US20020008247A1 - Single-control monolithic component for a composite bridge - Google Patents

Single-control monolithic component for a composite bridge Download PDF

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US20020008247A1
US20020008247A1 US09/847,653 US84765301A US2002008247A1 US 20020008247 A1 US20020008247 A1 US 20020008247A1 US 84765301 A US84765301 A US 84765301A US 2002008247 A1 US2002008247 A1 US 2002008247A1
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region
surface side
thyristor
common
cathode
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US6583496B2 (en
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Franck Galtie
Olivier Ladiray
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STMicroelectronics SA
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STMicroelectronics SA
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Assigned to STMICROELECTRONICS S.A. reassignment STMICROELECTRONICS S.A. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: GALTIE, FRANCK, LADIRAY, OLIVIER
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/0817—Thyristors only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/761—PN junctions

Definitions

  • the present invention relates to the forming of a controlled rectifying bridge, or composite bridge.
  • FIG. 1 shows the conventional diagram of a composite bridge intended for continuously supplying a load 1 .
  • This bridge is connected by terminals 2 and 3 to the A.C. power system, terminal 3 being considered as the reference terminal.
  • the anode of a diode D 1 and the cathode of a diode D 2 are connected to terminal 2 .
  • the cathode of diode D 1 and the anode of diode D 2 are connected across load 1 .
  • a thyristor Th 1 is connected by its anode to terminal 3 and by its cathode to the cathode of diode D 1 .
  • a thyristor Th 2 is connected by its cathode to terminal 3 and by its anode to the anode of diode D 2 .
  • a rectified current can be made to flow through load 1 .
  • triggerings on halfwave portions can be implemented, which is currently called a phase-angle control.
  • the bridge of FIG. 1 has many advantages as compared to the various other known controlled bridge assemblies. As compared to a bridge including two thyristors in series, it has the advantage that diodes D 1 and D 2 are used as free wheel diodes during the phases when thyristors Th 1 and Th 2 are off. As compared to a bridge with 4 diodes in series with a triac, it especially has the advantage that, when on, the voltage drop is reduced substantially by the voltage drop of a forward diode.
  • thyristors Th 1 and Th 2 are controlled by gate voltages respectively referenced to their cathodes.
  • the cathodes of thyristors Th 1 and Th 2 are not at the same potential.
  • This requires the use of relatively complex distinct control circuits, and frequently isolated control circuits, the isolation being ensured, for example, by a transformer or by optically controlled components.
  • both thyristors Th 1 and Th 2 are generally made in the form of discrete components.
  • U.S. Pat. No. 6,034,381 which is incorporated herein by reference, describes a bidirectional switch (ACS), the control electrode of which is arranged on the surface opposite to a common surface, the control voltage being referenced to this common terminal.
  • ACS bidirectional switch
  • this patent only describes a bidirectional switch with a single control terminal and two main electrodes only, and does not indicate how to form two thyristors having a common main terminal and the other terminals of which are distinct.
  • an object of the present invention is to provide a monolithic component corresponding to two thyristors connected by one of their main terminals of opposite biasing forming a surface of the component, a single control terminal enabling operation of the two thyristors being arranged on the opposite component surface at the same time as the other main terminal of each of the thyristors.
  • the present invention provides a monolithic component including two thyristors of a composite bridge connected to an A.C. voltage terminal by a common terminal corresponding to a common rear surface metallization forming an electrode of opposite biasing of each thyristor, including, in a substrate of a first conductivity type, an isolating wall separating the substrate in two portions, a first portion including on its lower surface side an anode region and on its upper surface side a cathode region, the second portion including on its lower surface side a cathode region and on its upper surface side an anode region, the isolating wall surrounding each of the components extending towards the main electrode on the side which carries no common metallization and including in this extended region an area of the second conductivity type, the two areas being connected together to a common control terminal.
  • the cathode gate region in which the cathode region of a first thyristor is included, as well as the anode region of the other thyristor, is surrounded by a ring of a first conductivity type of high doping level formed in the substrate.
  • FIG. 1 shows the circuit diagram of a composite bridge
  • FIG. 2 shows an embodiment of the two thyristors of the composite bridge in a monolithic embodiment according to the present invention.
  • FIG. 2 shows, in the form of a circuit diagram, load 1 and diodes D 1 and D 2 of FIG. 1.
  • Thyristors Th 1 and Th 2 are shown in the form of a cross-section view of a monolithic component. This component is formed from an N-type substrate divided in two portions 11 and 12 by a P-type isolating wall 13 .
  • separation wall 13 is part of respective isolating walls 14 and 15 delimiting each of the substrate portions in which are respectively formed thyristor Th 1 and thyristor Th 2 .
  • On the rear surface side is deposited a common metallization M, which forms the anode metallization of thyristor Th 1 and the cathode metallization of thyristor Th 2 .
  • Thyristor Th 1 includes, on the front surface side, a P-type region 21 in which is formed an N-type region 22 .
  • Region 22 corresponds to the cathode of thyristor Th 1 and is coated with a cathode metallization K 1 connected to the cathode terminal of diode D 1 .
  • a P+-type layer 24 is formed and, in the portions of this P+layer which are not arranged in front of cathode 22 , N-type regions 26 useful to the thyristor starting are formed.
  • a region 27 also of type P+, extending towards cathode 22 .
  • thyristor Th 1 The starting of thyristor Th 1 can occur when its anode, that is, rear surface metallization M, is positive with respect to front surface metallization K 1 and when a negative voltage with respect to the rear surface is applied on gate terminal G. Then, the junction between regions 28 and 27 is forward biased and electrons coming from region 28 are injected into region 27 . As a result, holes are injected by region P 24 towards regions 21 and 22 , which turns on thyristor Th 1 .
  • Thyristor Th 2 includes on its front surface side a P+-type region 31 , preferably formed at the same time as region 21 , which forms its anode on which is formed an anode metallization A 2 connected to the anode of diode D 2 .
  • a P+-type region 34 formed at the same time as layer 24 and a cathode layer 36 formed at the same time as region 26 of thyristor Th 1 are found.
  • isolating wall 15 extends towards the anode in a P-type region 37 in which is formed an N-type region 38 covered with a gate metallization G 2 connected to gate metallization G 1 of thyristor Th 1 and to a control terminal G.
  • thyristors Th 1 and Th 2 are arranged in distinct wells. This avoids, when one of the thyristors is switched off by a biasing inversion, for the other thyristor to be restarted by charges stored in regions neighboring the other thyristor. The starting of a lateral parasitic thyristor, which would correspond to regions P 13 , N 12 - 11 , P 21 , and N 22 is thus also avoided.
  • each of regions 21 and 31 is surrounded with a heavily-doped N-type channel stop region, respectively 29 and 39 .
  • this circuit has at least some of the following advantages:
  • control by a single circuit which may be a microprocessor, the control circuit being referenced to the ground;
  • diodes D 1 and D 2 may be integrated in the same component as the two previously-described controlled thyristors, these diodes being formed in isolated wells.
  • the present invention will, for example, apply in the electro-domestic field to the control of electromagnets or to the control of universal motors.
  • the use of a composite bridge of the previously-described type is advantageous due to the fact that diodes D 1 and D 2 can operate in free wheel on an inductive load when one or the other of the thyristors is off.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Thyristors (AREA)

Abstract

A monolithic component including two thyristors of a composite bridge connected to an A.C. voltage terminal by a common terminal corresponding to a common rear surface metallization forming an electrode of opposite biasing of each thyristor. An isolating wall separates a substrate in two portions, a first portion includes on its lower surface side an anode region and on its upper surface side a cathode region, the second portion includes on its lower surface side a cathode region and on its upper surface side an anode region. The isolating wall surrounding each of the components extending towards the main electrode on the side which carries no common metallization and including in this extended region an N-type area, the two areas being connected together to a common control terminal.

Description

    BACKGROUND OF THE INVENTION
  • 1. Field of the Invention [0001]
  • The present invention relates to the forming of a controlled rectifying bridge, or composite bridge. [0002]
  • 2. Discussion of the Related Art [0003]
  • FIG. 1 shows the conventional diagram of a composite bridge intended for continuously supplying a [0004] load 1. This bridge is connected by terminals 2 and 3 to the A.C. power system, terminal 3 being considered as the reference terminal. The anode of a diode D1 and the cathode of a diode D2 are connected to terminal 2. The cathode of diode D1 and the anode of diode D2 are connected across load 1. A thyristor Th1 is connected by its anode to terminal 3 and by its cathode to the cathode of diode D1. A thyristor Th2 is connected by its cathode to terminal 3 and by its anode to the anode of diode D2. With such a bridge, a rectified current can be made to flow through load 1. Further, triggerings on halfwave portions can be implemented, which is currently called a phase-angle control.
  • The bridge of FIG. 1 has many advantages as compared to the various other known controlled bridge assemblies. As compared to a bridge including two thyristors in series, it has the advantage that diodes D[0005] 1 and D2 are used as free wheel diodes during the phases when thyristors Th1 and Th2 are off. As compared to a bridge with 4 diodes in series with a triac, it especially has the advantage that, when on, the voltage drop is reduced substantially by the voltage drop of a forward diode.
  • Despite these advantages, the assembly of FIG. 1 is seldom used, because of a thyristor control problem. Indeed, thyristors Th[0006] 1 and Th2 are controlled by gate voltages respectively referenced to their cathodes. Now, the cathodes of thyristors Th1 and Th2 are not at the same potential. This requires the use of relatively complex distinct control circuits, and frequently isolated control circuits, the isolation being ensured, for example, by a transformer or by optically controlled components. Further, in known circuits, both thyristors Th1 and Th2 are generally made in the form of discrete components.
  • U.S. Pat. No. 5,365,086, which is incorporated herein by reference, describes a thyristor, the cathode of which corresponds to the rear surface of the component coated with a single metallization connected to a reference terminal, and the control terminal of which is taken on the opposite side and is referenced to the cathode. It could be imagined to use this thyristor to replace thyristor Th[0007] 2 of FIG. 1. However, this patent does not suggest how to associate a thyristor to a thyristor of opposite biasing.
  • U.S. Pat. No. 6,034,381, which is incorporated herein by reference, describes a bidirectional switch (ACS), the control electrode of which is arranged on the surface opposite to a common surface, the control voltage being referenced to this common terminal. However, this patent only describes a bidirectional switch with a single control terminal and two main electrodes only, and does not indicate how to form two thyristors having a common main terminal and the other terminals of which are distinct. [0008]
    • SUMMARY OF THE INVENTION
  • Thus, an object of the present invention is to provide a monolithic component corresponding to two thyristors connected by one of their main terminals of opposite biasing forming a surface of the component, a single control terminal enabling operation of the two thyristors being arranged on the opposite component surface at the same time as the other main terminal of each of the thyristors. [0009]
  • To achieve this and other objects, the present invention provides a monolithic component including two thyristors of a composite bridge connected to an A.C. voltage terminal by a common terminal corresponding to a common rear surface metallization forming an electrode of opposite biasing of each thyristor, including, in a substrate of a first conductivity type, an isolating wall separating the substrate in two portions, a first portion including on its lower surface side an anode region and on its upper surface side a cathode region, the second portion including on its lower surface side a cathode region and on its upper surface side an anode region, the isolating wall surrounding each of the components extending towards the main electrode on the side which carries no common metallization and including in this extended region an area of the second conductivity type, the two areas being connected together to a common control terminal. [0010]
  • According to an embodiment of the present invention, on the upper surface side, the cathode gate region in which the cathode region of a first thyristor is included, as well as the anode region of the other thyristor, is surrounded by a ring of a first conductivity type of high doping level formed in the substrate. [0011]
  • The foregoing objects, features and advantages of the present invention, will be discussed in detail in the following non-limiting description of specific embodiments in connection with the accompanying drawings.[0012]
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 shows the circuit diagram of a composite bridge; and [0013]
  • FIG. 2 shows an embodiment of the two thyristors of the composite bridge in a monolithic embodiment according to the present invention.[0014]
    • DETAILED DESCRIPTION
  • FIG. 2 shows, in the form of a circuit diagram, [0015] load 1 and diodes D1 and D2 of FIG. 1. Thyristors Th1 and Th2 are shown in the form of a cross-section view of a monolithic component. This component is formed from an N-type substrate divided in two portions 11 and 12 by a P-type isolating wall 13. In the embodiment shown, separation wall 13 is part of respective isolating walls 14 and 15 delimiting each of the substrate portions in which are respectively formed thyristor Th1 and thyristor Th2. On the rear surface side is deposited a common metallization M, which forms the anode metallization of thyristor Th1 and the cathode metallization of thyristor Th2.
  • Thyristor Th[0016] 1 includes, on the front surface side, a P-type region 21 in which is formed an N-type region 22. Region 22 corresponds to the cathode of thyristor Th1 and is coated with a cathode metallization K1 connected to the cathode terminal of diode D1. On the rear surface side, a P+-type layer 24 is formed and, in the portions of this P+layer which are not arranged in front of cathode 22, N-type regions 26 useful to the thyristor starting are formed. On the side of the upper portion of isolating wall 14 is formed a region 27, also of type P+, extending towards cathode 22. In this region 27 is formed an N-type region 28 coated with a metallization G1 corresponding to the gate of thyristor Th1.
  • The starting of thyristor Th[0017] 1 can occur when its anode, that is, rear surface metallization M, is positive with respect to front surface metallization K1 and when a negative voltage with respect to the rear surface is applied on gate terminal G. Then, the junction between regions 28 and 27 is forward biased and electrons coming from region 28 are injected into region 27. As a result, holes are injected by region P24 towards regions 21 and 22, which turns on thyristor Th1.
  • Thyristor Th[0018] 2 includes on its front surface side a P+-type region 31, preferably formed at the same time as region 21, which forms its anode on which is formed an anode metallization A2 connected to the anode of diode D2. On the rear surface side, a P+-type region 34 formed at the same time as layer 24 and a cathode layer 36 formed at the same time as region 26 of thyristor Th1 are found. On the front surface side, isolating wall 15 extends towards the anode in a P-type region 37 in which is formed an N-type region 38 covered with a gate metallization G2 connected to gate metallization G1 of thyristor Th1 and to a control terminal G. When thyristor Th2 is properly biased, if a gate pulse is applied, the junction between layer 34 and substrate 12 unlocks and thyristor Th2 turns on.
  • It should be noted that thyristors Th[0019] 1 and Th2 are arranged in distinct wells. This avoids, when one of the thyristors is switched off by a biasing inversion, for the other thyristor to be restarted by charges stored in regions neighboring the other thyristor. The starting of a lateral parasitic thyristor, which would correspond to regions P13, N12-11, P21, and N22 is thus also avoided.
  • Further, to avoid creating leakage currents and untimely startings of the thyristors, each of [0020] regions 21 and 31 is surrounded with a heavily-doped N-type channel stop region, respectively 29 and 39.
  • As compared to the various known components, to form the controlled elements of a composite bridge, this circuit has at least some of the following advantages: [0021]
  • implementation in the form of a monolithic component; [0022]
  • control by a single circuit, which may be a microprocessor, the control circuit being referenced to the ground; [0023]
  • isolation between the two thyristors Th[0024] 1 and Th2, whereby parasitic startings are avoided;
  • good sensitivity. [0025]
  • Of course, the present invention is likely to have various alterations, modifications, and improvements which will readily occur to those skilled in the art who will know how to size the various layers according to the provided currents. Further, it should be noted that diodes D[0026] 1 and D2 may be integrated in the same component as the two previously-described controlled thyristors, these diodes being formed in isolated wells.
  • The present invention will, for example, apply in the electro-domestic field to the control of electromagnets or to the control of universal motors. In both cases, the use of a composite bridge of the previously-described type is advantageous due to the fact that diodes D[0027] 1 and D2 can operate in free wheel on an inductive load when one or the other of the thyristors is off.
  • Such alterations, modifications, and improvements are intended to be part of this disclosure, and are intended to be within the spirit and the scope of the present invention. Accordingly, the foregoing description is by way of example only and is not intended to be limiting. The present invention is limited only as defined in the following claims and the equivalents thereto.[0028]

Claims (2)

What is claimed is:
1. A monolithic component including two thyristors of a composite bridge connected to an A.C. voltage terminal by a common terminal corresponding to a common rear surface metallization forming an electrode of opposite biasing of each thyristor, including, in a substrate of a first conductivity type, an isolating wall separating the substrate in two portions, a first portion including on its lower surface side an anode region and on its upper surface side a cathode region, the second portion including on its lower surface side a cathode region and on its upper surface side an anode region, the isolating wall surrounding each of the components extending towards the main electrode on the side which carries no common metallization and including in this extended region an area of the second conductivity type, the two areas being connected together to a common control terminal.
2. The component of claim 1, wherein on the upper surface side, the cathode gate region in which the cathode region of a first thyristor is included, as well as the anode region of the other thyristor, is surrounded by a ring of a first conductivity type of high doping level formed in the substrate.
US09/847,653 2000-05-05 2001-05-02 Single-control monolithic component for a composite bridge Expired - Lifetime US6583496B2 (en)

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FR00/05804 2000-05-05
FR0005804A FR2808621B1 (en) 2000-05-05 2000-05-05 SINGLE CONTROL MONOLITHIC COMPONENT FOR A MIXED BRIDGE

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US20160027907A1 (en) * 2014-07-24 2016-01-28 Stmicroelectronics (Tours) Sas Bidirectional switch
CN105633129A (en) * 2016-03-14 2016-06-01 江苏捷捷微电子股份有限公司 Thyristor chip with seven-layer p-n junction isolation structure and preparation method of thyristor chip
CN107634096A (en) * 2017-09-27 2018-01-26 安徽富芯微电子有限公司 A kind of controllable silicon and its manufacture method with channel cutoff ring
CN112071899A (en) * 2020-11-10 2020-12-11 浙江里阳半导体有限公司 Semiconductor structure and manufacturing method thereof
US11462624B2 (en) 2018-01-05 2022-10-04 Stmicroelectronics (Tours) Sas Semiconductor triode

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US7907381B2 (en) * 2008-03-12 2011-03-15 Zarlink Semiconductor (Us) Inc. Protection circuit for a subscriber line interface circuit
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US8664690B1 (en) * 2012-11-15 2014-03-04 Macronix International Co., Ltd. Bi-directional triode thyristor for high voltage electrostatic discharge protection
FR3039014B1 (en) * 2015-07-13 2019-06-14 Stmicroelectronics (Tours) Sas TELEPHONE LINE PROTECTION AGAINST OVERVOLTAGES
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JP6678549B2 (en) * 2016-09-27 2020-04-08 株式会社 日立パワーデバイス Semiconductor device, method of manufacturing the same, and power conversion system
KR102383935B1 (en) * 2017-03-07 2022-04-08 리텔퓨즈 세미컨덕터 (우시) 씨오., 엘티디. Hybrid Overvoltage Protection Devices and Assemblies

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US20160027907A1 (en) * 2014-07-24 2016-01-28 Stmicroelectronics (Tours) Sas Bidirectional switch
US9722061B2 (en) * 2014-07-24 2017-08-01 Stmicroelectronics (Tours) Sas Bidirectional switch
CN105633129A (en) * 2016-03-14 2016-06-01 江苏捷捷微电子股份有限公司 Thyristor chip with seven-layer p-n junction isolation structure and preparation method of thyristor chip
CN107634096A (en) * 2017-09-27 2018-01-26 安徽富芯微电子有限公司 A kind of controllable silicon and its manufacture method with channel cutoff ring
US11462624B2 (en) 2018-01-05 2022-10-04 Stmicroelectronics (Tours) Sas Semiconductor triode
CN112071899A (en) * 2020-11-10 2020-12-11 浙江里阳半导体有限公司 Semiconductor structure and manufacturing method thereof

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FR2808621A1 (en) 2001-11-09
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EP1152467A1 (en) 2001-11-07

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