US20090199647A1 - Differential fluid pressure measurement apparatus - Google Patents
Differential fluid pressure measurement apparatus Download PDFInfo
- Publication number
- US20090199647A1 US20090199647A1 US12/069,522 US6952208A US2009199647A1 US 20090199647 A1 US20090199647 A1 US 20090199647A1 US 6952208 A US6952208 A US 6952208A US 2009199647 A1 US2009199647 A1 US 2009199647A1
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- United States
- Prior art keywords
- sense element
- fluid pressure
- pressure sensor
- sensor apparatus
- passageway
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
Definitions
- This invention relates generally to apparatus for measuring fluid pressure and more particularly to such apparatus providing a media isolated differential pressure sensor using two diaphragms for placement in fluid communication with respective high and low pressure sources.
- Solid state pressure sense elements such as piezoresistive pressure sense elements
- An incompressible fluid typically silicone oil
- silicone oil is used to transfer pressure from the diaphragm to the sense element. It is conventional to provide first and second diaphragms facing opposite directions with the sense element disposed therebetween.
- substances such as soot, water, condensate from the media on the diaphragm that could damage the sensor, it is often required to place the diaphragms in a drainable orientation relative to gravity and to the pressure ports.
- the diaphragm surfaces are oriented parallel to the direction of gravity. This results in a high aspect ratio which may also require the use of a bulky mounting bracket as shown in the patent to provide desired rigidity. Further, mounting of the diaphragms so that they face in opposite directions can result in having to use separate housing members that each needs to be robust with the sensed media.
- a base is formed with a passageway extending between openings at two spaced apart diaphragm mounting surfaces that face a common direction.
- One opening is enlarged and receives a fluid pressure responsive sense element, such as a piezoresistive sense element assembly.
- the diaphragms and the passageway form two chambers that are filled with incompressible oil to transmit pressure to the sense element.
- Having both diaphragms on one side of the base simplifies the assembly process. For example, forming adhesive rings for attachment of the diaphragms, positioning the diaphragms on the rings and curing the adhesive can be done at the same time for both diaphragms.
- the sense element is connected with wire bonds to one end of terminal pins with the other end of the pins bonded to a printed circuit board having conditioning circuits and this in turn is connected to connector terminals by means of metal springs.
- a sealant is placed around the pins to prevent oil leaks through the pin/base interface.
- FIG. 1 is a top plan view of a sensor assembly made in accordance with a first preferred embodiment of the invention
- FIG. 2 is a cross sectional view taken on line 2 - 2 of FIG. 1 ;
- FIG. 3 is a bottom plan view of the sense element module shown in the FIG. 2 assembly but shown prior to the installation of the metallic diaphragms;
- FIG. 4 is a cross sectional view of the FIG. 3 module taken through a passageway formed through the module;
- FIG. 5 is an enlarged portion of the FIG. 3 showing details of the sense element assembly
- FIG. 6 is a cross sectional view taken along line 6 - 6 of FIG. 5 ;
- FIG. 7 is a top plan view of the sense element module shown in reduced scale
- FIG. 8 is a cross sectional view taken along line 8 - 8 of FIG. 7 ;
- FIG. 9 is an enlarged cross sectional view similar to FIG. 4 but shown after the diaphragms have been attached and the oil chambers have been filled;
- FIG. 10 is a bottom plan view of a modified sense element module
- FIG. 11 is a cross sectional view taken along line 11 - 11 of FIG. 10 ;
- FIG. 12 is a cross sectional view taken along line 12 - 12 of FIG. 10 ;
- FIG. 13 is a bottom plan view of another modified sense element module.
- FIG. 14 is a cross sectional view taken along line 14 - 14 of FIG. 13 .
- a differential fluid pressure sensor assembly 10 made in accordance with a first preferred embodiment of the invention comprises an upper housing 12 of suitable moldable material such as PEI (polyetherimide) formed with a connector portion 12 a having three insert molded terminals 12 b (one of which is shown in FIG. 2 ).
- Upper housing 12 is formed with a recess for receipt of a sense element module 14 between metal bushings 16 for mounting the assembly to a support having ports of a high and a low fluid pressure source to be monitored.
- a lower housing 18 of suitable moldable material, such as PEI is received in the recess of upper housing 12 below the pressure sense module as viewed in FIG. 2 .
- An environmental O-ring 20 is disposed in a seat formed in a circuit chamber 12 c formed between upper housing 12 and the top surface of sense element 14 .
- a circuit board 22 is disposed on top of sense element module 14 within chamber 12 c.
