TWM673285U - Inspection equipment for FOUP - Google Patents

Abstract

A detection device for FOUP includes a transfer mechanism installed on a shell mechanism, a plurality of first distance measuring sensors installed on the transfer mechanism, and a control device. The transfer mechanism can be controlled by the control device to drive the first distance measuring sensors to move into the box body of the FOUP. The first distance measuring sensors will measure the distance to the left and right side walls of the box body to generate a first distance measuring signal. The control device can analyze the first distance measuring signal to obtain the deformation of the box body. The structural design of the first distance measuring sensors being driven into the box body by the transfer mechanism and measuring the distance to the left and right side walls of the box body, and the design of the control device analyzing the first distance measuring signals of the first distance measuring sensors to obtain the deformation of the box body can indeed be used to accurately measure the deformation of the box body.

Description

Inspection equipment for FOUP

The present invention relates to a testing device for semiconductor manufacturing process, in particular to a testing device for wafer transfer box.

During wafer processing, wafers often need to be transferred between multiple processing stations. To ensure that the wafers are not damaged or contaminated during transfer, a front-opening unified pod (FOUP) is typically used to store and transport the wafers. A common FOUP consists of a main body and a lid. The left and right inner walls of the main body are equipped with multiple vertically spaced supporting ribs. The wafers are carried vertically between these ribs.

However, during FOUP transfer, collisions can occur. To prevent deformation and loss of wafer stability, the FOUP's structure should be regularly inspected. Current structural inspections primarily focus on the front-to-back alignment of the ribs, with little focus on deformation of the FOUP itself.

Therefore, the purpose of the present invention is to provide a detection device that can be used to detect the deformation of the box body of a FOUP.

Therefore, the present novel FOUP detection device is suitable for detecting the deformation of a FOUP box body. The detection device includes a housing structure, a transfer mechanism mounted on the housing structure, a plurality of first distance measuring sensors mounted on the transfer mechanism, and a control device signal-connecting the transfer mechanism and the first distance measuring sensors.

The shell mechanism has a supporting table for the box body to be placed downward with the opening facing forward. The transfer mechanism includes a transfer module mounted on the shell mechanism and a mounting frame provided on the transfer module. The transfer module can be controlled to drive the mounting frame to move backward and insert it into the box body placed on the supporting table. The first ranging sensors are mounted on the left and right sides of the mounting frame and can be driven by the mounting frame to move into the box body. The first ranging sensors will measure the distance to multiple different parts of a left side wall and a right side wall of the box body, and respectively generate a first ranging signal.

The control device includes a measurement control module and a deformation analysis module. The measurement control module controls the displacement module to move the mounting frame backward into the box body and controls the first distance measurement sensors to measure the distance of the box body. The deformation analysis module analyzes the first distance measurement signals to obtain a corresponding deformation of the box body.

The effectiveness of this novel design lies in: the structural design of the first distance measuring sensors can be driven by the adjustment mechanism to move deeper into the box body to measure the distance of the left and right side walls of the box body, and the design of the control device to analyze the first distance measuring signals of the first distance measuring sensors to obtain the deformation of the box body, which can be used to accurately measure the deformation of the box body.

Referring to Figures 1, 2, and 3, an embodiment of the present invention's FOUP inspection device 200 is suitable for measuring the deformation of a FOUP (Front Opening Unified Pod) body 9. The FOUP body 9 has an opening 90 for placing and removing wafers, a left sidewall 91 and a right sidewall 92 spaced apart from each other and extending vertically, a rear sidewall 93 spaced apart from the opening 90, a bottom wall 94 horizontally connected between the bottom edges of the left sidewall 91, right sidewall 92, and rear sidewall 93, and a top wall 95 horizontally connected between the top edges of the left sidewall 91, right sidewall 92, and rear sidewall 93. Three positioning grooves 941 are concavely formed on the lower surface of the bottom wall 94 .

The testing device 200 includes a housing mechanism 3 for carrying the box body 9 to be tested, a shifting mechanism 4 mounted on the housing mechanism 3, multiple touch sensors 5 mounted on the housing mechanism 3, multiple first distance measuring sensors 61 and two second distance measuring sensors 62 mounted on the shifting mechanism 4, multiple bottom distance measuring sensors 63 mounted on the housing mechanism 3, and a control device 7. The control device 7 is signal-connected to the shifting mechanism 4, the first distance measuring sensors 61, the second distance measuring sensors 62, and the bottom distance measuring sensors 63.

