JPH02280027A - Differential pressure measuring instrument - Google Patents
Differential pressure measuring instrumentInfo
- Publication number
- JPH02280027A JPH02280027A JP10197089A JP10197089A JPH02280027A JP H02280027 A JPH02280027 A JP H02280027A JP 10197089 A JP10197089 A JP 10197089A JP 10197089 A JP10197089 A JP 10197089A JP H02280027 A JPH02280027 A JP H02280027A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- block
- measuring
- chamber
- receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims abstract description 10
- 238000005259 measurement Methods 0.000 claims description 25
- 230000003068 static effect Effects 0.000 abstract description 5
- 238000006073 displacement reaction Methods 0.000 abstract description 3
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000011800 void material Substances 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、差圧測定装置に関するものである。[Detailed description of the invention] <Industrial application field> The present invention relates to a differential pressure measuring device.
更に詳述すれば、差圧測定装置の入力回路に関するもの
である。More specifically, the present invention relates to an input circuit of a differential pressure measuring device.
〈従来の技術〉
第５図は従来より一般に使用されているオリフィスによ
る流量測定システムの従来例の構成説明図である。<Prior Art> FIG. 5 is a diagram illustrating the configuration of a conventional example of a flow rate measurement system using an orifice that has been commonly used.
図において、Ａは測定流体の流れる管路である。In the figure, A is a conduit through which the measurement fluid flows.
Ｂは管路Ａに設けられたオリフィスである。B is an orifice provided in conduit A.
ＣはオリフィスＢの上流、あるいは、下流の管路Ａに取
付けられた導管である。Ｃ１は導管を開閉する元弁であ
る。C is a conduit attached to conduit A upstream or downstream of orifice B. C1 is a main valve that opens and closes the conduit.
Ｄは導管Ｃに接続された三方弁である。Ｄｌは三方弁り
に設けられたストップ弁、Ｄ２は均圧弁である。D is a three-way valve connected to conduit C. Dl is a stop valve provided on the three-way valve, and D2 is a pressure equalization valve.
Ｅは、三方弁りに接続された差圧測定装置である。E is a differential pressure measuring device connected to a three-way valve.
〈発明が解決しようとする課題〉
しかしながら、この様な装置においては、三方弁りと差
圧測定装置Ｅとは別体であり、相互の配管が必要となる
。また、装置が複雑となり、装置の小型軽量化、コスト
ダウンが図れない。<Problems to be Solved by the Invention> However, in such a device, the three-way valve and the differential pressure measuring device E are separate bodies, and mutual piping is required. Further, the device becomes complicated, and it is difficult to reduce the size and weight of the device and reduce the cost.
本発明は、この問題点を解決するものである。The present invention solves this problem.
本発明の目的は、小型軽量化、配管等の部品の不要化等
によりコストダウンが図れ、静圧スパン変動が少なく、
センサ部を非接地構造とすることにより電気回路を簡略
化出来る差圧測定装置を提供するにある。The purpose of the present invention is to reduce costs by reducing size and weight, eliminating the need for parts such as piping, and reducing static pressure span fluctuations.
It is an object of the present invention to provide a differential pressure measuring device in which the electric circuit can be simplified by making the sensor part non-grounded.
