US20090010767A1 - Electric comb driven micropump system - Google Patents
Electric comb driven micropump system Download PDFInfo
- Publication number
- US20090010767A1 US20090010767A1 US11/774,543 US77454307A US2009010767A1 US 20090010767 A1 US20090010767 A1 US 20090010767A1 US 77454307 A US77454307 A US 77454307A US 2009010767 A1 US2009010767 A1 US 2009010767A1
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- United States
- Prior art keywords
- cavity
- fluid
- voltage
- micropump
- piston
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
- F04B19/006—Micropumps
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Micromachines (AREA)
Abstract
An electric comb driven micropump system includes a piston, a comb actuator comb and a real-time monitoring device. The comb actuator may generate an electrostatic force after receiving a voltage, so as to actuate the piston to make a first displacement, which causes a fluid to enter into a cavity, wherein the voltage has a voltage value for determining the volume of the fluid entering into the cavity, and wherein as the voltage value of the voltage gradually decreases, the electrostatic forces also decreases, allowing the piston to gradually make a second displacement in a direction opposite to the first displacement driven by a spring, thus outputting the fluid from the cavity. The real-time monitoring device provides real-time information of the comb actuator.
Description
- 1. Field of the Invention
- The present invention generally relates to a pump technique, more specifically, a micropump.
- 2. Description of the Prior Art
- Currently, the most commonly seen micropump is valve-less micropump, which primarily uses an actuator to generate vibrations of a membrane, causing changes in volume of a cavity. The inlet and outlet are designed as diffusers/nozzles, the shape thereof controls the fluid input/output pressures However, current valve-less pumps can only control an average flow quantity, but not each output quantity. In applications of biomedical testing, no quantitative testing can be achieved.
- Various researches have been done focusing on changing actuating source materials, the cavity design or valve-type pump etc. For micropump system, Shen-Jian Yang et al. discloses, in TW Patent No. 00568881 titled “Programmable capacitive micropump”, a flat rectangular micro-channel cavity. Top and bottom sides (or just the top side) of the cavity are covered with a elastic membrane plated with a plurality of linear (grid-shaped) metal electrodes. Applying to each grid-shaped electrode an appropriate actuating voltage with a phase difference, capacitive electrostatic attraction force generated between the grid-shaped electrodes and the bottom electrode of the cavity as well as elastic membrane restoring force drives the elastic membrane to generate several propagating waves in a single direction, that is, the elastic membrane pushes fluid in a squirming motion, allowing the micropump to operate smoothly and effectively.
- In TW Patent No. 00324948 titled “electromagnetically actuated micropump” by Shi-Chu Chen, an electromagnetically actuated micropump is proposed, which is fabricated by micromachining technique in order to accurately manipulate microfluid. The micropump has back-and-forth motions due to electromagnetic actuation in cooperation with valve-less inlet/outlet. Magnetic forces are generated by a planar coil in conjunction with a soft magnet or a permanent magnet on the same vertical plane. The coil is deposited on a membrane as a moving element, while the magnet acts as a stationary element, or the coil as a stationary element and the magnet as the moving element, or two sets of coils are used to generate the back-and-forth motions. The design of the inlet/outlet adopts diffuser/nozzle elements instead of the traditional check valves. The micropump having such composition has several advantages, such as fast reaction, low input voltage, easy inlet/outlet fabrication process and high reliability.
- However, the abovementioned micropump systems are all valve-less, which lacks quantitative output control. Commonly seen piezoelectric valve-less micropump utilizes piezoelectric plate as the actuating source, that is, according to the vibrating principle of the piezoelectric plate, the membrane is vibrated, causing change in cavity volume, so that fluid may flow in to/ out of the cavity via the diffusers/nozzles. This is more or less similar to the abovementioned principle that outputs fluid by change in cavity volume. This kind of method also requires the design of the diffusers/nozzles to control fluid output, but not the quantity of the fluid outputted.
- In view of the prior art and the needs of the related industries, the present invention provides that solves the abovementioned shortcomings of the conventional.
- One objective of the present invention is to design an electric comb driven micropump system that achieves quantitative fluid output, which is different from the traditional micropump that continuously but not quantitatively outputs fluid, thus it can be widely used in biochemical reactions, specimen mixing, lab chips, biological chip quantitative testing, and various related applications of fluid dynamics.
