TWI541112B - Device and method for detecting robot blade - Google Patents

Description

Robot arm detection device and detection method

The present invention relates to a detecting device and method, and more particularly to a detecting device and a detecting method for a robot blade.

In the manufacturing process of a semiconductor device, in order to move a wafer for production to a specific position, it is often necessary to use a robot arm to grab a germanium wafer stored in a wafer cassette. In general, the distance between the wafer and the wafer in the wafer cassette may be only about 10 mm, and the thickness of the general robot arm is about 5 mm. Therefore, when the robot arm is transported into the wafer cassette, the robot arm The thickness already occupies most of the space between the wafers, leaving only a little gap for operation. In the process of grabbing the wafer, if the position and angle of the robot arm are not confirmed first, the wafer may be hit by the abnormality of the level or height of the robot arm, which may cause the front side of the wafer or Scratches on the back side, which in turn causes abnormalities in the wafer.

The current method for confirming the position of the robot arm is mainly to manually judge the position of the robot arm by visual inspection. However, it is difficult to establish a stable standard by visual inspection, and it is difficult to know if there is no relevant distance data for judging. The position of the robot arm is correct, which is likely to cause damage to the wafer collision during production as described above.

In view of the above problems, it is necessary to design a new detecting device and method to replace the previous method of judging by manual visual inspection, so as to effectively reduce the problem of wafer damage caused by the positional inaccuracy of the robot arm.

The invention provides a detecting device for a robot arm, which can analyze the parameters such as the level and height of the robot arm by actually simulating the configuration of the wafer stack to confirm the position of the robot arm and avoid the position of the robot arm being incorrect. The problem of wafer damage.

The invention further provides a method for detecting a mechanical arm, which uses the above-mentioned detecting device to detect parameters such as the levelness and height of the robot arm, and can accurately confirm the position of the robot arm, and can timely detect the detecting device and the robot arm. Make adjustments to avoid wafer damage due to incorrect position of the robot arm.

The detecting device of the mechanical arm of the present invention comprises: a base portion; a bracket portion disposed on the base portion; the carrying portion comprising an upper carrying plate and a lower carrying plate, wherein the upper carrying plate and the lower carrying plate are spaced apart from each other by a distance The method is disposed on the bracket portion; and at least one sensor is disposed on the carrying portion for collecting the distance data of the robot arm to be detected.

In an embodiment of the invention, the base portion can be coupled to the equipment table of the robot to be detected by at least one fixing member.

In an embodiment of the invention, the bracket portion includes a plurality of support columns, and the support column has one or more support members for placing the bearing portion.

In an embodiment of the invention, the at least one sensor is disposed on an upper surface of the upper carrier plate and/or a lower surface of the lower carrier plate.

In an embodiment of the invention, the detecting device has a plurality of sensors, and the plurality of sensors are symmetrically arranged in a group of two with respect to the carrying portion, one of which is disposed in the above The upper surface of the upper carrier plate and the other are disposed on the lower surface of the lower carrier plate.

The detecting method of the robot arm of the present invention comprises: providing the detecting device of the robot arm as described above; verifying the detecting device; and conveying the robot arm to be detected to the detecting device; and one or more of the detecting devices The sensor collects the distance data; and analyzes the collected distance data.

In an embodiment of the invention, the detecting device is connected to the equipment table of the robot to be detected before the detecting device is verified.

In an embodiment of the invention, verifying the detecting device includes using a horizontal jig to confirm a distance between the upper carrier plate and the lower carrier plate.

In an embodiment of the invention, the distance data includes a distance from an upper surface of the mechanical arm to the upper carrier plate, and a distance from a lower surface of the mechanical arm to the lower carrier plate.

In an embodiment of the invention, after analyzing the distance data, the robot arm is adjusted or replaced according to the obtained analysis result.

Based on the above, the detection device and detection of the mechanical arm provided by the present invention The method can analyze the parameters such as the level and height of the robot arm by actually simulating the configuration of the wafer stack to confirm the position of the robot arm, thereby accurately confirming the position of the robot arm, and timely detecting the device and The robot arm is adjusted to avoid wafer damage caused by incorrect position of the robot arm.

The above described features and advantages of the invention will be apparent from the following description.

