TWI745201B - Process waste gas washing device - Google Patents

Abstract

The present invention is a process waste gas washing device, which utilizes changing the liquid supply mode of the absorption liquid, so that a cleaner washing liquid can be used to adsorb the pollutants in the waste gas under the same water consumption, and effectively improve the pollutants in the waste gas. Removal efficiency.

Description

Process waste gas washing device

The present invention relates to a device, particularly a device for washing process exhaust gas, which provides a first liquid or/and a third liquid sprayed to the first filter device or/and the second filter device, and is optimized by the principle of adsorption In this way, the removal efficiency of pollutants in the exhaust gas is effectively improved.

In response to the improvement of the factory process and manufacturing speed, many semiconductor cleaning machines have gradually adopted single wafer cleaners to replace the traditional wet benches, but single wafer cleaners have come along. The problem is that the mixed waste gas (acid gas, alkali gas, organic gas...) is difficult to separate. The mixed waste gas problem not only arises in the semiconductor industry, but also has the same mixed waste gas problem in other industries.

Volatile organic gas pollutants or volatile organic compounds (Volatile Organic Compounds, VOCs) refer to the general term for air pollutants of organic compounds with a boiling point below 250°C under one atmosphere. The environmental pollution problems caused by them are extensive. Land exists in all types of industries.

In the high-tech industry, especially in the semiconductor manufacturing and optoelectronic industries, the main sources of volatile organic compounds produced by product manufacturing are photoresist, developer and cleaning solution, and the main organic species are acetone and isoacetone. (IPA), propylene glycol monomethyl ether (PGME), propylene glycol monomethyl ether acetate (PGMEA), dimethyl sulfoxide (DMSO), ethanolamine (MEA), nitrogen-methyl 2-tetrahydropyrrolidone (NMP), Diethylene Glycol Monobutyl Ether (BDG), Tetramethylammonium Hydroxide (TMAH) and other ingredients are the majority, and its organic waste gas usually has the characteristics of low-medium concentration (<500ppm) and medium-high air volume.

Traditional techniques for removing VOCs are mainly divided into five methods: condensation method, adsorption method, washing method, incineration method and biological treatment technology, among which:

Condensation method is mostly used for waste treatment of VOCs with high concentration, simple composition and recycling value. The advantage of condensation method is that the treatment cost is lower, but the disadvantage is that it needs to be operated at high concentration (concentration must be higher than 5,000ppm) to have certain benefits. In addition, the cost of installation and operation is relatively high, so it is generally only used for high-concentration volatile organic compounds with recycling value, and the application is relatively limited.

The adsorption method mainly uses adsorbents with high porosity and high specific surface area to separate VOCs gas molecules from the exhaust gas by physical adsorption (reversible reaction) or chemical bonding (irreversible reaction) to achieve the purpose of purifying exhaust gas. The advantage of the adsorption method is that it can create extremely high removal efficiency. The disadvantage is that it requires frequent replacement or addition of absorbents or materials, high maintenance costs and secondary pollution problems, and as the concentration of gas pollutants increases, the cost is Will continue to rise.

The washing method uses the solubility characteristics of pollutants in water to separate and remove VOCs from the exhaust gas. The washing method can be divided into chemical washing (chemical reaction) and physical washing (solubility). There are many types of VOCs and VOCs of different components. The solubility in water is different. For VOCs with less solubility, chemical washing methods are usually used. Oxidizing agents such as potassium permanganate, hypochlorous acid or hydrogen peroxide must be added to the water to increase the removal efficiency. Then chemical washing methods require Chemical agents are often added, and secondary pollutants are problematic. For VOCs with better solubility, physical absorption can be used. An aqueous solution without chemical agents is used as a method to remove organic pollutants, and physical absorption is the cost Relatively low organic pollutant removal method.

The incineration method uses an oxidation process to convert VOCs waste gas into harmless CO ₂ and H ₂ O, but it is the most expensive method of all methods. Considering the scale, heating value and waste heat recovery equipment, the cost and design must be carefully evaluated.

Biological treatment technology decomposes pollutants into harmless inorganic substances through the decomposition, oxidation, transformation and other mechanisms of microorganisms. The advantage is that there are fewer secondary pollution problems and lower operating costs, but the disadvantage is that the area is the largest and the initial design The cost is expensive, and it is rarely used in the domestic electronics industry due to issues such as floor space.

As mentioned above, the organic species used in major high-tech industries, such as acetone (Acetone), isoacetone (IPA), propylene glycol monomethyl ether (PGME), propylene glycol monomethyl ether acetate (PGMEA), dimethyl ethylene Dust (DMSO), ethanolamine (MEA), nitrogen-methyl 2-tetrahydropyrrolidone (NMP), diethylene glycol monobutyl ether (BDG), tetramethylammonium hydroxide (TMAH) and other ingredients, all have certain The degree of water solubility can be removed by washing method. Therefore, the washing method can be a suitable exhaust gas removal method when treating such specific and large amounts of volatile organic pollutants.

