TWM636785U - Substrate carrier - Google Patents

Abstract

A substrate carrier includes a main body and a positioning unit. The main body has a body portion, a connecting portion extending from the body portion, and two carrying arms extending from the body portion at intervals. The positioning unit includes two first abutting surfaces, two second abutting surfaces and a vacuum suction cup. The first abutting surfaces are respectively located near the free ends of the carrying arms and are used for abutting against the edge of the circular substrate. The second supporting surfaces are respectively located near the free ends of the carrying arms and are used for abutting against one side of the square substrate. The vacuum suction cup is arranged on the body part and is used for absorbing the circular substrate or the square substrate.

Description

Substrate carrier

The present invention relates to a substrate carrier, in particular to a substrate carrier suitable for circular substrates and square substrates.

In the semiconductor manufacturing process, the substrate needs to be transferred between different workstations, and usually a robot is used to carry the moving substrate when transferring a single substrate.

Some substrates will be warped after some processing. In order to keep the substrate on the substrate carrier in a relative position to the substrate carrier during the moving process, there is currently a substrate carrier dedicated to carrying the warped circular substrate. However, existing substrate carriers for carrying circular substrates cannot carry square substrates because the square substrates cannot be positioned and tend to slide relative to the substrate carrier during movement. In a manufacturing process in which circular substrates and square substrates are shared, the substrate carrier that can only carry circular substrates cannot meet the usage requirements.

Therefore, one object of the present invention is to provide a substrate carrier suitable for transferring circular substrates and square substrates.

Therefore, in some embodiments, the substrate carrier of the present invention is suitable for connecting with a driving device to move a circular substrate or a square substrate, and the substrate carrier includes: a main body and a positioning unit. The main body has a body portion, a connecting portion extending from the body portion, and two carrying arms extending from the body portion at intervals. The carrying arms and the connecting portion are respectively located on opposite sides of the main body, and the carrying arms and the main body jointly define an escape space and jointly form a substrate placement area. The positioning unit includes two first abutting surfaces, two second abutting surfaces and a vacuum suction cup. The first abutting surfaces are respectively located near the free ends of the carrying arms and are used for abutting against the edge of the circular substrate. The second supporting surfaces are respectively located near the free ends of the carrying arms and are used for abutting against one side of the square substrate. The vacuum suction cup is arranged on the body part and located in the substrate placing area, and is used for absorbing the circular substrate or the square substrate located in the substrate placing area.

In some implementation aspects, the vacuum chuck is located close to the escape space.

In some implementation aspects, the positioning unit further includes a plurality of anti-slip pads, and the anti-slip pads are arranged on the main body and distributed in the substrate placement area.

In some embodiments, the positioning unit further includes two stoppers respectively provided on the carrying arms, each stopper is formed with the first bearing surface and the second bearing surface located on the same bearing arm. noodle.

In some embodiments, the positioning unit further includes two auxiliary positioning parts, the auxiliary positioning parts are arranged on the main body and between the vacuum chuck and the connecting part, and each auxiliary positioning part forms an auxiliary support The auxiliary abutting surfaces are used together with the first abutting surfaces for the edge of the circular substrate to abut against.

In some embodiments, each carrying arm has an opposite inner side facing the other carrying arm, the body portion has an arc-shaped inner edge connecting the opposite inner sides of the carrying arms, and the arc-shaped inner edge is connected to the carrying arms. The opposite inner sides of the arms jointly define the escape space, and the vacuum suction cup is close to the middle of the arc inner edge.

In some embodiments, each bearing arm has a relative inner side facing the other bearing arm, and a relative outer side opposite to the relative inner side, the first bearing surfaces are respectively close to the relative inner sides of the bearing arms, The second bearing surfaces are respectively close to opposite outer sides of the carrying arms.

The present invention has the following effects: through the cooperation of the first bearing surfaces and the second bearing surfaces with the vacuum chuck, it can be used when the circular substrate needs to be carried or the square substrate needs to be carried, so that The substrate carrier can meet the usage requirements in the common manufacturing process of circular substrates and square substrates.

