UA19443A - device FOR coverings application in the vacuum - Google Patents

device FOR coverings application in the vacuum

Info

Publication number
UA19443A
UA19443A UA94052407A UA94052407A UA19443A UA 19443 A UA19443 A UA 19443A UA 94052407 A UA94052407 A UA 94052407A UA 94052407 A UA94052407 A UA 94052407A UA 19443 A UA19443 A UA 19443A
Authority
UA
Ukraine
Prior art keywords
vacuum
coverings
application
anode
substrate holder
Prior art date
Application number
UA94052407A
Other languages
Russian (ru)
Ukrainian (uk)
Inventor
Валерій Вікторович Перемітько
Валерий Викторович Перемитько
Вадим Петрович Федічев
Вадим Петрович Федичев
RU Hєровний Вячеслав Міхайловіч
RU Ямпольскій Віктор Модестовіч
Original Assignee
Дніпродзержинський Індустріальний Інститут
Днепродзержинский индустриальный институт
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Дніпродзержинський Індустріальний Інститут, Днепродзержинский индустриальный институт filed Critical Дніпродзержинський Індустріальний Інститут
Priority to UA94052407A priority Critical patent/UA19443A/en
Publication of UA19443A publication Critical patent/UA19443A/en

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  • Physical Vapour Deposition (AREA)

Abstract

The invention relates to the technology of coverings application in the vacuum. The device contains coaxially located consumable electrode, hollow cathode, anode and substrate holder, as well as power supply. The substrate holder is combined with anode, and a hollow cathode is placed under the expended electrode.
UA94052407A 1994-05-16 1994-05-16 device FOR coverings application in the vacuum UA19443A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
UA94052407A UA19443A (en) 1994-05-16 1994-05-16 device FOR coverings application in the vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
UA94052407A UA19443A (en) 1994-05-16 1994-05-16 device FOR coverings application in the vacuum

Publications (1)

Publication Number Publication Date
UA19443A true UA19443A (en) 1997-12-25

Family

ID=74538563

Family Applications (1)

Application Number Title Priority Date Filing Date
UA94052407A UA19443A (en) 1994-05-16 1994-05-16 device FOR coverings application in the vacuum

Country Status (1)

Country Link
UA (1) UA19443A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2782102C1 (en) * 2022-04-01 2022-10-21 федеральное государственное бюджетное образовательное учреждение высшего образования "Уфимский государственный авиационный технический университет" METHOD FOR OBTAINING COATING BASED ON Ti-Al SYSTEM SYNTHESIZED IN NITROGEN AND ACETYLENE ENVIRONMENT

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2782102C1 (en) * 2022-04-01 2022-10-21 федеральное государственное бюджетное образовательное учреждение высшего образования "Уфимский государственный авиационный технический университет" METHOD FOR OBTAINING COATING BASED ON Ti-Al SYSTEM SYNTHESIZED IN NITROGEN AND ACETYLENE ENVIRONMENT

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