- a contact spring 24 extends in a suitable bore in the wall of upper housing 12 between each respective end 12 d of terminals 12 b and circuit board 22 , as shown by one such spring shown in FIG. 2 .
- the bores are sealed with suitable material, such as RTV, following assembly and calibration.
- Sense element module 14 comprises a body mounting first and second, side-by-side, generally circular metallic discs 14 a , 14 b to be discussed in further detail below.
- Lower housing 18 is formed with an O-ring seat aligned with each disc 14 a , 14 b for receipt of O-rings 26 .
- Respective ports 18 a and 18 b preferably are formed with a grill like arrangement, such as cross bars defining openings to allow fluid flow therethrough, the FIG. 2 cross section being taken through one of the bars.
- External O-rings 28 are placed in suitable O-ring seats in the bottom surface of lower housing 18 around each port 18 a , 18 b to provide a fluid seal between the sensor assembly 10 and the housing (not shown) containing the high and low fluid pressure sources.
- sense element module 14 is shown prior to the installation of flexible metal diaphragms.
- Sense element module 14 is formed generally as a solid plate like base of suitable material, such as PPS (polyphenylene sulfide), having a flat bottom surface 14 c .
- Recesses 14 d are formed in bottom surface 14 c configured to accommodate metal discs 14 a , 14 b so that the bottom surface of discs 14 a , 14 b face the same direction and preferably lie in a common plane.
- Discs 14 a , 14 b are each formed with a window 14 f through the respective disc and recesses 14 d are configured to extend into each window and form a channel 14 e of a selected depth entirely around the perimeter of each window; the channel filled with an elastomeric sealant to prevent oil leaks.
- a generally U-shaped passageway 14 g is formed through the base of the module leading from an opening in surface 14 c in window 14 f of disc 14 a to an opening in surface 14 c in window 14 f of disc 14 b .
- the bight portion of the U-shaped passageway is formed by a tube 14 h of brass or other suitable material.
- An enlarged opening 14 k at one end of the passageway in widow 14 f of disc 14 b is provided for placement of a pressure sense element, such as a piezoresistive element 15 , as seen more clearly in FIGS. 5 and 6 , attached to flange 14 j of enlarged opening 14 k by silicone-based adhesive material or other suitable adhesive material 15 a .
- Wires 15 c are bonded between sense element 15 and respective electrical terminal pins 15 d. Adhesive and gel are used to provide a pressure tight seal between the terminal pins and the surrounding plastic.
- Suitable adhesive material 14 l of epoxy or silicone-based material is applied to the outer surface of discs 14 a , 14 b as shown in FIG. 3 , as by dispensing or stenciling circular rings or other desired geometry beyond window 14 f and then flexible metal diaphragms 14 m are attached on respective mounting surfaces of discs 14 a , 14 b.
- an oil fill hole 14 n is formed through the base and each respective disc 14 a , 14 b .
- the passageway is evacuated and filled with incompressible fluid, such as silicone oil, through oil fill holes 14 n and then sealed, as by ball 14 o, FIG. 8 , welded to a respective disc 14 a , 14 b providing the assembly shown in FIG. 9 .
- both diaphragms on one side of the base simplifies the assembly process, as mentioned supra.
- forming the adhesive rings, positioning the diaphragms and curing the adhesive can be done at the same time for both diaphragms.
- a single piece of metal can be used rather than two separate diaphragm pieces.
- suitable materials could include tantalum, niobium, titanium and stainless steel.
- sensor assembly 10 can be mounted with the diaphragm surfaces lying in a plane perpendicular to gravity, that is, as shown in FIG. 2 .
- This results is a more compact sensor assembly making the need for metal brackets used in the prior art less likely.
- the sensor apparatus of the present invention needs only one housing part to be robust with the sensed media, i.e., lower housing 18 so that other parts can be made using less expensive materials.
- the sense element module can be formed of materials other than the moldable plastic of FIG. 4 .
- the sense element module can be made of suitable metal, such as stainless steel, as shown in FIGS. 10-12 .
- module 140 comprises a base member formed of stainless steel 440 and has a generally U-shaped passageway 142 opening onto a planar surface 144 so that diaphragms can be attached directly to surface 144 .
- Passageway 142 is formed by a trench closed on top surface 146 by plate member 148 of stainless steel 440 or the like which can be welded to module 140 .
- One opening of passageway 142 is enlarged to receive a piezoresistive sense element corresponding to element 15 of FIGS. 1 , 2 .
