US20080121801A1 - Deicing of radiation detectors in analytical instruments - Google Patents
Deicing of radiation detectors in analytical instruments Download PDFInfo
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- US20080121801A1 US20080121801A1 US11/432,909 US43290906A US2008121801A1 US 20080121801 A1 US20080121801 A1 US 20080121801A1 US 43290906 A US43290906 A US 43290906A US 2008121801 A1 US2008121801 A1 US 2008121801A1
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- thermoelectric element
- mount
- detector
- radiation detector
- analysis chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B21/00—Machines, plants or systems, using electric or magnetic effects
- F25B21/02—Machines, plants or systems, using electric or magnetic effects using Peltier effect; using Nernst-Ettinghausen effect
- F25B21/04—Machines, plants or systems, using electric or magnetic effects using Peltier effect; using Nernst-Ettinghausen effect reversible
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/002—Cooling arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/18—Vacuum control means
- H01J2237/182—Obtaining or maintaining desired pressure
Definitions
- This document concerns an invention relating generally to inhibiting or preventing ice formation on cooled (e.g., cryogenically chilled) sensors present in analytical instruments, and more specifically to ice prevention/removal on cooled radiation detectors such as those found in electron microscopes.
- cooled e.g., cryogenically chilled
- Various instruments for analyzing the characteristics of materials rely on sensors for at least a portion of their measurement operations, with these sensors being chilled to low temperatures to enhance measurement accuracy (e.g., by decreasing electronic “noise”).
- electron microscopes often include an X-ray detector (such as a silicon sensor) mounted at the end of an elongated probe or other mount, often called a “cold finger,” which is situated next to a specimen to be analyzed.
- the cold finger is chilled to cryogenic (ultralow) temperatures, usually by a Dewar system utilizing liquid nitrogen coolant, though some systems use a standard refrigeration cycle for cooling (i.e., evaporative cooling).
- thermoelectric Peltier cooling of detectors.
- the specimen is bombarded by electrons from the microscope's electron beam, it emits X-rays which are picked up by the detector.
- the detector measurements can be processed to provide information regarding the specimen's material and other characteristics.
- Some detectors and mounts are partially insulated from the analysis chamber by a surrounding shell about the mount and/or a window between the chamber and the detector; however, even these arrangements tend to accumulate ice and oil on the shell and/or window. Additionally, while windows help protect detectors from contamination, they can also block lower-energy emissions that could otherwise be usefully detected by the detector.
- the invention is primarily intended for implementation in an analytical instrument 100 having a radiation detector 102 , such as the electron microscope schematically depicted in the accompanying FIGURE.
- a radiation detector 102 such as the electron microscope schematically depicted in the accompanying FIGURE.
- a radiation detector 102 receives radiation emitted from the specimen 104 to provide information regarding the characteristics of the specimen 104 .
- the foregoing components are situated within an analysis chamber 112 , which is evacuated by means of a vacuum pump 114 .
- the radiation detector 102 is coupled to a thermally conductive mount 116 (e.g., a “cold finger” made of copper and/or another conductive metal), which is shown as being slidably connected to the analysis chamber 112 to allow the radiation detector 102 to be advanced or retracted to a desired position relative to the sample stage 106 .
- the mount 116 is then coupled to a thermoelectric element 118 such as one or more Peltier junctions, with a multi-element “stack” being depicted in the FIGURE.
- the thermoelectric element(s) 118 have a cold side 120 adjacent the mount 116 and detector 102 and an opposing hot side 122 .
- a heat sink 124 is coupled to the hot side 122 of the thermoelectric element(s) 118 to allow cooling of the mount 116 when the element(s) 118 are supplied with power from a cooling power supply 126 .
- the detector 102 may be isolated from the chamber interior by a shell 128 surrounding the mount 116 , and by a window 130 situated on the shell 128 between the sample stage 106 and the detector 102 .
- a housing 132 about the element(s) 118 is joined to the chamber 112 via a bellows 134 which helps prevent air from leaking into the chamber 112 , with such leakage also being deterred by a seal 136 in the walls of the chamber 112 about the mount 116 . (or about the shell 128 surrounding the mount 116 ).