〈課題を解決するための手段〉
この目的を達成するために、本発明は、ブロック状の本
体と該本体内部に設けられ対向する球面よりなる内部室
と該内部室を測定圧が導入される２個の測定室に分は移
動電極として機能する測定ダイアフラムと該測定ダイア
フラムに対向して前記内部室の壁面に絶縁体を介して設
けられた固定電極とブロック状のハウジングと該ハウジ
ングに設けられ前記本体を隙間を保って内蔵する内部空
所と前記本体とハウジングに設けられ前記測定室にそれ
ぞれ一端が接続され一方の途中が前記内部空所に連通さ
れ他端が該ハウジングの外部に開口する連通孔とを備え
る差圧センサ部と、前記連通孔の他端に一端がそれぞれ
絶縁体を介して接続され測定圧を導圧する導圧管と、該
導圧管の他端がそれぞれ固定される受圧ブロックと、該
受圧ブロックの外側面に設けられ該受圧ブロックと前記
導圧管と連通ずるシール室を構成するシールダイアフラ
ムと、前記受圧ブロックが取付けられ該シールダイアフ
ラムと受圧室を構成する凹部を有するベースブロックと
、該ベースブロックに設けられ前記受圧室に一端が連通
され１１！１＠が外部に受圧接続口として開口する２個
の接続孔と、該接続孔の途中にそれぞれ設けられ該接続
孔を開閉するストップ弁と、前記２個の接続孔の該スト
ップ弁と前記受圧室間の途中を相互に連通ずる均圧孔と
、該均圧孔の途中に設けられた均圧弁とを具備してなる
差圧測定装置を構成したも°のである。<Means for Solving the Problems> In order to achieve this object, the present invention includes a block-shaped body, an internal chamber provided inside the body and formed of opposing spherical surfaces, and a measuring pressure introduced into the internal chamber. The two measuring chambers include a measuring diaphragm functioning as a moving electrode, a fixed electrode provided on the wall of the internal chamber opposite the measuring diaphragm via an insulator, a block-shaped housing, and a fixed electrode provided in the housing. An internal space that houses the main body with a gap therebetween, and an internal space provided in the main body and the housing, each having one end connected to the measurement chamber, one midway communicating with the internal space, and the other end opening to the outside of the housing. a differential pressure sensor section including a communication hole; a pressure impulse tube whose one end is connected to the other end of the communication hole through an insulator and which guides the measurement pressure; and a pressure receiving block to which the other end of the pressure impulse tube is fixed. a base block having a seal diaphragm provided on the outer surface of the pressure receiving block and forming a seal chamber communicating with the pressure receiving block and the pressure impulse pipe; and a base block having a recess to which the pressure receiving block is attached and forming the seal diaphragm and the pressure receiving chamber. , two connection holes provided in the base block, one end of which communicates with the pressure receiving chamber, and 11!1@ open to the outside as a pressure receiving connection port, and two connection holes provided in the middle of the connection holes to open and close the connection holes. a pressure equalizing hole that communicates with each other midway between the stop valve and the pressure receiving chamber of the two connecting holes, and a pressure equalizing valve provided midway between the pressure equalizing hole. This is the configuration of the differential pressure measuring device.
く作用〉
以上の構成において、ストップ弁を開放し、均圧弁を閉
とすることにより、本体の左右から、測定圧力が加わり
、測定ダイアフラムは測定圧力の差圧によって変位する
。測定ダイアフラムの変位によって、固定電極と測定ダ
イアフラムとの静電容量が差動的に変化し、差圧に対応
した電気信号出力が得られる。Effect> In the above configuration, by opening the stop valve and closing the pressure equalizing valve, measurement pressure is applied from the left and right sides of the main body, and the measurement diaphragm is displaced by the differential pressure between the measurement pressures. The displacement of the measurement diaphragm differentially changes the capacitance between the fixed electrode and the measurement diaphragm, resulting in an electrical signal output corresponding to the differential pressure.
装置の両側定入力を均圧にし、装置のゼロ点を調整する
には、均圧弁を開にした後、高圧側のストップ弁を閉に
し、次に、低圧側のスト・ツブ弁を閉めてから装置のゼ
ロ点を調整する。To equalize the constant inputs on both sides of the device and adjust the zero point of the device, open the pressure equalization valve, close the stop valve on the high pressure side, and then close the stop valve on the low pressure side. Adjust the zero point of the device from
また、本体はハウジングの内部空所に配置され、一方の
測定圧が本体の外側から加わるようにされている。Moreover, the main body is arranged in the internal cavity of the housing, so that one measuring pressure is applied from the outside of the main body.
また、センサ部分は、非接地形に構成されている。Further, the sensor portion is configured to be a non-grounded surface.
以下、実施例に基づき詳細に説明する。Hereinafter, a detailed explanation will be given based on examples.
