UA93182C2 - Electron gun (embodiments) - Google Patents

Electron gun (embodiments)

Info

Publication number
UA93182C2
UA93182C2 UAA200611520A UAA200611520A UA93182C2 UA 93182 C2 UA93182 C2 UA 93182C2 UA A200611520 A UAA200611520 A UA A200611520A UA A200611520 A UAA200611520 A UA A200611520A UA 93182 C2 UA93182 C2 UA 93182C2
Authority
UA
Ukraine
Prior art keywords
electron gun
thermoionic
platform
adjustable manner
located inside
Prior art date
Application number
UAA200611520A
Other languages
English (en)
Inventor
Виктор Александрович Тимашов
Олег Леонидович Жданов
Сергей Иванович Рябенко
Андрей Анатольевич Цепкалов
Стивен M. Бернс
Original Assignee
Юнайтед Текнолоджиз Корпорейшн
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Юнайтед Текнолоджиз Корпорейшн filed Critical Юнайтед Текнолоджиз Корпорейшн
Publication of UA93182C2 publication Critical patent/UA93182C2/ru

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/027—Construction of the gun or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/10—Lenses
    • H01J2237/14—Lenses magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/15—Means for deflecting or directing discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/31—Processing objects on a macro-scale
    • H01J2237/3132—Evaporating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
UAA200611520A 2005-11-02 2006-11-01 Electron gun (embodiments) UA93182C2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/266,032 US8159118B2 (en) 2005-11-02 2005-11-02 Electron gun

Publications (1)

Publication Number Publication Date
UA93182C2 true UA93182C2 (en) 2011-01-25

Family

ID=37795998

Family Applications (1)

Application Number Title Priority Date Filing Date
UAA200611520A UA93182C2 (en) 2005-11-02 2006-11-01 Electron gun (embodiments)

Country Status (5)

Country Link
US (1) US8159118B2 (ru)
EP (1) EP1783810A3 (ru)
JP (1) JP2007128874A (ru)
SG (1) SG131839A1 (ru)
UA (1) UA93182C2 (ru)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100104773A1 (en) * 2008-10-24 2010-04-29 Neal James W Method for use in a coating process
KR102427119B1 (ko) * 2013-12-30 2022-07-29 에이에스엠엘 네델란즈 비.브이. 캐소드 어레인지먼트, 전자총, 및 그런 전자총을 포함하는 리소그래피 시스템
UA113827C2 (xx) * 2016-09-07 2017-03-10 Аксіальна електронна гармата
RU2730171C1 (ru) * 2019-12-26 2020-08-19 Акционерное общество "Научно-производственное предприятие "Алмаз" (АО "НПП "Алмаз") Электронная пушка аксиальной конструкции для свч-прибора о-типа и способ ее изготовления
CN117790260B (zh) * 2024-02-23 2024-04-30 成都菲奥姆光学有限公司 一种调节电磁变量保护放电灯丝的装置

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3187216A (en) 1961-05-12 1965-06-01 Welding Research Inc Electron gun having a releasably clamped electron emitting element
BE629274A (ru) 1962-03-07
FR2315766A1 (fr) 1975-06-23 1977-01-21 Sciaky Sa Canon a electrons
US4084077A (en) 1977-05-10 1978-04-11 Igor Antonovich Porazhinsky Cathode assembly of electron beam welding gun
US4126811A (en) * 1977-06-30 1978-11-21 Movchan Boris A Electron gun with linear thermionic cathode for electron-beam heating
JPS6025857B2 (ja) 1979-05-17 1985-06-20 電気化学工業株式会社 電子銃
DD237932B1 (de) 1985-05-31 1988-06-22 Ardenne Forschungsinst Elektronenkanone fuer hohe strahlleistungen
US4687902A (en) 1985-08-06 1987-08-18 Leybold-Heraeus Gmbh Electron-beam welding apparatus
DE3534792A1 (de) 1985-09-30 1987-04-02 Leybold Heraeus Gmbh & Co Kg Elektronenstrahlerzeuger mit einer direkt und einer indirekt beheizbaren katode
GB9224602D0 (en) 1992-11-24 1993-01-13 Welding Inst Charged particle generation
EP0698907A3 (de) * 1994-07-20 1996-05-01 Mishnarodnij Zentr Elektronno Elektronenkanone.
JPH1116485A (ja) 1997-06-20 1999-01-22 Hitachi Ltd 電子銃又はイオン発生装置又はイオントラップ装置又は電子トラップ装置又は蒸着装置
GB9720350D0 (en) 1997-09-24 1997-11-26 Welding Inst Improvements relating to charged particle beams
JP3406199B2 (ja) 1997-09-29 2003-05-12 株式会社日立製作所 電界放出型電子銃を備えた粒子線装置及びその加熱脱ガス方法
US6196889B1 (en) * 1998-12-11 2001-03-06 United Technologies Corporation Method and apparatus for use an electron gun employing a thermionic source of electrons
US6455990B1 (en) * 1998-12-11 2002-09-24 United Technologies Corporation Apparatus for an electron gun employing a thermionic electron source
EP1123558B1 (en) 1999-08-20 2004-01-21 Fei Company Schottky emitter having extended life
JP3900792B2 (ja) 2000-04-26 2007-04-04 株式会社日立製作所 電子銃
US6548946B1 (en) 2000-11-02 2003-04-15 General Electric Company Electron beam generator
UA43927C2 (uk) * 2000-12-26 2002-01-15 Міжнародний Центр Електронно-Променевих Технологій Інституту Електрозварювання Ім. Е.О. Патона Нан України Електронна гармата з лінійним термокатодом для електронно-променевого нагрівання
JP2004259478A (ja) 2003-02-24 2004-09-16 Nikon Corp 電子銃及び電子線露光装置
JP4262002B2 (ja) 2003-06-30 2009-05-13 株式会社堀場製作所 電界放出型電子銃
US6852982B1 (en) 2003-07-14 2005-02-08 Fei Company Magnetic lens

Also Published As

Publication number Publication date
EP1783810A3 (en) 2010-02-17
US8159118B2 (en) 2012-04-17
JP2007128874A (ja) 2007-05-24
SG131839A1 (en) 2007-05-28
US20070096620A1 (en) 2007-05-03
EP1783810A2 (en) 2007-05-09

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