TWM679574U - Electrical discharge machining apparatus - Google Patents

Electrical discharge machining apparatus

Info

Publication number
TWM679574U
TWM679574U TW114206029U TW114206029U TWM679574U TW M679574 U TWM679574 U TW M679574U TW 114206029 U TW114206029 U TW 114206029U TW 114206029 U TW114206029 U TW 114206029U TW M679574 U TWM679574 U TW M679574U
Authority
TW
Taiwan
Prior art keywords
discharge
electro
processing
unit
discharge electrodes
Prior art date
Application number
TW114206029U
Other languages
Chinese (zh)
Inventor
寇崇善
葉文勇
陳長營
Original Assignee
日揚科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日揚科技股份有限公司 filed Critical 日揚科技股份有限公司
Priority to JP2025002088U priority Critical patent/JP3252542U/en
Publication of TWM679574U publication Critical patent/TWM679574U/en

Links

Abstract

一種放電加工裝置,包含至少一載台與一整合式放電加工單元。整合式放電加工單元由複數個具模組化設計之模組化放電加工單元整合而成,且其數量可根據加工目標區或所需電極數量彈性調整。每一模組化放電加工單元配置至少一放電電極,使得整合後能以複數放電電極同時或依序對單一或複數個待加工物進行放電加工程序。複數個模組化放電加工單元可共用或各自具有供電單元、上機頭、下機頭、導電板及出線輪/收線輪等組件,並可配置絕緣構件及排渣單元,以提升加工穩定性與排渣效率。本創作藉由模組化整合設計,提供一種具高度彈性、效率與品質之放電加工解決方案。An electrochemical machining (ECM) apparatus includes at least one platform and an integrated ECM unit. The integrated ECM unit is composed of multiple modularly designed ECM units, the number of which can be flexibly adjusted according to the target processing area or the required number of electrodes. Each modular ECM unit is equipped with at least one discharge electrode, enabling the integrated apparatus to simultaneously or sequentially perform ECM processes on single or multiple workpieces using multiple discharge electrodes. The multiple modular ECM units can share or each have components such as a power supply unit, upper head, lower head, conductive plate, and lead/reel, and can be equipped with insulation components and a slag removal unit to improve processing stability and slag removal efficiency. This invention provides a highly flexible, efficient, and high-quality ECM solution through modular integrated design.

Description

放電加工裝置Electrochemical Discharge Machining Device

本創作是有關於一種加工裝置,特別是有關於一種放電加工裝置。This invention relates to a processing apparatus, and more particularly to a discharge processing apparatus.

放電加工(Electrical Discharge Machining,EDM)是一種利用工具電極與待加工物之間產生的週期性脈衝放電所產生之高溫,對導電材料進行蝕除的非傳統加工技術。其中,線切割放電加工(Wire EDM)更是利用一條連續移動的金屬線(線電極)作為工具電極,依預定路徑對待加工物進行切割,廣泛應用於模具製造、精密零件加工、航太以及半導體晶圓切割等領域,特別是對於高硬度材料或複雜輪廓的加工具有顯著優勢。Electrical discharge machining (EDM) is a non-traditional machining technique that uses the high temperature generated by the periodic pulsed discharge between a tool electrode and the workpiece to etch away conductive materials. Wire EDM, in particular, uses a continuously moving metal wire (wire electrode) as the tool electrode to cut the workpiece along a predetermined path. It is widely used in mold making, precision parts machining, aerospace, and semiconductor wafer cutting, and has significant advantages, especially in machining high-hardness materials or complex contours.

然而,傳統的線切割放電加工裝置通常僅配置單一一條線電極進行加工程序。當需要對單一待加工物進行多道切割,或是需要同時加工複數個待加工物時,此種單線加工模式勢必需要依序執行或使用多台設備,導致加工時間冗長,整體生產效率低下。雖然曾有技術嘗試發展多線切割,但現有的多線裝置往往結構固定、缺乏彈性,難以根據不同的加工需求(如切割數量、間距或工件尺寸)進行快速調整。此外,在放電加工過程中,殘渣的排除效率直接影響加工的穩定性與表面品質,尤其在多線或高速切割時,排渣問題更為嚴峻,現有技術往往難以提供既能適應多變加工配置又能確保高效排渣的解決方案。因此,如何開發一種具備彈性配置能力,又能兼顧加工效率與排渣效能的放電加工裝置,便成為本領域亟待解決的重要課題。However, traditional wire EDM (Electro-Discharge Machining) equipment typically uses only a single wire electrode for each machining process. When multiple cuts are required on a single workpiece, or when multiple workpieces need to be processed simultaneously, this single-wire machining mode necessitates sequential execution or the use of multiple devices, resulting in lengthy processing times and low overall production efficiency. Although there have been attempts to develop multi-wire EDM, existing multi-wire devices are often structurally fixed and lack flexibility, making it difficult to quickly adjust to different processing requirements (such as the number of cuts, spacing, or workpiece size). Furthermore, the efficiency of slag removal during EDM directly affects the stability and surface quality of the machining process, especially during multi-wire or high-speed cutting, where the slag removal problem is even more severe. Existing technologies often fail to provide a solution that can adapt to varying processing configurations while ensuring efficient slag removal. Therefore, how to develop an EDM device that has flexible configuration capabilities and can balance processing efficiency and slag removal efficiency has become an important issue that needs to be addressed in this field.

有鑑於此,本創作之一目的就是在提供一種放電加工裝置,以解決上述習知技術的問題。In view of this, one of the purposes of this invention is to provide a discharge processing apparatus to solve the problems of the aforementioned prior art.

為達前述目的,本創作提出一種放電加工裝置,主要包含至少一載台,用以承載至少一待加工物,該待加工物定義有至少一加工目標區;以及一整合式放電加工單元,該整合式放電加工單元主要由具有一預定數量之至少一模組化放電加工單元整合而成,其中該模組化放電加工單元配置有至少一放電電極,用以對該載台所承載之該待加工物上之該加工目標區進行至少一放電加工程序,藉以於該加工目標區上形成至少一加工溝槽,其中該放電加工裝置係根據進行該放電加工程序之該加工目標區之數量、該放電加工程序欲形成之該加工溝槽之數量及/或該放電加工程序使用之該放電電極之數量,對應地調整該模組化放電加工單元之該預定數量。To achieve the aforementioned objectives, this invention proposes an electrochemical machining (ECM) apparatus, primarily comprising at least one platform for supporting at least one workpiece, the workpiece having at least one processing target area; and an integrated ECM unit, the integrated ECM unit being primarily composed of at least one modular ECM unit having a predetermined number, wherein each modular ECM unit is equipped with at least one discharge electrode for performing at least one ECM process on the processing target area on the workpiece supported by the platform, thereby forming at least one processing groove on the processing target area, wherein the ECM apparatus adjusts the predetermined number of the modular ECM units accordingly based on the number of processing target areas for the ECM process, the number of processing grooves to be formed by the ECM process, and/or the number of discharge electrodes used in the ECM process.

其中,該模組化放電加工單元之該預定數量為複數個,其中複數個該模組化放電加工單元係提供對應於該預定數量之複數個該放電電極進行該放電加工程序。The predetermined number of the modular discharge processing unit is multiple, and the multiple modular discharge processing units provide a discharge processing procedure corresponding to the predetermined number of discharge electrodes.

其中,該複數個該放電電極係共同電性連接至一供電單元或分別電性連接至複數個該供電單元,藉以對該待加工物進行該放電加工程序。The plurality of discharge electrodes are electrically connected together to a power supply unit or are electrically connected separately to a plurality of power supply units, thereby performing the discharge processing procedure on the workpiece.

其中,該整合式放電加工單元之該複數個該放電電極係沿著一第一方向彼此平行地分布,且係以垂直於該第一方向之一加工行進方向進行該放電加工程序。In this integrated discharge processing unit, the plurality of discharge electrodes are distributed parallel to each other along a first direction, and the discharge processing procedure is performed in a processing travel direction perpendicular to the first direction.

其中,該整合式放電加工單元之該複數個該放電電極具有複數個放電區段重合於該待加工物,且該複數個放電區段中之兩相鄰者係藉由至少一絕緣構件彼此間隔一距離,以呈實質無接觸狀態。In this integrated discharge processing unit, the plurality of discharge electrodes have a plurality of discharge segments that overlap with the workpiece, and two adjacent discharge segments are separated from each other by at least one insulating component to achieve a substantially non-contact state.

其中,每一該複數個該模組化放電加工單元之一電極導引總成係包含供該複數個該放電電極共用之一出線輪、具有複數個限位槽之複數個分線輪以及供該複數個該放電電極共用之一收線輪,其中該複數個限位槽係用以實質分隔開該複數個該放電電極且確保在一目標位置上傳輸該複數個該放電電極。Each of the plurality of modular discharge processing units includes an electrode guide assembly comprising a lead-out reel shared by the plurality of discharge electrodes, a plurality of branch reels having a plurality of limiting grooves, and a take-up reel shared by the plurality of discharge electrodes, wherein the plurality of limiting grooves are used to substantially separate the plurality of discharge electrodes and ensure that the plurality of discharge electrodes are transmitted at a target position.

其中,每一該複數個該模組化放電加工單元之一電極導引總成係包含一出線輪以及一收線輪,用以實質分隔開該複數個該放電電極且確保在一目標位置上傳輸該複數個該放電電極。Each of the plurality of modular discharge processing units has an electrode guide assembly that includes a lead-out reel and a take-up reel to substantially separate the plurality of discharge electrodes and ensure that the plurality of discharge electrodes are transmitted at a target location.

其中,每一該複數個該模組化放電加工單元之該電極導引總成更包含一張力調整輪或複數個該張力調整輪設於該出線輪及該收線輪之間,其中該放電電極或該複數個該放電電極係對應於該張力調整輪或該複數個該張力調整輪,藉以調整該放電電極或該複數個該放電電極之每一者之一張力。Each of the plurality of modular discharge processing units further includes a tension adjusting wheel or a plurality of tension adjusting wheels disposed between the lead-out wheel and the take-up wheel, wherein the discharge electrode or the plurality of discharge electrodes corresponds to the tension adjusting wheel or the plurality of tension adjusting wheels, thereby adjusting the tension of each of the discharge electrode or the plurality of discharge electrodes.

