US20110201156A1 - Method of manufacturing wafer level package including coating resin over the dicing lines - Google Patents
Method of manufacturing wafer level package including coating resin over the dicing lines Download PDFInfo
- Publication number
- US20110201156A1 US20110201156A1 US13/064,878 US201113064878A US2011201156A1 US 20110201156 A1 US20110201156 A1 US 20110201156A1 US 201113064878 A US201113064878 A US 201113064878A US 2011201156 A1 US2011201156 A1 US 2011201156A1
- Authority
- US
- United States
- Prior art keywords
- resin
- dicing lines
- chips
- level package
- wafer level
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 229920005989 resin Polymers 0.000 title claims abstract description 53
- 239000011347 resin Substances 0.000 title claims abstract description 53
- 239000011248 coating agent Substances 0.000 title claims abstract description 17
- 238000000576 coating method Methods 0.000 title claims abstract description 17
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 239000008393 encapsulating agent Substances 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims description 17
- 229920005992 thermoplastic resin Polymers 0.000 claims description 5
- 229920001187 thermosetting polymer Polymers 0.000 claims description 5
- 238000000465 moulding Methods 0.000 description 8
- 238000012858 packaging process Methods 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000005538 encapsulation Methods 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 239000013043 chemical agent Substances 0.000 description 2
- 238000000748 compression moulding Methods 0.000 description 2
- 238000001723 curing Methods 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000001721 transfer moulding Methods 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 238000003848 UV Light-Curing Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- 238000004148 unit process Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/561—Batch processing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/16—Fillings or auxiliary members in containers or encapsulations, e.g. centering rings
- H01L23/18—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device
- H01L23/24—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device solid or gel at the normal operating temperature of the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/94—Batch processes at wafer-level, i.e. with connecting carried out on a wafer comprising a plurality of undiced individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3511—Warping
Definitions
- the present invention relates to a method of manufacturing a wafer level package; and, more particularly, to a method of manufacturing a wafer level package to coat resin on a dicing line formed on a substrate wafer.
- a conventional package is manufactured by cutting a wafer having a plurality of chips along dicing lines to be divided into individual chips and then performing a packaging process for each of the individual chips.
- the packaging process includes a lot of unit processes, e.g., chip attaching, wire bonding, molding, trimming/forming or the like
- a conventional method of manufacturing the package to perform the packaging process by each of the chips has a disadvantage of needing a very long time for packaging all of the chips when considering the number of the chips obtained from one wafer.
- the surface of the molding resin is formed to be flat.
- the CTE(Coefficient of Thermal Expansion) of the molding resin is more than double to ten times the CTE of the wafer and so the molding resin may be considerably contracted due to heat generated in the molding process, which causes a warpage phenomenon where the wafer is rolled and makes the dicing lines unseen.
- the present invention has been invented in order to overcome the above-described problems and it is, therefore, an object of the present invention to provide a method of manufacturing a wafer level package capable of preventing a warpage phenomenon where a wafer is rolled in an encapsulation process by coating resin on dicing lines formed on a substrate wafer and of smoothly performing dicing work by cutting a wafer level package along dicing lines exposed by removing the resin.
- a method of manufacturing a wafer level package including the steps of: preparing a substrate wafer including a plurality of pads formed on a bottom surface, a plurality of chips positioned on a top surface, and dicing lines for dividing the chips; forming external connection units on the pads; coating resin on the dicing lines by positioning masks on the substrate wafer to expose only the dicing lines; removing the masks; encapsulating the chips positioned between the resin by coating the chips with encapsulant; removing the resin coated on the dicing lines; and cutting a wafer level package along the dicing lines exposed by removing the resin into units.
- the resin can be formed of any one of transparent, translucent, or opaque photocurable, thermosetting, and thermoplastic resin in the step of coating the resin on the dicing lines.
- the method further includes a step of: curing the resin after the step of coating the resin on the dicing lines.
- the encapsulant can be formed of liquid resin or solid epoxy mold compound in the step of encapsulating the chips on the substrate with the encapsulant.
- the encapsulant can be coated by any one of printing, dispensing, dipping, spin coating, compression molding, and transfer molding in the step of encapsulating the chips on the substrate with the encapsulant.
