US20060213362A1 - Lorentz motor control system for a payload - Google Patents

Lorentz motor control system for a payload Download PDF

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Publication number
US20060213362A1
US20060213362A1 US10/566,765 US56676504A US2006213362A1 US 20060213362 A1 US20060213362 A1 US 20060213362A1 US 56676504 A US56676504 A US 56676504A US 2006213362 A1 US2006213362 A1 US 2006213362A1
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Prior art keywords
payload
signals
gravity
center
lorenz
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US10/566,765
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Marcel Heertjes
Michael Vervoordeldonk
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Koninklijke Philips NV
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Koninklijke Philips Electronics NV
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Assigned to KONINKLIJKE PHILIPS ELECTRONICS, N.V. reassignment KONINKLIJKE PHILIPS ELECTRONICS, N.V. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HEERTJES, MARCEL FRANCOIS, VERVOORDELDONK, MICHAEL JOHANNES
Publication of US20060213362A1 publication Critical patent/US20060213362A1/en
Abandoned legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70816—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/005—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion using electro- or magnetostrictive actuation means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F7/00—Vibration-dampers; Shock-absorbers
    • F16F7/10—Vibration-dampers; Shock-absorbers using inertia effect
    • F16F7/1005—Vibration-dampers; Shock-absorbers using inertia effect characterised by active control of the mass
    • F16F7/1011—Vibration-dampers; Shock-absorbers using inertia effect characterised by active control of the mass by electromagnetic means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation

Definitions

  • the invention relates to a control arrangement for controlling a plurality of Lorenz motors actuating a payload, the payload having a center of gravity, the control arrangement comprising a controller for receiving height signals from sensors sensing heights of said payload and for calculating control signals for said Lorenz motors from said height signals.
  • the mounts may each comprise an airmount and one or two Lorenz motors. Instead of airmounts, other type of “springs” may be used
  • the payload has a center of gravity that may or may not be above the airmounts.
  • the critical height of the center of gravity of the payload where the payload gets unbalanced may be lower or higher. Therefore, strict rules apply with respect to allowable upper limit of the height of the center of gravity above the airmounts.
  • the softer the airmounts or the smaller the base i.e., distance between the airmounts, the lower the critical height.
  • the higher the actual height of the center of gravity of the payload the higher the airmounts or the greater the distance between the airmounts must be designed.
  • a typical example is a suspension of an electron microscope or (parts) of a lithographic apparatus.
  • softer airmounts are preferred.
  • the height of the center of gravity of such an apparatus requires airmounts to be located higher or to be located further apart from one another.
  • increasing the heights of the airmounts may form obstacles to an operator of the apparatus, and increasing the base may not be allowable, e.g., due to a conflict with an electronics cabinet or to commercial reasons.
  • the invention provides a control arrangement as defined at the outset, characterized in that said controller is arranged to calculate from these height signals at least one rotation angle of the center of gravity about a horizontal axis and calculate from this at least one rotation angle said control signals for said Lorenz motors such that a predetermined rotational stiffness for supporting said payload is achieved.
  • a multiple-input-multiple-output controller is applied that calculates at least one rotation component of the center of gravity of the payload and controls the Lorenz motors to provide additional rotational stiffness without increase of vertical stress. It is possible to improve the gravitational stability.
  • the payload may have a higher center of gravity than in prior art systems, without the system becoming unstable.
  • the invention relates to a method of controlling a plurality of Lorenz motors actuating a payload, the payload having a center of gravity, comprising receiving height signals from sensors sensing heights of said payload and calculating control signals for said Lorenz motors from said height signals, characterized by calculating from these height signals at least one rotation angle of the center of gravity about a horizontal axis and calculating from this at least one rotation angle said control signals for said Lorenz motors such that a predetermined rotational stiffness for supporting said payload is achieved.
  • the invention relates to a computer program product comprising instructions and data to be loaded by a computer, and after being loaded allowing the computer to perform the method as defined above.
  • the invention relates to a data carrier comprising such a computer program product.
  • FIG. 1 shows a payload supported by a plurality of mounts
  • FIG. 2 shows a general, schematic block diagram of a multiple-input-multiple output control arrangement for the Lorenz motors.
  • FIG. 1 shows a payload 4 supported by a plurality of mounts.
  • the payload 4 has a center of gravity 12 .
  • the mounts comprise airmounts 15 , 16 , and Lorenz motors 1 , 2 .
  • FIG. 1 shows two airmounts 15 , 16 and two Lorenz motors 1 , 2 , however, there will mostly be three or four airmounts and at least one Lorenz motor per airmount
  • the airmounts support the payload 4 whereas the Lorenz motors 1 , 2 are actuated to apply forces as part of a control concept to create vertical servo stiffness and/or servo damping.
  • Lorenz motors arranged to apply horizontal forces as part of a control concept to create horizontal servo stiffness and/or servo damping, as is evident to persons skilled in the art. These latter Lorenz motors are not of interest to the present invention.
  • the distance between the Lorenz motors is l.
  • An x, y, z-axes system is defined having an origin at a predetermined location.
  • a rotation ⁇ is defined as a rotation about the x-axis.
  • the center of gravity 12 is at height h above the Lorenz motors 1 , 2 .
  • FIG. 2 shows a control arrangement for control of the two Lorenz motors 1 , 2 .
  • the control arrangement shown comprises two sensors 6 , 7 for sensing heights z 1 , z 2 , respectively.
  • the sensors 6 , 7 feed back height signals z 1 , z 2 to a controller 8 .
  • the controller 8 calculates control signals C 1 , C 2 from these height signals z 1 , z 2 for the Lorenz motors 1 , 2 , respectively.
  • FIG. 2 is simplified in the sense that it shows only two sensors 6 , 7 , and two input signals and two output signals for the controller 8 . In most cases, three z-sensors will be used that provide information as to z, q and a rotation around the y-axis.
  • controller 8 For the two Lorenz motors embodiment shown in FIG. 1 , the following control concept performed by controller 8 is proposed.
  • the general idea is as follows: feed back the height position signals from all height sensors used to the controller 8 , calculate rotation angles about the x-axis and the y-axis from these height position signals, calculate control signals for all Lorenz motors used from these rotation angles such that a predetermined rotational stiffness is achieved, without substantially creating additional vertical stiffness.
  • airmounts 15 , 16 there may be applied other types of mounts than airmounts, e.g., springs.
  • the airmounts 15 , 16 When the airmounts 15 , 16 are applied, they will be provided with supply lines to supply air to them. Then, air is supplied by suitable pressure sources also controlled by the controller 8 .
  • the controller 8 is shown as one single unit. However, the controller 8 may be implemented by multiple computers acting together, e.g., in a master slave configuration.
  • the suitable software may distributed via data carriers or any other suitable way.
  • the controller for the pneumatics part may be independent from the controller for the Lorenz motors.