其中,該整合式放電加工單元係藉由該複數個分線輪之該複數個限位槽實質分隔開該複數個該放電電極,且該複數個該放電電極中之兩相鄰者係藉由至少一絕緣構件彼此間隔一距離,以呈實質無接觸狀態。The integrated discharge processing unit effectively separates the plurality of discharge electrodes by means of the plurality of limiting grooves of the plurality of dividing wheels, and two adjacent discharge electrodes are separated from each other by at least one insulating component to achieve a state of actual non-contact.

其中,該複數個該放電電極在對該待加工物之複數個該加工目標區進行該放電加工程序時,該複數個該放電電極係於該待加工物之該複數個該加工目標區上形成實質相同或不相同大小之複數個放電區段。When the plurality of discharge electrodes perform the discharge processing procedure on the plurality of processing target areas of the workpiece, the plurality of discharge electrodes form a plurality of discharge segments of substantially the same or different sizes on the plurality of processing target areas of the workpiece.

其中,全部的該複數個該放電電極在該放電加工程序中係對該待加工物之複數個該加工目標區進行放電,或者是僅有部份的該複數個該放電電極對該待加工物之該複數個加工目標區進行放電。In the discharge processing procedure, all of the plurality of discharge electrodes discharge the plurality of processing target areas of the workpiece, or only some of the plurality of discharge electrodes discharge the plurality of processing target areas of the workpiece.

其中,該複數個該放電電極在該放電加工程序中係以相同或不相同之一放電能量對該待加工物進行該放電加工程序。In the discharge processing procedure, the plurality of discharge electrodes apply the discharge energy to the workpiece with the same or different discharge energies.

其中,放電加工裝置更包含一排渣單元或複數個該排渣單元,用以對在進行該放電加工程序該加工目標區或複數個該加工目標區進行一排渣程序。The electrochemical discharge apparatus further includes one or more slag removal units for performing a slag removal process on the target area or multiple target areas in which the electrochemical discharge process is performed.

其中,該複數個該排渣單元係一對一地對應於該複數個該放電電極,用以在該排渣程序中分別對該加工目標區或複數個該加工目標區提供複數個外力。The plurality of slag removal units correspond one-to-one with the plurality of discharge electrodes, and are used to provide a plurality of external forces to the processing target area or the plurality of processing target areas respectively in the slag removal process.

其中,該複數個該排渣單元所提供之該複數個外力之數值為相同或不相同。The values of the plurality of external forces provided by the plurality of slag discharge units are either the same or different.

其中,該排渣單元係選自於由至少一噴水單元及至少一吸水單元所組成之族群,其中該噴水單元之數量為一個或複數個,用以各自搭配一個或複數個該吸水單元,該噴水單元所提供之一推力之數值與該吸水單元所提供之一吸力之數值為相同或不相同。The slag discharge unit is selected from a group consisting of at least one water spray unit and at least one water suction unit, wherein the number of water spray units is one or more, each of which is paired with one or more water suction units, and the value of the thrust provided by the water spray unit and the value of the suction provided by the water suction unit are the same or different.

其中,該排渣單元係搭配至少一導引結構,用以在進行該排渣程序時,將該排渣單元所提供之一外力導引至該待加工物之該加工目標區上正在進行該放電加工程序之一位置。The slag removal unit is equipped with at least one guide structure to guide the external force provided by the slag removal unit to the processing target area of the workpiece where the electro-discharge process is being performed during the slag removal process.

其中,該導引結構係與該放電電極或該複數個該放電電極之一進給動作同步運動。The guiding structure moves synchronously with the feeding action of the discharge electrode or one of the plurality of discharge electrodes.

其中,該導引結構為一片狀結構,該片狀結構之厚度實質小於或等於該加工溝槽之寬度。The guide structure is a sheet-like structure, and the thickness of the sheet-like structure is actually less than or equal to the width of the processing groove.

其中,該複數個該放電電極係共同對同一個該待加工物進行該放電加工程序,或者是分別對複數個該待加工物進行該放電加工程序。The plurality of discharge electrodes can either perform the discharge processing procedure on the same workpiece together, or perform the discharge processing procedure on the plurality of workpieces separately.

其中,該複數個該放電電極係各自對應於相同或不相同之至少一供電單元且各自經由相同或不相同之至少一控制單元之控制以各自相同或不相同之至少一加工參數對該待加工物進行該放電加工程序。The plurality of discharge electrodes each correspond to at least one power supply unit, which may be the same or different, and each is controlled by at least one control unit, which may be the same or different, to perform the discharge processing procedure on the workpiece with at least one processing parameter, which may be the same or different.

其中,複數個該放電電極之兩相鄰者係以最小化之一時間間距依序對該待加工物進行該放電加工程序。In this process, two adjacent electrodes of a plurality of discharge electrodes sequentially perform the discharge processing procedure on the workpiece with a minimized time interval.

其中,複數個該放電電極之兩相鄰者係彼此間隔一間距,且該間距係依據該待加工物進行該放電加工程序所欲獲得之至少一切割片之厚度、該複數個該放電電極之至少一放電間隙及/或該複數個該放電電極之至少一線徑而決定。Among them, two adjacent discharge electrodes are separated by a distance, which is determined based on the thickness of at least one cut piece to be obtained by performing the discharge processing on the workpiece, at least one discharge gap of the plurality of discharge electrodes and/or at least one wire diameter of the plurality of discharge electrodes.

其中,該模組化放電加工單元係具有模組化設計,用以使得複數個該模組化放電加工單元可拆式組合成該整合式放電加工單元。The modular discharge processing unit has a modular design, which allows multiple modular discharge processing units to be detachably combined into the integrated discharge processing unit.

承上所述,依本創作之放電加工裝置,其可具有一或多個下述優點:As described above, the electro-discharge processing apparatus of this invention may have one or more of the following advantages:

(1)、模組化設計與高整合性:採用模組化放電加工單元,可以輕易地組合或拆解,形成一個整合式的放電加工單元。此種設計允許使用者根據實際需求,彈性地調整模組化單元的數量。(1) Modular design and high integration: Modular discharge processing units can be easily assembled or disassembled to form an integrated discharge processing unit. This design allows users to flexibly adjust the number of modular units according to actual needs.

(2)、高度客製化與適應性:可根據加工目標區的數量、欲形成的加工溝槽數量或所需使用的放電電極數量,來調整模組化單元的配置,能夠應對單一或複數個待加工物的加工需求,且支援使用單一或複數個放電電極進行加工。(2) Highly customizable and adaptable: The configuration of modular units can be adjusted according to the number of processing target areas, the number of processing grooves to be formed, or the number of discharge electrodes required. It can meet the processing needs of one or more workpieces and supports processing using one or more discharge electrodes.

(3)、提升加工效率與彈性:複數個放電電極可同時或依序對工件進行加工,大幅提升加工速度與產能。電極可共用或各自擁有供電單元、控制單元、上機頭、下機頭、導電板、出/收線輪等,提供配置上的彈性。可設定不同的加工參數,使各電極能執行相同或不同的加工任務。放電區段的尺寸可設定為相同或不相同,以應對多樣化的加工需求。可選擇僅使用部分電極進行加工,增加操作的靈活性。複數電極間的間距可相等或不相等,適應不同的切割厚度或圖案需求。(3) Improved processing efficiency and flexibility: Multiple discharge electrodes can process workpieces simultaneously or sequentially, significantly increasing processing speed and productivity. Electrodes can share or each have its own power supply unit, control unit, upper head, lower head, conductor plate, lead/reel, etc., providing configuration flexibility. Different processing parameters can be set so that each electrode can perform the same or different processing tasks. The size of the discharge section can be set to be the same or different to meet diverse processing needs. Only some electrodes can be used for processing, increasing operational flexibility. The spacing between multiple electrodes can be equal or unequal to adapt to different cutting thicknesses or pattern requirements.

(4)、確保加工精度與穩定性:分線輪上的限位槽能有效分隔並導引複數個放電電極。可使用絕緣構件進一步確保相鄰電極間的絕緣,防止干擾與短路。張力調整輪與張力量測單元有助於維持各電極的張力穩定。振動量測單元可用於監控電極的穩定性。(4) Ensuring machining accuracy and stability: The limiting grooves on the dividing wheel effectively separate and guide multiple discharge electrodes. Insulation components can be used to further ensure insulation between adjacent electrodes, preventing interference and short circuits. Tension adjustment wheels and tension measurement units help maintain the tension stability of each electrode. Vibration measurement units can be used to monitor the stability of the electrodes.

(5)、強化排渣效果與加工品質:可選配排渣單元(如氣流、水流、超音波或磁力等),有效清除放電加工過程中產生的殘渣。排渣單元可搭配導引結構,將排渣外力精確導引至加工區域,提升排渣效率。可針對不同電極或區域施加相同或不同的排渣外力,改善排渣效果。結合推力與吸力產生單元,能更有效地排除殘渣,改善加工品質。(5) Enhanced slag removal effect and processing quality: Optional slag removal units (such as airflow, waterflow, ultrasonic, or magnetic forces) can be added to effectively remove slag generated during the electrochemical machining process. The slag removal unit can be equipped with a guide structure to precisely guide the slag removal force to the processing area, improving slag removal efficiency. The same or different slag removal forces can be applied to different electrodes or areas to improve the slag removal effect. Combining thrust and suction generating units can more effectively remove slag and improve processing quality.

