UA93182C2 - Electron gun (embodiments) - Google Patents
Electron gun (embodiments)Info
- Publication number
- UA93182C2 UA93182C2 UAA200611520A UAA200611520A UA93182C2 UA 93182 C2 UA93182 C2 UA 93182C2 UA A200611520 A UAA200611520 A UA A200611520A UA A200611520 A UAA200611520 A UA A200611520A UA 93182 C2 UA93182 C2 UA 93182C2
- Authority
- UA
- Ukraine
- Prior art keywords
- electron gun
- thermoionic
- platform
- adjustable manner
- located inside
- Prior art date
Links
- 238000004804 winding Methods 0.000 abstract 2
- 238000010276 construction Methods 0.000 abstract 1
- 230000007423 decrease Effects 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/027—Construction of the gun or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06308—Thermionic sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/10—Lenses
- H01J2237/14—Lenses magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/15—Means for deflecting or directing discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/31—Processing objects on a macro-scale
- H01J2237/3132—Evaporating
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/266,032 US8159118B2 (en) | 2005-11-02 | 2005-11-02 | Electron gun |
Publications (1)
Publication Number | Publication Date |
---|---|
UA93182C2 true UA93182C2 (en) | 2011-01-25 |
Family
ID=37795998
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
UAA200611520A UA93182C2 (en) | 2005-11-02 | 2006-11-01 | Electron gun (embodiments) |
Country Status (5)
Country | Link |
---|---|
US (1) | US8159118B2 (ru) |
EP (1) | EP1783810A3 (ru) |
JP (1) | JP2007128874A (ru) |
SG (1) | SG131839A1 (ru) |
UA (1) | UA93182C2 (ru) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100104773A1 (en) * | 2008-10-24 | 2010-04-29 | Neal James W | Method for use in a coating process |
KR102427119B1 (ko) * | 2013-12-30 | 2022-07-29 | 에이에스엠엘 네델란즈 비.브이. | 캐소드 어레인지먼트, 전자총, 및 그런 전자총을 포함하는 리소그래피 시스템 |
UA113827C2 (xx) * | 2016-09-07 | 2017-03-10 | Аксіальна електронна гармата | |
RU2730171C1 (ru) * | 2019-12-26 | 2020-08-19 | Акционерное общество "Научно-производственное предприятие "Алмаз" (АО "НПП "Алмаз") | Электронная пушка аксиальной конструкции для свч-прибора о-типа и способ ее изготовления |
CN117790260B (zh) * | 2024-02-23 | 2024-04-30 | 成都菲奥姆光学有限公司 | 一种调节电磁变量保护放电灯丝的装置 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3187216A (en) | 1961-05-12 | 1965-06-01 | Welding Research Inc | Electron gun having a releasably clamped electron emitting element |
BE629274A (ru) | 1962-03-07 | |||
FR2315766A1 (fr) | 1975-06-23 | 1977-01-21 | Sciaky Sa | Canon a electrons |
US4084077A (en) | 1977-05-10 | 1978-04-11 | Igor Antonovich Porazhinsky | Cathode assembly of electron beam welding gun |
US4126811A (en) * | 1977-06-30 | 1978-11-21 | Movchan Boris A | Electron gun with linear thermionic cathode for electron-beam heating |
JPS6025857B2 (ja) | 1979-05-17 | 1985-06-20 | 電気化学工業株式会社 | 電子銃 |
DD237932B1 (de) | 1985-05-31 | 1988-06-22 | Ardenne Forschungsinst | Elektronenkanone fuer hohe strahlleistungen |
US4687902A (en) | 1985-08-06 | 1987-08-18 | Leybold-Heraeus Gmbh | Electron-beam welding apparatus |
DE3534792A1 (de) | 1985-09-30 | 1987-04-02 | Leybold Heraeus Gmbh & Co Kg | Elektronenstrahlerzeuger mit einer direkt und einer indirekt beheizbaren katode |
GB9224602D0 (en) | 1992-11-24 | 1993-01-13 | Welding Inst | Charged particle generation |
EP0698907A3 (de) * | 1994-07-20 | 1996-05-01 | Mishnarodnij Zentr Elektronno | Elektronenkanone. |
JPH1116485A (ja) | 1997-06-20 | 1999-01-22 | Hitachi Ltd | 電子銃又はイオン発生装置又はイオントラップ装置又は電子トラップ装置又は蒸着装置 |
GB9720350D0 (en) | 1997-09-24 | 1997-11-26 | Welding Inst | Improvements relating to charged particle beams |
JP3406199B2 (ja) | 1997-09-29 | 2003-05-12 | 株式会社日立製作所 | 電界放出型電子銃を備えた粒子線装置及びその加熱脱ガス方法 |
