TWM644872U - panel storage container - Google Patents

panel storage container Download PDF

Info

Publication number
TWM644872U
TWM644872U TW112202337U TW112202337U TWM644872U TW M644872 U TWM644872 U TW M644872U TW 112202337 U TW112202337 U TW 112202337U TW 112202337 U TW112202337 U TW 112202337U TW M644872 U TWM644872 U TW M644872U
Authority
TW
Taiwan
Prior art keywords
main shaft
panel
conductive member
support
resistance value
Prior art date
Application number
TW112202337U
Other languages
Chinese (zh)
Inventor
大貫和正
Original Assignee
日商信越聚合物股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商信越聚合物股份有限公司 filed Critical 日商信越聚合物股份有限公司
Publication of TWM644872U publication Critical patent/TWM644872U/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67396Closed carriers characterised by the presence of antistatic elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67363Closed carriers specially adapted for containing substrates other than wafers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67366Closed carriers characterised by materials, roughness, coatings or the like
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67383Closed carriers characterised by substrate supports

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Gas-Filled Discharge Tubes (AREA)

Abstract

本實用新型提供一種能夠在抑制靜電放電的產生的同時對面板進行除電的面板收納容器。面板收納容器包括:容器本體,用於將多個面板以在第一方向上排列的狀態進行收納;以及面板支撐部,設置於容器本體的內側,支撐多個面板,面板支撐部包括主軸及導電性構件,所述主軸用於支撐多個面板中的一塊面板且沿與第一方向交叉的第二方向延伸,容器本體包括用於對主軸進行固定的支柱,主軸包括第二方向上的兩端部即第一端部及第二端部,導電性構件設置於第一端部,將主軸與支柱電連接,導電性構件的電阻值比主軸的電阻值及支柱的電阻值大。The utility model provides a panel storage container that can eliminate static electricity from a panel while suppressing the generation of electrostatic discharge. The panel storage container includes: a container body for storing a plurality of panels arranged in a first direction; and a panel support part disposed inside the container body to support the plurality of panels. The panel support part includes a main shaft and a conductive a sexual member, the main shaft is used to support one panel among the plurality of panels and extends along a second direction intersecting the first direction; the container body includes a support for fixing the main shaft; the main shaft includes two ends in the second direction The two ends are the first end and the second end. The conductive member is disposed at the first end to electrically connect the main shaft and the support. The resistance of the conductive member is greater than the resistance of the main shaft and the resistance of the support.

Description

面板收納容器Panel storage container

本新型創作是有關於一種面板收納容器。 The new invention relates to a panel storage container.

在處理液晶面板用玻璃基板等面板的製造步驟中,在將矩形形狀的面板從製造裝置移送至其他步驟的製造裝置時及暫時保管面板時,可使用收納多個面板的面板收納容器。例如,在日本專利特開2019-31297號公報中記載了一種面板收納容器,所述面板收納容器包括:容器本體,收納面板;以及蓋體,開閉自如地覆蓋設置於容器本體的開口部。在所述面板收納容器的內部設置有支撐一塊面板的中央下表面的長條的支持構件(主軸)。 In the manufacturing process of handling panels such as glass substrates for liquid crystal panels, when transferring rectangular panels from a manufacturing apparatus to manufacturing apparatuses in other steps and when temporarily storing panels, a panel storage container that accommodates a plurality of panels may be used. For example, Japanese Patent Application Laid-Open No. 2019-31297 describes a panel storage container that includes a container body, a storage panel, and a lid that can be opened and closed to cover an opening provided in the container body. A long support member (spindle) that supports the central lower surface of one panel is provided inside the panel storage container.

在日本專利特開2019-31297號公報所記載的面板收納容器中,主軸固定於設置在容器本體的支柱,主軸及支柱包含具有導電性的材料。支柱經由設置於容器本體的底面的定位部而電連接於外部裝置的地線。在此情況下,例如,若收納於面板收納容器中的面板帶電,則在所述面板與主軸接觸時,有可能產生靜電放電(Electro Static Discharge,ESD)。另一方面,在為了抑制靜 電放電的產生而由導電性低的材料構成主軸及支柱的情況下,面板有可能未被除電。 In the panel storage container described in Japanese Patent Application Laid-Open No. 2019-31297, the main shaft is fixed to the support column provided on the container body, and the main shaft and the support column are made of conductive material. The pillar is electrically connected to the ground of the external device via a positioning portion provided on the bottom surface of the container body. In this case, for example, if the panel stored in the panel storage container is charged, electrostatic discharge (ESD) may be generated when the panel comes into contact with the spindle. On the other hand, in order to suppress static If the main shaft and pillars are made of materials with low conductivity due to the generation of electric discharge, the panel may not be decharged.

本新型創作提供一種能夠在抑制靜電放電的產生的同時對面板進行除電的面板收納容器。 This new creation provides a panel storage container that can eliminate static electricity from the panel while suppressing the generation of electrostatic discharge.

本新型創作的一方面的面板收納容器包括:容器本體,用於將多個面板以在第一方向上排列的狀態進行收納;以及面板支撐部,設置於容器本體的內側,支撐多個面板。面板支撐部包括主軸及導電性構件,所述主軸用於支撐多個面板中的一塊面板且沿與第一方向交叉的第二方向延伸。容器本體包括用於對主軸進行固定的支柱。主軸包括第二方向上的兩端部即第一端部及第二端部。導電性構件設置於第一端部,將主軸與支柱電連接。導電性構件的電阻值比主軸的電阻值及支柱的電阻值大。 A panel storage container according to one aspect of the invention includes: a container body for storing a plurality of panels arranged in a first direction; and a panel support portion disposed inside the container body to support the plurality of panels. The panel support part includes a main shaft for supporting one panel among the plurality of panels and extending along a second direction intersecting the first direction, and a conductive member. The container body includes supports for fixing the main shaft. The main shaft includes two ends in the second direction, namely a first end and a second end. The conductive member is provided at the first end to electrically connect the main shaft and the pillar. The resistance value of the conductive member is larger than the resistance value of the main shaft and the resistance value of the support column.

在所述面板收納容器中,導電性構件將主軸與支柱電連接。導電性構件的電阻值比主軸的電阻值及支柱的電阻值大。因此,與主軸直接連接於支柱的結構相比,從主軸到達支柱的路徑的電阻值變大。由此,可抑制在主軸載置有面板時的靜電放電的產生。另一方面,由於導電性構件具有導電性,因此電能夠從載置於主軸的面板按照主軸、導電性構件及支柱的順序流動。因此,可對面板進行除電。根據以上內容,能夠在抑制靜電放電的產生的同時對面板進行除電。 In the panel storage container, the conductive member electrically connects the main shaft and the support column. The resistance value of the conductive member is larger than the resistance value of the main shaft and the resistance value of the support column. Therefore, compared with a structure in which the main shaft is directly connected to the support column, the resistance value of the path from the main shaft to the support column becomes larger. This can suppress the generation of electrostatic discharge when the panel is placed on the spindle. On the other hand, since the conductive member has conductivity, electricity can flow from the panel placed on the spindle in the order of the spindle, the conductive member, and the support column. Therefore, the panel can be decharged. According to the above, it is possible to eliminate static electricity from the panel while suppressing the generation of electrostatic discharge.

在若干實施方式中,可在支柱設置有配置有導電性構件的嵌合孔。第一端部也可經由導電性構件而嵌合於嵌合孔中。在 此情況下,在第一端部經由導電性構件而嵌合於嵌合孔中的狀態下主軸被固定於支柱,因此可將主軸可靠地固定於支柱。 In some embodiments, the pillars may be provided with fitting holes equipped with conductive members. The first end may be fitted into the fitting hole via a conductive member. exist In this case, the main shaft is fixed to the support column in a state where the first end portion is fitted into the fitting hole via the conductive member. Therefore, the main shaft can be reliably fixed to the support column.

在若干實施方式中,主軸可包括:載置部,用於載置面板;以及底座部,在第一方向上支撐載置部。載置部及底座部可沿第二方向延伸。底座部的與第一方向及第二方向交叉的第三方向上的最大長度可比載置部的第三方向上的最大長度大。由主軸的自重產生的撓曲量與主軸的剖面積成正比,與主軸的剖面二次矩成反比。在主軸的剖面沿水平方向擴張的情況下,剖面二次矩的增加量超過剖面積的增加量。因此,可在不使主軸沿鉛垂方向擴張的情況下降低由主軸的自重產生的撓曲量。其結果,在面板被搬入至面板收納容器時,或者從面板收納容器搬出面板時,可降低面板與主軸發生干涉的可能性。 In some embodiments, the main shaft may include: a placing part for placing the panel; and a base part to support the placing part in the first direction. The placing part and the base part may extend along the second direction. The maximum length of the base portion in the third direction intersecting the first direction and the second direction may be greater than the maximum length of the placing portion in the third direction. The amount of deflection caused by the self-weight of the main shaft is directly proportional to the cross-sectional area of the main shaft and inversely proportional to the second moment of the cross-section of the main shaft. When the cross-section of the main axis expands in the horizontal direction, the increase in the second moment of the cross-section exceeds the increase in the cross-sectional area. Therefore, the amount of deflection caused by the main shaft's own weight can be reduced without expanding the main shaft in the vertical direction. As a result, the possibility of interference between the panel and the spindle can be reduced when the panel is loaded into the panel storage container or when the panel is moved out of the panel storage container.

在若干實施方式中,從第二方向觀察時,由導電性構件的外周面劃定的形狀的重心與外周面的最大距離可比由嵌合孔的內周面劃定的形狀的重心與內周面的最小距離大。導電性構件可包括止擋部,所述止擋部在第一方向上與底座部的第三方向上的兩端部抵接。在此情況下,即便在繞導電性構件的軸線施加力的情況下,導電性構件的具有所述最大距離的部分也會卡在嵌合孔的內周面。由此,可防止導電性構件相對於嵌合孔繞軸線旋轉。進而,即便繞主軸的軸線施加力,導電性構件的止擋部也與主軸的底座部在第一方向上抵接,因此可防止主軸相對於導電性構件繞主軸的軸線旋轉。因此,可防止主軸相對於嵌合孔繞主軸的軸 線旋轉。 In some embodiments, when viewed from the second direction, the maximum distance between the center of gravity of the shape defined by the outer circumferential surface of the conductive member and the outer circumferential surface is greater than the maximum distance between the center of gravity and the inner circumference of the shape defined by the inner circumferential surface of the fitting hole. The minimum distance between faces is large. The conductive member may include stopper portions that are in contact with both ends of the base portion in the third direction in the first direction. In this case, even when a force is applied around the axis of the conductive member, the portion of the conductive member having the maximum distance is caught on the inner peripheral surface of the fitting hole. This prevents the conductive member from rotating about the axis relative to the fitting hole. Furthermore, even if a force is applied around the axis of the spindle, the stopper portion of the conductive member is in contact with the base portion of the spindle in the first direction, thereby preventing the spindle from rotating relative to the conductive member around the axis of the spindle. Therefore, it is possible to prevent the spindle from rotating around the axis of the spindle relative to the fitting hole. Line rotation.

