TWM638862U - Washing device for removing ammonia gas and organics - Google Patents

Abstract

This creation is about a scrubbing device for removing ammonia gas and organic matter, using the first filtering device and the second filtering device in the scrubbing device to sequentially carry out the cyclic pickling mode (the pH value of which is maintained below 5) and the flushing and water washing mode, To simultaneously remove the high concentration of ammonia and organic matter in the waste gas generated by wafer cleaning.

Description

Washing device for removing ammonia and organic matter

The invention relates to a cleaning device, especially a cleaning device for removing ammonia gas and organic matter in the wafer cleaning process.

In the ultra-large integrated circuit (ULSI) process, the wafer cleaning technology and its cleanliness (Cleanliness) often affect the yield (Yield), component quality (Quality) and its reliability (Reliability) of the wafer process. one of the important factors. Therefore, the wafer needs to be cleaned in the related process to meet the cleanliness requirement.

The cleaning of wafers is carried out by soaking the whole batch or a single wafer with chemicals or pure water cleaning, mainly to remove pollutants on the wafer surface, such as fine particles, organic pollutants, inorganic substances, metal ions, etc. Impurities.

At present, the wet cleaning method is commonly used in the industry, and the most accepted one is the RCA cleaning method (RCA Clean) in the wet cleaning method. This RCA cleaning method was developed by the RCA company in the 1960s. The cleaning principle is to use different chemical formulas for cleaning, such as standard cleaning solution 1 (SC-1) and standard cleaning solution 2 (SC-2).

While cleaning with chemical formulas SC-1 (APM), SC-2 (HPM), SPM, DHF, and BHF, etc., there will often be a large amount of process mixed waste gas such as acid gas, alkali gas, and volatile organic compounds. emission. At present, the removal efficiency of volatile organic compounds has not been able to achieve good results.

Volatile organic compounds (also known as volatile organic gas pollutants, Volatile Organic Compounds, VOCs) refers to the general term for air pollutants of organic compounds with a boiling point below 250°C under atmospheric pressure, and the environmental pollution caused by them. It is widely used in various types of industries.

The common volatile organic compounds in industry are acetone (Acetone), isopropyl ketone (IPA), propylene glycol monomethyl ether (PGME), propylene glycol monomethyl ether acetate (PGMEA), dimethylsulfoxide (DMSO), ethanolamine (MEA), nitrogen-methyl 2-tetrahydropyrrolone (NMP), diethylene glycol monobutyl ether (BDG), tetramethylammonium hydroxide (TMAH) and other ingredients are the majority.

In solving the problem of mixed exhaust gas, most of them introduce wet scrubbers to deal with pollutants (acid, alkali, organic substances) in exhaust gas, but the removal efficiency of organic gases has not been able to achieve good results, especially in single On the wafer cleaning machine, the removal efficiency of organic process waste gas (mainly isopropanol) has not been good.

However, the cleaning method of the current wet scrubber, in addition to the removal efficiency of organic process exhaust gas, has not been able to improve, and it is also unable to simultaneously remove high-concentration corrosive process exhaust gas while removing organic process exhaust gas.

For this reason, in addition to improving and increasing the removal efficiency of wet scrubbers for organic substances such as isopropanol (IPA), while removing organic substances such as isopropanol (IPA), it is also possible to simultaneously remove high-concentration corrosive process exhaust gases. The wet scrubber, and the high concentration of corrosive process waste gas and organic pollutants have high removal efficiency, which is a problem that those skilled in the art want to solve.

The main purpose of this creation is to provide a washing device for removing ammonia gas and organic matter. By setting the cyclic pickling mode (its pH value is maintained below 5) of the first filter device and the flushing water washing mode of the second filter device, To simultaneously remove high concentrations of ammonia and organic matter in waste gas.