- In view of this and other objectives, the present invention provides an electric comb driven micropump system, which includes a piston, a comb actuator comb and a real-time monitoring device. The comb actuator may generate an electrostatic force after receiving a voltage, so as to actuate the piston to make a first displacement, which causes a fluid to enter into a cavity, wherein the voltage has a voltage value for determining the volume of the fluid entering into the cavity, and wherein as the voltage value of the voltage gradually decreases, the electrostatic forces also decreases, allowing the piston to gradually make a second displacement in a direction opposite to the first displacement driven by a spring, thus outputting the fluid from the cavity. The real-time monitoring device provides real-time information of the comb actuator.
- By using the above electric comb driven micropump system, fluid can be outputted in fixed quantity desired for testing. Fluid in the cavity can be pushed out by the piston, thus achieving quantitative output control.
- The accompanying drawings incorporated in and forming a part of the specification illustrate several aspects of the present invention, and together with the description serve to explain the principles of the disclosure. In the drawings:
-
FIG. 1 is a cross-sectional schematic diagram of a micropump according to a first preferred embodiment of the present invention; -
FIGS. 1 to 3 are schematic diagrams illustrating the actuating method of a micropump according to a second preferred embodiment of the present invention; -
FIG. 4 is a bottom schematic view of the micropump structure according toFIG. 2 of the second preferred embodiment of the present invention; -
FIG. 5 is a bottom schematic view of the micropump structure according toFIG. 3 of the second preferred embodiment of the present invention; and -
FIG. 6 is a schematic diagram of an electric comb driven micropump system. - Preferred embodiments of the present invention are described below in conjunction with appended drawings to better understand the above and other objectives, features and advantages of the present invention.
-
FIG. 1 is a cross-sectional schematic diagram of a micropump according to a first preferred embodiment of the present invention. Referring toFIG. 1 , the micropump at least comprises apiston 10 and acomb actuator 20. Thecomb actuator 20 may generate an electrostatic force after receiving a voltage from a power supply 98 (FIG. 6 ), so as to actuate thepiston 10 to make afirst displacement 12, which causes a fluid 30 (FIG. 2 ) to enter into acavity 40. Thefluid 30 is a sample or a reagent, for example. - The abovementioned voltage has a voltage value that determines the volume of
fluid 30 entering into thecavity 40. As the voltage value of this voltage gradually decreases, the electrostatic forces also decreases, allowing the piston to gradually make a second displacement 14 (FIG. 3 ) in a direction opposite to thefirst displacement 12 driven by aspring 70, thus outputting thefluid 30 from thecavity 40. In this way, the quantity of output of thefluid 30 can be accurately controlled. - The micropump of the first preferred embodiment of the present invention may further comprise a voltage control device 80 (e.g. a relay) for gradually reducing the voltage value. The
voltage control device 80 may also be used to change the voltage value so as to change the volume of fluid flowing into the cavity. By using thisvoltage control device 80, the micropump of the present invention is able to control the quantity of each output. In applications of biomedical testing, the micropump of the present invention can provide quantitative specimen. - The
cavity 40 of the first preferred embodiment of the present invention may be a valve-less cavity. As for thefluid 30, it may be passed through aninlet 32 into thecavity 40. Moreover, thefluid 30 inside thecavity 40 can be outputted via anoutlet 34. - There can be a specific angle between the entering direction of the
inlet 32 and the exit direction of theoutlet 34, such that the flowing direction of thefluid 30 can be controlled. The specific angle may, for example, be 90 degrees. The exit direction of theoutlet 34 is the direction of thesecond displacement 34 of thepiston 10. The micropump may further comprise a fluid supply and control device connected to a guiding joint. The fluid supply and control device may provide a fixed pressure for driving the fluid in the micropump loop to move in a certain direction. The loop refers to a channel of the micropump in which the fluid flows. -
FIG. 6 depicts a schematic diagram of an electric comb driven micropump system. Referring toFIG. 6 , thecomb actuator 20 may be connected to a real-time monitoring device 92 for real-time monitoring of the exterior. This real-time monitoring device 92 may directly monitor the fluid in the micropump loop so as to provide real-time information to thecomb actuator 20. More specifically, the real-time monitoring device provides real-time information by an analog/digital converter 94 (AD/DA converter) and acomputer 96. Based on the real-time information, thevoltage control device 80 can determine the voltage value, and in turn the volume of fluid to be entered into the cavity 40 (FIG. 1 ). - Referring now to
FIGS. 4 and 5 , the micropump of the first preferred embodiment is voltage driven, that is, the displacement of the electric comb is controlled based on a relationship of the voltage and the electrostatic force. The fluid is externally driven directly into the valve-less cavity, then the displacement of the electric comb is controlled by varying the voltage, driving thepiston 10 to output the fluid 30 inside thecavity 40. The micropump eliminates the problem of the valve-less micropump being not able to control the quantity of output. Since the output of the micropump is a total output, thus the droplet phenomenon can be improved. - The design of the micropump permits the microfluid to be outputted by a fixed quantity required for testing. Using principles of diffusers and nozzles, as well as a driving source, the micropump performs piston type back-and-forth movement, such that the fluid 30 in the
cavity 40 is pushed out therefrom by thepiston 10 to obtain the required quantity of output. - According to the first preferred embodiment, the present invention can be widely applied to biochemical reactions, specimen mixing, lab chips, biological chip quantitative testing, and various related applications of fluid dynamics. In addition, the present invention employs external voltage and pressure control devices and real-time monitoring device for real-time monitoring reaction status and controlling voltage and output, thus eliminating the shortcoming that traditional chips can only output continuously. The valve-less cavity design also reduces difficulties in controlling and manufacturing cost.