In order to solve the problem of mixed waste gas, at present, more washing devices are introduced to treat the pollutants (acid, alkali, organic matter) in the waste gas. The prior art has good removal efficiency for acid gas and alkali gas pollutants, but for organic gas However, the removal efficiency has not been able to achieve good results. In the single wafer cleaning machine, the removal of isopropyl alcohol (IPA) is the main organic target, but its removal efficiency has not been able to achieve good results.

Therefore, in order to improve the removal efficiency of organic matter such as isopropyl alcohol (IPA), how to make a high-efficiency waste gas scrubber to achieve better removal efficiency of pollutants in the waste gas is a problem that those skilled in the art want to solve .

An object of the present invention is to provide a process waste gas scrubbing device, which uses a first filter device or uses a first filter device and a second filter device to be installed in a cavity to filter the gas. The first liquid or/and the third liquid provided by the spray device to continuously wash the pollutants in the waste gas of the process can effectively improve the efficiency of removing pollutants. Among them, the first liquid system refers to the washing water source provided outside the device , That is, the water source that has not been used for pollution removal. The first liquid system is pure water, tap water, recycled water and other liquids of different water quality. The cleaner the water quality of the first liquid, the more pollutants originally contained in the water. Less, the more pollutants can be absorbed in the exhaust gas. However, for cost considerations, the user can choose an appropriate water quality as the first liquid. This embodiment uses tap water for illustration. The transportation method of tap water is a custom Know the skills, so I will not repeat them here. The second liquid system refers to the liquid used in this device after primary air pollutant filtration, that is, the liquid that has absorbed the primary exhaust gas pollutant components. The third liquid system refers to the liquid composed of the first liquid and the second liquid. The third liquid has a non-specific mixing ratio. When 100% is supplied by the first liquid, the supply liquid is the first liquid. Similarly, when 100% is supplied by the second liquid, the supply liquid is the second liquid. In addition to the above-mentioned conditions provided by a single liquid, as long as there is a mixed liquid of the first liquid and the second liquid, it is regarded as the third liquid. Among them, the first liquid is the liquid with the least pollutants among the three liquids, that is, it has the best removal efficiency, the second liquid is the liquid with the highest concentration of pollutants, and the third liquid is composed of the first liquid and the second liquid. Therefore, the pollutant concentration depends on the proportion of the first liquid added. The more the first liquid is added, the lower the pollutant concentration of the third liquid.

In view of the above-mentioned objective, the present invention provides a process exhaust gas scrubbing device, which is arranged in a cavity, the two ends of the air inlet channel are respectively connected with an air inlet and a filter air inlet, and gas enters the air inlet channel through the air inlet, and The gas enters the first filter device after passing through the filter air inlet, and then flows through the first porous element, the ion adsorption element, and the air outlet in sequence. Furthermore, the first liquid continuously enters the air outlet and passes through the ion adsorption After the element and the first porous element are washed by the first liquid, the gas flows out from the filtered air outlet and exits the cavity through the air outlet.

The present invention provides an embodiment, wherein the first filter device includes a housing and a first filter device, the first filter device is disposed between the filter air inlet and the filter air outlet, and the first filter device It can be a gas-liquid exchange space for waste gas and washing liquid. The conventional device uses spray-type washing liquid spraying, which allows gas and liquid to contact in a certain space to achieve the purpose of removing pollutants. This exchange space is in the absence of fillers. It is also regarded as the first filter device; in order to increase the pollutant removal rate, an ion adsorption element can also be added to the first filter device to increase the time the liquid stays in the air, so that the contact time of the gas can be increased. The adsorption element can be made of plastic, glass fiber, metal plate, ceramic filling material, or single or composite material, and it belongs to any device that can increase the liquid residence time.

The present invention provides an embodiment, wherein the first filter device further includes a second porous element disposed between the ion adsorption element and the filtering air outlet, and a second catalyst is disposed on the second porous element Material.

The present invention provides an embodiment, wherein the material of the first porous element and the second porous element is stainless steel, titanium, platinum or aluminum, and further, the first catalyst material and the second catalyst material are Titanium dioxide, silicon oxide, aluminum oxide or platinum. The present invention provides an embodiment, further comprising a liquid storage tank, the liquid storage tank is arranged below the first filter device, the air inlet channel is located between the liquid storage tank and the first filter device, further, the A drainage device is arranged under the liquid storage tank, and the drainage device is used to discharge the waste liquid.

The present invention provides an embodiment, which further includes an extraction device, which is disposed between the first spray device and the liquid storage tank, and is located on the liquid transportation pipeline.

The present invention provides an embodiment, which further includes a liquid conveying pipe, one end of the liquid conveying pipe is connected to the first pipe or the second pipe, and the liquid conveying pipe is used to transport a second liquid through the first pipe. A pipeline and/or a second pipeline enter the first spraying device.

