UA7111C2 - Method for ion-beam sputtering and device for realization thereof - Google Patents
Method for ion-beam sputtering and device for realization thereofInfo
- Publication number
- UA7111C2 UA7111C2 UA94010085A UA94010085A UA7111C2 UA 7111 C2 UA7111 C2 UA 7111C2 UA 94010085 A UA94010085 A UA 94010085A UA 94010085 A UA94010085 A UA 94010085A UA 7111 C2 UA7111 C2 UA 7111C2
- Authority
- UA
- Ukraine
- Prior art keywords
- ion
- beam sputtering
- realization
- sputtering
- plasmagenerative
- Prior art date
Links
Abstract
A method for ion-beam sputtering is based on supplying of plasmagenerative gas through the nozzle directly at the spraying surface of target-cathode. The invention relates to the field of covering formation and treating of materials in the vacuum and could be used in ion-beam sputtering systems for high-performance sputtering of conducting, protective, wearproof, decorative coverings at the difficult of access places of various articles.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
UA94010085A UA7111C2 (en) | 1993-12-10 | 1993-12-10 | Method for ion-beam sputtering and device for realization thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
UA94010085A UA7111C2 (en) | 1993-12-10 | 1993-12-10 | Method for ion-beam sputtering and device for realization thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
UA7111C2 true UA7111C2 (en) | 2000-11-15 |
Family
ID=74367957
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
UA94010085A UA7111C2 (en) | 1993-12-10 | 1993-12-10 | Method for ion-beam sputtering and device for realization thereof |
Country Status (1)
Country | Link |
---|---|
UA (1) | UA7111C2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EA020407B1 (en) * | 2012-12-14 | 2014-10-30 | Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Балтийский федеральный университет имени Иммануила Канта" | Aseptic dressing from fibrous materials comprising thin-filmed silver |
RU170029U1 (en) * | 2016-12-09 | 2017-04-12 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Иркутский государственный университет" (ФГБОУ ВО "ИГУ") | DEVICE FOR CREATING A METAL PLASMA FLOW |
RU2691357C1 (en) * | 2018-07-09 | 2019-06-11 | Федеральное государственное бюджетное научное учреждение "Федеральный исследовательский центр "Красноярский научный центр Сибирского отделения Российской академии наук" (ФИЦ КНЦ СО РАН, КНЦ СО РАН) | Device for ion-plasma sputtering |
RU199380U1 (en) * | 2020-02-10 | 2020-08-31 | Федеральное государственное бюджетное учреждение науки "Дагестанский федеральный исследовательский центр Российской академии наук" | UNIT OF HEATING AND POSITIONING OF SUBSTRATES |
RU213627U1 (en) * | 2022-03-04 | 2022-09-20 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Комсомольский-на-Амуре государственный университет" (ФГБОУ ВО "КнАГУ") | The holder of products having a through cavity |
-
1993
- 1993-12-10 UA UA94010085A patent/UA7111C2/en unknown
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EA020407B1 (en) * | 2012-12-14 | 2014-10-30 | Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Балтийский федеральный университет имени Иммануила Канта" | Aseptic dressing from fibrous materials comprising thin-filmed silver |
RU170029U1 (en) * | 2016-12-09 | 2017-04-12 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Иркутский государственный университет" (ФГБОУ ВО "ИГУ") | DEVICE FOR CREATING A METAL PLASMA FLOW |
RU2691357C1 (en) * | 2018-07-09 | 2019-06-11 | Федеральное государственное бюджетное научное учреждение "Федеральный исследовательский центр "Красноярский научный центр Сибирского отделения Российской академии наук" (ФИЦ КНЦ СО РАН, КНЦ СО РАН) | Device for ion-plasma sputtering |
RU199380U1 (en) * | 2020-02-10 | 2020-08-31 | Федеральное государственное бюджетное учреждение науки "Дагестанский федеральный исследовательский центр Российской академии наук" | UNIT OF HEATING AND POSITIONING OF SUBSTRATES |
RU213627U1 (en) * | 2022-03-04 | 2022-09-20 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Комсомольский-на-Амуре государственный университет" (ФГБОУ ВО "КнАГУ") | The holder of products having a through cavity |
RU213628U1 (en) * | 2022-03-22 | 2022-09-20 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Комсомольский-на-Амуре государственный университет" (ФГБОУ ВО "КнАГУ") | Electrically conductive holder for a non-conductive product with a through cylindrical cavity |
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