在若干實施方式中,導電性構件可由樹脂材料所構成。在此情況下,可簡單地實現具有比主軸的電阻值及支柱的電阻值大的電阻值的導電性構件。 In some embodiments, the conductive member may be composed of resin material. In this case, a conductive member having a resistance value larger than the resistance value of the main shaft and the resistance value of the support can be easily realized.

在若干實施方式中,面板支撐部可包括:固定構件,用於將主軸固定於支柱;以及承接構件,設置於支柱與固定構件之間,用於將固定構件安裝於支柱。固定構件的電阻值與承接構件的電阻值的合計電阻值可為導電性構件的電阻值以上。在此情況下,從主軸到達支柱的路徑包含從主軸通過導電性構件到達支柱的路徑、以及從主軸依次通過固定構件及承接構件到達支柱的路徑。由於固定構件的電阻值與承接構件的電阻值的合計電阻值為導電性構件的電阻值以上,因此電流難以在從主軸依次通過固定構件及承接構件到達支柱的路徑中流動。因此,電流在從主軸通過導電性構件到達支柱的路徑中流動,因此可通過導電性構件來對主軸與支柱之間的導電性進行調整。其結果,可更可靠地抑制靜電放電的產生。 In some embodiments, the panel support part may include: a fixing member for fixing the main shaft to the pillar; and a receiving member disposed between the pillar and the fixing member for mounting the fixing member to the pillar. The total resistance value of the resistance value of the fixing member and the resistance value of the receiving member may be equal to or higher than the resistance value of the conductive member. In this case, the path from the main shaft to the pillar includes a path from the main axis to the pillar through the conductive member, and a path from the main axis to the pillar through the fixing member and the receiving member in order. Since the total resistance value of the fixed member and the receiving member is greater than the resistance value of the conductive member, it is difficult for an electric current to flow in the path from the spindle through the fixed member and the receiving member to the support column. Therefore, electric current flows in a path from the main shaft to the support column through the conductive member, so that the conductivity between the main shaft and the support column can be adjusted through the conductive member. As a result, the generation of electrostatic discharge can be suppressed more reliably.

在若干實施方式中,固定構件可由金屬材料所構成。承接構件可由絕緣材料所構成。在此情況下,可簡單地實現具有導電性構件的電阻值以上的合計電阻值的固定構件及承接構件。 In some embodiments, the securing member may be composed of metallic materials. The receiving member may be made of insulating material. In this case, it is possible to easily realize the fixing member and the receiving member having a total resistance value equal to or higher than the resistance value of the conductive member.

根據本新型創作,可在抑制靜電放電的產生的同時對面板進行除電。 According to this new invention, the panel can be de-charged while suppressing the generation of electrostatic discharge.

1:面板收納容器 1: Panel storage container

2:容器本體 2: Container body

2a:開口 2a: Open your mouth

3:蓋體 3: Cover

20:收容空間 20: Containment space

21:頂板 21:top plate

22:底板 22: Bottom plate

23:側壁 23:Side wall

24:背面壁 24:Back wall

25:凸緣 25:Flange

25h:上鎖孔 25h: Keyhole

26:框體 26:Frame

26a:框部 26a: Frame

26b、26c:支柱 26b, 26c: Pillars

26g:嵌合孔 26g: chimeric hole

26i:後表面 26i: rear surface

26j:前表面 26j: Front surface

26k:鍃孔 26k:郃康

26m:連通孔 26m: connecting hole

27:台座部 27:pedestal part

28:側板 28:Side panel

31:蓋本體 31: cover body

32:上鎖機構 32: Locking mechanism

33:鑰匙孔 33:Keyhole

60:面板支撐部 60: Panel support part

61、62:支撐部 61, 62: Support part

61a、62a:主軸 61a, 62a: Spindle

61b:導電性構件 61b: Conductive member

61c:端部(第一端部) 61c: end (first end)

61d:端部(第二端部) 61d: End (second end)

61e:露出部 61e:Exposed part

61f:嵌入部 61f: Embedded part

61g:止擋部 61g: Stopper

62b:彈性體 62b: Elastomer

62c、62d:端部 62c, 62d: end

63、64:止擋件 63, 64: Stopper

63a:卡止片 63a: blocking piece

65:支撐體 65:Support

71:載置部 71: Loading part

72:底座部 72: Base part

80:承接構件 80: Undertake components

81:固定構件 81: Fixed components

81a:頭部 81a:Head

81b:軸部 81b: Shaft

G1、G2:重心 G1, G2: center of gravity

L1、L2:最大長度(最大寬度) L1, L2: maximum length (maximum width)

L3:最大距離 L3: Maximum distance

L4:最小距離 L4: minimum distance

X、Y、Z:方向 X, Y, Z: direction

圖1是一實施方式的面板收納容器的分解立體圖。 FIG. 1 is an exploded perspective view of the panel storage container according to one embodiment.

圖2是沿著圖1的II-II線的剖面圖。 FIG. 2 is a cross-sectional view along line II-II of FIG. 1 .

圖3是圖2所示的支撐部及支柱的分解立體圖。 FIG. 3 is an exploded perspective view of the support part and the support column shown in FIG. 2 .

圖4是沿著圖2的IV-IV線的剖面圖。 FIG. 4 is a cross-sectional view taken along line IV-IV of FIG. 2 .

圖5是沿著圖2的V-V線的剖面圖。 FIG. 5 is a cross-sectional view along line V-V of FIG. 2 .

圖6是沿著圖5的VI-VI線的剖面圖。 FIG. 6 is a cross-sectional view along line VI-VI in FIG. 5 .

圖7是沿著圖5的VII-VII線的剖面圖。 FIG. 7 is a cross-sectional view along line VII-VII of FIG. 5 .

以下,參照附圖對本新型創作的實施方式進行詳細說明。此外,附圖的說明中,對相同元件標註相同符號,省略重複的說明。各圖中,示出XYZ坐標系。Y軸方向是與X軸方向及Z軸方向交叉(此處為正交)的方向。Z軸方向是與X軸方向及Y軸方向交叉(此處為正交)的方向。作為一例,X軸方向是左右方向(寬度方向;第三方向),Y軸方向是前後方向(縱深方向;第二方向),Z軸方向是上下方向(高度方向;第一方向)。為了方便說明,使用「前」、「後」、「上」、「下」、「左」、及「右」的用語,但不限定於這些方向。 Hereinafter, the implementation of the novel creation will be described in detail with reference to the accompanying drawings. In addition, in the description of the drawings, the same elements are denoted by the same symbols, and repeated descriptions are omitted. In each figure, an XYZ coordinate system is shown. The Y-axis direction is a direction that intersects (here, is orthogonal to) the X-axis direction and the Z-axis direction. The Z-axis direction is a direction that intersects (here, is orthogonal to) the X-axis direction and the Y-axis direction. As an example, the X-axis direction is the left-right direction (width direction; third direction), the Y-axis direction is the front-rear direction (depth direction; second direction), and the Z-axis direction is the up-down direction (height direction; first direction). For convenience of explanation, the terms "front", "rear", "upper", "lower", "left" and "right" are used, but are not limited to these directions.

參照圖1,對一實施方式的面板收納容器進行說明。圖1是一實施方式的面板收納容器的分解立體圖。圖1所示的面板收 納容器1是用於收納多個面板的容器。面板收納容器1例如依照國際半導體設備暨材料協會(Semiconductor Equipment and Materials International,SEMI)標準。作為面板的例子,可列舉液晶面板用的玻璃基板、及搭載有電子零件的面板。面板具有矩形形狀。作為面板的尺寸的例子,可列舉510mm×515mm及600mm×600mm。可收納於面板收納容器1的面板的塊數是任意規定,例如可為6塊,也可為12塊,也可為16塊,也可為24塊。 Referring to FIG. 1 , a panel storage container according to one embodiment will be described. FIG. 1 is an exploded perspective view of the panel storage container according to one embodiment. The panel shown in Figure 1 closes The storage container 1 is a container for storing a plurality of panels. The panel storage container 1 complies with Semiconductor Equipment and Materials International (SEMI) standards, for example. Examples of panels include glass substrates for liquid crystal panels and panels equipped with electronic components. The panel has a rectangular shape. Examples of panel sizes include 510mm×515mm and 600mm×600mm. The number of panels that can be stored in the panel storage container 1 is arbitrarily determined, and may be 6 panels, 12 panels, 16 panels, or 24 panels, for example.

面板收納容器1例如用於製造電子零件組裝品的製造裝置。電子零件組裝品例如是經由下述步驟等而製造:在玻璃板及不銹鋼板等大型的載體面板上搭載多數個電子零件;以環氧樹脂等將這些電子零件加以密封;將經密封的電子零件以面板形態從載體面板剝下;以及將面板形態的電子零件分別切出。面板收納容器1是用於在這些步驟間移送面板。 The panel storage container 1 is used, for example, in a manufacturing device that manufactures electronic component assemblies. Electronic component assemblies are manufactured, for example, by the following steps: mounting a plurality of electronic components on a large carrier panel such as a glass plate or a stainless steel plate; sealing these electronic components with epoxy resin; and sealing the sealed electronic components. Peel off the carrier panel in the form of a panel; and cut out the electronic components in the panel form separately. The panel storage container 1 is used to transfer panels between these steps.

面板收納容器1包括容器本體2及蓋體3。 The panel storage container 1 includes a container body 2 and a lid 3 .

容器本體2是正面(前表面)經開放的、長方體形狀的容器。換言之,容器本體2是在前表面設置有開口2a的、前開箱(front open box)型的容器。容器本體2收納多個面板。具體而言,容器本體2將多個面板以在上下方向上排列的狀態進行收納。經由開口2a將面板從容器本體2中取出或放入至容器本體2。容器本體2的詳情將在下文敘述。 The container body 2 is a rectangular parallelepiped-shaped container with an open front surface. In other words, the container body 2 is a front open box type container having the opening 2a provided on the front surface. The container body 2 accommodates a plurality of panels. Specifically, the container body 2 stores a plurality of panels in a state aligned in the vertical direction. The panel is removed from or inserted into the container body 2 via the opening 2a. Details of the container body 2 will be described later.

蓋體3是用於堵塞容器本體2的開口2a的構件。蓋體3經由墊圈等密封構件氣密地堵塞容器本體2的開口2a。蓋體3裝 卸自如地安裝於劃定開口2a的凸緣25。蓋體3包括蓋本體31及上鎖機構32。蓋本體31是蓋體3的本體部分。蓋本體31是矩形狀的板材。蓋本體31例如由鋁及鎂合金等金屬材料所構成。蓋本體31也可由聚碳酸酯樹脂等熱塑性樹脂所構成。在蓋本體31的前表面設置有鑰匙孔33。在鑰匙孔33插入未圖示的鑰匙。 The lid 3 is a member for closing the opening 2 a of the container body 2 . The lid 3 airtightly closes the opening 2 a of the container body 2 via a sealing member such as a gasket. Cover 3 pack It is detachably mounted on the flange 25 defining the opening 2a. The cover 3 includes a cover body 31 and a locking mechanism 32 . The cover body 31 is the main body part of the cover body 3 . The cover body 31 is a rectangular plate material. The cover body 31 is made of metal materials such as aluminum and magnesium alloy. The cover body 31 may be made of thermoplastic resin such as polycarbonate resin. A keyhole 33 is provided on the front surface of the cover body 31 . A key (not shown) is inserted into the key hole 33 .

上鎖機構32是通過對插入至鑰匙孔33中的鑰匙進行操作,從而將蓋體3上鎖或解鎖。上鎖機構32包括未圖示的鎖扣(latch)。在將蓋體3安裝於凸緣25的狀態下,通過利用鑰匙的操作將鎖扣嵌入至設置於凸緣25的上鎖孔25h中,從而將蓋體3上鎖。在將蓋體3上鎖的狀態下,通過利用鑰匙的操作將鎖扣從上鎖孔25h抽出,從而將蓋體3解鎖。 The locking mechanism 32 operates the key inserted into the key hole 33 to lock or unlock the cover 3 . The locking mechanism 32 includes a latch (not shown). With the cover 3 mounted on the flange 25, the cover 3 is locked by inserting the lock into the locking hole 25h provided in the flange 25 by operating the key. When the cover 3 is locked, the cover 3 is unlocked by pulling out the lock catch from the lock hole 25h by operating the key.

容器本體2及蓋體3也可通過將由金屬材料或樹脂材料所成形的多個零件組合而構成。作為樹脂材料的成形材料所含的樹脂的例子,可列舉熱塑性樹脂。作為熱塑性樹脂的例子,可列舉:聚碳酸酯、環烯烴聚合物、聚醚醯亞胺、聚醚酮、聚醚醚酮、聚對苯二甲酸丁二酯、聚縮醛、液晶聚合物、聚甲基丙烯酸甲酯等丙烯酸樹脂、及丙烯腈丁二烯苯乙烯共聚物。作為樹脂材料的成形材料所含的樹脂,可使用這些的合金(alloy)。 The container body 2 and the lid 3 may also be composed by combining a plurality of parts molded from a metal material or a resin material. Examples of the resin contained in the molding material of the resin material include thermoplastic resins. Examples of thermoplastic resins include: polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, liquid crystal polymer, Acrylic resins such as polymethyl methacrylate, and acrylonitrile butadiene styrene copolymer. As the resin contained in the molding material of the resin material, alloys of these can be used.

也可在這些樹脂中添加導電物質及各種抗靜電劑。導電物質例如包含碳纖維、碳粉末、碳奈米管或導電性聚合物等。作為抗靜電劑,可使用陰離子系、陽離子系及非離子系等抗靜電劑。也可在這些樹脂中添加苯并三唑系、水楊酸系、氰基丙烯酸酯系、 草醯苯胺(oxalic acid anilide)系及受阻胺系的紫外線吸收劑。也可在這些樹脂中選擇性地添加使剛性提高的玻璃纖維或碳纖維等。 Conductive substances and various antistatic agents can also be added to these resins. The conductive material includes, for example, carbon fibers, carbon powder, carbon nanotubes, conductive polymers, and the like. As the antistatic agent, anionic, cationic, nonionic and other antistatic agents can be used. Benzotriazole series, salicylic acid series, cyanoacrylate series, etc. can also be added to these resins. Oxalic acid anilide-based and hindered amine-based UV absorbers. Glass fibers, carbon fibers, etc. that improve rigidity can also be selectively added to these resins.

其次,對容器本體2進行詳細說明。容器本體2包括頂板21、底板22、一對側壁23、背面壁24、凸緣25、框體26、台座部27、及側板(side plate)28。 Next, the container body 2 will be described in detail. The container body 2 includes a top plate 21 , a bottom plate 22 , a pair of side walls 23 , a back wall 24 , a flange 25 , a frame 26 , a base 27 , and a side plate 28 .

頂板21、底板22、側壁23及背面壁24是矩形狀的板材。頂板21與底板22在上下方向上相互相向,且大致平行地配置。一對側壁23在左右方向上相互相向,且大致平行地配置。背面壁24將頂板21的後端與底板22的後端連結,並且將一對側壁23的後端連結。由頂板21、底板22、一對側壁23、及背面壁24劃定收容空間20。 The top plate 21, the bottom plate 22, the side walls 23 and the back wall 24 are rectangular plates. The top plate 21 and the bottom plate 22 face each other in the up-down direction and are arranged substantially in parallel. The pair of side walls 23 face each other in the left-right direction and are arranged substantially in parallel. The back wall 24 connects the rear ends of the top plate 21 and the bottom plate 22 and connects the rear ends of the pair of side walls 23 . The storage space 20 is defined by a top plate 21, a bottom plate 22, a pair of side walls 23, and a back wall 24.

頂板21、底板22及側壁23例如由鋁及不銹鋼等金屬材料所構成。背面壁24例如由可從容器本體2的外部目視收容空間20的、透明的樹脂材料所構成。背面壁24的一部分也可由透明的樹脂材料所構成。作為透明的樹脂材料的例子,可列舉丙烯酸樹脂、聚碳酸酯、氯乙烯樹脂及環烯烴聚合物。 The top plate 21 , the bottom plate 22 and the side walls 23 are made of metal materials such as aluminum and stainless steel. The back wall 24 is made of, for example, a transparent resin material that allows the storage space 20 to be visually viewed from the outside of the container body 2 . A part of the back wall 24 may be made of a transparent resin material. Examples of transparent resin materials include acrylic resin, polycarbonate, vinyl chloride resin, and cycloolefin polymer.

凸緣25是矩形狀的框體,且跨及頂板21的前端、底板22的前端及一對側壁23的前端而設置。通過凸緣25來劃定開口2a。凸緣25例如由上文所述的樹脂材料或鋁及不銹鋼等金屬材料所構成。在凸緣25的上框部及下框部分別設置有在左右方向上分開排列的兩個上鎖孔25h。上框部的上鎖孔25h與下框部的上鎖孔 25h設置於在上下方向上相互相向的位置。 The flange 25 is a rectangular frame and is provided across the front end of the top plate 21 , the front end of the bottom plate 22 and the front ends of the pair of side walls 23 . The opening 2 a is delimited by a flange 25 . The flange 25 is made of, for example, the above-mentioned resin material or metal material such as aluminum and stainless steel. The upper frame part and the lower frame part of the flange 25 are respectively provided with two upper lock holes 25h spaced apart in the left-right direction. The locking hole 25h of the upper frame and the locking hole of the lower frame 25h are provided at positions facing each other in the up-down direction.

框體26用於固定頂板21、底板22、一對側壁23及背面壁24。框體26例如由鋁及不銹鋼等金屬材料所構成。框體26設置於背面壁24的前表面。框體26具有框部26a(參照圖2)、支柱26b(參照圖2)、及一對支柱26c(參照圖2)。框部26a是矩形狀的構件,沿著背面壁24的周緣設置。 The frame 26 is used to fix the top plate 21 , the bottom plate 22 , a pair of side walls 23 and the back wall 24 . The frame 26 is made of metal materials such as aluminum and stainless steel. The frame 26 is provided on the front surface of the back wall 24 . The frame 26 has a frame part 26a (refer to FIG. 2), a support|pillar 26b (refer to FIG. 2), and a pair of support|pillar 26c (refer to FIG. 2). The frame part 26a is a rectangular member and is provided along the periphery of the back wall 24.

支柱26b及一對支柱26c是沿上下方向延伸的柱狀構件。其中一個支柱26c、支柱26b及另一個支柱26c在左右方向上按此順序排列,且相互大致平行地配置。支柱26b及一對支柱26c從框部26a的上框部延伸至下框部。支柱26b設置於框體26的左右方向上的中心。一對支柱26c設置於框體26的左右方向上的兩端附近。 The pillar 26b and the pair of pillars 26c are columnar members extending in the up-down direction. One of the pillars 26c, the pillar 26b and the other pillar 26c are arranged in this order in the left-right direction and are arranged substantially parallel to each other. The pillar 26b and the pair of pillars 26c extend from the upper frame part to the lower frame part of the frame part 26a. The pillar 26b is provided at the center of the frame 26 in the left-right direction. A pair of support pillars 26c are provided near both ends of the frame 26 in the left-right direction.

支柱26b是用於固定後述的主軸61a的構件。在支柱26b設置有用於安裝主軸61a的多個嵌合孔26g(參照圖3)。這些嵌合孔26g從支柱26b的前表面26j朝向後方凹陷。支柱26c是用於固定後述的主軸62a的構件。在支柱26c設置有用於安裝主軸62a的未圖示的多個嵌合孔。這些嵌合孔從支柱26c的前表面朝向後方凹陷。支柱26b的電阻值例如為1×10-1Ω以上且1×101Ω以下。 The support column 26b is a member for fixing the main shaft 61a described later. The support column 26b is provided with a plurality of fitting holes 26g for mounting the spindle 61a (see Fig. 3). These fitting holes 26g are recessed toward the rear from the front surface 26j of the pillar 26b. The support column 26c is a member for fixing the main shaft 62a described later. The support column 26c is provided with a plurality of fitting holes (not shown) for mounting the spindle 62a. These fitting holes are recessed toward the rear from the front surface of the pillar 26c. The resistance value of the pillar 26b is, for example, 1×10 -1 Ω or more and 1×10 1 Ω or less.

台座部27是成為容器本體2的基底(base)的部分。台座部27例如由鋁及不銹鋼等金屬材料所構成。台座部27設置於底板22的下表面。台座部27是通過將多個柱狀的支撐構件組合而構成。 The base portion 27 is a portion that serves as the base of the container body 2 . The base portion 27 is made of a metal material such as aluminum or stainless steel. The base portion 27 is provided on the lower surface of the bottom plate 22 . The base portion 27 is configured by combining a plurality of columnar support members.

側板28是用於安裝後述的支撐體65的構件。側板28是沿上下方向延伸的板狀構件。側板28例如由鋁及不銹鋼等金屬材料所構成。側板28設置於側壁23的外表面。在本實施方式中,在各側壁23設置有兩個側板28。兩個側板28在前後方向上排列,且相互大致平行地配置。一個側板28設置於側壁23的前後方向上的中心附近,另一個側板28設置於側壁23的前後方向上的前端附近。 The side plate 28 is a member for attaching the support body 65 described later. The side plate 28 is a plate-shaped member extending in the up-down direction. The side plate 28 is made of a metal material such as aluminum or stainless steel. The side plate 28 is provided on the outer surface of the side wall 23 . In this embodiment, two side plates 28 are provided on each side wall 23 . The two side plates 28 are aligned in the front-rear direction and are arranged substantially parallel to each other. One side plate 28 is provided near the center of the side wall 23 in the front-rear direction, and the other side plate 28 is provided near the front end of the side wall 23 in the front-rear direction.

在容器本體2的角部設置有用於防止顆粒(粒子)向收容空間20侵入的蓋構件。 A cover member for preventing particles (particles) from intruding into the storage space 20 is provided at a corner of the container body 2 .

其次,參照圖2對收容空間20內的結構進行說明。圖2是沿著圖1的II-II線的剖面圖。如圖2所示,面板收納容器1還包括面板支撐部60。面板支撐部60是用於支撐多個面板的部分。面板支撐部60設置於容器本體2的內部(收容空間20)。面板支撐部60包括多個支撐部61、多個支撐部62、多個止擋件63及多個止擋件64。 Next, the structure within the storage space 20 will be described with reference to FIG. 2 . FIG. 2 is a cross-sectional view along line II-II of FIG. 1 . As shown in FIG. 2 , the panel storage container 1 further includes a panel support part 60 . The panel support part 60 is a part for supporting a plurality of panels. The panel support part 60 is provided inside the container body 2 (storage space 20). The panel support part 60 includes a plurality of support parts 61 , a plurality of support parts 62 , a plurality of stoppers 63 and a plurality of stoppers 64 .

支撐部61、支撐部62、止擋件63及止擋件64的個數是根據可收納於面板收納容器1的面板的塊數而變更。在本實施方式中,面板支撐部60針對每一塊面板而包括一個支撐部61、兩個支撐部62、兩個止擋件63及兩個止擋件64。換言之,由一個支撐部61、兩個支撐部62、兩個止擋件63及兩個止擋件64形成收納一塊面板的收納段。 The numbers of the support parts 61 , 62 , stoppers 63 and 64 are changed according to the number of panels that can be stored in the panel storage container 1 . In this embodiment, the panel support part 60 includes one support part 61, two support parts 62, two stoppers 63 and two stoppers 64 for each panel. In other words, one support part 61 , two support parts 62 , two stoppers 63 and two stoppers 64 form a storage section for accommodating one panel.

支撐部61是用於支撐面板的左右方向上的中央部的部 分。支撐部61包括主軸61a及導電性構件61b。主軸61a是沿前後方向延伸的構件。主軸61a用於支撐一塊面板。主軸61a具有主軸61a的延伸方向(前後方向)上的兩端部即端部61c(第一端部;參照圖3)及端部61d(第二端部;參照圖3)。主軸61a例如由彎曲剛性高的材料所構成。作為主軸61a的構成材料的例子,可列舉不銹鋼及鋁等金屬、以及碳纖維強化塑膠。主軸61a的電阻值例如為1×10-1Ω以上且1×101Ω以下。關於主軸61a的形狀及主軸61a固定於支柱26b的形態,將在下文敘述。 The support portion 61 is a portion for supporting the center portion of the panel in the left-right direction. The support part 61 includes a main shaft 61a and a conductive member 61b. The main shaft 61a is a member extending in the front-rear direction. The main shaft 61a is used to support a panel. The main shaft 61a has an end 61c (first end; see FIG. 3 ) and an end 61d (a second end; see FIG. 3 ), which are both ends in the extension direction (the front-rear direction) of the main shaft 61a. The main shaft 61a is made of a material with high bending rigidity, for example. Examples of the constituent materials of the spindle 61a include metals such as stainless steel and aluminum, and carbon fiber reinforced plastic. The resistance value of the spindle 61a is, for example, 1×10 -1 Ω or more and 1×10 1 Ω or less. The shape of the main shaft 61a and the manner in which the main shaft 61a is fixed to the support column 26b will be described below.

導電性構件61b是將主軸61a與支柱26b電連接的構件。導電性構件61b具有前端開放且沿前後方向延伸的筒狀的形狀。導電性構件61b設置於端部61c,繞主軸61a的軸線包圍端部61c。具體而言,導電性構件61b嵌合於支柱26b的嵌合孔26g中,通過使端部61c嵌合於導電性構件61b的內部空間來保持端部61c。導電性構件61b例如由具有導電性的樹脂材料所構成。此種樹脂材料包含碳等導電性物質。導電性構件61b的電阻值比主軸61a的電阻值及支柱26b的電阻值大。導電性構件61b的電阻值例如為1×104Ω以上且1×109Ω以下。 The conductive member 61b is a member that electrically connects the main shaft 61a and the support column 26b. The conductive member 61b has a cylindrical shape with an open front end and extending in the front-rear direction. The conductive member 61b is provided at the end portion 61c and surrounds the end portion 61c around the axis of the main shaft 61a. Specifically, the conductive member 61b is fitted into the fitting hole 26g of the support column 26b, and the end portion 61c is fitted into the internal space of the conductive member 61b, thereby holding the end portion 61c. The conductive member 61b is made of, for example, a conductive resin material. This resin material contains conductive substances such as carbon. The resistance value of the conductive member 61b is larger than the resistance value of the spindle 61a and the resistance value of the support column 26b. The resistance value of the conductive member 61b is, for example, 1×10 4 Ω or more and 1×10 9 Ω or less.

支撐部62是用於支撐面板的左右方向的兩端部的部分。支撐部62具有主軸62a、多個彈性體62b及多個支撐體65。主軸62a是沿前後方向延伸的柱狀(例如圓柱狀)的構件。主軸62a用於支撐一塊面板。主軸62a具有主軸62a的延伸方向(前後方向)上的兩端部即端部62c及端部62d。主軸62a的端部62c嵌入至支 柱26c的嵌合孔中,並通過螺杆而被固定於支柱26c。 The support portion 62 is a portion for supporting both end portions of the panel in the left-right direction. The support part 62 has a main shaft 62a, a plurality of elastic bodies 62b, and a plurality of support bodies 65. The main shaft 62a is a columnar (for example, cylindrical) member extending in the front-rear direction. Spindle 62a is used to support a panel. The main shaft 62a has an end portion 62c and an end portion 62d, which are both ends in the extending direction (the front-rear direction) of the main shaft 62a. The end 62c of the main shaft 62a is embedded in the support The fitting hole of the pillar 26c is fixed to the pillar 26c by a screw.

主軸62a例如由彎曲剛性高的材料所構成。作為主軸62a的構成材料的例子,可列舉不銹鋼及鋁等金屬、以及碳纖維強化塑膠。主軸62a的前後方向上的長度比面板的前後方向上的長度而稍更長,且比主軸61a的前後方向上的長度更長。主軸61a與一對主軸62a在左右方向上排列。在一對主軸62a之間配置有主軸61a。 The main shaft 62a is made of a material with high bending rigidity, for example. Examples of the constituent material of the spindle 62a include metals such as stainless steel and aluminum, and carbon fiber reinforced plastic. The length of the main shaft 62a in the front-rear direction is slightly longer than the length of the panel in the front-rear direction, and is longer than the length of the main shaft 61a in the front-rear direction. The main shaft 61a and the pair of main shafts 62a are arranged in the left-right direction. The main shaft 61a is arranged between the pair of main shafts 62a.

彈性體62b是以繞主軸62a的軸線包圍主軸62a的方式設置的環狀(例如圓環狀)的構件。彈性體62b沿著主軸62a的表面而設置。彈性體62b是為了抑制面板的滑動,提高面板的定位精度而設置。就防止面板的滑動的觀點而言,彈性體62b可具有比主軸62a高的摩擦性(摩擦力)。就防止面板的損傷的觀點而言,彈性體62b可具有比主軸62a高的彈性(緩衝性)。彈性體62b例如是由橡膠材料所構成。作為橡膠材料的例子,可列舉乙烯丙烯二烯橡膠(Ethylene Propylene Diene Monomer,EPDM)、矽酮橡膠及氟橡膠。多個彈性體62b在主軸62a的延伸方向上以一定的間隔排列。 The elastic body 62b is an annular (for example, annular) member provided so as to surround the main shaft 62a around the axis of the main shaft 62a. The elastic body 62b is provided along the surface of the main shaft 62a. The elastic body 62b is provided to suppress the sliding of the panel and improve the positioning accuracy of the panel. From the viewpoint of preventing sliding of the panel, the elastic body 62b may have higher friction (frictional force) than the main shaft 62a. From the viewpoint of preventing damage to the panel, the elastic body 62b may have higher elasticity (cushioning properties) than the main shaft 62a. The elastic body 62b is made of rubber material, for example. Examples of rubber materials include ethylene propylene diene rubber (EPDM), silicone rubber, and fluorine rubber. The plurality of elastic bodies 62b are arranged at certain intervals in the extending direction of the main shaft 62a.

支撐體65是用於保持(支撐)主軸62a,並且支撐面板的左右方向上的端部的構件。在支撐體65的前端部分設置有沿前後方向貫通支撐體65的插通孔,使主軸62a插通插通孔。支撐體65具有隨著從支撐體65的基端朝向前端而向下方傾斜的傾斜面。 The support body 65 is a member that holds (supports) the main shaft 62 a and supports the end portions of the panel in the left-right direction. An insertion hole penetrating the support body 65 in the front-rear direction is provided at the front end portion of the support body 65, and the main shaft 62a is inserted into the insertion hole. The support body 65 has an inclined surface that is inclined downward from the base end toward the front end of the support body 65 .

支撐體65的基端部分抵接於側壁23的內表面,通過頂 出銷(未圖示)對側板28、側壁23、及支撐體65進行定位。在此狀態下,螺杆從側板28的外側插通至設置於側板28的插通孔中,且螺杆螺合於支撐體65的基端部分上設置的螺紋孔中。由此,在由支撐體65與側板28夾著側壁23的狀態下,支撐體65被固定於側板28。 The base end portion of the support body 65 is in contact with the inner surface of the side wall 23. Pins (not shown) position the side plate 28 , the side wall 23 , and the support body 65 . In this state, the screw is inserted into the insertion hole provided in the side plate 28 from the outside of the side plate 28 , and the screw is screwed into the threaded hole provided in the base end portion of the support body 65 . Thereby, the support body 65 is fixed to the side plate 28 with the side wall 23 sandwiched between the support body 65 and the side plate 28 .

止擋件63是用於防止面板飛出並且決定面板的前端的位置的構件。止擋件63例如由上文所述的樹脂材料所構成。止擋件63設置於主軸62a的端部62d。例如,通過將主軸62a的端部62d嵌入至設置於止擋件63的安裝孔中,從而將止擋件63安裝於主軸62a。止擋件63具有圓板狀的卡止片63a,所述卡止片63a具有比彈性體62b的外徑更大的外徑。卡止片63a具有隨著從外周面朝向中心而向後方傾斜的傾斜面。 The stopper 63 is a member that prevents the panel from flying out and determines the position of the front end of the panel. The stopper 63 is made of, for example, the resin material described above. The stopper 63 is provided at the end 62d of the main shaft 62a. For example, the stopper 63 is installed on the main shaft 62a by inserting the end portion 62d of the main shaft 62a into a mounting hole provided in the stopper 63. The stopper 63 has a disc-shaped locking piece 63a having an outer diameter larger than the outer diameter of the elastic body 62b. The locking piece 63a has an inclined surface that is inclined rearward from the outer peripheral surface toward the center.

止擋件64是用於決定面板的後端的位置的構件。止擋件64例如由上文所述的樹脂材料所構成。止擋件64設置於主軸62a的端部62c。止擋件64具有塊狀的形狀。在止擋件64設置有用於供主軸62a沿前後方向插通的插通孔。在主軸62a插通於止擋件64的插通孔中的狀態下,止擋件64的後表面抵接於支柱26c的前表面,並通過螺杆將止擋件64固定於支柱26c。止擋件64具有隨著從上表面朝向下方而向前方傾斜的傾斜面。 The stopper 64 is a member for determining the position of the rear end of the panel. The stopper 64 is made of, for example, the resin material described above. The stopper 64 is provided at the end 62c of the main shaft 62a. The stopper 64 has a block shape. The stopper 64 is provided with an insertion hole through which the spindle 62a is inserted in the front-rear direction. In a state where the main shaft 62a is inserted into the insertion hole of the stopper 64, the rear surface of the stopper 64 comes into contact with the front surface of the pillar 26c, and the stopper 64 is fixed to the pillar 26c by a screw. The stopper 64 has an inclined surface that inclines forward from the upper surface toward the downward direction.

通過止擋件63、止擋件64及支撐體65來規定載置面板的載置位置。具體而言,通過止擋件63、止擋件64來規定面板的前後方向上的載置位置。通過設置於左右的四個支撐體65來規定 面板的左右方向上的載置位置。例如,通過機器人將面板搬入至收容空間20,在任一收納段載置面板。此時,有時由誤差等導致面板的位置稍許偏移。例如,即便面板的前端擱置於止擋件63的卡止片63a的傾斜面上,也因面板的自重而沿著所述傾斜面被導引至載置位置。同樣地,即便面板的後端擱置於止擋件64的傾斜面上,也因面板的自重而沿著所述傾斜面被導引至載置位置。同樣地,即便面板的側端擱置於支撐體65的傾斜面上,也因面板的自重而沿著所述傾斜面被導引至載置位置。 The placement position of the placement panel is defined by the stoppers 63 , 64 and the support 65 . Specifically, the mounting position of the panel in the front-rear direction is defined by the stoppers 63 and 64 . It is defined by four supports 65 provided on the left and right The placement position of the panel in the left-right direction. For example, the panel is moved into the storage space 20 by a robot, and the panel is placed in any storage section. At this time, the position of the panel may be slightly shifted due to errors or the like. For example, even if the front end of the panel rests on the inclined surface of the locking piece 63a of the stopper 63, the panel is guided to the placement position along the inclined surface by its own weight. Similarly, even if the rear end of the panel rests on the inclined surface of the stopper 64, the panel is guided to the placement position along the inclined surface due to its own weight. Similarly, even if the side end of the panel rests on the inclined surface of the support body 65, the panel is guided to the placement position along the inclined surface due to its own weight.

其次,參照圖3及圖4對主軸61a的形狀進行說明。圖3是圖2所示的支撐部及支柱的分解立體圖。圖4是沿著圖2的IV-IV線的剖面圖。 Next, the shape of the main shaft 61a will be described with reference to FIGS. 3 and 4 . FIG. 3 is an exploded perspective view of the support part and the support column shown in FIG. 2 . FIG. 4 is a cross-sectional view taken along line IV-IV of FIG. 2 .

如圖3所示,主軸61a具有端部61c及露出部61e。端部61c例如具有沿前後方向延伸的圓柱狀的形狀。如上所述,端部61c嵌入至支柱26b的嵌合孔26g中,因此不從支柱26b露出。露出部61e是主軸61a中的除端部61c以外的部分,且是從支柱26b露出的部分。露出部61e與端部61c在前後方向上相連,且包含端部61d。露出部61e的形狀與端部61c的形狀不同。 As shown in FIG. 3 , the main shaft 61a has an end portion 61c and an exposed portion 61e. The end portion 61c has, for example, a cylindrical shape extending in the front-rear direction. As described above, since the end portion 61c is fitted into the fitting hole 26g of the pillar 26b, it is not exposed from the pillar 26b. The exposed portion 61e is a portion of the main shaft 61a except the end portion 61c, and is a portion exposed from the support column 26b. The exposed portion 61e is connected to the end portion 61c in the front-rear direction and includes the end portion 61d. The shape of the exposed portion 61e is different from the shape of the end portion 61c.

若具體地進行說明,則如圖4所示,露出部61e包括載置部71及底座部72。載置部71及底座部72在露出部61e的前後方向上的整體上延伸。載置部71是供支撐於主軸61a的一塊面板載置的構件。載置部71具有與底座部72相接的下表面,在載置部71,於在上下方向上與所述下表面相反的一側載置有面板。載 置部71具有沿前後方向延伸的柱形狀。在本實施方式中,載置部71在從前後方向觀察時具有從圓欠缺弓形的缺圓形狀。載置部71也可具有沿前後方向延伸的圓柱形狀。載置部71具有左右方向上的最大長度(最大寬度)L1。 Specifically, as shown in FIG. 4 , the exposed portion 61 e includes a placement portion 71 and a base portion 72 . The placement portion 71 and the base portion 72 extend entirely in the front-rear direction of the exposed portion 61e. The placement portion 71 is a member on which one panel supported by the main shaft 61a is placed. The placement portion 71 has a lower surface in contact with the base portion 72 , and a panel is placed on the placement portion 71 on the side opposite to the lower surface in the vertical direction. load The placement portion 71 has a columnar shape extending in the front-rear direction. In the present embodiment, the placing portion 71 has an oval shape in which an arcuate shape is omitted from a circle when viewed from the front-rear direction. The placement portion 71 may have a cylindrical shape extending in the front-rear direction. The placement portion 71 has a maximum length (maximum width) L1 in the left-right direction.

底座部72是在上下方向上支撐載置部71的構件。底座部72是為了降低主軸61a的自重撓曲而設置。底座部72具有沿前後方向延伸的柱形狀。在本實施方式中,底座部72在從前後方向觀察時具有六邊形形狀,所述六邊形形狀為將左右方向上具有長邊的矩形與從矩形的上邊向上方突出的梯形組合而成。在底座部72的上表面設置有供載置部71嵌合的槽。對底座部72的下角部實施了倒角。底座部72具有左右方向上的最大長度(最大寬度)L2。底座部72的最大寬度L2比載置部71的最大寬度L1大。底座部72的左右方向上的長度在底座部72的下端具有最大寬度L2,且隨著從底座部72的下端朝向上方而變小。 The base portion 72 is a member that supports the placement portion 71 in the up-down direction. The base portion 72 is provided to reduce deflection of the main shaft 61a due to its own weight. The base portion 72 has a columnar shape extending in the front-rear direction. In this embodiment, the base portion 72 has a hexagonal shape when viewed from the front-to-back direction. The hexagonal shape is a combination of a rectangle having long sides in the left-right direction and a trapezoid protruding upward from the upper side of the rectangle. . The upper surface of the base portion 72 is provided with a groove into which the placing portion 71 fits. The lower corners of the base portion 72 are chamfered. The base portion 72 has a maximum length (maximum width) L2 in the left-right direction. The maximum width L2 of the base portion 72 is larger than the maximum width L1 of the placement portion 71 . The length of the base portion 72 in the left-right direction has the maximum width L2 at the lower end of the base portion 72 , and decreases upward from the lower end of the base portion 72 .

在本實施方式中,載置部71通過螺杆而被固定於底座部72,但也可通過接著或焊接進行固定。或者,載置部71與底座部72也可一體地構成為露出部61e。 In this embodiment, the mounting part 71 is fixed to the base part 72 with a screw, but it may also be fixed by adhesion or welding. Alternatively, the placement portion 71 and the base portion 72 may be integrally configured as the exposed portion 61e.

其次,參照圖3及圖5對主軸61a固定於支柱26b的形態進行說明。圖5是沿著圖2的V-V線的剖面圖。 Next, a mode in which the main shaft 61a is fixed to the support column 26b will be described with reference to FIGS. 3 and 5 . FIG. 5 is a cross-sectional view along line V-V of FIG. 2 .

如圖5所示,導電性構件61b配置於支柱26b的嵌合孔26g中。具體而言,導電性構件61b以開口位於前方的方式嵌合於嵌合孔26g中。導電性構件61b包括嵌入部61f及止擋部61g。 As shown in FIG. 5 , the conductive member 61b is arranged in the fitting hole 26g of the support column 26b. Specifically, the conductive member 61b is fitted into the fitting hole 26g so that the opening is located in the front. The conductive member 61b includes an embedded portion 61f and a stopper portion 61g.

嵌入部61f是嵌合於嵌合孔26g中的部分。在本實施方式中,嵌入部61f具有一端開放的圓筒形狀。在嵌入部61f的另一端設置有後述的固定構件81的軸部81b能夠插通的貫通孔。嵌入部61f的外周面在從前後方向觀察時具有將矩形的角部弄圓的形狀。 The fitting part 61f is a part fitted into the fitting hole 26g. In this embodiment, the fitting portion 61f has a cylindrical shape with one end open. The other end of the fitting portion 61f is provided with a through hole through which the shaft portion 81b of the fixing member 81 described later can be inserted. The outer peripheral surface of the fitting portion 61f has a shape in which the corners of a rectangle are rounded when viewed from the front-rear direction.

止擋部61g是作為主軸61a的止轉件發揮功能的部分。止擋部61g在從前後方向觀察時具有圓弧狀的形狀,且沿前後方向延伸。止擋部61g與嵌入部61f在前後方向上相連,在導電性構件61b嵌合於嵌合孔26g中的狀態下,從支柱26b的前表面26j向前方突出。止擋部61g在上下方向上與底座部72的左右方向上的兩端部抵接。 The stopper portion 61g is a portion that functions as a rotation stopper for the main shaft 61a. The stopper portion 61g has an arc shape when viewed from the front-rear direction and extends in the front-rear direction. The stopper portion 61g is connected to the fitting portion 61f in the front-rear direction, and protrudes forward from the front surface 26j of the pillar 26b in a state where the conductive member 61b is fitted in the fitting hole 26g. The stopper portion 61g is in vertical contact with both left and right end portions of the base portion 72 .

支撐部61還包括承接構件80及固定構件81。固定構件81是用於將主軸61a固定於支柱26b的構件。作為固定構件81,例如可使用螺栓。固定構件81包括頭部81a及軸部81b。固定構件81例如由金屬材料所構成。作為固定構件81的構成材料的例子,可列舉不銹鋼及鋁。固定構件81的電阻值例如為1×10-1Ω以上且1×101Ω以下。 The support part 61 also includes a receiving member 80 and a fixing member 81 . The fixing member 81 is a member for fixing the main shaft 61a to the support column 26b. As the fixing member 81, for example, a bolt can be used. The fixing member 81 includes a head portion 81a and a shaft portion 81b. The fixing member 81 is made of a metal material, for example. Examples of the material of the fixing member 81 include stainless steel and aluminum. The resistance value of the fixing member 81 is, for example, 1×10 -1 Ω or more and 1×10 1 Ω or less.

承接構件80是設置於支柱26b與固定構件81之間,用於將固定構件81安裝於支柱26b的構件。在本實施方式中,承接構件80具有杯狀的形狀,收容固定構件81的頭部81a。在承接構件80的底板設置有固定構件81的軸部81b能夠插通的貫通孔。承接構件80配置於設置在支柱26b的後表面26i的鍃孔26k中。鍃孔26k是用於收容固定構件81的頭部81a的孔,且從支柱26b 的後表面26i朝向前方凹陷。鍃孔26k與嵌合孔26g通過連通孔26m在前後方向上相連。連通孔26m的內徑比固定構件81的軸部81b的外徑大。承接構件80例如由絕緣材料所構成。作為承接構件80的構成材料的例子,可列舉聚縮醛及聚碳酸酯。承接構件80的電阻值例如為1×1012Ω以上且1×1014Ω以下。承接構件80的電阻值與固定構件81的電阻值的合計電阻值為導電性構件61b的電阻值以上。 The receiving member 80 is provided between the pillar 26b and the fixing member 81, and is used to attach the fixing member 81 to the pillar 26b. In this embodiment, the receiving member 80 has a cup-like shape and accommodates the head portion 81 a of the fixing member 81 . The bottom plate of the receiving member 80 is provided with a through hole through which the shaft portion 81 b of the fixing member 81 can be inserted. The receiving member 80 is arranged in the hole 26k provided in the rear surface 26i of the pillar 26b. The hole 26k is a hole for accommodating the head part 81a of the fixing member 81, and is recessed toward the front from the rear surface 26i of the support|pillar 26b. The hole 26k and the fitting hole 26g are connected in the front-rear direction through the communication hole 26m. The inner diameter of the communication hole 26m is larger than the outer diameter of the shaft portion 81b of the fixing member 81. The receiving member 80 is made of an insulating material, for example. Examples of the constituent material of the receiving member 80 include polyacetal and polycarbonate. The resistance value of the receiving member 80 is, for example, 1×10 12 Ω or more and 1×10 14 Ω or less. The total resistance value of the resistance value of the receiving member 80 and the resistance value of the fixing member 81 is equal to or greater than the resistance value of the conductive member 61b.

導電性構件61b以開口位於前方的方式嵌合於嵌合孔26g中,端部61c插通至嵌入部61f的內部空間,由此端部61c嵌合於導電性構件61b中。即,端部61c經由導電性構件61b而嵌合於嵌合孔26g中。然後,在承接構件80嵌合於鍃孔26k中後,固定構件81的軸部81b插通至承接構件80的貫通孔、連通孔26m、及嵌入部61f的貫通孔中,固定構件81的軸部81b螺合於設置在端部61c的後表面的螺紋孔中。此時,固定構件81的頭部81a被收容於承接構件80中。由此,主軸61a被固定於支柱26b。此外,由於軸部81b的外徑比連通孔26m的內徑小,因此在主軸61a被固定於支柱26b的狀態下,軸部81b不與支柱26b接觸。 The conductive member 61b is fitted into the fitting hole 26g with its opening facing forward, and the end portion 61c is inserted into the internal space of the fitting portion 61f, whereby the end portion 61c is fitted into the conductive member 61b. That is, the end portion 61c is fitted into the fitting hole 26g via the conductive member 61b. Then, after the receiving member 80 is fitted into the bore 26k, the shaft portion 81b of the fixing member 81 is inserted into the through hole of the receiving member 80, the communication hole 26m, and the through hole of the fitting portion 61f. The portion 81b is screwed into a threaded hole provided on the rear surface of the end portion 61c. At this time, the head 81 a of the fixing member 81 is accommodated in the receiving member 80 . Thereby, the main shaft 61a is fixed to the support|pillar 26b. Moreover, since the outer diameter of the shaft part 81b is smaller than the inner diameter of the communication hole 26m, when the main shaft 61a is fixed to the support|pillar 26b, the shaft part 81b does not contact the support|pillar 26b.

其次,參照圖6及圖7對止轉結構進行說明。圖6是沿著圖5的VI-VI線的剖面圖。圖7是沿著圖5的VII-VII線的剖面圖。 Next, the anti-rotation structure will be described with reference to FIGS. 6 and 7 . FIG. 6 is a cross-sectional view along line VI-VI in FIG. 5 . FIG. 7 is a cross-sectional view along line VII-VII of FIG. 5 .

如圖6所示,由導電性構件61b的外周面劃定的形狀的重心G1與導電性構件61b的外周面的最大距離L3比由嵌合孔26g 的內周面劃定的形狀的重心G2與嵌合孔26g的內周面的最小距離L4大。在本實施方式中,從前後方向觀察時,重心G1的位置與重心G2的位置一致。由導電性構件61b的外周面劃定的形狀的具體的形狀並無限定。由導電性構件61b的外周面劃定的形狀例如可為多邊形,也可為扁平形狀。 As shown in FIG. 6 , the maximum distance L3 between the center of gravity G1 of the shape defined by the outer circumferential surface of the conductive member 61 b and the outer circumferential surface of the conductive member 61 b is larger than the distance L3 between the center of gravity G1 and the outer circumferential surface of the conductive member 61 b by the fitting hole 26 g. The minimum distance L4 between the center of gravity G2 of the shape defined by the inner peripheral surface and the inner peripheral surface of the fitting hole 26g is large. In this embodiment, when viewed from the front-to-back direction, the position of the center of gravity G1 coincides with the position of the center of gravity G2. The specific shape of the shape defined by the outer peripheral surface of the conductive member 61b is not limited. The shape defined by the outer peripheral surface of the conductive member 61b may be, for example, a polygonal shape or a flat shape.

如圖7所示,導電性構件61b的止擋部61g在上下方向上與底座部72的左右方向上的兩端部抵接。底座部72的所述兩端部的上表面在上下方向上與止擋部61g抵接。止擋部61g在上下方向上也與載置部71抵接。具體而言,止擋部61g的內周面在上下方向上與載置部71抵接。因此,止擋部61g在上下方向上與底座部72的所述兩端部抵接,以從上方覆蓋載置部71及底座部72。 As shown in FIG. 7 , the stopper portion 61 g of the conductive member 61 b is in vertical contact with both ends of the base portion 72 in the left-right direction. The upper surfaces of the both ends of the base portion 72 are in contact with the stoppers 61g in the vertical direction. The stopper portion 61g is also in contact with the placing portion 71 in the up-down direction. Specifically, the inner peripheral surface of the stopper portion 61g is in contact with the placement portion 71 in the up-down direction. Therefore, the stopper portion 61g is in contact with the both ends of the base portion 72 in the vertical direction to cover the placement portion 71 and the base portion 72 from above.

在所述結構中,在繞導電性構件61b的軸線施加力的情況下,導電性構件61b中的具有距重心G1的最大距離L3的部分卡在嵌合孔26g的內周面上。由此,即便在繞所述軸線施加力的情況下,也可防止導電性構件61b相對於嵌合孔26g繞所述軸線旋轉。即,導電性構件61b相對於支柱26b繞所述軸線的旋轉被限制。進而,即便在繞主軸61a的軸線施加力的情況下,止擋部61g與底座部72的左右方向上的兩端部也在上下方向上抵接,因此可防止主軸61a相對於導電性構件61b繞所述軸線旋轉。如上所述,由於可防止導電性構件61b相對於嵌合孔26g(支柱26b)繞軸線旋轉,因此可防止主軸61a即便相對於支柱26b也繞所述 軸線旋轉。 In this structure, when a force is applied around the axis of the conductive member 61 b, the portion of the conductive member 61 b that has the maximum distance L3 from the center of gravity G1 is caught on the inner peripheral surface of the fitting hole 26 g. Accordingly, even when a force is applied about the axis, the conductive member 61 b can be prevented from rotating about the axis relative to the fitting hole 26 g. That is, the rotation of the conductive member 61b about the axis is restricted relative to the support column 26b. Furthermore, even when a force is applied around the axis of the main shaft 61a, the stopper portion 61g and both left and right end portions of the base portion 72 are in vertical contact, thereby preventing the main shaft 61a from being moved relative to the conductive member 61b. Rotate around said axis. As described above, since the conductive member 61b can be prevented from rotating about the axis with respect to the fitting hole 26g (the pillar 26b), the main shaft 61a can be prevented from rotating around the axis even with respect to the pillar 26b. axis rotation.

如以上所說明,在面板收納容器1中,主軸61a的端部61c經由導電性構件61b而嵌合於嵌合孔26g中。導電性構件61b將主軸61a與支柱26b電連接。導電性構件61b的電阻值比主軸61a的電阻值及支柱26b的電阻值大。因此,與主軸61a不經由導電性構件61b而直接連接於支柱26b的結構相比,從主軸61a到達支柱26b的路徑的電阻值變大。由此,可抑制面板載置於主軸61a時的靜電放電的產生。另一方面,由於導電性構件61b具有導電性,因此電能夠從載置於主軸61a的面板按照主軸61a、導電性構件61b及支柱26b的順序流動。因此,可對面板進行除電。根據以上內容,通過使具有比主軸61a的電阻值及支柱26b的電阻值大的電阻值的導電性構件61b介於主軸61a與支柱26b之間,可在抑制靜電放電的產生的同時對面板進行除電。 As described above, in the panel storage container 1, the end portion 61c of the main shaft 61a is fitted into the fitting hole 26g via the conductive member 61b. The conductive member 61b electrically connects the main shaft 61a and the support column 26b. The resistance value of the conductive member 61b is larger than the resistance value of the spindle 61a and the resistance value of the support column 26b. Therefore, compared with a structure in which the main shaft 61a is directly connected to the support column 26b without passing through the conductive member 61b, the resistance value of the path from the main shaft 61a to the support column 26b becomes larger. This can suppress the generation of electrostatic discharge when the panel is placed on the spindle 61a. On the other hand, since the conductive member 61b has conductivity, electricity can flow from the panel placed on the main shaft 61a in the order of the main shaft 61a, the conductive member 61b, and the support column 26b. Therefore, the panel can be decharged. According to the above, by interposing the conductive member 61b having a resistance value larger than the resistance value of the main shaft 61a and the resistance value of the support pillar 26b between the main shaft 61a and the support pillar 26b, it is possible to suppress the generation of electrostatic discharge and perform maintenance on the panel. Remove electricity.

在面板收納容器1中,在支柱26b設置有配置有導電性構件61b的嵌合孔26g。端部61c經由導電性構件61b而嵌合於嵌合孔26g中。具體而言,端部61c通過插通至導電性構件61b的嵌入部61f的內部空間中而嵌合於嵌合孔26g中。根據所述結構,在端部61c經由導電性構件61b而嵌合於嵌合孔26g的狀態下將主軸61a固定於支柱26b。因此,可將主軸61a可靠地固定於支柱26b。 In the panel storage container 1, the support|pillar 26b is provided with the fitting hole 26g in which the conductive member 61b is arrange|positioned. The end portion 61c is fitted into the fitting hole 26g via the conductive member 61b. Specifically, the end portion 61c is inserted into the internal space of the fitting portion 61f of the conductive member 61b to fit into the fitting hole 26g. According to this structure, the main shaft 61a is fixed to the support|pillar 26b with the end part 61c being fitted in the fitting hole 26g via the conductive member 61b. Therefore, the main shaft 61a can be reliably fixed to the support column 26b.

