US10256155B1 - Method for fabricating single diffusion break structure directly under a gate line - Google Patents

Method for fabricating single diffusion break structure directly under a gate line Download PDF

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US10256155B1
US10256155B1 US15/893,709 US201815893709A US10256155B1 US 10256155 B1 US10256155 B1 US 10256155B1 US 201815893709 A US201815893709 A US 201815893709A US 10256155 B1 US10256155 B1 US 10256155B1
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active region
gate line
sdb
sti
semiconductor device
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Wen-Kai Lin
Yi-Chung Sheng
Sheng-Yuan Hsueh
Chih-Kai Kang
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Marlin Semiconductor Ltd
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United Microelectronics Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
    • H01L29/7855—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET with at least two independent gates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
    • H01L21/76229—Concurrent filling of a plurality of trenches having a different trench shape or dimension, e.g. rectangular and V-shaped trenches, wide and narrow trenches, shallow and deep trenches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/823431—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of transistors with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/823481—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type isolation region manufacturing related aspects, e.g. to avoid interaction of isolation region with adjacent structure
    • H—ELECTRICITY
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    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/528—Geometry or layout of the interconnection structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
    • H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
    • H01L27/0886—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate including transistors with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
    • H01L29/7851—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET with the body tied to the substrate

Definitions

  • the invention relates to a method for fabricating semiconductor device, and more particularly to a method for forming single diffusion break (SDB) structure directly under a gate line.
  • SDB single diffusion break
  • FinFET fin field effect transistor technology
  • a method for fabricating semiconductor device includes the steps of: forming a first active region and a second active region extending along a first direction on a substrate; forming a first single diffusion break (SDB) structure extending along a second direction between the first active region and the second active region; and forming a first gate line extending along the second direction intersecting the first active region and the second active region.
  • the first SDB structure is directly under the first gate line between the first active region and the second active region.
  • a semiconductor device includes: a first active region and a second active region extending along a first direction on a substrate; a first single diffusion break (SDB) structure extending along a second direction between the first active region and the second active region; and a first gate line extending along the second direction intersecting the first active region and the second active region.
  • the first SDB structure is directly under the first gate line between the first active region and the second active region.
  • FIG. 1 is a top view illustrating a semiconductor device according to an embodiment of the present invention
  • FIG. 2 illustrates a cross-sectional view of FIG. 1 along the sectional line AA′
  • FIG. 3 illustrates a cross-sectional view of FIG. 1 along the sectional line BB′.
  • a substrate 12 such as a silicon substrate or silicon-on-insulator (SOI) substrate is first provided, and at least an active region such as active regions 14 , 16 , 18 extending along a first direction (such as X-direction) are defined on the substrate 12 .
  • SOI silicon-on-insulator
  • a plurality of fin-shaped structures 20 are formed on each of the active regions 14 , 16 , 18 on the substrate 12 and a shallow trench isolation (STI) 22 is formed around the fin-shaped structures 20 .
  • STI shallow trench isolation
  • the fin-shaped structures 20 could also be obtained by first forming a patterned mask (not shown) on the substrate, 12 , and through an etching process, the pattern of the patterned mask is transferred to the substrate 12 to form the fin-shaped structures 20 .
  • the formation of the fin-shaped structures 20 could also be accomplished by first forming a patterned hard mask (not shown) on the substrate 12 , and a semiconductor layer composed of silicon germanium is grown from the substrate 12 through exposed patterned hard mask via selective epitaxial growth process to form the corresponding fin-shaped structures 20 .
  • a shallow trench isolation (STI) 22 is formed around the fin-shaped structures 20 or surrounding the active regions 14 , 16 , 18 as shown in FIG. 1 .
  • the formation of the STI 22 could be accomplished by conducting a flowable chemical vapor deposition (FCVD) process to form a silicon oxide layer on the substrate 12 and covering the fin-shaped structures 20 entirely.
  • FCVD flowable chemical vapor deposition
  • CMP chemical mechanical polishing
  • etching process are conducted to remove part of the silicon oxide layer so that the top surface of the remaining silicon oxide is slightly lower than the top surface of the fin-shaped structures 20 for forming the STI 22 .
  • the fin-shaped structures 20 disposed on the active regions 14 , 16 , 18 are disposed to protrude above the STI 22 while the STI 22 covers the bumps 24 entirely.
  • SDB structures 26 , 28 are formed on two ends of the active region 14
  • SDB structures 30 , 32 are formed adjacent to the active region 14
  • SDB structures 34 , 36 , 38 are formed in the active region 16
  • SDB structures 42 , 44 are formed in the active region 18
  • a SDB structures 40 is formed extending from the active region 16 to the active region 18 .