10‧‧‧Detection device

100‧‧‧Base section

102‧‧‧ bracket

102a‧‧‧Support column

102b‧‧‧Support members

104‧‧‧Loading Department

104a‧‧‧Upper carrier board

104b‧‧‧lower carrier board

106, 106a, 106b, 106c, 106d‧‧‧ sensors

200‧‧‧ Robotic arm

202a, 202b‧‧‧ front-end baffle

202c, 202d‧‧‧ backend board

300‧‧‧ equipment machine

301‧‧ ‧ chamber

302‧‧‧Fixed work platform

303‧‧‧Mobile work platform

304‧‧‧Fixed components

306‧‧‧Level fixture

306a‧‧‧ Rod

306b‧‧‧ gauge

400‧‧‧First support frame

402‧‧‧Second support frame

A, B, C, D‧‧‧ position

E‧‧‧Scope

d, H‧‧‧ distance

T, T’‧‧‧ thickness

S01, S02, S02-1, S03, S04, S05, S05-1, S06‧‧

Fig. 1(A) is a schematic structural view of a detecting device for a robot arm according to an embodiment of the present invention.

1(B) is a schematic view showing the position of a sensor in a detecting device of a robot arm according to an embodiment of the present invention.

2 is a flow chart showing a method of detecting a robot arm according to an embodiment of the invention.

3 is a cross-sectional view of a device and a partial enlarged view of a device for detecting a detecting device according to an embodiment of the present invention.

4(A) is a cross-sectional view showing the apparatus for detecting a robot arm according to an embodiment of the present invention, when the robot arm to be detected is transported to the detecting device for detection.

4(B) is a top view of the apparatus for detecting a robot arm according to an embodiment of the present invention, when the robot arm to be detected is transported to the detecting device for detection. Figure.

Hereinafter, embodiments of the detecting device and the detecting method of the present invention will be described in more detail with reference to the accompanying drawings.

1(A) is a schematic view showing the structure of a detecting device for a mechanical arm according to an embodiment of the present invention; and FIG. 1(B) is a schematic view showing the position of the sensor in the detecting device of the mechanical arm according to an embodiment of the present invention.

Referring first to FIG. 1(A), the detecting device 10 for a robot arm of the present invention includes a base portion 100, a bracket portion 102, a carrying portion 104, and at least one sensor 106.

The base portion 100 has, for example, a hollow shell-like structure, and the material thereof is, for example, an aluminum alloy. However, the base portion 100 is not limited thereto, and may be other structures or materials. The base portion 100 is, for example, a load port as a detecting device, and can be connected to a device machine (not shown) of the robot arm to be detected by at least one fixing member (not shown). In addition, the base portion 100 may also have a power supply function, but the present invention is not limited thereto, and another power source may be disposed at other positions of the detecting device 10 (for example, an upper portion of the bracket portion 102 in the detecting device 10) according to the requirements of the actual space configuration. Supply Department.

The bracket portion 102 is disposed on the base portion 100. In the present embodiment, the bracket portion 102 includes a plurality of support columns 102a, and the support post upper portion 102a has a plurality of support members 102b. As shown in FIG. 1(A), a space for placing the carrier portion 104 may be formed between the plurality of support members 102b, similar to the slot structure in the wafer cassette. The support post 102a is, for example, a hollow or solid pillar, and the material thereof is, for example, an aluminum alloy, but is not limited. herein. The support member 102b is, for example, a rectangular parallelepiped member, and the material thereof can be the same as that of the support post 102a, for example, an aluminum alloy, but is not limited thereto.

The carrying portion 104 includes an upper carrying plate 104a and a lower carrying plate 104b, and the upper carrying plate 104a and the lower carrying plate 104b are disposed on the bracket portion 102 in such a manner as to be substantially parallel to each other and spaced apart from each other by a distance d. The distance d is, for example, 8 mm to 12 mm, but is not limited thereto, and the user can decide according to actual needs. The material of the upper carrier plate 104a and the lower carrier plate 104b is, for example, an aluminum alloy, but is not limited thereto.

The upper carrier 104a and the lower carrier 104b can be used as a dummy wafer. More specifically, the actual simulation can be performed in the detecting device by setting the distance d between the upper carrier plate 104a and the lower carrier plate 104b as the distance between the wafers in the wafer cassette to be actually applied by the robot arm to be detected. The spatial relationship of the robot arm during operation to help confirm the correct position of the robot arm.

It should be noted that the embodiment of FIG. 1(A) only shows the structure of installing two carrier boards (ie, the upper carrier board 104a and the lower carrier board 104b), but is not limited thereto, and the detection of the present invention There may also be more than three carrier plates in the device. For example, more support members 102b can be respectively disposed on the plurality of support columns 102a of the bracket portion 102 to form a more slot structure, so that more than three carrier plates can be carried.

