US20020027699A1 - Light modulator on a semiconductor substrate - Google Patents

Light modulator on a semiconductor substrate Download PDF

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Publication number
US20020027699A1
US20020027699A1 US09/792,615 US79261501A US2002027699A1 US 20020027699 A1 US20020027699 A1 US 20020027699A1 US 79261501 A US79261501 A US 79261501A US 2002027699 A1 US2002027699 A1 US 2002027699A1
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US
United States
Prior art keywords
light
modulating
electrodes
modulating device
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US09/792,615
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English (en)
Inventor
Timothy Wilkinson
William Crossland
Kim Tan
Edward Pratt
Robert Mears
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Thomas Swan and Co Ltd
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Thomas Swan and Co Ltd
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Filing date
Publication date
Application filed by Thomas Swan and Co Ltd filed Critical Thomas Swan and Co Ltd
Assigned to THOMAS SWAN & COMPANY, LTD. reassignment THOMAS SWAN & COMPANY, LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CROSSLAND, WILLIAM ALDEN, MEARS, ROBERT, WILKINSON, TIMOTHY DAVID, PRATT, EDWARD MARTIN, TAN, KIM LEONG
Publication of US20020027699A1 publication Critical patent/US20020027699A1/en
Abandoned legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2222/00—Light sources or light beam properties
    • G03H2222/10—Spectral composition
    • G03H2222/16—Infra Red [IR]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2225/00—Active addressable light modulator
    • G03H2225/20—Nature, e.g. e-beam addressed
    • G03H2225/22—Electrically addressed SLM [EA-SLM]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2225/00—Active addressable light modulator
    • G03H2225/30—Modulation
    • G03H2225/32—Phase only

