US20070207589A1

US20070207589A1 - Registration mark within an overlap of dopant regions

Info

Publication number: US20070207589A1
Application number: US11/744,992
Authority: US
Inventors: Franz Dietz; Volker Dudek; Michael Graf; Stefan Schwantes; Gayle Miller
Original assignee: Atmel Corp
Current assignee: Atmel Corp
Priority date: 2005-08-31
Filing date: 2007-05-07
Publication date: 2007-09-06
Also published as: WO2007030231A2; US7230342B2; WO2007030231A3; CN101292329A; EP1922747A2; US20070048959A1; TW200717694A; JP2009506567A

Abstract

A first mark, in a double-well integrated circuit technology, is formed by a first etching of a first mask layer on top of an ONO stack. After a first well is doped, a second etching occurs at the first etching sites in the uppermost layer of oxide of the ONO stack forming a first alignment artifact. A second mask layer is applied after removing the first mask layer. A second well doping occurs at second mask layer etching sites to maintain clearance between the two wells within active areas and provide an overlap of the two wells in a frame area. At the first alignment artifact in the overlap of the two wells, further etchings remove remaining layers of the ONO stack and remove silicon from the upper most layer of the semiconductor forming a second registration mark, which may be covered by a protective layer.

Description

CROSS-REFERENCE TO RELATED APPLICATION

This is a divisional application of pending U.S. patent application Ser. No. 11/217,250 filed Aug. 31, 2005.

TECHNICAL FIELD

The present invention relates to the general fabrication of an integrated circuit. More specifically, the invention is a registration mark for mask alignment and a method of fabrication of the mark in a semi-conductor technology.

BACKGROUND ART

In integrated circuit production, a layer-to-layer alignment and registration of fabrication masks is critical. The alignment of one mask layer to another or of a mask layer to a previously applied dopant is frequently critical to the fabrication of active devices or to electrical properties such as isolation capabilities, threshold parameters, or breakdown voltages. A misalignment of a sequence of fabrication steps may mean that a device is out of specification or inoperable. Yield and performance numbers for a device in production may vary significantly causing considerable cost consequences.
Typically a device site on a semiconductor wafer will have alignment or registration marks in the kerf or scribe line area. These registration marks allow automated or manually adjusted optical equipment, such as mask alignment tools, to register a mask layer to the die site. Many interdependencies exist in mask alignment including a lack of “run-out” (nonlinearity) in the features across the mask surface as well as an accurate planarity of the mask relative to the die surface. Variation of these quantities must be kept to a minimum over a considerable distance in order for features in the middle of the die area to be rendered accurately.
Certain technologies require device dimensions to be critically positioned in order to meet specifications and perform as intended. Device performance parameters such as breakdown voltages, threshold voltages, and electrical isolation capabilities depend critically on fabrication layer-to-layer registration in certain integrated circuit technologies such as high-voltage MOS (HVMOS), DMOS and BCDMOS (Bipolar CMOS-DMOS). These technologies rely crucially on fabrication alignment to have sufficient electrical performance characteristics and yield.
For example, in DMOS technology, a drain-to-source breakdown voltage (BVDSS) and an “on-channel resistance” (R_DS(ON)) vary directly with a variation in layer-to-layer registration. What is needed is a method and structure to allow mask alignment and registration of the critical layers to be accomplished within either a die site frame or a die site itself.

DISCLOSURE OF INVENTION

A double-well integrated circuit technology is fabricated with an overlap of two dopant regions. Within the overlap region, a registration mark is fabricated by further etching through protection layers and an upper layer of a semiconductor substrate at a first dopant window. Following etching, a passivation layer is applied. The first dopant window is an artifact of a doping step of the first well and a first etching of an uppermost protection layer. The overlap region is formed from two dopants. Improved alignment capabilities provide commensurate enhancement of critical device electrical operating parameters that depend on topological registration. No extra masks are required to fabricate the registration mark and no additional topological buildup occurs as with registration marks fabricated with oxide layers. The ability to avoid extra oxide fabrication means that the wafer remains flat which enhances the ability to perform subsequent fabrication steps with a planar surface.

BRIEF DESCRIPTION OF DRAWINGS

FIGS. 1-8 are exemplary cross-sectional diagrams of a registration mark formation in a semiconductor technology.
FIG. 9 is an exemplary process flow diagram of a registration mark fabrication of the present invention in a semiconductor technology.