為利瞭解本創作之技術特徵、內容與優點及其所能達成之功效,茲將本創作配合圖式,並以實施例之表達形式詳細說明如下,而其中所使用之圖式,其主旨僅為示意及輔助說明書之用,未必為本創作實施後之真實比例與精準配置,故不應就所附之圖式的比例與配置關係解讀、侷限本創作於實際實施上的權利範圍。此外,為使便於理解,下述實施例中的相同元件係以相同的符號標示來說明。To facilitate understanding of the technical features, content, advantages, and effects of this invention, the invention is described in detail below with accompanying drawings and examples. The drawings used are for illustrative and explanatory purposes only and may not represent the actual proportions and precise configuration of the invention in practice. Therefore, the proportions and configurations of the accompanying drawings should not be interpreted or used to limit the scope of the invention in actual implementation. Furthermore, for ease of understanding, the same elements in the following examples are indicated by the same symbols.

另外,在全篇說明書與申請專利範圍所使用的用詞,除有特別註明外,通常具有每個用詞使用在此領域中、在此揭露的內容中與特殊內容中的平常意義。某些用以描述本創作的用詞將於下或在此說明書的別處討論,以提供本領域技術人員在有關本創作的描述上額外的引導。Furthermore, unless otherwise specified, the terms used throughout this specification and the scope of the patent application generally have their ordinary meaning in the context of this art, the disclosure herein, and the specific content. Certain terms used to describe the invention will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the invention.

關於本文中如使用“第一”、“第二”、“第三”等,並非特別指稱次序或順位的意思,亦非用以限定本創作,其僅僅是為了區別以相同技術用語描述的組件或操作而已。The use of terms such as "first," "second," and "third" in this article does not specifically refer to any order or sequence, nor is it intended to limit the work. It is merely used to distinguish components or operations described using the same technical terms.

其次,在本文中如使用用詞“包含”、“包括”、“具有”、“含有”等,其均為開放性的用語,即意指包含但不限於。Secondly, when the terms “contains,” “includes,” “has,” and “contains” are used in this article, they are all open-ended terms, meaning that they include but are not limited to.

圖1為本創作之放電加工裝置之前視示意圖,其中放電電極之兩端(出線端及收線端)分別位在不同的出線輪及收線輪上,圖2為本創作之放電加工裝置之前視示意圖,其中放電電極之兩端(出線端及收線端)分別位在同一個出線輪(或,收線輪)上,圖3為本創作之放電加工裝置之上視示意圖,其中放電電極之數量為一個,圖4為本創作之放電加工裝置之上視示意圖,其中放電電極之數量為複數個。Figure 1 is a front view schematic diagram of the electro-discharge processing apparatus of the present invention, wherein the two ends of the discharge electrode (the lead-out end and the take-up end) are respectively located on different lead-out reels and take-up reels. Figure 2 is a front view schematic diagram of the electro-discharge processing apparatus of the present invention, wherein the two ends of the discharge electrode (the lead-out end and the take-up end) are respectively located on the same lead-out reel (or take-up reel). Figure 3 is a top view schematic diagram of the electro-discharge processing apparatus of the present invention, wherein the number of discharge electrodes is one. Figure 4 is a top view schematic diagram of the electro-discharge processing apparatus of the present invention, wherein the number of discharge electrodes is multiple.

請參閱圖1至圖4及其他圖示所示,本創作之放電加工裝置10主要包含至少一載台20以及一整合式放電加工單元300。載台20係用以承載至少一待加工物100。待加工物100係定義有至少一加工目標區110。整合式放電加工單元300係用以對待加工物100之加工目標區110進行放電加工程序。載台20可例如為位置固定式載台,或者為可移動、可轉動或可傾斜之運動式載台。本創作之載台20可選擇性具有承載板21(如圖1及圖2所舉例),或選擇性省略此承載板。本創作之載台20並不侷限於特定之型態,上述載台20之型態僅為示例,並非用以侷限本創作。本創作之整合式放電加工單元300主要由具有一預定數量之至少一模組化放電加工單元30整合而成。模組化放電加工單元30之預定數量不侷限於一個(如圖3所示)或複數個(例如,二個或二個以上,如圖4所示)。Referring to Figures 1 to 4 and other illustrations, the electro-machining apparatus 10 of this invention mainly comprises at least one stage 20 and an integrated electro-machining unit 300. The stage 20 is used to support at least one workpiece 100 to be processed. The workpiece 100 is defined to have at least one processing target area 110. The integrated electro-machining unit 300 is used to perform electro-machining procedures on the processing target area 110 of the workpiece 100. The stage 20 may be, for example, a fixed stage, or a movable, rotatable, or tiltable stage. The stage 20 of this invention may optionally have a support plate 21 (as exemplified in Figures 1 and 2), or this support plate may be optionally omitted. The platform 20 of this invention is not limited to a specific type; the aforementioned type of platform 20 is merely an example and is not intended to limit this invention. The integrated discharge processing unit 300 of this invention is mainly composed of at least one modular discharge processing unit 30 having a predetermined number. The predetermined number of modular discharge processing units 30 is not limited to one (as shown in FIG. 3) or a plurality of them (e.g., two or more, as shown in FIG. 4).

本創作可採用任何已知的技術手段將複數個模組化放電加工單元30整合為一個整合式放電加工單元300。舉例而言,模組化放電加工單元30係具有模組化設計,例如具有可供彼此組合之組合元件,用以例如藉由卡接方式(例如,具有對應形狀的鳩尾槽與滑塊,或者是定位孔與固定栓等)、鎖接方式、磁吸方式或其他組接方式等各種整合技術,使得複數個模組化放電加工單元30例如但不限於可拆式組合成整合式放電加工單元300。本創作可選擇性在任何屬於習知技術的放電加工單元加上模組化設計,使其成為本創作之模組化放電加工單元30,且可藉此整合為一個整合式放電加工單元300。組合元件例如為卡塊與卡槽之組合、螺孔與螺桿之組合或可彼此吸附之磁吸元件等。由於上述之組合元件之結構可依據其所採用的整合技術而對應地改變,且本創作所屬技術領域中具有通常知識者經由本創作揭示內容,應可明瞭複數個模組化放電加工單元30之間如何藉由上述之組合元件以上述之整合技術組合成整合式放電加工單元300,而且此組合元件之結構及其組合方式皆可採用任何已知的習知技術,故此處不另贅述。This invention can integrate multiple modular discharge processing units 30 into a single integrated discharge processing unit 30 using any known technical means. For example, the modular discharge processing unit 30 has a modular design, such as having combinable components that can be combined with each other, for example by various integration techniques such as snap-fit (e.g., having corresponding dovetail grooves and sliders, or positioning holes and fixing bolts, etc.), locking, magnetic attraction, or other assembly methods, so that multiple modular discharge processing units 30 can be detachably combined into an integrated discharge processing unit 30. This invention can selectively add a modular design to any discharge processing unit belonging to the prior art, making it the modular discharge processing unit 30 of this invention, and thereby integrating it into a single integrated discharge processing unit 300. The assembly elements are, for example, combinations of card blocks and slots, combinations of screw holes and screws, or magnetic elements that can attract each other. Since the structure of the above-mentioned assembly elements can be changed accordingly depending on the integration technology used, and those skilled in the art to which this invention pertains should understand from the disclosure of this invention how a plurality of modular EDM units 30 can be combined into an integrated EDM unit 300 by means of the above-mentioned assembly elements and integration technology, and since the structure of these assembly elements and their combination methods can adopt any known prior art, they will not be described in detail here.

在整合式放電加工單元300中,每個模組化放電加工單元30配置有至少一放電電極32,用以對載台20所承載之待加工物100之加工目標區110進行至少一放電加工程序,藉此可在加工目標區110上形成至少一加工溝槽120。放電加工單元30之放電電極32之兩側A為沿著第二方向Y延伸,使得放電電極32之放電區段B平行於第二方向Y,其中第二方向Y分別垂直於第一方向X與第三方向Z。本創作係以加工行進方向F平行於第三方向Z舉例說明。放電電極32之放電區段B與待加工物100之加工目標區110係例如沿著圖1所示之第二方向Y呈往復式、循環式或持續性相對移動,用以沿著加工行進方向F對待加工物100之加工目標區110進行放電加工程序。放電加工單元30之供電單元34在放電加工程序中係提供第一電源P1予放電電極32及待加工物100,用以經由放電電極32之放電區段B施加放電能量予待加工物100之加工目標區110。In the integrated electro-machining unit 300, each modular electro-machining unit 30 is equipped with at least one discharge electrode 32 for performing at least one electro-machining procedure on the processing target area 110 of the workpiece 100 supported by the stage 20, thereby forming at least one processing groove 120 on the processing target area 110. The two sides A of the discharge electrode 32 of the electro-machining unit 30 extend along a second direction Y, such that the discharge section B of the discharge electrode 32 is parallel to the second direction Y, wherein the second direction Y is perpendicular to both the first direction X and the third direction Z. This invention is illustrated by the example of the processing travel direction F being parallel to the third direction Z. The discharge section B of the discharge electrode 32 and the processing target area 110 of the workpiece 100 move relative to each other in a reciprocating, cyclic, or continuous manner, for example, along the second direction Y shown in FIG1, to perform a discharge machining process on the processing target area 110 of the workpiece 100 along the processing travel direction F. The power supply unit 34 of the discharge machining unit 30 provides a first power source P1 to the discharge electrode 32 and the workpiece 100 during the discharge machining process, so as to apply discharge energy to the processing target area 110 of the workpiece 100 through the discharge section B of the discharge electrode 32.

本創作之一項特色在於放電加工裝置10係將具有預定數量之複數個模組化放電加工單元30整合為一個整合式放電加工單元300,並根據進行放電加工程序之加工目標區110之數量、放電加工程序欲形成之加工溝槽120之數量及/或放電加工程序使用之放電電極32之數量,對應地調整上述之複數個模組化放電加工單元30之預定數量。複數個放電電極32於第一方向X上係例如但不限於彼此平行地進行放電加工程序。其中,整合式放電加工單元300之複數個放電電極32係沿著第一方向X彼此平行地分布且係以垂直於第一方向X之加工行進方向F進行放電加工程序。One feature of this invention is that the EDM apparatus 10 integrates a predetermined number of modular EDM units 30 into a single integrated EDM unit 300. The predetermined number of the modular EDM units 30 is adjusted accordingly based on the number of target areas 110 to be processed, the number of processing grooves 120 to be formed by the EDM process, and/or the number of discharge electrodes 32 used in the EDM process. The plurality of discharge electrodes 32 are, for example, but not limited to, parallel to each other in the first direction X. Specifically, the plurality of discharge electrodes 32 of the integrated EDM unit 300 are distributed parallel to each other along the first direction X and perform the EDM process in a processing travel direction F perpendicular to the first direction X.