- Terminal pins 152 are mounted and isolated by glass seal 154 .
- Oil fill holes 156 correspond to oil fill holes 14 n of FIG. 7 .
- sensor element module 240 can be formed of alumina, for example and formed with a corresponding U-shaped passageway 242 opening through bottom surface 244 in the same manner as in module 140 embodiment.
- the passageway is closed by a cover 246 of alumina or the like which can be attached to module 240 with glass.
- Oil fill holes 256 correspond to oil fill holes 156 of the second embodiment. In this case, the oil fill holes can be sealed with a plastic plug. Terminal pins mounted with glass can be used in this embodiment as well.
Abstract
Description
- This invention relates generally to apparatus for measuring fluid pressure and more particularly to such apparatus providing a media isolated differential pressure sensor using two diaphragms for placement in fluid communication with respective high and low pressure sources.
- Solid state pressure sense elements, such as piezoresistive pressure sense elements, are often isolated from the sensed media by a flexible metal diaphragm robust to the media to protect such sense elements. An incompressible fluid, typically silicone oil, is used to transfer pressure from the diaphragm to the sense element. It is conventional to provide first and second diaphragms facing opposite directions with the sense element disposed therebetween. To reduce the accumulation of substances, such as soot, water, condensate from the media on the diaphragm that could damage the sensor, it is often required to place the diaphragms in a drainable orientation relative to gravity and to the pressure ports. For example, in U.S. Pat. No. 7,197,936, issued Apr. 3, 2007, the diaphragm surfaces are oriented parallel to the direction of gravity. This results in a high aspect ratio which may also require the use of a bulky mounting bracket as shown in the patent to provide desired rigidity. Further, mounting of the diaphragms so that they face in opposite directions can result in having to use separate housing members that each needs to be robust with the sensed media.
- It is an object of the present invention to provide a differential fluid pressure sensor that can easily be oriented so that the diaphragm surfaces are perpendicular to the direction of gravity. Another object of the invention is the provision of a differential fluid pressure sensor that is compact and one that can be made of less expensive materials than typically required. Yet another object of the invention is the provision of a differential fluid pressure sensor whose structure allows the use of time saving assembly operations.
- Briefly, in accordance with a preferred embodiment of the invention a base is formed with a passageway extending between openings at two spaced apart diaphragm mounting surfaces that face a common direction. One opening is enlarged and receives a fluid pressure responsive sense element, such as a piezoresistive sense element assembly. The diaphragms and the passageway form two chambers that are filled with incompressible oil to transmit pressure to the sense element.
- Having both diaphragms on one side of the base simplifies the assembly process. For example, forming adhesive rings for attachment of the diaphragms, positioning the diaphragms on the rings and curing the adhesive can be done at the same time for both diaphragms.
- In the preferred embodiment of the invention described in detail below, the sense element is connected with wire bonds to one end of terminal pins with the other end of the pins bonded to a printed circuit board having conditioning circuits and this in turn is connected to connector terminals by means of metal springs. A sealant is placed around the pins to prevent oil leaks through the pin/base interface.
- Exemplary embodiments of the invention are presented in the drawings and described in the specification.
-
FIG. 1 is a top plan view of a sensor assembly made in accordance with a first preferred embodiment of the invention; -
FIG. 2 is a cross sectional view taken on line 2-2 ofFIG. 1 ; -
FIG. 3 is a bottom plan view of the sense element module shown in theFIG. 2 assembly but shown prior to the installation of the metallic diaphragms; -
FIG. 4 is a cross sectional view of theFIG. 3 module taken through a passageway formed through the module; -
FIG. 5 is an enlarged portion of theFIG. 3 showing details of the sense element assembly; -
FIG. 6 is a cross sectional view taken along line 6-6 ofFIG. 5 ; -
FIG. 7 is a top plan view of the sense element module shown in reduced scale; -
FIG. 8 is a cross sectional view taken along line 8-8 ofFIG. 7 ; -
