US20060197231A1 - Backend metallization method and device obtained therefrom - Google Patents
Backend metallization method and device obtained therefrom Download PDFInfo
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- US20060197231A1 US20060197231A1 US11/403,923 US40392306A US2006197231A1 US 20060197231 A1 US20060197231 A1 US 20060197231A1 US 40392306 A US40392306 A US 40392306A US 2006197231 A1 US2006197231 A1 US 2006197231A1
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- 238000001465 metallisation Methods 0.000 title description 3
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- 229910052802 copper Inorganic materials 0.000 claims description 9
- 239000010949 copper Substances 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 8
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 8
- -1 doped polysilicate Chemical compound 0.000 claims description 8
- 239000010936 titanium Substances 0.000 claims description 8
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- 239000010937 tungsten Substances 0.000 claims description 8
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 7
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- 238000010899 nucleation Methods 0.000 description 3
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76816—Aspects relating to the layout of the pattern or to the size of vias or trenches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5226—Via connections in a multilevel interconnection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Definitions
- the present invention relates to the fabrication of semiconductor devices. More particularly, the present invention relates to the backend metatlization process used in the formation of semiconductor devices.
- RAM random access memory
- SRAM static random access memory
- DRAM dynamic random access memory
- a DRAM device contains an array of individual memory cells. Each cell includes an integrated circuit on a substrate and conductive material for electrically connecting the cell to other structures of a memory circuit.
- FIG. 1 shows a simplified single Damascene method for forming a metallization connection to a substrate. It includes depositing a non-conductive layer of material 20 , e.g. borophosphosilicate glass (BPSG), on a substrate 24 and pattern etching an opening within the material 20 .
- a conductor e.g. a metal or a doped polysilicon is deposited over the material 20 , thereby filling in the opening and providing a covering layer on the material 20 .
- Chemical-mechanical polishing of the conductor removes the layer of conductor on the material 20 , leaving a conductive plug M 1 .
- the conductive plug M 1 is positioned on a doped region 22 provided in the substrate 24 .
- An additional layer of non-conducting material 20 e.g. BPSG, is then deposited over the conductive plug M 1 and the previously deposited material 20 .
- a via 21 is then etched in the material 20 above the conductive plug M 1 .
- a conductive barrier material 12 is then deposited within the via 21 and over the additional material 20 .
- another conductive layer 16 is deposited over the barrier layer 12 , thereby completing an electrical connection between conductive layer 16 and doped region 20 .
- Vias 21 may be formed with a positive overlap (the conductive plug M 1 is of to a greater diameter than the via 21 ), a zero overlap (the conductive plug M 1 and the via 21 are the same diameter), or a negative overlap (the conductive plug M 1 has a smaller diameter than the via 21 ). In FIG. 1 , a negative overlap is shown. Because of the decreasing sizes of semiconductor devices, zero overlaps and negative overlaps are becoming more prevalent.
- the conductive layers 12 , 16 may be formed of any suitable conductive material, such as aluminum, copper or a highly doped polysilicon.
- the material 20 is preferably formed of a non-conductive material which is relatively easily removed in a chemical-mechanical polishing or etching process. Most preferably, and as noted, the material 20 is a doped silicate glass, such as, for example, BPSG.
- a double Damascene method may be used to form a conductive connection.
- a double Damascene method for forming trench capacitors is described in “Dual-Damascene Challenges Dielectric Etch,” Semiconductor International, p. 68-72, August 1999.
- the etched via 21 in the material 20 is offset slightly relative to the plug M 1 , as shown in FIG. 2 . This most usually occurs in zero overlap and/or negative overlap fabrication processes.
- the etching of such an offset via 21 creates an offset opening portion 25 along the side of the conductive plug M 1 , which during the subsequent layering of the conductive layers 12 , 16 may form an air gap 26 ( FIG. 2 ). Initially, the air gap 26 is relatively small, but as the conductive layers are deposited at elevated temperatures, the gas trapped in the gap 26 expands.
- a sizable and expanding air gap 26 sometimes prevents deposition of, or causes a rupture in, a continuous conductive layer 12 within the opening 25 , which in turn may cause a defect in the conductive connection 14 .
- the conductive layer 12 is typically formed by first depositing a seeding layer for subsequent conductor formation. When part of the seeding layer is missing, a void is formed in both the seeding layer and the conductor which is formed above it. Further, the lack of a continuous conductive layer 12 may create a higher resistance in the ultimately formed conductive connection 14 .
- One approach at alleviating this disadvantage is to utilize a different conductive material for the conductive layer 12 .
- aluminum or copper generally have been used for the conductive layer 12 ( FIG. 2 )
- titanium, titanium nitride or tungsten may be used in a conductive layer 112 of a conductive connection 114 ( FIG. 3 ) of a semiconductor device 100 . While the use of such materials tends to pinch off the size of an air gap 126 formed in an offset opening 125 , in instances where the offset is relatively large, the conductive layer 112 still may not be formed as desired, thus creating the problems noted above. Further, titanium, titanium nitride and tungsten all have a higher electrical resistance than aluminum and copper within the ultimately formed conductive connection, which may create other problems.
- the present invention avoids the offset gap shown in FIG. 2 by preventing any part of the via 21 from being etched along side of the plug M 1 .