- the analysis chamber 112 is at least substantially evacuated by the vacuum pump 114 , and current is supplied to the thermoelectric element(s) 118 by the cooling power supply 126 to decrease the temperature of the mount 116 and the radiation detector 102 to an operating temperature.
- the electron beam source 110 is then activated, and the radiation detector 102 is used to take measurements from the specimen 104 . If the mount 116 and detector 102 are maintained at low temperatures for an extended period of time (as they often are), oil condensates and/or ice can form on the detector 102 (or on the adjacent window 130 , if present), and thereby interfere with measurements.
- another power supply 138 one configured to increase the temperature of the mount 116 and the radiation detector 102 to a conditioning temperature sufficient to melt ice, and evaporate oil/water condensates—can be provided in connection with the thermoelectric element(s) 118 to heat them when desired.
- the heating power supply 138 can maintain the temperature of the radiation detector 102 at or about the conditioning temperature for a discrete conditioning period sufficient to drive off water and oil, and can then be turned off.
- the cooling power supply 126 can then be reactivated to supply suitable current to the thermoelectric element(s) 118 to return the radiation detector 102 to a temperature at or about the operating temperature, at which point the radiation detector 102 may resume taking measurements. (It is recommended that the detector 102 only take measurements when at the operating temperature, and that it not take measurements during the conditioning period, since the heated detector 102 may exhibit substantial measurement noise.)
- thermoelectric element(s) 118 can actively heat the mount 116 and detector 102 —that is, they can raise the temperature of the detector 102 to a conditioning temperature above the ambient temperature (as measured outside the analysis chamber 112 ), rather than simply turning off so that the mount 116 and detector 102 slowly warm from their operating temperature to the ambient temperature—reconditioning of the detector 102 (i.e., removal of oil and water/ice) can be very quickly performed with conditioning periods of 15 minutes or less.
- FIG. 1 is a schematic view of an exemplary preferred version of the invention, showing a radiation detector 102 situated at the end of a mount or “cold finger” 116 opposite a specimen 104 (which receives an electron beam 108 from an electron source 110 ), and wherein a stack of thermoelectric elements 118 can cool the mount 116 (and thus the detector 102 ) to an operating temperature via a cooling power supply 126 so that the detector 102 may take measurements from the specimen 104 , and/or heat the mount 116 and detector 102 to a conditioning temperature via a heating power supply 138 to remove water/ice and oil condensates from the detector 102 .
- the analytical instrument 100 depicted in the FIGURE can be readily constructed from existing electron microscopes, with examples being the FEI (Hillsboro, Oreg., USA) Nova, Quanta, Altura, Expida, Strata, Tecnai, and Titan series electron microscopes, Carl Zeiss SMT (Thormwood, NY, USA) Supra, Ultra, Libra, and CrossBeam series electron microscopes, Hitachi (Pleasanton, Calif., USA) S and H series electron microscopes, and JEOL (Tokyo, JP) JSM series electron microscopes.
- FEI Heillsboro, Oreg., USA
- Nova Quanta
- Altura Expida
- Strata Strata
- Tecnai Titan series electron microscopes
- Carl Zeiss SMT Thiormwood, NY, USA
- Supra Ultra, Libra
- CrossBeam series electron microscopes Hitachi (Pleasanton, Calif., USA) S and H series electron microscopes
- JEOL Tokyo
- the instrument 100 is merely an exemplary preferred version of the invention, it should be kept in mind that the invention, as claimed below, can assume a variety of forms which drastically vary from the one shown in the FIGURE.
- the vacuum chamber 112 may be shaped differently, the analytical instrument may be other than an electron microscope 100 (and thus the electron beam source 110 may not be present), and the radiation detector 102 may measure electromagnetic radiation in wavelength ranges other than or in addition to X-rays (for example, in the infrared range).
- the mount 116 may have a configuration other than as an elongated “cold finger,” and while the mount 116 shown in the FIGURE is translatably mounted to the analysis chamber 112 with respect to the sample stage 106 via an O-ring or other seal 136 , the mount 116 could instead be stationary, or could be made movable within the chamber 112 by other arrangements.