In order to achieve the above purpose, this creation discloses a washing device for removing ammonia gas and organic matter, which is installed in a cavity, and an air inlet and an air outlet are respectively arranged on both sides of the cavity, and its structure includes: a first A filtering device, which is arranged in the chamber and located on one side of the air inlet, the first filtering device includes; and a pickling chamber, the two sides of the pickling chamber are respectively provided with a first A filter air inlet and a first filter air outlet, the air inlet is connected to the first filter air inlet through an air inlet connecting channel; a first filter element is arranged on the inside of the pickling chamber, and Located above the first filter air inlet; a first spraying device, which is arranged inside the pickling chamber and above the first filter element, the first spraying device includes at least one first spray head and A first pipeline, one end of the first pipeline is connected to the at least one first spray head, the other end passes through the pickling chamber and communicates with a liquid switching valve; and a circulation pipeline, which is located in the pickling chamber The pickling chamber is placed under the pickling chamber, one end of which is connected to the liquid switching valve, and the circulation pipeline is used to transport a first liquid through the liquid switching valve into the first pipeline, so that the first spraying device The first liquid is sprayed on the first filter, and the first liquid is an acidic liquid; a second filter device is arranged in the cavity and is located on one side of the air outlet, and the second filter device includes ; A water washing chamber, the two sides of the water washing chamber are respectively provided with a second filter air inlet and a second filter air outlet, the first filter air outlet is connected to the second filter air inlet through a gas connection channel , the second filter air outlet is connected to the air outlet; a second filter, which is arranged on the inside of the washing chamber, and is located above the second filter air inlet; and a second spraying device, which is set Inside the washing chamber and above the second filter element, the second spraying device includes at least one second spray head and a second pipeline, and one end of the second pipeline is connected to the at least one second spray head , the other end passes through the washing chamber and communicates with a washing liquid supply device.

This creation provides an embodiment, the content of which is that when a waste gas enters the pickling chamber, the waste gas system contains an ammonia gas and an organic matter, the concentration of the ammonia gas is greater than 800ppm and the concentration of the organic matter is greater than 1000ppm, when the The waste gas passes through the first filter element to remove the ammonia gas, and exits the pickling chamber through the first filter gas outlet, then enters the water washing chamber through the gas connection channel, and removes the ammonia gas through the second filter element. After removing the organic matter, the waste gas is discharged from the water washing chamber through the second filtered air outlet, and the first liquid enters the pickling chamber through the first pipeline, and is sprayed on the passing through the at least one first spray head. After the waste gas of the first filter element, the first liquid is discharged from the pickling chamber and flows into the circulation pipeline, and a second liquid enters the water washing chamber through the second pipeline, and passes through the at least one After the second spray head sprays the waste gas passing through the second filter element, the second liquid is discharged from the washing chamber.

This creation provides an embodiment, and its content is that this first filter system further comprises a monitoring module (a first transmission element), an acid-base detector, an acid discharge control device (a second transmission element, a timing element) and a pickling liquid supply device (a third transmission element).

This creation provides an embodiment, the content of which is that when the acid-base detector detects that the pH value of the first liquid is greater than 5, the acid-base detector notifies the monitoring module, and the monitoring module sends an exclusion message to the The acid discharge control device removes the first liquid from the pickling chamber, and the acid discharge control device sends a replenishment message to the pickling liquid supply device, and the pickling liquid supply device replenishes the first liquid to a liquid supply pipeline, one end of the liquid supply pipeline communicates with the liquid switching valve, and the other end communicates with the pickling liquid supply device.

The invention provides an embodiment, the content of which is that when the timing element reaches a predetermined time value, the acid discharge control device automatically removes the first liquid in the pickling chamber, and the acid discharge control device The supplementary message is sent to the pickling liquid supply device, and the pickling liquid supply device replenishes the first liquid to the liquid supply pipeline.

The invention provides an embodiment, the content of which is that the second filtering device further includes a drainage device, which is arranged under the washing chamber, and the drainage device is used to discharge the second liquid.

This creation provides an embodiment, the content of which is that the first filter element includes a first housing, at least one first porous element and at least one first ion adsorption element, and the at least one first porous element (a The first catalytic material) and the at least one first ion adsorption element are stacked in sequence in the first housing, and the at least one first porous element is located on one side of the first filter inlet, and the at least one A first ion adsorption element is located at one side of the first filtered air outlet.

This creation provides an embodiment, the content of which is that the second filter element includes a second housing, at least one second porous element and at least one second ion adsorption element, and the at least one second porous element (a The second catalyst material) and the at least one second ion adsorption element are stacked in sequence in the second housing, and the at least one second porous element is located on one side of the second filter inlet, the at least one A second ion adsorption element is located at one side of the second filtered air outlet.

1: washing device

10: Cavity

12: air inlet

121: Intake connecting channel

122: gas connecting channel

14: Air outlet

20: The first filter device

21: pickling chamber

211: The first filter air inlet

212: The first filter air outlet

22: The first filter

221: The first shell

222: first porous element

2221: The first catalyst material

223: The first ion adsorption element

23: The first sprinkler

231: The first nozzle

232: The first pipeline

233: liquid switching valve

24:Circulation pipeline

25:Monitoring module

251: the first transmission element

26: Acid-base detector

27: Acid discharge control device

271: timing element

272: Second transmission element

28: Pickling liquid supply device

281: The third transmission element

282: Liquid supply line

30: Second filter device

31: washing chamber

311: Second filter air inlet

312: Second filter air outlet

32: Second filter element

321: second shell

322: second porous element

3221: Second catalyst material

323: the second ion adsorption element

33: Second sprinkler

331: Second nozzle

332: Second pipeline

34: Washing liquid supply device

35: Drainage device

A: waste gas

N: Ammonia

P: Pitch

S1: Exclude message

S2: Supplementary information

VOC: organic matter

W1: first liquid

W2: second liquid

θ: angle

Figure 1A: It is a structural schematic diagram of an embodiment of this creation; Figure 1B: It is a schematic diagram of the structure and operation of an embodiment of this creation; Figure 2: It is a schematic diagram of an enlarged structure of an ion adsorption element of this creation; Figure 3A Figure: It is a schematic diagram of signal transmission in the acid-base monitoring mode of this creation; and Figure 3B: it is a schematic diagram of signal transmission in the timing monitoring mode of this creation.

In order to enable your review committee to have a further understanding and understanding of the characteristics of this creation and the effects achieved, the examples and accompanying explanations are hereby provided as follows: In view of the fact that it is impossible to remove organic pollutants (the removal efficiency is not high) At the same time, it simultaneously removes the problem of high-concentration corrosive process exhaust gas. Accordingly, this creation then proposes a washing device for removing ammonia and organic matter to solve the problems caused by the prior art.

The following will further illustrate the characteristics, matching structure and method of the washing device for removing ammonia and organic matter of this creation: first, please refer to Figure 1A, which is a structural schematic diagram of an embodiment of this creation. As shown in Fig. 1A, the washing device 1 for removing ammonia gas and organic matter of the present creation is arranged in a cavity 10, and an air inlet 12 and an air outlet 14 are respectively arranged on both sides of the cavity 10, and its The structure includes a first filter device 20 and a second filter device 30 .

The first filtering device 20 of this embodiment is arranged in the cavity 10 and is located on one side of the air inlet 12. Its structure includes: a pickling chamber 21, a first filter element 22, a The first spraying device 23 and a circulation pipeline 24 . Wherein the two sides of this pickling chamber 21 are respectively provided with a first filtered air inlet 211 and a first filtered air outlet 212, and the air inlet 12 is communicated with the first filtered air inlet through an air inlet connecting channel 121 211.

In this embodiment, the first filter element 22 is disposed inside the pickling chamber 21 and above the first filter inlet 211, wherein the first filter element 22 includes a first housing 221, At least one first porous element 222 and at least one first ion adsorption element 223 .

The at least one first porous element 222 and the at least one first ion adsorption element 223 are sequentially stacked in the first casing 221, and the at least one first porous element 221 is located in the first filter inlet On one side of the air port 211, the at least one first ion adsorption element 223 (is made of plastic, glass fiber, metal plate or ceramic filling material in a single or composite material to form a plate-shaped corrugated flat structure, so that the plate and plate Forming a gas passage therebetween) is located on one side of the first filtered gas outlet 212 .