〈実施例〉 第１図は本発明の一実施例の要部構成説明図である。<Example> FIG. 1 is an explanatory diagram of the main part of an embodiment of the present invention.
図において、１は差圧センサ部である。In the figure, 1 is a differential pressure sensor section.
１１は第２図に示すごとく、ブロック状の本体である。11 is a block-shaped main body as shown in FIG.
１１１はセラミックスよりなるボデーである。111 is a body made of ceramics.
１１２はボデー１１１の外周に設けられた金属のリング
である。112 is a metal ring provided around the outer periphery of the body 111.
１２は本体１１に設けられ対向する球面よりなる内部室
である。12 is an internal chamber provided in the main body 11 and made of opposing spherical surfaces.
１３は内部室１２を二つの測定室１４．１５に分は移動
電極として機能する測定ダイアフラムである。Reference numeral 13 denotes a measuring diaphragm which divides the internal chamber 12 into two measuring chambers 14 and 15 and functions as a moving electrode.
１３１．１３２は測定ダイアフラム１３に対向して内部
室１２の壁面に絶縁体であるボデー１１１を介して設け
られた固定電極である。Fixed electrodes 131 and 132 are provided on the wall of the internal chamber 12 facing the measurement diaphragm 13 via the body 111 which is an insulator.
１６は第１図に示すごとく、ブロック状のハウジングで
ある。16 is a block-shaped housing, as shown in FIG.
１６１はハウジング１６に設けられ本体１１を隙間を保
って内蔵する内部空所である。Reference numeral 161 denotes an internal space provided in the housing 16 and housing the main body 11 with a gap therebetween.
１７は本体１１とハウジング１６に設けられ測定室１４
．１５にそれぞれ一端が接続され一方の途中が内部空所
に連通され他端がハウジング１６の外部に開口する連通
孔である。17 is provided in the main body 11 and the housing 16, and a measurement chamber 14
．． 15 , one end is connected to the internal cavity, and the other end is a communication hole that opens to the outside of the housing 16 .
２は連通孔１７の他端に、一端がそれぞれ絶縁体を介し
て接続され、測定圧を導圧する導圧管である。この場合
は、ボデー１１１がセラミックスよりなる。Reference numeral 2 denotes a pressure guide tube whose one end is connected to the other end of the communication hole 17 via an insulator, and which guides the measurement pressure. In this case, the body 111 is made of ceramics.
３は導圧管２の他端がそれぞれ固定される受圧ブロック
である。Reference numeral 3 designates pressure receiving blocks to which the other ends of the pressure guiding pipes 2 are respectively fixed.
３１は受圧ブロック３の外ｆｉ１面に設けられ受圧ブロ
ック３と導圧管２と連通するシール室３２を構成するシ
ールダイアフラムである。A seal diaphragm 31 is provided on the outer fi1 surface of the pressure receiving block 3 and constitutes a seal chamber 32 that communicates with the pressure receiving block 3 and the pressure guiding pipe 2.
４は受圧ブロック３が取付けられシールダイアフラム３
１と受圧室４１を構成する四部４２を有するベースブロ
ックである。4 is a seal diaphragm 3 to which a pressure receiving block 3 is attached.
1 and four parts 42 forming a pressure receiving chamber 41.
４３．４４はベースブロック４に設けられ受圧室４１に
一端が連通され他端が外部に受圧接続口として開口する
２個の接続孔である。Reference numerals 43 and 44 designate two connection holes provided in the base block 4, one end communicating with the pressure receiving chamber 41 and the other end opening to the outside as a pressure receiving connection port.
５は第３図に示すごとく、接続孔４３．４４の途中にそ
れぞれ設けられ、接続孔４３．４４を開閉するストップ
弁である。As shown in FIG. 3, 5 is a stop valve provided in the middle of each of the connecting holes 43, 44 to open and close the connecting holes 43, 44.
４５は２個の受圧室４１を相互に連通ずる均圧孔である
。45 is a pressure equalizing hole that communicates the two pressure receiving chambers 41 with each other.
６は第４図に示すごとく、均圧孔４５の途中に設けられ
た均圧弁である。6 is a pressure equalizing valve provided in the middle of the pressure equalizing hole 45, as shown in FIG.
