US20060081859A1 - Light emitting semiconductor bonding structure and method of manufacturing the same - Google Patents
Light emitting semiconductor bonding structure and method of manufacturing the same Download PDFInfo
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- US20060081859A1 US20060081859A1 US10/966,537 US96653704A US2006081859A1 US 20060081859 A1 US20060081859 A1 US 20060081859A1 US 96653704 A US96653704 A US 96653704A US 2006081859 A1 US2006081859 A1 US 2006081859A1
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 62
- 238000004519 manufacturing process Methods 0.000 title abstract description 10
- 239000000758 substrate Substances 0.000 claims abstract description 47
- 238000000151 deposition Methods 0.000 claims abstract description 5
- 238000007747 plating Methods 0.000 claims abstract description 4
- 238000003466 welding Methods 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 18
- 238000005240 physical vapour deposition Methods 0.000 claims description 4
- 238000005229 chemical vapour deposition Methods 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 claims description 3
- 238000009713 electroplating Methods 0.000 claims description 2
- 238000001465 metallisation Methods 0.000 claims description 2
- 230000008021 deposition Effects 0.000 abstract description 4
- 238000007654 immersion Methods 0.000 abstract description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 6
- 239000010931 gold Substances 0.000 description 5
- 229910002601 GaN Inorganic materials 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
- H01L25/167—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits comprising optoelectronic devices, e.g. LED, photodiodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/0502—Disposition
- H01L2224/05023—Disposition the whole internal layer protruding from the surface
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05075—Plural internal layers
- H01L2224/0508—Plural internal layers being stacked
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0556—Disposition
- H01L2224/05568—Disposition the whole external layer protruding from the surface
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
Definitions
- the present invention relates to a light emitting semiconductor bonding structure and its manufacturing method, and in particular to a light emitting semiconductor structure bonded on a substrate for creation of electric connection therebetween.
- FIG. 3 of the attached drawings shows a conventional light emitting semiconductor bonding structure, which is obtained by bonding a substrate 301 to a light emitting semiconductor 302 .
- the substrate 301 is a structure containing electric circuits
- the light emitting semiconductor 302 is a light emitting diode.
- the gallium-nitride (GaN) based light emitting diode as an example, the light emitting semiconductor 302 comprises an N-type contact layer 303 and a P-type contact layer 304 .
- the N type contact layer 303 is made of N-type gallium-nitride, and an ohmic contact N electrode layer 303 a is formed on one exposed side, and a first metallic bump 303 b is formed on the N electrode layer 303 a .
- the P type contact layer 304 is made of P-type gallium-nitride, an ohmic contact P electrode layer 304 a is formed on one exposed side, and a second metallic bump 304 b is formed on the P electrode layer 304 a .
- the light emitting semiconductor 302 can be welded on the substrate 301 through the first metallic bump 303 b and the second metallic bump 304 b by means of the Flip Chip Bonder, and as thus accommodating the input/output of the electric signals between the substrate 301 and the light emitting semiconductor 302 .
- the metallic bump is made of solder, it is not suitable for the high temperature manufacturing process and the application of the high power light emitting diode (LED), because the melting point of the solder is too low.
- the gold bump process can be used for the metallic bump to overcome the shortcomings of using the solder, yet by doing so, it would require the additional Au Bump Process.
- the number of gold bumps will determine the effectiveness of heat dissipation, and resulting in the increase of its production cost due to the gold bump process required for the high power light emitting diode, and thus reducing its production yield.
- the development and realization of the present invention is based on the effort to overcome the shortcomings and disadvantages of the conventional light emitting semiconductor bonding structure.
- the present invention relates to a light emitting semiconductor bonding structure and its manufacturing method, and it practically solves one or even several shortcomings and restrictions of the aforementioned related prior art.
- the purpose of the present invention is to adopt the entire surface metallic layer bonding rather than the partial surface bonding at the junction of the light emitting semiconductor and the substrate, such that in the bonding process, it needs only to cooperate with the Flip Chip Bonder, and there is no need to produce the Au bumps. Therefore, this kind of entire surface bonding can not only provide the solid and strong bonding, more even current distribution, better heat dissipation, increased reliability, but can also further reduce its production cost and raise its production yield.
- the present invention provides a light emitting semiconductor bonding structure and its manufacturing method, and the realization of the present invention is achieved mainly through the structure obtained by bonding the substrate onto the light emitting semiconductor.
