US11371843B2 - Integration of photonics optical gyroscopes with micro-electro-mechanical sensors - Google Patents

Integration of photonics optical gyroscopes with micro-electro-mechanical sensors Download PDF

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US11371843B2
US11371843B2 US17/365,331 US202117365331A US11371843B2 US 11371843 B2 US11371843 B2 US 11371843B2 US 202117365331 A US202117365331 A US 202117365331A US 11371843 B2 US11371843 B2 US 11371843B2
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waveguide
coil
mems
photonics chip
gap
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US20220003551A1 (en
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Avi Feshali
Mike Horton
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Anello Photonics Inc
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Priority to US17/365,331 priority Critical patent/US11371843B2/en
Priority to CN202180047537.1A priority patent/CN115812170A/zh
Priority to JP2022581431A priority patent/JP2023533231A/ja
Priority to PCT/US2021/040286 priority patent/WO2022006516A1/fr
Priority to EP21833474.6A priority patent/EP4176296A1/fr
Publication of US20220003551A1 publication Critical patent/US20220003551A1/en
Priority to US17/850,853 priority patent/US11493343B2/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58—Turn-sensitive devices without moving masses
    • G01C19/64—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
    • G01C19/72—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers
    • G01C19/721—Details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12061—Silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12138—Sensor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections

Definitions

  • the present disclosure relates to various structures and fabrication methods for integrating photonics-based optical gyroscopes with micro-electro-mechanical systems (MEMS)-based sensors on a same chip.
  • this disclosure relates to a photonics integrated circuit (PIC) (also referred to as integrated photonics chip in the claims) with a MEMS-based sensor integrated monolithically to the chip.
  • PIC photonics integrated circuit
  • Gyroscopes are sensors that can measure angular velocity. Gyroscopes can be mechanical or optical, and can vary in precision, performance cost and size. Mechanical gyroscopes based on Coriolis effect typically have lower cost, but cannot deliver a very high performance, and are susceptible to measurement errors induced by temperature, vibration and electromagnetic interference (EMI). Optical gyroscopes typically have the highest performance and rely on interferometric measurements based on the Sagnac effect (a phenomenon encountered in interferometry that is elicited by rotation). Since optical gyroscopes do not have any moving parts, they have advantages over mechanical gyroscopes as they can withstand effects of shock, vibration and temperature variation much better than the mechanical gyroscopes with moving parts.
  • EMI temperature, vibration and electromagnetic interference
  • the most common optical gyroscope is the fiber optical gyroscope (FOG). Construction of a FOG typically involves a long loop (the loop may constitute a coil comprising several turns or a fiber spool) of polarization-maintaining (PM) fiber. Laser light is launched into both ends of the PM fiber traveling in different directions. If the fiber loop/coil is rotating, the optical beams experience different optical path lengths with respect to each other. By setting up an interferometric system, one can measure the small path length difference that is proportional to the area of the enclosed loop and the angular velocity of the rotating coil.
  • FOG fiber optical gyroscope
  • FOGs can have very high precision, but at the same time, they are of large dimension, are very expensive, and are hard to assemble due to the devices being built based on discrete optical components that need to be aligned precisely. Often, manual alignment is involved, which is hard to scale up for volume production.
  • the present disclosure provides a solution to this problem, as described further below.
  • a plurality of gyroscopes and other sensors may be packaged together as an Inertial Measurement Unit (IMU) in a moving object to sense various motion parameters along the X, Y, and Z axes.
  • IMU Inertial Measurement Unit
  • a 6-axis IMU may have 3-axis accelerometers and 3-axis gyroscopes packaged together to measure an absolute spatial displacement of the moving object.
  • Applications of IMUs include, but are not limited to, military maneuvers (e.g., by fighter jets, submarines), commercial aircraft/drone navigation, robotics, autonomous vehicle navigation, virtual reality, augmented reality, gaming etc.
  • aspects of the present disclosure are directed to monolithically integrating an optical gyroscope fabricated on a planar silicon platform as a photonic integrated circuit with a MEMS accelerometer on the same die.
  • the accelerometer can be controlled by electronic circuitry that controls the optical gyroscope.
  • Gaps may be introduced between adjacent waveguide turns to reduce cross-talk and improve sensitivity and packing density of the optical gyroscope.