- a conductive connector comprises a conductive plug positioned within an insulator and provided on a substrate connection region, an etch-stop layer deposited on the insulator and around the conductive plug, an intermediate non-conductive layer having an etched via over the plug, a first conductive layer deposited in and in contact with the etched via and having a portion in contact with the conductive plug, and a second conductive layer deposited over the first conductive layer.
- the etch step layer prevents the via from being etched along the side of the plug during via formation.
- a memory device including at least one memory cell may be provided with the just described conductive connector.
- the present invention also relates to a method of making a semiconductor conductive connector.
- the method includes providing a first layer of dielectric material on an integrated circuit substrate, forming a conductive plug within the first dielectric material, providing an etch-stop layer over the first dielectric layer and around the conductive plug, providing a second layer of dielectric material over the conductive plug and etch-stop layer, etching the second layer of dielectric material to the conductive plug and etch-stop layer to form a via, and forming a conductive connector in the via in contact with the conductive plug.
- FIG. 1 is an idealized cross-sectional view of a conventionally fabricated conductor connection in a semiconductor device.
- FIG. 2 is a cross-sectional view like FIG. 1 showing an offset via.
- FIG. 3 is a cross-sectional view like FIG. 2 showing another offset via.
- FIG. 4 is a cross-sectional view of a semiconductor device constructed in accordance with an embodiment of the present invention.
- FIG. 5 is a cross-sectional view of a semiconductor device constructed in accordance with another embodiment of the present invention.
- FIG. 6 illustrates a method of making the device shown in FIG. 5 .
- FIG. 7 illustrates a method of making semiconductor products in accordance with an embodiment of the present invention.
- FIG. 8 illustrates a processor-based system constructed in accordance with an embodiment of the present invention.
- FIG. 4 a semiconductor device 200 with a substrate 24 and a conductive connection 214 that may be formed by either the single Damascene or double Damascene methods.
- the substrate 24 can be made of any material typically used as a substrate in integrated circuit fabrication.
- the conductive connection 214 includes the first and second conductive layers 12 , 16 .
- the conductive layers 12 , 16 may be formed of one or more of aluminum, copper, doped polysilicate, tantalum, tantalum nitride, titanium, titanium nitride and tungsten.
- the semiconductor device 200 includes the material 20 surrounding the via 21 .
- the metal plug M 1 is embedded within a first insulator layer 230 , for example, a BPSG layer, and a hard mask layer 228 .
- the hard mask layer 228 may be formed of any material capable of withstanding the subsequent etching process described below, such as, for example, silicon nitride, silicon carbide, silicon dioxide, or BLOK® (a mixture of silicon nitride and silicon carbide).
- the hard mask 228 is formed of, for example, silicon nitride
- a plasma etch using CF 4 or C 2 F 6 as the etching gas may be utilized to form the via 21 .
- these etching gases reacts with the BPSG material 20 , the oxygen contained within the material 20 is released and will react with the carbon in the etching gas to form carbon dioxide and desorb.
- the etching gas reacts with the silicon nitride, there is no oxygen in the film, so a polymer containing carbon is formed. The polymer slows down or stops the etch of the silicon nitride, particularly, when the carbon to flourine ratio is high.
- etching of the insulating layer 20 to form the via 21 will stop at the hard mask 228 and the formation of an offset opening like the offset openings 25 , 125 shown in FIGS. 2 and 3 will be prevented. Accordingly, as shown in FIG. 4 , the via 21 etching stops at the top surface of the conductive plug M 1 and mask 228 .
- the layers 12 , 16 can then be fabricated in the via 21 and the conductive connection 214 can be used to connect the doped region 22 to other portions of the partially illustrated semiconductor device 200 .
- the insulator layer 230 and the hard mask 228 are deposited on the substrate 24 containing the doped region 22 .
- the doped region 22 may be formed by way of an ion implant. Further, the doped region 22 may serve as an active region in a memory cell, such as cell 513 (described below). It should be noted that the doped region 22 is merely illustrative of just one point on a substrate where an electrical connection is needed.
- the conductive connection 214 can be fabricated wherever a conductive path is needed. An opening is formed in the insulator 230 and the hard mask 228 layers at step 405 .
- the opening is preferably formed through the use of a photoresist and masking, followed by one or more anisotropic etching steps.
- the opening alternatively may be formed through mechanical or laser drilling.
- conductive material e.g., polysilicon
- CMP chemical-mechanical polished
- the planarizing process causes the top surface of the etch-resistant layer 228 to be co-planar with the top surface of the conductive element M 1.
- An insulating layer 20 e.g. BPSG, is then deposited on the insulator 230 (step 415 ) and the via 21 is subsequently etched into the insulating layer 20 (step 420 ).
- the etching of via 21 is preferably accomplished by laying a photoresist over the material 20 , exposing and developing the phtotoresist to mask a portion of the material 20 that is not to be etched, and then etching the via 21 in the unmasked region.
- the hard mask 228 is formed of a material which is relatively resistant to the etching chemistry, and hence acts as an etch stop so there is little or no etching below the top level of the conductive plug M 1 .
- the first conductive layer 12 is then deposited at step 425 and the second conductive layer 16 is deposited on the first conductive layer 12 at step 430 , thereby creating the conductive connection 214 .
- FIG. 5 shows a multi-step semiconductor device 300 having a conductive connection 314 .
- the multi-step semiconductor device 300 has a greater conductive surface area which can be used to form container capacitors, useful, for example, in a memory device.
- a via 121 is etched above the metallic plug M 1 in several steps to create via portions 122 and 123 .
- the via portion 123 has a greater diameter than the via portion 122 , allowing the deposition of more area of first and second conductive layers 112 and 116 . If capacitors are formed in the FIG. 5 via portions 122 and 123 , then the conductive layer 112 is replaced by a three layer structure formed of a conductor layer, a dielectric layer, and another conductive layer, as is known in the art.
- the via 121 is etched in several steps to form the via portions 122 and 123 .
- a layer of the material 120 is deposited over the hard mask 228 and the plug M 1 (step 410 ).
- photoresist 130 is partially developed, and the developed portions and the mask 132 are removed and the remaining photoresist 130 is stripped.
- the via portion 122 is then etched at step 415 .
- a second layer of photoresist 130 is then deposited.
- a second mask 134 is utilized to develop a portion of the second photoresist layer 130 .
- the developed portion is removed as described above.
- the mask 134 is removed and the remaining photoresist 130 is stripped.
- the via portion 123 is then etched at step 435 .
- layers 112 , 116 (which are similar to the layers 12 , 16 , respectively) are deposited in the via 121 (steps 425 , 430 ).
- a device constructed in accordance with the invention can be used in a memory circuit, such as a DRAM device 512 , or other electronic integrated circuit, within a processor-based system 500 .
- the processor-based system 500 may be a computer system, a process control system or any other system employing a processor and associated memory.
- the system 500 includes a central processing unit (CPU) 502 , which may be a microprocessor.
- the CPU 502 communicates with the DRAM device 512 , which has cells 513 that include the semiconductor device 200 (or the semiconductor device 300 ), over a bus 516 .
- the CPU 502 further communicates with one or more I/O devices 508 , 510 over the bus 516 .
- bus 516 may be a series of buses and bridges commonly used in a processor-based system.
- Further components of the system 500 may include a read only memory (ROM) device 514 and peripheral devices such as a floppy disk drive 504 , and CD-ROM drive 506 .
- ROM read only memory
- peripheral devices such as a floppy disk drive 504 , and CD-ROM drive 506 .
- the floppy disk drive 504 and CD-ROM drive 506 communicate with the CPU 502 over the bus 516 .
- the present invention provides a semiconductor device which does not suffer from the aforementioned disadvantages caused by an etched area to the side of the conductive plug M 1 .
- the present invention further provides a method for making semiconductor devices without forming air gaps in trenches offset from a conductive plug.
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Abstract
A semiconductor device and a method of making it are described. During the formation of the semiconductor device, a hard mask is formed of an etch-resistant material. The mask prevents etchant from etching an area within a dielectric material near a conductive plug. The mask may be formed of a nitride. Conductive material is then deposited withinan etched via and is contacted with the conductive plug.
Description
- The present invention relates to the fabrication of semiconductor devices. More particularly, the present invention relates to the backend metatlization process used in the formation of semiconductor devices.
- There are a variety of semiconductor device types, one particular semiconductor device being a semiconductor memory device, such as random access memory (RAM) device. Known types of RAM devices include static random access memory (SRAM) devices and dynamic random access memory (DRAM) devices. A DRAM device contains an array of individual memory cells. Each cell includes an integrated circuit on a substrate and conductive material for electrically connecting the cell to other structures of a memory circuit.
- With reference to
FIG. 1 , one conventional method for depositing conductive material for backend metallization, is a single Damascene method.FIG. 1 shows a simplified single Damascene method for forming a metallization connection to a substrate. It includes depositing a non-conductive layer ofmaterial 20, e.g. borophosphosilicate glass (BPSG), on asubstrate 24 and pattern etching an opening within thematerial 20. A conductor, e.g. a metal or a doped polysilicon is deposited over thematerial 20, thereby filling in the opening and providing a covering layer on thematerial 20. Chemical-mechanical polishing of the conductor removes the layer of conductor on thematerial 20, leaving a conductive plug M1. The conductive plug M1 is positioned on adoped region 22 provided in thesubstrate 24. An additional layer ofnon-conducting material 20, e.g. BPSG, is then deposited over the conductive plug M1 and the previously depositedmaterial 20. Avia 21 is then etched in thematerial 20 above the conductive plug M1. Aconductive barrier material 12 is then deposited within thevia 21 and over theadditional material 20. Then anotherconductive layer 16 is deposited over thebarrier layer 12, thereby completing an electrical connection betweenconductive layer 16 and dopedregion 20. -
Vias 21 may be formed with a positive overlap (the conductive plug M1 is of to a greater diameter than the via 21), a zero overlap (the conductive plug M1 and thevia 21 are the same diameter), or a negative overlap (the conductive plug M1 has a smaller diameter than the via 21). InFIG. 1 , a negative overlap is shown. Because of the decreasing sizes of semiconductor devices, zero overlaps and negative overlaps are becoming more prevalent. - The
conductive layers material 20 is preferably formed of a non-conductive material which is relatively easily removed in a chemical-mechanical polishing or etching process. Most preferably, and as noted, thematerial 20 is a doped silicate glass, such as, for example, BPSG. - In addition to the single Damascene method described above, a double Damascene method may be used to form a conductive connection. A double Damascene method for forming trench capacitors is described in “Dual-Damascene Challenges Dielectric Etch,” Semiconductor International, p. 68-72, August 1999.