７は第１図に示すごとく、差圧センサ部工を覆って、ベ
ースブロック４に取付けれたカバーである。７１はカバ
ー７に取付けられ、電子部品の取付けられたプリント板
ユニツｌ−である。As shown in FIG. 1, 7 is a cover attached to the base block 4 to cover the differential pressure sensor part. Reference numeral 71 denotes a printed board unit l- attached to the cover 7 and having electronic components attached thereto.
１０１．１０２は、測定室１４．１５．導圧管２、シー
ル室３２とで構成される２個の室に封入される封入液で
ある。この場合はシリコンオイルが用いられている。101.102 is the measurement room 14.15. This is a sealed liquid that is sealed in two chambers consisting of the pressure impulse pipe 2 and the seal chamber 32. In this case, silicone oil is used.
以上の構成において、ストップ弁５を開放し、均圧弁６
を閉とすることにより、本体１１の左右から、測定圧力
が加わり、測定ダイアフラム１３は測定圧力の差圧によ
って変位する。ａｌ定ダイアフラム１３の変位によって
、固定電極１３３，１３４と測定タイアフラム１３との
静電容量が差動的に変化し、差圧に対応した電気信号出
力が得られる。In the above configuration, the stop valve 5 is opened and the pressure equalizing valve 6 is opened.
By closing, measurement pressure is applied from the left and right sides of the main body 11, and the measurement diaphragm 13 is displaced by the differential pressure between the measurement pressures. Due to the displacement of the al constant diaphragm 13, the capacitance between the fixed electrodes 133, 134 and the measurement tyrephragm 13 changes differentially, and an electrical signal output corresponding to the differential pressure is obtained.
装置の両側定入力を均圧にし、装置のゼロ点を調整する
には、均圧弁６を開にした後、高圧側のス１−ツブ弁５
を閉にし、次に、低圧側のストップ弁５を閉めてから装
置のゼロ点を調整するまた、本体１１はハウジング１６
の内部空所１６１に配置され、一方の測定圧が本体１１
の外１則から加わるようにされている。To equalize the constant inputs on both sides of the device and adjust the zero point of the device, open the pressure equalization valve 6, then open the high pressure side valve 5.
Close the stop valve 5 on the low pressure side and then adjust the zero point of the device.
is placed in the internal cavity 161 of the main body 11, and one measuring pressure is
It is made to be added from the first rule.
また、センサ部分は、非接地形に構成されている。Further, the sensor portion is configured to be a non-grounded surface.
この結果、
（１）差圧測定装置本体部分と三方弁を一体に構成でき
たので、ボルト、本体フランジ、取付はブラケット等が
不要となり、小型、軽量、コストダウンが図れる。As a result, (1) Since the main body of the differential pressure measuring device and the three-way valve can be integrated, there is no need for bolts, main body flanges, brackets, etc. for installation, making it possible to reduce size, weight, and cost.
（２）差圧測定装置本体部分と三方弁間の配管か不要に
なる。(2) Piping between the main body of the differential pressure measuring device and the three-way valve becomes unnecessary.
（３）差圧センサ部１は、導圧管２によりベースブロッ
ク４から離されて空気中に支持されているので、測定流
体が高温であっても、測定流体の温度の影響を受けにく
く測定可能温度範囲の広い装置が得られる。(3) The differential pressure sensor section 1 is separated from the base block 4 by the impulse tube 2 and supported in the air, so even if the fluid to be measured is at a high temperature, it can be measured without being affected by the temperature of the fluid to be measured. A device with a wide temperature range is obtained.
（４〉本体１１はハウジング１６の内部空所１６１に配
置され、一方の測定圧が本体１１の外側から加わるよう
にされているので、静圧スパン変動の少ないものが得ら
れる。(4) Since the main body 11 is disposed in the internal space 161 of the housing 16, and one measurement pressure is applied from the outside of the main body 11, a static pressure with little variation in span can be obtained.