The present invention provides an embodiment, wherein at least one liquid switching valve is further provided between the first spraying device and the liquid delivery pipe, which is used to switch the first liquid and/or the second liquid to enter the first liquid Inside a spraying device.

The present invention provides an embodiment, wherein the cavity further contains a second filter device, one end of the first filter device and a gas channel is connected to the filter outlet of the first filter device, and the other end of the gas channel is connected to the second filter device A filtering air inlet, and the gas passage is used to allow the gas to flow from the first filtering device into the first filtering device of the second filtering device.

The present invention provides an embodiment, which further includes a third pipeline, the two ends of which are respectively connected to the first filter device and the second filter device, and the first liquid switching valve is provided at both ends of the third pipeline. It is used to switch the first liquid and the second liquid, and is also used to mix the first liquid and the second liquid for washing.

10: Cavity

100: gas

101: Pollutants

12: Air inlet

120: intake channel

120A: intake channel

130: gas channel

130A: Gas channel

14: air outlet

14A: Air outlet

20: The first filter device

20A: The first filter device

20’: The second filtering device

20A’: The second filtering device

22: shell

222: filter air inlet

222’: Filtered air inlet

222A’: Filtered air inlet

222A’: Filtered air inlet

224: Filter outlet

224’: Filter outlet

224A’: Filter outlet

224A’: Filter outlet

24: The first porous element

241: The first catalyst material

26: Ion adsorption element

262: Gas Channel

28: second porous element

281: The second catalyst material

30: The first spraying device

30A: The first spraying device

30’: Second spraying device

30A’: Second spraying device

40: Liquid storage tank

40A: Liquid storage tank

40’: Liquid storage tank

40A’: Liquid storage tank

50: extraction device

50’: Extraction device

70: Liquid switching valve

70A: Liquid switching valve

70B: Liquid switching valve

90: Drainage device

90’: Drainage device

200: Liquid transport pipeline

200’: Liquid transport pipeline

A: Process waste gas washing device

B: Process waste gas washing device

T1: The first pipeline

T2: second pipeline

T2’: Second pipeline

T3: third pipeline

W1: First liquid

W2: second liquid

W3: third liquid

P: Pitch

θ: Angle

Figure 1A: It is a schematic diagram of the conventional device of the present invention; Figure 1B: It is a schematic diagram of the device of an embodiment of the present invention; Figure 2: It is an enlarged schematic diagram of the structure of an ion adsorption element according to an embodiment of the present invention Figure 3A: It is a schematic structural diagram of the conventional structure of the present invention; Figure 3B: It is a schematic structural diagram of another embodiment of the present invention; and Figure 3C: It is a schematic structural diagram of another embodiment of the present invention.

In order to enable your reviewer to have a further understanding and understanding of the features of the present invention and the effects achieved, the preferred embodiments and detailed descriptions are provided here. The description is as follows:

Conventional factories often introduce scrubbers to treat pollutants (acids, alkalis, organic substances) in exhaust gas. The prior art has good removal efficiency for acid gas and alkali gas pollutants, but the removal efficiency of organic gas has not been To achieve good results, please refer to Figure 1A, which is a schematic diagram of the conventional device of the present invention. As shown in the figure, the current washing method known in the industry is that after a gas enters an air inlet channel 120A through an air inlet 12A, From bottom to top, it enters into a filtering air inlet 222A of a first filter device 20A, and then flows out of a filtered air outlet 224A, and then is discharged through an air outlet 14A. A first liquid W1 is discharged through a first pipe T1. Input into a liquid storage tank 40A, the first liquid W1 is a pure water, tap water or a liquid without pollutants, and mixed with a second liquid W2 in the liquid storage tank 40A to form a third liquid W3 , Wherein the second liquid W2 is a liquid that has absorbed the pollution source, and the third liquid W3 is formed by mixing the first liquid W1 with the second liquid W2, and the liquid storage tank is passed through a second pipeline T2 The third liquid W3 in 40A is transported to a first spraying device 30A, and the first spraying device 30A sprays the third liquid W3 onto the first filter device 20A from top to bottom, and adsorbs and flows through the first filter device 20A. After the gas in the filter device 20A forms a new second liquid W2 and then falls into the liquid storage tank 40A, through such recycling, the second liquid W2 in the liquid storage tank 40A absorbs pollution in the gas The efficiency of the material will be lower and lower, even if the first liquid W1 is added, the adsorption force cannot be improved.