  • an integrated photonics chip comprising: a waveguide coil comprising a plurality of waveguide turns looping around a central area enclosed by the waveguide coil, each waveguide turn being parallel to adjacent waveguide turns, wherein the waveguide coil is used as a rotational sensing element of an optical gyroscope; and, a micro-electro-mechanical-systems (MEMS)-based motion sensing device monolithically integrated in the central area enclosed by the waveguide coil, wherein the waveguide coil and the MEMS accelerometer are fabricated on a common platform.
  • MEMS micro-electro-mechanical-systems
  • the optical gyroscope and the MEMS-based motion sensing device are packaged together as a modularized integrated inertial measurement unit (IMU).
  • IMU integrated inertial measurement unit
  • the MEMS-based motion sensing device provides coarse rotational sensing reading for all axes of motion, and the optical gyroscope can provide a higher-precision rotational sensing reading for one or more selected axes of motion.
  • the MEMS-based motion sensing device can also comprise an accelerometer for one or more axes of motion.
  • the MEMS device can be a six-axis gyroscope and accelerometer.
  • the common platform of the integrated photonics chip can be a silicon photonics platform, wherein each waveguide turn comprises a waveguide core sandwiched between an upper cladding and a lower cladding.
  • the waveguide core comprises silicon nitride and the upper cladding and lower cladding comprise oxide.
  • Structural modification can be introduced on either side of each waveguide turn to reduce crosstalk between the adjacent waveguide turns, thereby increasing a spatial density of waveguide turns that can be fabricated within a predetermined area of the integrated photonics chip.
  • the predetermined area may depend on an exposure field of a reticle used to fabricate the waveguide coil and the MEMS-based motion sensing device. Increasing spatial density of waveguide turns increases the central area enclosed within the waveguide coil, as well as increases a number of waveguide turns enclosing the central area, thereby increasing sensitivity of the rotational sensing element.
  • the structural modification may comprise a gap, wherein the gap comprises an air gap, a gap filled with metal, or, a gap filled with an inert gas or liquid.
  • the gap is in the form of a high-aspect-ratio rectangular slit or trench with a longitudinal dimension of the gap being substantially higher than a lateral dimension of the gap, such that the gap extends substantially above and below the waveguide core along the longitudinal direction.
  • Fabricating the MEMS-based motion sensing device further comprises: depositing and patterning electrodes on top of the etch-stop layer in the designated central area; depositing and patterning a first sacrificial layer on top of the etch-stop layer and the patterned electrodes; depositing and patterning a structural layer on top of the patterned sacrificial layer and the patterned electrodes; depositing and patterning a second sacrificial layer on top of the patterned structural layer; patterning the structural layer to create columns as parts of the MEMS-based motion sensing device, wherein the second sacrificial layer also gets patterned on top of the columns; and, removing the first and the second sacrificial layers, thereby creating a suspending structure that acts as a motion sensing element of the MEMS-based device.
  • the method may further comprise forming gaps on either side of each waveguide turn to reduce crosstalk between the adjacent waveguide turns, thereby increasing a spatial density of waveguide turns that can be fabricated within a predetermined area of the integrated photonics chip.
  • the integrated photonics chip can have multiple layers or planes, and portions of the photonics components can be distributed among the multiple planes. This way the total footprint of the photonics chip can remain small, but more functionalities can be packed into the photonics chip, as well as more length of the waveguide coil can be introduced without increasing the device footprint.
  • FIG. 1 is a schematic top view of an optical gyroscope coil (also called a waveguide coil) with multiple turns and a MEMS accelerometer on the same die, according to an embodiment of the present disclosure.
  • an optical gyroscope coil also called a waveguide coil
  • FIGS. 2A-2F show the process flow to monolithically integrate the MEMS accelerometer into the optical gyroscope chip with silicon nitride waveguides, according to an embodiment of the present disclosure.
  • FIG. 2A shows the cross-sectional view at the starting point of a MEMS-SiPhOG integration process flow.
  • FIG. 2B shows an additional layer of SiN formed on top of the oxide layer acting as the lower cladding.
  • FIG. 2C shows a sacrificial layer deposited and patterned on top of the etch stop layer and the patterned electrodes.
  • FIG. 2D shows a structural layer deposited and patterned on top of the patterned sacrificial layer and electrodes.
  • FIG. 2E shows a second sacrificial layer deposited and patterned on top of the structural layer.
  • FIG. 2F shows patterning of the structural layer to create columns within the area designated for the MEMS accelerometer.
  • FIG. 3 is a schematic cross-sectional view showing the fully processed integrated device containing the MEMS accelerometer and optical gyroscope, according to an embodiment of the present disclosure.
