US20110101073A1 - Automatic wire feeding system for wire bonders - Google Patents
Automatic wire feeding system for wire bonders Download PDFInfo
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- US20110101073A1 US20110101073A1 US12/608,279 US60827909A US2011101073A1 US 20110101073 A1 US20110101073 A1 US 20110101073A1 US 60827909 A US60827909 A US 60827909A US 2011101073 A1 US2011101073 A1 US 2011101073A1
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- wire
- pneumatic device
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- bonding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
- B23K20/004—Wire welding
- B23K20/005—Capillary welding
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- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/42—Printed circuits
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- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
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Definitions
- the invention relates to wire bonders, and in particular to wire-feeding systems for wire bonders.
- Automatic wire bonders are used during semiconductor assembly and packaging for making electrical wire connections between electrical contact pads on a die and a substrate, or between electrical contact pads on different dice. Wire is fed from a wire spool containing bonding wire, typically gold or copper wire, to a bonding tool such as a capillary for performing wire bonding at the bonding tool.
- bonding wire typically gold or copper wire
- FIG. 1 is a side view of a wire feeding route of a conventional wire bonder.
- Bonding wire 100 for instance gold or copper wire, is fed from a wire spool (not shown) into a pneumatic device 102 which is operative to apply vertical vacuum suction forces upwards or downwards to urge movement of the bonding wire 100 in these directions.
- a wire guider 104 is located some distance away from the pneumatic device 102 and it has a small hole for threading and guiding the bonding wire 100 along the feeding route.
- a wire clamp 106 is located below the wire guider 104 to clamp onto the bonding wire 100 when movement of the bonding wire 100 is to be restrained.
- the bonding wire 100 is then passed through a capillary 108 located at one end of a transducer horn 110 . Wire bonding is conducted at a bottom tip of the capillary 108 .
- a shortcoming of such a conventional wire bonder design is that wire threading has to be conducted manually when the bonding wire is being set up for wire bonding. Due to the small dimensions of the bonding wire and devices it has to be threaded through, a skilled technician is required to perform manual wire threading, and even then, the process itself is a time-consuming one.
- broken wire may occur during wire bonding due to various reasons, such as short tail arising from premature termination of a tail bond, missing ball leading to incorrect formation of a ball bond, and other reasons.
- the wire bonder needs to be stopped and the bonding wire has to be rethreaded manually again, thereby incurring unnecessarily long downtimes and incurring penalties in terms of productivity.
- a method for feeding wire to a bonding tool of a wire bonder comprising the steps of: locating the wire in a pneumatic device; urging the wire with the pneumatic device to feed through a clamping point of a wire clamp located adjacent to the pneumatic device and a hole of a wire guider located adjacent to the wire clamp between the wire clamp and the bonding tool; and urging the wire with the pneumatic device to feed through the bonding tool.
- a method for feeding wire to a bonding tool of a wire bonder when a broken wire is detected during wire bonding and the wire is separated from the bonding tool comprising the steps of: clamping the wire with a wire clamp while the wire is located in a pneumatic device; feeding a length of wire from a wire source towards the pneumatic device; opening the wire clamp to unclamp the wire; urging the wire with the pneumatic device to feed through a hole of a wire guider which is located adjacent to the bonding tool between the pneumatic device and the bonding tool; and urging the wire with the pneumatic device to feed through the bonding tool.
- an apparatus for feeding wire to a bonding tool of a wire bonder comprising: a pneumatic device that is operative to urge the wire to feed through an outlet of the pneumatic device towards the bonding tool; a wire clamp located adjacent to the outlet of the pneumatic device; and a wire guider with a hole which is located adjacent to the wire clamp between the wire clamp and the bonding tool for threading the wire through the hole before being fed to the bonding tool.
- FIG. 1 is a side view of a wire feeding route of a conventional wire bonder
- FIG. 2 is a side view of a wire feeding route of a wire bonder according to a first preferred embodiment of the invention
- FIG. 3 is a side view of a wire feeding route of a wire bonder according to a second preferred embodiment of the invention.
- FIG. 4 is an illustration of an automatic wire feeding process during wire bonding according to the preferred embodiment of the invention.
- FIG. 5 illustrates how a desired tail length of the bonding wire may be automatically obtained.
- FIG. 2 is a side view of a wire feeding route of a wire bonder according to a first preferred embodiment of the invention.
- An upper wire clamp 12 is located between a wire source such as a wire spool (not shown) and a pneumatic device 14 along the wire feeding route of a length of bonding wire 10 .
- the bonding wire 10 such as gold or copper wire, is supplied from the wire spool and fed into the pneumatic device 14 .
- the pneumatic device 14 is operative to apply vertical forces to urge the bonding wire 10 to move upwards to pull the bonding wire 10 , or downwards to feed the bonding wire 10 through an outlet of the pneumatic device 14 towards a bonding tool.
- a lower wire clamp 16 located along the wire feeding route.
- the lower wire clamp 16 is operable to clamp onto the bonding wire 10 at a clamping point to restrain its movement during wire bonding.
- a vacuum suction force is applied on the bonding wire 10 to urge and feed it through the clamping point of the lower wire clamp 16 in a direction towards the bonding tool.
- the lower wire clamp 16 should be as close to the pneumatic device 14 as possible. The larger the distance, the greater the risk of bonding wire 10 being fed outside the confines of the lower wire clamp 16 , which may then lead to wire bend and failed wire threading. Thus, where the lower wire clamp 16 is rotatable between an upper position and a lower position, then at the upper position of the lower wire clamp 16 when it is swung upwards, the distance between the outlet of the pneumatic device 14 and the lower wire clamp 16 should preferably be between 0.5 mm and 10 mm.
- the wire guider 18 is located adjacent to the lower wire clamp 16 between the lower wire clamp 16 and the bonding tool.
- the wire guider 18 may be mounted onto a base of the lower wire clamp 16 and has a small hole for threading and guiding the bonding wire 10 through the hole along the wire feeding route to the bonding tool.
- the bonding wire 10 is then fed to the bonding tool, such as a capillary 20 located at one end of a transducer horn 22 .
- the transducer horn 22 may be part of an ultrasonic transducer. Bonding wire 10 protruding from a lower tip of the capillary 20 is used to perform wire bonding at the tip of the capillary 20 .
- bonding wire 10 may also be fed towards the capillary 20 by swinging up the transducer horn 22 together with the capillary 20 towards the wire guider 18 while restraining movement of the bonding wire 10 by clamping the bonding wire 10 with the upper wire clamp 12 .
- This action forces bonding wire 10 to be fed to the capillary 20 and is an alternative to providing a pneumatic downwards force at the pneumatic device 14 .
- Another advantage of this feeding action of swinging up the transducer horn 22 and capillary 20 is that, by ensuring adequate feeding of bonding wire to the tip of the capillary 20 , it helps to eliminate or reduce the risk of short tail or missing ball occurring.
- FIG. 3 is a side view of a wire feeding route of a wire bonder according to a second preferred embodiment of the invention.
- the second preferred embodiment is similar to the first preferred embodiment, except that there is no upper wire clamp 12 . Therefore, the second preferred embodiment not including the upper wire clamp 12 will not be discussed in further detail.
- bonding wire 10 is first manually inserted into the pneumatic device 14 by an operator to locate the bonding wire 10 in the pneumatic device 14 . Thereafter, the pneumatic device 14 is activated to apply a downwards vacuum suction force onto the bonding wire 10 . The downwards vacuum suction force will automatically push the bonding wire 10 through the lower wire clamp 16 , wire guider 18 and capillary 20 until the bonding wire 10 protrudes through the tip of the capillary 20 . The wire bonder is now ready to perform wire bonding.
- FIG. 4 is an illustration of an automatic wire feeding process during wire bonding according to the preferred embodiment of the invention.
- a broken wire 24 is encountered during wire bonding.
- a spring force in the bonding wire 10 causes the broken wire 24 to recoil and to be separated from the capillary 20 .
- the upper wire clamp 12 is immediately closed to clamp the bonding wire 10 while the bonding wire 10 is located in the pneumatic device 14 so as to prevent any further retraction of the bonding wire 10 .
- the lower wire clamp 16 should also be closed for this purpose. If there is no upper wire clamp 12 as in the second preferred embodiment, then only the lower wire clamp 16 will close onto the bonding wire 10 to restrain its movement.
- a downwards vacuum suction force is automatically activated in the pneumatic device 14 onto the bonding wire 10 in order to urge the bonding wire 10 downwards into the wire guider 18 towards the capillary 20 .
- the upper and lower wire clamps 12 , 16 are opened to unclamp the bonding wire 10 to feed a length of the bonding wire 10 from the wire spool towards the pneumatic device 14 for feeding bonding wire 10 to the capillary 20 .
- the wire spool should feed a certain length of bonding wire 10 to the pneumatic device 14 as a buffer to prevent the bonding wire 10 from recoiling and flying away from the pneumatic device 14 due to tension in the bonding wire 10 .
- the bonding wire 10 is fed through the hole of the wire guider 18 and the capillary 20 before protruding from the tip of the capillary 20 so that wire bonding may continue without any operator intervention in respect of the broken wire.
- FIG. 5 illustrates how a desired tail length of the bonding wire may be automatically obtained.
- the bonding tool 20 is first positioned above a conductive surface 26 , such as a lead frame, a printed copper pad on a printed circuit board or a window clamp which clamps onto a material to be bonded during wire bonding.
- the distance from the lower tip of the bonding tool 20 to the conductive surface 26 is set at a desired tail length of the bonding wire 10 .
- the lower wire clamp 16 rapidly opens and closes to control the feeding rate of the bonding wire 10 .
- bond stick detection is continuously performed at short intervals to determine the exact point in time when the bonding wire 10 contacts the conductive surface 26 .
- Bond stick detection is a typical feature in bonding machines and refers to a process during wire bonding wherein the bonding apparatus checks whether an electrical current is passing through the bonding wire 10 . If so, this indicates a closed electrical circuit formed by the bonding wire 10 . When a closed electrical circuit is detected indicating contact between the bonding wire 10 and the conductive surface 26 , further feeding of bonding wire 10 to the bonding tool 20 is stopped so that the correct tail length is automatically obtained.
- the automatic wire feeding systems reduce manual intervention for threading bonding wire in a wire bonding system. This frees up skilled labour to perform other tasks and also improves productivity by shortening the time required for threading bonding wire. Moreover, with the assistance of a upper wire clamp 12 above the pneumatic device 14 , a wire bonding process can be speeded up by reducing delay for making a second bond through more reliable feeding of bonding wire 10 to the capillary 20 .
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- Mechanical Engineering (AREA)
- Wire Bonding (AREA)
Abstract
Description
- The invention relates to wire bonders, and in particular to wire-feeding systems for wire bonders.
- Automatic wire bonders are used during semiconductor assembly and packaging for making electrical wire connections between electrical contact pads on a die and a substrate, or between electrical contact pads on different dice. Wire is fed from a wire spool containing bonding wire, typically gold or copper wire, to a bonding tool such as a capillary for performing wire bonding at the bonding tool.
- Along the feeding route of the wire between the wire spool and the capillary, the wire passes through various devices, which may include a pneumatic device and a wire clamp for controlling feeding of the wire during wire bonding.
FIG. 1 is a side view of a wire feeding route of a conventional wire bonder.Bonding wire 100, for instance gold or copper wire, is fed from a wire spool (not shown) into apneumatic device 102 which is operative to apply vertical vacuum suction forces upwards or downwards to urge movement of thebonding wire 100 in these directions. Awire guider 104 is located some distance away from thepneumatic device 102 and it has a small hole for threading and guiding thebonding wire 100 along the feeding route. Awire clamp 106 is located below thewire guider 104 to clamp onto thebonding wire 100 when movement of thebonding wire 100 is to be restrained. Thebonding wire 100 is then passed through a capillary 108 located at one end of atransducer horn 110. Wire bonding is conducted at a bottom tip of thecapillary 108. - A shortcoming of such a conventional wire bonder design is that wire threading has to be conducted manually when the bonding wire is being set up for wire bonding. Due to the small dimensions of the bonding wire and devices it has to be threaded through, a skilled technician is required to perform manual wire threading, and even then, the process itself is a time-consuming one.
- Moreover, broken wire may occur during wire bonding due to various reasons, such as short tail arising from premature termination of a tail bond, missing ball leading to incorrect formation of a ball bond, and other reasons. Each time there is a broken wire, the wire bonder needs to be stopped and the bonding wire has to be rethreaded manually again, thereby incurring unnecessarily long downtimes and incurring penalties in terms of productivity.
- It is thus an object of the invention to seek to provide a system and method for automatically threading the wire of a wire bonder, such as in cases of broken wire, in order to help to free valuable skilled labour for other tasks, and to reduce machine downtime.
- According to a first aspect of the invention, there is provided a method for feeding wire to a bonding tool of a wire bonder, comprising the steps of: locating the wire in a pneumatic device; urging the wire with the pneumatic device to feed through a clamping point of a wire clamp located adjacent to the pneumatic device and a hole of a wire guider located adjacent to the wire clamp between the wire clamp and the bonding tool; and urging the wire with the pneumatic device to feed through the bonding tool.
- According to a second aspect of the invention, there is provided a method for feeding wire to a bonding tool of a wire bonder when a broken wire is detected during wire bonding and the wire is separated from the bonding tool, comprising the steps of: clamping the wire with a wire clamp while the wire is located in a pneumatic device; feeding a length of wire from a wire source towards the pneumatic device; opening the wire clamp to unclamp the wire; urging the wire with the pneumatic device to feed through a hole of a wire guider which is located adjacent to the bonding tool between the pneumatic device and the bonding tool; and urging the wire with the pneumatic device to feed through the bonding tool.
- According to a third aspect of the invention, there is provided an apparatus for feeding wire to a bonding tool of a wire bonder, comprising: a pneumatic device that is operative to urge the wire to feed through an outlet of the pneumatic device towards the bonding tool; a wire clamp located adjacent to the outlet of the pneumatic device; and a wire guider with a hole which is located adjacent to the wire clamp between the wire clamp and the bonding tool for threading the wire through the hole before being fed to the bonding tool.
- It would be convenient hereinafter to describe the invention in greater detail by reference to the accompanying drawings which illustrate one embodiment of the invention. The particularity of the drawings and the related description is not to be understood as superseding the generality of the broad identification of the invention as defined by the claims.
- Examples of preferred embodiments of a system and method in accordance with the invention will now be described with reference to the accompanying drawings, in which:
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FIG. 1 is a side view of a wire feeding route of a conventional wire bonder; -
FIG. 2 is a side view of a wire feeding route of a wire bonder according to a first preferred embodiment of the invention; -
FIG. 3 is a side view of a wire feeding route of a wire bonder according to a second preferred embodiment of the invention; -
FIG. 4 is an illustration of an automatic wire feeding process during wire bonding according to the preferred embodiment of the invention; and -
FIG. 5 illustrates how a desired tail length of the bonding wire may be automatically obtained. -
FIG. 2 is a side view of a wire feeding route of a wire bonder according to a first preferred embodiment of the invention. Anupper wire clamp 12 is located between a wire source such as a wire spool (not shown) and apneumatic device 14 along the wire feeding route of a length ofbonding wire 10. Thebonding wire 10, such as gold or copper wire, is supplied from the wire spool and fed into thepneumatic device 14. Thepneumatic device 14 is operative to apply vertical forces to urge thebonding wire 10 to move upwards to pull thebonding wire 10, or downwards to feed thebonding wire 10 through an outlet of thepneumatic device 14 towards a bonding tool. - Immediately below the
pneumatic device 14 and located adjacent to the outlet of thepneumatic device 14 is alower wire clamp 16 located along the wire feeding route. Thelower wire clamp 16 is operable to clamp onto thebonding wire 10 at a clamping point to restrain its movement during wire bonding. When thepneumatic device 14 is activated, a vacuum suction force is applied on thebonding wire 10 to urge and feed it through the clamping point of thelower wire clamp 16 in a direction towards the bonding tool. - The
lower wire clamp 16 should be as close to thepneumatic device 14 as possible. The larger the distance, the greater the risk of bondingwire 10 being fed outside the confines of thelower wire clamp 16, which may then lead to wire bend and failed wire threading. Thus, where thelower wire clamp 16 is rotatable between an upper position and a lower position, then at the upper position of thelower wire clamp 16 when it is swung upwards, the distance between the outlet of thepneumatic device 14 and thelower wire clamp 16 should preferably be between 0.5 mm and 10 mm. - The
wire guider 18 is located adjacent to thelower wire clamp 16 between thelower wire clamp 16 and the bonding tool. Thewire guider 18 may be mounted onto a base of thelower wire clamp 16 and has a small hole for threading and guiding thebonding wire 10 through the hole along the wire feeding route to the bonding tool. Thebonding wire 10 is then fed to the bonding tool, such as a capillary 20 located at one end of atransducer horn 22. Thetransducer horn 22 may be part of an ultrasonic transducer.Bonding wire 10 protruding from a lower tip of thecapillary 20 is used to perform wire bonding at the tip of thecapillary 20. - Furthermore, with the assistance of an
upper wire clamp 12, bondingwire 10 may also be fed towards the capillary 20 by swinging up thetransducer horn 22 together with the capillary 20 towards thewire guider 18 while restraining movement of thebonding wire 10 by clamping thebonding wire 10 with theupper wire clamp 12. This action forces bondingwire 10 to be fed to the capillary 20 and is an alternative to providing a pneumatic downwards force at thepneumatic device 14. Another advantage of this feeding action of swinging up thetransducer horn 22 and capillary 20 is that, by ensuring adequate feeding of bonding wire to the tip of thecapillary 20, it helps to eliminate or reduce the risk of short tail or missing ball occurring. -
FIG. 3 is a side view of a wire feeding route of a wire bonder according to a second preferred embodiment of the invention. The second preferred embodiment is similar to the first preferred embodiment, except that there is noupper wire clamp 12. Therefore, the second preferred embodiment not including theupper wire clamp 12 will not be discussed in further detail. - For feeding of bonding
wire 10 prior to commencing wire bonding, bondingwire 10 is first manually inserted into thepneumatic device 14 by an operator to locate thebonding wire 10 in thepneumatic device 14. Thereafter, thepneumatic device 14 is activated to apply a downwards vacuum suction force onto thebonding wire 10. The downwards vacuum suction force will automatically push thebonding wire 10 through thelower wire clamp 16,wire guider 18 and capillary 20 until thebonding wire 10 protrudes through the tip of thecapillary 20. The wire bonder is now ready to perform wire bonding. -
FIG. 4 is an illustration of an automatic wire feeding process during wire bonding according to the preferred embodiment of the invention. InFIG. 4( a), abroken wire 24 is encountered during wire bonding. A spring force in thebonding wire 10 causes thebroken wire 24 to recoil and to be separated from thecapillary 20. Thus, once the bonding system detects a broken wire during wire bonding, theupper wire clamp 12 is immediately closed to clamp thebonding wire 10 while thebonding wire 10 is located in thepneumatic device 14 so as to prevent any further retraction of thebonding wire 10. Thelower wire clamp 16 should also be closed for this purpose. If there is noupper wire clamp 12 as in the second preferred embodiment, then only thelower wire clamp 16 will close onto thebonding wire 10 to restrain its movement. - In
FIG. 4( b), a downwards vacuum suction force is automatically activated in thepneumatic device 14 onto thebonding wire 10 in order to urge thebonding wire 10 downwards into thewire guider 18 towards thecapillary 20. At the same time, the upper andlower wire clamps bonding wire 10 to feed a length of thebonding wire 10 from the wire spool towards thepneumatic device 14 for feedingbonding wire 10 to thecapillary 20. Also, prior to opening the upper andlower wire clamps wire 10 to thepneumatic device 14 as a buffer to prevent the bondingwire 10 from recoiling and flying away from thepneumatic device 14 due to tension in thebonding wire 10. With the proper application of this downwards force by thepneumatic device 14, thebonding wire 10 is fed through the hole of thewire guider 18 and the capillary 20 before protruding from the tip of the capillary 20 so that wire bonding may continue without any operator intervention in respect of the broken wire. -
FIG. 5 illustrates how a desired tail length of the bonding wire may be automatically obtained. Thebonding tool 20 is first positioned above aconductive surface 26, such as a lead frame, a printed copper pad on a printed circuit board or a window clamp which clamps onto a material to be bonded during wire bonding. The distance from the lower tip of thebonding tool 20 to theconductive surface 26 is set at a desired tail length of thebonding wire 10. As thebonding wire 10 is urged to feed through thebonding tool 20, thelower wire clamp 16 rapidly opens and closes to control the feeding rate of thebonding wire 10. - Meanwhile, bond stick detection is continuously performed at short intervals to determine the exact point in time when the
bonding wire 10 contacts theconductive surface 26. Bond stick detection is a typical feature in bonding machines and refers to a process during wire bonding wherein the bonding apparatus checks whether an electrical current is passing through thebonding wire 10. If so, this indicates a closed electrical circuit formed by thebonding wire 10. When a closed electrical circuit is detected indicating contact between thebonding wire 10 and theconductive surface 26, further feeding ofbonding wire 10 to thebonding tool 20 is stopped so that the correct tail length is automatically obtained. - It should be appreciated that the automatic wire feeding systems according to the preferred embodiments of the invention reduce manual intervention for threading bonding wire in a wire bonding system. This frees up skilled labour to perform other tasks and also improves productivity by shortening the time required for threading bonding wire. Moreover, with the assistance of a
upper wire clamp 12 above thepneumatic device 14, a wire bonding process can be speeded up by reducing delay for making a second bond through more reliable feeding ofbonding wire 10 to the capillary 20. - The invention described herein is susceptible to variations, modifications and/or additions other than those specifically described and it is to be understood that the invention includes all such variations, modifications and/or additions which fall within the spirit and scope of the above description.