（５）導圧管２はセンサ部に一端が絶縁体を介してそれ
ぞれ接続されているので、センサ部を非接地構造とする
ことができ、電気回路を簡略化出来る。(5) Since one end of the impulse tube 2 is connected to the sensor section through an insulator, the sensor section can be made into a non-grounded structure, and the electric circuit can be simplified.
なお、前述の実施例においては、ストップ弁５と均圧弁
６とは、マニアル操作のものについて説明したが、電磁
弁等を使用したリモート式の弁でも良いことは勿論であ
る。In the above-described embodiment, the stop valve 5 and the pressure equalization valve 6 have been described as manually operated valves, but it goes without saying that they may be remote-type valves using electromagnetic valves or the like.
〈発明の効果〉
以上説明したように、本発明は、ブロック状の本体と該
本体内部に設けられ対向する球面よりなる内部室と該内
部室を測定圧が導入される２個の測定室に分は移動電極
として機能する測定ダイアフラムと該測定ダイアフラム
に対向して前記内部室の壁面に絶縁体を介して設けられ
た固定電極とブロック状のハウジングと該ハウジングに
設けられ前記本体を隙間を保って内蔵する内部空所と前
記本体とハウジングにに設けられ前記測定室にそれぞれ
一端が接続され一方の途中が前記内部空所に連通され他
端が該ハウジングの外部に開口する連通孔とを備える差
圧センサ部と、前記連通孔の他端に一端がそれぞれ絶縁
体を介して接続され測定圧を導圧する導圧管と、該導圧
管の他端がそれぞれ固定される受圧ブロックと、該受圧
ブロックの外側面に設けられ該受圧ブロックと前記導圧
管と連通ずるシール室を構成するシールダイアフラムと
、前記受圧ブロックが取付けられ該シールダイアフラム
と受圧室を構成する凹部を有するベスブロックと、該ベ
ースブロックに設けられ前記受圧室に一端が連通され他
端が外部に受圧接続１］として開［１する２個の接続孔
と、該接続孔の途中にそれぞれ設けられ該接続孔を開閉
するストップ弁と、前記２個の接続孔の該ストップ弁と
前記受圧室間の途中を相互に連通ずる均圧孔と、該均圧
孔の途中に設けられた均圧弁とを具備してなる差圧測定
装置を構成した。<Effects of the Invention> As explained above, the present invention comprises a block-shaped main body, an internal chamber provided inside the main body and made of opposing spherical surfaces, and the internal chamber divided into two measurement chambers into which measurement pressure is introduced. The components include a measuring diaphragm functioning as a moving electrode, a fixed electrode provided on the wall of the internal chamber opposite the measuring diaphragm via an insulator, a block-shaped housing, and a block-shaped housing provided in the housing to maintain a gap between the main body. and a communication hole provided in the main body and the housing, each having one end connected to the measurement chamber, one midway communicating with the internal cavity, and the other end opening to the outside of the housing. A differential pressure sensor section, a pressure impulse tube whose one end is connected to the other end of the communication hole through an insulator and which guides the measured pressure, a pressure receiving block to which the other end of the pressure impulse tube is fixed, and the pressure receiving block. a seal diaphragm provided on an outer surface of the pressure receiving block and forming a seal chamber communicating with the pressure receiving block and the pressure impulse pipe; a base block having a recess to which the pressure receiving block is attached and forming a pressure receiving chamber with the seal diaphragm; and the base block. two connecting holes, one end of which communicates with the pressure receiving chamber and the other end of which opens to the outside as a pressure receiving connection; and a stop valve provided in the middle of each of the connecting holes to open and close the connecting hole. , a pressure equalization hole that communicates with the stop valve of the two connection holes and the pressure receiving chamber, and a pressure equalization valve provided in the middle of the pressure equalization hole. was constructed.
この結果、
（１）差圧測定装置本体部分と三方弁を一体に構成でき
なので、ボルト、本体フランジ、取付はブラゲッ１−等
が不要となり、小型、軽量、コストダウンが図れる。As a result, (1) Since the main body of the differential pressure measuring device and the three-way valve can be integrated, there is no need for bolts, main body flanges, brackets, etc. for installation, making it possible to reduce size, weight, and cost.