  • FIG. 4 is a schematic cross-sectional view showing an alternative configuration of the gyroscope waveguide chip (cross-sectional view), which can be the basis for monolithically integrating the MEMS accelerometer, according to an embodiment of the present disclosure.
  • aspects of the present disclosure are directed to monolithic integration of compact ultra-low loss integrated photonics-based waveguides with micro-electro-mechanical system (MEMS)-based sensing devices. These waveguides can be used as optical elements on a planar photonic integrated circuit (PIC), for example, in photonics integrated optical gyroscopes.
  • PIC planar photonic integrated circuit
  • the key to fiber-based optical gyroscopes' high performance is the long length of high quality, low loss, optical fiber that is used to measure the Sagnac effect.
  • the present inventors recognize that with the advent of integrated silicon photonics suitable for wafer scale processing, there is an opportunity to replace FOGs with smaller integrated photonic chip solutions without sacrificing performance.
  • Photonics based optical gyros have reduced size, weight, power and cost, but in addition can be mass produced in high volume, are immune to vibration and electromagnetic interference and have the potential to offer performances equivalent to FOGs.
  • SiPhOG® Silicon Photonics Optical Gyroscope
  • SiN waveguide core made of silicon nitride (Si 3 N 4 ) surrounded by oxide or fused silica claddings.
  • the whole waveguide structure (including core and cladding) is sometimes referred to as SiN waveguide for simplicity.
  • the propagation loss in the SiN waveguides can be well below 0.1 db/meter. This is a vast improvement over the current state-of-the-art SiN process with propagation loss in the range of 0.1 db/centimeter.
  • FIG. 1 shows a SiPhOG®-MEMS combined system 100 fabricated on a gyroscope waveguide die 10 .
  • Light is launched at a first end 14 of a gyroscope waveguide coil 20 with several turns. Here only four turns are shown for clarity, though in a real device, many more turns (for example, several hundreds of turns) can be used, based on the required sensitivity of the gyroscope.
  • After propagating in the waveguide coil light comes out from a second end 16 . Note that since light can be launched from either end 14 or 16 , each of the ends can act as an “input” end or an “output end”.
  • first end 14 as “input end” and second end 16 as “output end”, and refer to the portion 18 of the waveguide closer to the second end 16 as “output waveguide” 18 .
  • light can be launched at both ends 14 and 16 to obtain phase difference signal from counter-propagating light beams.
  • Waveguide coil design takes into account phase interference between counter-propagating beams and/or cross-coupling between adjacent waveguides, such as between 110 and 112.
  • An accelerometer device 30 is integrated on the gyroscope waveguide die 10 .
  • an accelerometer die 12 containing the MEMS accelerometer device 30 can be hybridly integrated onto the gyroscope waveguide die 10 .
  • a predecessor of this present disclosure is titled, “INTEGRATED PHOTONICS OPTICAL GYROSCOPES OPTIMIZED FOR AUTONOMOUS TERRESTRIAL AND AERIAL VEHICLES,” was filed as provisional application 62/923,234 on Oct. 18, 2019, where hybrid integration of MEMS sensor with a photonic gyroscope was described at a module level. That application was converted into non-provisional application Ser. No. 17/071,697 on Oct. 15, 2020, which has been published as U.S. 2021/0116246. All of these applications are incorporated herein by reference. The present disclosure focuses on in-plane integration of the MEMS accelerometer device 30 onto the gyroscope waveguide die 10 .
  • a self-contained inertial measurement unit (IMU) containing photonics optical gyroscope and MEMS accelerometer can be fabricated as a single device on a single die, which is sometimes referred to as SiPhOG-X.
  • IMU inertial measurement unit
  • FIG. 2A shows the cross-sectional view at the starting point of a MEMS-SiPhOG integration process flow.
  • a substrate 102 which may be a silicon substrate.
  • the substrate 102 may have a thickness of a standard wafer, e.g., the thickness can be 725 um. Note that the thickness of different material layers are not drawn to scale. However, in order to convey the idea that the substrate 102 is much thicker than the rest of the material layers shown in the FIGS. 2A-2F , the discontinuity 101 is introduced in the middle of the layer 102 just for visualization.
  • the layers 106 and 116 can have a thickness ‘h 1 ’ in the range of 15 um on both sides of the substrate 102 .
  • Layer 106 acts as a lower cladding for the waveguide cores 110 and 112 .
  • adjacent waveguide cores 110 , 112 correspond to each turn of the waveguide coil 20 shown in FIG. 1 .