The sensor 106 is disposed on the carrying portion 104 for collecting distance data from the robot arm to be detected. In particular, the sensor 106 can be disposed on the upper surface of the upper carrier plate 104a and/or the lower surface of the lower carrier plate 104b. In the present embodiment, the plurality of sensors 106 are symmetric with respect to the carrier portion 104 in a group of two. The ground configuration, one of which is disposed on the upper surface of the upper carrier plate 104a and the other is disposed on the lower surface of the lower carrier plate 104b. In detail, as shown in FIG. 1(A), the carrier 104 is provided with a group of sensors 106a, a sensor 106b, a sensor 106c, and a sensor 106b, for a total of eight sensors. And two sensors in each group of sensors are respectively disposed on both sides of the carrying portion 104 (ie, one sensor is disposed on the upper surface of the upper carrier plate 104a and the lower surface of the lower carrier plate 104b, respectively). Symmetrical position.

In particular, the configuration of the sensor 106 can be determined in accordance with the shape and size of the robot arm to be detected. Referring to the top view of FIG. 1(B), a range E indicated by a broken line indicates the size of the upper carrier plate 104a or the lower carrier plate 104b of the carrier portion 104. When the robot arm 200 is to be detected, for example, The plurality of sensors 106 are respectively disposed at positions corresponding to the baffles on both sides of the front end and the rear end of the robot arm 200 on the carrier board, that is, the position A, the position B, and the position framed by the dotted line in FIG. 1(B) C and position D. Confirmation of the position of the robot arm is facilitated by arranging the sensor at the end corresponding to the robot arm.

The sensor 106 is, for example, a sensor for collecting distance data. As an example of the sensor 106, a laser distance meter, a capacitance sensing range finder, etc. are mentioned, but not limited thereto. Among them, in view of practicality and accuracy, it is preferable to use a laser range finder. Further, the number of the sensors 106 is not particularly limited, and as long as it is sufficient to complete the collection of the required data, only one may be used. From the viewpoint of being able to collect distance data quickly and accurately, it is preferable to use 4 to 8 sensors.

Further, the height of the entire detecting device 10 is, for example, 25 cm to 35 cm, the width is, for example, 20 cm to 30 cm, and the length is, for example, 25 cm to 35 cm; however, those skilled in the art should understand the size and shape of the entire detecting device 10 and its members. It can be determined according to actual needs, and is not particularly limited, and is preferably set to a size or shape that can be directly integrated into the equipment table of the robot arm to be detected.

2 is a flow chart showing a method of detecting a robot arm according to an embodiment of the invention. The detection method shown in FIG. 2 is performed by, for example, the detecting device 10 of the embodiment of FIG. 1, but is not limited thereto. Hereinafter, the detecting device 10 illustrated in the embodiment of FIG. 1(A) will be described in more detail with reference to FIGS. 2, 3, and 4(A) and 4(B) to describe the detection of the robot arm of the present invention in more detail. method.

First, the detecting device 10 for the robot arm is provided (step S01). Since the structure and material of the detecting device 10 have been described in detail in the previous paragraph, they will not be described again.

Thereafter, in order to facilitate the detection of the robot arm, the detecting device 10 can be connected to the equipment table of the robot arm to be detected. Specifically, as shown in FIG. 3, in the case where the equipment machine 300 of the robot arm to be detected has the fixed working platform 302 and the movable working platform 303, the detecting device can be used by the plurality of fixing members 304. The base portion 100 of the 10 is fixed to the movable work platform 303, whereby the detecting device 10 can be integrated into the equipment machine of the robot arm 200 to be detected.

The fixing member 304 is, for example, a guide pin or a holder disposed on the movable work platform 303, but is not limited thereto. For example, one or more pressure sensors may also be provided on the movable work platform 303 as a fixing member, whereby when the detection is to be performed When the device 10 is mounted to the movable work platform 303, whether the connection between the detecting device 10 and the movable work platform 303 is completed can be confirmed by whether the pressure sensor senses the pressure caused by the weight of the detecting device 10.

Next, the detection device 10 is verified (step S02). Specifically, the main purpose of the verification is to confirm whether the spatial relationship between the components in the detecting device 10 is the same as the object to be applied by the mechanical arm to be detected (for example, the distance d between the upper carrier plate 104a and the lower carrier plate 104b) Whether it is equal to the distance between the wafers in the wafer cassette to be applied by the robot to be tested.

3 is a cross-sectional view of a device and a partial enlarged view of a device for detecting a detecting device according to an embodiment of the present invention.

As shown in FIG. 3, verification of the detecting device 10 can be performed using a horizontal jig 306 including a stem portion 306a and a gauge 306b. For example, the horizontal jig 306 is first placed on the lower carrier plate 104b, and the distance H of the horizontal jig 306 to the surface of the stationary work platform 302 is measured by the gauge 306b. The distance T of the stem portion 306a is subtracted from the distance H to obtain the distance from the upper surface of the lower carrier plate 104b to the surface of the stationary work platform 302. That is, the height of the upper surface of the lower carrier plate 104b placed on the first layer support frame 400 formed by the support member 102b can be obtained. In addition, the order of the distance measurement by using the gauge 306b located on both sides of the rod portion 306a of the horizontal jig 306 is not particularly limited, that is, the detecting device can be used by using the gauges 306b on both sides simultaneously or sequentially. 10 to verify.

The height of the wafer surface on the first layer of the wafer carrier to be applied to the robot arm to be detected can be measured in the same manner, and the result will be obtained. The result is compared with the height of the upper surface of the lower carrier plate 104b, and it is confirmed whether the obtained result is equal to the height of the upper surface of the lower carrier plate 104b.

Next, the height of the upper surface of the upper carrier plate 104a on the second layer support frame 402 of the detecting device 10 can be confirmed in the same manner (i.e., the upper surface of the upper carrier plate 104a to the surface of the stationary work platform 302). The distance is compared with the height of the wafer surface on the second support frame in the wafer cassette to be applied by the robot arm to be detected, to confirm whether the two are equal.

By verifying the horizontal fixture, it can be confirmed whether the distance d between the upper carrier 104a and the lower carrier 104b is equal to the distance between the wafers of the wafers to be applied by the robot to be detected. It is also confirmed whether the thickness T' of the support member 102b is equivalent to the thickness of the corresponding structure in the wafer cassette to be applied.

When the result of the comparison finds that the height of the upper surface of the lower carrier plate 104b, the height of the upper surface of the upper carrier plate 104a, the distance d or the thickness T' are not equal (for example, the error is greater than 0.15 mm to 0.25 mm), Therefore, the detecting device 10 needs to be further adjusted (step S02-1), for example, adjusting the thickness of the upper carrier plate 104a and the lower carrier plate 104b, etc., to actually simulate the spatial relationship when the robot arm operates in the detecting device 10, and is more advantageous. Subsequent testing.

Next, after the verification step, the robot arm 200 to be detected is transported to the detecting device 10 (step S03). Specifically, the mechanical arm to be detected can be transported to the upper carrier board 104a and the lower carrier board 104b of the detecting device 10 by opening the gate of the chamber 301 where the robot arm 200 is located in the equipment machine. Within the space formed.

Thereafter, the distance data is collected by one or more sensors 106 in the detecting device 10 (step S04). The above distance information is, for example, data of the distance from the upper surface of the robot arm 200 to the upper carrier plate 104a, and the distance from the lower surface of the robot arm 200 to the lower carrier plate 104b.

4(A) is a cross-sectional view showing a method of detecting a mechanical arm according to an embodiment of the present invention, when a mechanical arm to be detected is transported to a detecting device for detecting; FIG. 4(B) is an embodiment of the present invention. The method of detecting the robot arm is a top view of the device when the robot arm to be detected is transported to the detecting device for detection.

Specifically, referring to FIG. 4(A) and FIG. 4(B), for example, the front end portion of the robot arm 200 is detected by the sensor 106c and the sensor 106d on the upper carrier plate 104a, and respectively obtained. The distance data of the front end baffle 202b of the robot arm 200 and the surface of the front end baffle 202a to the upper carrying plate 104a, and the portion of the lower surface of the front end of the robot arm 200 by the sensor 106c and the sensor 106d on the lower carrying plate 104b. The detection is performed, and the distance data from the position corresponding to the front end plate 202b and the front end plate 202a of the lower surface of the robot arm 200 to the lower carrier plate 104b is obtained.