Referring to Figures 1, 4, and 5, the housing 3 comprises a rearward-facing workspace 301 and a plurality of rearward-facing storage spaces 302 spaced apart and arranged below the workspace 301. The housing 3 also comprises a support surface 31 positioned outside the opening of the workspace 301 and three positioning posts 32 protruding from the support surface 31.

The supporting table 31 is configured to accommodate the box body 9 with its opening facing forward toward the workspace 301. The supporting table 31 is provided with four recessed grooves 310 spaced apart in a front-to-back, left-to-right, and right-to-left arrangement. The positioning posts 32 are configured to align the box body 9 placed on the supporting table 31 with the positioning grooves 941, thereby positioning the bottom wall 94 of the box body 9 on the supporting table 31 and obscuring the grooves 310. In other words, if one of the positioning grooves 941 of the box body 9 is not aligned with the corresponding positioning post 32, and the bottom surface of the bottom wall 94 abuts against the positioning post 32, the bottom wall 94 of the box body 9 will be lifted up by the positioning post 32, preventing it from being positioned on the supporting table 31.

Referring to Figures 2, 4, and 5, the transfer mechanism 4 is installed within the workspace 301 and comprises a slide rail 411 extending forward and backward and fixed to the housing mechanism 3, a slide 412 slidably mounted on the slide rail 411, and an actuator 413 mounted on the housing mechanism 3 and connected to the slide 412. The actuator 413 can be controlled to drive the slide 412 to move forward and backward along the slide rail 411.

In this embodiment, the driver 413 employs a screw drive structure. The driver 413 includes a screw (not shown) extending forward and backward within the slide rail 411 and connected to the slide 412, and a motor drive assembly (not shown) for driving the screw. However, in practice, the driver 413 is not limited to the aforementioned types, as various methods can be used to drive the slide 412 relative to the slide rail 411, such as, but not limited to, a chain, belt, or telescopic cylinder.

The mounting frame 42 is mounted on the slide 412 and includes a bracket portion 421 extending vertically from the slide 412, and a mounting portion 422 extending rearward from the bracket portion 421 toward the opening of the workspace 301. The mounting frame 42 can be moved rearwardly out of the workspace 301 by the slide 412 and inserted into the box body 9 placed on the support surface 31 (as shown in FIG. 2 ).

Referring to Figures 4 and 6 , the touch sensors 5 are embedded in the support surface 31. Each touch sensor 5 has a triggering member 51 that protrudes upward above the support surface 31. When the box body 9 is properly placed on the support surface 31 with the positioning grooves 941 aligned with the positioning posts 32, the triggering member 51 of each touch sensor 5 is pressed and actuated by the bottom wall 94, generating a triggering signal. If the box body 9 is not aligned with one of the positioning posts 32 and is not properly placed on the support surface 31, the triggering member 51 of at least one of the touch sensors 5 will not be pressed and actuated, and the triggering signal will not be generated.

Referring to Figures 2, 4, and 7, the first distance measuring sensors 61 are symmetrically grouped on the left and right sides of the mounting portion 422 and can be moved into the box body 9 by the mounting bracket 42. Each first distance measuring sensor 61 can be used to measure the distance to the inner surface of the corresponding left sidewall 91 or right sidewall 92, thereby generating a first distance measurement signal.

In this embodiment, ten first ranging sensors 61 are installed. These first ranging sensors 61 are optical (laser) ranging devices. These first ranging sensors 61 are arranged in a staggered pattern, front to back, and vertically, on each side of the mounting portion 422. They can measure distances at five points on the corresponding left or right sidewall 91 or 92. However, in practice, the number of first ranging sensors 61 installed on each side of the mounting portion 422 is not limited to this number and can be increased or decreased as needed.