Abstract

Control arrangement for and method of controlling a plurality of Lorenz motors (1, 2) actuating a payload (4) where the payload has a center of gravity (12). Height signals (z1, z2) are received from sensors sensing heights of said payload. At least one rotation angle of the center of gravity about a horizontal axis is calculated from these height signals (z1, z2) and from this at least one rotation angle control signals (C1, C2) for the Lorenz motors (1, 2) are calculated such that a predetermined rotational stiffness for supporting the payload (4) is achieved.

Description

  • The invention relates to a control arrangement for controlling a plurality of Lorenz motors actuating a payload, the payload having a center of gravity, the control arrangement comprising a controller for receiving height signals from sensors sensing heights of said payload and for calculating control signals for said Lorenz motors from said height signals.
  • It is known to support a payload with a plurality of, e.g. three or four, mounts. The mounts may each comprise an airmount and one or two Lorenz motors. Instead of airmounts, other type of “springs” may be used The payload has a center of gravity that may or may not be above the airmounts. In dependence on the design of the airmounts, the critical height of the center of gravity of the payload where the payload gets unbalanced may be lower or higher. Therefore, strict rules apply with respect to allowable upper limit of the height of the center of gravity above the airmounts. As is known to persons skilled in the art, the softer the airmounts or the smaller the base, i.e., distance between the airmounts, the lower the critical height. And, the higher the actual height of the center of gravity of the payload, the higher the airmounts or the greater the distance between the airmounts must be designed.
  • Another way to cope with this problem, as is also known from the prior art, is to apply some additional horizontal springs engaging side surfaces of the payload and walls opposite to the side surfaces. These springs increase rotational Oddness of the payload and keep it from instability with respect to tilt
  • However, there may be locations where there is little room building in additional horizontal springs and an additional frame therefore. Moreover, this maybe an expensive solution. When one wishes to replace existing airmounts by softer airmounts the base may already be fixed, etc.
  • A typical example is a suspension of an electron microscope or (parts) of a lithographic apparatus. For improved floor vibration isolation, softer airmounts are preferred. The height of the center of gravity of such an apparatus requires airmounts to be located higher or to be located further apart from one another. However, increasing the heights of the airmounts may form obstacles to an operator of the apparatus, and increasing the base may not be allowable, e.g., due to a conflict with an electronics cabinet or to commercial reasons.
  • Therefore, it is an object of the invention to provide an improved control of the mounts such that the sensitivity of a payload to gravitational instability is reduced without substantially increasing vertical stiffness.
  • To that end, the invention provides a control arrangement as defined at the outset, characterized in that said controller is arranged to calculate from these height signals at least one rotation angle of the center of gravity about a horizontal axis and calculate from this at least one rotation angle said control signals for said Lorenz motors such that a predetermined rotational stiffness for supporting said payload is achieved.
  • Thus a multiple-input-multiple-output controller is applied that calculates at least one rotation component of the center of gravity of the payload and controls the Lorenz motors to provide additional rotational stiffness without increase of vertical stress. It is possible to improve the gravitational stability. The payload may have a higher center of gravity than in prior art systems, without the system becoming unstable.
  • In an embodiment, the invention relates to a method of controlling a plurality of Lorenz motors actuating a payload, the payload having a center of gravity, comprising receiving height signals from sensors sensing heights of said payload and calculating control signals for said Lorenz motors from said height signals, characterized by calculating from these height signals at least one rotation angle of the center of gravity about a horizontal axis and calculating from this at least one rotation angle said control signals for said Lorenz motors such that a predetermined rotational stiffness for supporting said payload is achieved.