In the present invention, the first liquid or the second liquid or the third liquid provided by a first pipeline, a second pipeline, and a third pipeline through a liquid transport pipeline flows through the first filter device to be washed by the intake air The gas enters the channel, the gas enters the air inlet channel through the air inlet, and the gas enters the first filter device or/and the second filter device after passing through the filter air inlet, and then flows through the first filter device and the second filter device in sequence. At the air outlet, the first pipeline, the second pipeline, and the third pipeline are further used to switch the absorption liquid supply mode to improve the removal efficiency of pollutants in the intake channel. The main principle is to apply the principle of equilibrium solubility to a certain temperature, Under the total pressure, the mixed gas contacts the first liquid, and the solute is transferred to the liquid phase. When the solute in the liquid phase reaches saturation, the amount of solute entering the liquid phase at any time is equal to the amount of solute that escapes in the liquid phase, that is, the gas and liquid two After the phases reach equilibrium, the first liquid can no longer absorb pollutants. Furthermore, according to the principle of mass transfer, the concentration of pollutants in the first liquid will also affect the absorption rate and efficiency. Therefore, this embodiment changes the traditional conventional wisdom. The method of directly mixing the first liquid with the second liquid to form the third liquid. By changing the first pipe, the second pipe, and the third pipe to switch the supply mode of the absorption liquid, the first liquid can be most directly supplied to The spray device, in this way, can use the third liquid with the least pollutants to absorb pollutants in the exhaust gas, which can effectively achieve the effect of improving the removal efficiency.

Hereinafter, various embodiments of the present invention will be described in detail through the use of drawings. However, the concept of the present invention may be embodied in many different forms, and should not be construed as being limited to the exemplary embodiments set forth herein.

First, please refer to FIG. 1B, which is a schematic diagram of an apparatus according to an embodiment of the present invention.

As shown in Figure 1B, an embodiment of the present invention discloses a process exhaust gas scrubbing device, which is disposed in a cavity 10, and both sides of the cavity 10 are provided with an air inlet 12 and an air outlet 14, respectively. The process waste gas washing device includes a first filter device 20, which is arranged in the cavity 10 and located on one side of the air inlet 12. The first filter device 20 includes a housing 22, a first filter device Hole element 24 and an ion adsorption element 26. The housing 22 is provided with a filter air inlet 222 and a filter air outlet 224 respectively above and below the housing 22. The first porous element 24 is arranged in the housing 22 and is located at the filter On one side of the air inlet 222, a first catalyst material 241 is arranged on the first porous element 24, and the ion adsorbing element 26 is arranged between the first porous element 24 and the filtered air outlet 224, wherein The first filter device 20 further includes a second porous element 28 disposed between the ion adsorbing element 26 and the filtering air outlet 224, and a second catalyst material 281 is disposed on the second porous element 28 .

In addition, a first spraying device 30 is provided on the first filter device 20 in the cavity 10, and the first spraying device 30 is used to spray a first liquid W1, a second liquid W2, or a liquid from top to bottom. A third liquid W3 is in the first filter device 20.

In addition, in this embodiment, a first pipeline T1 is provided, one end of which is connected to a first liquid switching valve 70, and the first pipeline T1 is used to transport a first liquid W1 into the first liquid through a liquid transport pipeline 200. A spraying device 30 enables the first spraying device 30 to spray the first liquid W1 on the first filtering device 20.

Furthermore, the first liquid switching valve 70 is a structure of a ball valve or a ball valve (including a two-way valve, a three-way valve, a four-way valve, etc.). In this embodiment, a three-way ball valve is used for description, but not This is limited.

Wherein, the material of the first porous element 24 and the second porous element 28 is stainless steel, titanium, platinum or aluminum. Furthermore, the first catalyst material 241 and the second catalyst material 281 are titanium dioxide, Silica, alumina or platinum.

Next, please refer to FIG. 1B again. In this embodiment, a liquid storage tank 40 is further included. The liquid storage tank 40 is disposed under the first filter device 20. Further, an air inlet channel 120 is located in the liquid storage tank. 40 and the first filter device 20, the air inlet passage 12 is arranged on one side of the first filter device 20, and extends downward from the air inlet 12 and communicates with the filter air inlet 222, the air The body enters the intake passage 120 through the intake port 12, and the gas enters the first filter device 20 after passing through the filtering intake port 222.

Furthermore, a drainage device is provided under the liquid storage tank 40 to drain the liquid in the liquid storage tank 40.

Furthermore, this embodiment further includes an extraction device 50, which is arranged between the first spray device 30 and the liquid storage tank 40 and is located on the liquid transport pipeline 200. The extraction device 50 is a water pump , Pumping motor, pressurizing motor or pumping machine, this embodiment uses a pumping motor, but it is not limited to this.

Therefore, as described above, an intake passage 120 of this embodiment is connected to the intake port 12 and the filtering intake port 222, and a gas 100 enters the first filter device 20 through the intake passage 120 and flows through the first filter device 20 in sequence. The first porous element 24, the ion adsorbing element 26 and the air outlet 224, and further, the first liquid W1 continuously enters the air outlet 14 and passes through the ion adsorbing element 26 and the first porous element 24, the After the gas 100 is washed by the liquid, it flows out from the filtered gas outlet 224 and exits the cavity 10 through the gas outlet 14.