  • the SDB structures 26 , 28 , 30 , 32 , 34 , 36 , 38 , 40 , 42 , 44 could be formed either after the formation of STI 22 is completed or at the same time with the STI 22 , which are all within the scope of the present invention.
  • both the STI 22 and the SDB structures 26 , 28 , 30 , 32 , 34 , 36 , 38 , 40 , 42 , 44 could all be made of silicon oxide, which is also within the scope of the present invention.
  • gate lines 46 , 48 , 50 , 52 , 54 , 56 , 58 , 60 , 62 , 64 , 66 , 68 , 70 or gate structures are formed on the fin-shaped structures 20 intersecting the active regions 14 , 16 , 18 and the STI 22 .
  • the formation of the gate lines 46 , 48 , 50 , 52 , 54 , 56 , 58 , 60 , 62 , 64 , 66 , 68 , 70 could be accomplished by a gate first process, a high-k first approach from a gate last process, or a high-k last approach from the gate late process.
  • a gate dielectric layer 72 or interfacial layer, a gate material layer 74 made of polysilicon, and a selective hard mask could be formed sequentially on the substrate 12 , and a photo-etching process is then conducted by using a patterned resist (not shown) as mask to remove part of the gate material layer 74 and part of the gate dielectric layer 72 through single or multiple etching processes.
  • gate lines 46 , 48 , 50 , 52 , 54 , 56 , 58 , 60 , 62 , 64 , 66 , 68 , 70 each composed of a patterned gate dielectric layer 72 and a patterned material layer 74 are formed on the fin-shaped structure 20 and the STI 22 .
  • the gate lines 46 , 48 , 50 , 52 , 54 , 56 , 58 , 60 , 62 , 64 , 66 , 68 , 70 are extending along the same second direction (such as Y-direction) as the SDB structures 26 , 28 , 30 , 32 , 34 , 36 , 38 , 40 , 42 , 44 and intersecting the active regions 14 , 16 , 18 and the fin-shaped structures 20 , in which each of the SDB structures 26 , 28 , 30 , 32 , 34 , 36 , 38 , 40 , 42 , 44 are disposed directly under each of the gate lines 46 , 48 , 50 , 52 , 54 , 56 , 58 , 60 , 62 , 64 , 66 , 68 , 70 respectively.
  • the SDB structures 26 is directly under the gate line 48
  • the SDB structures 32 , 42 are directly under the gate line 50
  • the SDB structure 34 is directly under the gate line 56
  • the SDB structures 28 , 36 , 44 are directly under the gate line 60
  • the SDB structures 30 , 38 are directly under the gate line 64
  • the SDB structure 40 is directly under the gate line 68 .
  • dummy isolation structures 76 could also be disposed in the STI 22 outside the active regions 14 , 16 , 18 , the fin-shaped structures 20 , and the gate lines 46 , 48 , 50 , 52 , 54 , 56 , 58 , 60 , 62 , 64 , 66 , 68 , 70 .
  • no gate lines are disposed on top of the dummy isolation structures 76 , the dummy isolation structures 76 and the SDB structures 26 , 28 , 30 , 32 , 34 , 36 , 38 , 40 , 42 , 44 are formed through the same step, and the dummy isolation structure 76 and the STI 22 are preferably made of different material.
  • the STI 22 in this embodiment is made of silicon oxide while the dummy isolation structures 76 are made of silicon nitride.
  • the SDB structure 30 is disposed directly under the gate line 64 while not intersecting any of the active regions and fin-shaped structures 30
  • the SDB structure 38 is disposed directly under the same gate line 64 while intersecting the active region 16 and the fin-shaped structures 20
  • the SDB structure 40 is extending from one edge of the active region 16 to another edge of the active region 18 while disposed directly under the gate line 68 and intersecting the active regions 16 , 18 and the fin-shaped structures 20 .
  • the SDB structure 40 is disposed directly under the gate line 68 intersecting the active region 16 , directly under the gate line 68 between the active region 16 and the active region 18 , and directly under the gate line 68 intersecting the active region 18 .
  • the top surface of the SDB structures 26 , 28 , 30 , 32 , 34 , 36 , 38 , 40 , 42 , 44 is even with the top surface of the STI 22 while the bottom surface of the SDB structures 26 , 28 , 30 , 32 , 34 , 36 , 38 , 40 , 42 , 44 and the STI 22 could have different profile and/or different depths depending on whether the SDB structures 26 , 28 , 30 , 32 , 34 , 36 , 38 , 40 , 42 , 44 intersect the fin-shaped structures 20 . For instance, as shown in FIG.
  • the bottom surface of the SDB structure 30 is substantially planar and slightly lower than the bottom surface of the adjacent STI 22 .
  • the bottom surface of the SDB structure 38 on the other hand reveals a jagged pattern or bumps since the profile of the fin-shaped structures 20 was etched downward during the aforementioned etching process. It should also be noted that even though the bottom of the SDB structure 30 is even with the bottom of the SDB structure 38 in this embodiment, the bottom of the SDB structure 30 could also be slightly lower than or higher than the bottom surface of the SDB structure 38 , which is also within the scope of the present invention.
  • MOS transistor fabrication process could be conducted by forming spacers adjacent to the gate lines 46 , 48 , 50 , 52 , 54 , 56 , 58 , 60 , 62 , 64 , 66 , 68 , 70 , forming source/drain regions and/or epitaxial layers in the fin-shaped structures 20 adjacent to two sides of the spacers, and selectively forming a salicide (not shown) on the surface of the source/drain regions and/or epitaxial layers. Since the fabrication of MOS transistors is well known to those skilled in the art, the details of which are not explained herein for the sake of brevity.

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US20190080998A1 (en) * 2017-09-11 2019-03-14 Samsung Electronics Co., Ltd. Semiconductor devices with insulated source/drain jumper structures
CN113299738A (zh) * 2021-05-20 2021-08-24 福建省晋华集成电路有限公司 半导体装置及其形成方法
US20220157933A1 (en) * 2020-11-16 2022-05-19 United Microelectronics Corp. Semiconductor device and method for fabricating the same
US20220271025A1 (en) * 2018-06-29 2022-08-25 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated circuit device
US11594536B2 (en) 2021-03-10 2023-02-28 Micron Technology, Inc. Integrated assemblies and semiconductor memory devices
US11877445B2 (en) 2021-01-15 2024-01-16 Micron Technology, Inc. Integrated assemblies and semiconductor memory devices

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