And on the surface of the at least one first porous element 222 (its material is stainless steel, titanium, platinum or aluminum, but not limited to this), a first catalyst material 2221 (titanium dioxide, silicon oxide, oxide aluminum or platinum, but not limited to).

Furthermore, the first spraying device 23 of this embodiment is arranged inside the pickling chamber 21 and above the first filter element 22. The first spraying device 23 includes at least one first spraying head 231 and A first pipeline 232, one end of the first pipeline 232 is connected to the at least one first nozzle 231, and the other end passes through the pickling chamber 21 and communicates with a liquid switching valve 233 (which is a ball valve or a ball valve) structure, including a two-way valve, a three-way valve, or a four-way valve, etc., a three-way ball valve is used for illustration in this embodiment, but it is not limited thereto).

Wherein the at least one first shower head 231 sprays a first liquid W1 (is an acidic liquid, the present embodiment selects sulfuric acid for use, but not limited to this, and the pH value of the first liquid W1 is watered according to the concentration of ammonia N) adjust, and maintain below pH 5) on the first filter element 22, so that the first filter element 22 presents an acidic state (maintain below pH 5).

Furthermore, the circulation line 24 of the first filtering device 20 is located below the pickling chamber 21 and passes through the pickling chamber 21, one end of which communicates with the liquid switching valve 233, and the circulation line 24 is Used to transport the first liquid W1 to enter the first pipeline 232 again through the liquid switching valve 233, so that the first spraying device 23 sprays the first liquid W1 on the first filter element 33, and then enters the cycle again Circulation is carried out in the pipeline 24.

And this second filtering device 30 of present embodiment, it is arranged in this cavity 10, and is positioned at one side of this air outlet 14, and this second filtering device 30 is comprised: a washing chamber 31, a second The filter element 32 and a second spraying device 33 . Wherein the both sides of this washing chamber 31 are respectively provided with a second filtered air inlet 311 and a second filtered air outlet 312, and the first filtered air outlet 311 is connected to the second filtered air inlet through a gas connection channel 122 311 , the second filtered air outlet 312 is connected to the air outlet 14 .

And the second filter element 32 is arranged inside the washing chamber 31 and above the second filter inlet 311, wherein the second filter element 32 includes a second housing 321, at least one second The porous element 322 and at least one second ion adsorption element 323 .

The at least one second porous element 322 and the at least one second ion adsorption element 323 are sequentially stacked in the second casing 321, and the at least one second porous element 322 is located in the second process One side of the filter air inlet 311, the at least one second ion adsorption element 323 (is a plastic, glass fiber, metal plate or ceramic filling material made of a plate-type corrugated flat structure in the form of a single or composite material, so that the plate A gas channel is formed between the plate and the plate) is located on one side of the second filtered gas outlet 312.

And on the surface of the at least one second porous element 322 (its material is stainless steel, titanium, platinum or aluminum, but not limited to this), a second catalyst material 3221 (titanium dioxide, silicon oxide, oxide aluminum or platinum, but not limited to).

Furthermore, the second spraying device 33 of the present embodiment is arranged inside the water washing chamber 31 and above the second filter element 32. The second spraying device 33 includes at least one second spray head 331 and one The second pipeline 332 , one end of the second pipeline 332 is connected to the at least one second spray head 331 , and the other end passes through the washing chamber 31 and communicates with a washing liquid supply device 34 .

Wherein the at least one second spray head 331 sprays a second liquid W2 (water is used in this embodiment, but not limited thereto) on the second filter element 32 to make the second filter element 32 present a wet state.

And, please refer to Fig. 1B further, it is the structural operation diagram of the embodiment of this creation. First, a waste gas A (the waste gas A contains the ammonia N and an organic VOC, the concentration of the ammonia N is greater than 800ppm and the concentration of the organic VOC is greater than 1000ppm) generated by the wafer cleaning process enters the This pickling chamber 21 in a filtering device 20 (advance along with the big arrow of Fig. 1B), and when passing through this first filter element 22, can pass through this first liquid W1 of this first filter element 22 (by The at least one first spray head 23 sprays out) to remove the high concentration of ammonia N in the waste gas A (at this time, the first filter element 22 is in an acidic state due to the first liquid W1), and the ammonia gas N is filtered out. The waste gas A of ammonia gas N is then discharged from the pickling chamber 21 through the first filtered gas outlet 211 and enters the second filter device 30 .

