic channel comprises first to third regions, the first and second regions have no rail disposed therein, the third region has a rail disposed therein, and the internal height of the second region is larger than that of the first region, the light comprises first and second lights which are provided at different times, and the producing of the fine structure comprises: forming a body of the fine structure by radiating the first light onto the first region; and forming the guide by radiating the second light onto the body of the fine structure moved to the second region.
13. The method according to claim 3 , wherein the guide has a discontinuous shape.
14. The method according to claim 1 , wherein the moving of the fine structure comprises:
moving the fine structure inside the photocurable fluid along the rail;
moving the fine structure along the rail such that the fine structure passes through an interface between the photocurable fluid and an additional fluid; and
moving the fine structure inside the additional fluid along the rail.
15. The method according to claim 1 , wherein the moving of the fine structure comprises:
moving the fine structure inside the photocurable fluid along the rail;
moving the fine structure along the rail such that the fine structure passes through an interface between the photocurable fluid and an additional fluid;
moving the fine structure inside the additional fluid along the rail; and
selectively curing the additional fluid such that a portion formed by curing the additional fluid is added to the fine structure.
16. The method according to claim 1 , wherein the fine structure comprises a magnetic material, a magnetic field is applied to the fluidic channel, the rail diverges into two branches, and in moving the fine structure, a magnetic force applied to the fine structure determines to which of the two branches the fine structure is to be moved.
17. The method according to claim 1 , wherein the fine structure comprises a magnetic material, a magnetic field is applied to the fluidic channel, and in moving the fine structure, the fine structure is moved along the rail by a magnetic force applied to the fine structure, even though the photocurable fluid does not flow.
18. The method according to claim 1 , wherein the fine structure comprises a magnetic material, a magnetic field is applied to the fluidic channel, and in moving the fine structure, the fine structure is moved against the flow of the photocurable fluid by a magnetic force applied to the fine structure.
19. The method according to claim 1 , further comprising:
moving an additional fine structure produced in an additional rail to the rail.
20. The method according to claim 1 , further comprising:
stopping the fine structure at an end of the rail.
21. The method according to claim 20 , further comprising:
stopping one or more additional fine structures behind the fine structure stopped at the end of the rail to form a one-dimensional array.
22. The method according to claim 21 , further comprising:
integrating the one-dimensional array by providing additional light onto the one-dimensional array.
23. The method according to claim 21 , wherein the one-dimensional array is integrated by latches provided in the fine structure and the additional fine structures, the latches coupling each of the fine structures to at least one adjacent fine structure.
24. The method according to claim 21 , further comprising:
moving the one-dimensional array along additional rails which are connected to the rail and are arranged in a different direction from the rail, and stopping the one-dimensional array at ends of the additional rails;
forming an additional one-dimensional array at the end of the rail; and
moving the additional one-dimensional array along the additional rails, and stopping the additional one-dimensional array behind the one-dimensional array to form a two-dimensional array.
25. The method according to claim 24 , further comprising:
integrating the two-dimensional array by providing additional light to the two-dimensional array.
26. The method according to claim 24 , wherein the two-dimensional array is integrated by latches provided in the respective fine structures of the two-dimensional array, the latches coupling each of the fine structures to at least one adjacent fine structure.
27. The method according to claim 21 , further comprising:
forming a two-dimensional array by forming one or more additional one-dimensional arrays in one or more additional rails provided in the fluidic channel, at the same time as or a different time from the forming of the one-dimensional array.
28. The method according to claim 27 , further comprising:
integrating the two-dimensional array by providing additional light onto the two-dimensional array.
29. The method according to claim 1 , wherein the photocurable fluid contains a chip, and the producing of the fine structure comprises producing a package covering at least a region of the chip by selectively curing the photocurable fluid.
30. A method for conveying a fine structure, comprising:
providing a fluid to a fluidic channel having a rail along which a fine structure can move; and
moving the fine structure having a guide along the rail, the guide preventing the fine structure from coming off of the rail.
31. The method according to claim 30 , wherein in moving the fine structure, as the fine structure moves along the rail, the fine structure moves in a different direction from the flow direction of the fluid flowing in the fluidic channel.
32. The method according to claim 30 , wherein the rail has a groove shape and the guide has a protrusion shape.
33. The method according to claim 32 , wherein the guide has a wedge-shaped end, and a tip of the wedge-shaped end is not positioned at the center of the guide but rather leans in any one direction of both surfaces of the guide.
34. The method according to claim 33 , wherein the rail diverges into two branches, and in moving the fine structure, the leaning direction of the tip determines to which of the two branches the fine structure is to be moved.
35. The method according to claim 32 , wherein the width of the rail and the width of the guide increase toward the outside of the fluidic channel.
36. The method according to claim 32 , wherein the rail is recessed in a T shape and the guide protrudes in a T shape.
37. The method according to claim 30 , wherein the rail has a protrusion shape and the guide has a groove shape.
38. The method according to claim 37 , wherein the width of the rail and the width of the guide decrease toward the outside of the fluidic channel.
39. The method according to claim 37 , wherein the rail protrudes in a T shape and the guide is recessed in a T shape.
40. The method according to claim 30 , wherein the moving of the fine structure comprises:
moving the fine structure inside the fluid along the rail;
moving the fine structure along the rail such that the fine structure passes through an interface between the fluid and an additional fluid; and
moving the fine structure inside the additional fluid along the rail.