整合式放電加工單元300所提供之放電電極32之數量係對應於上述之複數個模組化放電加工單元30之預定數量。舉例而言,假設每個模組化放電加工單元30所配置之放電電極32之數量為一個,則由上述預定數量之複數個模組化放電加工單元30所整合而成的整合式放電加工單元300將可同時提供或非同時提供相同於上述之預定數量之放電電極32。複數個放電電極32於第一方向X上係彼此平行地進行放電加工程序。同理,假設每個模組化放電加工單元30所配置之放電電極32之數量為兩個,則整合式放電加工單元300將可同時提供或非同時提供大於(兩倍於)預定數量之放電電極32,依此類推。The number of discharge electrodes 32 provided by the integrated discharge processing unit 300 corresponds to the predetermined number of the plurality of modular discharge processing units 30 described above. For example, assuming that each modular discharge processing unit 30 is equipped with one discharge electrode 32, the integrated discharge processing unit 300, which is formed by integrating the plurality of modular discharge processing units 30 described above, can simultaneously or separately provide the same predetermined number of discharge electrodes 32 as described above. The plurality of discharge electrodes 32 are discharged in parallel to each other in the first direction X. Similarly, assuming that each modular discharge processing unit 30 is equipped with two discharge electrodes 32, the integrated discharge processing unit 300 can provide more than (twice as many as) the predetermined number of discharge electrodes 32 simultaneously or not simultaneously, and so on.

本創作之複數個放電電極32可選擇性共同對同一個待加工物100進行放電加工程序(如圖4所示),或者是分別對複數個待加工物100進行放電加工程序(如圖5、圖15及圖16所示)。此外,複數個放電電極32之兩相鄰者係選擇性以最小化之一時間間距(如圖11)依序對待加工物100進行放電加工程序。The plurality of discharge electrodes 32 of this invention can selectively perform discharge processing on the same workpiece 100 together (as shown in Figure 4), or perform discharge processing on the plurality of workpieces 100 separately (as shown in Figures 5, 15 and 16). In addition, two adjacent discharge electrodes 32 selectively perform discharge processing on the workpiece 100 sequentially with a minimized time interval (as shown in Figure 11).

本創作之整合式放電加工單元300之複數個放電電極32係例如共同電性連接至一個供電單元34或分別電性連接至複數個供電單元34,藉以對待加工物100進行放電加工程序。舉例而言,複數個放電電極32係各自對應於相同(如圖5所示)或不相同(如圖15所示)的至少一供電單元34且各自經由相同(如圖5所示)或不相同(如圖15所示)的至少一控制單元90之控制以各自相同或不相同之至少一加工參數對待加工物100進行放電加工程序,藉此例如使得放電加工程序維持在目標加工狀態。每個放電電極32具有一放電區段B重合於待加工物100,用以對待加工物100進行放電加工程序,故複數個放電電極32具有複數個放電區段B重合於待加工物100,且複數個放電區段B中之兩相鄰者係藉由至少一絕緣構件56彼此間隔一距離,以呈實質無接觸狀態(如圖15所示)。上述之加工參數之種類包含加工參數之種類包含位向參數、放電電性參數、排渣(Debris Removal)參數及移動、張力參數及振動參數中之一者或複數者。放電電性參數例如但不限於放電頻率及/或放電能量等。此外,複數個放電電極32係於待加工物100之複數個加工目標區110上形成實質相同(如圖8所示)或不相同(如圖9所示)尺寸(如,長度)之複數個放電區段B。本創作不侷限於全部的複數個放電電極32在放電加工程序中對待加工物100之複數個加工目標區110進行放電(如圖8所示),或者是僅有部份的複數個放電電極32對待加工物100之複數個加工目標區110進行放電(如圖10所示)。換言之,本創作之複數個放電電極32不侷限於同時對待加工物100進行放電加工程序,複數個放電電極32可例如為依據先後順序對待加工物100之相同的或不相同的加工目標區110進行放電加工程序,或者是在放電加工程序中,僅使用部份的放電電極32而不使用其餘的放電電極32,只要整合後之整合式放電加工單元300可進行放電加工程序即落入本創作請求保護之範圍。此外,複數個放電電極32亦可選擇性以相同或不相同之放電能量對相同或不相同之待加工物100之複數個加工目標區110進行放電加工程序。舉例而言,當利用兩個以上之放電電極32依序對待加工物100之同一加工目標區110進行加工時,可對不同順序的電極設定相異的加工參數。在一實施例中,排序在先的放電電極32可使用較大的放電能量進行粗加工,而排序在後的放電電極32則使用較小的放電能量進行精修。藉此,本創作能在單一放電加工程序中,依序完成粗加工與精修程序,進而大幅提升整體加工效率與待加工物100之表面品質。The plurality of discharge electrodes 32 of the integrated electro-machining unit 300 of this invention are electrically connected, for example, to a common power supply unit 34 or to a plurality of power supply units 34 respectively, so as to perform an electro-machining process on the workpiece 100. For example, the plurality of discharge electrodes 32 each correspond to at least one power supply unit 34, which may be the same (as shown in FIG. 5) or different (as shown in FIG. 15), and each is controlled by at least one control unit 90, which may be the same (as shown in FIG. 5) or different (as shown in FIG. 15), to perform an electro-machining process on the workpiece 100 with at least one processing parameter, which may be the same or different, thereby, for example, maintaining the electro-machining process in the target processing state. Each discharge electrode 32 has a discharge section B overlapping the workpiece 100 for performing a discharge processing procedure on the workpiece 100. Therefore, a plurality of discharge electrodes 32 have a plurality of discharge sections B overlapping the workpiece 100, and two adjacent discharge sections B are separated from each other by at least one insulating member 56, thus achieving a substantially non-contact state (as shown in Figure 15). The types of processing parameters mentioned above include orientation parameters, discharge electrical parameters, debris removal parameters, and one or more of movement, tension, and vibration parameters. Discharge electrical parameters include, but are not limited to, discharge frequency and/or discharge energy. Furthermore, the plurality of discharge electrodes 32 form a plurality of discharge segments B of substantially the same (as shown in FIG8) or different (as shown in FIG9) dimensions (e.g., length) on a plurality of processing target areas 110 of the workpiece 100. This invention is not limited to all of the plurality of discharge electrodes 32 discharging the plurality of processing target areas 110 of the workpiece 100 in the discharge processing procedure (as shown in FIG8), or only some of the plurality of discharge electrodes 32 discharging the plurality of processing target areas 110 of the workpiece 100 (as shown in FIG10). In other words, the plurality of discharge electrodes 32 in this invention are not limited to performing discharge processing on the workpiece 100 simultaneously. For example, the plurality of discharge electrodes 32 can perform discharge processing on the same or different processing target areas 110 of the workpiece 100 according to a sequential order, or in the discharge processing, only some of the discharge electrodes 32 are used and the rest are not used. As long as the integrated discharge processing unit 300 can perform discharge processing, it falls within the scope of protection of this invention. In addition, the plurality of discharge electrodes 32 can also selectively perform discharge processing on the same or different processing target areas 110 of the workpiece 100 with the same or different discharge energies. For example, when two or more discharge electrodes 32 are used to process the same processing target area 110 of the workpiece 100 in sequence, different processing parameters can be set for electrodes in different orders. In one embodiment, the discharge electrode 32 that is ordered first can use a larger discharge energy for roughing, while the discharge electrode 32 that is ordered later uses a smaller discharge energy for finishing. In this way, the present invention can complete the roughing and finishing processes in a single discharge machining process, thereby greatly improving the overall processing efficiency and the surface quality of the workpiece 100.