FIG. 9 is an enlarged cross sectional view similar toFIG. 4 but shown after the diaphragms have been attached and the oil chambers have been filled; -
FIG. 10 is a bottom plan view of a modified sense element module; -
FIG. 11 is a cross sectional view taken along line 11-11 ofFIG. 10 ; -
FIG. 12 is a cross sectional view taken along line 12-12 ofFIG. 10 ; -
FIG. 13 is a bottom plan view of another modified sense element module; and -
FIG. 14 is a cross sectional view taken along line 14-14 ofFIG. 13 . - With particular reference to
FIGS. 1 and 2 , a differential fluidpressure sensor assembly 10 made in accordance with a first preferred embodiment of the invention comprises anupper housing 12 of suitable moldable material such as PEI (polyetherimide) formed with aconnector portion 12 a having three insertmolded terminals 12 b (one of which is shown inFIG. 2 ).Upper housing 12 is formed with a recess for receipt of asense element module 14 betweenmetal bushings 16 for mounting the assembly to a support having ports of a high and a low fluid pressure source to be monitored. Alower housing 18 of suitable moldable material, such as PEI, is received in the recess ofupper housing 12 below the pressure sense module as viewed inFIG. 2 . - An environmental O-
ring 20 is disposed in a seat formed in acircuit chamber 12 c formed betweenupper housing 12 and the top surface ofsense element 14. Acircuit board 22 is disposed on top ofsense element module 14 withinchamber 12 c. Acontact spring 24 extends in a suitable bore in the wall ofupper housing 12 between eachrespective end 12 d ofterminals 12 b andcircuit board 22, as shown by one such spring shown inFIG. 2 . The bores are sealed with suitable material, such as RTV, following assembly and calibration. -
Sense element module 14 comprises a body mounting first and second, side-by-side, generally circularmetallic discs Lower housing 18 is formed with an O-ring seat aligned with eachdisc rings 26.Respective ports FIG. 2 cross section being taken through one of the bars. External O-rings 28 are placed in suitable O-ring seats in the bottom surface oflower housing 18 around eachport sensor assembly 10 and the housing (not shown) containing the high and low fluid pressure sources. - With reference to
FIGS. 3 and 4 ,sense element module 14 is shown prior to the installation of flexible metal diaphragms.Sense element module 14 is formed generally as a solid plate like base of suitable material, such as PPS (polyphenylene sulfide), having a flat bottom surface 14 c. Recesses 14 d are formed in bottom surface 14 c configured to accommodatemetal discs discs Discs - A generally U-shaped
passageway 14 g is formed through the base of the module leading from an opening in surface 14 c in window 14 f ofdisc 14 a to an opening in surface 14 c in window 14 f ofdisc 14 b. According to a feature of the first embodiment, the bight portion of the U-shaped passageway is formed by a tube 14 h of brass or other suitable material. An enlarged opening 14 k at one end of the passageway in widow 14 f ofdisc 14 b is provided for placement of a pressure sense element, such as apiezoresistive element 15, as seen more clearly inFIGS. 5 and 6 , attached to flange 14 j of enlarged opening 14 k by silicone-based adhesive material or other suitableadhesive material 15 a.Wires 15 c are bonded betweensense element 15 and respectiveelectrical terminal pins 15 d. Adhesive and gel are used to provide a pressure tight seal between the terminal pins and the surrounding plastic. - Suitable adhesive material 14 l of epoxy or silicone-based material is applied to the outer surface of
discs FIG. 3 , as by dispensing or stenciling circular rings or other desired geometry beyond window 14 f and thenflexible metal diaphragms 14 m are attached on respective mounting surfaces ofdiscs - With reference to
FIG. 7 showing the top surface of the sense element, as seen inFIG. 4 , anoil fill hole 14 n is formed through the base and eachrespective disc oil fill holes 14 n and then sealed, as by ball 14 o,FIG. 8 , welded to arespective disc FIG. 9 . - It will be understood that having both diaphragms on one side of the base simplifies the assembly process, as mentioned supra. For example, forming the adhesive rings, positioning the diaphragms and curing the adhesive can be done at the same time for both diaphragms. If desired, for further process simplification, a single piece of metal can be used rather than two separate diaphragm pieces. For long term reliability the diaphragms used need to be impermeable and robust to the sensed media (fluid). For example, for use with acidic exhaust gas media, suitable materials could include tantalum, niobium, titanium and stainless steel.
