TWM639050U - Wafer cassette sampling device - Google Patents

Abstract

This creation relates to a wafer box sampling device, which includes a machine body, including a first sampling part and a second sampling part; a first sampling module, including a gas supply unit, a valve body, and a first a time control unit and a first sampling container, the valve body is connected between the first sampling container and the wafer box provided on the first sampling part, the first time control unit is electrically connected to the valve body ; A second sampling module, including a second sampling container, a sampling pump and a second time control unit, the second time control unit can drive the sampling pump; and a control unit, can control the gas supply unit to provide A gas can drive the sampling pump.

Description

Wafer cassette sampling device

The invention relates to a wafer box sampling device.

Press, the inside of the wafer box is prone to be polluted by gaseous molecular pollutants or particles during the process of transportation and storage, which affects the yield of wafers. Therefore, it is very important to detect whether there is contamination in the wafer cassette.

However, the wafer box is covered with an airtight shell, so that it is impossible to directly extend the sampling pipeline into the wafer box for subsequent detection.

Therefore, it is necessary to provide a novel and progressive wafer cassette sampling device to solve the above problems.

The main purpose of this creation is to provide a wafer box sampling device, which is beneficial to collect the objects to be collected inside the wafer box.

In order to achieve the above object, this creation provides a wafer cassette sampling device, which includes a machine body, which includes a first sampling part and a second sampling part; a first sampling module, which includes a gas supply unit, A valve body, a first time control unit and a first sampling container, the gas supply unit provides a gas for input into a wafer box placed on the first sampling part and discharges a first target to be collected to The first sampling container, the valve body is connected between the first sampling container and the wafer box provided on the first sampling part, the first time control unit is electrically connected to the valve body; a second Sampling module, which includes a second sampling container, a sampling pump and a second time control unit, the sampling pump is used to connect the wafer cassette and the second sampling container arranged on the second sampling part, the first Two time control units can drive the sampling pump, and the sampling pump is used to input a second object to be collected in the wafer cassette arranged on the second sampling part into the second sampling container; and a control unit, which The gas supply unit can be controlled to provide the gas and drive the sampling pump.

The following is only an example to illustrate the possible implementation of this creation, but it is not used to limit the scope of protection of this creation. The "one" or "at least one" before the nouns mentioned in the article does not limit the number. It can also be "plural" according to the needs, and the change in the number is also within the scope of protection, which will be described first.

Please refer to Fig. 1 to 3, it shows a preferred embodiment of this creation, the wafer cassette sampling device 1 of this creation comprises a machine body 10, a first sampling module 20, a second sampling module 30 and A control unit 40 .

The machine body 10 includes a first sampling part 11 and a second sampling part 12 .

The first sampling module 20 includes a gas supply unit 21, a valve body 22, a first time control unit 23 and a first sampling container 24, the gas supply unit 21 provides a gas for input to the first In a wafer box 2 on the sampling part 11 and discharge a first object to be collected to the first sampling container 24, the valve body 22 is connected to the first sampling container 24 and provided on the first sampling part 11 Between the wafer cassette 2 , the first time control unit 23 is electrically connected to the valve body 22 . The valve body 22 can be opened to conduct the first sampling container 24 and the inside of the wafer box 2 placed on the first sampling part 11 or closed to be non-conductive. The first time control unit 23 can control the opening time of the valve body 22, such as instantaneous (for example, about 1 minute) sampling to obtain the immediate first target to be collected.

The gas supply unit 21 further includes a flow control member 211 and a gas supply source 212, the flow control member 211 is connected to the gas supply source 212 and the wafer box 2 placed on the first sampling part 11, The control unit 40 controls the flow control member 211 to automatically control the flow control member 211 to adjust the gas flow provided by the gas supply source 212 into the wafer cassette 2 .

The second sampling module 30 includes a second sampling container 31, a sampling pump 32 and a second time control unit 33, the sampling pump 32 is used to connect the wafer cassette 2 and the The second sampling container 31, the second time control unit 33 can drive the sampling pump 32, and the sampling pump 32 is provided with a second object to be collected in the wafer box 2 on the second sampling part 12. into the second sampling container 31. The second time control unit 33 can control the driving time of the sampling pump 32, for example, the sampling time is 30 minutes for long-term sampling in internal circulation.