MODES FOR CARRYING OUT THE INVENTION

With reference to FIG. 1, an exemplary starting cross-section of a double well technology 100 begins with an oxide isolation layer 110 positioned on top of a semiconductor substrate 105. A continuous layer of silicon on insulator layer 115 is produced over the oxide isolation layer 110.
In a specific exemplary embodiment, the oxide isolation layer 110 ranges from 3,000 to 20,000 angstroms (Å) of silicon dioxide (SiO₂). The oxide isolation layer 110 is, for example, thermally grown on top of the semiconductor substrate 105 if the substrate 105 is silicon. The silicon on insulator layer 115 is fabricated on top of the oxide isolation layer 110 to a thickness ranging from 0.2 to 20 micrometers (μm). The first oxide layer 120 is a 100 Å pad oxide thermally grown on the silicon on insulator layer 110. 200 Å of silicon nitride (SiN) is applied upon the first oxide layer 120 to form a silicon nitride layer 125. Upon the silicon nitride layer 125, a 500 Å layer of oxide is produced by high-density plasma chemical vapor deposition (HDP-CVD) to form the second oxide layer 130.
With reference to FIG. 2, a first photoresist 205 is applied, for example, 6000 Å, on top of the second oxide 130. The application is performed, for example, both in a frame area 222 and an active area 255. The first photoresist 205 is treated as a critical layer and patterned to form a plurality of first dopant windows 215 for nwell regions. First dopant regions 210 are formed beneath the first thermal oxide 120. Formation of the first dopant regions 210 is accomplished by, for example, a range of 10 to 1,000 keV of phosphorus doping by ion beam implantation at a dose of 1×10¹²to 5×10¹⁴cm⁻²through the first dopant windows 215 into an upper surface of the silicon on insulator layer 115. The first dopant regions 210 overlap a defining edge of the first photoresist 205 by a first lateral diffusion overlap 235. After the implant, an annealing step eliminates any lattice damage in the silicon on insulator layer 115.
With reference to FIG. 3, etched second oxide windows 305 are positioned in the second oxide layer 130. The second oxide windows 305 are etched in the second oxide 130 at locations of the first dopant windows 215 (FIG. 2). Remnants of the second oxide windows 305 are first alignment artifacts for forming a registration mark (not shown) described infra.
With reference to FIG. 4, a second photoresist 405 is applied to the surface of a double well technology device. The second photoresist 405 is applied to a thickness of, for example, 6000 Å above the second oxide layer 130 and fills the locations of the second oxide windows 305. The second oxide windows 305 formed at the sites of the first dopant windows 215 forms a self-aligned layer over the first dopant regions 210 for protection from subsequent implantation.
With reference to FIG. 5, a patterned second photoresist 505 resides on top of the second oxide 130 and the silicon nitride 125 after patterning of the second photoresist 405. A correctly patterned second photoresist 505 assists in forming a subsequent doped region. The patterned second photoresist 505 forms oxide dopant windows 510 a over the second oxide 130 and nitride dopant windows 510 b over the silicon nitride layer 125. A second dopant region 515 of an acceptor dopant, for example, is implanted into an upper surface of the device through both types of dopant windows 510 a, 510 b. A dose of an acceptor dopant, for example, such as boron difluoride (BF₂) at about a range of 1×10¹²to 5×10¹⁴cm⁻²forms the second dopant region 515.
The oxide dopant windows 510 a are positioned in the active area 255 and the frame area 222 relative to the first alignment artifacts. The first alignment artifacts are the second oxide windows 305 (FIG. 3). In the active area 255, a second oxide window to oxide dopant window spacing 555 is maintained between edges of second oxide windows 305 and edges of oxide dopant windows 510 a. The second dopant region 515 overlaps a defining edge of the second photoresist 505 by a second lateral diffusion overlap 535. The first dopant region 210 is positioned relative to the second dopant region 515 by maintaining a first dopant to second dopant spacing 545 as a minimum to ensure that no overlap of the two regions occurs in the active area 255. The second oxide window to oxide dopant window spacing 555 is chosen sufficiently large to maintain the first dopant to second dopant spacing 545.
Where the second dopant region 515 overlaps the first dopant region 210 in the frame area 222 (FIG. 2), an overlap region 520 is formed. In the frame area 222, a nitride dopant window to second oxide window overlap 525 is maintained between edges of nitride dopant windows 510 b and edges of oxide dopant windows 510 a. The nitride dopant windows 510 b are the same first alignment artifacts, or remnants of the second oxide windows 305 (FIG. 3), mentioned supra.
With reference to FIG. 6, a registration mark recess 605 is formed by etching through the nitride dopant window 510 b (FIG. 5), the first thermal oxide 120, and through the vertical extent of the overlap region 520. The upper layer on the overlap region 520 is etched, for example, to a depth of at least 250 Å, to form a lowermost extent of the registration mark recess 605. Geometries of the etching through the nitride dopant window 510 b and the first thermal oxide 120 combined with the selectivity of a silicon etchant, ensure that the etching of the upper surface layer of the overlap region 520 is limited in lateral extent. Therefore, no etching of the registration mark recess 605 extends laterally past the overlap region 520.
With reference to FIG. 7, a registration mark 710 is formed by removing protective layers and photoresist and by applying a third oxide layer 720. In a specific exemplary embodiment, the registration mark 710 is formed by stripping the 6000 Å critical photoresist, the ONO structure, and applying a 200 Å third oxide layer 720.
The ONO structure is removed by the application of a buffered oxide etch (BOE) and hot phosphoric acid in the sequence BOE/Hot Phosphoric/BOE. For example, silicon oxide removal is performed using a BOE solution of six parts 40% NH₄F and one part 49% HF for an etch rate of about 1200 Å/min at 22° C. A hot phosphoric acid bath of H₃PO₄in an etchant of H₃PO₄:CrO₃:NaCN, for example, will remove the silicon nitride layer but not etch the remaining silicon dioxide layer. The third oxide layer 720 is grown thermally on top of the silicon on insulator 115 and covers the registration mark recess 605 (FIG. 6).
With reference to FIG. 8, a third photoresist 805 is applied to an upper surface of the third oxide layer 720 and patterned for a third dopant. The third photoresist 805 is, for example, a 13,300 Å thick resist layer. The patterning occurs relative to the registration mark 710 within the overlap region 520. A set of third dopant regions 810 is formed. The third dopant region 810 may be formed for example, with a 150 keV ion implant of phosphorus and a dose of 5.4×10¹²cm⁻².
In FIG. 9, an exemplary process flow diagram 900 of a registration mark formation process begins by applying 905 a protective stack to an upper surface of a semiconductor substrate and producing a first dopant region in a device. The first dopant is produced by applying 910 a first photoresist, patterning 915 the first photoresist, and doping 920 the device with a first dopant. The process continues with fabrication of a second dopant by etching 925 an upper portion of the protective layer, applying 930 a second photoresist, patterning 935 the second photoresist, and doping 940 the device with a second dopant. Preparation of the area for the registration mark continues with forming 945 an overlap region, etching 950 a registration mark recess in the overlap region, and applying 955 a protective layer to an uppermost surface of the device, including covering the registration mark recess with the protective layer.
Additional exemplary process flow steps for forming a registration mark continue by utilizing the registration mark for applying 965 a third photoresist to the uppermost surface of the device, aligning 970 a pattern of the third photoresist relative to the registration mark, and doping 975 with a third dopant.
An improved registration mark has been presented which requires no additional masks nor uses any further oxide buildup in its formation. Avoidance of further oxide buildup maintains a planar wafer surface easing registration of further fabrication steps. The improved alignment capabilities provide commensurate enhancement of critical device electrical operating parameters that depend on topological registration.
While various process steps have been portrayed within the present invention in a particular manner, a skilled artisan would recognize that fabrication steps, application of dopants, and stripping processes for various layers is readily accomplished with a variety of different techniques. For instance, a dopant has been described as being applied within an uppermost surface layer of a semiconductor device. A skilled artisan would recognize that such a dopant may be applied as an ion beam implant, diffused from a dopant gas applied within a chamber at an elevated temperature, or applied as a spin-on dopant and diffused at an elevated temperature. An etching process has been described as being performed to provide critical features in a silicon substrate through existing layers of silicon nitride, silicon dioxide, and lightly doped silicon. A skilled artisan would recognize that etching may be performed by wet chemical processes, ion milling, and reactive ion etching. An artisan, skilled in the craft, would also recognize that certain etching processes, such as the wet chemical processes, are either isotropic or anisotropic in a directional selectivity nature. While an application of a first and second dopant has been presented as preceding an etching of an upper portion of the protective layer or an etching of a registration mark recess in an overlap region respectively, an artisan skilled in the field would readily understand that the order of these two steps are reversible.
A registration mark has been described as being fabricated within a double-well technology, being located in a frame area. A skilled artisan would recognize that the registration mark could also be located in a scribe line, a kerf area, or the “streets” between dice. One skilled in the art of semiconductor fabrication would recognize that a registration mark of the present invention may be fabricated within any semiconductor process capable of forming an overlap region of two dopants. A skilled artisan would also recognize that a registration mark of the present invention is also able to be located within any region, including an active area, where, for example, the mark may be utilized for critical alignment of active layer dopants.
Furthermore, the skilled artisan would readily understand how the same registration mark may be fabricated and utilized for registration of maskable features in a wide variety of semiconductor regions to register features for well dopants, active devices, and passive devices. Additionally, a skilled artisan would be able to conceive of the use of a registration mark of the present invention to, in effect, align a maskless fabrication step that in turn relied on a directly registered process step utilizing the present invention. Likewise, the skilled artisan would recognize the applicability of the present invention to a substrate that is not a semiconductor structure, the present invention would be applicable to any substrate amenable to implantation, deposition, coatings, etching, or equivalent fabrication processes to those exemplified.

Claims

1. A method of fabricating a device with an alignment feature, the method comprising:

applying at least one protective layer onto an uppermost surface of a substrate;

applying a first photoresist on the at least one protective layer;

patterning a plurality of first openings in the first photoresist;

doping the substrate with a first dopant substantially within the plurality of first openings;

removing the first photoresist;

applying a second photoresist on the at least one protective layer;

patterning second openings in the second photoresist;

doping the substrate with a second dopant substantially within the second openings;

aligning the second openings with the plurality of first openings so as to form an overlap region of the second dopant with the first dopant; and

etching a registration mark recess through both the at least one protective layer and a first portion of an upper layer of the substrate in the overlap region so as to form a registration mark.

2. The method of claim 1 further comprising: etching a registration mark artifact in an uppermost portion of the at least one protective layer within each of the plurality of first openings.

3. The method of claim 1 further comprising:

removing the second photoresist and the at least one protective layer; and

applying a further at least one protective layer onto the surface of the substrate and over the registration mark.

4. The method of claim 1 further comprising:

applying an ONO stack on to the surface of the substrate.

5. The method of claim 1 further comprising:

removing the second photoresist and the at least one protective layer;

applying a third photoresist on the substrate;

aligning a pattern of dopant windows in the third photoresist, the alignment being relative to the registration mark; and

doping the substrate with a third dopant.

6. A method of fabricating a double-well device with an alignment feature, the method comprising:

applying a first layer of oxide, a layer of silicon nitride, and a second layer of oxide onto an uppermost surface of a substrate;

patterning a plurality of first openings in a first photoresist on an uppermost surface of the second layer of oxide;

doping the substrate with a first dopant substantially within the plurality of first openings forming a first dopant region;

removing the first photoresist;

patterning second openings in a second photoresist on an uppermost surface of the device;

doping the substrate with a second dopant substantially within the second openings forming a second dopant region;

aligning the second openings with the plurality of first openings so as to form an overlap region of the second dopant region with the first dopant region; and

etching a registration mark recess through the silicon nitride layer, the first oxide layer, the second layer of oxide, and a first portion of the upper layer of the substrate in the overlap region so as to form a registration mark.

7. The method of claim 6 further comprising: etching a registration mark artifact in the second layer of oxide within each of the plurality of first openings.

8. The method of claim 6 further comprising:

removing the first layer of oxide, the layer of silicon nitride, and the second layer of oxide; and

applying a third oxide layer over the uppermost surface of a substrate and over the registration mark.

9. The method of claim 6 further comprising:

removing the first layer of oxide, the layer of silicon nitride, and the second layer of oxide;

applying a third photoresist on the substrate;

doping the substrate with a third dopant.