- the nature, configuration, and layout of the thermoelectric element(s) 118 , the cooling and heating power supplies 126 and 138 , and the heat sink 124 may vary widely, since such components are available in a broad range of different configurations.
- the shell 128 and window 130 which serve to isolate the mount 116 and detector 102 from the analysis chamber 112 (and thus from condensation of water and oil from the chamber 112 onto the detector 102 ), need not be present. If they are present, in which case condensation and icing may occur on the shell 128 and window 130 rather than on the mount 116 and detector 102 , the shell 128 might be conductively coupled to the thermoelectric element(s) 118 so that the shell 128 and window 130 can be efficiently heated. Alternatively, the shell 128 could be coupled to a separate set of one or more thermoelectric elements (and to a heating power supply), one not shown in the FIGURE, so that it can be heated independently of any cooling of the mount 116 and detector 102 .
- thermoelectric elements 118 and a cooling power supply 126 , and/or some other form of cooling means, could be situated in the analysis chamber 112 at a location spaced away from the mount 116 and detector 102 , and these could be activated when the mount 116 and detector 102 are warmed to the conditioning temperature. In this manner, water and oil that have condensed on the mount 116 and detector 102 can be driven off and collected on the separate thermoelectric elements (and/or other cooling means).
- Other arrangements such as those noted in the prior patents listed at the outset of this document, could also or alternatively be used.
- thermoelectric elements 118 could be used to heat a detector 102 to a conditioning temperature in cases where conventional liquid nitrogen or other cryogenic cooling systems are used.
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
Description
- This document concerns an invention relating generally to inhibiting or preventing ice formation on cooled (e.g., cryogenically chilled) sensors present in analytical instruments, and more specifically to ice prevention/removal on cooled radiation detectors such as those found in electron microscopes.
- Various instruments for analyzing the characteristics of materials rely on sensors for at least a portion of their measurement operations, with these sensors being chilled to low temperatures to enhance measurement accuracy (e.g., by decreasing electronic “noise”). As an example, electron microscopes often include an X-ray detector (such as a silicon sensor) mounted at the end of an elongated probe or other mount, often called a “cold finger,” which is situated next to a specimen to be analyzed. The cold finger is chilled to cryogenic (ultralow) temperatures, usually by a Dewar system utilizing liquid nitrogen coolant, though some systems use a standard refrigeration cycle for cooling (i.e., evaporative cooling). Additionally, one provider (Thermo Electron, Madison, Wis., USA) has long provided thermoelectric (Peltier) cooling of detectors. During operation, as the specimen is bombarded by electrons from the microscope's electron beam, it emits X-rays which are picked up by the detector. The detector measurements can be processed to provide information regarding the specimen's material and other characteristics.
- These arrangements suffer from the unfortunate disadvantage that while cooling of the detector enhances measurement quality, cooling also increases the possibility that the detector will be fouled (and its measurements skewed) owing to water/oil condensation, and ice formation, on the cooled detector. Moisture and oil are often present in the analysis chamber wherein the specimen and detector are located, with the oil originating from the vacuum pumping system. While they can be diminished by steps such as evacuating the analysis chamber so the specimen and detector are in vacuum (a common step), ice and oil condensates still tend to collect on the detector owing to factors such as residual gas within the analysis chamber and moisture release from the specimen. Some detectors and mounts are partially insulated from the analysis chamber by a surrounding shell about the mount and/or a window between the chamber and the detector; however, even these arrangements tend to accumulate ice and oil on the shell and/or window. Additionally, while windows help protect detectors from contamination, they can also block lower-energy emissions that could otherwise be usefully detected by the detector.
- As discussed in U.S. Pat. Nos. 4,931,650 and 5,274,237, the foregoing difficulties have led to the development of a variety of corrective devices and methodologies. Both patents describe the use of periodic warm-up cycles wherein the mount and detector are allowed to warm up to drive off water. U.S. Pat. No. 4,931,650 assists such a procedure by incorporating a resistive heater for warming the detector, and U.S. Pat. No. 5,274,237 has a portion of the analysis chamber about the detector at a cooler temperature so that the bulk of any ice will form away from the detector. However, it would be useful to have further arrangements available for avoiding detector ice contamination in electron microscopes and other analytical instruments.