Subsequently, the waste gas A that has filtered out the ammonia gas N enters the water washing chamber 31 of the second filter device 30 through the gas connection channel 122, and passes through the second liquid W2 of the second filter element 32 (by the After at least one second spray nozzle 22 sprays) removes and adsorbs this organic matter VOC (at this moment, this second filter element 32 presents wet state because of this second liquid W2), this waste gas A (removed this ammonia gas N of high concentration and the organic matter VOC) are discharged from the water washing chamber 31 through the second filter air outlet 312, and then discharged from the washing device 10.

Moreover, the first liquid W1 of this embodiment first enters the liquid switching valve 233 through a pickling liquid supply device 28 through a liquid supply pipeline 282, and then enters the pickling chamber through the first pipeline 232. 21, and spray on the first filter element 22 (in an acidic state) through the at least one first spray head 23, and after absorbing and removing the ammonia gas N in the waste gas A, the first liquid W1 will be discharged from the pickling The chamber 21 flows into the circulation pipeline 24 , and then switches to the first pipeline 232 to enter the pickling chamber 21 through the liquid switching valve 233 , so as to achieve an acid circulation mode.

However, the second liquid W2 of this embodiment first enters the water washing chamber 31 through the water washing liquid supply device 34 through the second pipeline 332, and is sprayed on the second filter element 32 through the at least one second spray head 331. (showing a wet state), and after absorbing and removing the organic matter VOC in the waste gas A, the second liquid W2 passes through a drainage device 35 (which is arranged below the water washing chamber 31 to discharge the second liquid W2) Evacuate the water washing chamber 31 and no longer circulate.

Also, please refer to Fig. 2, which is an enlarged schematic diagram of the structure of the ion adsorption element of the present creation, as shown in Fig. 2, the present embodiment takes the second filter element 32 as an example (the first filter of the present creation) The structural configuration and mode of operation of the element 22 are also the same as the second filter element 32, so it will not be described in detail here), a plurality of gas channels are formed between the at least one second ion adsorption element 323, and these gas channels (with mutual A distance P, the distance P is between 3mm and 30mm) adopts an oblique configuration, and also adopts a continuous turning direction, tilting to the left or right, so that the waste gas A that has been dissolved and escaped again can reach another The effect of replenishment can effectively improve the removal rate of pollutants and reduce the probability of secondary escape. Moreover, the setting of the distance P can also prevent the problem of excessive gas pressure loss.

Furthermore, as shown in Figure 2, in this embodiment, the at least one second ion adsorption element 323 is designed in the form of these gas channels, so that the second liquid W2 can flow along the at least one first ion from top to bottom. The surface of the two ion adsorption elements 323 flows downwards, opposite to the direction of the waste gas A, and the angles can conflict, so that the pollutants in the waste gas A can be more easily adsorbed by the second liquid W2, and can be guaranteed to be dissolved The organic pollutants absorbed in the second liquid W2 are not easy to be released into the air again, so as to achieve the effect of high efficiency removal.

Furthermore, the gas passages and the at least one second porous element 322 form an angle θ, the angle θ is between 30° and 90°, so that the waste gas A can pass through the gas passages. When the body channel is used, it is easier to directly impact and absorb the second liquid W2, thereby being absorbed by the second liquid W2.

Also, in order to maintain the removal rate, please refer to Figure 3A, which is a schematic diagram of signal transmission in the acid-base monitoring mode of this creation. As shown in Fig. 3A, the first filtering device 20 of the washing device 1 for removing ammonia gas and organic matter of the present invention further includes a monitoring module 25 (a kind of pH value controller, such as a microcomputer pH analyzer, used for monitoring the pH value), an acid-base detector 26 (an industrial acid-base three-in-one electrode acid-base pH meter, used to measure the pH value when the first liquid W1 is added), an acid-discharging control device 27 (it is a kind of pneumatic valve, which can control the switch, and the amount of the first liquid W1 is controlled by the switching time of the pneumatic valve (such as timing element 271)) and the pickling liquid supply device 28 (uses the pump to supply the The first liquid W1 enters the first filter device 20 of the washing device 1 ).