-
FIGS. 1 to 3 are schematic diagrams illustrating the actuating method of a micropump according to a second preferred embodiment of the present invention. Referring toFIG. 1 , the first step includes guiding a fluid 30, by an external fixed driving pressure, via a guiding joint to a temporary tank 90, such that the fluid 30 fills up the tank 90. -
FIG. 4 is a bottom schematic view of the micropump structure according toFIG. 2 of the second preferred embodiment of the present invention. Referring toFIGS. 2 and 4 , the second step includes applying a voltage to acomb actuator 20 to generate an electrostatic force, which actuates apiston 10 to make afirst displacement 12, allowing the fluid 30 to enter into acavity 40, wherein the voltage has a voltage value for determining the volume of the fluid 30 entering into thecavity 40. - Referring to
FIGS. 2 and 4 , when the voltage value increases, the electrostatic force generated increases, and in turn the displacement of thepiston 10 increases accordingly. Thefirst displacement 12 of the piston is for example an upward movement from the bottom of the cavity 40 (FIG. 4 ; left movement inFIG. 2 ). Meanwhile, pressure in thecavity 40 varies. When the front end of thepiston 10 moves to theinlet 32, the cavity will quickly fill up with the fluid 30 due to pressure variation in thecavity 40, as shown inFIG. 2 . -
FIG. 5 is a bottom schematic view of the micropump structure according toFIG. 3 of the second preferred embodiment of the present invention. Referring toFIGS. 3 and 5 , in the third step, voltage value is gradually decreased, so as the electrostatic force, allowing thepiston 10 to gradually make asecond displacement 14 in a direction opposite to thefirst displacement 12 driven by aspring 70, thus outputting the fluid 30 from thecavity 40. - The driving voltage applied on the
comb actuator 20 gradually decreases, and thecomb actuator 20, under the influence of the spring and gradually weakened electrostatic force, drives the piston to make thesecond displacement 14, for example, move downward (FIG. 5 ; move left inFIG. 3 ). When thepiston 10 moves downward, the fluid 30 is pushed outside of thecavity 40. - In the second preferred embodiment of the present invention, the above actuating method may further comprise a changing step for changing the voltage value, so as to change the volume of fluid entering into the cavity.
- The
cavity 40 of the second preferred embodiment of the present invention may be a valve-less cavity. As for the fluid 30, referring toFIG. 2 , it may be passed through aninlet 32 into thecavity 40. Moreover, the fluid 30 inside thecavity 40 can be outputted via anoutlet 34. - There can be a specific angle between the entering direction of the
inlet 32 and the exit direction of theoutlet 34, such that the flowing direction of the fluid 30 can be controlled. The specific angle may, for example, be 90 degrees. The exit direction of theoutlet 34 is the direction of thesecond displacement 34 of thepiston 10. - According to the second preferred embodiment, the present invention can be widely applied to biochemical reactions, specimen mixing, lab chips, biological chip quantitative testing, and various related applications of fluid dynamics. In addition, the present invention employs external voltage and pressure control devices and real-time monitoring device for real-time monitoring reaction status and controlling voltage and output, thus eliminating the shortcoming that traditional chips can only output continuously. The valve-less cavity design also reduces difficulties in controlling and manufacturing cost.