（２）差圧測定装置本体部分と三方弁間の配管か不要に
なる。(2) Piping between the main body of the differential pressure measuring device and the three-way valve becomes unnecessary.
（３）差圧センサ部は、導圧管によりベースブロックか
ら離されて空気中に支持されているので、測定流木が高
温であっても、測定流体の温度の影響を受けにくく測定
可能温度範囲の広い装置が得られる。(3) The differential pressure sensor part is separated from the base block by a pressure impulse pipe and supported in the air, so even if the measured driftwood is high temperature, it is not affected by the temperature of the measured fluid and is within the measurable temperature range. A wide device is obtained.
（４）本体はハウジングの内部空所に配置され、一方の
測定圧が本体の外側から加わるようにされているので、
静圧スパン変動の少ないものが得られる。(4) The main body is placed in the internal cavity of the housing, and one measurement pressure is applied from the outside of the main body, so
A product with less static pressure span fluctuation can be obtained.
（５）導圧管はセンサ部に一端が絶縁体を介してそれぞ
れ接続されているので、センサ部を非接地構造とするこ
とができ、電気回路を簡略化出来る。(5) Since one end of each of the impulse tubes is connected to the sensor section through an insulator, the sensor section can be made into a non-grounded structure, and the electric circuit can be simplified.
従って、本発明によれば、小型軽量化、配管等の部品の
不要化等によりコストダウンが図れ、静圧スパン変動の
少なく、センサ部を非接地構造とすることにより、電気
回路を簡略化出来る差圧測定装置を実現することができ
る。Therefore, according to the present invention, it is possible to reduce costs by reducing size and weight, eliminating the need for parts such as piping, and simplifying the electric circuit by reducing static pressure span fluctuations and making the sensor section non-grounded. A differential pressure measuring device can be realized.
第１図は本発明の一実施例の要部構成説明図、第２図、
第３図、第４図は第１図の要部構成説明し１、第５図は
従来より一般に使用されて℃）る従来例の構成説明図で
ある。
１・・・差圧センサ部、１０１，１０２．・・・封入液
、１１・・・本体、１２・・・内部室、１３・・・測定
タイアフラム、１３１，１３２・・・固定電極、１４．
１５・・・測定室、１６・・・ハウジング、１６１・・
・内部空所、１７・・・連通孔、２・・・導圧管、３・
・・受圧ブロック、３１・・・シールダイアフラム、３
２・・・シール室、４・・・ベースブロック、４１・・
・受圧室、４２・・・凹部、４３．４４・・・接続孔、
４５・・・均圧孔、５・・・ストップ弁、６・・・均圧
弁、７・・・カバー、７１・・・プリンｌ−板ユニット
。FIG. 1 is an explanatory diagram of the main part configuration of an embodiment of the present invention, FIG.
FIGS. 3 and 4 illustrate the main part configuration of FIG. 1, and FIGS. 1 and 5 are explanatory diagrams of the configuration of a conventional example that has been generally used. 1... Differential pressure sensor section, 101, 102. ... Filled liquid, 11 ... Main body, 12 ... Internal chamber, 13 ... Measurement tire phragm, 131, 132 ... Fixed electrode, 14.
15...Measurement chamber, 16...Housing, 161...
・Internal space, 17... Communication hole, 2... Impulse pipe, 3.
...Pressure block, 31...Seal diaphragm, 3
2... Seal chamber, 4... Base block, 41...
・Pressure receiving chamber, 42... recess, 43.44... connection hole,
45...Pressure equalization hole, 5...Stop valve, 6...Pressure equalization valve, 7...Cover, 71...Print L-plate unit.