Wherein the monitoring module 25 and the acid-base detector 26 are all arranged inside the pickling chamber 21 and below the first filter 22, the monitoring module 25 further includes: a first transmission element 251 (it is installed in the monitoring module 25), and the acid-base detector 26 is electrically connected to the monitoring module 25, and is used to detect the acid-base of the first liquid W1 passing through the first filter element 22 value.

The acid discharge control device 27 (including a timing element 271 and a second transmission element 272 ) is disposed outside the pickling chamber 21 and is electrically connected to the monitoring module 25 . The pickling liquid supply device 28 (disposed outside the washing device 1 and including a third transmission element 281 ) is electrically connected to the acid discharge control device 27 .

Acid-base monitoring mode: when the acid-base detector 26 detects that the pH value of the first liquid W1 is greater than 5, the acid-base detector 26 will send a warning message to notify the monitoring module 25, and the monitoring module 25 will send A discharge message S1 to the acid discharge control device 27, when the acid discharge control device 27 discharges the first liquid W1 of the pickling chamber 21, the acid discharge control device 27 will send a supplementary message S2 to the pickling chamber The liquid supply device 28, the pickling liquid supply device 28 supplements the first liquid W1 to the liquid supply pipeline 282 (one end of which communicates with the liquid switching valve 233, and the other end communicates with the pickling liquid supply device 28), and through the The liquid switching valve 233 provides the first liquid W1 to the first pipeline 232 so as to maintain the pH value of the first liquid W1 inside the first filter device 20 to be less than 5.

With the above-mentioned mode, the addition amount of the first liquid W1 can be controlled by the acid-base detector 26 to maintain the pH value in the pickling chamber 21, and the ammonia gas N can be directly adjusted for different concentrations. Addition amount of the first liquid W1.

Also, in addition to the acid-base monitoring mode, time monitoring will also be performed on the acid cycle mode. Please refer to Figure 3B further, which is a schematic diagram of signal transmission in the timing monitoring mode of this creation. As shown in Figure 3B, timing monitoring mode: when the timing element 271 reaches a predetermined time value (preferably 4-8 hours in this embodiment, which can be adjusted according to the needs of the user), the acid discharge control device 27 The first liquid W1 of the pickling chamber 21 will be automatically removed, and the acid discharge control device 27 sends the replenishment message S2 to the pickling liquid supply device 28, and the pickling liquid supply device 28 replenishes the first liquid W1 to the liquid supply pipeline 282 , and provide the first liquid W1 to the first pipeline 232 through the liquid switching valve 233 , so as to maintain the pH value of the first liquid W1 inside the first filter device 20 .

Next, please refer to the following table, which is the experimental result table of this embodiment.

According to Article 4 of the "Semiconductor Manufacturing Air Pollution Control and Emission Standards" issued by the Environmental Protection Agency of the Executive Yuan, it is mentioned that "the air pollutants generated by the semiconductor manufacturing industry should be introduced into the pollution prevention equipment through a closed exhaust system and treated to meet the requirements Emissions shall not be allowed until the following table is specified." and the table mentions VOCs The emission standard is: the emission reduction rate should be greater than 90% or the total emission of the factory should be less than 0.6kg/hr (based on methane).

However, it can be seen from the above table that the control group used water for flushing mode, did not use acidic liquid, and did not use acidic liquid for circulation mode. As a result, it can be seen that IPA (isopropanol which is organic matter) needs to increase (from 10LPM to 16LPM) its water supply (LPM, liter/minute) to make the removal rate reach more than 90%, so it will waste its water resources.

Compared with the experimental group in this example (in addition to water washing, acidic liquid is used for circulation mode, and its pH values are 2.8 and 2.9 respectively), this example only needs to use 10LPM to remove IPA (isopropanol) The rate reached more than 90%.