- The foregoing description is not intended to be exhaustive or to limit the invention to the precise forms disclosed. Obvious modifications or variations are possible in light of the above teachings. In this regard, the embodiment or embodiments discussed were chosen and described to provide the best illustration of the principles of the invention and its practical application to thereby enable one of ordinary skill in the art to utilize the invention in various embodiments and with various modifications as are suited to the particular use contemplated. All such modifications and variations are within the scope of the inventions as determined by the appended claims when interpreted in accordance with the breath to which they are fairly and legally entitled.
- It is understood that several modifications, changes, and substitutions are intended in the foregoing disclosure and in some instances some features of the invention will be employed without a corresponding use of other features. Accordingly, it is appropriate that the appended claims be construed broadly and in a manner consistent with the scope of the invention.
Claims (14)
1. An electric comb driven micropump system, including:
a piston;
a comb actuator comb for generating an electrostatic force after receiving a voltage, so as to actuate the piston to make a first displacement, which causes a fluid to enter into a cavity, wherein the voltage has a voltage value for determining the volume of the fluid entering into the cavity, and wherein as the voltage value of the voltage gradually decreases, the electrostatic forces also decreases, allowing the piston to gradually make a second displacement in a direction opposite to the first displacement driven by a spring, thus outputting the fluid from the cavity; and
a real-time monitoring device for providing real-time information of the comb actuator.
2. An electric comb driven micropump system of claim 1 , further including a voltage control device for gradually decreasing the voltage value.
3. A micropump, including:
a piston; and
a comb actuator comb for generating an electrostatic force after receiving a voltage, so as to actuate the piston to make a first displacement, which causes a fluid to enter into a cavity, wherein the voltage has a voltage value for determining the volume of the fluid entering into the cavity, and wherein as the voltage value of the voltage gradually decreases, the electrostatic forces also decreases, allowing the piston to gradually make a second displacement in a direction opposite to the first displacement driven by a spring, thus outputting the fluid from the cavity.
4. A micropump system of claim 3 , further including a voltage control device for changing the voltage value, so as to change the volume of the fluid entering into the cavity.
5. A micropump system of claim 3 , wherein the cavity is a cavity with no valve.
6. A micropump system of claim 3 , wherein the fluid enters the cavity through an inlet.
7. A micropump system of claim 6 , wherein the fluid exits the cavity through an outlet.
8. A micropump system of claim 7 , wherein there is a specific angle between the entering direction of the inlet and the exit direction of the outlet, such that the flowing direction of the fluid is controlled.
9. An actuating method of a micropump, including:
applying a voltage to a comb actuator to generate an electrostatic force for actuating a piston, allowing the piston to make a first displacement for causing a fluid to flow into a cavity, wherein the voltage has a voltage value for determining the volume of the fluid entering into the cavity; and
gradually decreasing the voltage to reduce the electrostatic forces, allowing the piston to gradually make a second displacement in a direction opposite to the first displacement driven by a spring, thus outputting the fluid from the cavity
10. An actuating method of a micropump of claim 9 , further including a voltage control device for changing the voltage value, so as to change the volume of the fluid entering into the cavity.