- The invention involves arrangements which are intended to at least partially address the aforementioned problems. A brief summary of an exemplary version of the invention follows below in order to give the reader a basic understanding of some of its advantageous features, with reference being made to the accompanying drawing, which schematically depicts the exemplary version. Since this is merely a summary, it should be understood that more details regarding preferred versions of the invention may be found in the Detailed Description set forth elsewhere in this document. The claims set forth at the end of this document then define the various versions of the invention in which exclusive rights are secured.
- The invention is primarily intended for implementation in an
analytical instrument 100 having aradiation detector 102, such as the electron microscope schematically depicted in the accompanying FIGURE. In theelectron microscope 100, aspecimen 104 on asample stage 106 is subjected to anelectron beam 108 from anelectron beam source 110, and a radiation detector 102 (here an X-ray detector) receives radiation emitted from thespecimen 104 to provide information regarding the characteristics of thespecimen 104. The foregoing components are situated within ananalysis chamber 112, which is evacuated by means of avacuum pump 114. - The
radiation detector 102 is coupled to a thermally conductive mount 116 (e.g., a “cold finger” made of copper and/or another conductive metal), which is shown as being slidably connected to theanalysis chamber 112 to allow theradiation detector 102 to be advanced or retracted to a desired position relative to thesample stage 106. Themount 116 is then coupled to athermoelectric element 118 such as one or more Peltier junctions, with a multi-element “stack” being depicted in the FIGURE. The thermoelectric element(s) 118 have acold side 120 adjacent themount 116 anddetector 102 and an opposinghot side 122. Aheat sink 124, here shown as a series of fins, is coupled to thehot side 122 of the thermoelectric element(s) 118 to allow cooling of themount 116 when the element(s) 118 are supplied with power from acooling power supply 126. To deter ice formation and/or oil condensation on themount 116 anddetector 102, thedetector 102 may be isolated from the chamber interior by ashell 128 surrounding themount 116, and by awindow 130 situated on theshell 128 between thesample stage 106 and thedetector 102. In addition, ahousing 132 about the element(s) 118 is joined to thechamber 112 via abellows 134 which helps prevent air from leaking into thechamber 112, with such leakage also being deterred by aseal 136 in the walls of thechamber 112 about themount 116. (or about theshell 128 surrounding the mount 116). - In operation, the
analysis chamber 112 is at least substantially evacuated by thevacuum pump 114, and current is supplied to the thermoelectric element(s) 118 by thecooling power supply 126 to decrease the temperature of themount 116 and theradiation detector 102 to an operating temperature. Theelectron beam source 110 is then activated, and theradiation detector 102 is used to take measurements from thespecimen 104. If themount 116 anddetector 102 are maintained at low temperatures for an extended period of time (as they often are), oil condensates and/or ice can form on the detector 102 (or on theadjacent window 130, if present), and thereby interfere with measurements. To reduce or eliminate this problem, anotherpower supply 138—one configured to increase the temperature of themount 116 and theradiation detector 102 to a conditioning temperature sufficient to melt ice, and evaporate oil/water condensates—can be provided in connection with the thermoelectric element(s) 118 to heat them when desired. (It is also possible to simply have a single power supply which is reversible so as to provide both cooling and heating functions, but since control and reversibility is expensive to achieve with readily available power supplies, it is generally less expensive to simply utilize separate power supplies for heating and cooling of the same element(s) 118.) Theheating power supply 138 can maintain the temperature of theradiation detector 102 at or about the conditioning temperature for a discrete conditioning period sufficient to drive off water and oil, and can then be turned off. Thecooling power supply 126 can then be reactivated to supply suitable current to the thermoelectric element(s) 118 to return theradiation detector 102 to a temperature at or about the operating temperature, at which point theradiation detector 102 may resume taking measurements. (It is recommended that thedetector 102 only take measurements when at the operating temperature, and that it not take measurements during the conditioning period, since theheated detector 102 may exhibit substantial measurement noise.) - Beneficially, since the thermoelectric element(s) 118 can actively heat the
mount 116 anddetector 102—that is, they can raise the temperature of thedetector 102 to a conditioning temperature above the ambient temperature (as measured outside the analysis chamber 112), rather than simply turning off so that themount 116 anddetector 102 slowly warm from their operating temperature to the ambient temperature—reconditioning of the detector 102 (i.e., removal of oil and water/ice) can be very quickly performed with conditioning periods of 15 minutes or less. This is a significant advantage in comparison to prior arrangements wherein reconditioning simply occurred by removing the cooling source (e.g., by terminating the supply of liquid nitrogen or other refrigerant), and hours were required for thedetector 102 to slowly return to ambient temperature and for water/oil to evaporate off thedetector 102. - Further advantages, features, and objects of the invention will be apparent from the remainder of this document in conjunction with the associated drawings.