Next, according to Schedule 2 of the "Emission Standards for Hazardous Air Pollutants from Stationary Pollution Sources" published by the Environmental Protection Agency of the Executive Yuan, the allowable concentration of ammonia gas is less than 50ppm.

However, it can be seen from the above table that the control group uses water for flushing mode, no matter how the water supply increases, the removal rate of NH ₃ (ammonia gas) will not be able to reach more than 95% (none is less than 50ppm), showing that the control group is not only In addition to wasting water resources, it is impossible to increase the removal rate of NH ₃ (ammonia) to more than 95%. Compared with the experimental group in this example (in addition to water washing, acidic liquid is used for circulation mode, and the pH values are 2.8 and 2.9 respectively), this example only needs to use 10 LPM because of the use of acid circulation mode. The removal rate of NH ₃ (ammonia) is over 99% (the concentration of NH ₃ (ammonia) is less than 50ppm).

From the above experiments, it can be known that this creation combines the acid circulation mode with the water flushing mode washing device, which not only saves water consumption, but also can remove IPA (isopropanol) to more than 90%, and can also simultaneously remove NH ₃ (Ammonia) removal rate reaches over 99%.

Therefore, this creation is indeed novel, progressive and can be used in industry. It should meet the patent application requirements of our country's patent law.

However, the above is only a preferred embodiment of this creation, and it is not used to limit the scope of implementation of this creation. For example, all equal changes and modifications are made according to the shape, structure, characteristics and spirit described in the patent scope of this creation. , should be included in the scope of the patent application for this creation.

1: washing device

10: Cavity

12: air inlet

121: Intake connecting channel

122: gas connecting channel

14: Air outlet

20: The first filter device

21: pickling chamber

211: The first filter air inlet

212: The first filter air outlet

22: The first filter

221: The first shell

222: first porous element

2221: The first catalyst material

223: The first ion adsorption element

23: The first sprinkler

231: The first nozzle

232: The first pipeline

233: liquid switching valve

24:Circulation pipeline

25:Monitoring module

26: Acid-base detector

27: Acid discharge control device

271: timing element

28: Pickling liquid supply device

282: Liquid supply line

30: Second filter device

31: washing chamber

311: Second filter air inlet

312: Second filter air outlet

32: Second filter element

321: second shell

322: second porous element

3221: Second catalyst material

323: The second ion adsorption element

33: Second sprinkler

331: Second nozzle

332: Second pipeline

34: Washing liquid supply device

35: Drainage device

W1: first liquid

W2: second liquid

Claims (11)