US6196889B1 (en) * | 1998-12-11 | 2001-03-06 | United Technologies Corporation | Method and apparatus for use an electron gun employing a thermionic source of electrons |
US6455990B1 (en) * | 1998-12-11 | 2002-09-24 | United Technologies Corporation | Apparatus for an electron gun employing a thermionic electron source |
EP1123558B1 (en) | 1999-08-20 | 2004-01-21 | Fei Company | Schottky emitter having extended life |
JP3900792B2 (ja) | 2000-04-26 | 2007-04-04 | 株式会社日立製作所 | 電子銃 |
US6548946B1 (en) | 2000-11-02 | 2003-04-15 | General Electric Company | Electron beam generator |
UA43927C2 (uk) * | 2000-12-26 | 2002-01-15 | Міжнародний Центр Електронно-Променевих Технологій Інституту Електрозварювання Ім. Е.О. Патона Нан України | Електронна гармата з лінійним термокатодом для електронно-променевого нагрівання |
JP2004259478A (ja) | 2003-02-24 | 2004-09-16 | Nikon Corp | 電子銃及び電子線露光装置 |
JP4262002B2 (ja) | 2003-06-30 | 2009-05-13 | 株式会社堀場製作所 | 電界放出型電子銃 |
US6852982B1 (en) | 2003-07-14 | 2005-02-08 | Fei Company | Magnetic lens |
-
2005
- 2005-11-02 US US11/266,032 patent/US8159118B2/en active Active
-
2006
- 2006-09-13 SG SG200606337-4A patent/SG131839A1/en unknown
- 2006-10-20 JP JP2006285627A patent/JP2007128874A/ja active Pending
- 2006-11-01 UA UAA200611520A patent/UA93182C2/ru unknown
- 2006-11-02 EP EP06255646A patent/EP1783810A3/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
EP1783810A3 (en) | 2010-02-17 |
US8159118B2 (en) | 2012-04-17 |
JP2007128874A (ja) | 2007-05-24 |
SG131839A1 (en) | 2007-05-28 |
US20070096620A1 (en) | 2007-05-03 |
EP1783810A2 (en) | 2007-05-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP2372822A3 (en) | Battery, electrode, and current collector used therefor | |
EP1453126A4 (en) | POSITIVE ELECTRODE ACTIVE MATERIAL AND SECONDARY BATTERY USING THE SAME | |
WO2005113033A3 (en) | Medical devices and methods of making the same | |
GB2439861A (en) | Internally overlapped conditioners | |
EP1477515A4 (en) | CLUSTERION REPLACEMENT MEMBRANE AND ELECTROLYTE MEMBRANE ELECTRODE COMPOUND BODY | |
EP1372202A4 (en) | ACTIVE MATERIAL FOR POSITIVE ELECTRODE AND NONAQUEOUS ELECTROLYTE BATTERY COMPRISING SAID MATERIAL | |
WO2008024453A3 (en) | Diamond-like carbon energy conversion devices and methods thereof | |
UA93182C2 (en) | Electron gun (embodiments) | |
DE60235944D1 (de) | Positives aktives Elektrodenmaterial, positive Elektrode und nicht-wässrige sekundäre Elektrolytbatterie diese benutzend | |
TW200627721A (en) | Surface-mount connector | |
WO2004062009A3 (en) | Batteries including a flat plate design | |
EP2271192A3 (en) | Protection circuit board, secondary battery, and battery pack | |
WO2005117189A3 (en) | Embedded electrode conformations for balanced energy, power, and cost in an alkaline cell | |
PL368754A1 (en) | Elastic current collector | |
EP1917692A4 (en) | CATHODE ACTIVE MATERIAL AND LITHIUM SECONDARY BATTERY CONTAINING THE SAME | |
NL1021701A1 (nl) | PEM-brandstofcel. | |
WO2008033672A3 (en) | Novel electrode active material for a secondary electrochemical cell | |
EP1736713A4 (en) | NATURAL EVAPORATION HUMIDIFIER, HUMIDIFIER HUMIDIFIER ELEMENT, AND HUMIDIFIER HOUSING | |
GB2425397B (en) | An assembly for maintaining compression for electrical contact of the active area of an electrochemical cell | |
EP1744388A4 (en) | ACTIVE REDOX REVERSIBLE ELECTRODE AND SECONDARY BATTERY INCLUDING SAID ELECTRODE | |
EP1321994A3 (en) | Positive electrode active material for lithium ion secondary battery | |
TW200701405A (en) | Dram having carbon stack capacitor | |
DE50115483D1 (de) | Hochtemperaturbrennstoffzelle | |
AU2003224637A8 (en) | High performance fuel cells | |
AU2003241764A1 (en) | Fuel reformer and method of manufacturing the fuel reformer, electrode for electrochemical device, and electrochemical device |