Next, please refer to Figure 2, which is an enlarged schematic diagram of the structure of the ion adsorption element of an embodiment of the present invention. As shown in the figure, the ion adsorption element 26 of this embodiment further includes a plurality of gas channels 262, and the The gas channels 262 are arranged in an oblique direction with continuous turning directions, inclined to the left or right, so that the gas 100 that has been dissolved and escaping again can be re-collected, which can effectively improve the removal rate of pollutants and reduce The probability of a second escape.

Furthermore, in this embodiment, the ion adsorption element 26 is designed as the gas passages 262, so that the absorption liquid can flow down the surface of the ion adsorption element 26 from top to bottom, opposite to the direction of the gas 100, and the angle can be adjusted. Conflict, can make organic gas molecular pollutants (the gas 100) more easily absorbed The absorption of the liquid can also ensure that the organic pollutants that have been dissolved in the absorption liquid are not easily released into the air again, so as to achieve a high-efficiency removal effect.

Wherein, the ion adsorbing element 26 is made of plastic, glass fiber, metal plate or ceramic filling material or a single or composite material made of a wave-like plate structure, so that the gas channels 262 are formed between the plate and the plate. The absorbing liquid flowing from above flows on the surface of the plate to absorb gaseous molecular pollutants in the air.

At the same time, in this embodiment, the gas channels 262 have a distance P between each other, and the distance P is between 3 mm and 30 mm, so that the contaminated gas 100 (such as volatile organic compounds) can be easily absorbed by the absorption liquid. At the same time, it is not easy to cause the problem of excessive gas pressure loss. Furthermore, through the gas passages 262, the gas 100 passes upward through the gas passages 262 (as shown by the dashed line in Figure 2), while absorbing liquid Pour down from the channels of the gas channels 262. Furthermore, the gas channels 262 and the first porous element 24 form an angle θ, and the angle θ is between 30° and 90°. When the gas 100 passes through the gas channels 262, it is easier to directly impact the absorbing liquid, so that it is absorbed by the absorbing liquid.

Next, please refer to Figure 1B again. As shown in the figure, the present invention can filter the gas 100 through a single first filter device 20. As shown in Figure 1B, the second liquid W2 can be extracted through the The device 50 is transported to the first spray device 30 and sprayed above the first filter device 20, or the first liquid W1 is transported through the first pipeline T1, and is extracted to the first spray device through the extraction device 50 30 and spray above the first filter device 20, or switch the first liquid switching valve 70 so that the first liquid W1 is added to the second liquid W2, and then transported by the extraction device 50 to the first spray device 30, and sprayed above the first filter device 20.

As mentioned above, in this embodiment, the first liquid W1 and the second liquid W2 are controlled to switch through and through the first liquid switching valve 70, so as to adsorb the pollutant 101 in the gas 100, and when the second liquid W2 After being used for many times, the absorption liquid with a certain concentration of pollutants is mixed, and the ability of the second liquid W2 to absorb new pollutants will be reduced, resulting in a decrease in removal efficiency. Therefore, this embodiment increases the use of the first liquid W1 In this way, the first liquid W1 is directly supplied to the front end of the extraction device 50, and through the control of the first liquid switching valve 70, the user can choose to use the first liquid W1 and/or the second liquid W2 or The third liquid W3 (the first liquid W1 is mixed with the second liquid W2) is supplied to the first spraying device 30 to achieve the effect of effectively improving the removal efficiency.

Furthermore, in order to achieve more efficient removal, the conventional industry practice refers to Figure 3A, which is a schematic diagram of the conventional device of the present invention. As shown in the figure, the current industry-known washing method can also use two or more In the scrubbing device, a gas enters an air inlet passage 120A through an air inlet 12A, enters a filtered air inlet 222A of the first filter device 20A from bottom to top, and then flows out of a filtered air outlet 224A into a gas channel 130A Then, it flows into a second filter device 20A' through a filtered air inlet 222A', and then flows out through a filtered air outlet 224A', and then exhausts the external environment through an air outlet 14A.

Wherein, a first liquid W1 is input into a liquid storage tank 40A and 40A' through a first pipe T1. The first liquid W1 is a pure water, tap water or a liquid without pollutants, and is combined with the liquid A second liquid W2 in the storage tanks 40A and 40A' is mixed to form a third liquid W3, wherein the second liquid W2 is the liquid that has adsorbed the pollution source, and the third liquid W3 is the first liquid W1 is formed by mixing the second liquid W2, and transports the third liquid W3 in the liquid storage tanks 40A and 40A' to a first spray device 30A and 30A' through a second pipeline T2 and T2'. A spraying device 30A and 30A' sprays the third liquid W3 on the first filter device 20A and the second filter device 20A' from top to bottom, and adsorbs and flows through the first filter device 20A and the second filter device 20A. Device 20A' After the gas is formed, the new second liquid W2 is formed and then falls into the liquid storage tanks 40A and 40A'. Through such recycling, the second liquid W2 in the liquid storage tanks 40A and 40A' adsorbs the gas 100 The efficiency of the pollutant 101A will become lower and lower. Even if the first liquid W1 is added through this device, the adsorption force cannot be improved.