在整合式放電加工單元300中,每個模組化放電加工單元30之放電電極32之兩側A分別跨接或環繞在電極導引總成(wire guide assembly)400上,使得放電電極32之放電區段B呈懸空狀態。放電電極32之兩端(出線端及收線端)可選擇性分別位在不同的出線輪36與收線輪36’上,如圖1所示。或者是,放電電極32之兩端(出線端及收線端)亦可選擇性分別位在同一個出線輪36(收線輪36’)上,如圖2所示。其中,每個模組化放電加工單元30之電極導引總成400係包含出線輪36、複數個分線輪37及收線輪36’,用以輸送及導引放電電極32,且選擇性例如更包含機頭組件,如上機頭31及下機頭31’,用以導引放電電極32。其中,複數個模組化放電加工單元30可共用出線輪36及/或收線輪36’(如圖6所示),或者是複數個模組化放電加工單元30各自具有對應的出線輪36及收線輪36’(如圖5所示)。出線輪36、收線輪36’及分線輪37各自例如包含組接或一體成形之承載構件40及固持構件50。承載構件40係例如為轉輪,而固持構件50例如為此轉輪之轉軸。其中,固持構件50不侷限於固定式或活動式固持承載構件40,只要可用以輸送或導引放電電極32,即可適用於本創作中。舉例而言,出線輪36及/或收線輪36’亦可選擇性分別連接至不同之轉動機構(例如馬達),藉以例如使用轉動機構轉動出線輪36及/或收線輪36’之固持構件50,進而帶動出線輪36及/或收線輪36’轉動。複數個分線輪37之固持構件50則例如為自由轉動式設置於任意高度與位置上,用以輸送及導引放電電極32。本創作之承載構件40及固持構件50還可同時作為組合元件(如圖4所示),用以使得具有預定數量之複數個模組化放電加工單元30可以彼此組接成所需之整合式放電加工單元300。In the integrated discharge processing unit 300, the two sides A of the discharge electrode 32 of each modular discharge processing unit 30 are respectively connected across or wrapped around the wire guide assembly 400, so that the discharge section B of the discharge electrode 32 is in a suspended state. The two ends (the output end and the take-up end) of the discharge electrode 32 can be selectively located on different output reels 36 and take-up reels 36', as shown in Figure 1. Alternatively, the two ends (the output end and the take-up end) of the discharge electrode 32 can also be selectively located on the same output reel 36 (take-up reel 36'), as shown in Figure 2. Each modular discharge processing unit 30 includes an electrode guiding assembly 400 comprising a lead-out reel 36, a plurality of branching reels 37, and a take-up reel 36' for conveying and guiding the discharge electrodes 32. Optionally, it may also include head components, such as an upper head 31 and a lower head 31', for guiding the discharge electrodes 32. The plurality of modular discharge processing units 30 may share the lead-out reel 36 and/or the take-up reel 36' (as shown in Figure 6), or each modular discharge processing unit 30 may have its own corresponding lead-out reel 36 and take-up reel 36' (as shown in Figure 5). Each of the lead-out reel 36, take-up reel 36', and branching reels 37 includes, for example, an assembled or integrally formed support component 40 and a retaining component 50. The supporting component 40 is, for example, a wheel, and the retaining component 50 is, for example, the shaft of this wheel. The retaining component 50 is not limited to a fixed or movable type; it can be used in this invention as long as it can be used to transport or guide the discharge electrode 32. For example, the lead-out reel 36 and/or the take-up reel 36' can be selectively connected to different rotating mechanisms (e.g., motors) to rotate the retaining components 50 of the lead-out reel 36 and/or the take-up reel 36', thereby driving the lead-out reel 36 and/or the take-up reel 36' to rotate. The retaining components 50 of the plurality of branch reels 37 are, for example, freely rotatable at any height and position for transporting and guiding the discharge electrode 32. The carrier component 40 and the retaining component 50 of this invention can also be used as combination elements (as shown in Figure 4) to enable a predetermined number of modular discharge processing units 30 to be connected to each other to form the required integrated discharge processing unit 300.

複數個分線輪37各自具有至少一限位槽42,例如設於承載構件40之表面上,其中放電電極32係限位於限位槽42中,不同限位槽42中之放電電極32可為各自電性獨立,也可為例如藉由導電板43而彼此電性連通。其中,複數個放電電極32可例如共用一個導電板43(如圖5所示),或者各自具有對應的導電板43(如圖4所示)。本創作藉由複數個限位槽42可實質分隔開複數個放電電極32且可確保在目標位置(如,加工溝槽120或其他位置)上傳輸複數個放電電極32。同理,複數個模組化放電加工單元30亦可選擇性共用上機頭(upper machine head)31及/或下機頭(lower machine head)31’,使得複數個放電電極32共用上機頭31及/或下機頭31’(如圖5所示),或者是複數個模組化放電加工單元30各自具有上機頭31及/或下機頭31’(如圖4所示),使得複數個放電電極32各自對應於一個上機頭31及/或下機頭31’。Each of the plurality of dividing wheels 37 has at least one limiting groove 42, for example, provided on the surface of the supporting component 40, wherein the discharge electrode 32 is limited in the limiting groove 42. The discharge electrodes 32 in different limiting grooves 42 can be electrically independent, or they can be electrically connected to each other, for example, through a conductive plate 43. The plurality of discharge electrodes 32 can, for example, share a single conductive plate 43 (as shown in FIG. 5), or each have a corresponding conductive plate 43 (as shown in FIG. 4). This invention can substantially separate the plurality of discharge electrodes 32 by means of the plurality of limiting grooves 42 and can ensure the transmission of the plurality of discharge electrodes 32 at the target location (e.g., the machining groove 120 or other locations). Similarly, a plurality of modular discharge processing units 30 may selectively share an upper machine head 31 and/or a lower machine head 31', such that a plurality of discharge electrodes 32 share an upper machine head 31 and/or a lower machine head 31' (as shown in Figure 5), or a plurality of modular discharge processing units 30 may each have an upper machine head 31 and/or a lower machine head 31' (as shown in Figure 4), such that a plurality of discharge electrodes 32 each correspond to an upper machine head 31 and/or a lower machine head 31'.

每一模組化放電加工單元30之電極導引總成400更選擇性包含一或複數個張力調整輪37’設於出線輪36及收線輪36’之間,其中放電電極32係各自對應一個張力調整輪37’或者是共用一個張力調整輪37’,藉以調整每個放電電極32之張力。其中,本創作亦可藉由複數個分線輪37之複數個限位槽42實質分隔開複數個放電電極32,且可進一步藉由絕緣構件56使得複數個放電電極32中之兩相鄰者彼此間隔一距離,以呈實質無接觸狀態(如圖7所示)。此外,本創作之放電加工裝置10可選擇性包含張力量測單元38,例如張力計,用於量測放電電極32的張力值。或者是,放電加工裝置10更選擇性包含振動量測單元39,用於量測放電電極32的振動值。Each modular discharge processing unit 30's electrode guide assembly 400 selectively includes one or more tension adjusting wheels 37' disposed between the lead-out wheel 36 and the take-up wheel 36', wherein each discharge electrode 32 corresponds to one tension adjusting wheel 37' or shares one tension adjusting wheel 37', thereby adjusting the tension of each discharge electrode 32. In this invention, the plurality of discharge electrodes 32 can also be substantially separated by the plurality of limiting grooves 42 of the plurality of dividing wheels 37, and further, the insulating components 56 can be used to separate two adjacent discharge electrodes 32 from each other, so as to achieve a substantially non-contact state (as shown in Figure 7). Furthermore, the electrochemical processing apparatus 10 of this invention may optionally include a tension measuring unit 38, such as a tension meter, for measuring the tension value of the discharge electrode 32. Alternatively, the electrochemical processing apparatus 10 may further optionally include a vibration measuring unit 39 for measuring the vibration value of the discharge electrode 32.

如圖12至圖14所示,模組化放電加工單元30選擇性包含一或複數個排渣單元64,用以對在進行放電加工程序之一或複數個加工目標區110進行一排渣程序,藉此可例如排除放電電極32對待加工物100施加放電能量所產生之殘渣。舉例而言,複數個排渣單元64係一對一地對應於複數個放電電極32,用以在排渣程序中分別對一或複數個加工目標區110提供複數個外力F2。排渣單元64可例如為氣流產生器、水流產生器、超音波產生器、壓電震盪器或磁力產生元件。外力F2可例如為氣流、水流、超音波震盪、壓電震盪、吸力或磁力等。上述之複數個外力F2之數值為相同或不相同。舉例而言,排渣單元64係選自於由至少一推力產生單元64a(如噴水單元)及至少一吸力產生單元64b(如吸水單元)所組成之族群(如圖12所示),其中推力產生單元64a之數量為一個或複數個,用以各自搭配一個或複數個吸力產生單元64b,推力產生單元64a所提供之推力F21之數值與吸力產生單元64b所提供之吸力F22之數值為相同或不相同。排渣單元64所產生之外力F之施加方向或施加位置係手動式或自動式可調整地對應於待加工物100之加工目標區110上正在進行放電加工程序之位置(如,加工溝槽120)。推力產生裝置64a及吸力產生裝置64b可分別推動及吸除放電加工程序在放電過程中所產生之殘渣,故可有效改善排除殘渣之效果。本創作之模組化放電加工單元30之排渣單元64選擇性更包含至少一導引結構66(如圖13所示),用以在進行排渣程序時,將排渣單元64所提供之外力F2導引至待加工物100之加工目標區110上正在進行放電加工程序之位置(如,加工溝槽120),藉此可產生輔助排渣之功效。導引結構66係與一或複數個放電電極32之進給動作同步運動。舉例而言,導引結構66係例如為片狀結構,導引結構66例如為銅箔或矽鋼片,但不侷限於上述舉例,其中導引結構66亦可例如為包含任何合適材料或者是由任何合適材料所組成,導引結構66之厚度實質小於或等於加工溝槽120之寬度。As shown in Figures 12 to 14, the modular EDM unit 30 selectively includes one or more slag removal units 64 for performing a slag removal process on one or more processing target areas 110 during the EDM process, thereby removing, for example, the residue generated by the discharge electrodes 32 applying discharge energy to the workpiece 100. For example, the plurality of slag removal units 64 correspond one-to-one with the plurality of discharge electrodes 32, providing a plurality of external forces F2 to one or more processing target areas 110 during the slag removal process. The slag removal unit 64 may be, for example, an airflow generator, a waterflow generator, an ultrasonic generator, a piezoelectric oscillator, or a magnetic force generating element. The external force F2 can be, for example, airflow, waterflow, ultrasonic vibration, piezoelectric vibration, suction, or magnetic force. The values of the plurality of external forces F2 mentioned above may be the same or different. For example, the slag discharge unit 64 is selected from a group consisting of at least one thrust generating unit 64a (such as a water spraying unit) and at least one suction generating unit 64b (such as a water suction unit) (as shown in Figure 12), wherein there is one or more thrust generating units 64a, each paired with one or more suction generating units 64b, and the value of the thrust F21 provided by the thrust generating unit 64a and the value of the suction F22 provided by the suction generating unit 64b may be the same or different. The direction or position of the external force F generated by the slag removal unit 64 is manually or automatically adjustable to correspond to the position of the electro-machining process being performed on the processing target area 110 of the workpiece 100 (e.g., processing groove 120). The thrust generating device 64a and the suction generating device 64b can respectively push and suction the slag generated during the electro-machining process, thus effectively improving the slag removal effect. The modular EDM unit 30 of this invention selectively includes at least one guide structure 66 (as shown in Figure 13) to guide the external force F2 provided by the slag removal unit 64 to the location of the EDM process being performed on the processing target area 110 of the workpiece 100 (e.g., processing the groove 120) during the slag removal process, thereby providing an auxiliary slag removal effect. The guide structure 66 moves synchronously with the feed action of one or more discharge electrodes 32. For example, the guide structure 66 is a sheet structure, such as copper foil or silicon steel sheet, but not limited to the above examples. The guide structure 66 may also contain or be composed of any suitable material. The thickness of the guide structure 66 is substantially less than or equal to the width of the processed groove 120.

上述之待加工物100可為任何導體或半導體材料,例如晶錠或晶圓等,甚至可為任何適合進行放電加工之材料,且其外形例如為圓柱狀等塊狀物或者是片狀物。以半導體材料為例,待加工物100例如由選自於由矽、砷化鎵、磷化銦、氮化鎵及碳化矽所組成之族群之半導體材料所組成。以待加工物100定義有複數個加工目標區110為例,這些加工目標區110選擇性位於待加工物100中任何適合加工之位置上。這些加工目標區110之間距對應地定義出(例如相同於)待加工物100之切割厚度、薄化厚度或切割間距等,其數值依據實際製程需求而調整,故不侷限於彼此相等或不相等。複數個放電電極32之兩相鄰者係彼此間隔一間距,且此間距係依據待加工物100進行放電加工程序所欲獲得之至少一切割片之厚度、複數個放電電極32之至少一放電間隙及/或複數個該放電電極32之至少一線徑而決定。此外,複數個放電電極32之複數個間距之數值不侷限於彼此相等或不相等,上述之複數個間距例如為複數個放電電極32之間的前後間距D1及/或左右間距D2(如圖11所示)。The workpiece 100 described above can be any conductive or semiconductor material, such as an ingot or wafer, or even any material suitable for electro-discharge machining, and its shape can be, for example, a cylindrical or sheet-like object. Taking semiconductor materials as an example, the workpiece 100 may be composed of semiconductor materials selected from the group consisting of silicon, gallium arsenide, indium phosphide, gallium nitride, and silicon carbide. For example, if the workpiece 100 is defined with a plurality of processing target regions 110, these processing target regions 110 are selectively located at any suitable processing location within the workpiece 100. The spacing between these processing target areas 110 correspondingly defines (for example, the same as) the cutting thickness, thinning thickness, or cutting spacing of the workpiece 100, and its values are adjusted according to actual process requirements, and are therefore not limited to being equal or unequal to each other. Two adjacent discharge electrodes 32 are separated by a distance, and this distance is determined based on the thickness of at least one cut piece to be obtained by the discharge processing procedure of the workpiece 100, at least one discharge gap of the plurality of discharge electrodes 32, and/or at least one wire diameter of the plurality of discharge electrodes 32. Furthermore, the values of the plurality of spacings among the plurality of discharge electrodes 32 are not limited to being equal or unequal to each other. For example, the plurality of spacings are the front-to-back spacing D1 and/or the left-to-right spacing D2 among the plurality of discharge electrodes 32 (as shown in Figure 11).

綜上所述,本創作之放電加工裝置藉由模組化設計可將具有預定數量之複數個模組化放電加工單元整合為一個整合式放電加工單元,而且可根據進行放電加工程序之加工目標區之數量、放電加工程序欲形成之加工溝槽之數量及/或放電加工程序使用之放電電極之數量,對應地調整上述之複數個模組化放電加工單元之預定數量。In summary, the electro-machining apparatus of this invention, through modular design, can integrate a predetermined number of modular electro-machining units into a single integrated electro-machining unit. Furthermore, the predetermined number of the aforementioned modular electro-machining units can be adjusted accordingly based on the number of target areas in the electro-machining process, the number of processing grooves to be formed in the electro-machining process, and/or the number of discharge electrodes used in the electro-machining process.

本創作之放電加工裝置具有以下技術優點與功效:The electroprocessing device of this invention has the following technical advantages and effects:

(1)、模組化設計與高整合性:採用模組化放電加工單元,可以輕易地組合或拆解,形成一個整合式的放電加工單元。此種設計允許使用者根據實際需求,彈性地調整模組化單元的數量。(1) Modular design and high integration: Modular discharge processing units can be easily assembled or disassembled to form an integrated discharge processing unit. This design allows users to flexibly adjust the number of modular units according to actual needs.

(2)、高度客製化與適應性:可根據加工目標區的數量、欲形成的加工溝槽數量或所需使用的放電電極數量,來調整模組化單元的配置,能夠應對單一或複數個待加工物的加工需求,且支援使用單一或複數個放電電極進行加工。(2) Highly customizable and adaptable: The configuration of modular units can be adjusted according to the number of processing target areas, the number of processing grooves to be formed, or the number of discharge electrodes required. It can meet the processing needs of one or more workpieces and supports processing using one or more discharge electrodes.

(3)、提升加工效率與彈性:複數個放電電極可同時或依序對工件進行加工,大幅提升加工速度與產能。電極可共用或各自擁有供電單元、控制單元、上機頭、下機頭、導電板、出/收線輪等,提供配置上的彈性。可設定不同的加工參數,使各電極能執行相同或不同的加工任務。放電區段的尺寸可設定為相同或不相同,以應對多樣化的加工需求。可選擇僅使用部分電極進行加工,增加操作的靈活性。複數電極間的間距可相等或不相等,適應不同的切割厚度或圖案需求。(3) Improved processing efficiency and flexibility: Multiple discharge electrodes can process workpieces simultaneously or sequentially, significantly increasing processing speed and productivity. Electrodes can share or each have its own power supply unit, control unit, upper head, lower head, conductor plate, lead/reel, etc., providing configuration flexibility. Different processing parameters can be set so that each electrode can perform the same or different processing tasks. The size of the discharge section can be set to be the same or different to meet diverse processing needs. Only some electrodes can be used for processing, increasing operational flexibility. The spacing between multiple electrodes can be equal or unequal to adapt to different cutting thicknesses or pattern requirements.

(4)、確保加工精度與穩定性:分線輪上的限位槽能有效分隔並導引複數個放電電極。可使用絕緣構件進一步確保相鄰電極間的絕緣,防止干擾與短路。張力調整輪與張力量測單元有助於維持各電極的張力穩定。振動量測單元可用於監控電極的穩定性。(4) Ensuring machining accuracy and stability: The limiting grooves on the dividing wheel effectively separate and guide multiple discharge electrodes. Insulation components can be used to further ensure insulation between adjacent electrodes, preventing interference and short circuits. Tension adjustment wheels and tension measurement units help maintain the tension stability of each electrode. Vibration measurement units can be used to monitor the stability of the electrodes.

(5)、強化排渣效果與加工品質:可選配排渣單元(如氣流、水流、超音波或磁力等),有效清除放電加工過程中產生的殘渣。排渣單元可搭配導引結構,將排渣外力精確導引至加工區域,提升排渣效率。可針對不同電極或區域施加相同或不同的排渣外力,改善排渣效果。結合推力與吸力產生單元,能更有效地排除殘渣,改善加工品質。(5) Enhanced slag removal effect and processing quality: Optional slag removal units (such as airflow, waterflow, ultrasonic, or magnetic forces) can be added to effectively remove slag generated during the electrochemical machining process. The slag removal unit can be equipped with a guide structure to precisely guide the slag removal force to the processing area, improving slag removal efficiency. The same or different slag removal forces can be applied to different electrodes or areas to improve the slag removal effect. Combining thrust and suction generating units can more effectively remove slag and improve processing quality.

以上所述僅為舉例性,而非為限制性者。任何未脫離本創作之精神與範疇,而對其進行之等效修改或變更,均應包含於後附之申請專利範圍中。The above description is illustrative and not restrictive. Any equivalent modifications or alterations made to this work without departing from its spirit and scope shall be included in the scope of the appended patent application.

10:放電加工裝置20:載台21:承載板30:模組化放電加工單元31:上機頭31’:下機頭32:放電電極34:供電單元36:出線輪36’:收線輪37:分線輪37’:張力調整輪38:張力量測單元39:振動量測單元40:承載構件42:限位槽43:導電板50:固持構件56:絕緣構件64:排渣單元64a:推力產生單元64b:吸力產生單元66:導引結構90:控制單元100:待加工物110:加工目標區120:加工溝槽300:整合式放電加工單元400:電極導引總成A:放電電極之兩側B:放電區段D1:前後間距D2:左右間距F:加工行進方向F2:外力F21:推力F22:吸力P1:第一電源X:第一方向Y:第二方向Z:第三方向10: EDM device; 20: Platform; 21: Support plate; 30: Modular EDM unit; 31: Upper head; 31’: Lower head; 32: Discharge electrode; 34: Power supply unit; 36: Lead reel; 36’: Take-up reel; 37: Divider reel; 37’: Tension adjustment reel; 38: Tension measurement unit; 39: Vibration measurement unit; 40: Supporting component; 42: Limiting groove; 43: Conductive plate; 50: Holding component; 56: Insulation component; 64: Slag removal unit; 64a: Thrust generation. Unit 64b: Suction Generating Unit 66: Guiding Structure 90: Control Unit 100: Workpiece 110: Target Area 120: Machining Groove 300: Integrated EDM Unit 400: Electrode Guiding Assembly A: Both Sides of the Discharge Electrode B: Discharge Section D1: Front-to-Back Spacing D2: Left-to-Right Spacing F: Machining Direction F2: External Force F21: Thrust F22: Suction P1: First Power Source X: First Direction Y: Second Direction Z: Third Direction

圖1為本創作之放電加工裝置之前視示意圖,其中放電電極之出線端及收線端分別位在不同的出線輪及收線輪上。Figure 1 is a front view schematic diagram of the discharge processing device of this invention, wherein the lead-out end and take-up end of the discharge electrode are located on different lead-out reels and take-up reels respectively.

圖2為本創作之放電加工裝置之前視示意圖,其中放電電極之出線端及收線端分別位在同一個出線輪或收線輪上。Figure 2 is a front view schematic diagram of the discharge processing device of this invention, wherein the lead-out end and take-up end of the discharge electrode are respectively located on the same lead-out reel or take-up reel.