-
FIG. 1 is a schematic view of an exemplary preferred version of the invention, showing aradiation detector 102 situated at the end of a mount or “cold finger” 116 opposite a specimen 104 (which receives anelectron beam 108 from an electron source 110), and wherein a stack ofthermoelectric elements 118 can cool the mount 116 (and thus the detector 102) to an operating temperature via acooling power supply 126 so that thedetector 102 may take measurements from thespecimen 104, and/or heat themount 116 anddetector 102 to a conditioning temperature via aheating power supply 138 to remove water/ice and oil condensates from thedetector 102. - The
analytical instrument 100 depicted in the FIGURE can be readily constructed from existing electron microscopes, with examples being the FEI (Hillsboro, Oreg., USA) Nova, Quanta, Altura, Expida, Strata, Tecnai, and Titan series electron microscopes, Carl Zeiss SMT (Thormwood, NY, USA) Supra, Ultra, Libra, and CrossBeam series electron microscopes, Hitachi (Pleasanton, Calif., USA) S and H series electron microscopes, and JEOL (Tokyo, JP) JSM series electron microscopes. However, since theinstrument 100 is merely an exemplary preferred version of the invention, it should be kept in mind that the invention, as claimed below, can assume a variety of forms which drastically vary from the one shown in the FIGURE. As examples, thevacuum chamber 112 may be shaped differently, the analytical instrument may be other than an electron microscope 100 (and thus theelectron beam source 110 may not be present), and theradiation detector 102 may measure electromagnetic radiation in wavelength ranges other than or in addition to X-rays (for example, in the infrared range). Themount 116 may have a configuration other than as an elongated “cold finger,” and while themount 116 shown in the FIGURE is translatably mounted to theanalysis chamber 112 with respect to thesample stage 106 via an O-ring orother seal 136, themount 116 could instead be stationary, or could be made movable within thechamber 112 by other arrangements. In addition, the nature, configuration, and layout of the thermoelectric element(s) 118, the cooling andheating power supplies heat sink 124 may vary widely, since such components are available in a broad range of different configurations. - As previously noted, the
shell 128 andwindow 130, which serve to isolate themount 116 anddetector 102 from the analysis chamber 112 (and thus from condensation of water and oil from thechamber 112 onto the detector 102), need not be present. If they are present, in which case condensation and icing may occur on theshell 128 andwindow 130 rather than on themount 116 anddetector 102, theshell 128 might be conductively coupled to the thermoelectric element(s) 118 so that theshell 128 andwindow 130 can be efficiently heated. Alternatively, theshell 128 could be coupled to a separate set of one or more thermoelectric elements (and to a heating power supply), one not shown in the FIGURE, so that it can be heated independently of any cooling of themount 116 anddetector 102. - In similar respects, one or more thermoelectric elements 118 (and a cooling power supply 126), and/or some other form of cooling means, could be situated in the
analysis chamber 112 at a location spaced away from themount 116 anddetector 102, and these could be activated when themount 116 anddetector 102 are warmed to the conditioning temperature. In this manner, water and oil that have condensed on themount 116 anddetector 102 can be driven off and collected on the separate thermoelectric elements (and/or other cooling means). Other arrangements, such as those noted in the prior patents listed at the outset of this document, could also or alternatively be used. - The use of a
heating power supply 138 in conjunction with thermoelectric heating elements is not limited to situations where thermoelectric cooling is used. Thus,thermoelectric elements 118 could be used to heat adetector 102 to a conditioning temperature in cases where conventional liquid nitrogen or other cryogenic cooling systems are used. - Preferred versions of the invention have been described above in order to illustrate how to make and use the invention. The invention is not intended to be limited to these versions, but rather is intended to be limited only by the claims set out below. Thus, the invention encompasses all different versions that fall literally or equivalently within the scope of these claims.