- In accordance with the invention,
sensor assembly 10 can be mounted with the diaphragm surfaces lying in a plane perpendicular to gravity, that is, as shown inFIG. 2 . This results is a more compact sensor assembly making the need for metal brackets used in the prior art less likely. The sensor apparatus of the present invention needs only one housing part to be robust with the sensed media, i.e.,lower housing 18 so that other parts can be made using less expensive materials. - If desired, the sense element module can be formed of materials other than the moldable plastic of
FIG. 4 . In accordance with a second preferred embodiment, the sense element module can be made of suitable metal, such as stainless steel, as shown inFIGS. 10-12 . InFIG. 10 ,module 140 comprises a base member formed of stainless steel 440 and has a generallyU-shaped passageway 142 opening onto aplanar surface 144 so that diaphragms can be attached directly tosurface 144.Passageway 142 is formed by a trench closed ontop surface 146 byplate member 148 of stainless steel 440 or the like which can be welded tomodule 140. One opening ofpassageway 142 is enlarged to receive a piezoresistive sense element corresponding toelement 15 ofFIGS. 1 , 2.Terminal pins 152 are mounted and isolated byglass seal 154. Oil fill holes 156 correspond to oil fill holes 14 n ofFIG. 7 . - With regard to ceramic,
sensor element module 240,FIGS. 13 and 14 , can be formed of alumina, for example and formed with a correspondingU-shaped passageway 242 opening throughbottom surface 244 in the same manner as inmodule 140 embodiment. The passageway is closed by acover 246 of alumina or the like which can be attached tomodule 240 with glass. Oil fill holes 256 correspond to oil fill holes 156 of the second embodiment. In this case, the oil fill holes can be sealed with a plastic plug. Terminal pins mounted with glass can be used in this embodiment as well. - As various changes could be made in the above constructions without departing from the scope of the invention, it is intended that all matter contained in the above description or shown in the accompanying drawings shall be interpreted as illustrative and not in a limiting sense.
Claims (13)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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US12/069,522 US7578194B1 (en) | 2008-02-11 | 2008-02-11 | Differential fluid pressure measurement apparatus |
JP2009012874A JP5634026B2 (en) | 2008-02-11 | 2009-01-23 | Differential fluid pressure measuring device |
KR1020090009831A KR101530092B1 (en) | 2008-02-11 | 2009-02-06 | Differential fluid pressure measurement apparatus |
CN200910005868XA CN101509817B (en) | 2008-02-11 | 2009-02-10 | Differential fluid pressure measurement apparatus |
EP09250331.7A EP2088414A3 (en) | 2008-02-11 | 2009-02-11 | Differential fluid pressure measurement apparatus |
Applications Claiming Priority (1)
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US12/069,522 US7578194B1 (en) | 2008-02-11 | 2008-02-11 | Differential fluid pressure measurement apparatus |
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US20090199647A1 true US20090199647A1 (en) | 2009-08-13 |
US7578194B1 US7578194B1 (en) | 2009-08-25 |
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US12/069,522 Active US7578194B1 (en) | 2008-02-11 | 2008-02-11 | Differential fluid pressure measurement apparatus |
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US (1) | US7578194B1 (en) |
EP (1) | EP2088414A3 (en) |
JP (1) | JP5634026B2 (en) |
KR (1) | KR101530092B1 (en) |
CN (1) | CN101509817B (en) |
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- 2009-02-06 KR KR1020090009831A patent/KR101530092B1/en active IP Right Grant
- 2009-02-10 CN CN200910005868XA patent/CN101509817B/en active Active
- 2009-02-11 EP EP09250331.7A patent/EP2088414A3/en not_active Withdrawn
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US20100108870A1 (en) * | 2007-07-12 | 2010-05-06 | Abb Research Ltd | Pressure sensor |
US8344314B2 (en) * | 2007-07-12 | 2013-01-01 | Abb Research Ltd | Pressure sensor |
US20110107839A1 (en) * | 2009-11-11 | 2011-05-12 | Honeywell International Inc. | Pressure sensor assembly |
US8082797B2 (en) * | 2009-11-11 | 2011-12-27 | Honeywell International Inc. | Pressure sensor assembly |
US8567254B2 (en) | 2009-11-11 | 2013-10-29 | Honeywell International Inc. | Pressure sensor assembly |
CN105067181A (en) * | 2015-08-12 | 2015-11-18 | 凯龙高科技股份有限公司 | Gas differential pressure sensor |
US10605686B2 (en) * | 2017-10-19 | 2020-03-31 | Veoneer Us, Inc. | Dual wet and dry combination mounting |
Also Published As
Publication number | Publication date |
---|---|
KR101530092B1 (en) | 2015-06-18 |
JP2009186467A (en) | 2009-08-20 |
JP5634026B2 (en) | 2014-12-03 |
CN101509817A (en) | 2009-08-19 |
EP2088414A3 (en) | 2016-04-27 |
KR20090086909A (en) | 2009-08-14 |
US7578194B1 (en) | 2009-08-25 |
EP2088414A2 (en) | 2009-08-12 |
CN101509817B (en) | 2012-02-15 |
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