The control unit 40 can control the gas supply unit 21 to provide the gas and drive the sampling pump 32 . The gas is compressed dry gas or dry clean gas. The gas is supplied into the wafer box 2 to provide a positive pressure for taking the first object to be collected in the wafer box 2 out of the wafer box 2 .

Thereby, it is beneficial to collect the first object to be collected (such as pollutant) and the second object to be collected (such as pollutant) inside the wafer box 2, and the wafer box 2 can be placed in different positions for different automated sampling. To further illustrate, the wafer cassette 2 can be placed in the first sampling unit 11 or the second sampling unit 12 to perform different sampling according to sampling requirements (for example, different sampling target species, different sampling time). In addition, the first sampling unit 11 and the second sampling unit 12 can also place a wafer cassette 2 at the same time to perform sampling at the same time.

In this embodiment, the first sampling unit 11 includes a plurality of first flow guiding units 111, and the gas supply unit 21 and the first sampling container 24 are respectively supplied and arranged in the first flow guiding unit 111. The inside of the wafer box 2 of the sampling part 11 is communicated; the second sampling part 12 includes a plurality of second flow guide units 121, and the second sampling container 31 and the sampling pump 32 are respectively supplied by the plurality of second flow guide units 121. It communicates with the inside of the wafer box 2 arranged in the second sampling part 12 . Specifically, each of the first flow guide units 111 and each of the second flow guide units 121 respectively includes a port through which fluid passes.

The first sampling container 24 is a sampling cylinder. In other embodiments, the first sampling container may be a vacuum sampling cylinder, which provides a power source for sampling in a vacuum manner.

The first sampling module 20 further includes a check valve 25, the check valve 25 is connected between the valve body 22 and the first sampling container 24, so that the first object to be collected can only be collected by the wafer box 2 flow towards the first sampling container 24 to prevent backflow.

The first sampling module 20 further includes a gas outlet pipeline 26 and a switch valve 27, the gas outlet pipeline 26 includes a first gas outlet pipeline 261 and a second gas outlet pipeline 262, and the second gas outlet pipeline 262 communicates The first gas outlet pipeline 261, the first gas outlet pipeline 261 can be connected between the wafer box 2 placed on the first sampling part 11 and the first sampling container 24, the second gas outlet pipeline 262 The wafer cassette 2 placed on the first sampling part 11 can be connected to an outside world, and the on-off valve 27 is arranged on the second air outlet pipeline 262 . In this way, after the gas supply unit 21 supplies the gas into the wafer box 2, it can choose to discharge the gas toward the outside or to the first sampling part 11, or between the wafer box 2 and the first sampling container 24 Do an inner loop. Preferably, the first sampling module 20 further includes a third time control unit 37, the third time control unit 37 is electrically connected to the control unit 40, and the third time control unit 37 can control the switch valve 27; The on-off valve 27 can be controlled to open for a period of time to conduct the external environment and the wafer box 2 .

The second sampling container 31 includes an impact bottle 311 and a buffer bottle 312, the impact bottle 311 has an absorption liquid, and the second sampling module 30 further includes an air intake line 34 and an exhaust line 35, The air intake line 34 is used to connect the buffer bottle 312 and the wafer box 2 arranged on the second sampling part 12, the sampling pump 32 is arranged on the air intake line 34, and the exhaust line 35 is provided for The wafer box 2 disposed on the second sampling unit 12 is connected to the shock bottle 311 , and the buffer bottle 312 is connected to the shock bottle 311 . The sample pump 32 is used to pressurize the wafer cassette 2 so that the second object to be collected is discharged and dissolved in the absorbing liquid in the shock bottle 311 . The buffer bottle 312 can prevent fluid from flowing back, such as the gas input into the wafer cassette 2 through the sampling pump 32 or the moisture generated during the sampling process. In other embodiments, the second sampling container can also be an adsorption tube.

The second sampling module 30 further includes a flow control valve 36, the flow control valve 36 is located in the intake pipeline 34, the control unit 40 can control the flow control valve 36; through the flow control valve 36 can be controlled in The flow rate of the fluid in the intake pipeline 34 .