The second distance measuring sensors 62 are respectively mounted on the left and right sides of the mounting portion 422 and can be moved into the interior of the box body 9 by the mounting bracket 42. Each second distance measuring sensor 62 is an optical (laser) distance measuring device that can measure the distance from the rear wall 93 of the box body 9 toward the opening of the workspace 301 and generate a second distance measurement signal.

The bottom distance sensors 63 are mounted below the support surface 31 and below the grooves 310. Each bottom distance sensor 63 is an optical (laser) distance measuring device that measures the distance upward through the corresponding groove 310 toward the bottom wall 94 of the box body 9 disposed on the support surface 31, thereby generating a bottom distance measurement signal.

Referring to Figures 1 and 8 , the control device 7 includes a measurement control module 71 and a deformation analysis module 72. The measurement control module 71 has multiple built-in sensing point parameters corresponding to different spacing values and a built-in measurement function. In practice, the control device 7 can be, for example, but not limited to, an electronic computer device having a CPU (Central Processing Unit) or a microprocessor.

The measurement control module 71 activates the measurement function when it is determined that all the touch sensors 5 generate the touch signal. The measurement control module 71 deactivates the measurement function when it is determined that one of the touch sensors 5 does not generate the touch signal.

When the measurement function is activated, the measurement control module 71 controls the bottom distance sensors 63 to measure the distance of the bottom wall 94 of the box body 9, thereby generating the bottom distance measurement signal. The measurement control module 71 also controls the second distance measurement sensors 62 to sense and generate the second distance measurement signal. The module further analyzes the second distance measurement signal to determine the distance between the rear end of the mounting frame 42 and the rear wall 93. Based on this distance value and the sensing point parameters, the module controls the adjustment module 41 to adjust the mounting frame 42.

When the measurement control module 71 controls the adjustment module 41 to adjust the mounting frame 42, it controls the adjustment module 41 to sequentially adjust the mounting frame 42 backward to a position corresponding to each of the distance values of the sensing point parameters based on the distance values obtained by analyzing the second distance measurement signals. This causes the mounting frame 42 to gradually move the first distance measurement sensors 61 backward deeper into the box body 9. When the measurement control module 71 controls the adjustment module 41 to move the mounting frame 42 to a position corresponding to each of the sensing point parameters, it controls each of the first distance measurement sensors 61 to sense and generate the first distance measurement signal. In other words, at each position corresponding to the sensing point parameter, five first distance measurement signals are obtained for each of the left sidewall 91 and the right sidewall 92.

The deformation analysis module 72 analyzes the distance values represented by each first distance measurement signal and each bottom distance measurement signal. Using a pre-built algorithm, it analyzes all distance values corresponding to the left sidewall 91, all distance values corresponding to the right sidewall 92, and all distance values corresponding to the bottom wall 94 to obtain a measured rectangular value corresponding to the box body 9. The deformation analysis module 72 further analyzes the relationship between the measured rectangular value and a standard rectangular value to obtain a deformation value corresponding to the box body 9.

Referring to Figures 4, 5, and 8, when the novel testing apparatus 200 is used to perform deformation testing on the box body 9, a robotic arm device (not shown) can be used to lower the box body 9 onto the support surface 31 with its opening facing forward, and align the positioning grooves 941 of the box body 9 with the positioning posts 32. When the box body 9 is properly positioned on the support surface 31, the touch sensors 5 are activated by the box body 9, generating the touch signal. The measurement control module 71 activates the measurement function when it determines that all of the touch sensors 5 have generated the touch signal. If it determines that some of the touch sensors 5 have not generated the touch signal, it issues a warning signal. This warning signal can be used, for example but not limited to, to instruct the robot arm to readjust the placement angle of the box body 9 or to alert equipment management personnel. However, in practice, the functions of the warning signal are not limited to the above.

Referring to Figures 2, 5, 7, and 8, when the measurement control module 71 activates the measurement function, it controls the adjustment module 41 to sequentially move the mounting bracket 42 backward to the position corresponding to each sensing point parameter based on the distance values obtained by analyzing the second ranging signals, thereby gradually driving the first ranging sensors 61 deeper into the box body 9. Simultaneously, the measurement control module 71 controls the first ranging sensors 61 to measure the distance from the left sidewall 91 and the right sidewall 92 of the box body 9 to obtain the first ranging signals. Furthermore, the measurement control module 71 controls the bottom ranging sensors 63 to measure the distance from the bottom wall 94 of the box body 9 to obtain the bottom ranging signal.

The deformation analysis module 72 analyzes the first distance measurement signal and the bottom distance measurement signal to obtain the deformation of the box body 9.

After the inspection of the box body 9 is completed, the robot arm can move the box body 9 away from the carrying table 31 and place it in one of the temporary spaces 302.

In this embodiment, the measurement control module 71 controls the first distance sensors 61 to measure the distances of multiple locations on the left sidewall 91 and the right sidewall 92 of the box body 9, and controls the bottom distance sensors 63 to measure the distances of multiple locations on the bottom wall 94 of the box body 9. The deformation analysis module 72 then analyzes the first distance measurement signals and the bottom distance measurement signals to determine the deformation of the box body 9. However, in another embodiment of the present invention, the bottom distance measurement sensors 63 may not be provided, and the deformation analysis module 72 may determine the deformation of the box body 9 by analyzing only the first distance measurement signals.

In addition, in this embodiment, two second distance measuring sensors 62 are used to measure the distance of the rear side wall 93 of the box body 9. However, in practice, only one second distance measuring sensor 62 can be used to measure the distance of the rear side wall 93, which can also be used to analyze and obtain the distance value between the mounting frame 42 and the rear side wall 93.

In summary, the box body 9 is positioned by supporting the supporting table 31, and the adjustment mechanism 4 can be controlled to gradually adjust the first distance measuring sensors 61 deeper into the box body 9, so that the first distance measuring sensors 61 can be used to measure the distance of the left and right side walls of the box body 9. In addition, the control device 7 controls the adjustment mechanism 4 to adjust the first distance measuring sensors 61 and analyzes the first distance measuring signals measured by the first distance measuring sensors 61 to obtain the deformation of the box body 9. This design can indeed be used to accurately measure the deformation of the box body 9.

The bottom distance measuring sensors 63 can be further used to perform distance sensing on multiple locations of the bottom wall 94 of the box body 9. This allows the control device 7 to more accurately analyze the deformation of the box body 9 by integrating and analyzing the first distance measuring signals and the bottom distance measuring signals when performing deformation analysis on the box body 9.

Therefore, this new FOUP inspection device is indeed a very innovative, convenient and practical creation, and can indeed achieve the purpose of this new invention.

However, the above description is merely an example of the present invention and should not be used to limit the scope of the present invention. All simple equivalent changes and modifications made within the scope of the patent application and the content of the patent specification are still within the scope of the present patent.

200: Testing equipment 3: Housing 301: Workspace 302: Temporary storage space 31: Loading table 310: Groove 32: Positioning column 4: Transfer mechanism 41: Transfer module 411: Slide rail 412: Slide seat 413: Actuator 42: Mounting bracket 421: Bracket 422: Mounting unit 5: Touch sensor 51: Actuator 61: First distance sensor 62: Second distance sensor 63: Bottom distance sensor 7: Control device 71: Measurement control module 72: Deformation analysis module 9: Box body 90: Opening 91: Left side wall 92: Right side wall 93: Rear side wall 94: Bottom wall 941: Positioning groove 95: Top wall

Other features and functions of the present invention are clearly illustrated in the embodiments shown in the accompanying drawings, including: Figure 1 is a perspective view illustrating an embodiment of the present invention for use with a FOUP inspection device; Figure 2 is a top cross-sectional view illustrating the embodiment inspecting a cassette body; Figure 3 is a front cross-sectional view illustrating the embodiment inspecting the cassette body; Figure 4 is an incomplete perspective view illustrating the structure of the embodiment; Figure 5 is a top cross-sectional view illustrating the embodiment supporting and positioning the cassette body; Figure 6 is an incomplete side cross-sectional view illustrating the embodiment with a trigger sensor exposed on a support surface; Figure 7 is a rear cross-sectional view schematically illustrating the embodiment, with the box body aligned with the positioning posts and placed on the support surface; and Figure 8 is a functional block diagram illustrating the functional architecture of the embodiment.