41. The method according to claim 30 , wherein the fine structure comprises a magnetic material, a magnetic field is applied to the fluidic channel, the rail diverges into two branches, and in moving the fine structure, a magnetic force applied to the fine structure determines to which of the two branches the fine structure is to be moved.
42. The method according to claim 30 , wherein the fine structure comprises a magnetic material, a magnetic field is applied to the fluidic channel, and in moving the fine structure, the fine structure is moved along the rail by a magnetic force applied to the fine structure, even though the fluid does not flow.
43. The method according to claim 42 , wherein the fluid comprises a gas.
44. The method according to claim 30 , wherein the fine structure comprises a magnetic material, a magnetic field is applied to the fluidic channel, and in moving the fine structure, the fine structure is moved against the flow of the fluid by a magnetic force applied to the fine structure.
45. The method according to claim 30 , further comprising:
moving an additional fine structure provided to an additional rail to the rail.
46. The method according to claim 30 , further comprising:
stopping the fine structure at an end of the rail.
47. The method according to claim 46 , further comprising:
stopping one or more additional fine structures behind the fine structure stopped at the end of the rail to form a one-dimensional array.
48. The method according to claim 47 , further comprising:
integrating the one-dimensional array by providing additional light onto the one-dimensional array.
49. The method according to claim 47 , further comprising:
moving the one-dimensional array along additional rails which are connected to the rail and are arranged in a different direction from the rail, and stopping the one-dimensional array at ends of the additional rails;
forming an additional one-dimensional array at the end of the rail; and
moving the additional one-dimensional array along the additional rails, and stopping the additional one-dimensional array behind the one-dimensional array to form a two-dimensional array.
50. The method according to claim 47 , further comprising:
forming a two-dimensional array by forming one or more additional one-dimensional arrays in one or more additional rails provided in the fluidic channel, at the same time as or a different time from the forming of the one-dimensional array.
51. The method according to claim 46 , further comprising:
aligning the guide with the rail by expanding the guide.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US13/800,428 US20130207315A1 (en) | 2007-10-05 | 2013-03-13 | Fludic channel system and method for fabricating fine structure |
Applications Claiming Priority (9)
Application Number | Priority Date | Filing Date | Title |
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KR10-2007-0100472 | 2007-10-05 | ||
KR1020070100472A KR100893167B1 (en) | 2007-10-05 | 2007-10-05 | Fluidic channel, fluidic channel system, method for fabricating a fine structure, and method for conveying a fine structure |
KR10-2008-0075302 | 2008-07-31 | ||
KR1020080075190A KR100968490B1 (en) | 2008-07-31 | 2008-07-31 | method and system for transporting fine structure |
KR1020080075302A KR101038233B1 (en) | 2008-07-31 | 2008-07-31 | method and system for fabricating and handling fine structure |
KR10-2008-0075190 | 2008-07-31 | ||
PCT/KR2008/005787 WO2009045050A2 (en) | 2007-10-05 | 2008-10-01 | Fluidic channel system and method for fabricating fine structure |
US68169810A | 2010-04-05 | 2010-04-05 | |
US13/800,428 US20130207315A1 (en) | 2007-10-05 | 2013-03-13 | Fludic channel system and method for fabricating fine structure |
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PCT/KR2008/005787 Division WO2009045050A2 (en) | 2007-10-05 | 2008-10-01 | Fluidic channel system and method for fabricating fine structure |
US68169810A Division | 2007-10-05 | 2010-04-05 |
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US12/681,698 Active 2029-05-27 US8408892B2 (en) | 2007-10-05 | 2008-10-01 | Fluidic channel system and method for fabricating fine structure |
US13/800,428 Abandoned US20130207315A1 (en) | 2007-10-05 | 2013-03-13 | Fludic channel system and method for fabricating fine structure |
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US12/681,698 Active 2029-05-27 US8408892B2 (en) | 2007-10-05 | 2008-10-01 | Fluidic channel system and method for fabricating fine structure |
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WO (1) | WO2009045050A2 (en) |
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WO2017035484A1 (en) | 2015-08-26 | 2017-03-02 | EMULATE, Inc. | Perfusion manifold assembly |
WO2020033865A1 (en) * | 2018-08-09 | 2020-02-13 | Hummingbird Nano, Inc. | Microfluidic device and method of manufacture |
Citations (1)
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US20050172476A1 (en) * | 2002-06-28 | 2005-08-11 | President And Fellows Of Havard College | Method and apparatus for fluid dispersion |
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US5575962A (en) | 1994-12-02 | 1996-11-19 | Lucent Technologies Inc. | Method for fabricating optical quality molds with precision microfeatures |
JP4307771B2 (en) | 2001-12-26 | 2009-08-05 | 財団法人川村理化学研究所 | Manufacturing method of microfluidic device |
DE602004011696T2 (en) * | 2003-03-27 | 2009-02-19 | Terumo K.K. | Medical irradiation device |
KR100588805B1 (en) | 2004-02-11 | 2006-06-14 | 이상훈 | Apparatus and Methods for Manufacturing micro-structure |
US7709544B2 (en) | 2005-10-25 | 2010-05-04 | Massachusetts Institute Of Technology | Microstructure synthesis by flow lithography and polymerization |
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US20050172476A1 (en) * | 2002-06-28 | 2005-08-11 | President And Fellows Of Havard College | Method and apparatus for fluid dispersion |
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WO2009045050A2 (en) | 2009-04-09 |
WO2009045050A3 (en) | 2009-05-22 |
US8408892B2 (en) | 2013-04-02 |
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