Claims (1)
よりなる内部室と該内部室を測定圧が導入される２個の
測定室に分け移動電極として機能する測定ダイアフラム
と該測定ダイアフラムに対向して前記内部室の壁面に絶
縁体を介して設けられた固定電極とブロック状のハウジ
ングと該ハウジングに設けられ前記本体を隙間を保って
内蔵する内部空所と前記本体とハウジングに設けられ前
記測定室にそれぞれ一端が接続され一方の途中が前記内
部空所に連通され他端が該ハウジングの外部に開口する
連通孔とを備える差圧センサ部と、前記連通孔の他端に
一端がそれぞれ絶縁体を介して接続され測定圧を導圧す
る導圧管と、該導圧管の他端がそれぞれ固定される受圧
ブロックと、該受圧ブロックの外側面に設けられ該受圧
ブロックと前記導圧管と連通するシール室を構成するシ
ールダイアフラムと、前記受圧ブロックが取付けられ該
シールダイアフラムと受圧室を構成する凹部を有するベ
ースブロックと、該ベースブロックに設けられ前記受圧
室に一端が連通され他端が外部に受圧接続口として開口
する２個の接続孔と、該接続孔の途中にそれぞれ設けら
れ該接続孔を開閉するストップ弁と、前記２個の接続孔
の該ストップ弁と前記受圧室間の途中を相互に連通する
均圧孔と、該均圧孔の途中に設けられた均圧弁とを具備
してなる差圧測定装置。A block-shaped main body, an internal chamber provided inside the main body consisting of opposing spherical surfaces, and a measuring diaphragm functioning as a moving electrode that is divided into two measuring chambers into which measuring pressure is introduced, and a measuring diaphragm facing the measuring diaphragm. a fixed electrode provided on the wall surface of the internal chamber via an insulator, a block-shaped housing, an internal cavity provided in the housing and containing the main body with a gap therebetween, and a fixed electrode provided in the main body and the housing with a space therebetween for the measurement. a differential pressure sensor portion including a communication hole having one end connected to the chamber, one end communicating with the internal cavity, and the other end opening to the outside of the housing; and one end of the communication hole being insulated at the other end of the communication hole. A pressure-receiving block to which the other ends of the pressure-receiving tubes are fixed, and a seal provided on the outer surface of the pressure-receiving block and communicating with the pressure-receiving block and the pressure-receiving tube. a seal diaphragm constituting a chamber; a base block to which the pressure receiving block is attached and having a concave portion constituting the seal diaphragm and the pressure receiving chamber; and a base block provided in the base block with one end communicating with the pressure receiving chamber and the other end receiving pressure externally. Two connection holes that open as connection ports, stop valves that are provided in the middle of the connection holes to open and close the connection holes, and a mutual connection between the stop valves of the two connection holes and the pressure receiving chamber. A differential pressure measuring device comprising a pressure equalizing hole communicating with the pressure equalizing hole and a pressure equalizing valve provided in the middle of the pressure equalizing hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10197089A JPH02280027A (en) | 1989-04-21 | 1989-04-21 | Differential pressure measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10197089A JPH02280027A (en) | 1989-04-21 | 1989-04-21 | Differential pressure measuring instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02280027A true JPH02280027A (en) | 1990-11-16 |
Family
ID=14314727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10197089A Pending JPH02280027A (en) | 1989-04-21 | 1989-04-21 | Differential pressure measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02280027A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009186467A (en) * | 2008-02-11 | 2009-08-20 | Sensata Technologies Inc | Differential fluid pressure measurement apparatus |
| CN103807466A (en) * | 2012-11-13 | 2014-05-21 | 北京华德创业环保设备有限公司 | Three-valve manifold with protection function |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58502020A (en) * | 1981-11-27 | 1983-11-24 | ロ−ズマウント インコ． | Transmission device for fluid pressure to differential pressure transducer |
-
1989
- 1989-04-21 JP JP10197089A patent/JPH02280027A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58502020A (en) * | 1981-11-27 | 1983-11-24 | ロ−ズマウント インコ． | Transmission device for fluid pressure to differential pressure transducer |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009186467A (en) * | 2008-02-11 | 2009-08-20 | Sensata Technologies Inc | Differential fluid pressure measurement apparatus |
| CN103807466A (en) * | 2012-11-13 | 2014-05-21 | 北京华德创业环保设备有限公司 | Three-valve manifold with protection function |
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