- One disadvantage associated with the above-described fabrication method is that sometimes the etched via 21 in the
material 20 is offset slightly relative to the plug M1, as shown inFIG. 2 . This most usually occurs in zero overlap and/or negative overlap fabrication processes. The etching of such an offset via 21 creates anoffset opening portion 25 along the side of the conductive plug M1, which during the subsequent layering of theconductive layers FIG. 2 ). Initially, theair gap 26 is relatively small, but as the conductive layers are deposited at elevated temperatures, the gas trapped in thegap 26 expands. The presence of a sizable and expandingair gap 26 sometimes prevents deposition of, or causes a rupture in, a continuousconductive layer 12 within theopening 25, which in turn may cause a defect in theconductive connection 14. This is because theconductive layer 12 is typically formed by first depositing a seeding layer for subsequent conductor formation. When part of the seeding layer is missing, a void is formed in both the seeding layer and the conductor which is formed above it. Further, the lack of a continuousconductive layer 12 may create a higher resistance in the ultimately formedconductive connection 14. - One approach at alleviating this disadvantage is to utilize a different conductive material for the
conductive layer 12. Whereas aluminum or copper generally have been used for the conductive layer 12 (FIG. 2 ), titanium, titanium nitride or tungsten may be used in aconductive layer 112 of a conductive connection 114 (FIG. 3 ) of asemiconductor device 100. While the use of such materials tends to pinch off the size of anair gap 126 formed in anoffset opening 125, in instances where the offset is relatively large, theconductive layer 112 still may not be formed as desired, thus creating the problems noted above. Further, titanium, titanium nitride and tungsten all have a higher electrical resistance than aluminum and copper within the ultimately formed conductive connection, which may create other problems. - There thus exists a need for a fabricated semiconductor device which does not tend to form the offset gap shown in
FIG. 2 . - The present invention avoids the offset gap shown in
FIG. 2 by preventing any part of thevia 21 from being etched along side of the plug M1. This is accomplished by fabricating a structure in which a conductive connector comprises a conductive plug positioned within an insulator and provided on a substrate connection region, an etch-stop layer deposited on the insulator and around the conductive plug, an intermediate non-conductive layer having an etched via over the plug, a first conductive layer deposited in and in contact with the etched via and having a portion in contact with the conductive plug, and a second conductive layer deposited over the first conductive layer. The etch step layer prevents the via from being etched along the side of the plug during via formation. - According to another aspect of the present invention, a memory device including at least one memory cell may be provided with the just described conductive connector.
- The present invention also relates to a method of making a semiconductor conductive connector. The method includes providing a first layer of dielectric material on an integrated circuit substrate, forming a conductive plug within the first dielectric material, providing an etch-stop layer over the first dielectric layer and around the conductive plug, providing a second layer of dielectric material over the conductive plug and etch-stop layer, etching the second layer of dielectric material to the conductive plug and etch-stop layer to form a via, and forming a conductive connector in the via in contact with the conductive plug.
- These and other advantages and features of the invention will be more readily understood from the following detailed description which is provided in connection with the accompanying drawings.
-
FIG. 1 is an idealized cross-sectional view of a conventionally fabricated conductor connection in a semiconductor device. -
FIG. 2 is a cross-sectional view likeFIG. 1 showing an offset via. -
FIG. 3 is a cross-sectional view likeFIG. 2 showing another offset via. -
FIG. 4 is a cross-sectional view of a semiconductor device constructed in accordance with an embodiment of the present invention. -
FIG. 5 is a cross-sectional view of a semiconductor device constructed in accordance with another embodiment of the present invention. -
FIG. 6 illustrates a method of making the device shown inFIG. 5 . -
FIG. 7 illustrates a method of making semiconductor products in accordance with an embodiment of the present invention. -
FIG. 8 illustrates a processor-based system constructed in accordance with an embodiment of the present invention. - Referring now to the drawings, where like numerals designate like elements, there is shown in
FIG. 4 a semiconductor device 200 with asubstrate 24 and aconductive connection 214 that may be formed by either the single Damascene or double Damascene methods. Thesubstrate 24 can be made of any material typically used as a substrate in integrated circuit fabrication. Theconductive connection 214 includes the first and secondconductive layers conductive layers semiconductor device 200 includes thematerial 20 surrounding thevia 21. The metal plug M1 is embedded within afirst insulator layer 230, for example, a BPSG layer, and ahard mask layer 228. Thehard mask layer 228 may be formed of any material capable of withstanding the subsequent etching process described below, such as, for example, silicon nitride, silicon carbide, silicon dioxide, or BLOK® (a mixture of silicon nitride and silicon carbide). - If the