Furthermore, in order to achieve more efficient removal, the present invention can also adopt a series connection method to improve the removal efficiency of the pollutant 101. Please refer to Figure 3B, which is a schematic structural diagram of another embodiment of the present invention, such as As shown in the figure, the former (left side) is called process waste gas scrubbing device A, and the latter (right side) is called process waste gas scrubbing device B. When two or more process waste gas scrubbing devices are used in the cavity 10 Inside, taking the above-mentioned serial configuration as an example, the first filter device 20 and a second filter device 20' will be used at the same time, wherein the components of the first filter device 20 and the second filter device 20' are configured as before It is described in an embodiment, so it will not be repeated here.

Further, one end of a gas channel 130 is connected to the filter outlet 224 of the first filter device 20 of the process waste gas washing device A, and the other end of the gas channel 130 is connected to the filter of the second filter device 20' of the process waste gas washing device B The gas inlet 222', the gas channel 130 is used to transport the gas 100 from the first filter device 20 to the second filter device 20' and then pass through the filtered gas outlet 224' of the process waste gas scrubbing device B , And then exhaust the external environment through the air outlet 14.

The above-mentioned process waste gas washing device B includes the second filter device 20', and is provided with a second spraying device 30'. Referring back to Figure 3B, the process waste gas washing device B can directly use an extraction device 50' for pressure extraction. After the first liquid W1 flows through the first pipe T1' through a liquid conveying pipe 200, the first liquid W1 is sprayed out through the second spray device 30', and in this embodiment, the process waste gas cleaning device A third pipe T3 is provided between the first pipe T1 of A and the first pipe T1' of the process waste gas washing device B. Both ends of the third pipe T3 are respectively provided with the process waste gas washing device A. Between a first liquid switching valve 70A and the liquid storage tank 40', in this way, the process waste gas washing device A and the process waste gas washing device B can be located between the first liquid W1 and the second liquid W2 To switch, The gas 100 entering the gas inlet passage 130 from the gas inlet 12 is washed to reduce the concentration of the pollutant 101 in the gas 100. In addition, the liquid storage tank 40' can pass through the first liquid switching valve 70A and After 70B is switched, the second liquid W2 is transferred to the outside of the first spraying device 30, and there are drainage devices 90 and 90' under the liquid storage tanks 40 and 40', which are used to drain the liquid storage tank 40 and The second liquid W2 in 40'.

As mentioned above, the main purpose of this embodiment is to save the amount of use of the first liquid W1 and to remove the pollutants 101 efficiently. According to the principle of mass transfer, the absorption liquid (such as the above-mentioned first liquid Or the concentration of the pollutant 101 in the second liquid or the third liquid) will affect the rate and efficiency of absorption. Therefore, the main purpose of this embodiment is to make full use of the gradient difference between the concentration of pollutants in the absorption liquid and the concentration in the air. From the perspective of the direction of use of the absorption liquid, when the fresh absorption liquid (the first liquid W1) enters the process waste gas scrubbing device B, the pollutants contained are the least. Therefore, the process waste gas scrubbing device B is used to wash the gas After 100, the second liquid W2 is switched through the first liquid switching valve 70A on the third pipe T3, and the washed waste water (the second liquid W2) is transported to the process waste gas washing device A. At this time, since the gas flowing through the process waste gas scrubbing device A still has a high concentration of the pollutant 101, the washed second liquid W2 has a certain efficiency of removing the pollutant 101, and the first used one time The two liquids W2 can be switched through the liquid switching valve 70A and supplied to the process waste gas scrubbing device A for use of the washing liquid, which can save the consumption of fresh absorption liquid (the first liquid), and also has the effect of efficiently removing the pollutant 101.

In addition, please refer to Figure 3C, which is a schematic structural diagram of another embodiment of the present invention. As shown in the figure, the gas flow direction of this embodiment is the same as that of the above embodiment, so it will not be repeated here; in addition, the arrangement of components is the same In the above-mentioned embodiment, it will not be repeated here.

In this embodiment, the first liquid W1 is transferred to the first spraying device 30' through the liquid delivery pipeline 200' through the first pipeline T1, so that the first liquid W1 flows through the second spray device 30' from top to bottom. The filter device 20' forms the second liquid W2 and then falls into the liquid storage tank 40', and then is transported to the first spraying device 30 through the liquid delivery pipeline 200 through the third pipeline T3, so that the The second liquid W2 is sprayed to the first filter device 20 for reuse. The improved process washing device of this embodiment supplies fresh absorption liquid (the first liquid W1) directly into the spray outlet (the first spray device 30') , In order to increase the removal efficiency of the pollutant 101 of the gas 100, and by using the used liquid (the second liquid W2) as the first filter scrubbing of the gas, it can effectively improve the removal of the pollutant in the gas 100 The utility of 101.