  • Moreover, the invention relates to a computer program product comprising instructions and data to be loaded by a computer, and after being loaded allowing the computer to perform the method as defined above.
  • Finally, the invention relates to a data carrier comprising such a computer program product.
  • The invention will be explained with reference to some drawings that are only intended to illustrate the invention and not to limit its scope. The scope is defined by the annexed claims and their technical equivalents only.
  • FIG. 1 shows a payload supported by a plurality of mounts;
  • FIG. 2 shows a general, schematic block diagram of a multiple-input-multiple output control arrangement for the Lorenz motors.
  • FIG. 1 shows a payload 4 supported by a plurality of mounts. The payload 4 has a center of gravity 12. The mounts comprise airmounts 15, 16, and Lorenz motors 1, 2. For sake of simplicity, FIG. 1 shows two airmounts 15, 16 and two Lorenz motors 1, 2, however, there will mostly be three or four airmounts and at least one Lorenz motor per airmount The airmounts support the payload 4 whereas the Lorenz motors 1, 2 are actuated to apply forces as part of a control concept to create vertical servo stiffness and/or servo damping. Additionally, there may be one or more extra Lorenz motors arranged to apply horizontal forces as part of a control concept to create horizontal servo stiffness and/or servo damping, as is evident to persons skilled in the art. These latter Lorenz motors are not of interest to the present invention.
  • The distance between the Lorenz motors is l.
  • An x, y, z-axes system is defined having an origin at a predetermined location. A rotation φ is defined as a rotation about the x-axis. The center of gravity 12 is at height h above the Lorenz motors 1, 2.
  • FIG. 2 shows a control arrangement for control of the two Lorenz motors 1, 2. The control arrangement shown comprises two sensors 6, 7 for sensing heights z1, z2, respectively. The sensors 6, 7 feed back height signals z1, z2 to a controller 8. The controller 8 calculates control signals C1, C2 from these height signals z1, z2 for the Lorenz motors 1, 2, respectively. FIG. 2 is simplified in the sense that it shows only two sensors 6, 7, and two input signals and two output signals for the controller 8. In most cases, three z-sensors will be used that provide information as to z, q and a rotation around the y-axis.
  • For the two Lorenz motors embodiment shown in FIG. 1, the following control concept performed by controller 8 is proposed.
  • derive angle φ from z1, and z2, e.g., from (z1−z2)/l
  • calculate a torque T from angle φ: T=−kφ, where k is a measure of rotational stiffness in Nm/rad
  • calculate control signals C1, C2 from torque T: C1=−T/a, and C2=T/b, where a and b are constants the values of which can be chosen freely but have equal sign.
  • In an embodiment, a low pass filter may be applied. Then, the torque T is calculated from T=−k.φ.H1p, where H1p is the low pass filter transfer function.
  • In a 3 dimensional environment, the general idea is as follows: feed back the height position signals from all height sensors used to the controller 8, calculate rotation angles about the x-axis and the y-axis from these height position signals, calculate control signals for all Lorenz motors used from these rotation angles such that a predetermined rotational stiffness is achieved, without substantially creating additional vertical stiffness.
  • As is evident to persons skilled in the art, there may be applied other types of mounts than airmounts, e.g., springs. Moreover, When the airmounts 15, 16 are applied, they will be provided with supply lines to supply air to them. Then, air is supplied by suitable pressure sources also controlled by the controller 8. It is to be understood that the controller 8 is shown as one single unit. However, the controller 8 may be implemented by multiple computers acting together, e.g., in a master slave configuration. The suitable software may distributed via data carriers or any other suitable way. Moreover, the controller for the pneumatics part may be independent from the controller for the Lorenz motors.