The wafer cassette sampling device 1 further includes an operation interface 28, the operation interface 28 is electrically connected to the control unit 40, and the operation interface 28 can be used for an external operation to control the control unit 40 to control the gas supply unit 21 and the sampling pump 32 at least one; to operate the operation interface 28 to control the automatic operation of at least one of the wafer cassette 2 disposed on the first sampling part 11 and the wafer cassette 2 disposed on the second sampling part 12 sampling.

To further illustrate, the first target to be collected sampled by the first sampling container 24 and the second target to be collected sampled by the second sampling container 31 are pollutants of different natures. For example, the first sampling part 11 is used for sampling MC pollutants (condensation) in the wafer cassette 2 . The second sampling unit 12 is used for sampling MA pollutants (molecular acids) and MB pollutants (molecular bases) in the wafer cassette 2 .

Please refer to FIG. 4, which shows another preferred embodiment of the present invention, the first sampling module 20 is located on the machine body 10, the machine body 10 includes a connecting portion 13, and the connecting portion 13 includes A first discharge port 131, the first discharge port 131 communicates with the second gas outlet pipeline 262 and is used for the detachable assembly and communication of the first sampling container 24, specifically, connected with a first pipe body 3 Between the first discharge port 131 and the first sampling container 24; by allowing the first sampling container 24 to be quickly disassembled and installed in the first discharge port 131, to achieve rapid sampling and replacement of the first sampling container 24 . The second sampling module is arranged on the machine body 10, and the machine body 10 is provided with a connecting portion 14, and the connecting portion 14 includes an exhaust port 141 and an air inlet 151, and the air inlet 151 communicates with the inlet. Gas pipeline 34, the exhaust port 141 communicates with the exhaust pipeline 35, the air inlet 151 is used for the detachable assembly and communication of the buffer bottle 312, and the exhaust port 141 is used for the detachable connection of the impact bottle 311 Connected and connected. Specifically, a second pipe body 4 is connected between the air inlet 151 and the buffer bottle 312, and a third pipe body 5 is connected between the exhaust port 141 and the shock bottle 311; by The buffer bottle 312 and the shock bottle 311 are quickly disassembled and installed in the air inlet 151 and the exhaust port 141 respectively, so as to achieve rapid sampling and replacement.

1: Wafer box sampling device 2:Wafer box 3: The first tube body 4: Second tube body 5: The third pipe body 10: Machine body 11: The first sampling department 111: the first diversion unit 12: The second sampling department 121: the second diversion unit 13: Assembly part 131: the first discharge port 14: Connecting part 141: Exhaust port 151: air inlet 20: The first sampling module 21: Gas supply unit 211: flow control part 212: Air supply source 22: valve body 23: First Time Control Unit 24: First sampling container 25: check valve 26: Outlet pipeline 261: The first outlet pipeline 262: Second outlet pipeline 27: switch valve 28: Operation interface 30: Second sampling module 31: Second sampling container 311: impact bottle 312: buffer bottle 32: Sampling pump 33: Second time control unit 34: Intake pipeline 35: exhaust pipe 36: Flow control valve 37: The third time control unit 40: Control unit

Fig. 1 is a perspective view of a preferred embodiment of the invention. Fig. 2 is a schematic configuration diagram of a preferred embodiment of the invention. Fig. 3 is a block diagram of a preferred embodiment of the invention. Fig. 4 is a schematic diagram of another preferred embodiment of the present invention.

1: Wafer box sampling device

2:Wafer box

10: Machine body

11: The first sampling department

111: the first diversion unit

12: The second sampling department

121: the second diversion unit

Claims (10)

A wafer box sampling device, comprising: A machine body, including a first sampling part and a second sampling part; A first sampling module, including a gas supply unit, a valve body, a first time control unit and a first sampling container, the gas supply unit provides a gas for input to one of the first sampling parts In the wafer box and discharge a first object to be collected to the first sampling container, the valve body is connected between the first sampling container and the wafer box provided on the first sampling part, the first The time control unit is electrically connected to the valve body; A second sampling module, including a second sampling container, a sampling pump and a second time control unit, the sampling pump is used to connect the wafer cassette and the second sampling container arranged on the second sampling part, The second time control unit can drive the sampling pump for inputting a second object to be collected in the wafer cassette arranged on the second sampling part into the second sampling container; and A control unit can control the gas supply unit to provide the gas and drive the sampling pump. The wafer cassette sampling device according to claim 1, wherein the second sampling container includes a shock bottle and a buffer bottle, the shock bottle contains an absorbing liquid, and the second sampling module further includes an air inlet pipeline and an exhaust pipeline, the air intake pipeline is used to connect the buffer bottle and the wafer box arranged on the second sampling part, the sampling pump is arranged on the air intake pipeline, and the exhaust pipeline is used for supplying The wafer box and the shock bottle arranged on the second sampling part are connected, and the buffer bottle and the shock bottle are connected. The wafer cassette sampling device as described in claim 2, wherein the second sampling module is arranged on the machine body, and the machine body is provided with a connecting portion, the connecting portion includes an exhaust port and an air inlet, The air inlet communicates with the air inlet pipeline, the exhaust outlet communicates with the exhaust pipeline, the air inlet is used for the detachable assembly of the buffer bottle and communicates with each other, and the air outlet is used for the detachable assembly of the shock bottle And connected. The wafer cassette sampling device as claimed in claim 2, wherein the second sampling module further includes a flow control valve, the flow control valve is disposed in the air inlet pipeline, and the control unit can control the flow control valve. The wafer cassette sampling device according to claim 1, wherein the gas supply unit further includes a flow control element and a gas supply source, the flow control element is connected to the gas supply source and placed on the first sampling part In the wafer cassette, the control unit controls the flow control member. The wafer cassette sampling device according to claim 1, wherein the first sampling module further includes a gas outlet pipeline and a switch valve, the gas outlet pipeline includes a first gas outlet pipeline and a second gas outlet pipeline, The second gas outlet pipeline communicates with the first gas outlet pipeline, and the first gas outlet pipeline can be connected between the wafer cassette placed on the first sampling part and the first sampling container, and the second gas outlet pipeline A channel can be used to connect the wafer box placed on the first sampling part and an outside world, and the switch valve is arranged in the second air outlet line. The wafer cassette sampling device as described in claim 6, wherein the first sampling module is arranged on the machine body, the machine body includes a joint part, the joint part includes a first discharge port, and the first A discharge port communicates with the second air outlet pipeline and is detachably assembled and communicated with the first sampling container. The wafer cassette sampling device as described in claim 1 further includes an operation interface, the operation interface is electrically connected to the control unit, and the operation interface can be used for an external operation to control the control unit to control the gas supply unit and the sampling pump at least one. The wafer cassette sampling device as described in claim 1, wherein the first sampling part includes a plurality of first flow guide units, and the gas supply unit and the first sampling container are respectively supplied and arranged in the plurality of first flow guide units The inside of the wafer box of the first sampling part is connected; the second sampling part includes a plurality of second flow guiding units, and the second sampling container and the sampling pump are respectively supplied and arranged in the plurality of second flow guiding units. The inside of the wafer box of the second sampling part is connected. The wafer cassette sampling device as claimed in item 4, wherein the first sampling module further includes a check valve connected between the valve body and the first sampling container; the first sampling module The group also includes an outlet pipeline and a switch valve, the outlet pipeline includes a first outlet pipeline and a second outlet pipeline, the second outlet pipeline communicates with the first outlet pipeline, and the first outlet pipeline The gas outlet pipeline can be connected between the wafer box placed on the first sampling part and the first sampling container, and the second outlet pipeline can be connected to the wafer box placed on the first sampling part and a Outside, the switch valve is set in the second outlet pipeline; the first sampling module further includes a third time control unit, the third time control unit is electrically connected to the control unit, and the third time control unit can control The switch valve; the wafer cassette sampling device further includes an operation interface, the operation interface is electrically connected to the control unit, and the operation interface can be used for external operation to control the control unit to control at least one of the gas supply unit and the sampling pump The first sampling part includes a plurality of first flow guide units, and the gas supply unit and the first sampling container are respectively connected with the inside of the wafer box located in the first sampling part through the plurality of first flow guide units ; The second sampling unit includes a plurality of second flow guide units, and the second sampling container and the sampling pump communicate with the inside of the wafer box provided in the second sampling unit through the plurality of second flow guide units respectively.

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