- the resin can be removed by a wet method or a plasma method in the step of removing the resin coated on the dicing lines.
- a method of manufacturing a wafer level package including the steps of: preparing a substrate wafer including a plurality of pads formed on a bottom surface, a plurality of chips positioned on a top surface, and dicing lines for dividing the chips; forming external connection units on the pads; coating resin on the dicing lines by positioning masks on the substrate wafer to expose only the dicing lines; removing the masks; encapsulating the chips positioned between the resin by coating the chips with encapsulant; and cutting a wafer level package along the dicing lines coated with the resin into units.
- the resin can be formed of any one of transparent photocurable, thermosetting, and thermoplastic resin in the step of coating the resin on the dicing lines.
- FIGS. 1 to 8 are cross-sectional views sequentially illustrating a method of manufacturing a wafer level package in accordance with an embodiment of the present invention.
- FIG. 9 is a cross-sectional view illustrating a method of manufacturing a wafer level package in accordance with another embodiment of the present invention.
- FIGS. 1 to 8 are cross-sectional views sequentially illustrating a method of manufacturing a wafer level package in accordance with an embodiment of the present invention
- FIG. 9 is a cross-sectional view illustrating a method of manufacturing a wafer level package in accordance with another embodiment of the present invention.
- a substrate wafer 110 including a plurality of pads 113 formed on a bottom surface, a plurality of chips 115 positioned on a top surface, and dicing lines for dividing the chips 115 .
- the dicing lines are formed at equal intervals in a row direction and a column direction in which the chips 115 are positioned and can be processed by any one of a sanding process where the surface of the substrate wafer 110 is slightly cut or carved, an etching process as a surface processing method applying erosive action of chemical agents or an ultrasound process as another surface processing method using ultrasound vibration.
- material of the substrate wafer 110 as a substrate used in a semiconductor process can be silicon, ceramic, glass, polymer, and so on.
- the external connection units 120 are formed on the pads 113 of the substrate wafer 110 .
- the external connection units 120 can be solder balls which are electrically connected through the medium of the pads 113 .
- the external connection units 120 can be formed of solder bumps with another shape other than the solder balls.
- resin 140 a is coated on the dicing lines after positioning masks 130 on the substrate wafer 110 to expose only the dicing lines. At this time, the resin 140 a coated on the surfaces of the masks 130 is pushed in the dicing lines with a squeeze 142 to be uniformly coated. And, any one of a mask patterned by photoresist or a screen printing mask can be used as the mask. Further, it is preferable that the resin 140 a and 140 b is formed of any one of transparent, translucent, or opaque photocurable, thermosetting, and thermoplastic resin.
- the masks 130 are removed.
- the resin 140 a is cured by irradiating ultraviolet rays through a UV curing system or applying heat at more than a predetermined temperature. Therefore, the resin 140 a is firmly fixed between the chips 115 positioned on the substrate wafer 110 , i.e., on the dicing lines for dividing the chips 115 .
- the chips 115 positioned between the resin 140 a are encapsulated by being coated with encapsulant 150 in order to finish a wafer level package.
- the encasulant 150 can be made of liquid resin, solid epoxy mold compound, or the like and the encapsulant can be coated by any one of printing, dispensing, dipping, spin coating, compression molding, and transfer molding.
- the resin 140 a formed on the dicing lines for dividing the chips 115 narrows a region where stress generated due to a CTE(Coefficient of Thermal Expansion) difference between the encapsulant 150 and the substrate wafer 110 is transmitted in order to reduce the stress so that power contracting the substrate wafer 110 in an encapsulation process can be distributed. Therefore, it is possible to improve a warpage phenomenon of the substrate wafer 110 .
- the resin 140 a is removed.
- the resin 140 a can be removed by a wet method using chemical agents such as permanganate or a plasma method using plasma as an aggregate of particles consisting of ion-nuclei and free electrons, which is formed by continuing to apply heat to material of a gaseous state in order to increase a temperature.
- dicing work can be performed along the dicing lines coated with the resins 140 without removing the resin 140 b as shown in FIG. 9 .
- a process before the step of coating the resin 140 b on the dicing lines is performed similarly, while a step of removing the resins 140 b is omitted, thereby enhancing workability and productivity.