Definitions

  • Light Modulator on a Semiconductor Substrate This invention relates to a device that can modulate the phase of light and that can be integrated with silicon VLSI (Very Large Scale Integrated) circuits for the transmission of digital information from them.
  • VLSI Very Large Scale Integrated
  • Such integration is important because it enables ‘smart pixels’ to be fabricated in silicon; a smart pixel is an area on silicon with electronic functionality that can communicate with other such areas optically as well as electrically.
  • Optical communication can be superior to electrical communication over large distances, so many types of large electronic systems will use electronic modules globally connected via optics.
  • Light modulators can be based on a silicon substrate. They often use aluminium layers as electrodes for the liquid crystal overlaid on them, these layers also functioning as mirrors [Collings et al., Applied Optics 28, pp. 4740-4747, 1989].
  • the modulators may be designed to modulate the intensity or phase of light. These devices are used in reflective mode and rely on a uniform aluminium mirror for successful operation. After fabrication, the silicon often needs to undergo a planarisation process to improve the device operation [O'Hara et al., “Post-processing using microfabrication techniques to improve the optical performance of liquid crystal over silicon backplane spatial light modulators”, Proceedings of the SPIE, Vol. 2641, pp. 129 -139, 1995]. Planarisation might be required for two reasons:
  • transmissive modes as a class is that they have hitherto not allowed the use of active backplanes, that is to say, control circuitry associated with each pixel.
  • US 5182665 describes only a pair of electrodes switching the entire grating on or off.
  • Active-backplane arrangements as explained in Collings et al., can be very fast and compact and are successfully used with reflective SLMs, but the standard CMOS or NMOS processes cannot be combined with transmissive SLMs because of the metallisation used for the transistors. It is an aim of the present invention to take advantage of active-backplane technology without abandoning the double-pass SLM configuration.
  • a light-modulating device comprising a semiconductor substrate, a layer of light-modulating material on a first part of the substrate, and electrodes for addressing the light-modulating layer; in which drive circuitry for addressing the light-modulating layer via the electrodes is provided in a second part of the semiconductor substrate and the electrodes are made of a material, such as a semiconductor material, transparent to the wavelength of the light used.
  • the electrodes on the side of the light-modulating layer adjacent to the subtrate may be constituted by diffused regions in the semiconductor substrate, or by polycrystalline layers formed on the substrate, which for silicon are transparent to infra-red wavelengths above 1200 nm.
  • Such materials fit in easily with the conventional silicon processes, and indeed the invention also relates to methods for making such structures in which the electrodes are made at the same time as a component of the drive circuitry.
  • materials such as ITO can be used.
  • the double-pass configuration is used in which a mirror is provided on the side of the modulating layer opposite the semiconductor substrate, usually with a quarter-wave plate on the mirror.
  • the modulating layer can be a ferroelectric liquid crystal or some other light-modulating material and the semiconductor is most conveniently silicon.
  • Light in the common telecommunications wavelength region (1.3 ⁇ m to 1.55 ⁇ m) will pass through the light-modulating material and silicon substrate, so that the device can operate in a transmissive mode.
  • some property of the light e.g. phase
  • the electrode can be used to alter the potential applied to the material of the light-modulating layer, thus controlling the modulation of the property of the light.
  • Circuitry that performs operations, such as applying a drive voltage to the substrate electrode, and the control of the modulator, is then integrated on the silicon substrate, beside the modulator. Such devices are commonly known as smart pixels.
  • the invention can be applied to linear (one-dimensional) arrays of pixels, where circuitry can be placed outside the pixel area.
  • problem 1 indicated above does not exist, enabling high quality linear devices to be made.
  • problem 1 indicated above also does not exist. In both these cases there are major advantages in operating liquid-crystal (or other integrated) modulators in this manner.
  • a further advantage of the invention occurs when an array of reflective pixels is required, but it is also needed to place an optical component (such as a fixed wave plate) directly next to the mirror. Since such a waveplate will normally be insulating in a conventional silicon-backplane spatial light modulator, optically transparent conducting pixels must be defined on the top surface of the waveplate and connected by vias to the underlying circuitry. This is difficult and expensive, but using the invention it can be avoided, e.g. by placing a waveplate on the front glass of the liquid-crystal cell and depositing a high-quality continuous mirror on its outside surface, with the diffused-electrode side of the modulator facing the incoming light.
  • an optical component such as a fixed wave plate
  • the liquid crystal can be a single two-state or two-level (i.e. “black” and “white”) modulator.
  • two-level phase modulators used to display a phase hologram have two main disadvantages. Firstly, they operate with an inherent inverse symmetry that is a problem in holographically routed crossbar systems, as only half of the replay plane may be used for switching purposes and the other half is wasted. Secondly, there is a loss introduced by such holograms, as the maximum efficiency of a two-level phase system is only 41%.
  • the inverse symmetry can be removed from the replay plane, allowing the whole replay plane to be used for switching purposes. Also, the loss introduced into a system using e.g. four-level holograms is less than in two-level systems, the maximum efficiency of such a hologram being 81%. The disadvantages of a two-level system are thus removed by using three or more levels of modulation.
  • phase modulation requires phase shifts of up to 270° being introduced by the modulator.
  • a material such as a ferroelectric liquid crystal (PLC) in a modulator requires a material with a tilt angle of at least 67.5°; such materials (e.g. PLC 10817) exist, but their electro-optic effects are difficult to incorporate in a device.
  • standard FLCs with their lower tilt angle doubled by the double-pass configuration, offer a good working compromise. Distorted-helix FLCs are particularly suitable.
  • FIG. 1 shows a very schematic plan view of a silicon substrate 1 with a substrate diffusion 2 ;
  • FIG. 2 shows a side view of an embodiment of the invention incorporating the substrate described in FIG. 1;
  • FIG. 3 shows a silicon design layout using a two-micron process
  • FIG. 4 shows a section through a reflective modulating element representing a second embodiment of the invention, which could be used to provide increased modulation levels as described above;
  • FIGS. 5A, B and C show variations of the basic scheme of FIG. 4.
  • a silicon substrate 1 contains a substrate diffusion 2 that acts as an electrode.
  • a liquid-crystal layer 5 is contained between the surface of a glass plate 3 and the silicon substrate 1 .
  • the glass plate 3 has an ITO electrode on its surface facing the liquid crystal, and potential difference is applied to the liquid crystal 5 by way of the transparent electrode 4 and the substrate diffusion 2 in order to modulate the state of the liquid crystal.
  • the transparent electrode can be a common electrode.
  • FIG. 3 is an example layout that could be used as the basis for a one-dimensional light-modulating device, when used in a cell such as described, for example, in FIG. 2.
  • FIG. 3 The end part of a substrate diffusion 6 , of which only the left-hand end is visible in FIG. 3, is connected to some control and drive circuitry 7 in the same silicon substrate.
  • the voltage applied to the diffusion 6 is controlled by the control and drive circuitry 7 .
  • FIG. 3 shows only one, arranged adjacently to form a row of pixels constituting a first, transparent, area of the substrate. (The right-angle bend in the connecting line between the diffusion 6 and the circuit 7 would not be present in practice and is purely for ease of representation).
  • the substrate diffusion 6 might have dimensions 20 ⁇ m ⁇ 6 mm, while the associated circuit 7 might be 20 ⁇ m ⁇ 10 ⁇ m, arranged in line with its diffusion 6 .
  • the circuits 7 with their opaque interconnects, collectively form a second area, generally considerably smaller than the first. Light is directed at the pixels of the first area.
  • Transmissive optical modulators that can provide several distinct levels, giving analogue modulation of light, are important as they can be used in many optical systems e.g. optical correlators, displays and optical interconnects.
  • a silicon substrate 14 with substrate diffusions (not shown) and control circuits (likewise) is attached to a cell containing a material, here a liquid crystal 15 , whose optical properties, for instance its reflective, absorptive or transmissive properties, change with applied voltage as before.
  • a transparent electrode 16 is attached to the cell containing the material 15 and to a glass or plastic quarter-wavelength waveplate 17 .
  • the plate 17 acts simultaneously as the rear plate for the LC cell and as a quarter-wave plate, but two separate components could be used.
  • the waveplate 17 is placed against a mirror 18 . Infra-red light enters through the silicon substrate and diffusion 14 and continues through the modulating material 15 and transparent electrode 16 .
  • the complete cell encompassing the parts 14 to 18 , may thus act as a light modulator.
  • FIGS. 5A, 5B and 5 C show various ways of incorporating the quarter-wave plate between the LC layer and the mirror.
  • a transparent plate is used, constituting one of the plates of the liquid-crystal cell. It can be of glass, or of quartz or mica. However, this plate has to be 2-3 mm thick to give the quarter wave retardation for IR wavelengths, which gives rise to undesirable diffraction effects.
  • FIG. 5B therefore a thin (100 ⁇ m) glass plate 20 is used, the ⁇ fraction ( ⁇ /4) ⁇ plate being formed by a nematic liquid-crystal layer 17 a .
  • FIG. 5C a fused reactive monomer layer 17 b on glass is used. Mechanical support is afforded by a rear glass plate 22 . In all these embodiments the drive circuits in the silicon are not shown.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
US09/792,615 1998-02-02 2001-02-23 Light modulator on a semiconductor substrate Abandoned US20020027699A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9802219.7 1998-02-02
GBGB9802219.7A GB9802219D0 (en) 1998-02-02 1998-02-02 Light modulator on a semiconductor substrate

Publications (1)

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US20020027699A1 true US20020027699A1 (en) 2002-03-07

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US (1) US20020027699A1 (de)
EP (1) EP1053501B1 (de)
AU (1) AU2292699A (de)
DE (1) DE69909750D1 (de)
GB (1) GB9802219D0 (de)
WO (1) WO1999039240A1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030222315A1 (en) * 2002-04-24 2003-12-04 E Ink Corporation Backplanes for display applications, and components for use therein
US20040012016A1 (en) * 2000-10-10 2004-01-22 Ian Underwood Optoelectronic device
US20220044100A1 (en) * 2019-07-31 2022-02-10 The Regents Of The University Of California Parallel architectures for nanophotonic computing

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0121308D0 (en) 2001-09-03 2001-10-24 Thomas Swan & Company Ltd Optical processing
GB2504970A (en) 2012-08-15 2014-02-19 Swan Thomas & Co Ltd Optical device and methods to reduce cross-talk

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8914453D0 (en) * 1989-06-23 1989-08-09 Stc Plc Spatial light modulators
US5182665A (en) * 1990-09-07 1993-01-26 Displaytech, Inc. Diffractive light modulator
GB2313920A (en) * 1996-06-07 1997-12-10 Sharp Kk Diffractive spatial light modulator and display

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040012016A1 (en) * 2000-10-10 2004-01-22 Ian Underwood Optoelectronic device
US7601942B2 (en) * 2000-10-10 2009-10-13 Microemissive Displays Limited Optoelectronic device having an array of smart pixels
US20030222315A1 (en) * 2002-04-24 2003-12-04 E Ink Corporation Backplanes for display applications, and components for use therein
US20220044100A1 (en) * 2019-07-31 2022-02-10 The Regents Of The University Of California Parallel architectures for nanophotonic computing

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Publication number Publication date
GB9802219D0 (en) 1998-04-01
EP1053501A1 (de) 2000-11-22
EP1053501B1 (de) 2003-07-23
AU2292699A (en) 1999-08-16
WO1999039240A1 (en) 1999-08-05
DE69909750D1 (de) 2003-08-28

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AS Assignment

Owner name: THOMAS SWAN & COMPANY, LTD., UNITED KINGDOM

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:WILKINSON, TIMOTHY DAVID;CROSSLAND, WILLIAM ALDEN;TAN, KIM LEONG;AND OTHERS;REEL/FRAME:012268/0967;SIGNING DATES FROM 20010731 TO 20011009

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION