US11483926B2 - Ceramic circuit board and production method therefor - Google Patents

Ceramic circuit board and production method therefor Download PDF

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Publication number
US11483926B2
US11483926B2 US16/630,232 US201816630232A US11483926B2 US 11483926 B2 US11483926 B2 US 11483926B2 US 201816630232 A US201816630232 A US 201816630232A US 11483926 B2 US11483926 B2 US 11483926B2
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Prior art keywords
braze material
powder
ceramic
bonding
substrate
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US16/630,232
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US20200163210A1 (en
Inventor
Akimasa Yuasa
Yusaku Harada
Takahiro Nakamura
Shuhei MORITA
Kouji Nishimura
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Denka Co Ltd
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Denka Co Ltd
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Assigned to DENKA COMPANY LIMITED reassignment DENKA COMPANY LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MORITA, SHUHEI, NAKAMURA, TAKAHIRO, NISHIMURA, KOUJI, YUASA, AKIMASA, HARADA, YUSAKU
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/388—Improvement of the adhesion between the insulating substrate and the metal by the use of a metallic or inorganic thin film adhesion layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/19—Soldering, e.g. brazing, or unsoldering taking account of the properties of the materials to be soldered
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
    • B23K35/0244—Powders, particles or spheres; Preforms made therefrom
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • B23K35/3006—Ag as the principal constituent
    • C—CHEMISTRY; METALLURGY
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    • C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/006—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of metals or metal salts
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    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C5/00—Alloys based on noble metals
    • C22C5/06—Alloys based on silver
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C5/00—Alloys based on noble metals
    • C22C5/06—Alloys based on silver
    • C22C5/08—Alloys based on silver with copper as the next major constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/12—Mountings, e.g. non-detachable insulating substrates
    • H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
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    • H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
    • H01L23/15—Ceramic or glass substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/09—Use of materials for the conductive, e.g. metallic pattern
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/102—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by bonding of conductive powder, i.e. metallic powder
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/381—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the substrate
    • C—CHEMISTRY; METALLURGY
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    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/125—Metallic interlayers based on noble metals, e.g. silver
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    • C04B2237/12—Metallic interlayers
    • C04B2237/126—Metallic interlayers wherein the active component for bonding is not the largest fraction of the interlayer
    • C04B2237/127—The active component for bonding being a refractory metal
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0271—Arrangements for reducing stress or warp in rigid printed circuit boards, e.g. caused by loads, vibrations or differences in thermal expansion
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    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
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    • H05K2203/0278—Flat pressure, e.g. for connecting terminals with anisotropic conductive adhesive
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    • H05K2203/0756—Uses of liquids, e.g. rinsing, coating, dissolving
    • H05K2203/0769—Dissolving insulating materials, e.g. coatings, not used for developing resist after exposure
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    • H05K2203/0779—Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
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    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/067—Etchants
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/24—Reinforcing the conductive pattern
    • H05K3/244—Finish plating of conductors, especially of copper conductors, e.g. for pads or lands
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/26—Cleaning or polishing of the conductive pattern
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • H05K3/282—Applying non-metallic protective coatings for inhibiting the corrosion of the circuit, e.g. for preserving the solderability

Definitions

  • the present invention relates to a ceramic circuit substrate and a production method therefor.
  • ceramic circuit substrates are used. These ceramic circuit substrates have a metal circuit board bonded, with a braze material, to the surface of a ceramic substrate composed of a ceramic such as alumina, beryllia, silicon nitride, or aluminum nitride, and have semiconductor elements further mounted at prescribed positions on the metal circuit board.
  • a ceramic substrate composed of a ceramic such as alumina, beryllia, silicon nitride, or aluminum nitride, and have semiconductor elements further mounted at prescribed positions on the metal circuit board.
  • Patent Document 1 proposes a structure which improves the thermal cycling properties of a ceramic circuit substrate by controlling the length of a braze material that protrudes from the bottom surface of a metal plate so as to be longer than 30 ⁇ m and no more than 250 ⁇ m, and preferably 50 ⁇ m to 200 ⁇ m.
  • Patent Document 2 proposes a method for controlling the structure of a portion protruding from a braze material layer of a ceramic circuit substrate so that Ag-rich phases occupy a larger area therein than do Cu-rich phases, thereby suppressing dissolution of the braze material protruding portion due to etching and preventing stress relaxation effects of the braze material layer protruding portion from decreasing.
  • Patent Document 3 proposes a method for controlling the thickness and length of a braze material layer so as to be caused to protrude at a fixed ratio, thereby improving the thermal cycling properties of a ceramic circuit substrate.
  • Patent Document 1 JP 2003-112980 A
  • Patent Document 2 JP 2005-268821 A
  • Patent Document 3 WO 2107/056360 A
  • thermal cycling tests formerly involved one cycle being a cycle for increasing/decreasing the temperature from cooling at ⁇ 40° C. for 15 minutes, keeping at room temperature for 15 minutes, heating at 125° C. for 15 minutes, and keeping at room temperature for 15 minutes. From these tests, endurance properties are demanded under harsh thermal cycling conditions wherein one cycle has now changed to a cycle for increasing/decreasing the temperature from cooling at ⁇ 55° C. for 15 minutes, keeping at room temperature for 15 minutes, heating at 175° C. for 15 minutes, and keeping at room temperature for 15 minutes.
  • the present invention addresses the problem of providing a ceramic circuit substrate having high bonding properties and excellent thermal cycling resistance properties, and a production method therefor.
  • the present inventors performed diligent investigations in order to achieve the objective mentioned above. As a result thereof, it was discovered that by making Ag-rich phases continuous on the circuit pattern side from the outer edge of the braze material protruding portion of the ceramic circuit substrate and reducing interfaces between Ag-rich phases and Cu-rich phases, the thermal cycling resistance properties of the ceramic circuit substrate improves.
  • the present invention was completed on the basis of these discoveries.
  • the present invention relates to the following.
  • a ceramic circuit substrate having high bonding properties and excellent thermal cycling resistance properties it is possible to provide: a ceramic circuit substrate in which the bond void ratio is 1.0% or less and the crack ratio after 2,500 cycles in thermal cycling tests from ⁇ 55° C. to 175° C. is less than 2.0%; and a production method therefor.
  • FIG. 1 shows an example of a cross-sectional photograph of a ceramic circuit substrate in which Ag-rich phases are continuous for 300 ⁇ m or more, towards the inside of a circuit pattern, from an outer edge of a protruding portion formed by a braze material layer.
  • FIG. 2 shows an enlarged photograph for explaining Ag-rich phases and Cu-rich phases.
  • FIG. 3 shows an example of a cross-sectional photograph of a ceramic circuit substrate in which Ag-rich phases are not continuous for 300 ⁇ m or more, towards the inside of a circuit pattern, from an outer edge of a protruding portion formed by a braze material layer.
  • the ceramic circuit substrate according to the present embodiment is a ceramic circuit substrate that has, in a bonding interface of a cross section of the ceramic circuit substrate where a protruding portion is formed by a braze material layer that comprises Ag, Cu, Ti, and Sn or In and protrudes from the outer edge of a circuit pattern, Ag-rich phases that are continuous for 300 ⁇ m or more, towards the inside of the circuit pattern, from the outer edge of the protruding portion formed by the braze material layer, and a bonding void ratio of 1.0% or less.
  • a braze material layer that comprises Ag, Cu, Ti, and Sn or In and protrudes from the outer edge of a circuit pattern
  • Ag-rich phases that are continuous for 300 ⁇ m or more, towards the inside of the circuit pattern, from the outer edge of the protruding portion formed by the braze material layer, and a bonding void ratio of 1.0% or less.
  • the ceramic circuit substrate has a circuit pattern provided on a ceramic substrate with a braze material layer interposed therebetween.
  • the ceramic substrate according to the embodiment is not particularly limited, and it is possible to use a nitride ceramic such as silicon nitride or aluminum nitride, an oxide ceramic such as aluminum oxide or zirconium oxide, a carbide ceramic such as silicon carbide, or a boride ceramic such as lanthanum boride.
  • a non-oxide ceramic such as aluminum nitride or silicon nitride is favorable for bonding a metal plate to a ceramic substrate by an active metal method, and furthermore, a silicon nitride substrate is preferable from the perspective of excellent mechanical strength and fracture toughness.
  • the thickness of the ceramic substrate is not particularly limited, but is generally about 0.1 to 3.0 mm.
  • the thickness is preferably 0.2 to 1.2 mm or less, and more preferably 0.25 to 1.0 mm or less.
  • the braze material layer is configured from a material comprising Ag, Cu, Ti, and Sn or In.
  • the braze material may be formed by using Ag powder, Cu powder, and Sn powder or In powder.
  • the Sn or In contained in the braze material powder is a component for making the contact angle of the braze material with respect to the ceramic substrate smaller, and improving the wettability of the braze material. If the content thereof is too low, the wettability with respect to the ceramic substrate can decrease and lead to bonding defects, and if the content thereof is too high, Ag-rich phases in the braze material layer may be rendered non-continuous due to Cu-rich phases, this may become an origin of breaking in the braze material, and there is a possibility of the thermal cycling properties of the ceramic circuit substrate being reduced.
  • the blend ratios of the Ag powder, the Cu powder, and the Sn powder or the In powder are: 85.0 to 95.0 parts by mass, preferably 88.0 to 92.0 parts by mass, and more preferably 88.5 to 91.0 parts by mass of Ag powder; 5.0 to 13.0 parts by mass, preferably 6.0 to 12.0 parts by mass, and more preferably 7.0 to 11.0 parts by mass of Cu powder; and 0.4 to 2.0 parts by mass, and preferably 0.5 to 1.5 parts by mass of Sn powder or In powder.
  • An Ag powder having a specific surface area of 0.1 to 0.6 m 2 /g, and preferably 0.3 to 0.5 m 2 /g, may be used as the Ag powder.
  • the specific surface area By setting the specific surface area to be 0.6 m 2 /g or less, it is possible to prevent the occurrence of aggregates and oxidation concentration from becoming high, which occur due to using an Ag powder having a large specific surface area. It is thus possible to prevent the generation of bonding defects. Further, by setting the specific surface area to be 0.1 m 2 /g or more, it is possible to suppress the formation of bonding voids in the ceramic circuit substrate due to Ag powder not completely dissolving, which occurs due to using an Ag powder having a small specific surface area.
  • the specific surface area can be measured by using a gas adsorption method.
  • powders produced by an atomization process or a wet reduction process are common.
  • the average particle diameter D50, in a number-based particle size distribution measured using laser diffraction, of the Ag powder is preferably 1.0 to 10.0 ⁇ m, and more preferably 2.0 to 4.0 ⁇ m.
  • a Cu powder having a specific surface area of 0.1 to 1.0 m 2 /g, preferably 0.2 to 0.5 m 2 /g, and/or an average particle diameter D50, in a volume-based particle size distribution measured using laser diffraction, of 0.8 to 8.0 ⁇ m, and preferably 2.0 to 4.0 ⁇ m may be used.
  • the specific surface area By setting the specific surface area to be 1.0 m 2 /g or less, or the average particle diameter D50 to be 0.8 ⁇ m or more, it is possible to prevent the oxygen amount in the Cu powder from becoming high, which occurs due to using a fine Cu powder, and it is, thereby, possible to prevent the generation of bonding defects. Further, by setting the specific surface area to be 0.1 m 2 /g or more, or the average particle diameter D50 to be 8.0 ⁇ m or less, it is possible to prevent the Ag-rich phases of the braze material layer from being rendered non-continuous by Cu-rich phases, which occurs due to using a large Cu powder.
  • a powder having a specific surface area of 0.1 to 1.0 m 2 /g and/or an average particle diameter D50 of 0.8 to 10.0 ⁇ m may be used.
  • the specific surface area to be 1.0 m 2 /g or less, or the average particle diameter D50 to be 0.8 ⁇ m or more, it is possible to prevent the oxygen amount in the Sn powder from becoming high, which occurs due to using a fine powder, and it is thus possible to prevent the generation of bonding defects.
  • the specific surface are to be 0.1 m 2 /g or more, or the average particle diameter D50 to be 8.0 ⁇ m or more, it is possible to prevent the Sn powder or In powder from dissolving in the Ag powder during heating in the bonding step, which occurs due to using a large Si powder or In powder, and thereby generating coarse bonding voids in portions where the Sn powder or In powder is present. As a result thereof, it is possible to configure a ceramic circuit substrate having higher bonding properties.
  • the abovementioned specific surface area is a value measured using a gas adsorption method.
  • titanium is used as the active metal added to the braze material blend mentioned above for its high reactivity with aluminum nitride substrates and silicon nitride substrates, and for its ability to make the bonding strength extremely high.
  • the added amount of Ti with respect to 100 parts by mass, in total, of the Ag powder, the Cu powder, and the Si powder or In powder is preferably 1.5 to 5.0 parts by mass, and more preferably 2.0 to 4.0 parts by mass.
  • the content of Ti is 5.0 parts by mass or less, it is possible to prevent the thermal cycling properties of the ceramic circuit substrate from being reduced due to the Ag-rich phases being rendered non-continuous and becoming an origin of breaking in the braze material layer, which occurs due to a large amount of unreacted Ti remaining. As a result thereof, thermal cycling properties can be further enhanced.
  • a preferred method for mixing the braze material raw materials is blending the metal powders, an organic solvent, and a binder, and rendering to a paste by mixing using a grinding mixer, a planetary centrifugal mixer, a planetary mixer, a three-roll mill, or the like.
  • a grinding mixer a planetary centrifugal mixer, a planetary mixer, a three-roll mill, or the like.
  • methyl cellosolve, ethyl cellosolve, isophorone, toluene, ethyl acetate, terpineol, diethylene glycol monobutyl ether, texanol, and the like are used as the organic solvent, and a polymerized compound such as polyisobutyl methacrylate, ethyl cellulose, methyl cellulose, or an acrylic resin, etc. is used as the binder.
  • a roll coating method, a screen printing method, or a transfer method, etc. may be used as a method for coating both surfaces of the ceramic substrate with the braze material paste, but in order to coat the braze material uniformly, a screen printing method is preferred.
  • a screen printing method in order to coat the braze material paste uniformly, it is preferable to control the viscosity of the braze material paste to be 5 to 20 Pa ⁇ s.
  • the circuit pattern is not particularly limited and may be formed from a copper plate, for example. Pure copper is preferable as the material used in the copper plate.
  • the thickness of the copper plate is not particularly limited, but is generally 0.1 to 1.5 mm. In particular, in view of the heat dissipation properties, the thickness is preferably 0.3 mm or more, and more preferably 0.5 mm or more.
  • the circuit pattern may be formed, after bonding the metal plate (for example, a copper plate) on the ceramic substrate using the braze material, by forming an etching mask and carrying out an etching process.
  • the metal plate for example, a copper plate
  • the bonding between the ceramic substrate and the metal plate preferably involves bonding in a vacuum or an inert atmosphere such as nitrogen or argon at a temperature of 770 to 900° C. and for a time of 10 to 60 minutes, and more preferably bonding at a temperature of 790 to 900° C. and for a time of 10 to 60 minutes. Further, bonding at a temperature of 770 to 900° C. and for a time of 10 to 40 minutes is also preferred. Bonding may also be performed at a temperature of 775 to 820° C. and for a time of 10 to 30 minutes. By setting the bonding temperature to be 770° C.
  • the bonding temperature to be 900° C. or lower and the retention time to be 60 minutes or shorter, it is possible to enhance the continuity of the Ag-rich phases and it is also possible to prevent thermal stress caused by the thermal expansion coefficient difference at the time of bonding from increasing, and thus the reliability of the ceramic circuit substrate can be further improved.
  • an etching mask for forming a circuit pattern on the circuit substrate it is possible to employ a general process such as a photographic development method (photo resist method), a screen printing method, or an inkjet printing method.
  • An etching process is carried out on the copper plate in order to form a circuit pattern.
  • the etching solution there are also no particular restrictions on the etching solution, and for the etching solution used to etch the copper circuit, it is possible to use a commonly used ferric chloride solution or cupric chloride solution, sulfuric acid, hydrogen peroxide water, or the like, among which a ferric chloride solution and a cupric chloride solution are preferred.
  • a ferric chloride solution and a cupric chloride solution are preferred.
  • side surfaces of the copper circuit may also be inclined.
  • a ceramic circuit substrate from which unnecessary copper circuit portions have been removed by etching has the coated braze material, and alloy layers, nitride layers, and the like thereof still remaining, and it is common to remove these by using a solution containing an aqueous ammonium halide solution, an inorganic acid such as sulfuric acid or nitric acid, or hydrogen peroxide water.
  • a solution containing an aqueous ammonium halide solution, an inorganic acid such as sulfuric acid or nitric acid, or hydrogen peroxide water By adjusting conditions such as etching time, temperature, and spray pressure, it is possible to adjust the length and thickness of the braze material protruding portion.
  • the method for stripping the etching mask after circuit formation is not particularly limited and a method of immersion in an alkaline aqueous solution is common.
  • Ni plating Ni alloy plating, Au plating, or an anti-corrosion treatment.
  • the plating step is carried out using a method of normal electroless plating using a chemical solution containing hypophosphite as an Ni—P electroless plating solution or a method for electroplating by causing an electrode to come into contact with the pattern.
  • an anti-corrosion treatment to be carried out using a benzotriazole-based compound.
  • the ceramic circuit substrate has a protruding portion formed thereon by the braze material layer protruding from the outer edge of the circuit pattern.
  • the protruding portion is described with reference to FIGS. 1 and 2 .
  • FIG. 1 shows an enlarged photograph of a bonding cross section in one example of a ceramic circuit substrate according to the present embodiment.
  • This ceramic circuit substrate has a circuit pattern (copper circuit portion) 1 formed on a ceramic substrate (silicon nitride substrate) 2 , with a braze material layer 7 interposed therebetween. A portion of the braze material layer 7 protrudes from the outer edge of the circuit pattern 1 and forms a protruding portion 4 .
  • the thickness of the braze material protrusion is 8 ⁇ m to 30 ⁇ m and the length thereof is 40 ⁇ m to 150 ⁇ m.
  • the thickness of the braze material protrusion is 13 ⁇ m to 23 ⁇ m and the length of the protrusion is 50 ⁇ m to 100 ⁇ m.
  • the length of the braze material protrusion is 150 ⁇ m or less, it is also possible to configure the outer dimensions of a substrate so as to be an acceptable size for design even given the recent market trends demanding products be made remarkably light, thin, short, and small.
  • the braze material layer has Ag-rich phases which are formed continuously for 300 ⁇ m or more, and preferably 400 ⁇ m or more, towards the inside, from the outer edge of the protruding portion, along the bonding interface between the ceramic substrate and the circuit pattern 1 .
  • “Ag-rich phases” means phases formed from an Ag solid solution and predominantly comprises Ag.
  • Predominantly means being 80% or more as a quantitative analysis using an electron probe micro-analyzer (EPMA).
  • the Ag-rich phases contain Sn or In and Ti, and Cu may be included as a solid solution.
  • phases observed as a white color when observed using a scanning electron microscope are referred to as “Ag-rich phases” and phases observed as a black color are referred to as “Cu-rich phases”.
  • “Ag-rich phases formed continuously for 300 ⁇ m or more” means that phases observed as a white color when observed using a scanning electron microscope are formed over 300 ⁇ m continuously (without any breaks) from the braze material protruding portion outer edge.
  • the braze material layer 7 is configured from white-colored Ag-rich phases 3 and black-colored Cu-rich phases 6 . Black-colored Cu-rich phases 6 may be included in the Ag-rich phases 3 , but as long as the white-colored portion is not separated by any breaks, the meaning of “formed continuously” holds.
  • the white-colored Ag-rich phases 3 are formed over at least 300 ⁇ m without any breaks therein.
  • tiny black colors are observed in the white-colored Ag-rich phases, but the white-colored Ag-rich phases are formed continuously without being separated by any breaks.
  • the white-colored Ag-rich phases are separated by a break at a location less than 100 ⁇ m from a braze material protruding portion outer edge 5 , and a location configured from Cu-rich phases 6 alone appears (an Ag-rich phase broken portion).
  • the Ag-rich phases 3 are formed continuously for 300 ⁇ m or more from the braze material protruding portion outer edge 5 and therefore, even under the harsher conditions of the thermal cycling tests, there is no breaking of the bonding interface between the Ag-rich phases and the Cu-rich phases near the braze material protruding portion (in a range of 300 ⁇ m or less from the protruding portion outer edge 5 ). As a result thereof, it is possible to configure a ceramic circuit substrate having excellent thermal cycling resistance properties.
  • a circuit-forming metal plate was placed over one surface of the silicon nitride substrate and a heat dissipation plate-forming metal plate (both being C1020 oxygen-free copper plates having a thickness of 0.8 mm and a purity of 99.60%) was placed over the other surface, and these were bonded under conditions of 830° C. for 30 minutes in a vacuum of 1.0 ⁇ 10 ⁇ 3 Pa or lower.
  • An etching resist was printed on the bonded copper plates and the copper plates were etched with a cupric chloride solution to form a circuit pattern.
  • braze material layers and nitride layers were removed with an ammonium fluoride/hydrogen peroxide solution, and a protruding portion having a braze material protrusion length of 29 ⁇ m and a thickness of 5 ⁇ m was formed.
  • a pre-treatment of degreasing and chemical polishing was performed and then an anti-corrosion treatment was carried out using a benzotriazole-based compound.
  • the bonding void ratio of the ceramic circuit substrate was computed by measuring the area of bonding voids observed by an ultrasonic flaw detector (ES5000, manufactured by Hitachi Power Solutions Co., Ltd.) and dividing this value by the area of the copper circuit pattern.
  • the bond structure of a cross section inside the circuit pattern from the braze material protruding portion outer edge in the ceramic circuit substrate was observed in reflected-electron images using a scanning electron microscope (SU6600, manufactured by Hitachi High-Technologies Corporation), with phases observed as a white color in the braze material layer being defined as Ag-rich phases, and phases observed as a black color being defined as Cu-rich phases.
  • a scanning electron microscope (SU6600, manufactured by Hitachi High-Technologies Corporation)
  • phases observed as a white color in the braze material layer being defined as Ag-rich phases
  • phases observed as a black color being defined as Cu-rich phases.
  • the continuity of the Ag-rich phases was confirmed by observing the inside of the circuit pattern from the braze material protruding portion outer edge in four fields of view at a 200-times magnification, the fields or view being 400 ⁇ m long and 600 ⁇ m wide.
  • the braze material protruding portion in a cross section of a circuit pattern corner section in the ceramic circuit substrate was observed in reflected-electron images using a scanning electron microscope (SU6600, manufactured by Hitachi High-Technologies Corporation) in five fields of view at a 200-times magnification, the fields of view being 400 ⁇ m long and 600 ⁇ m wide.
  • a scanning electron microscope SU6600, manufactured by Hitachi High-Technologies Corporation
  • an average of the maximum thickness and the minimum thickness for each field of view was determined, and the average value of the five fields of view was deemed to be the thickness of the braze material layer.
  • a distance between the copper circuit pattern outer edge and the braze material protruding portion outer edge was determined for each field of view, and the average value of the five fields of view was deemed to be the length of the braze material layer.
  • a fabricated ceramic circuit substrate was repeatedly tested over 2,500 cycles in thermal cycling resistance tests wherein each cycle involved setting the temperature so as to change between ⁇ 55° C. for 15 minutes, 25° C. for 15 minutes, 175° C. for 15 minutes, and 25° C. for 15 minutes. Thereafter, the metal plate and the braze material layer were stripped with iron chloride and an ammonium fluoride/hydrogen peroxide etching solution, and the area of cracks generated at the surface of the ceramic substrate was computed by using a scanner to input an image at a resolution of 600 dpi ⁇ 600 dpi, using the image analysis software GIMP2 (threshold value 140) to digitize the image, and then computing the crack area. This was divided by the copper circuit pattern area to determine the crack ratio.
  • Ceramic circuit substrates were obtained in the same manner as Example 1 with the exception that Sn powder was not used in the braze material used for bonding, the braze material blend and bonding conditions shown in Table 2 were set, and the length and thickness of the protruding portion were set as in Table 4. The various kinds of measurements and evaluations were also carried out in the same manner as in Example 1. The results are shown in Table 4.
  • Ceramic circuit substrates were obtained in the same manner as in Example 5 with the exception that the braze material blend and bonding conditions shown in Table 2 were used, and the length and thickness of the protruding portion were set as in Table 4. The various kinds of measurements and evaluations were also carried out in the same manner as in Example 5. The results are shown in Table 4.
  • Ceramic circuit substrates were obtained in the same manner as in Example 5 with the exception that the braze material blend and bonding conditions shown in Table 2 were used, and the length and thickness of the protruding portion were set as in Table 4. The various kinds of measurements and evaluations were also carried out in the same manner as in Example 5. The results are shown in Table 4.
  • Ceramic circuit substrates were obtained in the same manner as in Example 5 with the exception that the braze material blend and bonding conditions shown in Table 2 were used, and the length and thickness of the protruding portion were set as in Table 4. The various kinds of measurements and evaluations were also carried out in the same manner as in Example 5. The results are shown in Table 4.
  • Ceramic circuit substrates were obtained in the same manner as in Example 1 with the exception that the braze material blend and bonding conditions shown in Table 2 were used, and the length and thickness of the protruding portion were set as in Table 4. The various kinds of measurements and evaluations were also carried out in the same manner as in Example 1. The results are shown in Table 4.
  • Example 1 89.5 9.5 1.0 — 3.5 830 30
  • Example 2 88.5 9.5 2.0 — 3.5 830 30
  • Example 3 89.5 9.5 1.0 — 3.5 860 30
  • Example 4 89.5 9.5 1.0 — 3.5 830 30
  • Example 5 89.0 9.5 — 1.5 3.5 825 30
  • Example 6 89.5 9.5 1.0 — 3.5 830 30
  • Example 7 89.5 9.5 1.0 — 3.5 830 30
  • Example 9 93.0 5.5 1.5 — 3.5 810 40
  • Example 10 85.0 13.0 2.0 — 3.5 800 30
  • Example 11 85.0 13.0 — 2.0 3.5 800 30
  • Example 12 89.5 9.5 1.0 — 3.5 860 60
  • Example 13 89.5 9.5 1.0 — 3.5 890 30
  • the Ag-rich phases were continuous for 300 ⁇ m or more, towards the inside of the circuit pattern, from the outer edge of the protruding portion formed by the braze material layer, and the crack ratio after thermal cycling tests was 2.0% or less.
  • the crack ratio becomes 1.5% or less, and by satisfying both of the foregoing conditions, the crack ratio becomes 1.0% or less.

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