Claims (5)

1. Control arrangement for controlling a plurality of Lorenz motors (1, 2) actuating a payload (4), the payload having a center of gravity (12), the control arrangement comprising a controller (8) for receiving height signals (z1, z2) from sensors sensing heights of said payload and for calculating control signals (C1, C2) for said Lorenz motors from said height signals, characterized in that said controller (8) is arranged to calculate from these height signals (z1, z2) at least one rotation angle of the center of gravity about a horizontal axis and calculate from this at least one rotation angle said control signals (C1, C2) for said Lorenz motors (1, 2) such that a predetermined rotational stiffness for supporting said payload (4) is achieved.
2. Control arrangement according to claim 1, wherein said controller (8) is arranged to control three or four Lorenz motors.
3. Method of controlling a plurality of Lorenz motors (1, 2) actuating a payload (4), the payload having a center of gravity (12), comprising receiving height signals (z1, z2) from sensors sensing heights of said payload and calculating control signals (C1, C2) for said Lorenz motors from said height signals, characterized by calculating from these height signals (z1, z2) at least one rotation angle of the center of gravity about a horizontal axis and calculating from this at least one rotation angle said control signals (C1, C2) for said Lorenz motors (1, 2) such that a predetermined rotational stiffness for supporting said payload (4) is achieved.
4. Computer program product comprising instructions and data to be loaded by a computer, and after being loaded allowing the computer to perform the method according to claim 3.
5. Data carrier comprising a computer program product according to claim 4.
US10/566,765 2003-08-04 2004-07-28 Lorentz motor control system for a payload Abandoned US20060213362A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP03102413.6 2003-08-04
EP03102413 2003-08-04
PCT/IB2004/051316 WO2005013027A1 (en) 2003-08-04 2004-07-28 Lorentz motor control system for a payload

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EP (1) EP1654605A1 (en)
JP (1) JP2007502095A (en)
CN (1) CN1829948A (en)
WO (1) WO2005013027A1 (en)

Cited By (10)

* Cited by examiner, † Cited by third party
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US20080061948A1 (en) * 2006-08-18 2008-03-13 Daniel Perez System and method for communicating with gate operators via a power line
US20080094186A1 (en) * 2006-10-04 2008-04-24 Viking Access Systems, Llc Apparatus and method for monitoring and controlling gate operators via power line communication
US20080106370A1 (en) * 2006-11-02 2008-05-08 Viking Access Systems, Llc System and method for speech-recognition facilitated communication to monitor and control access to premises
US20090085719A1 (en) * 2007-09-28 2009-04-02 Daniel Perez System and method for monitoring and controlling a movable barrier operator utilizing satellite communication capabilities
US20090189560A1 (en) * 2008-01-24 2009-07-30 Hassan Taheri High torque gearless actuation at low speeds for swing gate, roll-up gate, slide gate, and vehicular barrier operators
US20090206777A1 (en) * 2008-02-19 2009-08-20 Hassan Taheri High torque movable barrier actuation at low speeds utilizing a hub motor
US20090211160A1 (en) * 2008-02-26 2009-08-27 Ali Tehranchi Access device with a photovoltaic housing utilized to generate power
US20100289616A1 (en) * 2009-05-18 2010-11-18 Ali Tehranchi Movable barrier system adapted to utilize biometric technology to identify and authorize access to premises
US20110126630A1 (en) * 2008-05-15 2011-06-02 Nederlandse Organisatie Vorre Toegepast- Natuurwetenschappelijk Onderzoek Tno. Vibration sensor and a system to isolate vibrations
US10563446B2 (en) 2013-12-09 2020-02-18 Faac International Inc. Movable barrier operator with removable power supply module