A washing device for removing ammonia gas and organic matter, which is installed in a cavity, and the two sides of the cavity are respectively provided with an air inlet and an air outlet, and its structure includes: a first filter device, which is installed in the cavity Inside the body, and located on one side of the air inlet, the first filtering device includes; Gas port, the air inlet communicates with the first filter air inlet through an air inlet connection channel; a first filter element, which is arranged inside the pickling chamber and above the first filter air inlet ; a first spraying device, which is arranged inside the pickling chamber and above the first filter element, the first spraying device includes at least one first spray head and a first pipeline, the first pipe One end of the pipeline is connected to the at least one first spray head, the other end passes through the pickling chamber and communicates with a liquid switching valve; and a circulation pipeline, which is located under the pickling chamber and passes through the pickling chamber , one end of which communicates with the liquid switching valve, the circulation pipeline is used to transport a first liquid through the liquid switching valve into the first pipeline, so that the first spraying device sprays the first liquid on the first filter element Liquid, the first liquid is an acidic liquid; a second filter device is arranged in the cavity and is located on one side of the gas outlet, and the second filter device includes; a water washing chamber, the water washing chamber A second filtered air inlet and a second filtered air outlet are respectively provided on both sides, and the first filtered air outlet is passed through a gas The connecting channel communicates with the second filter air inlet, and the second filter air outlet communicates with the air outlet; a second filter element is arranged inside the washing chamber and above the second filter air inlet and a second spraying device, which is arranged on the inside of the washing chamber and above the second filter element, the second spraying device includes at least one second spray head and a second pipeline, the second pipe One end of the path is connected to the at least one second spray head, and the other end passes through the washing chamber and communicates with a washing liquid supply device; wherein, a waste gas enters the pickling chamber, and the waste gas system includes an ammonia gas and an organic matter , when the waste gas passes through the first filter element, the ammonia gas is removed, and it is discharged from the pickling chamber through the first filter gas outlet, and then enters the water washing chamber through the gas connection channel, and passes through the second filter After removing the organic matter, the waste gas is discharged from the washing chamber through the second filtered gas outlet, and the first liquid enters the pickling chamber through the first pipeline and passes through the at least one first spray head After being sprayed on the waste gas passing through the first filter element, the first liquid is discharged from the pickling chamber and flows into the circulation pipeline, and a second liquid enters the water washing chamber through the second pipeline, and passes through the After the at least one second spray head sprays the waste gas passing through the second filter element, the second liquid is discharged from the washing chamber. The washing device for removing ammonia gas and organic matter as described in claim 1, wherein the first filter device further includes a monitoring module and an acid-base detector, which are arranged inside the pickling chamber and located in the Below the first filter element, the monitoring module includes: a first transmission element, which is arranged in the monitoring module, and the acid-base detector is Electrically connected to the monitoring module, set inside the pickling chamber, and used to detect the pH value of the first liquid passing through the first filter element. The washing device for removing ammonia gas and organic matter as described in claim 2, wherein the first filtering device further includes: an acid discharge control device, which is arranged outside the pickling chamber and is electrically connected to the monitoring module set, and includes a second transmission element and a timing element; and a pickling liquid supply device, which is electrically connected to the acid discharge control device, and includes a third transmission element; wherein, when the acid-base detector detects When the pH value of the first liquid is greater than 5, the acid-base detector notifies the monitoring module, and the monitoring module sends a removal message to the acid discharge control device and removes the first liquid in the pickling chamber, And the acid discharge control device sends a replenishment message to the pickling liquid supply device, the pickling liquid supply device replenishes the first liquid to a liquid supply pipeline, one end of the liquid supply pipeline is connected to the liquid switching valve, and the other One end communicates with the pickling liquid supply device. The washing device for removing ammonia gas and organic matter as described in claim 3, wherein when the timing element reaches a predetermined time value, the acid discharge control device automatically removes the first liquid in the pickling chamber, and the acid discharge The control device sends the replenishment message to the pickling liquid supply device, and the pickling liquid supply device replenishes the first liquid to the liquid supply pipeline. The washing device for removing ammonia gas and organic matter as described in claim 2, wherein the second filtering device further includes: a drainage device, which is arranged below the washing chamber, and the drainage device is used to discharge the second filtering device Two liquids. The washing device for removing ammonia gas and organic matter as described in claim 1, wherein the first filter element includes a first housing, at least one first porous element and at least one first ion adsorption element, and the at least one first The porous element and the at least one first ion adsorption element are sequentially stacked in the first casing, and the at least one first porous element is located on one side of the first filter air inlet, and the at least one first The ion adsorption element is located at one side of the first filtered air outlet. The scrubbing device for removing ammonia gas and organic matter according to claim 6, wherein a first catalytic material is disposed on the at least one first porous element. The washing device for removing ammonia gas and organic matter as described in claim 1, wherein the second filter element includes a second housing, at least one second porous element and at least one second ion adsorption element, and the at least one second The porous element and the at least one second ion adsorption element are sequentially stacked and arranged in the second casing, and the at least one second porous element is located on one side of the second filter inlet, and the at least one second The ion adsorption element is located at one side of the second filtered air outlet. The scrubbing device for removing ammonia gas and organic matter as described in claim 8, wherein a second catalyst material is disposed on the at least one second porous element. The cleaning device for removing ammonia gas and organic matter as described in claim 7, wherein the material of the at least one first porous element is stainless steel, titanium, platinum or aluminum, and further, the first catalyst material is titanium dioxide, oxide Silicon, alumina or platinum. The washing device for removing ammonia and organic matter as described in claim 9, wherein the material of the at least one second porous element is stainless steel, titanium, platinum or aluminum, and further, the second catalyst material is titanium dioxide, oxide Silicon, alumina or platinum.

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