Referring to FIGS. 1 and 2, an embodiment of the novel substrate carrier 100 is suitable for connecting a driving device (not shown) to move a circular substrate S1 (see FIG. 3) or a square substrate S2 (see FIG. 4 ), the substrate carrier 100 includes a main body 1 and a positioning unit 2 .

The main body 1 has a body portion 11 , a connecting portion 12 extending from the body portion 11 , and two bearing arms 13 extending from the body portion 11 spaced apart from each other. The carrying arms 13 and the connecting portion 12 are respectively located on opposite sides of the main body portion 11. Specifically, the extending direction of the carrying arms 13 extending from the main body portion 11 is the same as the extending direction of the connecting portion 12 extending from the main body portion 11. extend in the opposite direction. The carrying arms 13 and the main body 11 jointly define a shelter space 14 and jointly form a substrate placement area 15 . Each bearing arm 13 has a relative inner side 131 facing the other bearing arm 13 , a relative outer side 132 opposite to the relative inner side 131 , and a free end 133 away from the main body 11 . In this embodiment, the body portion 11 has an arc-shaped inner edge 111 connecting the opposite inner sides 131 of the carrying arms 13 , the arc-shaped inner edge 111 and the opposite inner sides 131 of the carrying arms 13 jointly define the escape space 14 . The avoidance space 14 is used for subsequent devices receiving the circular substrate S1 or the square substrate S2 to pass through. The connecting portion 12 is used for connecting the driving device.

The positioning unit 2 includes two stoppers 21 , a vacuum chuck 22 , two auxiliary positioning members 23 and a plurality of anti-slip pads 24 .

The stoppers 21 are respectively disposed near the free ends 133 of the carrying arms 13 . Each stopper 21 forms a first bearing surface 211 and a second bearing surface 212 . The first abutting surfaces 211 of the stoppers 21 are respectively close to the opposite inner sides 131 of the carrying arms 13 and are inclined relative to each other for abutting against the edge of the circular substrate S1 (see FIG. 3 ). The second abutting surfaces 212 of the stoppers 21 are respectively adjacent to the opposite outer sides 132 of the carrying arms 13 and arranged along a straight line for abutting against one side of the square substrate S2. The second abutting surfaces 212 are preferably coplanar, but it is sufficient as long as at least a part of the second abutting surfaces 212 can jointly support one side of the square substrate S2.

The vacuum chuck 22 is disposed on the main body 11 and located in the substrate placement area 15 for sucking the circular substrate S1 or the square substrate S2 located in the substrate placement area 15 . In this embodiment, the main body 1 is provided with an air channel 16 connected to the vacuum chuck 22 for vacuuming. The vacuum chuck 22 cooperates with the first abutting surface 211 or the second abutting surface 212 of the stoppers 21 to keep the circular substrate S1 or the square substrate S2 on the main body 1 without facing the The main body 1 moves, especially for warped substrates. The first abutting surfaces 211 can prevent the circular substrate S1 from rotating and deflecting to damage the vacuum suction force of the vacuum chuck 22 . Likewise, the second abutting surfaces 212 can prevent the square substrate S2 from rotating and deflecting to damage the vacuum suction force of the vacuum chuck 22 . In addition, the vacuum chuck 22 also has the function of detecting whether the substrate is placed in the correct position. In this embodiment, the vacuum chuck 22 is located close to the avoidance space 14, specifically near the middle of the arc-shaped inner edge 111, so as to ensure that both the circular substrate S1 and the square substrate S2 can be positioned on the vacuum chuck 22. superior.

The auxiliary positioning members 23 are disposed on the main body 1 and interposed between the vacuum chuck 22 and the connecting portion 12 . Each auxiliary positioning member 23 forms an auxiliary bearing surface 231 . The auxiliary abutting surfaces 231 are used together with the first abutting surfaces 211 for abutting against the edge of the circular substrate S1 (see FIG. 3 ). When the area of the circular substrate S1 to be carried is large, the positioning effect of the circular substrate S1 can be enhanced by the auxiliary bearing surfaces 231 .

The anti-slip pads 24 are arranged on the main body 1 and distributed in the substrate placement area 15, which can prevent the substrate from sliding and enhance the positioning effect on the substrate.

