US20010003010A1 - Colloidal spray method for low cost thin coating deposition - Google Patents
Colloidal spray method for low cost thin coating deposition Download PDFInfo
- Publication number
- US20010003010A1 US20010003010A1 US09/293,446 US29344699A US2001003010A1 US 20010003010 A1 US20010003010 A1 US 20010003010A1 US 29344699 A US29344699 A US 29344699A US 2001003010 A1 US2001003010 A1 US 2001003010A1
- Authority
- US
- United States
- Prior art keywords
- substrate
- coating
- particles
- composition
- microns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 123
- 239000011248 coating agent Substances 0.000 title claims abstract description 85
- 238000000034 method Methods 0.000 title claims abstract description 75
- 230000008021 deposition Effects 0.000 title claims abstract description 18
- 239000007921 spray Substances 0.000 title description 6
- 239000000758 substrate Substances 0.000 claims abstract description 100
- 239000002245 particle Substances 0.000 claims abstract description 41
- 239000000203 mixture Substances 0.000 claims abstract description 37
- 239000000463 material Substances 0.000 claims abstract description 27
- 238000000151 deposition Methods 0.000 claims abstract description 23
- 238000005507 spraying Methods 0.000 claims abstract description 12
- 150000001875 compounds Chemical class 0.000 claims abstract description 10
- 239000007788 liquid Substances 0.000 claims abstract description 10
- 239000000725 suspension Substances 0.000 claims abstract description 10
- 238000005245 sintering Methods 0.000 claims abstract description 9
- 239000006199 nebulizer Substances 0.000 claims abstract description 6
- 239000000446 fuel Substances 0.000 claims abstract description 5
- 239000002904 solvent Substances 0.000 claims description 27
- 239000000919 ceramic Substances 0.000 claims description 15
- 239000002131 composite material Substances 0.000 claims description 14
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims description 9
- 230000007704 transition Effects 0.000 claims description 8
- 229910052776 Thorium Inorganic materials 0.000 claims description 5
- 150000004767 nitrides Chemical class 0.000 claims description 5
- 229910021332 silicide Inorganic materials 0.000 claims description 5
- 229910052684 Cerium Inorganic materials 0.000 claims description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 229910052727 yttrium Inorganic materials 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 3
- 229910052691 Erbium Inorganic materials 0.000 claims description 3
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 3
- 229910052689 Holmium Inorganic materials 0.000 claims description 3
- 229910052765 Lutetium Inorganic materials 0.000 claims description 3
- 229910052779 Neodymium Inorganic materials 0.000 claims description 3
- 229910052777 Praseodymium Inorganic materials 0.000 claims description 3
- 229910052775 Thulium Inorganic materials 0.000 claims description 3
- 229910052769 Ytterbium Inorganic materials 0.000 claims description 3
- 239000000443 aerosol Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 239000011230 binding agent Substances 0.000 claims description 3
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000002270 dispersing agent Substances 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052748 manganese Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052706 scandium Inorganic materials 0.000 claims description 3
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 229910052797 bismuth Inorganic materials 0.000 claims description 2
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 229910052746 lanthanum Inorganic materials 0.000 claims description 2
- 229910052745 lead Inorganic materials 0.000 claims description 2
- 150000001247 metal acetylides Chemical class 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- 229910052761 rare earth metal Inorganic materials 0.000 claims 1
- 238000002360 preparation method Methods 0.000 abstract description 5
- 238000005086 pumping Methods 0.000 abstract description 4
- 239000003595 mist Substances 0.000 abstract description 3
- 239000007787 solid Substances 0.000 abstract description 3
- 239000000126 substance Substances 0.000 abstract description 3
- 238000001704 evaporation Methods 0.000 abstract description 2
- 230000008020 evaporation Effects 0.000 abstract description 2
- 230000000704 physical effect Effects 0.000 abstract description 2
- 238000005524 ceramic coating Methods 0.000 abstract 4
- 239000010410 layer Substances 0.000 description 19
- 229910001233 yttria-stabilized zirconia Inorganic materials 0.000 description 16
- 239000010408 film Substances 0.000 description 15
- 239000000843 powder Substances 0.000 description 10
- 238000005336 cracking Methods 0.000 description 6
- 238000001878 scanning electron micrograph Methods 0.000 description 6
- 230000032798 delamination Effects 0.000 description 5
- 238000003618 dip coating Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000001035 drying Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000009835 boiling Methods 0.000 description 3
- 239000008199 coating composition Substances 0.000 description 3
- 238000001652 electrophoretic deposition Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 238000001000 micrograph Methods 0.000 description 3
- 238000003980 solgel method Methods 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 238000005118 spray pyrolysis Methods 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000003490 calendering Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 229910000473 manganese(VI) oxide Inorganic materials 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 238000010422 painting Methods 0.000 description 2
- 238000007750 plasma spraying Methods 0.000 description 2
- 239000004014 plasticizer Substances 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 238000010345 tape casting Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 238000007605 air drying Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000012700 ceramic precursor Substances 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001246 colloidal dispersion Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000005421 electrostatic potential Methods 0.000 description 1
- -1 elements 57-71 Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005289 physical deposition Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000000935 solvent evaporation Methods 0.000 description 1
- 238000009718 spray deposition Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
- 238000007736 thin film deposition technique Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/123—Spraying molten metal
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249961—With gradual property change within a component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249967—Inorganic matrix in void-containing component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249967—Inorganic matrix in void-containing component
- Y10T428/24997—Of metal-containing material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Definitions
- the present invention relates to a coating deposition method based upon colloidal processing technology.
- a coating layer on a substrate such as a ceramic film (i.e., coating) deposited on a metal or oxide substrate, can be obtained by several methods. Generally such films can be deposited using methods either requiring or not requiring vacuum technology.
- Contemporary vacuum deposition techniques can be grouped into two categories: physical vapor deposition (such as sputtering, laser ablation, etc.) and chemical vapor deposition. Both technologies require expensive vacuum pumping equipment. Because of the relatively high cost of capital equipment, such methods are usually not economically viable for high volume applications.
- Physical vacuum deposition methods are also limited because the are “line-of-sight.” That is, deposition only occurs on the surface of the substrate which can be “seen” by the source. Substrates having a more complex geometry than planar typically are poorly coated, if at all, in a vacuum deposition system. Complex geometrical substrates may be rotated and turned in a vacuum system to achieve more complete surface coverage, although this adds considerable complexity to the system. Chemical vapor deposition is more conformal; however, it often uses toxic and/or expensive chemical reactants. Both physical and chemical deposition techniques generally have low deposition rates for oxide films, typically less than 1 micron per hour.
- Contemporary non-vacuum methods of applying coatings to substrates include plasma spraying, tape casting; tape calendering; screen printing; sol-gel coating; colloidal spin or dip coating; electrophoretic deposition; slurry painting; and spray pyrolysis coating.
- Tape casting and tape calendering are generally limited to planar substrates only.
- Plasma spraying, slurry painting, and screen printing techniques usually yield coatings with almost certain porosity and are thus more appropriate for applications where a fully dense film is not required.
- Spray pyrolysis in which a solution of metal salts or organometallics is sprayed on a heated substrate also generally yields porous films.
- colloidal techniques spin coating, dip coating, and electrophoretic deposition are among the most cost-effective techniques known for deposition of dense thin films. These techniques involve the preparation of a colloidal solution of the ceramic powder of the material to be coated. In the spin coating method, a few drops of the colloidal solution is placed on the surface of the substrate, which is subsequently spun at high speed thereby removing the solvent and leaving a thin layer of the powder on the surface of the substrate. This technique is limited to deposition onto planar substrates having low surface areas.
- the substrate is dipped into the colloidal solution followed by withdrawal and drying. During the air-drying step, the solvent evaporates, leaving the powder in the form of a thin film on the substrate.
- colloidal processing techniques require subsequent sintering at high temperature in order to densify the film.
- the process of thermal cycling of the substrate from room temperature to the sintering temperature can cause cracking between the successive layers because of differential rates of thermal expansion.
- a further object of the invention is to provide coatings on various substrates in a single processing step.
- Another object of the invention is to provide a dense or porous coating on a substrate.
- Another object of the invention is to provide coatings of single phase materials or a composite of various materials such as oxide, nitride, silicide, and carbide compounds.
- Another object of the invention is to provide coatings at low cost compared to conventional thin film deposition techniques.
- Another object of the invention is to provide coatings prepared by spraying with an ultrasonic atomizer.
- Another object of the invention is to provide coatings of two or more materials with a graded composition through at least one portion of the coating.
- Another object of the invention is to provide coatings on substrates that substantially reduce the stress at the interface between coating and substrate.
- the present invention is a new colloidal coating deposition method that can produce dense (i.e., greater than about 90% of theoretical density), crack-free coatings at virtually any thickness ranging from less than one micron to several hundred microns in a single deposition step.
- the present invention includes the preparation of a stable colloidal solution containing a powder of the material to be coated and a carrier medium (e.g., solvent) prior to deposition. Subsequently, the colloidal solution (e.g., colloidal suspension) is then sprayed on the substrate to be coated, using a spraying device, preferably an ultrasonic nebulizer.
- a spraying device preferably an ultrasonic nebulizer.
- the substrate is heated to a temperature higher than the boiling point temperature of the solvent, which hastens evaporation of the solvent, leaving the powder in the form of a compact coating layer.
- Deposition of the coating onto a heated substrate is critical to the formation of a thick coating without cracks. Also, a fine and uniform spray obtained using ultrasonic nozzles is an important feature in the formation of high quality coatings.
- the solvent used in the subject invention is preferably chosen from among those having sufficiently high volatility.
- an organic solvent is often added to increase solvent volatility and enhance surface wetting properties.
- the method of the invention can be termed Colloidal Spray Deposition (CSD).
- CSD allows the deposition of thin, thick, or complex coatings that have generally been unattainable heretofore.
- a coating several microns to several hundred microns in thickness can easily be prepared using a single step.
- the coating can encompass a dense, or porous sintered particle layer that matches the desired application.
- coatings with either simple or complex structures can be created, such as composites of different materials or coatings with graded compositions, including continuously graded or discontinuously graded, including stepped compositions.
- concentration of the ceramic composites may be continuously graded from one (or more) composition(s) to another.
- An advantage of the invention is that it provides coatings for several applications, including solid oxide fuel cells, gas turbine blade coatings, sensors, surface catalyst coatings, steam electrolyzers, and in any application where an chemically inert protective coating of oxide, silicide, nitride or carbide material is desired.
- FIG. 1 illustrates a schematic of the inventive method of generating thin coatings having thickness of less than one ⁇ m to thick coatings having a thickness of several hundred microns.
- FIG. 2 illustrates a Scanning Electron Microscope (SEM) micrograph of a cross-section of a 13 micron thick of Yttria-Stabilized-Zirconia (YSZ) coating applied over a porous Ni/YSZ substrate using the inventive method described herein.
- the coating is approximately fully dense, has no cracks, and has excellent adhesion to the substrate.
- FIG. 3 is an SEM micrograph illustrating a cross-section of an 80 micron thick coating of YSZ deposited on a porous (La, Sr) MnO 3 substrate using the method of the invention.
- the coating is essentially fully dense, has no cracks, and has excellent adhesion to the substrate.
- FIG. 4 is a SEM micrograph showing a cross-section of a porous substrate coated with a YSZ and yttria-doped-ceria bilayer.
- FIG. 5 illustrates a cross-section of a composite coating with a graded composition that can be processed using the inventive method described herein.
- FIG. 5 a shows the SEM micrograph of the cross-section of the coating.
- the film has a YSZ layer and an yttria-doped ceria layer separated by a transition zone where the coating composition manifests a continuously graded compositional layer changing composition from a majority of YSZ to a majority of yttria-doped-ceria.
- FIG. 5 b shows the elemental composition profile of the cross-section of the coating going from one side to the other as determined using an electron microprobe. A monotonic transition is clearly observed.
- the present invention involves a method for depositing a coating onto a substrate and novel coating compositions and structures that can be produced by the method.
- the coating is derived from the deposition of fine particles that are dispersed (usually sprayed) onto a heated substrate.
- FIG. 1 illustrates a general depiction of the method of the invention.
- a colloidal sol ( 2 ) is delivered via a pumping means such as a liquid pump ( 4 ) to a liquid dispersing means such as an ultrasonic nozzle ( 6 ) that sprays a mist of fine droplets onto a substrate ( 8 ) that has been heated to a desired temperature by a heating means such as heater ( 10 ) which may contact the substrate.
- the particles are dispersed onto the substrate as a mist of droplets of the mixture, with the droplets usually being of maximum cross-sectional dimension of less than 100 microns, and preferably from about 20 to about 50 microns.
- the droplets usually being of maximum cross-sectional dimension of less than 100 microns, and preferably from about 20 to about 50 microns.
- any means that can effectively disperse e.g. spray
- ultrasonic spraying is a preferred mode.
- one step of the method involves heating the substrate close to or above the boiling point of the solvent. Upon impact of the droplets on the heated substrate, the solvent evaporates leaving the powder in the form of a compact layer of the particles, i.e., a green film. The essentially instantaneous removal of the solvent by heating allows a continuous deposition of the coating. Following the coating step, the substrate and the coating can be co-sintered at high temperature to form a fully dense, sintered coating.
- a substrate comprising any material may be coated by the method, including for instance, glasses, metals, ceramics, and the like. However, the best results are usually obtained with substrates having at least some porosity.
- the substrate surface can have any shape, including planar or non-planar surfaces.
- the substrate can have a low surface area to be coated or the method of the invention can be scaled up to coat objects of very large surface areas.
- the solvent employed to suspend the particles can be an organic liquid, aqueous liquid or a mixture of both.
- the selection of the solvent is determined by the material(s) to be coated as well as the substrates.
- the solvent must be compatible with the powder (i.e., particles) of the coating material so that a stable colloidal dispersion can be obtained.
- the solvent must have sufficient volatility so that it can easily be removed when the spray impinges on the heated substrate.
- Organic solvents such as ethanol, acetone, propanol, toluene are most commonly used.
- a dispersant, a binder and/or a plasticizer are introduced into the solvent as additives. The dispersant aids in stabilizing the colloidal suspension; the binder adds some strength to a green film initially formed on deposition onto the substrate; and the plasticizer imparts some plasticity to the film.
- Such practices are known in conventional colloidal processing techniques.
- the substrate is heated in the range from about room temperature to about 400° C., but in any case, the substrate is held at a temperature lower than the temperature at which the particles chemically decompose into simpler converted products, such as those which may occur in a spray pyrolysis process.
- the temperature must be below that which would destroy the organic by breaking bonds, or by chemical reactions with the atmospheric elements to which the organic is exposed. Therefore, the organic liquids useful as carrier media normally have a boiling point below about 400° C. at standard temperature and pressure (STP).
- the dispersing of the particles is usually conducted under ordinary conditions of temperature and pressure, such as 25° C. and 1 atmosphere pressure (RTP).
- powders of any material that have small enough particle size can be suspended in an appropriate solvent as a colloidal suspension for coating.
- the primary requirement for a stable colloidal solution or suspension is to obtain a powder form of the material to be coated (element or compound) and an average particle size of such material that is sufficiently small enough.
- fine particles of the material to be coated are less than 10 microns, but in some instances they must be less than 1 micron and even less than 0.5 micron.
- any concentration of particles can be suspended in the carrier medium (i.e., solvent), usually the concentration is in the range from about 0.1 to 10 weight percent, of particles in the solvent.
- the materials that can be considered for coating using the subject invention include any pure or mixed metals or compounds, particularly ceramic precursor materials, as for example, all metals, metal oxides, carbides, nitrides, silicides, and the like.
- Preferred compounds include the elements Y, Zr, elements 57 - 71 , Al, Ce, Pr, Nd, Pm, Sm Eu, Gd, Th, Dy, Ho, Er, Tm, Yb, Lu, Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Bi, Th, Pb, O, C, N, and Si.
- single phase materials can be coated onto the substrate, composite or multilayer coatings are also obtainable.
- Multilayer coatings can be created using sequential processing of different colloidal solutions, each containing one or more compositions desired in the final coating.
- the solutions can be delivered to a single nebulizer via different liquid pumps or through different nebulizers.
- the compositions of the multilayers can be graded in a continuous or discontinuous manner.
- a coating of continuously graded or discontinuously graded (including stepped) composites can be processed by codepositing different solutions onto a substrate.
- a coating with a graded composition structure can be processed by simultaneously processing different solutions and controlling the pumping speed of the different solutions through the same or different nebulizers, as illustrated in an example provided below.
- the resulting green film is sintered at times and temperatures sufficient to produce a final coating having desired properties.
- dense coatings require higher sintering temperatures, with fully dense coatings requiring the highest. If a porous coating is desired, the sintering temperature must be kept sufficiently low to avoid total densification due to particle growth.
- a desirable feature of the invention is that the sintered coating can be relatively thick and yet crack free.
- the coatings also have excellent adhesion to the substrate.
- the thickness of the coating can be varied in the range of less than 1 micron to several hundred microns by controlling the deposition time, the thickness is usually up to about 250 microns, and preferably about 1 to about 100 microns; however, thicknesses of the coating greater than 10 microns, greater than 20 microns, and greater than 40 microns can be conveniently produced by controlled dispersion of the colloidal solution and a single sintering step.
- FIG. 2 illustrates a Scanning Electron Microscope (SEM) micrograph of a 13 micron thick yttria-stabilized zirconia (YSZ) coating applied onto a porous Ni/YSZ substrate using the inventive method described herein.
- SEM Scanning Electron Microscope
- YSZ yttria-stabilized zirconia
- FIG. 3 A thicker coating is exemplified in FIG. 3 wherein a SEM micrograph illustrates an 80 micron thick coating of YSZ deposited on a porous La 0.85 Sr 0.15 MnO 3 substrate using the method of the invention. Although much thicker, the coating has characteristics similar to that of the micrograph shown in FIG. 2, i.e., the coating is dense, has no visible cracks, and has excellent adhesion to the substrate material.
- FIG. 4 is a SEM micrograph showing a porous substrate 10 coated with a YSZ ( 12 ) and yttria-doped-ceria ( 14 ) bilayer. Such a structure can be used as an anode in a fuel cell. A clear delamination can be observed at the interface between the two layers of the coating.
- the desirable capability to produce a coating having more than one layer without delamination or cracking is enhanced.
- One solution to prevent cracking or delamination is to reduce the stress at the interface between the two layers of the coating, i.e., to alleviate thermal expansion mismatch between layers. This can be done by replacing the abrupt interface between the two layers with a transition zone where the composition of the coating would change progressively and smoothly from pure YSZ to pure yttria-doped-ceria.
- Such a transitional layer can be a composite which is a composition that is graded, often in a continuous manner across the cross-section of the layer or entire coating, although discontinous or stepped concentrations are possible.
- a graded composition can easily be produced.
- concentration of the composition of the liquid delivered to a single nebulizer or the rate of delivery of different solutions to separate nebulizers
- the concentration of the composition of the liquid delivered to a single nebulizer can be predetermined or controlled in order to create a composite coating with the desired (predetermined) graded composition.
- a composite coating of any number of compounds can be created using this method.
- FIGS. 5 a and 5 b provide an illustration of a coating with a graded composition fabricated by using this method.
- FIG. 5 a shows the SEM micrograph of the coating.
- the coating on porous anode substrate 26 has a YSZ layer 24 (adjacent the anode) and a yttria-doped ceria layer 22 (exterior) separated by a transition zone 20 where the coating composition changes gradually and monotonically from essentially YSZ to essentially yttria-doped-ceria.
- FIG. 5 a illustrates a graded composition structure that does not have a clear interface between the layers. Delamination has also been suppressed, indicating that the graded transition zone has been effective for relaxation of the stress at the interface between YSZ and yttria-doped-ceria .
- 5 b shows the elemental composition profile of the coating going from one side to the other, i.e., from the surface adjacent the substrate to the exterior surface of the coating (or nonadjacent surface to the substrate), as determined using an electron microprobe.
- a compositionally varying, yet smooth transition is clearly observed in FIG. 5 b wherein the concentration of the zirconia-containing material gradually decreases in the transition layer from above about 60 weight percent down to about zero weight percent and the concentration of the cerium-containing material increases from zero to about 70 weight percent, in an initial 20 micron cross-section of the coating adjacent the substrate.
- the method and the material structures obtainable using the method described here have useful applications in a number of areas, especially in preparation of solid oxide fuel cells, gas turbine blade coatings, sensors, steam electrolyzers, etc. It has general use in preparation of systems requiring durable and chemically resistant coatings, or coatings having other specific chemical or physical properties.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Coating By Spraying Or Casting (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Inert Electrodes (AREA)
Abstract
Description
- This application claims priority in provisional application filed on Dec. 23, 1998, entitled “Colloidal Spray Method For Low Cost Thin Film Deposition,” Serial No. 60/113,268, by inventors Ai-Quoc Pham, Tae Lee, Robert S. Glass.
- [0002] The United States Government has rights in this invention pursuant to Contract No. W-7405-ENG-48 between the United States Department of Energy and the University of California for the operation of Lawrence Livermore National Laboratory.
- 1. Field of the Invention
- The present invention relates to a coating deposition method based upon colloidal processing technology.
- 2. Description of Related Art
- A coating layer on a substrate, such as a ceramic film (i.e., coating) deposited on a metal or oxide substrate, can be obtained by several methods. Generally such films can be deposited using methods either requiring or not requiring vacuum technology.
- Contemporary vacuum deposition techniques can be grouped into two categories: physical vapor deposition (such as sputtering, laser ablation, etc.) and chemical vapor deposition. Both technologies require expensive vacuum pumping equipment. Because of the relatively high cost of capital equipment, such methods are usually not economically viable for high volume applications.
- Physical vacuum deposition methods are also limited because the are “line-of-sight.” That is, deposition only occurs on the surface of the substrate which can be “seen” by the source. Substrates having a more complex geometry than planar typically are poorly coated, if at all, in a vacuum deposition system. Complex geometrical substrates may be rotated and turned in a vacuum system to achieve more complete surface coverage, although this adds considerable complexity to the system. Chemical vapor deposition is more conformal; however, it often uses toxic and/or expensive chemical reactants. Both physical and chemical deposition techniques generally have low deposition rates for oxide films, typically less than 1 micron per hour.
- Contemporary non-vacuum methods of applying coatings to substrates include plasma spraying, tape casting; tape calendering; screen printing; sol-gel coating; colloidal spin or dip coating; electrophoretic deposition; slurry painting; and spray pyrolysis coating. Tape casting and tape calendering are generally limited to planar substrates only. Plasma spraying, slurry painting, and screen printing techniques usually yield coatings with almost certain porosity and are thus more appropriate for applications where a fully dense film is not required. Spray pyrolysis, in which a solution of metal salts or organometallics is sprayed on a heated substrate also generally yields porous films.
- Colloidal techniques (spin coating, dip coating, and electrophoretic deposition) are among the most cost-effective techniques known for deposition of dense thin films. These techniques involve the preparation of a colloidal solution of the ceramic powder of the material to be coated. In the spin coating method, a few drops of the colloidal solution is placed on the surface of the substrate, which is subsequently spun at high speed thereby removing the solvent and leaving a thin layer of the powder on the surface of the substrate. This technique is limited to deposition onto planar substrates having low surface areas.
- In electrophoretic deposition, a high voltage is applied between the substrate and a counter electrode, both of which are immersed in the colloidal suspension. The powder particles, which are generally slightly charged on the surface, move under the electrostatic potential toward the substrate where they discharge and deposit. This technique is limited to conductive substrates only.
- In the dip coating process, the substrate is dipped into the colloidal solution followed by withdrawal and drying. During the air-drying step, the solvent evaporates, leaving the powder in the form of a thin film on the substrate.
- It has been extremely difficult, if not impossible, to deposit coatings with thicknesses larger than a few microns, using conventional dip coating methods. The films obtained are generally limited in thickness, typically a few microns, but less than ten microns. Attempts to deposit thicker coatings have not generally been successful because of film cracking, particularly during the drying process. The drying step in a conventional colloidal dip coating process is done after withdrawing the substrate from the solution. During the drying step the solvent evaporates which induces film shrinkage due to a large volume change which in turn leads to cracking. In order to deposit coatings thicker than 10 microns, the coating process must be repeated, which is both time consuming and costly.
- In addition, all the colloidal processing techniques require subsequent sintering at high temperature in order to densify the film. The process of thermal cycling of the substrate from room temperature to the sintering temperature, can cause cracking between the successive layers because of differential rates of thermal expansion.
- Accordingly, a need exists for coatings on substrates that can be relatively dense, are essentially crack-free, yet sufficiently thick (i.e., greater than 10 μm), and preparable in a single dispersion step.
- It is an object of the present invention to produce dense coatings on various substrates.
- A further object of the invention is to provide coatings on various substrates in a single processing step.
- Another object of the invention is to provide a dense or porous coating on a substrate.
- Another object of the invention is to provide coatings of single phase materials or a composite of various materials such as oxide, nitride, silicide, and carbide compounds.
- Another object of the invention is to provide coatings at low cost compared to conventional thin film deposition techniques.
- Another object of the invention is to provide coatings prepared by spraying with an ultrasonic atomizer.
- Another object of the invention is to provide coatings of two or more materials with a graded composition through at least one portion of the coating.
- Another object of the invention is to provide coatings on substrates that substantially reduce the stress at the interface between coating and substrate.
- The present invention is a new colloidal coating deposition method that can produce dense (i.e., greater than about 90% of theoretical density), crack-free coatings at virtually any thickness ranging from less than one micron to several hundred microns in a single deposition step. The present invention includes the preparation of a stable colloidal solution containing a powder of the material to be coated and a carrier medium (e.g., solvent) prior to deposition. Subsequently, the colloidal solution (e.g., colloidal suspension) is then sprayed on the substrate to be coated, using a spraying device, preferably an ultrasonic nebulizer. The substrate is heated to a temperature higher than the boiling point temperature of the solvent, which hastens evaporation of the solvent, leaving the powder in the form of a compact coating layer. Deposition of the coating onto a heated substrate is critical to the formation of a thick coating without cracks. Also, a fine and uniform spray obtained using ultrasonic nozzles is an important feature in the formation of high quality coatings.
- To facilitate solvent evaporation, the solvent used in the subject invention is preferably chosen from among those having sufficiently high volatility. When water must be used, an organic solvent is often added to increase solvent volatility and enhance surface wetting properties. The method of the invention can be termed Colloidal Spray Deposition (CSD). CSD allows the deposition of thin, thick, or complex coatings that have generally been unattainable heretofore. Using the present method, a coating several microns to several hundred microns in thickness can easily be prepared using a single step. The coating can encompass a dense, or porous sintered particle layer that matches the desired application. By controlling the composition of the colloidal solution delivered to an ultrasonic nozzle, coatings with either simple or complex structures can be created, such as composites of different materials or coatings with graded compositions, including continuously graded or discontinuously graded, including stepped compositions. For example, by controlling the feed rates of the colloidal solutions into the nozzle for each of the constituent particle sources, the concentration of the ceramic composites may be continuously graded from one (or more) composition(s) to another.
- An advantage of the invention is that it provides coatings for several applications, including solid oxide fuel cells, gas turbine blade coatings, sensors, surface catalyst coatings, steam electrolyzers, and in any application where an chemically inert protective coating of oxide, silicide, nitride or carbide material is desired.
- FIG. 1 illustrates a schematic of the inventive method of generating thin coatings having thickness of less than one μm to thick coatings having a thickness of several hundred microns.
- FIG. 2 illustrates a Scanning Electron Microscope (SEM) micrograph of a cross-section of a 13 micron thick of Yttria-Stabilized-Zirconia (YSZ) coating applied over a porous Ni/YSZ substrate using the inventive method described herein. The coating is approximately fully dense, has no cracks, and has excellent adhesion to the substrate.
- FIG. 3 is an SEM micrograph illustrating a cross-section of an 80 micron thick coating of YSZ deposited on a porous (La, Sr) MnO3 substrate using the method of the invention. The coating is essentially fully dense, has no cracks, and has excellent adhesion to the substrate.
- FIG. 4 is a SEM micrograph showing a cross-section of a porous substrate coated with a YSZ and yttria-doped-ceria bilayer.
- FIG. 5 illustrates a cross-section of a composite coating with a graded composition that can be processed using the inventive method described herein. FIG. 5a shows the SEM micrograph of the cross-section of the coating. The film has a YSZ layer and an yttria-doped ceria layer separated by a transition zone where the coating composition manifests a continuously graded compositional layer changing composition from a majority of YSZ to a majority of yttria-doped-ceria. FIG. 5b shows the elemental composition profile of the cross-section of the coating going from one side to the other as determined using an electron microprobe. A monotonic transition is clearly observed.
- The present invention involves a method for depositing a coating onto a substrate and novel coating compositions and structures that can be produced by the method. The coating is derived from the deposition of fine particles that are dispersed (usually sprayed) onto a heated substrate. FIG. 1 illustrates a general depiction of the method of the invention. A colloidal sol (2) is delivered via a pumping means such as a liquid pump (4) to a liquid dispersing means such as an ultrasonic nozzle (6) that sprays a mist of fine droplets onto a substrate (8) that has been heated to a desired temperature by a heating means such as heater (10) which may contact the substrate. The particles are dispersed onto the substrate as a mist of droplets of the mixture, with the droplets usually being of maximum cross-sectional dimension of less than 100 microns, and preferably from about 20 to about 50 microns. Although any means that can effectively disperse (e.g. spray) such small droplets may be employed, ultrasonic spraying is a preferred mode.
- Although not evident in FIG. 1, prior to deposition one step of the method involves heating the substrate close to or above the boiling point of the solvent. Upon impact of the droplets on the heated substrate, the solvent evaporates leaving the powder in the form of a compact layer of the particles, i.e., a green film. The essentially instantaneous removal of the solvent by heating allows a continuous deposition of the coating. Following the coating step, the substrate and the coating can be co-sintered at high temperature to form a fully dense, sintered coating.
- A substrate comprising any material may be coated by the method, including for instance, glasses, metals, ceramics, and the like. However, the best results are usually obtained with substrates having at least some porosity. The substrate surface can have any shape, including planar or non-planar surfaces. The substrate can have a low surface area to be coated or the method of the invention can be scaled up to coat objects of very large surface areas.
- The solvent employed to suspend the particles can be an organic liquid, aqueous liquid or a mixture of both. The selection of the solvent is determined by the material(s) to be coated as well as the substrates. The solvent must be compatible with the powder (i.e., particles) of the coating material so that a stable colloidal dispersion can be obtained. The solvent must have sufficient volatility so that it can easily be removed when the spray impinges on the heated substrate. Organic solvents such as ethanol, acetone, propanol, toluene are most commonly used. In general, a dispersant, a binder and/or a plasticizer are introduced into the solvent as additives. The dispersant aids in stabilizing the colloidal suspension; the binder adds some strength to a green film initially formed on deposition onto the substrate; and the plasticizer imparts some plasticity to the film. Such practices are known in conventional colloidal processing techniques.
- Normally the substrate is heated in the range from about room temperature to about 400° C., but in any case, the substrate is held at a temperature lower than the temperature at which the particles chemically decompose into simpler converted products, such as those which may occur in a spray pyrolysis process. Furthermore, if an organic carrier medium is used, the temperature must be below that which would destroy the organic by breaking bonds, or by chemical reactions with the atmospheric elements to which the organic is exposed. Therefore, the organic liquids useful as carrier media normally have a boiling point below about 400° C. at standard temperature and pressure (STP).
- Although the substrate is heated, the dispersing of the particles, such as by spraying or aerosol-assisted deposition, is usually conducted under ordinary conditions of temperature and pressure, such as 25° C. and 1 atmosphere pressure (RTP).
- Most powders of any material that have small enough particle size can be suspended in an appropriate solvent as a colloidal suspension for coating. The primary requirement for a stable colloidal solution or suspension is to obtain a powder form of the material to be coated (element or compound) and an average particle size of such material that is sufficiently small enough. Usually fine particles of the material to be coated are less than 10 microns, but in some instances they must be less than 1 micron and even less than 0.5 micron. Although any concentration of particles can be suspended in the carrier medium (i.e., solvent), usually the concentration is in the range from about 0.1 to 10 weight percent, of particles in the solvent.
- The materials that can be considered for coating using the subject invention include any pure or mixed metals or compounds, particularly ceramic precursor materials, as for example, all metals, metal oxides, carbides, nitrides, silicides, and the like. Preferred compounds include the elements Y, Zr, elements57-71, Al, Ce, Pr, Nd, Pm, Sm Eu, Gd, Th, Dy, Ho, Er, Tm, Yb, Lu, Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Bi, Th, Pb, O, C, N, and Si. Although single phase materials can be coated onto the substrate, composite or multilayer coatings are also obtainable.
- Multilayer coatings can be created using sequential processing of different colloidal solutions, each containing one or more compositions desired in the final coating. The solutions can be delivered to a single nebulizer via different liquid pumps or through different nebulizers. The compositions of the multilayers can be graded in a continuous or discontinuous manner. A coating of continuously graded or discontinuously graded (including stepped) composites can be processed by codepositing different solutions onto a substrate. For example, a coating with a graded composition structure can be processed by simultaneously processing different solutions and controlling the pumping speed of the different solutions through the same or different nebulizers, as illustrated in an example provided below.
- After the particles have been dispersed upon the substrate, the resulting green film is sintered at times and temperatures sufficient to produce a final coating having desired properties. Generally, dense coatings require higher sintering temperatures, with fully dense coatings requiring the highest. If a porous coating is desired, the sintering temperature must be kept sufficiently low to avoid total densification due to particle growth.
- A desirable feature of the invention is that the sintered coating can be relatively thick and yet crack free. The coatings also have excellent adhesion to the substrate. Although the thickness of the coating can be varied in the range of less than 1 micron to several hundred microns by controlling the deposition time, the thickness is usually up to about 250 microns, and preferably about 1 to about 100 microns; however, thicknesses of the coating greater than 10 microns, greater than 20 microns, and greater than 40 microns can be conveniently produced by controlled dispersion of the colloidal solution and a single sintering step. FIG. 2 illustrates a Scanning Electron Microscope (SEM) micrograph of a 13 micron thick yttria-stabilized zirconia (YSZ) coating applied onto a porous Ni/YSZ substrate using the inventive method described herein. The coating is dense, has no visible cracks, and has excellent adhesion to the substrate material.
- A thicker coating is exemplified in FIG. 3 wherein a SEM micrograph illustrates an 80 micron thick coating of YSZ deposited on a porous La0.85Sr0.15MnO3 substrate using the method of the invention. Although much thicker, the coating has characteristics similar to that of the micrograph shown in FIG. 2, i.e., the coating is dense, has no visible cracks, and has excellent adhesion to the substrate material.
- In conventional methods for the processing of multilayer coatings, the thermal expansion coefficient mismatch between the adjacent layers often creates mechanical stresses that can lead to film cracking and/or delamination. For example, FIG. 4 is a SEM micrograph showing a
porous substrate 10 coated with a YSZ (12) and yttria-doped-ceria (14) bilayer. Such a structure can be used as an anode in a fuel cell. A clear delamination can be observed at the interface between the two layers of the coating. - In the invention, the desirable capability to produce a coating having more than one layer without delamination or cracking is enhanced. One solution to prevent cracking or delamination is to reduce the stress at the interface between the two layers of the coating, i.e., to alleviate thermal expansion mismatch between layers. This can be done by replacing the abrupt interface between the two layers with a transition zone where the composition of the coating would change progressively and smoothly from pure YSZ to pure yttria-doped-ceria. Such a transitional layer can be a composite which is a composition that is graded, often in a continuous manner across the cross-section of the layer or entire coating, although discontinous or stepped concentrations are possible.
- By using the method of the invention, a graded composition can easily be produced. By controlling the delivery rate and concentrations of each of more than one colloidal solution, using for instance, programmable liquid pumps, the concentration of the composition of the liquid delivered to a single nebulizer (or the rate of delivery of different solutions to separate nebulizers) can be predetermined or controlled in order to create a composite coating with the desired (predetermined) graded composition. A composite coating of any number of compounds can be created using this method. FIGS. 5a and 5 b provide an illustration of a coating with a graded composition fabricated by using this method. FIG. 5a shows the SEM micrograph of the coating. The coating on
porous anode substrate 26 has a YSZ layer 24 (adjacent the anode) and a yttria-doped ceria layer 22 (exterior) separated by atransition zone 20 where the coating composition changes gradually and monotonically from essentially YSZ to essentially yttria-doped-ceria. In contrast to the structure shown in FIG. 4, FIG. 5a illustrates a graded composition structure that does not have a clear interface between the layers. Delamination has also been suppressed, indicating that the graded transition zone has been effective for relaxation of the stress at the interface between YSZ and yttria-doped-ceria . FIG. 5b shows the elemental composition profile of the coating going from one side to the other, i.e., from the surface adjacent the substrate to the exterior surface of the coating (or nonadjacent surface to the substrate), as determined using an electron microprobe. A compositionally varying, yet smooth transition is clearly observed in FIG. 5b wherein the concentration of the zirconia-containing material gradually decreases in the transition layer from above about 60 weight percent down to about zero weight percent and the concentration of the cerium-containing material increases from zero to about 70 weight percent, in an initial 20 micron cross-section of the coating adjacent the substrate. - The method and the material structures obtainable using the method described here have useful applications in a number of areas, especially in preparation of solid oxide fuel cells, gas turbine blade coatings, sensors, steam electrolyzers, etc. It has general use in preparation of systems requiring durable and chemically resistant coatings, or coatings having other specific chemical or physical properties.
- Although particular embodiments of the present invention have been described and illustrated, such is not intended to limit the invention. Modifications and changes will no doubt become apparent to those skilled in the art, and it is intended that the invention only be limited by the scope of the appended claims.
Claims (39)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/293,446 US6358567B2 (en) | 1998-12-23 | 1999-04-16 | Colloidal spray method for low cost thin coating deposition |
EP19990968470 EP1144726A1 (en) | 1998-12-23 | 1999-12-08 | Colloidal spray method for low cost thin coating deposition |
JP2000591244A JP2002533576A (en) | 1998-12-23 | 1999-12-08 | Colloidal treatment spray method for effective plating adhesion |
PCT/US1999/029104 WO2000039358A1 (en) | 1998-12-23 | 1999-12-08 | Colloidal spray method for low cost thin coating deposition |
US10/059,852 US6846558B2 (en) | 1998-12-23 | 2002-01-28 | Colloidal spray method for low cost thin coating deposition |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11326898P | 1998-12-23 | 1998-12-23 | |
US09/293,446 US6358567B2 (en) | 1998-12-23 | 1999-04-16 | Colloidal spray method for low cost thin coating deposition |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/059,852 Division US6846558B2 (en) | 1998-12-23 | 2002-01-28 | Colloidal spray method for low cost thin coating deposition |
Publications (2)
Publication Number | Publication Date |
---|---|
US20010003010A1 true US20010003010A1 (en) | 2001-06-07 |
US6358567B2 US6358567B2 (en) | 2002-03-19 |
Family
ID=26810864
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/293,446 Expired - Fee Related US6358567B2 (en) | 1998-12-23 | 1999-04-16 | Colloidal spray method for low cost thin coating deposition |
US10/059,852 Expired - Fee Related US6846558B2 (en) | 1998-12-23 | 2002-01-28 | Colloidal spray method for low cost thin coating deposition |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/059,852 Expired - Fee Related US6846558B2 (en) | 1998-12-23 | 2002-01-28 | Colloidal spray method for low cost thin coating deposition |
Country Status (4)
Country | Link |
---|---|
US (2) | US6358567B2 (en) |
EP (1) | EP1144726A1 (en) |
JP (1) | JP2002533576A (en) |
WO (1) | WO2000039358A1 (en) |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2380492A (en) * | 2001-09-05 | 2003-04-09 | Trw Ltd | Friction member with graded coating |
US20040121182A1 (en) * | 2002-12-23 | 2004-06-24 | Hardwicke Canan Uslu | Method and composition to repair and build structures |
EP1492178A2 (en) * | 2003-06-24 | 2004-12-29 | Hewlett-Packard Development Company, L.P. | Methods for applying electrodes or electrolytes to a substrate |
WO2006024785A1 (en) * | 2004-08-03 | 2006-03-09 | Centre National De La Recherche Scientifique (C.N.R.S.) | Method for preparing supported electron- and ionic-oxygen-conducting ultra-thin dense membranes |
US7244526B1 (en) | 2003-04-28 | 2007-07-17 | Battelle Memorial Institute | Solid oxide fuel cell anodes and electrodes for other electrochemical devices |
US7351491B2 (en) | 2003-04-28 | 2008-04-01 | Battelle Memorial Institute | Supporting electrodes for solid oxide fuel cells and other electrochemical devices |
US20080081007A1 (en) * | 2006-09-29 | 2008-04-03 | Mott Corporation, A Corporation Of The State Of Connecticut | Sinter bonded porous metallic coatings |
US8623301B1 (en) | 2008-04-09 | 2014-01-07 | C3 International, Llc | Solid oxide fuel cells, electrolyzers, and sensors, and methods of making and using the same |
US9082619B2 (en) * | 2012-07-09 | 2015-07-14 | International Solar Electric Technology, Inc. | Methods and apparatuses for forming semiconductor films |
US9149750B2 (en) | 2006-09-29 | 2015-10-06 | Mott Corporation | Sinter bonded porous metallic coatings |
EP2750845B1 (en) * | 2011-09-01 | 2017-12-27 | Watt Fuel Cell Corp. | Process for producing tubular ceramic structures |
US9905871B2 (en) | 2013-07-15 | 2018-02-27 | Fcet, Inc. | Low temperature solid oxide cells |
WO2018191352A1 (en) * | 2017-04-13 | 2018-10-18 | Corning Incorporated | Coating tape |
US10344389B2 (en) | 2010-02-10 | 2019-07-09 | Fcet, Inc. | Low temperature electrolytes for solid oxide cells having high ionic conductivity |
CN111499407A (en) * | 2020-05-11 | 2020-08-07 | 浙江中诚环境研究院有限公司 | Coating process and coating device for flat-plate type ceramic separation membrane |
US20220314272A1 (en) * | 2019-06-03 | 2022-10-06 | Basf Coatings Gmbh | Method for applying embossed structures to coating media while pre-treating the embossing tool used therefor |
Families Citing this family (76)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001513697A (en) * | 1997-02-24 | 2001-09-04 | スーペリア マイクロパウダーズ リミテッド ライアビリティ カンパニー | Aerosol method and apparatus, particle product, and electronic device manufactured from the particle product |
NL1006638C2 (en) * | 1997-07-21 | 1999-01-25 | Univ Utrecht | Thin ceramic coatings. |
US20050023710A1 (en) * | 1998-07-10 | 2005-02-03 | Dmitri Brodkin | Solid free-form fabrication methods for the production of dental restorations |
US7553573B2 (en) | 1999-07-31 | 2009-06-30 | The Regents Of The University Of California | Solid state electrochemical composite |
US7163713B2 (en) * | 1999-07-31 | 2007-01-16 | The Regents Of The University Of California | Method for making dense crack free thin films |
US6682842B1 (en) | 1999-07-31 | 2004-01-27 | The Regents Of The University Of California | Composite electrode/electrolyte structure |
US6605316B1 (en) * | 1999-07-31 | 2003-08-12 | The Regents Of The University Of California | Structures and fabrication techniques for solid state electrochemical devices |
CA2412426C (en) * | 2000-06-08 | 2007-09-04 | Superior Micropowders, Llc | Electrocatalyst powders, methods for producing powders and devices fabricated from same |
US20060135030A1 (en) * | 2004-12-22 | 2006-06-22 | Si Diamond Technology,Inc. | Metallization of carbon nanotubes for field emission applications |
US7504125B1 (en) * | 2001-04-27 | 2009-03-17 | Advanced Cardiovascular Systems, Inc. | System and method for coating implantable devices |
US6811741B2 (en) * | 2001-03-08 | 2004-11-02 | The Regents Of The University Of California | Method for making thick and/or thin film |
US20020127455A1 (en) * | 2001-03-08 | 2002-09-12 | The Regents Of The University Of California | Ceria-based solid oxide fuel cells |
US6803141B2 (en) * | 2001-03-08 | 2004-10-12 | The Regents Of The University Of California | High power density solid oxide fuel cells |
US6887361B1 (en) | 2001-03-22 | 2005-05-03 | The Regents Of The University Of California | Method for making thin-film ceramic membrane on non-shrinking continuous or porous substrates by electrophoretic deposition |
US6695920B1 (en) * | 2001-06-27 | 2004-02-24 | Advanced Cardiovascular Systems, Inc. | Mandrel for supporting a stent and a method of using the mandrel to coat a stent |
US8741378B1 (en) | 2001-06-27 | 2014-06-03 | Advanced Cardiovascular Systems, Inc. | Methods of coating an implantable device |
KR100519938B1 (en) * | 2001-11-01 | 2005-10-11 | 한국과학기술연구원 | Anode for Molten Carbonate Fuel Cell Coated by Porous Ceramic Films |
WO2003051529A1 (en) * | 2001-12-18 | 2003-06-26 | The Regents Of The University Of California | A process for making dense thin films |
EP1456900A4 (en) | 2001-12-18 | 2008-05-07 | Univ California | Metal current collect protected by oxide film |
NO20026107L (en) * | 2001-12-20 | 2003-06-23 | Rwe Schott Solar Gmbh | Process for forming a layer structure on a substrate |
US7232626B2 (en) * | 2002-04-24 | 2007-06-19 | The Regents Of The University Of California | Planar electrochemical device assembly |
KR100885696B1 (en) * | 2002-05-07 | 2009-02-26 | 더 리전트 오브 더 유니버시티 오브 캘리포니아 | Electrochemical cell stack assembly |
KR101089623B1 (en) * | 2002-10-04 | 2011-12-06 | 더 리전츠 오브 더 유니버시티 오브 캘리포니아 | Fluorine separation and generation device |
US7074276B1 (en) * | 2002-12-12 | 2006-07-11 | Advanced Cardiovascular Systems, Inc. | Clamp mandrel fixture and a method of using the same to minimize coating defects |
US7323209B1 (en) * | 2003-05-15 | 2008-01-29 | Advanced Cardiovascular Systems, Inc. | Apparatus and method for coating stents |
US8435694B2 (en) * | 2004-01-12 | 2013-05-07 | Fuelcell Energy, Inc. | Molten carbonate fuel cell cathode with mixed oxide coating |
US7422671B2 (en) * | 2004-08-09 | 2008-09-09 | United Technologies Corporation | Non-line-of-sight process for coating complexed shaped structures |
CA2627786C (en) * | 2004-11-30 | 2012-03-27 | The Regents Of The University Of California | Braze system with matched coefficients of thermal expansion |
EP1825541A4 (en) * | 2004-11-30 | 2010-01-13 | Univ California | Sealed joint structure for electrochemical device |
US7824466B2 (en) | 2005-01-14 | 2010-11-02 | Cabot Corporation | Production of metal nanoparticles |
WO2006076612A2 (en) * | 2005-01-14 | 2006-07-20 | Cabot Corporation | A process for manufacturing application specific printable circuits (aspc’s) and other custom electronic devices |
US20060163744A1 (en) * | 2005-01-14 | 2006-07-27 | Cabot Corporation | Printable electrical conductors |
DE602006017644D1 (en) * | 2005-01-14 | 2010-12-02 | Cabot Corp | SAFETY DEVICES AND USE AND MANUFACTURING METHOD THEREOF |
WO2006076606A2 (en) * | 2005-01-14 | 2006-07-20 | Cabot Corporation | Optimized multi-layer printing of electronics and displays |
WO2006076610A2 (en) * | 2005-01-14 | 2006-07-20 | Cabot Corporation | Controlling ink migration during the formation of printable electronic features |
WO2006076615A1 (en) * | 2005-01-14 | 2006-07-20 | Cabot Corporation | Ink-jet printing of compositionally no-uniform features |
US8383014B2 (en) | 2010-06-15 | 2013-02-26 | Cabot Corporation | Metal nanoparticle compositions |
US8167393B2 (en) * | 2005-01-14 | 2012-05-01 | Cabot Corporation | Printable electronic features on non-uniform substrate and processes for making same |
US20060190917A1 (en) * | 2005-01-14 | 2006-08-24 | Cabot Corporation | System and process for manufacturing application specific printable circuits (ASPC'S) and other custom electronic devices |
US7533361B2 (en) * | 2005-01-14 | 2009-05-12 | Cabot Corporation | System and process for manufacturing custom electronics by combining traditional electronics with printable electronics |
JP2012138371A (en) * | 2005-02-21 | 2012-07-19 | Dainippon Printing Co Ltd | Method for manufacturing solid oxide fuel cell |
JP4992206B2 (en) * | 2005-02-25 | 2012-08-08 | 大日本印刷株式会社 | Method for producing electrode layer for solid oxide fuel cell |
EP1875534A4 (en) * | 2005-04-21 | 2011-09-14 | Univ California | Precursor infiltration and coating method |
US7823533B2 (en) * | 2005-06-30 | 2010-11-02 | Advanced Cardiovascular Systems, Inc. | Stent fixture and method for reducing coating defects |
US7735449B1 (en) | 2005-07-28 | 2010-06-15 | Advanced Cardiovascular Systems, Inc. | Stent fixture having rounded support structures and method for use thereof |
US7867547B2 (en) | 2005-12-19 | 2011-01-11 | Advanced Cardiovascular Systems, Inc. | Selectively coating luminal surfaces of stents |
JP5532530B2 (en) * | 2006-02-23 | 2014-06-25 | 大日本印刷株式会社 | Method for producing solid oxide fuel cell |
US7985441B1 (en) | 2006-05-04 | 2011-07-26 | Yiwen Tang | Purification of polymers for coating applications |
US8069814B2 (en) | 2006-05-04 | 2011-12-06 | Advanced Cardiovascular Systems, Inc. | Stent support devices |
US20070298961A1 (en) * | 2006-06-22 | 2007-12-27 | Rice Gordon L | Method of producing electrodes |
CN101507352B (en) * | 2006-07-28 | 2013-09-18 | 加州大学评议会 | Joined concentric tubes |
EP3459645A1 (en) * | 2006-10-19 | 2019-03-27 | NanoMech, Inc. | Method for making coatings using ultrasonic spray deposition |
KR20100065296A (en) * | 2007-07-25 | 2010-06-16 | 더 리전트 오브 더 유니버시티 오브 캘리포니아 | High temperature electrochemical device with interlocking structure |
US9583778B2 (en) | 2007-08-03 | 2017-02-28 | Robert Bosch Gmbh | Chemically sintered composite electrodes and manufacturing processes |
US8361538B2 (en) | 2007-12-19 | 2013-01-29 | Abbott Laboratories | Methods for applying an application material to an implantable device |
US8211489B2 (en) * | 2007-12-19 | 2012-07-03 | Abbott Cardiovascular Systems, Inc. | Methods for applying an application material to an implantable device |
ATE540133T1 (en) * | 2008-02-04 | 2012-01-15 | Univ California | CU-BASED CERMET FOR HIGH TEMPERATURE FUEL CELLS |
US8163437B2 (en) * | 2008-03-25 | 2012-04-24 | Fuelcell Energy, Inc. | Anode with ceramic additives for molten carbonate fuel cell |
FI20080264L (en) * | 2008-04-03 | 2009-10-04 | Beneq Oy | Coating method and device |
MY147805A (en) * | 2008-04-18 | 2013-01-31 | Univ California | Integrated seal for high-temperature electrochemical device |
KR101110588B1 (en) | 2009-04-22 | 2012-02-15 | 한국세라믹기술원 | Method and Apparatus depositing trans-phase aerosol |
US20110209392A1 (en) * | 2010-02-26 | 2011-09-01 | Sharps Compliance, Inc. | Coated particulate and shaped fuels and methods for making and using same |
US8685433B2 (en) | 2010-03-31 | 2014-04-01 | Abbott Cardiovascular Systems Inc. | Absorbable coating for implantable device |
FR2960167B1 (en) | 2010-05-21 | 2013-02-08 | Centre Nat Rech Scient | METHOD FOR OBTAINING THIN LAYERS |
JP5912594B2 (en) * | 2011-02-03 | 2016-04-27 | モット コーポレイション | Sinter bonded porous metal coating |
US8652707B2 (en) | 2011-09-01 | 2014-02-18 | Watt Fuel Cell Corp. | Process for producing tubular ceramic structures of non-circular cross section |
US8585807B2 (en) | 2011-09-30 | 2013-11-19 | Uchicago Argonne, Llc | Low-cost method for fabricating palladium and palladium-alloy thin films on porous supports |
EP2750227B1 (en) | 2011-12-19 | 2016-11-30 | NGK Insulators, Ltd. | Air electrode material and solid oxide fuel cell |
WO2015054096A1 (en) * | 2013-10-08 | 2015-04-16 | Phillips 66 Company | Formation of solid oxide fuel cells by spraying |
JP6428636B2 (en) * | 2013-10-30 | 2018-11-28 | 株式会社ニコン | Thin film manufacturing method |
CN104868145A (en) * | 2015-04-02 | 2015-08-26 | 昆山艾可芬能源科技有限公司 | Preparation device and technology of solid oxide fuel cell coating |
CN106211610A (en) * | 2016-07-27 | 2016-12-07 | 无锡深南电路有限公司 | A kind of PCB circuit processing method and spraying equipment |
EP3512676A4 (en) | 2016-09-15 | 2020-02-12 | Mantle Inc. | System and method for additive metal manufacturing |
JP7080664B2 (en) * | 2018-02-16 | 2022-06-06 | 三菱重工業株式会社 | Fuel cell manufacturing method |
US10520923B2 (en) | 2018-05-22 | 2019-12-31 | Mantle Inc. | Method and system for automated toolpath generation |
KR20230164117A (en) | 2021-04-01 | 2023-12-01 | 테레써킷츠 코포레이션 | Assemblies used for embedding integrated circuit assemblies and their uses and methods of manufacturing the same |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4073999A (en) * | 1975-05-09 | 1978-02-14 | Minnesota Mining And Manufacturing Company | Porous ceramic or metallic coatings and articles |
JPS5931867A (en) * | 1982-08-17 | 1984-02-21 | Usui Internatl Ind Co Ltd | Formation of heat resistant and abrasion resistant coating layer on inside circumferential surface of metallic cylindrical body |
US4801411A (en) * | 1986-06-05 | 1989-01-31 | Southwest Research Institute | Method and apparatus for producing monosize ceramic particles |
US4745033A (en) * | 1987-03-24 | 1988-05-17 | Amax Inc. | Oxidation resistant coatings for molybdenum |
ES2034629T3 (en) * | 1988-05-24 | 1993-04-01 | Ceramesh Limited | COMPOUND MEMBRANES. |
DE68923000T2 (en) * | 1988-08-24 | 1995-11-02 | Asahi Glass Co Ltd | TRANSPARENT, CONDUCTIVE CERAMIC COATING FORMING LIQUID FOR COATING, BASE MATERIAL COATED WITH THIS TRANSPARENT, CONDUCTIVE CERAMIC AND PRODUCTION THEREOF AND USE OF THE CLEAR CONDUCTIVE BASE WITH TRANSPARENT. |
AU614435B2 (en) * | 1988-11-03 | 1991-08-29 | Mixalloy Limited | Improvements in the production of coated components |
US5034358A (en) * | 1989-05-05 | 1991-07-23 | Kaman Sciences Corporation | Ceramic material and method for producing the same |
US5851678A (en) * | 1995-04-06 | 1998-12-22 | General Electric Company | Composite thermal barrier coating with impermeable coating |
US6102656A (en) * | 1995-09-26 | 2000-08-15 | United Technologies Corporation | Segmented abradable ceramic coating |
US6447848B1 (en) * | 1995-11-13 | 2002-09-10 | The United States Of America As Represented By The Secretary Of The Navy | Nanosize particle coatings made by thermally spraying solution precursor feedstocks |
CN1074689C (en) * | 1996-04-04 | 2001-11-14 | E·O·帕通电子焊接研究院电子束工艺国际中心 | Method of producing on substrate of protective coatings with chemical composition and structure gradient across thickness and with top ceramic layer |
US6143432A (en) * | 1998-01-09 | 2000-11-07 | L. Pierre deRochemont | Ceramic composites with improved interfacial properties and methods to make such composites |
US5707715A (en) * | 1996-08-29 | 1998-01-13 | L. Pierre deRochemont | Metal ceramic composites with improved interfacial properties and methods to make such composites |
US5882368A (en) * | 1997-02-07 | 1999-03-16 | Vidrio Piiano De Mexico, S.A. De C.V. | Method for coating glass substrates by ultrasonic nebulization of solutions |
US5894403A (en) * | 1997-05-01 | 1999-04-13 | Wilson Greatbatch Ltd. | Ultrasonically coated substrate for use in a capacitor |
US6187453B1 (en) * | 1998-07-17 | 2001-02-13 | United Technologies Corporation | Article having a durable ceramic coating |
-
1999
- 1999-04-16 US US09/293,446 patent/US6358567B2/en not_active Expired - Fee Related
- 1999-12-08 EP EP19990968470 patent/EP1144726A1/en not_active Withdrawn
- 1999-12-08 JP JP2000591244A patent/JP2002533576A/en active Pending
- 1999-12-08 WO PCT/US1999/029104 patent/WO2000039358A1/en not_active Application Discontinuation
-
2002
- 2002-01-28 US US10/059,852 patent/US6846558B2/en not_active Expired - Fee Related
Cited By (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2380492A (en) * | 2001-09-05 | 2003-04-09 | Trw Ltd | Friction member with graded coating |
US20040121182A1 (en) * | 2002-12-23 | 2004-06-24 | Hardwicke Canan Uslu | Method and composition to repair and build structures |
US7455700B2 (en) | 2003-04-28 | 2008-11-25 | Battelle Memorial Institute | Method for creating solid oxide fuel cell anodes and electrodes for other electrochemical devices |
US7244526B1 (en) | 2003-04-28 | 2007-07-17 | Battelle Memorial Institute | Solid oxide fuel cell anodes and electrodes for other electrochemical devices |
US20070172719A1 (en) * | 2003-04-28 | 2007-07-26 | Meinhardt Kerry D | Solid oxide fuel cell anodes and electrodes for other electrochemical devices |
US7351491B2 (en) | 2003-04-28 | 2008-04-01 | Battelle Memorial Institute | Supporting electrodes for solid oxide fuel cells and other electrochemical devices |
EP1492178A2 (en) * | 2003-06-24 | 2004-12-29 | Hewlett-Packard Development Company, L.P. | Methods for applying electrodes or electrolytes to a substrate |
EP1492178A3 (en) * | 2003-06-24 | 2006-11-02 | Hewlett-Packard Development Company, L.P. | Methods for applying electrodes or electrolytes to a substrate |
WO2006024785A1 (en) * | 2004-08-03 | 2006-03-09 | Centre National De La Recherche Scientifique (C.N.R.S.) | Method for preparing supported electron- and ionic-oxygen-conducting ultra-thin dense membranes |
US9149750B2 (en) | 2006-09-29 | 2015-10-06 | Mott Corporation | Sinter bonded porous metallic coatings |
US20080081007A1 (en) * | 2006-09-29 | 2008-04-03 | Mott Corporation, A Corporation Of The State Of Connecticut | Sinter bonded porous metallic coatings |
US9670586B1 (en) | 2008-04-09 | 2017-06-06 | Fcet, Inc. | Solid oxide fuel cells, electrolyzers, and sensors, and methods of making and using the same |
US8623301B1 (en) | 2008-04-09 | 2014-01-07 | C3 International, Llc | Solid oxide fuel cells, electrolyzers, and sensors, and methods of making and using the same |
US11560636B2 (en) | 2010-02-10 | 2023-01-24 | Fcet, Inc. | Low temperature electrolytes for solid oxide cells having high ionic conductivity |
US12071697B2 (en) | 2010-02-10 | 2024-08-27 | Fcet, Inc. | Low temperature electrolytes for solid oxide cells having high ionic conductivity |
US10344389B2 (en) | 2010-02-10 | 2019-07-09 | Fcet, Inc. | Low temperature electrolytes for solid oxide cells having high ionic conductivity |
EP2750845B1 (en) * | 2011-09-01 | 2017-12-27 | Watt Fuel Cell Corp. | Process for producing tubular ceramic structures |
US9082619B2 (en) * | 2012-07-09 | 2015-07-14 | International Solar Electric Technology, Inc. | Methods and apparatuses for forming semiconductor films |
US9905871B2 (en) | 2013-07-15 | 2018-02-27 | Fcet, Inc. | Low temperature solid oxide cells |
US10707511B2 (en) | 2013-07-15 | 2020-07-07 | Fcet, Inc. | Low temperature solid oxide cells |
CN110545924A (en) * | 2017-04-13 | 2019-12-06 | 康宁股份有限公司 | coated strip |
US11498881B2 (en) | 2017-04-13 | 2022-11-15 | Corning Incorporated | Coating tape |
WO2018191352A1 (en) * | 2017-04-13 | 2018-10-18 | Corning Incorporated | Coating tape |
US20220314272A1 (en) * | 2019-06-03 | 2022-10-06 | Basf Coatings Gmbh | Method for applying embossed structures to coating media while pre-treating the embossing tool used therefor |
US11969755B2 (en) * | 2019-06-03 | 2024-04-30 | Basf Coatings Gmbh | Method for applying embossed structures to coating media while pre-treating the embossing tool used therefor |
CN111499407A (en) * | 2020-05-11 | 2020-08-07 | 浙江中诚环境研究院有限公司 | Coating process and coating device for flat-plate type ceramic separation membrane |
Also Published As
Publication number | Publication date |
---|---|
WO2000039358A1 (en) | 2000-07-06 |
US6358567B2 (en) | 2002-03-19 |
JP2002533576A (en) | 2002-10-08 |
EP1144726A1 (en) | 2001-10-17 |
US6846558B2 (en) | 2005-01-25 |
US20020086189A1 (en) | 2002-07-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6358567B2 (en) | Colloidal spray method for low cost thin coating deposition | |
US7422766B2 (en) | Method of fabrication of high power density solid oxide fuel cells | |
Will et al. | Fabrication of thin electrolytes for second-generation solid oxide fuel cells | |
JP2002533576A5 (en) | Colloidal treatment spraying method for effective plating adhesion and composition for forming a film | |
US20020127455A1 (en) | Ceria-based solid oxide fuel cells | |
US5585136A (en) | Method for producing thick ceramic films by a sol gel coating process | |
US6660090B2 (en) | Film or coating deposition on a substrate | |
EP1802783B1 (en) | Coating method | |
US7563503B2 (en) | Coatings, materials, articles, and methods of making thereof | |
EP1383940B1 (en) | Functional ceramic layers based on a support layer produced with crystalline nanoparticles | |
US20070180689A1 (en) | Nonazeotropic terpineol-based spray suspensions for the deposition of electrolytes and electrodes and electrochemical cells including the same | |
Madhuri | Thermal protection coatings of metal oxide powders | |
US6296910B1 (en) | Film or coating deposition on a substrate | |
CN102844461A (en) | Process for internally coating functional layers with through-hardened material | |
KR20130139665A (en) | Multi-component ceramic coating material for thermal spray and fabrication method and coating method thereof | |
JP2008514816A (en) | Manufacturing method of hermetic crystalline mullite layer using thermal spraying method | |
Gulyaev et al. | Microstructure formation properties of ZrO2 coating by powder, suspension and liquid precursor plasma spraying | |
Jaworek et al. | Electrostatic deposition of nanothin films on metal substrate | |
Pawłowski | Application of solution precursor spray techniques to obtain ceramic films and coatings | |
CN114231908A (en) | Composite coating, preparation method thereof and thermal barrier coating | |
Pham et al. | Colloidal spray method for low cost thin coating deposition | |
Akedo et al. | Fine patterning of ceramic thick layer on aerosol deposition by lift-off process using photoresist | |
Bohac et al. | Chemical spray deposition of ceramic films | |
Ma et al. | Study of unique microstructure in SPS ceramic nanocoatings | |
CN1227143A (en) | Method for high energy pulse electric depositing of ceramic coating |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE, CALI Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:PHAM, AI-QUOC;GLASS, ROBERT S.;LEE, TAE H.;SIGNING DATES FROM 19990421 TO 19990424;REEL/FRAME:009999/0217 Owner name: CALIFORNIA, UNIVERSITY OF, REGENTS OF, THE, CALIFO Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:PHAM, AI-QUOC;GLASS, ROBERT S.;LEE, TAE H.;REEL/FRAME:009999/0217;SIGNING DATES FROM 19990421 TO 19990424 |
|
AS | Assignment |
Owner name: ENERGY, U.S. DEPARTMENT OF, CALIFORNIA Free format text: CONFIRMATORY LICENSE;ASSIGNOR:CALIFORNIA, UNIVERSITY OF;REEL/FRAME:010934/0208 Effective date: 20000613 |
|
FPAY | Fee payment |
Year of fee payment: 4 |
|
AS | Assignment |
Owner name: LAWRENCE LIVERMORE NATIONAL SECURITY LLC, CALIFORN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:THE REGENTS OF THE UNIVERSITY OF CALIFORNIA;REEL/FRAME:021217/0050 Effective date: 20080623 |
|
FEPP | Fee payment procedure |
Free format text: PAT HOLDER NO LONGER CLAIMS SMALL ENTITY STATUS, ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: STOL); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
FPAY | Fee payment |
Year of fee payment: 8 |
|
REMI | Maintenance fee reminder mailed | ||
LAPS | Lapse for failure to pay maintenance fees | ||
STCH | Information on status: patent discontinuation |
Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
|
FP | Lapsed due to failure to pay maintenance fee |
Effective date: 20140319 |