- the substrate is a structure containing electric circuits, and an ohmic contact N electrode layer and P electrode layer are formed on the N-type contact layer and P-type contact layer in the light emitting semiconductor respectively; and the first metallic layer and the second metallic layer are formed on the surface of the substrate through the immersion-plating or deposition, and which are connected electrically to the corresponding electric signal input/output nodes of the substrate electric circuit respectively.
- first metallic layer and the second metallic layer are in cooperation with of the N electrode layer and P electrode layer of the light emitting semiconductor respectively, such that the first metallic layer and the second metallic layer correspond to and are bonded onto the N electrode layer and P electrode layer respectively through ultra-sonic welding, so that the light emitting semiconductor is bonded onto the substrate, and thus realizing the electric connection in-between.
- FIG. 1 is a light emitting semiconductor bonding structure according to the preferred embodiment of the present invention.
- FIG. 2 is a flowchart of a method realizing the structure in FIG. 1 according to the preferred embodiment of the present invention.
- FIG. 3 is a conventional light emitting semiconductor bonding structure.
- FIG. 1 is the schematic section view of the light emitting semiconductor bonding structure according to the preferred embodiment of the present invention.
- FIG. 2 is the flowchart of the method of realizing the structure in FIG. 1 according to the preferred embodiment of the present invention.
- FIG. 1 indicates the preferred embodiment of the light emitting semiconductor bonding structure of the present invention. This structure is realized through bonding the substrate 101 onto the light emitting semiconductor 102 .
- the substrate 101 is a structure containing electric circuits, and on its surface at least formed a first metallic layer 101 a and a second metallic layer 101 b , and the first metallic layer 101 a and a second metallic layer 101 b are connected electrically to the corresponding electric signal input/output nodes of the electric circuit of the substrate 101 , and thus accommodating the input/output of the electric signals between the substrate 101 and light emitting semiconductor 102 .
- a lead frame is provided on the substrate 101 , which is used to connected electrically to the light emitting semiconductor 102 , so as to accommodate the input/output of electric signal from/to the light emitting semiconductor 102 .
- the light emitting semiconductor 102 in reality is a light emitting diode, for example, a gallium-nitride (GaN) based light emitting diode.
- the light emitting semiconductor 102 includes an N-type contact layer 103 and a P-type contact layer 104 .
- the N-type contact layer 103 is made of N-type gallium-nitride, and an ohmic contact N electrode layer 103 a is formed on one of its exposed sides; and the P-type contact layer 104 is made of P-type gallium-nitride, and an ohmic contact P electrode layer 104 a is formed on one of its exposed sides.
- the first metallic layer 101 a and the second metallic layer 101 b of the substrate 101 cooperate with N electrode layer 103 a and P electrode layer 104 a of the light emitting semiconductor 102 , such that the first metallic layer 101 a and the second metallic layer 101 b correspond to and are bonded onto the N electrode layer 103 a and P electrode layer 104 a respectively, so that the light emitting semiconductor 102 is bonded onto the substrate 101 , and thus realizing the electric connection in-between.
- Even the areas of said first metallic layer 101 a and the second metallic layer 101 b correspond to those of the N electrode layer 103 a and P electrode layer 104 a respectively, so as to form the contact areas of approximately the same size.
- FIG. 2 is the flowchart of the method used in realizing the light emitting semiconductor bonding structure of FIG. 1 according to the preferred embodiment of the present invention, comprising the following steps:
- Step 201 forming the first metallic layer 101 a and the second metallic layer 101 b on the corresponding position of the substrate 101 , such that the area and position of the first metallic layer 101 a and the second metallic layer 101 b correspond to those of the N electrode layer 103 a and the P electrode layer 104 a.
- Step 202 flip-placing the light emitting semiconductor 102 on the substrate 101 , such that the N-electrode 103 a and P-electrode 104 a correspond to and are stacked on the first metallic layer 101 a and the second metallic layer 101 b , and then through the ultra-sonic welding, bonding the N electrode layer 103 a onto the first metallic layer 101 a , and bonding the P electrode layer 104 a onto the second metallic layer 101 b .
- the light emitting semiconductor 102 can be bonded onto the substrate 101 , and thus realizing the electric connection in-between.