圖3為本創作之放電加工裝置之上視示意圖,其中放電電極之數量為一個。Figure 3 is a top view schematic diagram of the discharge processing device of this invention, wherein the number of discharge electrodes is one.

圖4為本創作之放電加工裝置之上視示意圖,其中放電電極之數量為複數個。Figure 4 is a top view schematic diagram of the discharge processing device of this invention, wherein the number of discharge electrodes is multiple.

圖5為本創作之放電加工裝置之上視示意圖,其中複數個模組化放電加工單元共用同一個組件(供電單元、上機頭、下機頭及導電板)。Figure 5 is a top view schematic diagram of the electro-discharge processing device of this invention, in which multiple modular electro-discharge processing units share the same component (power supply unit, upper head, lower head and conductive plate).

圖6為本創作之放電加工裝置之上視示意圖,其中複數個模組化放電加工單元共用同一個組件(出線輪及/或收線輪)。Figure 6 is a top view schematic diagram of the electro-discharge processing apparatus of this invention, in which multiple modular electro-discharge processing units share the same component (leading reel and/or take-up reel).

圖7為本創作之放電加工裝置之上視示意圖,其中複數個放電電極藉由絕緣構件彼此間隔距離,以呈實質無接觸狀態。Figure 7 is a top view schematic diagram of the discharge processing device of this invention, in which multiple discharge electrodes are spaced apart by insulating components to achieve a state of actual non-contact.

圖8為本創作之放電加工裝置之側視示意圖,其中複數個放電電極之複數個放電區段的尺寸實質相同。Figure 8 is a side view of the discharge processing apparatus of this invention, wherein the multiple discharge sections of the multiple discharge electrodes are substantially the same in size.

圖9為本創作之放電加工裝置之側視示意圖,其中複數個放電電極之複數個放電區段的尺寸實質不相同。Figure 9 is a side view of the discharge processing apparatus of this invention, wherein the dimensions of the plurality of discharge sections of the plurality of discharge electrodes are substantially different.

圖10為本創作之放電加工裝置之側視示意圖,其中僅有部份的放電電極同時對待加工物進行放電加工程序。Figure 10 is a side view of the electro-machining apparatus of this invention, in which only some of the discharge electrodes simultaneously perform electro-machining on the workpiece.

圖11為本創作之放電加工裝置之側視示意圖,其中複數個放電電極之間的間距彼此相等或不相等。Figure 11 is a side view of the discharge processing apparatus of this invention, wherein the spacing between the plurality of discharge electrodes is equal or unequal.

圖12為本創作之放電加工裝置之側視示意圖,其中模組化放電加工單元具有排渣單元。Figure 12 is a side view of the electro-machining apparatus of this invention, wherein the modular electro-machining unit has a slag removal unit.

圖13為本創作之放電加工裝置之側視示意圖,其中模組化放電加工單元之排渣單元搭配有導引結構。Figure 13 is a side view of the electro-machining apparatus of this invention, wherein the slag removal unit of the modular electro-machining unit is equipped with a guide structure.

圖14為本創作之放電加工裝置之上視示意圖,其中模組化放電加工單元之排渣單元所施加之外力彼此相同或不相同。Figure 14 is a top view schematic diagram of the electro-discharge processing device of this invention, wherein the external forces applied by the slag removal unit of the modular electro-discharge processing unit are the same or different from each other.

圖15為本創作之放電加工裝置之上視示意圖,其中複數個放電電極共同對複數個待加工物進行放電加工程序。Figure 15 is a top view schematic diagram of the electro-machining apparatus of this invention, in which a plurality of discharge electrodes jointly perform an electro-machining process on a plurality of workpieces.

圖16為本創作之放電加工裝置之上視示意圖,其中複數個放電電極各自對對應之待加工物進行放電加工程序。Figure 16 is a top view schematic diagram of the electro-machining apparatus of this invention, in which multiple discharge electrodes perform electro-machining procedures on their respective workpieces.

10:放電加工裝置 10: Electrochemical Discharge Machining Device

20:載台 20: Platform

21:承載板 21: Load-bearing plate

30:模組化放電加工單元 30: Modular Electrical Discharge Machining Unit

31:上機頭 31: Upper part of the machine head

31’:下機頭 31’: Lowering the machine head

32:放電電極 32: Discharge electrode

34:供電單元 34: Power Supply Unit

36:出線輪 36: Rope feeder

36’:收線輪 36’: Take-up reel

37:分線輪 37: Split Reel

37’:張力調整輪 37’: Tension Adjustment Wheel

38:張力量測單元 38: Strength Measurement Unit

39:振動量測單元 39: Vibration Measurement Unit

40:承載構件 40: Load-bearing components

42:限位槽 42: Limiting groove

43:導電板 43: Conductive plate

50:固持構件 50: Holding Components

90:控制單元 90: Control Unit

100:待加工物 100: Work to be processed

110:加工目標區 110: Processing Target Area

120:加工溝槽 120: Processing ditches

300:整合式放電加工單元 300: Integrated Electrochemical Processing Unit

400:電極導引總成 400: Electrode Guide Assembly

A:放電電極之兩側 A: Both sides of the discharge electrode

B:放電區段 B: Discharge section

F:加工行進方向 F: Processing direction

P1:第一電源 P1: First Power Source

X:第一方向 X: First direction

Y:第二方向 Y: Second direction

Z:第三方向 Z: Third-party direction

Claims (24)