11. An actuating method of a micropump of claim 9 , wherein the cavity is a cavity with no valve.
12. An actuating method of a micropump of claim 9 , wherein the fluid enters the cavity through an inlet.
13. An actuating method of a micropump of claim 12 , wherein the fluid exits the cavity through an outlet.
14. An actuating method of a micropump of claim 3 , wherein there is a specific angle between the entering direction of the inlet and the exit direction of the outlet, such that the flowing direction of the fluid is controlled.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US11/774,543 US20090010767A1 (en) | 2007-07-06 | 2007-07-06 | Electric comb driven micropump system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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US11/774,543 US20090010767A1 (en) | 2007-07-06 | 2007-07-06 | Electric comb driven micropump system |
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US20090010767A1 true US20090010767A1 (en) | 2009-01-08 |
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US11/774,543 Abandoned US20090010767A1 (en) | 2007-07-06 | 2007-07-06 | Electric comb driven micropump system |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20170247966A1 (en) * | 2014-12-01 | 2017-08-31 | Halliburton Energy Services, Inc. | Damaged seal bore repair device |
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US4808084A (en) * | 1986-03-24 | 1989-02-28 | Hitachi, Ltd. | Apparatus for transferring small amount of fluid |
US5362213A (en) * | 1992-01-30 | 1994-11-08 | Terumo Kabushiki Kaisha | Micro-pump and method for production thereof |
US6069419A (en) * | 1998-06-16 | 2000-05-30 | Tabib-Azar; Massood | Micro-actuator assembly |
US6237619B1 (en) * | 1996-10-03 | 2001-05-29 | Westonbridge International Limited | Micro-machined device for fluids and method of manufacture |
US6386680B1 (en) * | 2000-10-02 | 2002-05-14 | Eastman Kodak Company | Fluid pump and ink jet print head |
US6533951B1 (en) * | 2000-07-27 | 2003-03-18 | Eastman Kodak Company | Method of manufacturing fluid pump |
US6645757B1 (en) * | 2001-02-08 | 2003-11-11 | Sandia Corporation | Apparatus and method for transforming living cells |
US20040126254A1 (en) * | 2002-10-31 | 2004-07-01 | Chen Ching Jen | Surface micromachined mechanical micropumps and fluid shear mixing, lysing, and separation microsystems |
US6801679B2 (en) * | 2001-11-23 | 2004-10-05 | Seungug Koh | Multifunctional intelligent optical modules based on planar lightwave circuits |
US6827559B2 (en) * | 2002-07-01 | 2004-12-07 | Ventaira Pharmaceuticals, Inc. | Piezoelectric micropump with diaphragm and valves |
US20060226733A1 (en) * | 2005-04-07 | 2006-10-12 | Samsung Electronics Co., Ltd. | Actuator and method of driving the same |
US7316543B2 (en) * | 2003-05-30 | 2008-01-08 | The Board Of Trustees Of The Leland Stanford Junior University | Electroosmotic micropump with planar features |
US7372616B2 (en) * | 2001-12-06 | 2008-05-13 | Microfabrica, Inc. | Complex microdevices and apparatus and methods for fabricating such devices |
-
2007
- 2007-07-06 US US11/774,543 patent/US20090010767A1/en not_active Abandoned
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4808084A (en) * | 1986-03-24 | 1989-02-28 | Hitachi, Ltd. | Apparatus for transferring small amount of fluid |
US5362213A (en) * | 1992-01-30 | 1994-11-08 | Terumo Kabushiki Kaisha | Micro-pump and method for production thereof |
US6237619B1 (en) * | 1996-10-03 | 2001-05-29 | Westonbridge International Limited | Micro-machined device for fluids and method of manufacture |
US6069419A (en) * | 1998-06-16 | 2000-05-30 | Tabib-Azar; Massood | Micro-actuator assembly |
US6533951B1 (en) * | 2000-07-27 | 2003-03-18 | Eastman Kodak Company | Method of manufacturing fluid pump |
US6386680B1 (en) * | 2000-10-02 | 2002-05-14 | Eastman Kodak Company | Fluid pump and ink jet print head |
US6645757B1 (en) * | 2001-02-08 | 2003-11-11 | Sandia Corporation | Apparatus and method for transforming living cells |
US6801679B2 (en) * | 2001-11-23 | 2004-10-05 | Seungug Koh | Multifunctional intelligent optical modules based on planar lightwave circuits |
US7372616B2 (en) * | 2001-12-06 | 2008-05-13 | Microfabrica, Inc. | Complex microdevices and apparatus and methods for fabricating such devices |
US6827559B2 (en) * | 2002-07-01 | 2004-12-07 | Ventaira Pharmaceuticals, Inc. | Piezoelectric micropump with diaphragm and valves |
US20040126254A1 (en) * | 2002-10-31 | 2004-07-01 | Chen Ching Jen | Surface micromachined mechanical micropumps and fluid shear mixing, lysing, and separation microsystems |
US7316543B2 (en) * | 2003-05-30 | 2008-01-08 | The Board Of Trustees Of The Leland Stanford Junior University | Electroosmotic micropump with planar features |
US20060226733A1 (en) * | 2005-04-07 | 2006-10-12 | Samsung Electronics Co., Ltd. | Actuator and method of driving the same |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US20170247966A1 (en) * | 2014-12-01 | 2017-08-31 | Halliburton Energy Services, Inc. | Damaged seal bore repair device |
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Owner name: CHUNG YUAN CHRISTIAN UNIVERSITY, TAIWAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:CHANG, YAW-JEN;SHIU, MING-CHENG;REEL/FRAME:019876/0445;SIGNING DATES FROM 20070921 TO 20070922 |
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STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |