TWM644099U - Inspection device for secondary components of mask package box - Google Patents

Abstract

A detection device for sub-components of a mask box, comprising: a support platform, a light source module, a camera module and a control module, the light source module includes a coaxial light source and a height adjustment mechanism, the height adjustment mechanism is connected to the coaxial At least one of the light source and the supporting platform, the camera module is connected to the coaxial light source and the lens faces the supporting platform, the signal of the control module is connected to the camera module and the height adjustment mechanism, and the control module controls the height adjustment mechanism to adjust the coaxial light source and the support The relative distance of the platform. The detection device of the sub-component of the reticle pod can perform optical inspection especially for the sub-component on the reticle pod.

Description

Inspection device for secondary components of photomask box

The invention relates to a detection device, more particularly to a detection device for sub-components of a reticle box.

In the advanced lithography process in the semiconductor field, especially the EUV (extreme ultraviolet) lithography process, the cleanliness of the process environment is extremely high. If dust particles (particles) contaminate the photomask, it will cause defects in the lithography process. In order to meet the requirements of cleanliness and protection of the mask, a mask box is generally used to block external dust particles. Therefore, the cleanliness of the pod itself and whether there are defects (scratches) on the surface are very important.

However, the sub-components on the pod are mostly made of plastic, relatively scratch-resistant metal or glass; the sub-components are more susceptible to wear than the pod body, but these abrasions are less harmful to the pod Low, that is, the sub-component can tolerate more defects such as scratches than the body of the pod. If the sub-component and the pod body adopt the same optical inspection standard, it will be difficult for the sub-component to pass the optical inspection.

Therefore, in order to solve various problems of inspecting sub-components on a reticle pod in the prior art, this invention proposes a detection device for sub-components of a reticle pod.

In order to achieve the above and other purposes, this creation proposes a detection device for sub-components of a mask box, which includes: a supporting platform; a light source module, including a coaxial light source and a height adjustment mechanism, the height adjustment mechanism is connected to the At least one of the coaxial light source and the support platform; a camera module connected to the coaxial light source with the lens facing the support platform; and a control module connected to the camera module and the height adjustment mechanism, the control module The module controls the height adjustment mechanism to adjust the relative distance between the coaxial light source and the supporting platform.

In one embodiment of the present invention, the coaxial light source is an external coaxial light source.

In one embodiment of the present invention, the coaxial light source is an inner coaxial light source.

In one embodiment of the present invention, the light source module further includes a side light source, which is connected to the control module for signals, and the angle between the irradiation direction of the coaxial light source and the surface of the supporting platform is greater than that of the side light source The angle between the irradiation direction and the surface of the supporting platform.

In one embodiment of the present invention, it further includes an analysis module, which is connected to the control module by signal, and the analysis module analyzes an image received by the control module according to the sub-component of a reticle in the image. defect.

Thereby, the detection device of the sub-component of the pod can simultaneously inspect the pod body and the sub-components on the pod, and perform optical inspection on different positions on the pod with different degrees of clarity.

In order to fully understand this creation, this creation will be described in detail by the following specific examples and accompanying drawings. Those skilled in the art can understand the purpose, features and effects of this creation from the content disclosed in this specification. It should be noted that this creation can be implemented or applied through other different specific embodiments, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of this creation. The following embodiments will further describe the relevant technical content of this creation in detail, but the disclosed content is not intended to limit the patent scope of this creation. The instructions are as follows:

As shown in FIG. 1A, FIG. 1B and FIG. 2A, the high-speed inspection system 100 for the surface of a photomask according to the first embodiment of the present invention includes: a cabinet 1, a clamping module 2, a first inspection device 3a, A second inspection device 3b and a stroke controller 4 .

The cabinet body 1 can be a clean (high cleanliness), sealed special cabinet for a clean room, so as to prevent external dust particles from polluting the internal space. With reference to Fig. 1B, the interior space of cabinet 1 is divided into an automatic equipment area 13, a first inspection area 11 and a second inspection area 12, and the first inspection area 11 and the second inspection area 12 are respectively adjacent to the automatic equipment area 13 .

The clamping module 2 is an automatic device such as a robot arm, which is installed in the automatic device area 13. The clamping module 2 can perform actions such as clamping, turning, and moving according to the received instructions. The structure of the clamping module 2 is not limited, for example, it is a six-axis robot arm, which can work with high sensitivity and precision in six axes.

The first inspection device 3 a and the second inspection device 3 b are respectively arranged in the first inspection area 11 and the second inspection area 12 . In this embodiment, the first inspection device 3a and the second inspection device 3b are devices for optical inspection, but the invention is not limited thereto. In other embodiments, the first inspection device 3a and the second inspection device The device 3b may be a device utilizing other principles (eg electricity, mechanics), or a mixture thereof. Any inspection device that can be used to inspect the surface of a pod can be used as the first inspection device 3 a and the second inspection device 3 b of the present invention.

Referring to FIG. 2A , the stroke controller 4 is signal-connected to the clamping module 2 , the first inspection device 3 a and the second inspection device 3 b. The stroke controller 4 is, for example, a control chip or a control circuit, and is mainly used to control the working stroke of the clamping module 2 and the activation of the first inspection device 3 a and the second inspection device 3 b. For example, the stroke controller 4 can control the clamping module 2 to work to separate or assemble a mask box (not shown), and make the clamping module 2 reciprocate in the automatic equipment area 13 and the first inspection area 11 to transport light A first part of the pod (such as the upper cover), the stroke controller 4 also controls the clamping module 2 to reciprocate in the automatic equipment area 13 and the second inspection area 12 to transport a second part of the pod (such as the lower cover) .

Referring to FIG. 3A , how to use the high-speed pod surface inspection system 100 of the present invention to implement the high-speed pod surface inspection method of the present invention will be described below.

As shown in FIG. 3A , firstly, in step S101 , a pod is clamped by the clamping module 2 and divided into a first part and a second part. The first part and the second part are, for example, an upper cover and a lower cover, or a lower cover and an upper cover. If the pod surface high-speed inspection system 100 does not have an additional pod loading area, the pod loading area can be integrated in the automatic equipment area 13, and this step S101 completes the disassembly of the pod in the automatic equipment area 13. point.

Next, in step S102, the stroke controller 4 controls the clamping module 2 to move from the automatic equipment area 13 to the first inspection area 11 in the state of clamping the first part of the pod, when the clamping module 2 enters the first inspection area An inspection area 11, the stroke controller 4 controls the first inspection device 3a to start to inspect the first part.

Next, in step S103, when the first part is inspected, the stroke controller 4 controls the clamping module 2 to return to the automatic equipment area 13, and the stroke controller 4 controls the clamping module 2 to clamp the pod The state of the second part of the system moves from the automatic instrument area 13 to the second inspection area 12 . At this time, the stroke controller 4 controls the activation of the second checking device 3b to check the second part. In other words, when the pod is disassembled into two parts, the clamping module 2 will enter each part of the disassembled pod into two inspection areas for independent inspection, so as to separate the parts within the same period of time as much as possible Inspect each surface of the upper cover of the pod and each surface of the lower cover of the pod to speed up the surface inspection of the parts and surfaces of the pod.

Then, in step S104, when the inspection is completed, the stroke controller 4 controls the clamping module 2 to move back from the second inspection area 12 to the automatic equipment area 13 in the state of clamping the second part of the pod, and controls The clamping module 2 moves from the first inspection area 11 back to the automatic equipment area 13 in the state of clamping the first part of the pod, so as to combine the first part and the second part into a complete pod. The assembling method can be to align and close the upper cover and the lower cover of the pod, or recombine the two parts of the pod in other mechanical ways.

After the pod is removed and the next pod is placed, the stroke controller 4 can control the clamping module 2 , the first inspection device 3 a and the second inspection device 3 b to continue repeating the above stroke. Thus, the pod surface high-speed inspection system 100 of the present invention can continuously inspect the surface cleanliness and/or other defects of each pod at high speed. Compared to other prior technologies, this creation significantly reduces inspection time and ensures that the pod remains clean and undamaged during the inspection process.

Furthermore, the present invention proposes a second embodiment. In the high-speed inspection system 200 for the pod surface of the second embodiment, as shown in FIG. 1C and FIG. 2C , the clamping module 2 may further include a first clamping arm 21 and a second clamping arm 22 for Improve delivery and inspection efficiency. Both the first clamping arm 21 and the second clamping arm 22 are automatic equipment such as mechanical arms, and are arranged in the automatic equipment area 13. The first clamping arm 21 and the second clamping arm 22 can perform clamping according to the received instructions. , Flip, move transport and other actions. The structure of the first clamping arm 21 and the second clamping arm 22 is not limited, for example, it is a six-axis robot arm, which can work with high sensitivity and precision in six axes. Although the first clamping arm 21 and the second clamping arm 22 are shown as two separate mechanical arms in the schematic diagram, they can also be integrated into one mechanical arm.

As shown in FIG. 3B , first, in step S301 , a pod is clamped by the first clamping arm 21 and the second clamping arm 22 and divided into a first part and a second part. The first part and the second part are, for example, an upper cover and a lower cover, or a lower cover and an upper cover. In this part of the action, the stroke controller 4 controls the first clamping arm 21 and the second clamping arm 22 to work together. In addition, if the pod surface high-speed inspection system 200 does not have an additional pod loading area, the pod loading area can be integrated in the automatic equipment area 13, and this step S301 completes the pod alignment in the automatic equipment area 13 split.

Next, in step S302, the stroke controller 4 controls the first clamping arm 21 to move from the automatic equipment zone 13 to the first inspection zone 11 in the state of clamping the first part of the pod, and the stroke controller 4 controls the first clamping arm 21 at the same time. The two clamping arms 22 move from the automatic equipment zone 13 to the second inspection zone 12 in the state of clamping the second part of the pod. When the first clamping arm 21 enters the first inspection area 11, the stroke controller 4 controls the first inspection device 3a to start to inspect the first part; on the other hand, when the second clamping arm 22 enters the second inspection area 12, The stroke controller 4 controls the activation of the second inspection device 3b to inspect the second part. In other words, when the pod is disassembled into two parts, the first clamping arm 21 and the second clamping arm 22 each hold a part and enter the two inspection areas for independent inspection, so that the At the same time, each surface of the upper cover of the reticle pod and each surface of the lower cover of the reticle pod are inspected separately, so as to speed up the surface inspection of each part and each surface of the reticle pod.

Then, in step S303, after the inspection is completed, the stroke controller 4 controls the first clamping arm 21 to move back from the first inspection area 11 to the automatic equipment area 13 in the state of clamping the first part of the pod, and controls The second clamping arm 22 moves from the second inspection area 12 back to the automatic equipment area 13 in the state of clamping the second part of the pod. And control the first clamping arm 21 and the second clamping arm 22 to assemble the pod. The assembling method can be to align and close the upper cover and the lower cover of the pod, or recombine the two parts of the pod in other mechanical ways.

When the pod is removed and the next pod is placed, the stroke controller 4 can control the first clamping arm 21, the second clamping arm 22, the first inspection device 3a and the second inspection device 3b Continue to repeat the above itinerary. Therefore, the pod surface high-speed inspection system 200 of the present invention can continuously and high-speed inspect the surface cleanliness and/or other defects of each pod. Compared to other prior technologies, this creation significantly reduces inspection time and ensures that the pod remains clean and undamaged during the inspection process.

Further, in this embodiment, as shown in FIG. 1C , a pod loading area 14 is further provided outside the cabinet 1 for loading pods. The cabinet body 1 is provided with a loading door 141 , and the loading door 141 separates the automatic equipment area 13 and the pod loading area 14 . The first clamping arm 21 and the second clamping arm 22 can clamp the pod together in the pod loading area 14 and perform disassembly/assembly, or clamp the pod into the automatic equipment area 13 for further processing Split/combine. In this example, the pod loading area 14 also serves as the unloading area (the pods enter and exit at the same time). In this case, the stroke controller 4 controls the first clamping arm 21 to reciprocate in the pod loading area 14 and the first inspection area 11 (passing through the automatic equipment area 13) to transport the first part of the pod, and The stroke controller 4 controls the second clamping arm 22 to reciprocate in the pod loading area 14 and the second inspection area 12 (passing through the automatic equipment area 13 ) to transport the second part of the pod.

In the high-speed inspection system 300 for the pod surface of the third embodiment of the present invention, as shown in FIG. 1D, a pod loading-out area 15 is further provided outside the cabinet body 1 (different from the original pod loading area 15). area 14), the cabinet body 1 is provided with a load-out door 151, which separates the automatic equipment area 13 and the photomask box load-out area 15. The first clamping arm 21 and the second clamping arm 22 can clamp the pod together in the pod loading area 14 and disassemble it, or clamp the pod into the automatic equipment area 13 and then disassemble it ; Then when assembling the pods, they can be combined in the automatic equipment area 13, or in the loading out area 15 of the pods (loading and unloading in different positions of the pods). This process is that the stroke controller 4 controls the first clamping arm 21 to move back and forth in the pod loading area 14, the first inspection area 11 and the pod loading area 15 (passing through the automatic equipment area 13 halfway) to transport The first part of the pod and the stroke controller 4 control the second clamping arm 22 to reciprocate in the pod loading area 14, the second inspection area 12 and the pod loading out area 15 (passing through the automatic equipment area 13 in the middle) ) to ship the second part of the pod. In this way, the loading and unloading of the pods can form an assembly line.

Further, as shown in FIG. 1A and FIG. 1B , the high-speed inspection system 100 for the pod surface may further include a man-machine interface 5 for manually controlling the high-speed inspection system 100 for the pod surface. The man-machine interface 5 is signal-connected to the stroke controller 4, and the man-machine interface 5 is, for example, a keyboard, a button, or a touch screen.

Furthermore, the high-speed inspection system 100 for the surface of the pod may further include a cleaning device, which is connected to the stroke controller 4 with a signal. , the stroke controller 4 controls the clamping module 2 to clamp the part and move to the cleaning device for re-cleaning and re-inspection. The cleaning device is, for example, an air knife or other devices capable of absorbing and blowing dust particles, and may also be a device that provides cleaning fluid.

As shown in Fig. 2A, Fig. 2C and Fig. 4A to Fig. 4C, the detailed structure of the first inspection device 3a and the second inspection device 3b of the invention can be an optical inspection device 3 on the surface of a photomask box, which includes: A supporting platform 31 , a light source module 32 , a camera module 33 and a control module 34 .

The supporting platform 31 is used to support a photomask or a part of the photomask box (upper cover or lower cover). Surface 311 for surface inspection.

The light source module 32 includes a first light source 321 and a second light source 322 . The first light source 321 illuminates the supporting surface 311 in a first direction (as shown in FIG. 4B ), and the second light source 322 illuminates the supporting surface 311 in a second direction (as shown in FIG. 4C ), wherein the first direction The angle between the supporting surface 311 and the supporting surface 311 is larger than the angle between the second direction and the supporting surface 311 , and the difference is preferably more than 45 degrees.

The lens of the camera module 33 is directed toward the supporting surface 311 for capturing surface images of the pod or part of the pod. The camera module 33 is, for example, a camera device with a charge-coupled device (CCD), preferably a high-speed CCD, to quickly capture the surface image of the pod.

The control module 34 is signally connected to the camera module 33 , the first light source 321 , the second light source 322 and the stroke controller 4 . When the optical inspection device 3 on the pod surface is used as the first inspection device 3a and/or the second inspection device 3b of the high-speed inspection system 100 for the pod surface, the control module 34 is also connected to the stroke controller 4 with signals. When the stroke controller 4 commands the optical inspection device on the surface of the pod to start the inspection (or in other examples, the control module 34 receives an external command to start the inspection), the control module 34 controls the first light source 321 and the second light source 322 One of them is turned on and the other is turned off, and the camera module 33 is controlled to take pictures to obtain images under the first light source 321 and images under the second light source 322 respectively. The control module 34 is, for example, a control chip or a control circuit.

When the angles of the light sources are very different, it can comprehensively judge whether there are dust particles or defects in the image at the same position, so as to avoid misjudgment. In this embodiment, the first light source 321 is a coaxial light source (shown as an external coaxial light source in FIG. 4A ), and the second light source 322 is a side light source, which illuminate the support with coaxial light and side light perpendicular to the supporting surface 311 respectively. surface 311 to obtain images under two light sources. The side light source can be a ring-shaped side light mechanism that emits side light in a direction that surrounds the lens, but the invention is not limited thereto.

Next, how to apply the optical inspection device 3 of the pod surface of the present invention to implement the optical inspection method of the pod surface of the present invention will be described.

As shown in FIG. 7 , first, in step S201 , the control module 34 makes the first light source 321 illuminate a pod component in a first direction (refer to FIG. 4B ), and at this time the second light source 322 must be turned off. The photomask component can be the whole of the photomask outer box or the inner box, or a part of the photomask outer box or the inner box, such as the upper cover or the lower cover. The pod components are disposed on the supporting surface 311 , since the surface to be inspected of the pod components is parallel to the supporting surface 311 , the display of the pod components is omitted.

Next, referring to FIG. 6 , in step S202 , the control module 34 controls the camera module 33 to photograph a part of the surface of the pod part P to obtain a first image P1 .

Next, referring to FIG. 4C , in step S203, the control module 34 controls the second light source 322 to irradiate the pod component in a second direction (the first light source 321 must be turned off at this time), wherein the first direction is consistent with the supporting surface 311 The included angle is greater than the included angle between the second direction and the supporting surface 311 , that is, relative to the front light source of the first light source 321 , the second light source 322 is a side light source.

Next, referring to FIG. 6 , in step S204 , the control module 34 controls the camera module 33 to photograph the same part of the surface of the pod part P to obtain a second image P2 .

Finally, in step S205, it is determined whether there is a defect according to the first image P1 and the second image P2. The control module 34 may further include an analysis sub-module with a built-in database for analyzing the captured image data.

Since it may be difficult for the camera module 33 to capture a complete and clear full image of the pod part P at one time, and the heights of the surfaces of the pod part P are different, a better implementation method is to take multiple shots of the pod part P to obtain all the images of the pod part P step by step. As shown in FIG. 6 , the photographing module can move toward the X axis, the Y axis or other directions to photograph the entire mask pod part P step by step. Therefore, the optical inspection device 3 on the surface of the pod of the present invention may further include a power module 35 , and the signal is connected to the control module 34 . The power module 35 is, for example, a conventional mechanism such as a servo motor, a stepping motor, or a cylinder that can be controlled by electric signals and provide power for reciprocating movement. In one example, the power module 35 is power-connected to the support platform 31 , and the control module 34 controls the support platform 31 to move relative to the camera module 33 . In other examples, the power module 35 may also be connected to the camera module 33 by power, and the control module 34 controls the camera module 33 to move relative to the supporting platform 31 . Both methods can achieve relative horizontal movement of the camera module 33 and the supporting platform 31 on the supporting surface 311 . The first light source 321 and the second light source 322 are generally integrated with the camera module 33 on the same mechanism, so when the camera module 33 moves, the first light source 321 and the second light source 322 also move to provide a stable light source.

Further, the above-mentioned determination in step S205 may be analyzed after the entire pod P is photographed, or the analysis may be performed after the first image P1 and the second image P2 of each partial surface are photographed respectively.

Furthermore, since the size of dust particles and defects on the pod part P is mostly extremely small, possibly in the order of microns, and often smaller than the movement error of the power module 35, it is difficult for the camera module 33 to return to the same position after moving. The same dust particle or defect is photographed in the same location. Therefore, a preferred shooting method is to shoot the first image P1 and the second image P2 respectively when the camera module 33 stays at the same position, and then move to the next position. The problem to be faced in this way is how to quickly switch on and off the first light source 321 and the second light source 322 to speed up the shooting process.

As shown in FIG. 2B , in the embodiment of the present invention, it is proposed to add a switch 36 to the optical inspection device 3 on the surface of the pod. The switching switch 36 is signal-connected to the control module 34 , the first light source 321 and the second light source 322 , so as to control the rapid on-off of the first light source 321 and the second light source 322 . The switch 36 can have various forms. In this embodiment, the switch 36 includes a first relay 361 and a second relay 362. The first relay 361 is arranged on the signal path of the control module 34 and the first light source 321. The second The second relay 362 is disposed on the signal path of the control module 34 and the second light source 322 . The relay (Relay) is also called an electric relay, which can be used as an automatic switch. The first light source 321 and the second light source 322 can be switched on and off in turn through the first relay 361 and the second relay 362, thereby speeding up the process of shooting and inspection . The relay is a low-cost, safe, fast and reliable implementation, but the switching switch 36 of the present invention is not limited thereto. In other embodiments, the switching switch 36 is, for example, a thyristor, a switching diode, a switching triode, an electronic bidirectional switching integrated circuit, an optocoupler, etc., and may also be a modulator ( modulator) to control the quick turn on and off of the first light source 321 and the second light source 322 with the modulation signal. In other examples, the switching can also be achieved by using a shutter or mechanically controlling the blocking of the optical path. For example, the first light source 321 and the second light source 322 come from the same main light source but travel through different light paths respectively, and a rotatable mirror is arranged at the branch of the light paths to guide the light to one of the light paths and let the other light path lose light, so as to achieve for quick switching purposes.

Further, as shown in Fig. 5, the optical inspection device 3' on the surface of the pod of the present invention uses an inner coaxial light source as the first light source 321' instead of the optical inspection device 3 on the surface of the pod. Either the external coaxial light source or the internal coaxial light source can be used as the first light source of this creation, but the internal coaxial light source has the advantages of small size, low energy consumption, super high brightness and low heat generation, and is usually integrated with the camera module 33 mechanism.

Although the first inspection device 3a and the second inspection device 3b of this creation can be the optical inspection device 3 on the surface of the pod, it does not mean that the optical inspection device 3 on the surface of the pod must be bound to the photomask Cartridge surface high-speed inspection system 100 is implemented. The optical inspection device 3 for the pod surface can be independently implemented as an inspection device, or combined with other types of devices to form another system.

As shown in FIG. 8A to FIG. 9 , the present invention further proposes a detection device 6 for sub-components of a pod. At least one of the first inspection device 3a and the second inspection device 3b in the high-speed inspection system 100 for the pod surface of the present invention can be replaced by the detection device 6 for the sub-component of the pod. However, the inspection of the sub-component of the pod The device 6 can also be implemented alone, as a detection device mainly used to check the sub-components on the pod (such as some plastic parts, metal parts or glass windows attached to the pod body, etc.), and can also be used with Other types of devices are combined into further systems. The inspection device 6 for sub-components of the pod includes: a supporting platform 61 , a light source module 62 , a camera module 63 and a control module 64 .

The supporting platform 61 is used to support a photomask or a part of the photomask box (upper cover or lower cover). The supporting platform 61 has a supporting surface 611, and the part of the photomask box or the photomask box is just placed Surface 611 for surface inspection.

The light source module 62 includes a coaxial light source 621 and a height adjustment mechanism 623 , wherein the height adjustment mechanism 623 is connected to at least one of the coaxial light source 621 and the supporting platform 31 . The coaxial light source 621 can be an external coaxial light source or an internal coaxial light source. The external coaxial light source is shown in FIG. 8A , but it can also be changed to the internal coaxial light source similar to FIG. 5 . The height adjustment mechanism 623 is, for example, a conventional mechanism such as a servo motor, a stepping motor, or a cylinder that can be controlled by electric signals and provide reciprocating power in the height direction. In FIG. 8A , the height adjustment mechanism 623 is connected to the coaxial light source 621 as an example. However, the height adjustment mechanism 623 can also be connected to the support platform 31 , or both the coaxial light source 621 and the support platform 61 can be connected.

The camera module 63 is connected to the coaxial light source 621 and the camera lens faces the supporting platform 61 . The camera module 63 is, for example, a conventional non-telecentric camera that can receive incident light from multiple angles.

The control module 64 is signally connected to the camera module 63 and the height adjustment mechanism 623 . If the pod sub-component inspection device 6 is used as one of the first inspection device 3 a or the second inspection device 3 b of the pod surface high-speed inspection system 100 , the control module 64 is also connected to the stroke controller 4 with signals. The control module 64 is, for example, a control chip or a control circuit. The control module 64 controls the height adjustment mechanism 623 to adjust the relative distance between the coaxial light source 621 and the supporting platform 31, so that the camera module 63 (linked to the coaxial light source 621) receives different amounts of incident light to produce different effects of sharpness or blur .

For example, as shown in FIG. 8B, when the relative distance between the coaxial light source 621 and the supporting platform 61 is longer, the captured image is sharper; on the contrary, as shown in FIG. 8C, when the relative distance between the coaxial light source 621 and the supporting platform 61 is shorter , the image taken by the camera module 63 is relatively blurred. When judging whether there are dust particles or defects on the surface of the pod, the surface on the pod can be photographed in a sharper way (the relative distance between the coaxial light source 621 and the supporting platform 61 is longer), and then the surface on the pod can be photographed in a relatively blurred way. In this way (the relative distance between the coaxial light source 621 and the supporting platform 61 is relatively short), the secondary components on the pod are photographed. Since the sub-components on the pod (mostly made of plastic, relatively non-scratch-resistant metal or glass) are more susceptible to abrasion than the main body, however, these abrasions are less harmful to the pod, that is, the sub-components are relatively The body of the pod can tolerate more defects such as scratch marks. If the sub-component and the pod body adopt the same optical inspection standard, it will be difficult for the sub-component to pass the optical inspection.

Therefore, when the camera module 63 captures an image of the sub-component, the control module 64 can control the height adjustment mechanism 623 to adjust the relative distance between the coaxial light source 621 and the supporting platform 31 to shorten the relative distance and capture a blurred image. Conversely, when the camera module 63 is changed to take pictures of the mask box body, the control module 64 can control the height adjustment mechanism 623 to adjust the relative distance between the coaxial light source 621 and the support platform 31, so that the relative distance increases, so as to take sharper and clearer images. images to maintain the optical inspection level of the pod itself.

To sum up, the detection device 6 of the pod sub-components of the present invention can simultaneously inspect the pod body and the sub-components on the pod, and perform optical inspection on different positions on the pod with different degrees of clarity.

Further, in this embodiment, the light source module 62 further includes a side light source 622, wherein the angle between the irradiation direction of the coaxial light source 621 and the supporting surface 611 is larger than the angle between the irradiation direction of the side light source 622 and the supporting surface The angle of the included angle of 611. The setting of the side light source 622 and the principle of the optical inspection are the same as the second light source 322 of the optical inspection device 3 on the surface of the pod described above, so details are not repeated here.

Further, in this embodiment, the detection device 6 of the sub-component of the pod further includes a switching switch, which is signally connected to the control module 64 , the coaxial light source 621 and the side light source 622 . The switching switch may include a first relay and a second relay. Wherein the first relay is arranged in the signal path of the control module 64 and the coaxial light source 621 , and the second relay is arranged in the signal path of the control module 64 and the side light source 622 . The principles and functions of the first relay and the second relay in this embodiment are the same as the first relay 361 and the second relay 362 of the aforementioned optical inspection device 3 on the surface of the pod, so they will not be described again. The switching switch of the detection device 6 of the sub-component of the pod is not limited to the embodiment of the relay, but can also be various possible embodiments described above.

Further, as shown in FIG. 9 , in this embodiment, the detection device 6 of the pod sub-component further includes an analysis module 65 , which is connected to the control module 64 for signals. The analysis module 65 analyzes a defect of a pod sub-component in the image according to the image received by the control module 64 . The analysis module 65 has a built-in database to analyze whether there are defects in the captured images.

The invention has been disclosed in the above embodiments, but those skilled in the art should understand that the embodiments are only used to describe the invention, and should not be construed as limiting the scope of the invention. It should be noted that all changes and replacements equivalent to the embodiments should be included in the scope of this creation. Therefore, the scope of protection of this creation should be defined by the scope of the patent application.

100: High-speed inspection system for mask box surface 200: High-speed inspection system for mask box surface 300: High-speed inspection system for mask box surface 1: Cabinet 11: First inspection area 12: The second inspection area 13: Automatic equipment area 14: Reticle box loading area 141: Loading Gate 15: Reticle box load-out area 151: Carry out the door 2: clamping module 21: First clamping arm 22: Second clamping arm 3: Optical inspection device 3': Optical inspection device on the surface of the pod 31: Supporting platform 311: supporting surface 32:Light source module 321: The first light source 321': The first light source 322: Second light source 33: Photography module 34: Control module 35: Power Module 36: toggle switch 361: The first relay 362: Second relay 3a: First inspection device 3b: Second inspection device 4: stroke controller 5: Man-machine interface 6: Detection device for secondary components of photomask box 61: Supporting platform 611: supporting surface 62:Light source module 621: Coaxial light source 622: side light source 623: height adjustment mechanism 63: Photography module 64: Control module 65: Analysis module P: Reticle Box Parts P1: first image P2: Second Image S101~S104: steps S201~S205: steps S301~S303: steps

FIG. 1A is a three-dimensional schematic diagram of a high-speed surface inspection system for a pod according to a first embodiment of the present invention. FIG. 1B is a top view schematic diagram of a high-speed inspection system for the surface of a photomask according to the first embodiment of the present invention. FIG. 1C is a top view schematic diagram of a high-speed surface inspection system for a photomask according to a second embodiment of the present invention. FIG. 1D is a schematic top view of a high-speed surface inspection system for a photomask according to a third embodiment of the present invention. FIG. 2A is a block diagram of a high-speed inspection system for a pod surface according to a first embodiment of the present invention. FIG. 2B is a block diagram of an optical inspection device for the surface of a pod according to an embodiment of the present invention. FIG. 2C is a block diagram of a high-speed inspection system for a pod surface according to a second embodiment of the present invention. FIG. 3A is a flow chart of a high-speed inspection method for a pod surface according to the first embodiment of the present invention. FIG. 3B is a flow chart of a method for high-speed inspection of a pod surface according to a second embodiment of the present invention. FIG. 4A is a schematic perspective view of an optical inspection device for the surface of a pod according to an embodiment of the present invention. 4B is a schematic diagram of the first light source irradiation of the optical inspection device on the surface of the reticle pod according to the embodiment of the present invention. 4C is a schematic diagram of the second light source irradiation of the optical inspection device on the surface of the reticle pod according to the embodiment of the present invention. FIG. 5 is a three-dimensional schematic diagram of an optical inspection device for the surface of a reticle pod according to another aspect of the embodiment of the present invention. FIG. 6 is a schematic diagram of capturing a first image and a second image according to an embodiment of the invention. FIG. 7 is a flowchart of a method for optically inspecting the surface of a pod according to an embodiment of the present invention. FIG. 8A is a three-dimensional schematic diagram of a detection device for sub-components of a reticle pod according to an embodiment of the present invention. FIG. 8B is a schematic diagram of a long-distance shooting of a detection device for sub-components of a reticle pod according to an embodiment of the present invention. FIG. 8C is a schematic diagram of a short-distance shot of a detection device for sub-components of a reticle pod according to an embodiment of the present invention. FIG. 9 is a block diagram of a detection device for sub-components of a reticle pod according to an embodiment of the present invention.

6: Detection device for secondary components of photomask box

61: Supporting platform

611: supporting surface

62:Light source module

621: Coaxial light source

622: side light source

623: height adjustment mechanism

63: Photography module

Claims (5)

A detection device for a secondary component of a photomask box, comprising: a supporting platform; A light source module, including a coaxial light source and a height adjustment mechanism, the height adjustment mechanism is connected to at least one of the coaxial light source and the supporting platform; a camera module, connected to the coaxial light source with the lens facing the supporting platform; and A control module, signally connected to the camera module and the height adjustment mechanism, the control module controls the height adjustment mechanism to adjust the relative distance between the coaxial light source and the support platform. The inspection device for sub-components of a photomask according to claim 1, wherein the coaxial light source is an external coaxial light source. The inspection device for sub-components of a reticle pod according to Claim 1, wherein the coaxial light source is an internal coaxial light source. The detection device for sub-components of a photomask according to claim 1, wherein the light source module further includes a side light source, which is signal-connected to the control module, and the included angle between the irradiation direction of the coaxial light source and the surface of the supporting platform The angle is larger than the included angle between the irradiation direction of the side light source and the surface of the supporting platform. The detection device for sub-components of reticle box as described in claim 1 further includes an analysis module, which is connected to the control module with a signal, and the analysis module analyzes the image in the image according to the image received by the control module A defect in a pod sub-component.