  • the pitch p 1 between the cores may be in the range of 20 um, which can be reduced significantly by introducing structural modification in between the adjacent waveguide cores, as described later with respect to FIG. 4 .
  • Waveguide cores 110 and 112 can have a thickness ‘h’ and width ‘w’. Non-limiting exemplary dimensions for ‘h’ can be 60-100 nm, and ‘w’ can be 2-3 um.
  • Waveguide cores 110 and 112 are made of silicon nitride (SiN).
  • An upper cladding 104 is formed on top of waveguide cores 110 and 112 .
  • the thickness ‘h 2 ’ of the upper cladding layer 104 can be in the range of 2-3 um. The thickness may be decreased to about 1 um if necessary for the subsequent process flow to create the MEMS accelerometer. Note that when layers 106 , 110 (and 112 ) and 104 are formed on one side of substrate 102 , corresponding layers 116 , 118 and 114 are also formed on the other side of the substrate 102 , even though those layers are not used for waveguiding purposes. Alternatively, those layers can create waveguides in a different layer, if necessary. Both upper and lower claddings 104 and 106 are shown to be of the same material 108 , e.g.
  • both layers 114 and 116 have the same material 120 which is identical to material 108 .
  • the dashed outline 113 shows area earmarked for the turns of the optical gyroscope coil 20 on the die 10
  • the dashed outline 111 shows the area earmarked for subsequent fabrication of the MEMS accelerometer on the same die 10 .
  • FIG. 2B shows an additional layer 122 of SiN formed on top of the oxide layer 108 .
  • This SiN layer 122 acts as an etch stop layer for the MEMS accelerometer fabrication.
  • Electrodes 124 and 126 can be deposited and patterned on top of the layer 122 within the area 111 designated for the MEMS accelerometer.
  • FIG. 2C shows a sacrificial layer 128 deposited and patterned on top of the etch stop layer 122 and the patterned electrodes 126 and 124 .
  • Sacrificial layer 128 may be an oxide layer.
  • FIG. 2D shows a structural layer 130 deposited and patterned on top of the patterned sacrificial layer 128 and electrodes 126 and 124 .
  • Structural layer 130 can be made of poly-silicon-germanium (SiGe). This layer fills the gaps between the patterned sacrificial layer 128 .
  • FIG. 2E shows a second sacrificial layer 131 deposited and patterned on top of the structural layer 130 .
  • Layer 131 may be the same material as layer 128 , e.g. oxide.
  • Bond pads 132 and 134 are formed and patterned on top of the second sacrificial layer 131 .
  • FIG. 2F shows patterning of the structural layer 130 to create columns 130 a , 130 b , 130 c , 130 d and 130 e within the designated area 111 for the MEMS accelerometer.
  • the second sacrificial layer 131 also gets patterned on top of the columns ( 131 a , 131 b , 131 c ).
  • FIG. 3 shows the MEMS device 30 after the sacrificial layers 128 and 131 are removed, thereby creating the suspending structure 130 c in the middle between the surrounding frame denoted by columns 130 b and 130 d .
  • This freely suspending structure 130 c is essential for the operation of the MEMS accelerometer.
  • each waveguide core 110 , 112 corresponds to each turn of the waveguide coil 20 shown in FIG. 1 .
  • a minimum pitch p 1 needs to be maintained between the adjacent waveguide cores.
  • a non-limiting example value of p 1 can be 14-16 um, or even 20 um. This pitch limits the total serial length of the waveguide on a die 10 (see FIG. 1 ), and the maximum area enclosed by the waveguide coil 20 is also limited.
  • FIG. 4 shows one approach to mitigating the crosstalk between adjacent waveguides while making the pitch shorter, thereby being able to more densely pack the turns of the waveguide coil 20 .
  • the embodiment in FIG. 4 automatically leads to longer total length of the waveguide and a larger enclosed area, that translate to higher sensitivity of the optical gyroscope.
  • Introducing air gaps 450 on both sides of the waveguide cores confines optical modes largely within one turn of the waveguide and prevents leakage of optical signal to the adjacent turn of the waveguide. In other words, the air gaps 450 act as physical isolations between adjacent waveguide cores 410 , 412 , 414 , and 416 .
  • the pitch p 2 between two adjacent waveguide cores reduces, automatically more turns can be accommodated within the same reticle field, increasing both the total length and the enclosed area in an individual layer or plane.
  • the pitch p 2 can very well be less than 10 um with the air gaps, i.e. much lower than the pitch p 1 shown in FIG. 2A .
  • the gaps may be filled with other non-reactive fluid, such as an inert gas.