Claims (19)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/608,279 US8459530B2 (en) | 2009-10-29 | 2009-10-29 | Automatic wire feeding method for wire bonders |
CN2009102238530A CN102054718B (en) | 2009-10-29 | 2009-11-24 | Automatic wire feeding system for wire bonders |
MYPI2010004787 MY152404A (en) | 2009-10-29 | 2010-10-12 | Automatic wire feeding system for wire bonders |
TW099134652A TWI495527B (en) | 2009-10-29 | 2010-10-12 | Automatic wire feeding system for wire bonders |
KR1020100104427A KR101257673B1 (en) | 2009-10-29 | 2010-10-26 | Automatic wire feeding system for wire bonders |
SG201007892-1A SG170713A1 (en) | 2009-10-29 | 2010-10-27 | Automatic wire feeding system for wire bonders |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/608,279 US8459530B2 (en) | 2009-10-29 | 2009-10-29 | Automatic wire feeding method for wire bonders |
Publications (2)
Publication Number | Publication Date |
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US20110101073A1 true US20110101073A1 (en) | 2011-05-05 |
US8459530B2 US8459530B2 (en) | 2013-06-11 |
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ID=43924336
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US12/608,279 Active 2031-05-17 US8459530B2 (en) | 2009-10-29 | 2009-10-29 | Automatic wire feeding method for wire bonders |
Country Status (6)
Country | Link |
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US (1) | US8459530B2 (en) |
KR (1) | KR101257673B1 (en) |
CN (1) | CN102054718B (en) |
MY (1) | MY152404A (en) |
SG (1) | SG170713A1 (en) |
TW (1) | TWI495527B (en) |
Cited By (5)
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US20150200143A1 (en) * | 2014-01-15 | 2015-07-16 | Kulicke And Soffa Industries, Inc. | Short tail recovery techniques in wire bonding operations |
US20150246411A1 (en) * | 2012-11-16 | 2015-09-03 | Shinkawa Ltd. | Wire-bonding apparatus and method of wire bonding |
US9397066B2 (en) * | 2014-12-01 | 2016-07-19 | Freescale Semiconductor, Inc. | Bond wire feed system and method therefor |
TWI587416B (en) * | 2013-01-25 | 2017-06-11 | 先進科技新加坡有限公司 | A wire bonder and method of calibrating a wire bonder |
US11842978B1 (en) * | 2022-07-15 | 2023-12-12 | Asmpt Singapore Pte. Ltd. | Wire bonding system including a wire biasing tool |
Families Citing this family (5)
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PH12012000317A1 (en) * | 2011-10-25 | 2014-08-04 | Asm Tech Singapore Pte Ltd | Automatic wire tail adjustment system for wire bonders |
TWI566875B (en) * | 2014-02-24 | 2017-01-21 | 新川股份有限公司 | Wire tensioner |
US9461013B2 (en) * | 2014-11-21 | 2016-10-04 | Asm Technology Singapore Pte Ltd | Wire spool system for a wire bonding apparatus |
US10679962B2 (en) * | 2016-02-09 | 2020-06-09 | Texas Instruments Incorporated | Capillary jig for wire bonding and method of installing a capillary |
US11420287B2 (en) | 2019-09-29 | 2022-08-23 | Ningbo Shangjin Automation Technology Co., Ltd. | Wire clamping system for fully automatic wire bonding machine |
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2010
- 2010-10-12 TW TW099134652A patent/TWI495527B/en active
- 2010-10-12 MY MYPI2010004787 patent/MY152404A/en unknown
- 2010-10-26 KR KR1020100104427A patent/KR101257673B1/en active IP Right Grant
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Also Published As
Publication number | Publication date |
---|---|
KR101257673B1 (en) | 2013-04-24 |
US8459530B2 (en) | 2013-06-11 |
MY152404A (en) | 2014-09-30 |
TWI495527B (en) | 2015-08-11 |
SG170713A1 (en) | 2011-05-30 |
CN102054718B (en) | 2013-10-30 |
KR20110047141A (en) | 2011-05-06 |
CN102054718A (en) | 2011-05-11 |
TW201132439A (en) | 2011-10-01 |
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