- the wafer level package is cut along the dicing lines exposed by removing the resins 140 a into units. Accordingly, dicing work can be smoothly accomplished by cutting it along the exposed dicing lines.
- the dicing work of the wafer level package is performed with a dicing blade(not shown in the drawings), wherein the dicing blade is a semiconductor wafer processing device capable of exactly cutting a subject at a high speed without attaching shavings to a cutting surface.
- the dicing blade is a semiconductor wafer processing device capable of exactly cutting a subject at a high speed without attaching shavings to a cutting surface.
- the method of manufacturing the wafer level package in accordance with the present invention can narrow the region where the stress generated due to the CTE difference between the encapsulant 150 and the substrate wafer 110 is transmitted in the encapsulation process in order to reduce the stress by coating the resin 140 a and 140 b on the dicing lines formed on the substrate wafer 110 , so that the power by which the substrate wafer 110 is contracted can be distributed in order to improve the warpage phenomenon of the substrate wafer 110 .
- the dicing work can be smoothly accomplished by cutting it along the exposed dicing lines, thereby remarkably enhancing quality and yield of the wafer level package. Consequently, the workability and the productivity of the wafer level package can be enhanced.
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Dicing (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Abstract
A method of manufacturing a wafer level package including: preparing a substrate wafer including a plurality of pads formed on a bottom surface, a plurality of chips positioned on a top surface, and dicing lines for dividing the chips; forming external connection units on the pads; coating resin on the dicing lines by positioning masks on the substrate wafer to expose only the dicing lines; removing the masks; encapsulating the chips positioned between the resin by coating the chips with encapsulant and cutting a wafer level package along the dicing lines coated with the resin into units.
Description
- This application is a U.S. divisional application filed under 37 USC 1.53(b) claiming priority benefit of U.S. Ser. No. 12/453,273 filed in the United States on May 5, 2009, which claims earlier priority benefit to Korean Patent Application No. 10-2008-0130219 filed with the Korean Intellectual Property Office on Dec. 19, 2008, the disclosures of which are incorporated herein by reference.
- 1. Field
- The present invention relates to a method of manufacturing a wafer level package; and, more particularly, to a method of manufacturing a wafer level package to coat resin on a dicing line formed on a substrate wafer.
- 2. Description of the Related Art
- A conventional package is manufactured by cutting a wafer having a plurality of chips along dicing lines to be divided into individual chips and then performing a packaging process for each of the individual chips.
- However, because the packaging process includes a lot of unit processes, e.g., chip attaching, wire bonding, molding, trimming/forming or the like, a conventional method of manufacturing the package to perform the packaging process by each of the chips has a disadvantage of needing a very long time for packaging all of the chips when considering the number of the chips obtained from one wafer.
- Therefore, recently, there has been suggested a wafer level package method of manufacturing an individual package by firstly performing the packaging process in a wafer level and then cutting a wafer level package along dicing lines of a wafer.
- In the wafer level package, it is general that after a molding process is performed on the wafer provided with a chip or the like by using molding resin such as EMC(Epoxy Mold Compound), the surface of the molding resin is formed to be flat. However, if the molding resin has the flat surface, the CTE(Coefficient of Thermal Expansion) of the molding resin is more than double to ten times the CTE of the wafer and so the molding resin may be considerably contracted due to heat generated in the molding process, which causes a warpage phenomenon where the wafer is rolled and makes the dicing lines unseen.
- The present invention has been invented in order to overcome the above-described problems and it is, therefore, an object of the present invention to provide a method of manufacturing a wafer level package capable of preventing a warpage phenomenon where a wafer is rolled in an encapsulation process by coating resin on dicing lines formed on a substrate wafer and of smoothly performing dicing work by cutting a wafer level package along dicing lines exposed by removing the resin.
- In accordance with one aspect of the present invention to achieve the object, there is provided a method of manufacturing a wafer level package including the steps of: preparing a substrate wafer including a plurality of pads formed on a bottom surface, a plurality of chips positioned on a top surface, and dicing lines for dividing the chips; forming external connection units on the pads; coating resin on the dicing lines by positioning masks on the substrate wafer to expose only the dicing lines; removing the masks; encapsulating the chips positioned between the resin by coating the chips with encapsulant; removing the resin coated on the dicing lines; and cutting a wafer level package along the dicing lines exposed by removing the resin into units.
- Further, the resin can be formed of any one of transparent, translucent, or opaque photocurable, thermosetting, and thermoplastic resin in the step of coating the resin on the dicing lines.
- Further, the method further includes a step of: curing the resin after the step of coating the resin on the dicing lines.
- Further, the encapsulant can be formed of liquid resin or solid epoxy mold compound in the step of encapsulating the chips on the substrate with the encapsulant.
- Further, the encapsulant can be coated by any one of printing, dispensing, dipping, spin coating, compression molding, and transfer molding in the step of encapsulating the chips on the substrate with the encapsulant.
- Further, the resin can be removed by a wet method or a plasma method in the step of removing the resin coated on the dicing lines.
- In accordance with another aspect of the present invention to achieve the object, there is provided a method of manufacturing a wafer level package including the steps of: preparing a substrate wafer including a plurality of pads formed on a bottom surface, a plurality of chips positioned on a top surface, and dicing lines for dividing the chips; forming external connection units on the pads; coating resin on the dicing lines by positioning masks on the substrate wafer to expose only the dicing lines; removing the masks; encapsulating the chips positioned between the resin by coating the chips with encapsulant; and cutting a wafer level package along the dicing lines coated with the resin into units.
- Further, the resin can be formed of any one of transparent photocurable, thermosetting, and thermoplastic resin in the step of coating the resin on the dicing lines.
- These and/or other aspects and advantages of the present general inventive concept will become apparent and more readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
-
FIGS. 1 to 8 are cross-sectional views sequentially illustrating a method of manufacturing a wafer level package in accordance with an embodiment of the present invention; and -
FIG. 9 is a cross-sectional view illustrating a method of manufacturing a wafer level package in accordance with another embodiment of the present invention. - Hereinafter, a matter regarding to an operation effect including a technical configuration for a method of manufacturing a wafer level package in accordance with the present invention will be appreciated clearly through the following detailed description with reference to the accompanying drawings illustrating preferable embodiments of the present invention.
- Methods of manufacturing wafer level packages in accordance with embodiments of the present invention will be described in detail with reference to
FIGS. 1 to 9 . -
FIGS. 1 to 8 are cross-sectional views sequentially illustrating a method of manufacturing a wafer level package in accordance with an embodiment of the present invention andFIG. 9 is a cross-sectional view illustrating a method of manufacturing a wafer level package in accordance with another embodiment of the present invention. - At first, as shown in
FIG. 1 , there is prepared asubstrate wafer 110 including a plurality ofpads 113 formed on a bottom surface, a plurality ofchips 115 positioned on a top surface, and dicing lines for dividing thechips 115. - At this time, the dicing lines are formed at equal intervals in a row direction and a column direction in which the
chips 115 are positioned and can be processed by any one of a sanding process where the surface of thesubstrate wafer 110 is slightly cut or carved, an etching process as a surface processing method applying erosive action of chemical agents or an ultrasound process as another surface processing method using ultrasound vibration. - And, inside the substrate wafer 110, there can be further formed via holes(not shown in the drawings) for electrical connection between the
chips 115 andexternal connection units 120 to be formed on thepads 113 later. - Herein, material of the substrate wafer 110 as a substrate used in a semiconductor process can be silicon, ceramic, glass, polymer, and so on.
- Then, as illustrated in
FIG. 2 , theexternal connection units 120 are formed on thepads 113 of thesubstrate wafer 110. Theexternal connection units 120 can be solder balls which are electrically connected through the medium of thepads 113. At this time, theexternal connection units 120 can be formed of solder bumps with another shape other than the solder balls. - Then, as shown in
FIG. 3 ,resin 140 a is coated on the dicing lines after positioningmasks 130 on thesubstrate wafer 110 to expose only the dicing lines. At this time, theresin 140 a coated on the surfaces of themasks 130 is pushed in the dicing lines with asqueeze 142 to be uniformly coated. And, any one of a mask patterned by photoresist or a screen printing mask can be used as the mask. Further, it is preferable that theresin - Then, as illustrated in
FIGS. 4 and 5 , after curing theresin 140 a for a predetermined time, themasks 130 are removed. At this time, theresin 140 a is cured by irradiating ultraviolet rays through a UV curing system or applying heat at more than a predetermined temperature. Therefore, theresin 140 a is firmly fixed between thechips 115 positioned on thesubstrate wafer 110, i.e., on the dicing lines for dividing thechips 115. - Then, as shown in
FIG. 6 , thechips 115 positioned between theresin 140 a are encapsulated by being coated withencapsulant 150 in order to finish a wafer level package. The encasulant 150 can be made of liquid resin, solid epoxy mold compound, or the like and the encapsulant can be coated by any one of printing, dispensing, dipping, spin coating, compression molding, and transfer molding. - At this time, the
resin 140 a formed on the dicing lines for dividing thechips 115 narrows a region where stress generated due to a CTE(Coefficient of Thermal Expansion) difference between theencapsulant 150 and thesubstrate wafer 110 is transmitted in order to reduce the stress so that power contracting the substrate wafer 110 in an encapsulation process can be distributed. Therefore, it is possible to improve a warpage phenomenon of thesubstrate wafer 110. - Then, as shown in
FIG. 7 , theresin 140 a is removed. At this time, theresin 140 a can be removed by a wet method using chemical agents such as permanganate or a plasma method using plasma as an aggregate of particles consisting of ion-nuclei and free electrons, which is formed by continuing to apply heat to material of a gaseous state in order to increase a temperature. - However, in case that the
resin 140 b is coated on the dicing lines by using any one of the transparent photocurable, thermosetting, and thermoplastic resin in a step of coating the resin on the dicing lines, dicing work can be performed along the dicing lines coated with the resins 140 without removing theresin 140 b as shown inFIG. 9 . In this case, a process before the step of coating theresin 140 b on the dicing lines is performed similarly, while a step of removing theresins 140 b is omitted, thereby enhancing workability and productivity. - Then, as shown in
FIG. 8 , the wafer level package is cut along the dicing lines exposed by removing theresins 140 a into units. Accordingly, dicing work can be smoothly accomplished by cutting it along the exposed dicing lines. - And, the dicing work of the wafer level package is performed with a dicing blade(not shown in the drawings), wherein the dicing blade is a semiconductor wafer processing device capable of exactly cutting a subject at a high speed without attaching shavings to a cutting surface. As described above, if the wafer level package is diced along the exposed dicing lines, a region to be diced by the dicing blade is reduced in order to reduce pressure applied to the dicing blade, thereby increasing durability and wear resistance of the dicing blade.
- As described above, the method of manufacturing the wafer level package in accordance with the present invention can narrow the region where the stress generated due to the CTE difference between the
encapsulant 150 and thesubstrate wafer 110 is transmitted in the encapsulation process in order to reduce the stress by coating theresin substrate wafer 110, so that the power by which thesubstrate wafer 110 is contracted can be distributed in order to improve the warpage phenomenon of thesubstrate wafer 110. - Further, thereafter, in case that the
resin 140 a is removed, the dicing work can be smoothly accomplished by cutting it along the exposed dicing lines, thereby remarkably enhancing quality and yield of the wafer level package. Consequently, the workability and the productivity of the wafer level package can be enhanced. - As described above, although the preferable embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that substitutions, modifications and changes may be made in this embodiment without departing from the principles and spirit of the general inventive concept, the scope of which is defined in the appended claims and their equivalents.
Claims (2)
1. A method of manufacturing a wafer level package comprising:
preparing a substrate wafer including a plurality of pads formed on a bottom surface, a plurality of chips positioned on a top surface, and dicing lines for dividing the chips;
forming external connection units on the pads;
coating resin on the dicing lines by positioning masks on the substrate wafer to expose only the dicing lines;
removing the masks;
encapsulating the chips positioned between the resin by coating the chips with encapsulant; and
cutting a wafer level package along the dicing lines coated with the resin into units.
2. The method of claim 1 , wherein the resin is formed of any one of transparent photocurable, thermosetting, and thermoplastic resin in the coating the resin on the dicing lines.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/064,878 US20110201156A1 (en) | 2008-12-19 | 2011-04-22 | Method of manufacturing wafer level package including coating resin over the dicing lines |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080130219A KR20100071485A (en) | 2008-12-19 | 2008-12-19 | Manufacturing method of wafer level package |
KR10-2008-0130219 | 2008-12-19 | ||
US12/453,273 US7947530B2 (en) | 2008-12-19 | 2009-05-05 | Method of manufacturing wafer level package including coating and removing resin over the dicing lines |
US13/064,878 US20110201156A1 (en) | 2008-12-19 | 2011-04-22 | Method of manufacturing wafer level package including coating resin over the dicing lines |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/453,273 Division US7947530B2 (en) | 2008-12-19 | 2009-05-05 | Method of manufacturing wafer level package including coating and removing resin over the dicing lines |
Publications (1)
Publication Number | Publication Date |
---|---|
US20110201156A1 true US20110201156A1 (en) | 2011-08-18 |
Family
ID=42266723
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/453,273 Expired - Fee Related US7947530B2 (en) | 2008-12-19 | 2009-05-05 | Method of manufacturing wafer level package including coating and removing resin over the dicing lines |
US13/064,878 Abandoned US20110201156A1 (en) | 2008-12-19 | 2011-04-22 | Method of manufacturing wafer level package including coating resin over the dicing lines |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/453,273 Expired - Fee Related US7947530B2 (en) | 2008-12-19 | 2009-05-05 | Method of manufacturing wafer level package including coating and removing resin over the dicing lines |
Country Status (3)
Country | Link |
---|---|
US (2) | US7947530B2 (en) |
JP (1) | JP2010147453A (en) |
KR (1) | KR20100071485A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107424965A (en) * | 2016-05-23 | 2017-12-01 | 力成科技股份有限公司 | Prevent the manufacture method and its board structure of the semiconductor package of substrate warp |
US10971662B2 (en) | 2015-06-19 | 2021-04-06 | Samsung Electronics Co., Ltd. | Light emitting diode package and method of manufacturing the same |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100167471A1 (en) | 2008-12-30 | 2010-07-01 | Stmicroelectronics Asia Pacific Pte. Ltd. | Reducing warpage for fan-out wafer level packaging |
KR101095094B1 (en) * | 2009-10-26 | 2011-12-16 | 삼성전기주식회사 | A method of manufacturing a wafer level package |
US20110156239A1 (en) * | 2009-12-29 | 2011-06-30 | Stmicroelectronics Asia Pacific Pte Ltd. | Method for manufacturing a fan-out embedded panel level package |
US8502367B2 (en) | 2010-09-29 | 2013-08-06 | Stmicroelectronics Pte Ltd. | Wafer-level packaging method using composite material as a base |
JP2012195388A (en) * | 2011-03-15 | 2012-10-11 | Toshiba Corp | Semiconductor device manufacturing method and semiconductor device |
KR101867489B1 (en) | 2012-06-20 | 2018-06-14 | 삼성전자주식회사 | Method of fabricating a Wafer level package |
CN112805820A (en) * | 2018-11-30 | 2021-05-14 | 北京比特大陆科技有限公司 | Chip manufacturing method and chip structure |
CN111170271A (en) * | 2019-12-30 | 2020-05-19 | 杭州臻镭微波技术有限公司 | Coordination method for chip cutting errors in embedded micro-system module |
CN114242870B (en) * | 2021-12-22 | 2022-09-20 | 鸿利智汇集团股份有限公司 | Wafer support, wafer support plate and wafer packaging method |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20010031851A1 (en) * | 2000-02-15 | 2001-10-18 | Takao Fukuzawa | Thermosetting resin composition |
US20040095872A1 (en) * | 2002-11-14 | 2004-05-20 | Sharp Kabushiki Kaisha | Optical pickup device and its manufacturing method |
JP2006083229A (en) * | 2004-09-14 | 2006-03-30 | Fujitsu Ltd | Thermosetting resin composition and thermosetting resin film |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1213754A3 (en) * | 1994-03-18 | 2005-05-25 | Hitachi Chemical Co., Ltd. | Fabrication process of semiconductor package and semiconductor package |
JPH1027971A (en) * | 1996-07-10 | 1998-01-27 | Nec Corp | Dicing method for organic thin film multilayer wiring board |
KR100225324B1 (en) | 1996-12-21 | 1999-10-15 | 권호택 | Dicing method |
JP3351345B2 (en) * | 1998-06-26 | 2002-11-25 | カシオ計算機株式会社 | Semiconductor device and manufacturing method thereof |
JP2000040773A (en) * | 1998-07-23 | 2000-02-08 | Sony Corp | Resin-sealed semiconductor device and manufacture thereof |
KR100345165B1 (en) | 2000-08-05 | 2002-07-24 | 주식회사 칩팩코리아 | Sawing method of semiconductor package |
JP2002353763A (en) * | 2001-05-29 | 2002-12-06 | Mitsubishi Electric Corp | Manufacturing method for piezoelectric element device |
JP4206885B2 (en) * | 2003-09-26 | 2009-01-14 | ソニー株式会社 | Manufacturing method of semiconductor device |
-
2008
- 2008-12-19 KR KR1020080130219A patent/KR20100071485A/en not_active Application Discontinuation
-
2009
- 2009-03-27 JP JP2009080137A patent/JP2010147453A/en active Pending
- 2009-05-05 US US12/453,273 patent/US7947530B2/en not_active Expired - Fee Related
-
2011
- 2011-04-22 US US13/064,878 patent/US20110201156A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20010031851A1 (en) * | 2000-02-15 | 2001-10-18 | Takao Fukuzawa | Thermosetting resin composition |
US20040095872A1 (en) * | 2002-11-14 | 2004-05-20 | Sharp Kabushiki Kaisha | Optical pickup device and its manufacturing method |
JP2006083229A (en) * | 2004-09-14 | 2006-03-30 | Fujitsu Ltd | Thermosetting resin composition and thermosetting resin film |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10971662B2 (en) | 2015-06-19 | 2021-04-06 | Samsung Electronics Co., Ltd. | Light emitting diode package and method of manufacturing the same |
CN107424965A (en) * | 2016-05-23 | 2017-12-01 | 力成科技股份有限公司 | Prevent the manufacture method and its board structure of the semiconductor package of substrate warp |
Also Published As
Publication number | Publication date |
---|---|
KR20100071485A (en) | 2010-06-29 |
US20100159646A1 (en) | 2010-06-24 |
US7947530B2 (en) | 2011-05-24 |
JP2010147453A (en) | 2010-07-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7947530B2 (en) | Method of manufacturing wafer level package including coating and removing resin over the dicing lines | |
US11881415B2 (en) | Method of packaging chip and chip package structure | |
US10615056B2 (en) | Method of packaging chip and chip package structure | |
TWI578460B (en) | Semiconductor package assembly and method for forming the same | |
US8729714B1 (en) | Flip-chip wafer level package and methods thereof | |
US9012269B2 (en) | Reducing warpage for fan-out wafer level packaging | |
TWI414027B (en) | Chip-sized package and fabrication method thereof | |
US20080085572A1 (en) | Semiconductor packaging method by using large panel size | |
US20080187613A1 (en) | Method of manufacturing wafer-level chip-size package and molding apparatus used in the method | |
US20070155049A1 (en) | Method for Manufacturing Chip Package Structures | |
JP2006190975A (en) | Sealant filling structure of wafer-level package, and manufacturing method thereof | |
WO2017000852A1 (en) | Method of manufacturing fan-out wafer-level package | |
CN109887890B (en) | Fan-out type inverted packaging structure and preparation method thereof | |
US9786520B2 (en) | Semiconductor device and manufacturing method thereof | |
TWI421956B (en) | Chip-sized package and fabrication method thereof | |
JP2004179345A (en) | Substrate sheet material for semiconductor and manufacturing method therefor, and molding method using the substrate sheet material and method for manufacturing semiconductor device | |
US10461019B2 (en) | Package with backside protective layer during molding to prevent mold flashing failure | |
Takekoshi et al. | Warpage suppression during FO-WLP fabrication process | |
TWI713849B (en) | Semiconductor manufacturing process and semiconductor structure | |
US7863094B2 (en) | Method for removing bubbles from adhesive layer of semiconductor chip package | |
US6933179B1 (en) | Method of packaging semiconductor device | |
US20080265462A1 (en) | Panel/wafer molding apparatus and method of the same | |
JP2022155336A (en) | Detection device and manufacturing method thereof | |
Fürgut et al. | Process and Equipment for eWLB: Chip Embedding by Molding | |
JP2009038300A (en) | Method for manufacturing semiconductor package |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |