US20070028629A1 - Evaporator arrangement for the coating of substrates - Google Patents

Evaporator arrangement for the coating of substrates Download PDF

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Publication number
US20070028629A1
US20070028629A1 US11/449,397 US44939706A US2007028629A1 US 20070028629 A1 US20070028629 A1 US 20070028629A1 US 44939706 A US44939706 A US 44939706A US 2007028629 A1 US2007028629 A1 US 2007028629A1
Authority
US
United States
Prior art keywords
zone
evaporator
melt
crucible
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/449,397
Other languages
English (en)
Inventor
Gunter Klemm
Marcus Bender
Ulrich Englert
Andreas Kloppel
Uwe Hoffmann
Hans-Georg Lotz
Stefan Hein
Stefan Keller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials GmbH and Co KG
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Assigned to APPLIED FILMS GMBH & CO. KG reassignment APPLIED FILMS GMBH & CO. KG ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BENDER, MARCUS, ENGLERT, ULRICH, HEIN, STEFAN, HOFFMANN, UWE, KELLER, STEFAN, KLEMM, GUNTER, KLOPPEL, ANDREAS, LOTZ, HANS-GEORG
Assigned to APPLIED MATERIALS GMBH & CO. KG reassignment APPLIED MATERIALS GMBH & CO. KG CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: APPLIED FILMS GMBH & CO. KG
Publication of US20070028629A1 publication Critical patent/US20070028629A1/en
Abandoned legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/60—Heating arrangements wherein the heating current flows through granular powdered or fluid material, e.g. for salt-bath furnace, electrolytic heating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
US11/449,397 2005-08-03 2006-06-08 Evaporator arrangement for the coating of substrates Abandoned US20070028629A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP05016832 2005-08-03
EP05016832A EP1760169B1 (de) 2005-08-03 2005-08-03 Verdampfervorrichtung zum Beschichten von Substraten

Publications (1)

Publication Number Publication Date
US20070028629A1 true US20070028629A1 (en) 2007-02-08

Family

ID=35427272

Family Applications (1)

Application Number Title Priority Date Filing Date
US11/449,397 Abandoned US20070028629A1 (en) 2005-08-03 2006-06-08 Evaporator arrangement for the coating of substrates

Country Status (7)

Country Link
US (1) US20070028629A1 (de)
EP (1) EP1760169B1 (de)
JP (1) JP2007039809A (de)
CN (1) CN1908224A (de)
AT (1) ATE392492T1 (de)
DE (1) DE502005003755D1 (de)
TW (1) TW200706667A (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2019156A1 (de) * 2007-07-27 2009-01-28 Applied Materials, Inc. Geformter Tiegel und Verdampfungsvorrichtung damit
GB2574400A (en) * 2018-06-04 2019-12-11 Dyson Technology Ltd A device
GB2574401A (en) * 2018-06-04 2019-12-11 Dyson Technology Ltd A device

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5621269B2 (ja) * 2010-02-09 2014-11-12 パナソニック株式会社 蒸着用ボートおよびこれを用いた蒸着装置
JP5611086B2 (ja) * 2011-03-10 2014-10-22 パナソニック株式会社 蒸着用ボートとこれを使用した成膜方法
JP6121639B1 (ja) * 2015-06-09 2017-04-26 株式会社アルバック 巻取式成膜装置及び巻取式成膜方法
CN113215547B (zh) * 2021-05-21 2023-03-14 辽宁分子流科技有限公司 一种智能可控的线性蒸发源
CN113235053B (zh) * 2021-05-21 2023-03-28 辽宁分子流科技有限公司 一种蒸发速率智能可调的蒸发镀膜方法
DE102022105889A1 (de) * 2022-03-14 2023-09-14 Thyssenkrupp Steel Europe Ag Verfahren zum Beschichten eines Substrats mit einer Metalllegierungsbeschichtung, die wenigstens zwei Metalle enthält

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2665227A (en) * 1950-06-30 1954-01-05 Nat Res Corp Apparatus and method of coating by vapor deposition
US2909149A (en) * 1957-11-15 1959-10-20 Cons Electrodynamics Corp Apparatus for evaporating metal
US3020177A (en) * 1959-05-13 1962-02-06 Continental Can Co Art of vaporizing materials
US3467058A (en) * 1965-12-03 1969-09-16 United States Steel Corp Apparatus for vaporizing metal
US3582611A (en) * 1969-11-24 1971-06-01 Sylvania Electric Prod Apparatus and method of metal evaporation including an evaporation boat having lower electrical resistivity ends than the center thereof
US20040163600A1 (en) * 2002-11-30 2004-08-26 Uwe Hoffmann Vapor deposition device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE880529C (de) * 1951-06-16 1953-06-22 Hydrawerk Ag Vorrichtung zum Verdampfen von Materialien
JPS57169088A (en) * 1981-04-09 1982-10-18 Olympus Optical Co Ltd Crucible
DE10200909A1 (de) * 2002-01-12 2003-07-24 Applied Films Gmbh & Co Kg Verdampferschiffchen für eine Vorrichtung zur Beschichtung von Substraten

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2665227A (en) * 1950-06-30 1954-01-05 Nat Res Corp Apparatus and method of coating by vapor deposition
US2909149A (en) * 1957-11-15 1959-10-20 Cons Electrodynamics Corp Apparatus for evaporating metal
US3020177A (en) * 1959-05-13 1962-02-06 Continental Can Co Art of vaporizing materials
US3467058A (en) * 1965-12-03 1969-09-16 United States Steel Corp Apparatus for vaporizing metal
US3582611A (en) * 1969-11-24 1971-06-01 Sylvania Electric Prod Apparatus and method of metal evaporation including an evaporation boat having lower electrical resistivity ends than the center thereof
US20040163600A1 (en) * 2002-11-30 2004-08-26 Uwe Hoffmann Vapor deposition device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2019156A1 (de) * 2007-07-27 2009-01-28 Applied Materials, Inc. Geformter Tiegel und Verdampfungsvorrichtung damit
GB2574400A (en) * 2018-06-04 2019-12-11 Dyson Technology Ltd A device
GB2574401A (en) * 2018-06-04 2019-12-11 Dyson Technology Ltd A device
WO2019234398A1 (en) 2018-06-04 2019-12-12 Dyson Technology Limited A vapour deposition evaporator device
WO2019234395A1 (en) 2018-06-04 2019-12-12 Dyson Technology Limited A vapour deposition evaporator device
GB2574400B (en) * 2018-06-04 2022-11-23 Dyson Technology Ltd A Device
GB2574401B (en) * 2018-06-04 2022-11-23 Dyson Technology Ltd A Device
US11613804B2 (en) 2018-06-04 2023-03-28 Dyson Technology Limited Vapour deposition evaporator device

Also Published As

Publication number Publication date
DE502005003755D1 (de) 2008-05-29
ATE392492T1 (de) 2008-05-15
EP1760169A1 (de) 2007-03-07
EP1760169B1 (de) 2008-04-16
CN1908224A (zh) 2007-02-07
TW200706667A (en) 2007-02-16
JP2007039809A (ja) 2007-02-15

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Legal Events

Date Code Title Description
AS Assignment

Owner name: APPLIED FILMS GMBH & CO. KG, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:KLEMM, GUNTER;BENDER, MARCUS;ENGLERT, ULRICH;AND OTHERS;REEL/FRAME:018091/0603

Effective date: 20060628

AS Assignment

Owner name: APPLIED MATERIALS GMBH & CO. KG, GERMANY

Free format text: CHANGE OF NAME;ASSIGNOR:APPLIED FILMS GMBH & CO. KG;REEL/FRAME:018652/0247

Effective date: 20060807

STCB Information on status: application discontinuation

Free format text: EXPRESSLY ABANDONED -- DURING EXAMINATION