US20010006213A1 - "Specimen-carrier accessory device for the stereoscopic analysis by scanning electron microscope" - Google Patents
"Specimen-carrier accessory device for the stereoscopic analysis by scanning electron microscope" Download PDFInfo
- Publication number
- US20010006213A1 US20010006213A1 US09/742,360 US74236000A US2001006213A1 US 20010006213 A1 US20010006213 A1 US 20010006213A1 US 74236000 A US74236000 A US 74236000A US 2001006213 A1 US2001006213 A1 US 2001006213A1
- Authority
- US
- United States
- Prior art keywords
- specimen
- axis
- accessory device
- support
- movable member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The device is connectable to a specimen-carrier table of non-eucentric type for the acquisition, by means of a scanning electron microscopic, of images taken in an angularly offset manner for stereoscopic examination of a specimen. A specimen-carrier table comprises a support member which is translatable along a first, vertical axis, as well as along a second and a third horizontal axis of which one is parallel and the other orthogonal to the interocular direction of the observer, and is turnable about its own axis as well as about the second axis. The accessory device comprises a support structure of metal material having a connection portion which allows fixing to the Movable member of the specimen-carrier table, as well as a support portion having a support surface which, when the said structure is coupled to the movable member of the table, lies in a plane parallel to the said axis of rotation, in such a way that after rotation of the movable member of the table through 90° about the said second axis, a subsequent rotation of the said movable member about its axis is able to cause the said surface to turn about the said third axis.
Description
- The present invention relates to an accessory device connectable to a specimen-carrier table of the non-eucentric type for the acquisition, by means of a scanning electron microscope, of images taken in an angularly offset manner for stereoscopic examination of a specimen.
- More specifically, the subject of the invention is an accessory device for a specimen-carrier table of the type defined in the introductory part of the annexed claim1.
- Stereoscopic analysis by scanning electron microscope makes it possible to effect measurement in three dimensions and to detect, for example, the roughness parameters of irregular surf aces with very high magnification.
- Stereoscopic analysis permits observation of a specimen with a perspective view, and in anaglyph (with three-dimensional vision by means of the use of suitable glasses). This latter possibility allows an immediate “reading” of the surface morphology of the specimen, making it possible to overcome the difficulties which often arise in the distinction between ridges and valleys of the surface of specimens under analysis.
- In general, as is known, the process of stereoscopic analysis involves the acquisition of two images of the specimen, obtained by turning the specimen about a horizontal axis essentially orthogonal to the interocular line of the observer. These images are then superimposed. By means of a processor for the treatment and presentation of images, provided with suitable software, the anaglyph is presented on a display. The processor further allows a calculation of the microroughness parameters.
- For stereoscopic analysis with scanning electron microscope a specimen-carrier table of eucentric type is sometimes utilised, which allows six degrees of freedom in the movement and which is formed in such a way as to maintain the position of the point of impact between the electron beam and the specimen essentially unaltered, even upon variation of the spatial co-ordinates of this latter. This property, and the possibility of turning the specimen, by rotation about the Y axis, of obtaining three dimensional stereoscopic analysis is particularly easy and rapid in that the two images detected with different angles of inclination of the electron beam do not require any movements along the X, Y and Z axes for their superimposition.
- Specimen-carrier tables of eucentric type are however extremely expensive. For this reason scanning electron microscopes are very often provided with a non-eucentric table, which is rather more economical.
- Specimen-carrier tables of non-eucentric type do not allow turning of the specimen about the Y axis, which operation is necessary for taking stereoscopic images. Nor is it possible to maintain unaltered the position of the point of incidence of the electron beam on the specimen upon variation of the spatial co-ordinates of this latter.
- In view of the above, stereocscopic analysis with a specimen-carrier table of non-eucentric type is extremely laborious. it requires electronic rotation of the image through 90°, which then makes it possible to rotate the specimen in a virtual manner about the Y axis by acting on the rotation command about the X axis. The exchange of movements about the X and Y axes renders this manoeuvre unnatural and therefore difficult, in particular when working at very high magnifications.
- The object of the present invention is to provide a device which allows stereoscopic images to be taken in an easy manner using a non-eucentric specimen-carrier table.
- This object is achieved according to the invention with an accessory device the salient characteristics of which are defined in the annexed claim1.
- Further characteristics and advantages of the invention will become apparent from the detailed description which follows, given purely by way of non-limitative example, with reference to the attached drawings, in which;
- FIG. 1 is an extremely schematic representation, in perspective view, of a non-eucentric specimen-carrier table;
- FIGS. 2 and 3 are perspective views of an accessory device according to the invention, and
- FIG. 4 is a perspective view which shows a device according to the invention coupled to the movable member of a non-eucentric specimen-carrier table in conditions of use for taking stereoscopic images.
- In FIG. 1 the reference numeral10 generally indicates a non-eucentric specimen-carrier table. In a manner known per se the table 10 comprises a
stationary support structure 12 and a support member 14 which is movable with respect to it. In the exemplary embodiment illustrated the support member 14 has a cylindrical socket 16 in which a cylindrical stem 18 projecting from adisc 20 can be engaged and fixed, the disc having on the opposite side acylindrical block 22 intended to support a specimen. - In a manner known per se, by means of actuator devices not illustrated, the support member14 is translatable along three, mutually orthogonal, co-ordinate axes indicated X, Y and Z. This member is, moreover, rotatable about its own axis, which in the rest position illustrated in FIG. 1 coincides with the 2 axis.
- The support member14 is further turnable about the horizontal X axis which is conventionally parallel to the interocular line of the observer.
- In FIGS.2 to 4 the reference numeral 1 generally indicates an accessory device according to the invention. This device, in the exemplary embodiment illustrated, comprises a small, essentially
rectangular metal plate 2 from a main face of which extends a cylindrical boas 3 which can be introduced into and fixed in the socket 16 of the movable support member 14 of the specimen-carrier table. The accessory device 1 further includes a substantially L-shaped support bracket 4 having onearm 4 a fixed to thesmall plate 2 in an adjustable position, To this end theplate 2 is provided with a slit or slot 5 along which the bracket 4 is adjustable and fixable by means of ascrew member 6 and an associated clamping nut 7. - The bracket4 has a
second arm 4 b which extends orthogonally with respect to thefirst arm 4 a and therefore to theplate 2. A hole 8 is formed in thearm 4 b of the bracket in which hole is engageable a threaded shank 9 which extends from the lower base of a preferablycylindrical block 11 intended to be utilised for supporting a specimen in the performance of the stereoscopic analysis. - The accessory device1 can possibly be equipped with a plurality of specimen-
carrier blocks 11 having different heights and interchangeable with one another like the two blocks illustrated in FIG. 2. - A
nut 13 screwed on the threaded shank 9 of theblock 11 projecting beneath thearm 4 b of the bracket 4 makes it possible stably to fix theselected block 11 to the bracket 4, moreover establishing electrical continuity of theblock 11 with theentire accessory device 11 as is necessary for analysis by scanning electron microscopes. - For the acquisition of images taken in an angularly offset manner for stereoscopic analysis of a specimen the movable support member14 of the specimen-carrier table 10 is preliminarily subjected to a rotation through 90°about the X axis in such a way as to position it as seen in FIG. 4. The above-described accessory device of the invention is then coupled to this member in such a way that the
block 11 of this accessory device has its upper base or face lying in a plane parallel to the X, Y plane. The positioning of the bracket 4 and the choice of which specimen-carrier block 11 to use must be made in such a way that the surface of the specimen to be examined, disposed on theblock 11, is essentially coplanar with the X, Y plane. - Having positioned the accessory device1 in this way, as shown in FIG. 4, with the usual command devices (not shown) the movable support member 14 of the specimen-carrier table 10 is caused to rotate about its own axis, and the surface of the specimen under examination turns about the Y axis without becoming spaced from this axis.
- Images can then be taken in an angularly offset manner in an extremely simple and rapid manner for subsequent stereoscopic analysis of the surface of the specimen.
- The accessory device according to the invention therefore makes it possible to obviate the disadvantages indicated in the introduction to the present description.
- Naturally, the principle of the invention remaining the same, the embodiments and details of construction can be widely varied with respect to what has been described and illustrated purely by way of non-limitative example, the invention extending to all embodiments which achieve the same effect by these innovative concepts.
Claims (5)
1. A specimen-carrier accessory device connectable to a specimen-carrier table of non-eucentric type for the acquisition, by means of a scanning electron microscope, of images taken in an angularly offset manner for stereoscopic examination of a specimen;
the specimen-carrier table comprising a support member which is translatable along a first, vertical, axis as well as along a second and a third horizontal axis, of which one is parallel and the other orthogonal to the interocular direction of the observer, and is rotatable about its own axis as well as about the said second axis;
the accessory device comprising a support structure of metal material having a connection portion which allows fixing to the movable member of the said specimen-carrier table, and a support portion having a support surface which, when the said structure is coupled to the movable member of the table, extends in a plane parallel to the said axis of rotation in such a way that, after rotation of the movable member of the table through 90°about the said second axis, a subsequent rotation of the said movable member about its own axis is able to cause the said surface to turn about the said third axis.
2. An accessory device according to , wherein the said structure comprises
claim 1
a plate having a projection fixable in the said movable support member of the specimen-carrier table, and
a substantially L-shaped support bracket one arm of which is fixed to the said plate and the other arm of which extends orthogonally of the said first arm and to the said plate.
3. An accessory device according to , in which the said bracket is fixable to the plate in an adjustable position.
claim 2
4. An accessory device according to , in which the said second arm of the support bracket is able to receive a block, for example of cylindrical shape, intended to support a specimen.
claim 2
5. An accessory device according to , equipped with a plurality of interchangeable specimen-carrier blocks having different heights.
claim 4
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT1999TO000226U IT247963Y1 (en) | 1999-12-23 | 1999-12-23 | ACCESSORY SAMPLE HOLDER DEVICE, FOR STEREOSCOPIC ANALYSIS. ELECTRONIC SCANNING MICROSCOPE. |
ITTO990226U | 1999-12-23 | ||
ITTO99U000226 | 1999-12-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
US20010006213A1 true US20010006213A1 (en) | 2001-07-05 |
US6639224B2 US6639224B2 (en) | 2003-10-28 |
Family
ID=11417666
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/742,360 Expired - Fee Related US6639224B2 (en) | 1999-12-23 | 2000-12-22 | Specimen-carrier accessory device for the stereoscopic analysis by a scanning electron microscope |
Country Status (3)
Country | Link |
---|---|
US (1) | US6639224B2 (en) |
EP (1) | EP1111650A3 (en) |
IT (1) | IT247963Y1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2908235A1 (en) * | 2006-11-07 | 2008-05-09 | Inst Nat Sciences Appliq | Sample e.g. live bio-sample, tomography equipment, has detection unit to detect signal representative of interaction between sample and electron beam, and storing unit to store association between value of signal and beam position |
US20120074320A1 (en) * | 2010-09-29 | 2012-03-29 | Josef Biberger | Particle beam device having a sample holder |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1789019B1 (en) * | 1968-09-23 | 1972-04-27 | Siemens Ag | METHOD OF GENERATING A STEREO IMAGE BY USING ELECTRON BEAM MICROSCOPY |
US4170737A (en) * | 1978-07-06 | 1979-10-09 | Spetsialnoe Konstruktorskoe Bjuro Biologicheskogo Priborotroenia Akademii Nauk SSSR | Top-entry transmission electron microscope |
JPS63307653A (en) * | 1987-06-09 | 1988-12-15 | Toshiba Corp | Electron microscope and its stereoscopic viewing method |
JP3133307B2 (en) * | 1989-10-13 | 2001-02-05 | 株式会社日立製作所 | electronic microscope |
-
1999
- 1999-12-23 IT IT1999TO000226U patent/IT247963Y1/en active
-
2000
- 2000-12-18 EP EP00127731A patent/EP1111650A3/en not_active Withdrawn
- 2000-12-22 US US09/742,360 patent/US6639224B2/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2908235A1 (en) * | 2006-11-07 | 2008-05-09 | Inst Nat Sciences Appliq | Sample e.g. live bio-sample, tomography equipment, has detection unit to detect signal representative of interaction between sample and electron beam, and storing unit to store association between value of signal and beam position |
US20120074320A1 (en) * | 2010-09-29 | 2012-03-29 | Josef Biberger | Particle beam device having a sample holder |
US9190242B2 (en) * | 2010-09-29 | 2015-11-17 | Carl Zeiss Nts Gmbh | Particle beam device having a sample holder |
Also Published As
Publication number | Publication date |
---|---|
EP1111650A2 (en) | 2001-06-27 |
IT247963Y1 (en) | 2002-09-20 |
ITTO990226U1 (en) | 2001-06-23 |
US6639224B2 (en) | 2003-10-28 |
ITTO990226V0 (en) | 1999-12-23 |
EP1111650A3 (en) | 2001-07-04 |
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Date | Code | Title | Description |
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AS | Assignment |
Owner name: FIAT AUTO S.P.A., ITALY Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:IULITA, PIERO;REEL/FRAME:011405/0518 Effective date: 20001127 |
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REMI | Maintenance fee reminder mailed | ||
LAPS | Lapse for failure to pay maintenance fees | ||
STCH | Information on status: patent discontinuation |
Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
|
FP | Expired due to failure to pay maintenance fee |
Effective date: 20071028 |