  • sub-wavelength grating-like structures or metal barriers can be used in between adjacent waveguides to reduce pitch without increasing cross talk.
  • a MEMS accelerometer can be fabricated on the modified SiN waveguide chip (e.g. with air gaps) much in the same way as described with respect to FIGS. 2A-2F .
  • one option can be distributing the total length of a SiN waveguide coil with multiple turns (and/or a ring with a single turn) into different vertically separated layers (e.g., two or more layers) that would lead to improved gyro sensitivity without increasing the form factor.
  • Provisional application 62/858,588 filed on Jun. 7, 2019, titled, “Integrated Silicon Photonics Optical Gyroscope on Fused Silica Platform.”
  • a follow-up provisional application 62/896,365 filed on Sep. 5, 2019, titled “Single-layer and Multi-layer Structures for Integrated Silicon Photonics Optical Gyroscopes” describes additional embodiments.
  • the need to manufacture a two-layer device arose partly because in a single plane, the adjacent waveguides need to be spaced apart at a pitch that prevents unwanted cross-coupling. Therefore, to keep the footprint of the device more or less same, the total length of the waveguide spiral was distributed between more than one planes.
  • This present disclosure provides solutions where adjacent waveguides can be packed more tightly in a single plane, i.e. the pitch between adjacent waveguides is reduced in an individual plane. Note that the terms “layer” and “plane” have been used interchangeably when describing distributing the waveguide coil into multiple planes.
  • Densely packing waveguides on a single plane may obviate the need to fabricate a multi-layer device altogether, or at least can reduce the number of layers necessary to get a suitable total length of waveguide coil that is directly related to the sensitivity of the optical gyroscope.
  • incorporating MEMS sensors in the same chip as the photonics optical gyroscope utilizes both the Coriolis force and the Sagnac effect to produce precision inertial sensing, including rotation and acceleration sensing. Even low-precision mechanical gyroscopes can be integrated on the same die for axes that do not need precision optical readout produced by the Sagnac effect gyroscopes.
  • Monolithically integrating SiPhOG and MEMS sensors makes it earlier to bring all the electronic control circuitry for the various sensors on the same chip.
  • gyroscopes in safety sensors relied upon by automatic driver assistance systems (ADAS) for current and future generations of autonomous vehicles, especially for Level 2.5/Level 3 (L2.5/L3) markets.
  • ADAS automatic driver assistance systems
  • ADAS high-precision angular measurement may be desired only for Z-axis (the yaw axis) for determining heading, because the vehicle stays on the X-Y plane of a rigid road.
  • the angular measurement for the X and Y axis may not be safety-critical in this scenario.
  • the present inventors recognize that by bringing down the cost of high precision optical gyroscopes at least for one axis translates to overall cost of reduction of the IMU that would facilitate mass market penetration.
  • the mechanical gyroscopes in the other two axes may also be replaced or supplemented by optical gyroscopes with proper design of system level integration in all 3 axes (pitch, roll and yaw axes), for example in unmanned aerial vehicles (e.g., drones), construction, farming, industrial, marine vehicles, L4/L5 markets and certain military applications.
  • unmanned aerial vehicles e.g., drones

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US17/365,331 US11371843B2 (en) 2020-07-02 2021-07-01 Integration of photonics optical gyroscopes with micro-electro-mechanical sensors
EP21833474.6A EP4176296A1 (fr) 2020-07-02 2021-07-02 Intégration de gyroscopes optiques photoniques avec des capteurs micro-électromécaniques
JP2022581431A JP2023533231A (ja) 2020-07-02 2021-07-02 フォトニクス光ジャイロスコープの微小電気機械センサとの統合
PCT/US2021/040286 WO2022006516A1 (fr) 2020-07-02 2021-07-02 Intégration de gyroscopes optiques photoniques avec des capteurs micro-électromécaniques
CN202180047537.1A CN115812170A (zh) 2020-07-02 2021-07-02 光子光学陀螺仪与微机电传感器的集成
US17/850,853 US11493343B2 (en) 2020-07-02 2022-06-27 Integration of photonics optical gyroscopes with micro-electro-mechanical sensors

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US20220317373A1 (en) * 2021-04-02 2022-10-06 Anello Photonics, Inc. Seamless stitching for multi-reticle fabrication of integrated photonics optical components

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US11994717B2 (en) * 2022-04-11 2024-05-28 Taiwan Semiconductor Manufacturing Company Ltd. Photonic waveguide and method of forming the same

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