一般而言,由主軸的自重產生的撓曲量與主軸的剖面積成正比,與主軸的剖面二次矩成反比。在主軸的剖面沿水平方向 擴張的情況下,剖面二次矩的增加量超過剖面積的增加量。在面板收納容器1中,底座部72的最大寬度L2比載置部71的最大寬度L1大。因此,可在不使主軸61a沿鉛垂方向擴張的情況下降低由主軸61a的自重產生的撓曲量。其結果,可降低在將面板搬入至面板收納容器1時,或者從面板收納容器1搬出面板時,面板與主軸61a發生干涉的可能性。 Generally speaking, the amount of deflection caused by the self-weight of the main shaft is directly proportional to the cross-sectional area of the main shaft and inversely proportional to the second moment of the cross-section of the main shaft. The section along the main axis is along the horizontal direction In the case of expansion, the increase in the second moment of the section exceeds the increase in the section area. In the panel storage container 1 , the maximum width L2 of the base portion 72 is larger than the maximum width L1 of the placement portion 71 . Therefore, the deflection amount caused by the own weight of the main shaft 61a can be reduced without expanding the main shaft 61a in the vertical direction. As a result, the possibility of interference between the panel and the spindle 61 a can be reduced when the panel is loaded into the panel storage container 1 or when the panel is unloaded from the panel storage container 1 .

導電性構件61b在上下方向上與底座部72的左右方向上的兩端部抵接。因此,即便繞主軸61a的軸線施加力,導電性構件61b的止擋部61g也與主軸61a的底座部72接觸,因此可防止主軸61a相對於導電性構件61b繞軸線旋轉。進而,從前後方向觀察時,由導電性構件61b的外周面劃定的形狀的重心G1與導電性構件61b的外周面的最大距離L3比由嵌合孔26g的內周面劃定的形狀的重心G2與嵌合孔26g的內周面的最小距離L4大。根據所述結構,在繞導電性構件61b的軸線施加力的情況下,導電性構件61b中的具有距重心G1的最大距離L3的部分卡在嵌合孔26g的內周面上。由此,可防止導電性構件61b相對於嵌合孔26g繞所述軸線旋轉。即,可防止導電性構件61b相對於支柱26b繞軸線旋轉。根據以上內容,可防止主軸61a相對於嵌合孔26g(支柱26b)繞主軸61a的軸線旋轉。 The conductive member 61b is in vertical contact with both ends of the base portion 72 in the left and right directions. Therefore, even if a force is applied around the axis of the main shaft 61a, the stopper portion 61g of the conductive member 61b is in contact with the base portion 72 of the main shaft 61a, thereby preventing the main shaft 61a from rotating about the axis relative to the conductive member 61b. Furthermore, when viewed from the front-to-back direction, the maximum distance L3 between the center of gravity G1 of the shape defined by the outer peripheral surface of the conductive member 61 b and the outer peripheral surface of the conductive member 61 b is longer than that of the shape defined by the inner peripheral surface of the fitting hole 26 g. The minimum distance L4 between the center of gravity G2 and the inner peripheral surface of the fitting hole 26g is large. According to the above structure, when a force is applied around the axis of the conductive member 61 b, the portion of the conductive member 61 b that has the maximum distance L3 from the center of gravity G1 is caught on the inner peripheral surface of the fitting hole 26 g. This prevents the conductive member 61b from rotating about the axis relative to the fitting hole 26g. That is, the conductive member 61b can be prevented from rotating about the axis relative to the support column 26b. According to the above, it is possible to prevent the main shaft 61a from rotating about the axis of the main shaft 61a relative to the fitting hole 26g (the pillar 26b).

導電性構件61b也可由樹脂材料所構成。在此情況下,可簡單地實現具有比主軸61a的電阻值及支柱26b的電阻值大的電阻值的導電性構件61b。 The conductive member 61b may be made of a resin material. In this case, the conductive member 61 b having a resistance value larger than the resistance value of the main shaft 61 a and the resistance value of the support column 26 b can be easily realized.

在面板收納容器1中,從主軸61a到達支柱26b的路徑包含從主軸61a通過導電性構件61b到達支柱26b的路徑、及從主軸61a依次通過固定構件81及承接構件80到達支柱26b的路徑。由於固定構件81的電阻值與承接構件80的電阻值的合計電阻值比導電性構件61b的電阻值大,因此電流難以在從主軸61a依次通過固定構件81及承接構件80到達支柱26b的路徑中流動。進而,在主軸61a被固定於支柱26b的狀態下,固定構件81的軸部81b不與支柱26b相接,因此電流難以經由軸部81b流動到支柱26b的內部。因此,電流主要在從主軸61a通過導電性構件61b到達支柱26b的路徑中流動,因此可通過導電性構件61b對主軸61a與支柱26b之間的導電性進行調整。其結果,可更可靠地抑制靜電放電的產生。 In the panel storage container 1, the path from the main shaft 61a to the pillar 26b includes the path from the main axis 61a to the pillar 26b through the conductive member 61b, and the path from the main axis 61a to the pillar 26b through the fixing member 81 and the receiving member 80 in sequence. Since the total resistance value of the resistance value of the fixed member 81 and the resistance value of the receiving member 80 is larger than the resistance value of the conductive member 61 b, it is difficult for the current to flow from the main shaft 61 a through the fixing member 81 and the receiving member 80 in order to reach the support column 26 b. flow. Furthermore, when the main shaft 61a is fixed to the support column 26b, the shaft portion 81b of the fixing member 81 is not in contact with the support column 26b, so it is difficult for an electric current to flow into the support column 26b via the shaft portion 81b. Therefore, the current mainly flows in the path from the main shaft 61a through the conductive member 61b to the support column 26b, so the conductivity between the main shaft 61a and the support column 26b can be adjusted through the conductive member 61b. As a result, the generation of electrostatic discharge can be suppressed more reliably.

固定構件81可由金屬材料所構成,承接構件80可由絕緣材料所構成。在此情況下,可簡單地實現使固定構件81的電阻值與承接構件80的電阻值的合計電阻值比導電性構件61b的電阻值大的結構。 The fixing member 81 may be made of metal material, and the receiving member 80 may be made of insulating material. In this case, a structure can be easily realized in which the total resistance value of the resistance value of the fixing member 81 and the resistance value of the receiving member 80 is larger than the resistance value of the conductive member 61 b.

此外,本新型創作的面板收納容器並不限定於所述實施方式。 In addition, the panel storage container created by the present invention is not limited to the above-described embodiment.

也可不在支柱26b設置嵌合孔26g。在此情況下,主軸61a以導電性構件61b在前後方向上介於所述主軸61a與支柱26b之間的狀態被固定於支柱26b。例如,導電性構件61b接合於支柱26b的前表面26j,主軸61a的端部61c接合於導電性構件61b。 即,主軸61a經由導電性構件61b而被固定於支柱26b。 The fitting hole 26g does not need to be provided in the pillar 26b. In this case, the main shaft 61a is fixed to the support column 26b with the conductive member 61b interposed between the main shaft 61a and the support column 26b in the front-rear direction. For example, the conductive member 61b is joined to the front surface 26j of the support column 26b, and the end portion 61c of the main shaft 61a is joined to the conductive member 61b. That is, the main shaft 61a is fixed to the support|pillar 26b via the conductive member 61b.

在所述實施方式中,底座部72具有沿前後方向延伸的多棱柱形狀,但底座部72的形狀並不限於所述形狀。底座部72是為了降低主軸61a的自重撓曲而設置,因此底座部72的形狀只要是能夠降低主軸61a的自重撓曲的形狀即可。例如,底座部72的形狀可為沿前後方向延伸的板形狀。 In the embodiment, the base portion 72 has a polygonal column shape extending in the front-rear direction, but the shape of the base portion 72 is not limited to the above shape. The base portion 72 is provided to reduce the deflection under its own weight of the main shaft 61 a. Therefore, the base portion 72 may have a shape that can reduce the deflection under its own weight. For example, the shape of the base portion 72 may be a plate shape extending in the front-rear direction.

在所述實施方式中,底座部72的左右方向上的長度隨著從底座部72的下端向上方離開而變小,但底座部72的左右方向上的長度並不限於所述形態。底座部72的左右方向上的長度也可隨著從底座部72的下端向上方離開而連續地減少,也可呈階梯狀地減少。 In the above-mentioned embodiment, the length in the left-right direction of the base portion 72 becomes smaller as it moves upward from the lower end of the base portion 72 . However, the length in the left-right direction of the base portion 72 is not limited to the above-mentioned form. The length of the base portion 72 in the left-right direction may be continuously reduced as it moves upward from the lower end of the base portion 72 , or may be reduced in a stepwise manner.

主軸61a也可不包括底座部72。在此情況下,主軸61a(載置部71)也可為沿前後方向延伸的圓柱狀的構件。在主軸61a為圓柱狀的情況下,主軸61a可繞軸線旋轉,因此導電性構件61b也可不包括止擋部61g。在此情況下,從前後方向觀察時,導電性構件61b的外周面及嵌合孔26g的內周面也可為圓形。 The main shaft 61a does not need to include the base part 72. In this case, the main shaft 61a (mounting portion 71) may be a cylindrical member extending in the front-rear direction. When the main shaft 61a is cylindrical, the main shaft 61a can rotate around the axis, so the conductive member 61b does not need to include the stopper 61g. In this case, the outer peripheral surface of the conductive member 61b and the inner peripheral surface of the fitting hole 26g may be circular when viewed from the front-rear direction.

導電性構件61b的構成材料並不限於樹脂材料。導電性構件61b只要構成為導電性構件61b的電阻值比主軸61a的電阻值及支柱26b的電阻值大即可。 The constituent material of the conductive member 61b is not limited to the resin material. The conductive member 61b only needs to be configured such that the resistance value of the conductive member 61b is larger than the resistance value of the main shaft 61a and the resistance value of the support column 26b.

固定構件81的構成材料與承接構件80的構成材料的組合可在滿足固定構件81的電阻值與承接構件80的電阻值的合計電阻值為導電性構件61b的電阻值以上的條件的範圍內適宜變 更。例如,固定構件81可由絕緣材料所構成,承接構件80可由金屬材料所構成。固定構件81可由金屬材料所構成,承接構件80可由與導電性構件61b相同的材料所構成。 The combination of the structural material of the fixed member 81 and the structural material of the receiving member 80 can be suitable within the range that satisfies the condition that the total resistance value of the resistance value of the fixed member 81 and the resistance value of the receiving member 80 is equal to or higher than the resistance value of the conductive member 61 b change Even. For example, the fixing member 81 may be made of insulating material, and the receiving member 80 may be made of metal material. The fixing member 81 may be made of a metal material, and the receiving member 80 may be made of the same material as the conductive member 61b.

容器本體2的各構件的連結方法也可與所述實施方式不同。在所述實施方式中,容器本體2是通過將多個零件組合而構成,但也可為一體成形品。 The method of connecting each member of the container body 2 may also be different from the above-described embodiment. In the above embodiment, the container body 2 is configured by combining a plurality of parts, but it may be an integrally molded product.

在所述實施方式中,支撐部62包括主軸62a、多個彈性體62b、及多個支撐體65。代替所述結構,支撐部62可具有用於支撐面板的左右方向上的端部的沿前後方向延伸的板狀的支撐體。 In the embodiment, the support part 62 includes a main shaft 62a, a plurality of elastic bodies 62b, and a plurality of support bodies 65. Instead of the above structure, the support portion 62 may have a plate-shaped support body extending in the front-rear direction for supporting the end portions of the panel in the left-right direction.

(附注) (Note)

(條目1)一種面板收納容器,包括:容器本體,用於將多個面板以在第一方向上排列的狀態進行收納;以及面板支撐部,設置於所述容器本體的內側,支撐所述多個面板,所述面板支撐部包括主軸及導電性構件,所述主軸用於支撐所述多個面板中的一塊面板且沿與所述第一方向交叉的第二方向延伸,所述容器本體包括用於對所述主軸進行固定的支柱,所述主軸包括所述第二方向上的兩端部即第一端部及第二端部,所述導電性構件設置於所述第一端部,將所述主軸與所述支柱電連接, 所述導電性構件的電阻值比所述主軸的電阻值及所述支柱的電阻值大。 (Item 1) A panel storage container, including: a container body for storing a plurality of panels arranged in a first direction; and a panel support portion provided inside the container body to support the plurality of panels. a panel, the panel support part includes a main shaft and a conductive member, the main shaft is used to support one panel among the plurality of panels and extends along a second direction intersecting the first direction, and the container body includes A support for fixing the main shaft, the main shaft includes two ends in the second direction, that is, a first end and a second end, and the conductive member is provided at the first end, electrically connecting the spindle and the pillar, The electrical resistance value of the conductive member is greater than the resistance value of the main shaft and the resistance value of the support column.

(條目2)根據條目1所述的面板收納容器,其中,在所述支柱設置有配置有所述導電性構件的嵌合孔, 所述第一端部經由所述導電性構件而嵌合於所述嵌合孔中。 (Item 2) The panel storage container according to Item 1, wherein the support is provided with a fitting hole in which the conductive member is arranged, The first end is fitted into the fitting hole via the conductive member.

(條目3)根據條目2所述的面板收納容器,其中,所述主軸包括:載置部,用於載置所述面板;以及底座部,在所述第一方向上支撐所述載置部,所述載置部及所述底座部沿所述第二方向延伸,所述底座部的與所述第一方向及所述第二方向交叉的第三方向上的最大長度比所述載置部的所述第三方向上的最大長度大。 (Item 3) The panel storage container according to Item 2, wherein the main shaft includes: a placement portion for placing the panel; and a base portion for supporting the placement portion in the first direction , the placing portion and the base portion extend along the second direction, and the maximum length of the base portion in a third direction intersecting the first direction and the second direction is longer than the placing portion. The maximum length in the third direction is large.

(條目4)根據條目3所述的面板收納容器,其中,從所述第二方向觀察時,由所述導電性構件的外周面劃定的形狀的重心與所述外周面的最大距離比由所述嵌合孔的內周面劃定的形狀的重心與所述內周面的最小距離大,所述導電性構件包括止擋部,所述止擋部在所述第一方向上與所述底座部的所述第三方向上的兩端部抵接。 (Item 4) The panel storage container according to Item 3, wherein when viewed from the second direction, a maximum distance ratio between the center of gravity of the shape defined by the outer peripheral surface of the conductive member and the outer peripheral surface is given by The minimum distance between the center of gravity of the shape defined by the inner circumferential surface of the fitting hole and the inner circumferential surface is large, and the conductive member includes a stopper that is in contact with the first direction in the first direction. Both ends of the base portion in the third direction are in contact with each other.

(條目5)根據條目1至4中任一項所述的面板收納容器,其中,所述導電性構件由樹脂材料所構成。 (Item 5) The panel storage container according to any one of Items 1 to 4, wherein the conductive member is made of a resin material.

(條目6)根據條目1至5中任一項所述的面板收納容器,其中,所述面板支撐部包括:固定構件,用於將所述主軸固定於所述支柱;以及承接構件,設置於所述支柱與所述固定構件之間, 用於將所述固定構件安裝於所述支柱,所述固定構件的電阻值與所述承接構件的電阻值的合計電阻值為所述導電性構件的電阻值以上。 (Item 6) The panel storage container according to any one of Items 1 to 5, wherein the panel support part includes: a fixing member for fixing the main shaft to the pillar; and a receiving member provided on between the pillar and the fixed member, The fixing member is used for attaching to the pillar, and the total resistance value of the resistance value of the fixing member and the resistance value of the receiving member is equal to or greater than the resistance value of the conductive member.

(條目7)根據條目6所述的面板收納容器,其中,所述固定構件由金屬材料所構成,所述承接構件由絕緣材料所構成。 (Item 7) The panel storage container according to Item 6, wherein the fixing member is made of a metal material, and the receiving member is made of an insulating material.

26b:支柱 26b: Pillar

26g:嵌合孔 26g: chimeric hole

26i:後表面 26i: rear surface

26j:前表面 26j: Front surface

26k:鍃孔 26k:郃康

26m:連通孔 26m: connecting hole

61:支撐部 61: Support part

61a:主軸 61a: Spindle

61b:導電性構件 61b: Conductive member

61c:端部(第一端部) 61c: end (first end)

61e:露出部 61e:Exposed part

61f:嵌入部 61f: Embedded part

61g:止擋部 61g: Stopper

80:承接構件 80: Undertake components

81:固定構件 81: Fixed components

81a:頭部 81a:Head

81b:軸部 81b: Shaft

X、Y、Z:方向 X, Y, Z: direction

Claims (7)

一種面板收納容器,其特徵在於包括:容器本體,用於將多個面板以在第一方向上排列的狀態進行收納;以及 面板支撐部,設置於所述容器本體的內側,支撐所述多個面板, 所述面板支撐部包括主軸及導電性構件,所述主軸用於支撐所述多個面板中的一塊面板且沿與所述第一方向交叉的第二方向延伸, 所述容器本體包括用於對所述主軸進行固定的支柱, 所述主軸包括所述第二方向上的兩端部即第一端部及第二端部, 所述導電性構件設置於所述第一端部,將所述主軸與所述支柱電連接, 所述導電性構件的電阻值比所述主軸的電阻值及所述支柱的電阻值大。 A panel storage container, characterized by comprising: a container body for storing a plurality of panels in a state of being arranged in a first direction; and A panel support part is provided inside the container body to support the plurality of panels, The panel support part includes a main shaft and a conductive member, the main shaft is used to support one panel among the plurality of panels and extends along a second direction intersecting the first direction, The container body includes a support for fixing the main shaft, The main shaft includes two ends in the second direction, namely a first end and a second end, The conductive member is provided at the first end to electrically connect the main shaft and the support column, The resistance value of the conductive member is greater than the resistance value of the main shaft and the resistance value of the support column. 如請求項1所述的面板收納容器,其特徵在於,在所述支柱設置有配置有所述導電性構件的嵌合孔, 所述第一端部經由所述導電性構件而嵌合於所述嵌合孔中。 The panel storage container according to claim 1, wherein the support is provided with a fitting hole in which the conductive member is arranged, The first end is fitted into the fitting hole via the conductive member. 如請求項2所述的面板收納容器,其特徵在於,所述主軸包括:載置部,用於載置所述面板;以及底座部,在所述第一方向上支撐所述載置部, 所述載置部及所述底座部沿所述第二方向延伸, 所述底座部的與所述第一方向及所述第二方向交叉的第三方向上的最大長度比所述載置部的所述第三方向上的最大長度大。 The panel storage container according to claim 2, wherein the main shaft includes: a placement portion for placing the panel; and a base portion for supporting the placement portion in the first direction, The placing part and the base part extend along the second direction, A maximum length of the base portion in a third direction intersecting the first direction and the second direction is greater than a maximum length of the placing portion in the third direction. 如請求項3所述的面板收納容器,其特徵在於,從所述第二方向觀察時,由所述導電性構件的外周面劃定的形狀的重心與所述外周面的最大距離比由所述嵌合孔的內周面劃定的形狀的重心與所述內周面的最小距離大, 所述導電性構件包括止擋部,所述止擋部在所述第一方向上與所述底座部的所述第三方向上的兩端部抵接。 The panel storage container according to claim 3, wherein when viewed from the second direction, a maximum distance ratio between the center of gravity of the shape defined by the outer peripheral surface of the conductive member and the outer peripheral surface is determined by The minimum distance between the center of gravity of the shape defined by the inner circumferential surface of the fitting hole and the inner circumferential surface is large, The conductive member includes a stopper portion in contact with both ends of the base portion in the third direction in the first direction. 如請求項1至請求項4中任一項所述的面板收納容器,其特徵在於,所述導電性構件由樹脂材料所構成。The panel storage container according to any one of claims 1 to 4, wherein the conductive member is made of a resin material. 如請求項1至請求項4中任一項所述的面板收納容器,其特徵在於,所述面板支撐部包括:固定構件,用於將所述主軸固定於所述支柱;以及承接構件,設置於所述支柱與所述固定構件之間,用於將所述固定構件安裝於所述支柱, 所述固定構件的電阻值與所述承接構件的電阻值的合計電阻值為所述導電性構件的電阻值以上。 The panel storage container according to any one of claims 1 to 4, wherein the panel support part includes: a fixing member for fixing the main shaft to the pillar; and a receiving member configured to between the pillar and the fixing member for mounting the fixing member to the pillar, The total resistance value of the resistance value of the fixing member and the resistance value of the receiving member is equal to or greater than the resistance value of the conductive member. 如請求項6所述的面板收納容器,其特徵在於,所述固定構件由金屬材料所構成, 所述承接構件由絕緣材料所構成。 The panel storage container according to claim 6, wherein the fixing member is made of metal material, The receiving member is made of insulating material.
TW112202337U 2022-03-24 2023-03-16 panel storage container TWM644872U (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-048369 2022-03-24
JP2022048369A JP2023141839A (en) 2022-03-24 2022-03-24 panel storage container

Publications (1)

Publication Number Publication Date
TWM644872U true TWM644872U (en) 2023-08-11

Family

ID=87525116

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112202337U TWM644872U (en) 2022-03-24 2023-03-16 panel storage container

Country Status (4)

Country Link
JP (1) JP2023141839A (en)
KR (1) KR20230138898A (en)
CN (1) CN219506547U (en)
TW (1) TWM644872U (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6881716B2 (en) 2017-08-07 2021-06-02 信越ポリマー株式会社 Panel storage container

Also Published As

Publication number Publication date
CN219506547U (en) 2023-08-11
KR20230138898A (en) 2023-10-05
JP2023141839A (en) 2023-10-05

Similar Documents

Publication Publication Date Title
KR101708087B1 (en) Substrate storage container
US11161648B2 (en) Panel storage container
TWI568653B (en) Wafer container with door mounted shipping cushions
WO2011102318A1 (en) Substrate storing container
TWM644872U (en) panel storage container
JP2019127272A (en) Panel storage container
CN219506549U (en) Panel container
CN116601087A (en) Panel container
JP2023141949A (en) panel storage container
CN217970454U (en) Panel storage container
CN110641841B (en) Wafer frame carrier
CN116724386A (en) Panel container
JP7507116B2 (en) Panel storage container
JP2019033145A (en) Panel housing container
JP2012164720A (en) Transport box
JP2023040512A (en) Panel container
JP2024038598A (en) Substrate housing container
KR20230001921U (en) Panel storage container
JP2009188287A (en) Substrate storing container
JP2023042916A (en) panel storage container