Taking a single-process exhaust gas scrubbing device as an example (an embodiment of the present invention), in the experiment, only isopropyl acetone (IPA) was introduced as the main VOC pollutant in the environment, so the VOC in the water can be regarded as composed entirely of IPA. Measure the VOC concentration of the water inlet of the first pipeline T1 and the first spraying device 30. In this experiment, the input water volume and the sprayed water volume are both 8.5 (Liter/min).

Experimental group: 100% of the first liquid is directly supplied to the liquid storage tank to remove VOC pollutants. The first pipeline T1 directly supplies 100% of the first liquid W1 into the liquid storage tank 40 (containing the second Liquid W2), the first spray device 30 sprays the third liquid W3 (which is formed by mixing the first liquid W1 with the second liquid W2).

Control group: 100% of the first liquid is directly supplied to the first spraying device to remove VOC pollutants, the first pipeline T1 directly provides 100% of the first liquid W1 to the first spraying device 30, the first The spray device 30 sprays the first liquid W1.

The experimental results of the experimental group are shown in Table 1: Table 1 100% of the first liquid is directly supplied to the liquid storage tank to remove VOC pollutants

The experimental results of the control group are shown in Table 2:

The results in Table 1 and Table 2 above show that 100% of the first liquid in Table 1 is directly supplied to the liquid storage tank to remove VOC pollutants with an average removal rate of 71.6%, while 100% of the first liquid in Table 2 is directly supplied. The average removal rate of the first spraying device to remove VOC pollutants is 90.9%. Therefore, under the same spraying amount of the first spraying device, because the concentration of existing pollutants in the first liquid W1 is relatively low, Therefore, a higher removal efficiency can be achieved.

Furthermore, if a plurality of process waste gas scrubbing devices are used in series before and after as an example (another embodiment and another embodiment of the present invention), in the experiment, only isopropyl acetone (IPA) is introduced as the main VOC pollutant in the environment. Therefore, the VOC in the water can be regarded as composed entirely of IPA. This experiment is to measure the VOC concentration of the first pipe T1 inlet and the first spraying device 30. In this experiment, the input water volume and the sprayed water volume are both 8.5 (Liter /min).

Control group: 50% of the first liquid W1 is supplied to the liquid storage tank to remove VOC pollutants, and the first pipe T1 directly supplies 50% of the first liquid W1 into the liquid storage tank 40 (containing the second liquid W2), the first spray device 30 sprays the third liquid W3 (which is formed by mixing the first liquid W1 with the second liquid W2).

Experimental group: 50% of the first liquid is supplied to the first spraying device to remove VOC pollutants, the first pipeline T1 directly provides 50% of the first liquid W1 to the first spraying device; A spray device 30 sprays 100% of the third liquid W3 (the third liquid W3 is formed by mixing 50% of the first liquid W1 with 50% of the second liquid W2).

The experimental results of the experimental group are shown in Table 3:

The experimental results of the control group are shown in Table 4:

The results in Table 3 and Table 4 above show that 50% of the first liquid in Table 3 is directly supplied to the liquid storage tank to remove VOC pollutants with an average removal rate of 41.6%, and 50% of the first liquid in Table 4 is supplied to the liquid storage tank. The average removal rate of the first spraying device to remove VOC pollutants is 68.2%. Therefore, with the same spraying amount of the first spraying device, a higher removal efficiency of the pollutant 101 can be achieved.

In the above-mentioned embodiment, the present invention is a process waste gas scrubbing device, which uses a first filter device to filter the gas, and passes through the first pipeline, the second pipeline, and the third pipeline. The liquid switching valve switches the provided first liquid or third liquid, so that the first spray device sprays the first liquid or the third liquid scrubbing gas, so that the pollutants in the gas are absorbed by the first liquid and or the third liquid, and more Further use the first pipeline, the second pipeline, and the third pipeline to switch the first liquid or/and the second liquid supply mode to improve the removal efficiency of pollutants in the air inlet channel, and continuously pass through the first liquid or the second liquid The pollutants in the scrubbing gas can also reduce the re-escaping of pollutants that have been dissolved in the liquid, effectively improving the efficiency of removing pollutants.

Therefore, the present invention is truly novel, progressive, and available for industrial use. It should meet the patent application requirements of my country's patent law. Undoubtedly, I filed an invention patent application in accordance with the law. I pray that the Bureau will grant the patent as soon as possible.

However, the above are only the preferred embodiments of the present invention, and are not used to limit the scope of implementation of the present invention. For example, the shapes, structures, features and spirits described in the scope of the patent application of the present invention are equally changed and modified. , Should be included in the scope of patent application of the present invention.