Claims (21)
Priority Applications (3)
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US11/432,909 US7378664B1 (en) | 2006-05-12 | 2006-05-12 | Deicing of radiation detectors in analytical instruments |
PCT/US2007/011332 WO2008060326A2 (en) | 2006-05-12 | 2007-05-09 | Deicing of radiation detectors in analytical instruments |
EP07867114.6A EP2021830B1 (en) | 2006-05-12 | 2007-05-09 | Deicing of radiation detectors in analytical instruments |
Applications Claiming Priority (1)
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US11/432,909 US7378664B1 (en) | 2006-05-12 | 2006-05-12 | Deicing of radiation detectors in analytical instruments |
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US7378664B1 US7378664B1 (en) | 2008-05-27 |
US20080121801A1 true US20080121801A1 (en) | 2008-05-29 |
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US11/432,909 Active 2026-08-03 US7378664B1 (en) | 2006-05-12 | 2006-05-12 | Deicing of radiation detectors in analytical instruments |
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US (1) | US7378664B1 (en) |
EP (1) | EP2021830B1 (en) |
WO (1) | WO2008060326A2 (en) |
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US20110204229A1 (en) * | 2009-05-15 | 2011-08-25 | Frederick H Schamber | Electron microcope whith integrated detector(s) |
US9972474B2 (en) | 2016-07-31 | 2018-05-15 | Fei Company | Electron microscope with multiple types of integrated x-ray detectors arranged in an array |
JP2019035642A (en) * | 2017-08-14 | 2019-03-07 | 日本電子株式会社 | X-ray analyzer and spectrum generating method |
WO2022037980A1 (en) * | 2020-08-21 | 2022-02-24 | Asml Netherlands B.V. | Detector module comprising printed circuit board for sealing vacuum chamber |
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US20070125303A1 (en) * | 2005-12-02 | 2007-06-07 | Ward Ruby | High-throughput deposition system for oxide thin film growth by reactive coevaportation |
US7684545B2 (en) * | 2007-10-30 | 2010-03-23 | Rigaku Innovative Technologies, Inc. | X-ray window and resistive heater |
US8080791B2 (en) | 2008-12-12 | 2011-12-20 | Fei Company | X-ray detector for electron microscope |
EP3196919B1 (en) * | 2016-10-20 | 2018-09-19 | FEI Company | Cryogenic specimen processing in a charged particle microscope |
DE102018216968B9 (en) * | 2018-10-02 | 2021-01-28 | Carl Zeiss Microscopy Gmbh | Method for setting a position of a component of a particle beam device, computer program product and particle beam device for performing the method |
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US8987665B2 (en) * | 2009-05-15 | 2015-03-24 | Fei Company | Electron microscope with integrated detector(s) |
US9972474B2 (en) | 2016-07-31 | 2018-05-15 | Fei Company | Electron microscope with multiple types of integrated x-ray detectors arranged in an array |
JP2019035642A (en) * | 2017-08-14 | 2019-03-07 | 日本電子株式会社 | X-ray analyzer and spectrum generating method |
WO2022037980A1 (en) * | 2020-08-21 | 2022-02-24 | Asml Netherlands B.V. | Detector module comprising printed circuit board for sealing vacuum chamber |
TWI826816B (en) * | 2020-08-21 | 2023-12-21 | 荷蘭商Asml荷蘭公司 | Printed circuit board for sealing vacuum system |
Also Published As
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EP2021830A2 (en) | 2009-02-11 |
EP2021830A4 (en) | 2015-04-29 |
US7378664B1 (en) | 2008-05-27 |
EP2021830B1 (en) | 2016-08-03 |
WO2008060326A3 (en) | 2008-11-20 |
WO2008060326A2 (en) | 2008-05-22 |
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