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US8952342B2 (en) 2009-12-17 2015-02-10 Mapper Lithography Ip B.V. Support and positioning structure, semiconductor equipment system and method for positioning
CN102230508A (en) * 2011-03-29 2011-11-02 华中科技大学 Load gravity center-adaptive active vibration absorber and vibration absorbing system formed by same

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US20030090645A1 (en) * 2001-11-13 2003-05-15 Canon Kabushiki Kaisha Vibration damping apparatus, control method therefor, exposure apparatus having the vibration damping apparatus, maintenance method therefor, semiconductor device fabrication method, and semiconductor fabrication factory
US6788386B2 (en) * 2001-12-21 2004-09-07 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method

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US6155542A (en) * 1996-01-05 2000-12-05 Canon Kabushiki Kaisha Vibration damping apparatus and method
US6038013A (en) * 1996-10-04 2000-03-14 Nikon Corporation Vibration isolator and exposure apparatus
US20030090645A1 (en) * 2001-11-13 2003-05-15 Canon Kabushiki Kaisha Vibration damping apparatus, control method therefor, exposure apparatus having the vibration damping apparatus, maintenance method therefor, semiconductor device fabrication method, and semiconductor fabrication factory
US6788386B2 (en) * 2001-12-21 2004-09-07 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080061948A1 (en) * 2006-08-18 2008-03-13 Daniel Perez System and method for communicating with gate operators via a power line
US20080094186A1 (en) * 2006-10-04 2008-04-24 Viking Access Systems, Llc Apparatus and method for monitoring and controlling gate operators via power line communication
US20080106370A1 (en) * 2006-11-02 2008-05-08 Viking Access Systems, Llc System and method for speech-recognition facilitated communication to monitor and control access to premises
US20090085719A1 (en) * 2007-09-28 2009-04-02 Daniel Perez System and method for monitoring and controlling a movable barrier operator utilizing satellite communication capabilities
US20090189560A1 (en) * 2008-01-24 2009-07-30 Hassan Taheri High torque gearless actuation at low speeds for swing gate, roll-up gate, slide gate, and vehicular barrier operators
US7816875B2 (en) 2008-01-24 2010-10-19 Viking Access Systems, Llc High torque gearless actuation at low speeds for swing gate, roll-up gate, slide gate, and vehicular barrier operators
US20100319257A1 (en) * 2008-02-19 2010-12-23 Hassan Taheri High torque movable barrier actuation at low speeds utilizing a hub motor
US20090206777A1 (en) * 2008-02-19 2009-08-20 Hassan Taheri High torque movable barrier actuation at low speeds utilizing a hub motor
US7816879B2 (en) 2008-02-19 2010-10-19 Viking Access Systems, Llc High torque movable barrier actuation at low speeds utilizing a hub motor
US20090211160A1 (en) * 2008-02-26 2009-08-27 Ali Tehranchi Access device with a photovoltaic housing utilized to generate power
US20110126630A1 (en) * 2008-05-15 2011-06-02 Nederlandse Organisatie Vorre Toegepast- Natuurwetenschappelijk Onderzoek Tno. Vibration sensor and a system to isolate vibrations
US20100289616A1 (en) * 2009-05-18 2010-11-18 Ali Tehranchi Movable barrier system adapted to utilize biometric technology to identify and authorize access to premises
US10563446B2 (en) 2013-12-09 2020-02-18 Faac International Inc. Movable barrier operator with removable power supply module

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Publication number Publication date
CN1829948A (en) 2006-09-06
WO2005013027A1 (en) 2005-02-10
JP2007502095A (en) 2007-02-01
EP1654605A1 (en) 2006-05-10

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