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Application filed by Харківський Фізико-Технічний Інститут, Харьковский физико-технический институтfiledCriticalХарківський Фізико-Технічний Інститут
Priority to UA3683344ApriorityCriticalpatent/UA13657A1/en
Publication of UA13657A1publicationCriticalpatent/UA13657A1/en
A mechanism for application of coverings from gaseous phase contains reactor of cylindrical shape, induction coil, element for incorporation of gas mixture, element for pumping, element for evacuation and entrapping reaction products. For the purpose of increasing efficiency of covering material use in treatment of cylindrical articles with end surfaces it is equipped with deflector with orifice disposed on reactor from the side of pumping.
UA3683344A1984-01-021984-01-02mechanism for application of coverings from gaseous phase
UA13657A1
(en)