3: Housing structure

301:Working space

31: Loading table

310: Groove

32: Positioning column

4: Transferring Organizations

41: Transfer Module

411: Slide Rail

412: Slider

42: Mounting bracket

421: Bracket

422: Installation Department

5: Touch sensor

61: First distance sensor

62: Second ranging sensor

Claims (7)

A detection device for a FOUP, adapted for detecting deformation of a box body within the FOUP, comprises: A housing structure having a loading platform on which the box body is placed with its opening facing forward; A transfer mechanism comprising a transfer module mounted on the housing structure and a mounting frame mounted on the transfer module, the transfer module being controllable to drive the mounting frame to move backward and insert the box body placed on the loading platform; A plurality of first ranging sensors mounted on the left and right sides of the mounting frame and movable by the mounting frame into the box body. The first ranging sensors measure distances at various locations on a left sidewall and a right sidewall of the box body, generating a first ranging signal for each location; and A control device, signal-connected to the translation module and the first distance-measuring sensors, includes a measurement control module and a deformation analysis module. The measurement control module controls the translation module to move the mounting frame into the box body and controls the first distance-measuring sensors to measure the distance of the box body. The deformation analysis module analyzes the first distance-measuring signals to obtain a corresponding deformation of the box body. The inspection device for FOUP as described in claim 1 further includes a second ranging sensor mounted on the mounting frame and connected to the control device by signal. The second ranging sensor can be driven by the mounting frame toward the box body and can measure the distance toward a rear wall of the box body to obtain a second ranging signal. The measurement control module can analyze the second ranging signal to obtain a distance value between the mounting frame and the rear wall, and control the adjustment module to drive the mounting frame to move a distance based on the distance value. As described in claim 2, the inspection device for FOUPs has a plurality of built-in sensing point parameters corresponding to different spacing values. The measurement control module controls the transfer module to move the mounting frame to a position corresponding to each spacing value of the sensing point parameter. When controlling the transfer module to move the mounting frame to a position corresponding to each sensing point parameter, the measurement control module controls each first ranging sensor to sense and generate the first ranging signal. The deformation analysis module analyzes all the first ranging signals obtained for the sensing point parameters to obtain the deformation. An inspection device for a FOUP as described in claim 1, 2, or 3, wherein the supporting table is recessed with a plurality of grooves located below the box body, and the inspection device further includes a plurality of bottom ranging sensors installed in the shell mechanism and exposed in the grooves, each of the bottom ranging sensors can measure distance upward toward a bottom wall of the box body to obtain a bottom ranging signal, and the deformation analysis module will analyze all the first ranging signals and all the bottom ranging signals to obtain the deformation. As described in claim 4, the detection device for FOUP has three positioning grooves on the bottom surface of the bottom wall of the box body, wherein the shell mechanism also has three positioning columns protruding from the support table, and the detection device also includes three touch sensors embedded and exposed on the support table, each of which has a touch piece protruding from the support table and can be pressed downward to be triggered, and the positioning columns can be used to adjust the box body positioned on the support table downward so that the positioning grooves are aligned with each other. The touch sensor is properly positioned, and the touch member of each touch sensor is pressed downward by the bottom wall of the box body that has been properly positioned on the supporting table, thereby generating a touch signal. The measurement control module activates a measurement function when each touch sensor generates the touch signal, controls the adjustment module to adjust the mounting frame toward the box body, controls the first distance measuring sensors to sense and generate the first distance measuring signal, and controls the bottom distance measuring sensors to sense and generate the bottom distance measuring signal. As described in claim 1, the inspection equipment for FOUP, wherein the transfer module includes a slide rail extending back and forth on the shell mechanism, a slide seat mounted on the slide rail so as to be displaceable back and forth, and a driver mounted on the shell mechanism and connected to the slide seat, the mounting frame has a bracket portion upright on the slide seat, and a mounting portion protruding rearward from the bracket portion, the first ranging sensors are mounted on opposite left and right sides of the mounting portion at intervals back and forth and up and down, and the driver can be controlled to drive the slide seat to move along the slide rail, so that the mounting frame drives the first ranging sensors to move into the box body. The inspection device for FOUP as described in claim 1, wherein the housing structure further has a plurality of temporary storage spaces that can be used to respectively accommodate one of the box bodies.