一種放電加工裝置,主要包含:至少一載台,用以承載至少一待加工物,該待加工物定義有至少一加工目標區;以及一整合式放電加工單元,該整合式放電加工單元主要由具有一預定數量之至少一模組化放電加工單元整合而成,其中該模組化放電加工單元配置有至少一放電電極,用以對該載台所承載之該待加工物上之該加工目標區進行至少一放電加工程序,藉以於該加工目標區上形成至少一加工溝槽,其中該放電加工裝置係根據進行該放電加工程序之該加工目標區之數量、該放電加工程序欲形成之該加工溝槽之數量及/或該放電加工程序使用之該放電電極之數量,對應地調整該模組化放電加工單元之該預定數量。An electrochemical machining (ECM) apparatus mainly comprises: at least one platform for supporting at least one workpiece, the workpiece having at least one processing target area; and an integrated ECM unit, the integrated ECM unit mainly composed of at least one modular ECM unit having a predetermined number, wherein the modular ECM unit is equipped with at least one discharge electrode for performing at least one ECM process on the processing target area on the workpiece supported by the platform, thereby forming at least one processing groove on the processing target area, wherein the ECM apparatus adjusts the predetermined number of the modular ECM units accordingly based on the number of processing target areas for the ECM process, the number of processing grooves to be formed by the ECM process, and/or the number of discharge electrodes used by the ECM process. 如請求項1所述之放電加工裝置,其中該模組化放電加工單元之該預定數量為複數個,其中複數個該模組化放電加工單元係提供對應於該預定數量之複數個該放電電極進行該放電加工程序。The electro-discharge processing apparatus as described in claim 1, wherein the predetermined number of the modular electro-discharge processing units is a plurality of units, wherein the plurality of modular electro-discharge processing units provide a plurality of discharge electrodes corresponding to the predetermined number for performing the electro-discharge processing procedure. 如請求項2所述之放電加工裝置,其中該複數個該放電電極係共同電性連接至一供電單元或分別電性連接至複數個該供電單元,藉以對該待加工物進行該放電加工程序。The electro-machining apparatus as described in claim 2, wherein the plurality of the discharge electrodes are electrically connected together to a power supply unit or are electrically connected separately to the plurality of the power supply units, thereby performing the electro-machining process on the workpiece. 如請求項2所述之放電加工裝置,其中該整合式放電加工單元之該複數個該放電電極係沿著一第一方向彼此平行地分布,且係以垂直於該第一方向之一加工行進方向進行該放電加工程序。The electro-machining apparatus as described in claim 2, wherein the plurality of discharge electrodes of the integrated electro-machining unit are distributed parallel to each other along a first direction, and the electro-machining process is performed in a processing travel direction perpendicular to the first direction. 如請求項2所述之放電加工裝置,其中該整合式放電加工單元之該複數個該放電電極具有複數個放電區段重合於該待加工物,且該複數個放電區段中之兩相鄰者係藉由至少一絕緣構件彼此間隔一距離,以呈實質無接觸狀態。The electro-machining apparatus as described in claim 2, wherein the plurality of discharge electrodes of the integrated electro-machining unit have a plurality of discharge segments overlapping the workpiece, and two adjacent discharge segments are separated from each other by a distance by at least one insulating component to achieve a substantially non-contact state. 如請求項2所述之放電加工裝置,其中每一該複數個該模組化放電加工單元之一電極導引總成係包含供該複數個該放電電極共用之一出線輪、具有複數個限位槽之複數個分線輪以及供該複數個該放電電極共用之一收線輪,其中該複數個限位槽係用以實質分隔開該複數個該放電電極且確保在一目標位置上傳輸該複數個該放電電極。The electro-discharge processing apparatus as described in claim 2, wherein each of the plurality of modular electro-discharge processing units includes an output reel shared by the plurality of discharge electrodes, a plurality of branch reels having a plurality of limiting grooves, and a take-up reel shared by the plurality of discharge electrodes, wherein the plurality of limiting grooves are used to substantially separate the plurality of discharge electrodes and ensure that the plurality of discharge electrodes are transmitted at a target position. 如請求項2所述之放電加工裝置,其中每一該複數個該模組化放電加工單元之一電極導引總成係包含一出線輪以及一收線輪,用以實質分隔開該複數個該放電電極且確保在一目標位置上傳輸該複數個該放電電極。The electrochemical processing apparatus as described in claim 2, wherein each of the plurality of modular electrochemical processing units has an electrode guide assembly comprising a lead-out reel and a take-up reel to substantially separate the plurality of discharge electrodes and ensure transmission of the plurality of discharge electrodes at a target location. 如請求項6或7所述之放電加工裝置,其中每一該複數個該模組化放電加工單元之該電極導引總成更包含一張力調整輪或複數個該張力調整輪設於該出線輪及該收線輪之間,其中該放電電極或該複數個該放電電極係對應於該張力調整輪或該複數個該張力調整輪,藉以調整該放電電極或該複數個該放電電極之每一者之一張力。As described in claim 6 or 7, in the electro-discharge apparatus, the electrode guide assembly of each of the plurality of modular electro-discharge units further includes a tension adjusting wheel or a plurality of the tension adjusting wheels disposed between the lead-out wheel and the take-up wheel, wherein the discharge electrode or the plurality of the discharge electrodes corresponds to the tension adjusting wheel or the plurality of the tension adjusting wheels, thereby adjusting the tension of each of the discharge electrode or the plurality of the discharge electrodes. 如請求項6所述之放電加工裝置,其中該整合式放電加工單元係藉由該複數個分線輪之該複數個限位槽實質分隔開該複數個該放電電極,且該複數個該放電電極中之兩相鄰者係藉由至少一絕緣構件彼此間隔一距離,以呈實質無接觸狀態。The electro-discharge processing apparatus as described in claim 6, wherein the integrated electro-discharge processing unit substantially separates the plurality of discharge electrodes by means of the plurality of limiting grooves of the plurality of dividing wheels, and two adjacent discharge electrodes are separated from each other by a distance by at least one insulating component to achieve a substantially non-contact state. 如請求項2所述之放電加工裝置,其中該複數個該放電電極在對該待加工物之複數個該加工目標區進行該放電加工程序時,該複數個該放電電極係於該待加工物之該複數個該加工目標區上形成實質相同或不相同大小之複數個放電區段。The electro-machining apparatus as described in claim 2, wherein when the plurality of discharge electrodes perform the electro-machining process on the plurality of processing target areas of the workpiece, the plurality of discharge electrodes form a plurality of discharge segments of substantially the same or different sizes on the plurality of processing target areas of the workpiece. 如請求項2所述之放電加工裝置,其中全部的該複數個該放電電極在該放電加工程序中係對該待加工物之複數個該加工目標區進行放電,或者是僅有部份的該複數個該放電電極對該待加工物之該複數個加工目標區進行放電。The electrochemical processing apparatus as described in claim 2, wherein all of the plurality of discharge electrodes discharge the plurality of processing target areas of the workpiece during the electrochemical processing procedure, or only some of the plurality of discharge electrodes discharge the plurality of processing target areas of the workpiece. 如請求項2所述之放電加工裝置,其中該複數個該放電電極在該放電加工程序中係以相同或不相同之一放電能量對該待加工物進行該放電加工程序。The electrochemical machining apparatus as described in claim 2, wherein the plurality of discharge electrodes perform the electrochemical machining process on the workpiece with the same or different discharge energies. 如請求項2所述之放電加工裝置,更包含一排渣單元或複數個該排渣單元,用以對在進行該放電加工程序該加工目標區或複數個該加工目標區進行一排渣程序。The electrochemical discharge apparatus as described in claim 2 further includes a slag removal unit or a plurality of such slag removal units for performing a slag removal process on the target area or a plurality of such target areas in which the electrochemical discharge process is performed. 如請求項13所述之放電加工裝置,其中該複數個該排渣單元係一對一地對應於該複數個該放電電極,用以在該排渣程序中分別對該加工目標區或複數個該加工目標區提供複數個外力。The electrochemical processing apparatus as described in claim 13, wherein the plurality of slag removal units correspond one-to-one with the plurality of discharge electrodes, for providing a plurality of external forces to the processing target area or the plurality of processing target areas respectively in the slag removal process. 如請求項14所述之放電加工裝置,其中該複數個該排渣單元所提供之該複數個外力之數值為相同或不相同。The electrochemical processing apparatus as described in claim 14, wherein the values of the plurality of external forces provided by the plurality of slag removal units are the same or different. 如請求項15所述之放電加工裝置,其中該排渣單元係選自於由至少一噴水單元及至少一吸水單元所組成之族群,其中該噴水單元之數量為一個或複數個,用以各自搭配一個或複數個該吸水單元,該噴水單元所提供之一推力之數值與該吸水單元所提供之一吸力之數值為相同或不相同。As described in claim 15, the slag removal unit is selected from a group consisting of at least one water spray unit and at least one water suction unit, wherein the number of water spray units is one or more, each paired with one or more water suction units, and the value of a thrust provided by the water spray unit and the value of a suction provided by the water suction unit are the same or different. 如請求項13所述之放電加工裝置,其中該排渣單元係搭配至少一導引結構,用以在進行該排渣程序時,將該排渣單元所提供之一外力導引至該待加工物之該加工目標區上正在進行該放電加工程序之一位置。The electro-discharge apparatus as described in claim 13, wherein the slag removal unit is equipped with at least one guide structure for guiding an external force provided by the slag removal unit to a position on the workpiece where the electro-discharge process is being performed during the slag removal process. 如請求項17所述之放電加工裝置,其中該導引結構係與該放電電極或該複數個該放電電極之一進給動作同步運動。The discharge processing apparatus as described in claim 17, wherein the guide structure moves synchronously with the feed action of the discharge electrode or one of the plurality of discharge electrodes. 如請求項17所述之放電加工裝置,其中該導引結構為一片狀結構,該片狀結構之厚度實質小於或等於該加工溝槽之寬度。The electrochemical processing apparatus as described in claim 17, wherein the guiding structure is a sheet-like structure and the thickness of the sheet-like structure is substantially less than or equal to the width of the processing groove. 如請求項2所述之放電加工裝置,其中該複數個該放電電極係共同對同一個該待加工物進行該放電加工程序,或者是分別對複數個該待加工物進行該放電加工程序。The electro-machining apparatus as described in claim 2, wherein the plurality of discharge electrodes jointly perform the electro-machining process on the same workpiece, or separately perform the electro-machining process on the plurality of workpieces. 如請求項2所述之放電加工裝置,其中該複數個該放電電極係各自對應於相同或不相同之至少一供電單元且各自經由相同或不相同之至少一控制單元之控制以各自相同或不相同之至少一加工參數對該待加工物進行該放電加工程序。The electro-machining apparatus as described in claim 2, wherein the plurality of discharge electrodes each correspond to at least one power supply unit of the same or different nature and each is controlled by at least one control unit of the same or different nature to perform the electro-machining process on the workpiece with at least one processing parameter of the same or different nature. 如請求項1所述之放電加工裝置,其中複數個該放電電極之兩相鄰者係以最小化之一時間間距依序對該待加工物進行該放電加工程序。The electrochemical processing apparatus as described in claim 1, wherein two adjacent electrodes of a plurality of the discharge electrodes sequentially perform the electrochemical processing procedure on the workpiece at a minimized time interval. 如請求項1所述之放電加工裝置,其中複數個該放電電極之兩相鄰者係彼此間隔一間距,且該間距係依據該待加工物進行該放電加工程序所欲獲得之至少一切割片之厚度、該複數個該放電電極之至少一放電間隙及/或複數個該放電電極之至少一線徑而決定。The electro-machining apparatus as described in claim 1, wherein two adjacent plurality of the discharge electrodes are spaced apart by a distance determined based on the thickness of at least one cut piece to be obtained by performing the electro-machining process on the workpiece, at least one discharge gap of the plurality of discharge electrodes, and/or at least one wire diameter of the plurality of discharge electrodes. 如請求項1所述之放電加工裝置,其中該模組化放電加工單元係具有模組化設計,用以使得複數個該模組化放電加工單元可拆式組合成該整合式放電加工單元。The electro-discharge processing apparatus as described in claim 1, wherein the modular electro-discharge processing unit has a modular design so that a plurality of the modular electro-discharge processing units can be detachably combined into the integrated electro-discharge processing unit.
TW114206029U 2024-06-28 2025-06-12 Electrical discharge machining apparatus TWM679574U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025002088U JP3252542U (en) 2024-06-28 2025-06-25 Electric discharge machining equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US63/666,101 2024-06-28

Publications (1)

Publication Number Publication Date
TWM679574U true TWM679574U (en) 2026-02-01

Family

ID=

Similar Documents

Publication Publication Date Title
US9833854B2 (en) Workpiece retainer, wire electric discharge machining device, thin-plate manufacturing method, and semiconductor-wafer manufacturing method
TWI721855B (en) Wire electric discharge machining machine
JP6195539B2 (en) Wire electrical discharge machining apparatus and semiconductor wafer manufacturing method
US20100187203A1 (en) Multi-wire electron discharge machine
JP6033190B2 (en) Multi-wire processing apparatus and multi-wire processing method
TWM679574U (en) Electrical discharge machining apparatus
Okamoto et al. Challenge to development of functional multi-wire EDM slicing method using wire electrode with track-shaped section
JP2015168030A (en) Wire electric discharge machining apparatus, thin plate manufacturing method, and semiconductor wafer manufacturing method
JP5843889B2 (en) Wire electrical discharge machine
TWI863225B (en) Electrical discharge machining apparatus
JP3252542U (en) Electric discharge machining equipment
JP5393501B2 (en) Wire electrical discharge machine
TWI885293B (en) Electrical discharge machining apparatus
Itokazu et al. Multi-wire electrical discharge slicing for silicon carbide part 2: improvement on manufacturing wafers by forty-wire EDS
JP2016140927A (en) Wafer manufacturing method, and multiple wire-electric discharge machining apparatus
JP5491161B2 (en) Wire for electric discharge machining and multi-electric discharge machining method
JPH07205141A (en) Method and apparatus for cutting wafer by wire saw
JP6558542B2 (en) EDM method
JP6647469B1 (en) Wire electric discharge machine
JPS62120960A (en) F.m.s.
JPS624516A (en) Electric discharge machine
JP2014069242A (en) Multiple wire electrical discharge machine and machining method
JP2017056502A (en) Wire electric discharge machine
JP2015208841A (en) Power supply, power supply unit, multi-wire electric discharge machine