10: Cavity

100: gas

101: Pollutants

12: Air inlet

14: air outlet

20: The first filter device

22: shell

222: filter air inlet

224: Filter outlet

24: The first porous element

241: The first catalyst material

26: Ion adsorption element

28: second porous element

281: The second catalyst material

30: The first spraying device

40: Liquid storage tank

50: extraction device

70: Liquid switching valve

90: Drainage device

120: intake channel

200: Liquid transport pipeline

T1: The first pipeline

T3: third pipeline

Claims (8)

A process waste gas scrubbing device is arranged in a cavity. An air inlet and an air outlet are respectively provided on both sides of the cavity. The device includes: a first filter device arranged in the cavity and located in the cavity One side of the air inlet; a first spraying device, which is arranged in the cavity and located on the first filter device; a first pipeline, one end of which is connected to a first liquid switching valve, the first pipeline Is used to transport a first liquid into the first spraying device through a liquid transport pipeline, so that the first spraying device sprays the first liquid on the first filter device; and a second filter device, which is provided with the In the cavity, one end of a gas channel is connected to the first filter device, and the other end of the gas channel is connected to the second filter device. The gas channel is used to allow the gas to flow from the first filter device into the second filter device; wherein, Both ends of a third pipeline are respectively connected to the first filter device and the second filter device, and the first liquid switching valve is provided at both ends of the third pipeline, which is used to switch the first liquid and the first liquid. The second liquid is also used to mix the first liquid and the second liquid for washing. Both ends of an air inlet channel are respectively connected to the air inlet and one of the filtering air inlets of the first filter device. A gas passes through the inlet. The air port enters the air inlet channel, and the gas passes through the filtered air inlet of the first filter device and then enters the first filter device. Furthermore, the first liquid continuously enters the first filter device. One of the filter devices filters the air outlet and flows downward through the first filter device. After being washed by the first liquid, the gas flows out from the filter air outlet of the first filter device and is discharged to the first filter device through the air outlet. After the second filtering device, the cavity is discharged. The process waste gas washing device according to claim 1, wherein the first filter device includes a housing, a first porous element, and an ion adsorption element, and the first porous element is disposed in the housing and is located On one side of the filtering air inlet, a first catalyst material is arranged on the first porous element, and the ion adsorbing element is arranged between the first porous element and the filtering air outlet. The process waste gas scrubbing device according to claim 2, wherein the first filter device further includes a second porous element disposed between the ion adsorption element and the filtering air outlet, and the second porous element is disposed There is a second catalyst material. The process waste gas scrubbing device according to claim 3, wherein the material of the first porous element and the second porous element is stainless steel, titanium, platinum or aluminum, and further, the first catalyst material and the second The catalyst material is titanium dioxide, silicon oxide, aluminum oxide or platinum. The process exhaust gas washing device according to claim 1, further comprising a liquid storage tank, the liquid storage tank is arranged below the first filter device, and the air inlet channel is located between the liquid storage tank and the first filter device Furthermore, a drainage device is arranged under the liquid storage tank, and the drainage device is used for draining the first liquid. The process waste gas washing device according to claim 5 further includes an extraction device which is arranged between the first spray device and the liquid storage tank and is located on the liquid transportation pipeline. The process exhaust gas washing device according to claim 1, wherein the air inlet passage is provided on one side of the first filter device, and extends downward from the air inlet and communicates with the filtered air inlet. A process waste gas scrubbing device is arranged in a cavity. An air inlet and an air outlet are respectively provided on both sides of the cavity. The device includes: a first filter device arranged in the cavity and located in the cavity One side of the air inlet; a first spraying device, which is arranged in the cavity and located on the first filter device; a first pipeline, one end of which is connected to a first liquid switching valve, the first pipeline Is used to transport a first liquid into the first spraying device through a liquid transport pipeline, so that the first spraying device sprays the first liquid on the first filter device; and a second filter device, which is provided with the In the cavity, one end of a gas channel is connected to the first filter device, and the other end of the gas channel is connected to the second filter device. The gas channel is used to allow the gas to flow from the first filter device into the second filter device; wherein, The first filter device and the second filter device, the first filter device is provided with a first pipeline to provide the first liquid, and the first liquid first passes through the second A second spray device of the filter device is supplied to the second filter device and then flows into a liquid storage tank of the second filter device, and then is supplied to the first spray device through a third pipeline, and is supplied to the first filter device , Used for secondary washing, both ends of an air inlet channel are respectively connected to the air inlet and one of the filtering air inlets of the first filter device, a gas enters the air inlet channel through the air inlet, and the gas passes through One of the first filter devices filters the air inlet and then enters the first filter device. Furthermore, the first liquid continuously enters the filter outlet of the first filter device and flows downward through the first filter device. After being washed by the first liquid, it flows out from one of the filtering air outlets of the first filtering device, and is discharged to the second filtering device through the air outlet of the first filtering device, and then is discharged out of the cavity.

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