hard mask 228 is formed of, for example, silicon nitride, a plasma etch using CF4 or C2F6 as the etching gas may be utilized to form thevia 21. When either of these etching gases reacts with theBPSG material 20, the oxygen contained within thematerial 20 is released and will react with the carbon in the etching gas to form carbon dioxide and desorb. However, when the etching gas reacts with the silicon nitride, there is no oxygen in the film, so a polymer containing carbon is formed. The polymer slows down or stops the etch of the silicon nitride, particularly, when the carbon to flourine ratio is high. - The result of this etching process is that etching of the insulating
layer 20 to form the via 21 will stop at thehard mask 228 and the formation of an offset opening like the offsetopenings FIGS. 2 and 3 will be prevented. Accordingly, as shown inFIG. 4 , the via 21 etching stops at the top surface of the conductive plug M1 andmask 228. Thelayers conductive connection 214 can be used to connect the dopedregion 22 to other portions of the partially illustratedsemiconductor device 200. - Next, a method of forming the conductive connection 214 (
FIG. 4 ) will be described with reference toFIG. 7 . Atstep 400, theinsulator layer 230 and thehard mask 228 are deposited on thesubstrate 24 containing the dopedregion 22. The dopedregion 22 may be formed by way of an ion implant. Further, the dopedregion 22 may serve as an active region in a memory cell, such as cell 513 (described below). It should be noted that the dopedregion 22 is merely illustrative of just one point on a substrate where an electrical connection is needed. Theconductive connection 214 can be fabricated wherever a conductive path is needed. An opening is formed in theinsulator 230 and thehard mask 228 layers atstep 405. The opening is preferably formed through the use of a photoresist and masking, followed by one or more anisotropic etching steps. The opening alternatively may be formed through mechanical or laser drilling. After stripping the photoresist, conductive material, e.g., polysilicon, is deposited over theinsulator 230, including in the opening, and is chemical-mechanical polished (CMP) to form the conductive plug M1 atstep 410. The planarizing process causes the top surface of the etch-resistant layer 228 to be co-planar with the top surface of the conductive element M1. - An insulating
layer 20, e.g. BPSG, is then deposited on the insulator 230 (step 415) and the via 21 is subsequently etched into the insulating layer 20 (step 420). The etching of via 21 is preferably accomplished by laying a photoresist over thematerial 20, exposing and developing the phtotoresist to mask a portion of the material 20 that is not to be etched, and then etching the via 21 in the unmasked region. As noted, thehard mask 228 is formed of a material which is relatively resistant to the etching chemistry, and hence acts as an etch stop so there is little or no etching below the top level of the conductive plug M1. The firstconductive layer 12 is then deposited atstep 425 and the secondconductive layer 16 is deposited on the firstconductive layer 12 atstep 430, thereby creating theconductive connection 214. -
FIG. 5 shows amulti-step semiconductor device 300 having aconductive connection 314. Themulti-step semiconductor device 300 has a greater conductive surface area which can be used to form container capacitors, useful, for example, in a memory device. A via 121 is etched above the metallic plug M1 in several steps to create viaportions portion 123 has a greater diameter than the viaportion 122, allowing the deposition of more area of first and secondconductive layers FIG. 5 viaportions conductive layer 112 is replaced by a three layer structure formed of a conductor layer, a dielectric layer, and another conductive layer, as is known in the art. - Referring now to
FIGS. 6 and 7 , to form the semiconductor device 300 (FIG. 5 ), the via 121 is etched in several steps to form the viaportions material 120 is deposited over thehard mask 228 and the plug M1 (step 410). After laying down aphotoresist 130 and amask 132,photoresist 130 is partially developed, and the developed portions and themask 132 are removed and the remainingphotoresist 130 is stripped. The viaportion 122 is then etched atstep 415. A second layer ofphotoresist 130 is then deposited. Asecond mask 134 is utilized to develop a portion of thesecond photoresist layer 130. The developed portion is removed as described above. Further themask 134 is removed and the remainingphotoresist 130 is stripped. The viaportion 123 is then etched atstep 435. After the viaportions photoresist 130 andmask 134 have been removed, layers 112, 116 (which are similar to thelayers steps 425, 430). - Referring now to
FIG. 8 , a device constructed in accordance with the invention can be used in a memory circuit, such as aDRAM device 512, or other electronic integrated circuit, within a processor-basedsystem 500. The processor-basedsystem 500 may be a computer system, a process control system or any other system employing a processor and associated memory. Thesystem 500 includes a central processing unit (CPU) 502, which may be a microprocessor. TheCPU 502 communicates with theDRAM device 512, which hascells 513 that include the semiconductor device 200 (or the semiconductor device 300), over abus 516. TheCPU 502 further communicates with one or more I/O devices bus 516. Although illustrated as a single bus, thebus 516 may be a series of buses and bridges commonly used in a processor-based system. Further components of thesystem 500 may include a read only memory (ROM)device 514 and peripheral devices such as afloppy disk drive 504, and CD-ROM drive 506. Thefloppy disk drive 504 and CD-ROM drive 506 communicate with theCPU 502 over thebus 516. - The present invention provides a semiconductor device which does not suffer from the aforementioned disadvantages caused by an etched area to the side of the conductive plug M1. The present invention further provides a method for making semiconductor devices without forming air gaps in trenches offset from a conductive plug.
- While the invention has been described in detail in connection with preferred embodiments known at the time, it should be readily understood that the invention is not limited to such disclosed embodiments. Rather, the invention can be modified to incorporate any number of variations, alterations, substitutions or equivalent arrangements not heretofore described, but which are commensurate with the spirit and scope of the invention. Accordingly, the invention is not to be seen as limited by the foregoing description, but is only limited by the scope of the appended claims.
- What is claimed as new and desired to be protected by Letters Patent of the United States is:
Claims (33)
1-38. (canceled)
39. A semiconductor device comprising:
an insulator layer;
a conductive plug positioned within said insulator layer and formed of a single conductive material;
a doped region connected to said conductive plug;
a non-conductive layer having an etched via formed at least partially over said conductive plug, wherein a first portion of said etched via is wider in diameter than said conductive plug; and
a conductive connector formed in said via in electrical contact with said plug and including a first conductive layer deposited in and in contact with said etched via and a second conductive layer deposited over and in contact with said first conductive layer, said first conductive layer including a portion in contact with said conductive plug.
40. The semiconductor structure of claim 39 , further comprising an etch-stop layer located on said insulator layer and surrounding said plug.
41. The semiconductor structure of claim 40 , further comprising an wherein said etch-stop layer comprises silicon nitride.
42. The semiconductor structure of claim 40 , wherein said etch-stop layer comprises silicon carbide.
43. The semiconductor structure of claim 40 , wherein said etch-stop layer comprises silicon dioxide.
44. The semiconductor structure of claim 40 , wherein said etch-stop layer comprises silicon nitride and silicon carbide.
45. The semiconductor structure of claim 40 , wherein said non-conductive layer comprises doped silicate glass.
46. The semiconductor structure of claim 45 , wherein said doped silicate glass comprises borophosphosilicate glass.
47. The semiconductor structure of claim 40 , wherein said first conductive layer comprises one or more materials selected from the group consisting of aluminum, copper, doped polysilicate, tantalum, tantalum nitride, titanium, titanium nitride and tungsten.
48. The semiconductor structure of claim 40 , further comprising a substrate with a connection region, wherein said conductive plug is provided over said connection region.
49. A semiconductor device comprising:
at least one memory cell comprising:
an active region in a substrate;
a conductive plug formed of a single conductive material positioned within an insulator layer and provided over said active region, said conductive plug
being electrically connected with said active region;
an intermediate non-conductive layer provided over said insulator layer having an etched via over said plug, said etched via having a first via portion wider in diameter than said conductive plug, and a second via portion above said first via portion having a greater diameter than said first via portion; and
a first conductive layer deposited in and in contact with said first and second via portions, said first conductive layer including a portion in contact with said conductive plug, and a second conductive layer deposited over and in contact with said first conductive layer.
50. The semiconductor memory device of claim 49 , wherein said intermediate layer comprises doped silicate glass.
51. The semiconductor memory device of claim 50 , wherein said doped silicate glass comprises borophosphosilicate glass.
52. The semiconductor memory device of claim 49 , wherein said first conductive layer comprises one or more materials selected from the group consisting of aluminum, copper, doped polysilicate, tantalum, tantalum nitride, titanium, titanium nitride and tungsten.
53. The semiconductor memory device of claim 49 , wherein said second conductive layer comprises one or more materials selected from the group consisting of aluminum, copper, doped polysilicate, tantalum, tantalum nitride, titanium, titanium nitride and tungsten.
54. The semiconductor memory device of claim 49 , further comprising a plurality of said memory cells.
55. The semiconductor memory device of claim 54 , wherein said plurality of said memory cells are in an array.
56. A processor-based system comprising:
a processing unit;
a semiconductor circuit coupled to said processing unit, said semiconductor circuit comprising:
a conductive plug formed of a single conductive material positioned within an insulator and provided on a connection region;
an intermediate non-conductive layer provided over said insulator having at least an etched via over said conductive plug, said etched via having a first via portion being wider in diameter than said conductive plug, and a second via portion above said first via portion having a greater diameter than said first via portion; and
a conductive connector electrically coupled to said connection region, said conductive connector comprising a first conductive layer deposited in and in contact with said first and second via portions, said first conductive layer including a portion in contact with said conductive plug, and a second conductive layer deposited over and in contact with said first conductive layer.
57. The processor-based system of claim 56 , wherein said connection region comprises a doped region within said substrate.
58. The processor-based system of claim 56 , wherein said intermediate layer comprises doped silicate glass.
59. The processor-based system of claim 58 , wherein said doped silicate glass comprises borophosphosilicate glass.
60. The processor-based system of claim 56 , wherein said first conductive layer comprises at least one layer of one or more materials selected from the group consisting of aluminum, copper, doped polysilicate, tantalum, tantalum nitride, titanium, titanium nitride and tungsten.
61. The processor-based system of claim 56 , wherein said second conductive layer comprises at least one layer of one or more materials selected from the group consisting of aluminum, copper, doped polysilicate, tantalum, tantalum nitride, titanium, titanium nitride and tungsten.
62. The processor-based system of claim 56 , further comprising a substrate, and wherein said connection region is located in said substrate, and wherein said conductive plug is located over said connection region.
63. A method of making a semiconductor device, said method comprising:
forming a layer of insulating material over a substrate;
forming a conductive plug within said first layer of insulating material, wherein said conductive plug consists essentially of a single conductive material;
forming a second layer of insulating material over said conductive plug; and
etching said second layer of insulating material to said conductive plug and etch-stop layer to form a via having first and second via portions, wherein said first via portion is wider than the conductive plug's width, and said second via portion is wider than said first via portion.
64. The method of claim 63 , further comprising depositing at least a first conductive layer in said first and second via portions.
65. The method of claim 64 , comprising depositing a second conductive layer over said first conductive layer in said first and second via portions.
66. The method of claim 63 , wherein said plug is formed by:
forming an opening in said first layer of insulating material;
depositing a conductive material on said first layer of insulating material, filling said opening; and
abrading said conductive material from the top surface of said first layer of insulating such that only conductive material within said opening remains.
67. The method of claim 66 , wherein said abrading comprises chemical-mechanical polishing of said conductive material.
68. The method of claim 66 , wherein said conductive plug is connected to a doped region in said substrate.
69. A method of making a semiconductor device, said method comprising:
forming a first non-conductive layer over a substrate;
forming a conductive plug within said first non-conductive layer, wherein said conductive plug consists essentially of a single conductive material;
forming a second non-conductive layer over said conductive plug;
forming a via having first and second via portions by etching said second non-conductive layer to said conductive plug and etch-stop layer, wherein said first via portion is wider in diameter than said conductive plug; and
depositing a conductive material within said first and second via portions.
70. A method of making a semiconductor device, said method comprising:
forming an active region in a semiconductor substrate;
forming a first insulator layer over said active region;
forming a single conductive material within said first insulator layer, wherein said conductive material is electrically connected with said active region;
forming a second insulator layer over said conductive material;
forming a via having first and second via portions within said second insulator layer, wherein said first via portion is wider in diameter than said conductive material, and wherein said second via portion is wider in diameter than said first via portion; and
forming a conductive connector in said first and second via portions that are in electrical contact with said conductive material.
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US11/403,923 US20060197231A1 (en) | 2000-03-02 | 2006-04-14 | Backend metallization method and device obtained therefrom |
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US09/517,314 US6858937B2 (en) | 2000-03-02 | 2000-03-02 | Backend metallization method and device obtained therefrom |
US11/032,093 US7056823B2 (en) | 2000-03-02 | 2005-01-11 | Backend metallization method and device obtained therefrom |
US11/403,923 US20060197231A1 (en) | 2000-03-02 | 2006-04-14 | Backend metallization method and device obtained therefrom |
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US11/032,093 Expired - Fee Related US7056823B2 (en) | 2000-03-02 | 2005-01-11 | Backend metallization method and device obtained therefrom |
US11/403,923 Abandoned US20060197231A1 (en) | 2000-03-02 | 2006-04-14 | Backend metallization method and device obtained therefrom |
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US11/032,093 Expired - Fee Related US7056823B2 (en) | 2000-03-02 | 2005-01-11 | Backend metallization method and device obtained therefrom |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110042826A1 (en) * | 2004-01-14 | 2011-02-24 | International Business Machines Corporation | Sacrificial inorganic polymer intermetal dielectric damascene wire and via liner |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7061111B2 (en) * | 2000-04-11 | 2006-06-13 | Micron Technology, Inc. | Interconnect structure for use in an integrated circuit |
US6534866B1 (en) * | 2000-04-13 | 2003-03-18 | Micron Technology, Inc. | Dual damascene interconnect |
US6524912B1 (en) * | 2000-08-31 | 2003-02-25 | Micron Technology, Inc. | Planarization of metal container structures |
KR100442103B1 (en) * | 2001-10-18 | 2004-07-27 | 삼성전자주식회사 | Fram and method of forming the same |
US7279410B1 (en) | 2003-03-05 | 2007-10-09 | Advanced Micro Devices, Inc. | Method for forming inlaid structures for IC interconnections |
US6767827B1 (en) | 2003-06-11 | 2004-07-27 | Advanced Micro Devices, Inc. | Method for forming dual inlaid structures for IC interconnections |
JP2005072168A (en) * | 2003-08-22 | 2005-03-17 | Nitto Denko Corp | Double-sided wiring circuit substrate and its manufacturing method |
US7994047B1 (en) * | 2005-11-22 | 2011-08-09 | Spansion Llc | Integrated circuit contact system |
KR101074689B1 (en) * | 2009-11-02 | 2011-10-19 | 삼성전기주식회사 | Optical wiring board and manufacturing method thereof |
US8428401B2 (en) | 2009-12-16 | 2013-04-23 | Telefonaktiebolaget L M Ericsson (Publ) | On-chip optical waveguide |
KR101113327B1 (en) * | 2009-12-29 | 2012-03-13 | 주식회사 하이닉스반도체 | Semiconductor device having through via and method of fabricating the same |
US9391020B2 (en) * | 2014-03-31 | 2016-07-12 | Stmicroelectronics, Inc. | Interconnect structure having large self-aligned vias |
KR102211741B1 (en) * | 2014-07-21 | 2021-02-03 | 삼성전기주식회사 | Printed circuit board and method of manufacturing the same |
TWI594671B (en) * | 2014-12-17 | 2017-08-01 | Flexible circuit board micro-aperture conductive through-hole structure and manufacturing method |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5097381A (en) * | 1990-10-11 | 1992-03-17 | Micron Technology, Inc. | Double sidewall trench capacitor cell |
US5122476A (en) * | 1991-01-28 | 1992-06-16 | Micron Technology, Inc. | Double DRAM cell |
US5598027A (en) * | 1992-06-24 | 1997-01-28 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device and method of fabricating the same |
US5739579A (en) * | 1992-06-29 | 1998-04-14 | Intel Corporation | Method for forming interconnections for semiconductor fabrication and semiconductor device having such interconnections |
US5880030A (en) * | 1997-11-25 | 1999-03-09 | Intel Corporation | Unlanded via structure and method for making same |
US6008117A (en) * | 1996-03-29 | 1999-12-28 | Texas Instruments Incorporated | Method of forming diffusion barriers encapsulating copper |
US6097095A (en) * | 1999-06-09 | 2000-08-01 | Alliedsignal Inc. | Advanced fabrication method of integrated circuits with borderless vias and low dielectric-constant inter-metal dielectrics |
US6150723A (en) * | 1997-09-30 | 2000-11-21 | International Business Machines Corporation | Copper stud structure with refractory metal liner |
US6168704B1 (en) * | 1999-02-04 | 2001-01-02 | Advanced Micro Device, Inc. | Site-selective electrochemical deposition of copper |
US6184128B1 (en) * | 2000-01-31 | 2001-02-06 | Advanced Micro Devices, Inc. | Method using a thin resist mask for dual damascene stop layer etch |
US6294835B1 (en) * | 1997-10-08 | 2001-09-25 | International Business Machines Corporation | Self-aligned composite insulator with sub-half-micron multilevel high density electrical interconnections and process thereof |
US6303486B1 (en) * | 2000-01-28 | 2001-10-16 | Advanced Micro Devices, Inc. | Method of fabricating copper-based semiconductor devices using a sacrificial dielectric layer and an unconstrained copper anneal |
US6345589B1 (en) * | 1996-03-29 | 2002-02-12 | Applied Materials, Inc. | Method and apparatus for forming a borophosphosilicate film |
-
2000
- 2000-03-02 US US09/517,314 patent/US6858937B2/en not_active Expired - Fee Related
-
2005
- 2005-01-11 US US11/032,093 patent/US7056823B2/en not_active Expired - Fee Related
-
2006
- 2006-04-14 US US11/403,923 patent/US20060197231A1/en not_active Abandoned
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5097381A (en) * | 1990-10-11 | 1992-03-17 | Micron Technology, Inc. | Double sidewall trench capacitor cell |
US5122476A (en) * | 1991-01-28 | 1992-06-16 | Micron Technology, Inc. | Double DRAM cell |
US5598027A (en) * | 1992-06-24 | 1997-01-28 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device and method of fabricating the same |
US5739579A (en) * | 1992-06-29 | 1998-04-14 | Intel Corporation | Method for forming interconnections for semiconductor fabrication and semiconductor device having such interconnections |
US6008117A (en) * | 1996-03-29 | 1999-12-28 | Texas Instruments Incorporated | Method of forming diffusion barriers encapsulating copper |
US6345589B1 (en) * | 1996-03-29 | 2002-02-12 | Applied Materials, Inc. | Method and apparatus for forming a borophosphosilicate film |
US6150723A (en) * | 1997-09-30 | 2000-11-21 | International Business Machines Corporation | Copper stud structure with refractory metal liner |
US6294835B1 (en) * | 1997-10-08 | 2001-09-25 | International Business Machines Corporation | Self-aligned composite insulator with sub-half-micron multilevel high density electrical interconnections and process thereof |
US5880030A (en) * | 1997-11-25 | 1999-03-09 | Intel Corporation | Unlanded via structure and method for making same |
US6168704B1 (en) * | 1999-02-04 | 2001-01-02 | Advanced Micro Device, Inc. | Site-selective electrochemical deposition of copper |
US6097095A (en) * | 1999-06-09 | 2000-08-01 | Alliedsignal Inc. | Advanced fabrication method of integrated circuits with borderless vias and low dielectric-constant inter-metal dielectrics |
US6303486B1 (en) * | 2000-01-28 | 2001-10-16 | Advanced Micro Devices, Inc. | Method of fabricating copper-based semiconductor devices using a sacrificial dielectric layer and an unconstrained copper anneal |
US6184128B1 (en) * | 2000-01-31 | 2001-02-06 | Advanced Micro Devices, Inc. | Method using a thin resist mask for dual damascene stop layer etch |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110042826A1 (en) * | 2004-01-14 | 2011-02-24 | International Business Machines Corporation | Sacrificial inorganic polymer intermetal dielectric damascene wire and via liner |
US8053901B2 (en) * | 2004-01-14 | 2011-11-08 | International Business Machines Corporation | Sacrificial inorganic polymer intermetal dielectric damascene wire and via liner |
Also Published As
Publication number | Publication date |
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US6858937B2 (en) | 2005-02-22 |
US7056823B2 (en) | 2006-06-06 |
US20020195715A1 (en) | 2002-12-26 |
US20050116349A1 (en) | 2005-06-02 |
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