- the first metallic layer 101 a and the second metallic layer 101 b are formed on the substrate 101 , this is achieved by means of the ordinary metal deposition method in addition to the immersion plating method. Its major essence it to form the first metallic layer 101 a and the second metallic layer 101 b on the substrate 101 , such that the area and position of the first metallic layer 101 a and the second metallic layer 101 b correspond to those of the N electrode layer 103 a and the P electrode layer 104 a.
- the deposition of the first metallic layer 101 a and the second metallic layer 101 b can also be achieved by means of the ordinary metallic deposition, such as the physical vapor deposition (PVD), chemical vapor deposition (CVD), and electroplating.
- PVD physical vapor deposition
- CVD chemical vapor deposition
- electroplating electroplating
- the first metallic layer 101 a and the second metallic layer 101 b of the present invention correspond to the electric circuit of substrate 101 and the N electrode layer 103 a and P electrode layer 104 a of the light emitting semiconductor 102 , and which is utilized to form the junction interface between the electric signal input/output node in the electric circuit of the substrate 101 and the N electrode layer 103 a and the P electrode layer 104 a of the light emitting semiconductor 102 . Therefore, it is not restricted to deposit the first metallic layer 101 a and the second metallic layer 101 b on the substrate 101 , and which could also be deposited on the surface of the N electrode layer 103 a and the P electrode layer 104 a.
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- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
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Abstract
Disclosed is a light emitting semiconductor bonding structure and its manufacturing method. The light emitting semiconductor bonding structure includes a structure formed by bonding a substrate onto a light emitting semiconductor. The substrate is a structure containing electric circuits. The ohmic contact N electrode layer and P electrode layer are formed on the N-type contact layer and the P-type contact layer of the light emitting semiconductor respectively. The first metallic layer and the second metallic layer are formed on the surface of the substrate by means of immersion plating or deposition. The metallic layers are connected electrically to the corresponding electric signal input/output nodes of the electric circuit of the substrate. The first metallic layer and the second metallic layer cooperate with the N electrode layer and the P electrode layer of the light emitting semiconductor respectively, such that the first metallic layer and the second metallic layer correspond to and are bonded onto the N electrode layer and the P electrode layer respectively through the supersonic welding, and as such the light emitting semiconductor is bonded onto the substrate, and thus realizing the electric connection in-between.
Description
- 1. Field of the Invention
- The present invention relates to a light emitting semiconductor bonding structure and its manufacturing method, and in particular to a light emitting semiconductor structure bonded on a substrate for creation of electric connection therebetween.
- 2. The Prior Arts
- In the conventional method of producing light emitting semiconductor bonding structures, a light emitting semiconductor is bonded onto a electrically controlled substrate through the ordinary flip chip process.
FIG. 3 of the attached drawings shows a conventional light emitting semiconductor bonding structure, which is obtained by bonding asubstrate 301 to alight emitting semiconductor 302. Thesubstrate 301 is a structure containing electric circuits, and thelight emitting semiconductor 302 is a light emitting diode. Taking the gallium-nitride (GaN) based light emitting diode as an example, thelight emitting semiconductor 302 comprises an N-type contact layer 303 and a P-type contact layer 304. The Ntype contact layer 303 is made of N-type gallium-nitride, and an ohmic contactN electrode layer 303 a is formed on one exposed side, and a firstmetallic bump 303 b is formed on theN electrode layer 303 a. The Ptype contact layer 304 is made of P-type gallium-nitride, an ohmic contactP electrode layer 304 a is formed on one exposed side, and a secondmetallic bump 304 b is formed on theP electrode layer 304 a. Therefore, thelight emitting semiconductor 302 can be welded on thesubstrate 301 through the firstmetallic bump 303 b and the secondmetallic bump 304 b by means of the Flip Chip Bonder, and as thus accommodating the input/output of the electric signals between thesubstrate 301 and thelight emitting semiconductor 302. However, if the metallic bump is made of solder, it is not suitable for the high temperature manufacturing process and the application of the high power light emitting diode (LED), because the melting point of the solder is too low. Besides, though the gold bump process can be used for the metallic bump to overcome the shortcomings of using the solder, yet by doing so, it would require the additional Au Bump Process. In addition, in the application of Gold Bump Process, the number of gold bumps will determine the effectiveness of heat dissipation, and resulting in the increase of its production cost due to the gold bump process required for the high power light emitting diode, and thus reducing its production yield. - Therefore, the development and realization of the present invention is based on the effort to overcome the shortcomings and disadvantages of the conventional light emitting semiconductor bonding structure.
- The present invention relates to a light emitting semiconductor bonding structure and its manufacturing method, and it practically solves one or even several shortcomings and restrictions of the aforementioned related prior art.
- The purpose of the present invention is to adopt the entire surface metallic layer bonding rather than the partial surface bonding at the junction of the light emitting semiconductor and the substrate, such that in the bonding process, it needs only to cooperate with the Flip Chip Bonder, and there is no need to produce the Au bumps. Therefore, this kind of entire surface bonding can not only provide the solid and strong bonding, more even current distribution, better heat dissipation, increased reliability, but can also further reduce its production cost and raise its production yield.
- To achieve the aforementioned purpose, the present invention provides a light emitting semiconductor bonding structure and its manufacturing method, and the realization of the present invention is achieved mainly through the structure obtained by bonding the substrate onto the light emitting semiconductor. In addition, the substrate is a structure containing electric circuits, and an ohmic contact N electrode layer and P electrode layer are formed on the N-type contact layer and P-type contact layer in the light emitting semiconductor respectively; and the first metallic layer and the second metallic layer are formed on the surface of the substrate through the immersion-plating or deposition, and which are connected electrically to the corresponding electric signal input/output nodes of the substrate electric circuit respectively. And the first metallic layer and the second metallic layer are in cooperation with of the N electrode layer and P electrode layer of the light emitting semiconductor respectively, such that the first metallic layer and the second metallic layer correspond to and are bonded onto the N electrode layer and P electrode layer respectively through ultra-sonic welding, so that the light emitting semiconductor is bonded onto the substrate, and thus realizing the electric connection in-between.
- The purpose and functions of the present invention can be understood more thoroughly through the following detailed description together with the attached drawings.
- The related drawings in connection with the detailed description of the present invention to be made later are described briefly as follows, in which:
-
FIG. 1 is a light emitting semiconductor bonding structure according to the preferred embodiment of the present invention; -
FIG. 2 is a flowchart of a method realizing the structure inFIG. 1 according to the preferred embodiment of the present invention; and -
FIG. 3 is a conventional light emitting semiconductor bonding structure. - A preferred embodiment of the present invention will be described in more detail further together with the attached drawings, wherein certain scales and the related scales of other portions are exaggeratedly enlarged to provide more clear description, so as to facilitate the people familiar with this technology to have a better understanding of the present invention.
-
FIG. 1 is the schematic section view of the light emitting semiconductor bonding structure according to the preferred embodiment of the present invention.FIG. 2 is the flowchart of the method of realizing the structure inFIG. 1 according to the preferred embodiment of the present invention. - First, please refer to
FIG. 1 , which indicates the preferred embodiment of the light emitting semiconductor bonding structure of the present invention. This structure is realized through bonding thesubstrate 101 onto thelight emitting semiconductor 102. - The
substrate 101 is a structure containing electric circuits, and on its surface at least formed a firstmetallic layer 101 a and a secondmetallic layer 101 b, and the firstmetallic layer 101 a and a secondmetallic layer 101 b are connected electrically to the corresponding electric signal input/output nodes of the electric circuit of thesubstrate 101, and thus accommodating the input/output of the electric signals between thesubstrate 101 andlight emitting semiconductor 102. - A lead frame is provided on the
substrate 101, which is used to connected electrically to thelight emitting semiconductor 102, so as to accommodate the input/output of electric signal from/to thelight emitting semiconductor 102. - In addition, the
light emitting semiconductor 102 in reality is a light emitting diode, for example, a gallium-nitride (GaN) based light emitting diode. Thelight emitting semiconductor 102 includes an N-type contact layer 103 and a P-type contact layer 104. The N-type contact layer 103 is made of N-type gallium-nitride, and an ohmic contactN electrode layer 103 a is formed on one of its exposed sides; and the P-type contact layer 104 is made of P-type gallium-nitride, and an ohmic contact P electrode layer 104 a is formed on one of its exposed sides. - The first