Similarly, the rear end portion of the robot arm 200 can be detected by the sensor 106a and the sensor 106b on the upper carrier plate 104a, and the rear end plate 202d and the rear end plate 202c of the robot arm 200 are respectively obtained. The surface is up to the distance data of the upper carrying plate 104a, and the portion of the lower surface of the rear end of the robot arm 200 is detected by the sensor 106a and the sensor 106b on the lower carrying plate 104b, and the robots are respectively obtained. Distance data from the position of the lower surface of the arm 200 corresponding to the rear end plate 202d and the rear end plate 202c to the lower carrier plate 104b.

Finally, the collected distance data is analyzed (step S05). Specifically, for example, the distance data obtained by the respective sensors is integrated and analyzed by the calculation of the manual or computer software, thereby confirming whether the heights and levels of the front, rear, left and right ends of the robot arm 200 are normal.

After analyzing the above distance data, if a data abnormality is found, the robot arm can be adjusted or replaced according to the obtained analysis result (step S05-1). The case where the above data is abnormal is, for example, that the distance data acquired by each sensor exceeds an allowable upper limit height (for example, more than 50% of the distance between the upper carrier plate 104a and the lower carrier plate 104b) or lower than the allowable lower limit height. After adjusting or replacing the robot arm, repeat the above steps S03 to S05 to confirm whether the position of the robot arm is normal.

Further, after confirming that the position of the robot arm 200 is normal and the detection is completed (step S06), for example, a signal is transmitted through the control system of the equipment machine 300 of the robot arm 200 to retract the robot arm 200 into the chamber 301. And the detecting device 10 is detached from the movable working platform 303, and the detection is ended.

In summary, the detecting device and the detecting method of the robot arm provided by the present invention can analyze the parameters such as the level and height of the robot arm by actually simulating the configuration of the wafer stack to confirm the position of the robot arm. Therefore, the position and state of the robot arm can be accurately and quickly confirmed, and the detecting device and the robot arm can be adjusted in time to avoid wafer damage caused by incorrect position of the robot arm. problem. In addition, the detecting device of the robot arm of the present invention can be easily integrated into an existing equipment machine by the design of the member, and is advantageously used in current semiconductor processes and the like.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.

10‧‧‧Detection device

100‧‧‧Base section

102‧‧‧ bracket

102a‧‧‧Support column

102b‧‧‧Support members

104‧‧‧Loading Department

104a‧‧‧Upper carrier board

104b‧‧‧lower carrier board

106, 106a, 106b, 106c, 106d‧‧‧ sensors

D‧‧‧distance

Claims (10)

A detecting device for a mechanical arm, comprising: a base portion; a bracket portion disposed on the base portion; the carrying portion comprising an upper carrying plate and a lower carrying plate, and the upper carrying plate and the lower carrying plate are spaced apart from each other A distance is disposed on the bracket portion; and at least one sensor is disposed on the bearing portion for collecting distance data of the robot arm to be detected. The detecting device of the robot arm according to claim 1, wherein the base portion can be connected to the equipment table of the robot arm to be detected by at least one fixing member. The detecting device for a robot arm according to claim 1, wherein the bracket portion includes a plurality of support columns, and the support column has one or more supporting members for placing the bearing portion. The detecting device for a robot arm according to claim 1, wherein the at least one sensor is disposed on an upper surface of the upper carrier plate and/or a lower surface of the lower carrier plate. The detecting device of the robot arm according to claim 1, which has a plurality of sensors, and the plurality of sensors are symmetrically arranged in a group of two with respect to the carrying portion One of the configurations is disposed on an upper surface of the upper carrier plate and the other is disposed on a lower surface of the lower carrier plate. A method for detecting a robot arm, comprising: providing a detecting device for a robot arm according to any one of claims 1 to 5; verifying the detecting device; and conveying the robot arm to be detected to In the detecting device; collecting distance data by one or more sensors in the detecting device; and analyzing the collected distance data. The method of detecting a robot arm according to claim 6, wherein the detecting device is connected to the equipment machine of the robot arm to be detected before the detecting device is verified. The method for detecting a robot arm according to claim 6, wherein the verifying the detecting device comprises using a horizontal jig to confirm a distance between the upper carrier plate and the lower carrier plate. The method for detecting a robot arm according to claim 6, wherein the distance data includes a distance from an upper surface of the robot arm to the upper carrier plate, and a lower surface of the mechanical arm to the lower The distance of the carrier board. The method for detecting a robot arm according to claim 6, wherein after the distance data is analyzed, the robot arm is adjusted or replaced according to the obtained analysis result.