To sum up, by cooperating the first bearing surfaces 211 and the second bearing surfaces 212 with the vacuum chuck 22, it is possible to carry the circular substrate S1 or the square substrate S2 at any time. It can be used so that the substrate carrier 100 can meet the usage requirements in the common manufacturing process of the circular substrate S1 and the square substrate S2.

But the above-mentioned ones are only embodiments of the present invention, and should not limit the scope of implementation of the present invention with this. All simple equivalent changes and modifications made according to the patent scope of the present application and the content of the patent specification are still within the scope of the present invention. Within the scope covered by this patent.

100: substrate carrier 1: subject 11: Main body 111: Arc inner edge 12: Connecting part 13: Carrying arm 131: relatively inner 132: Relatively outside 133: free end 14: Avoid space 15: Substrate placement area 16: Gas channel 2: Positioning unit 21: stopper 211: the first bearing surface 212: Second bearing surface 22: Vacuum suction cup 23: Auxiliary positioning parts 231: Auxiliary bearing surface 24: Non-slip pad S1: Round substrate S2: Square substrate

Other features and functions of the present invention will be clearly presented in the implementation manner with reference to the drawings, wherein: Fig. 1 is a perspective view of an embodiment of the novel substrate carrier; Fig. 2 is a top view of this embodiment; Fig. 3 is a plan view of this embodiment carrying a circular substrate; and FIG. 4 is a top view of the embodiment carrying a square substrate.

100: substrate carrier

1: subject

11: Main body

111: Arc inner edge

12: Connecting part

13: Carrying arm

131: relatively inner

132: Relatively outside

133: free end

14: Avoid space

15: Substrate placement area

16: Gas channel

2: Positioning unit

21: stopper

211: the first bearing surface

212: Second bearing surface

22: Vacuum suction cup

23: Auxiliary positioning parts

231: Auxiliary bearing surface

24: Non-slip pad

Claims (7)

A substrate carrier suitable for connecting a drive device to move a circular substrate or a square substrate, the substrate carrier comprising: A main body has a body portion, a connecting portion extending from the body portion, and two carrying arms extending from the body portion spaced apart from each other, and the carrying arms and the connecting portion are respectively located on opposite sides of the body portion side, and the carrying arms and the main body jointly define an escape space and jointly form a substrate placement area; and A positioning unit, including two first abutting surfaces, two second abutting surfaces and a vacuum suction cup, the first abutting surfaces are respectively located near the free ends of the carrying arms and are used for the circular substrate The edge of the square substrate abuts against, the second abutting surfaces are respectively located at the free ends of the carrying arms and are used for abutting against one side of the square substrate, the vacuum chuck is arranged on the main body and is located in the substrate placement area , for absorbing the circular substrate or the square substrate located in the substrate placement area. The substrate carrier as claimed in claim 1, wherein the vacuum chuck is located close to the avoidance space. The substrate carrier according to claim 1, wherein the positioning unit further includes a plurality of anti-slip pads, and the anti-slip pads are arranged on the main body and distributed in the substrate placement area. The substrate carrier according to claim 1, wherein the positioning unit further includes two stoppers respectively arranged on the carrying arms, each stopper is formed with the first bearing surface and the second bearing surface noodle. The substrate carrier according to claim 1, wherein the positioning unit further includes two auxiliary positioning parts, the auxiliary positioning parts are arranged on the main body and between the vacuum chuck and the connecting part, each auxiliary positioning part An auxiliary abutting surface is formed, and the auxiliary abutting surfaces are used together with the first abutting surfaces for the edge of the circular substrate to abut against. The substrate carrier as claimed in claim 1, wherein each carrier arm has an opposite inner side facing the other carrier arm, the body portion has an arc-shaped inner edge connecting the opposite inner sides of the carrier arms, and the arc-shaped inner side The edge and the opposite inner sides of the carrying arms jointly define the avoidance space, and the vacuum suction cup is close to the middle of the arc inner edge. The substrate carrier according to claim 1, wherein each carrier arm has a relative inner side facing the other carrier arm, and a relative outer side opposite to the relative inner side, and the first bearing surfaces are respectively adjacent to the carrier arms On the opposite inner side of the arms, the second bearing surfaces are respectively close to the opposite outer sides of the carrying arms.

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