metallic layer 101 a and the secondmetallic layer 101 b of thesubstrate 101 cooperate withN electrode layer 103 a and P electrode layer 104 a of thelight emitting semiconductor 102, such that the firstmetallic layer 101 a and the secondmetallic layer 101 b correspond to and are bonded onto theN electrode layer 103 a and P electrode layer 104 a respectively, so that thelight emitting semiconductor 102 is bonded onto thesubstrate 101, and thus realizing the electric connection in-between. Even the areas of said firstmetallic layer 101 a and the secondmetallic layer 101 b correspond to those of theN electrode layer 103 a and P electrode layer 104 a respectively, so as to form the contact areas of approximately the same size. - Next, please refer to
FIG. 2 .FIG. 2 is the flowchart of the method used in realizing the light emitting semiconductor bonding structure ofFIG. 1 according to the preferred embodiment of the present invention, comprising the following steps: - Step 201: forming the first
metallic layer 101 a and the secondmetallic layer 101 b on the corresponding position of thesubstrate 101, such that the area and position of the firstmetallic layer 101 a and the secondmetallic layer 101 b correspond to those of theN electrode layer 103 a and the P electrode layer 104 a. - Step 202: flip-placing the
light emitting semiconductor 102 on thesubstrate 101, such that the N-electrode 103 a and P-electrode 104 a correspond to and are stacked on the firstmetallic layer 101 a and the secondmetallic layer 101 b, and then through the ultra-sonic welding, bonding theN electrode layer 103 a onto the firstmetallic layer 101 a, and bonding the P electrode layer 104 a onto the secondmetallic layer 101 b. As such, thelight emitting semiconductor 102 can be bonded onto thesubstrate 101, and thus realizing the electric connection in-between. - In the aforementioned steps, the first
metallic layer 101 a and the secondmetallic layer 101 b are formed on thesubstrate 101, this is achieved by means of the ordinary metal deposition method in addition to the immersion plating method. Its major essence it to form the firstmetallic layer 101 a and the secondmetallic layer 101 b on thesubstrate 101, such that the area and position of the firstmetallic layer 101 a and the secondmetallic layer 101 b correspond to those of theN electrode layer 103 a and the P electrode layer 104 a. - The deposition of the first
metallic layer 101 a and the secondmetallic layer 101 b can also be achieved by means of the ordinary metallic deposition, such as the physical vapor deposition (PVD), chemical vapor deposition (CVD), and electroplating. - In addition, the first
metallic layer 101 a and the secondmetallic layer 101 b of the present invention correspond to the electric circuit ofsubstrate 101 and theN electrode layer 103 a and P electrode layer 104 a of thelight emitting semiconductor 102, and which is utilized to form the junction interface between the electric signal input/output node in the electric circuit of thesubstrate 101 and theN electrode layer 103 a and the P electrode layer 104 a of thelight emitting semiconductor 102. Therefore, it is not restricted to deposit the firstmetallic layer 101 a and the secondmetallic layer 101 b on thesubstrate 101, and which could also be deposited on the surface of theN electrode layer 103 a and the P electrode layer 104 a. - The preferred Embodiment described above is only illustrative, and it is not intended to be construed as to be any restrictions to the present invention. Therefore, any variations or modifications made within the spirit and scope of the present invention can be included in the scope of protection of the present invention.
Claims (8)
1. A light emitting semiconductor bonding structure, comprising a structure formed by bonding a substrate onto a light emitting semiconductor, the substrate being a structure containing electric circuit, the ohmic contact N electrode layer and P electrode layer formed on the N-type contact layer and the P-type contact layer of the light emitting semiconductor respectively; and
the first metallic layer and the second metallic layer being on the surface of the substrate, which are connected electrically to corresponding electric signal input/output nodes of the electric circuit of the substrate, and the first metallic layer and the second metallic layer cooperating with the N electrode layer and the P electrode layer of the light emitting semiconductor respectively, such that the first metallic layer and the second metallic layer correspond to and are bonded onto the N electrode layer and the P electrode layer respectively, as such the light emitting semiconductor is bonded onto the substrate, and thus realizing the electric connection in-between.
2. The light emitting semiconductor bonding structure as claimed in claim 1 , wherein a lead frame is provided on the substrate to connect electrically to the light emitting semiconductor to accommodate the input/output of the electric signal of the light emitting semiconductor.
3. The light emitting semiconductor bonding structure as claimed in claim 1 , wherein areas of the first metallic layer and the second metallic layer correspond respectively to those of the N electrode layer and the P electrode layer, so as to form contact areas of approximately the same size.
4. A light emitting semiconductor bonding method for bonding a substrate onto a light emitting semiconductor, the substrate being a structure containing electric circuits, an ohmic contact N electrode layer and an ohmic contact P electrode layer being formed on the N-type contact layer and P-type contact layer of the light emitting semiconductor respectively, and the method comprising the following steps:
(a) depositing and forming the first metallic layer and the second metallic layer on the corresponding positions of the substrate, and the positions of the first metallic layer and the second metallic layer corresponding to those of the N electrode layer and the P electrode layer; and
(b) flip-placing the light emitting semiconductor on the substrate, such that the N electrode layer and the P electrode layer correspond to and are stacked on the first metallic layer and the second metallic layer, and then bonding the N electrode layer onto the first metallic layer and bonding the P electrode layer onto the second metallic layer by means of the bonding technology; wherein the areas of the first metallic layer and the second metallic layer correspond to those of the N electrode layer and the P electrode layer, so as to form the contact areas of approximately the same size.
5. The light emitting semiconductor bonding method as claimed in claim 4 , wherein the first metallic layer and the second metallic layer correspond to the electric circuit of the substrate and the N electrode layer and the P electrode layer of the light emitting semiconductor, and the junction interfaces are deposited on the surfaces of the N electrode layer and the P electrode layer, and are formed between the electric signal input/output node in the electric circuit of the substrate and the N electrode layer and the P electrode layer of the light emitting semiconductor.
6. The light emitting semiconductor bonding method as claimed in claim 4 , wherein the first metallic layer and the second metallic layer are formed on the substrate by means of immersion-plating.
7. The light emitting semiconductor bonding method as claimed in claim 4 , wherein the ordinary metal deposition methods are utilized to form the first metallic layer and the second metallic layer on the substrate, such as physical vapor deposition (PVD), chemical vapor deposition(CVD), or electroplating.
8. The light emitting semiconductor bonding method as claimed in claim 4 , wherein the light emitting semiconductor is flip-placed on the substrate, such that the N electrode layer and the P electrode layer correspond to and are stacked on the first metallic layer and the second metallic layer, and then bonding the N electrode layer onto the first metallic layer and bonding the P electrode layer onto the second metallic layer by means of the ultra-sonic welding technology.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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US10/966,537 US20060081859A1 (en) | 2004-10-15 | 2004-10-15 | Light emitting semiconductor bonding structure and method of manufacturing the same |
US11/380,209 US7374958B2 (en) | 2004-10-15 | 2006-04-26 | Light emitting semiconductor bonding structure and method of manufacturing the same |
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KR20150100350A (en) | 2014-02-25 | 2015-09-02 | 한화테크윈 주식회사 | Data transfer failure recovery system and method thereof |
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US8294166B2 (en) | 2006-12-11 | 2012-10-23 | The Regents Of The University Of California | Transparent light emitting diodes |
US11592166B2 (en) | 2020-05-12 | 2023-02-28 | Feit Electric Company, Inc. | Light emitting device having improved illumination and manufacturing flexibility |
US11876042B2 (en) | 2020-08-03 | 2024-01-16 | Feit Electric Company, Inc. | Omnidirectional flexible light emitting device |
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US6900474B2 (en) * | 2002-12-20 | 2005-05-31 | Lumileds Lighting U.S., Llc | Light emitting devices with compact active regions |
US7002185B2 (en) * | 2002-05-21 | 2006-02-21 | Rohm Co., Ltd. | Semiconductor device using semiconductor chip |
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US6791119B2 (en) * | 2001-02-01 | 2004-09-14 | Cree, Inc. | Light emitting diodes including modifications for light extraction |
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US7002185B2 (en) * | 2002-05-21 | 2006-02-21 | Rohm Co., Ltd. | Semiconductor device using semiconductor chip |
US6900474B2 (en) * | 2002-12-20 | 2005-05-31 | Lumileds Lighting U.S., Llc | Light emitting devices with compact active regions |
Cited By (1)
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KR20150100350A (en) | 2014-02-25 | 2015-09-02 | 한화테크윈 주식회사 | Data transfer failure recovery system and method thereof |
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US7374958B2 (en) | 2008-05-20 |
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