TWM636617U - Gas sensor packaging structure - Google Patents

Gas sensor packaging structure Download PDF

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TWM636617U
TWM636617U TW111211054U TW111211054U TWM636617U TW M636617 U TWM636617 U TW M636617U TW 111211054 U TW111211054 U TW 111211054U TW 111211054 U TW111211054 U TW 111211054U TW M636617 U TWM636617 U TW M636617U
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sensing chip
cover
cavity
substrate
gas sensor
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TW111211054U
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Chinese (zh)
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謝文樂
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謝文樂
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Abstract

一種氣體感測器封裝構造,包含:一基板,與一蓋體共同形成一腔體,該蓋體具有至少一通孔,該至少一通孔與該腔體相互連通,該蓋體為採用模具成型製成;至少一感測晶片,位於該腔體內部,且設置於該基板上方,所述感測晶片用以感測該腔體內部的至少一氣體;及一保護膜,其在該蓋體成型時嵌設於該蓋體內,使該保護膜頂面與該蓋體下表面相互接合,並與該至少一通孔軸向重疊,該保護膜用以可選擇性地允許外界部分氣體經由所述通孔進入該腔體內部。A gas sensor packaging structure, comprising: a substrate, together with a cover to form a cavity, the cover has at least one through hole, the at least one through hole communicates with the cavity, and the cover is made by molding At least one sensing chip is located inside the cavity and disposed above the substrate, the sensing chip is used to sense at least one gas inside the cavity; and a protective film is molded on the cover When embedded in the cover body, the top surface of the protective film and the lower surface of the cover body are joined together and axially overlapped with the at least one through hole. The protective film is used to selectively allow part of the outside gas to pass through the through hole. A hole enters the interior of the cavity.

Description

氣體感測器封裝構造(一)Gas sensor packaging structure (1)

本創作主要為一種氣體感測器封裝構造,特別是有關於一種有效防止保護膜脫落的氣體感測器封裝構造。The invention mainly relates to a gas sensor packaging structure, in particular to a gas sensor packaging structure that can effectively prevent the protective film from falling off.

請參照圖1,其係一種習知的氣體感測器封裝體9,該習知的氣體感測器封裝體9具有一基板91、一蓋體92、一保護膜93、數個焊點94及至少一感測晶片95,其中,該基板91為一線路載板。該蓋體92設置於該基板91上方,且與該基板91共同形成一腔體96,該蓋體92具有連通該腔體96的一通孔97。該保護膜93設置於該蓋體92上方,且可以選擇性地允許外界氣體經由該通孔97進入該腔體96內。該數個焊點94設置於該基板91且位於該腔體96內。所述感測晶片95堆疊於該基板91上,且透過導線98電性連接於該數個焊點94。Please refer to FIG. 1, which is a conventional gas sensor package 9, which has a substrate 91, a cover 92, a protective film 93, and several solder joints 94. And at least one sensing chip 95, wherein the substrate 91 is a circuit carrier. The cover 92 is disposed above the substrate 91 and forms a cavity 96 together with the substrate 91 . The cover 92 has a through hole 97 communicating with the cavity 96 . The protection film 93 is disposed above the cover 92 and can selectively allow outside air to enter the cavity 96 through the through hole 97 . The solder joints 94 are disposed on the substrate 91 and located in the cavity 96 . The sensing chip 95 is stacked on the substrate 91 and electrically connected to the plurality of welding points 94 through wires 98 .

上述習知的氣體感測器封裝體9,該保護膜93與該蓋體92之間係具有一黏著層99,該黏著層99為膠水等黏合劑。然而,該黏著層99會隨著時間的變化而漸漸失去黏性,導致該保護膜93與該蓋體92脫離,進而使原先不被允許的外界氣體全部進入該腔體96,使影響所述感測晶片95的準確性,具有感測準確率不佳的問題。In the above-mentioned conventional gas sensor package 9 , there is an adhesive layer 99 between the protective film 93 and the cover 92 , and the adhesive layer 99 is an adhesive such as glue. However, the adhesive layer 99 will gradually lose its viscosity as time changes, causing the protective film 93 to break away from the cover 92, and then all the outside air that was not allowed to enter the cavity 96, affecting the described The accuracy of sensing the wafer 95 has a problem of poor sensing accuracy.

有鑑於此,有必要提供一種氣體感測器封裝構造,以解決上述之問題。In view of this, it is necessary to provide a gas sensor packaging structure to solve the above problems.

本創作的目的在於提供一種氣體感測器封裝構造,係可以有效防止保護膜脫落。The purpose of this invention is to provide a gas sensor packaging structure, which can effectively prevent the protective film from falling off.

為達成上述目的,本創作提供一種氣體感測器封裝構造,包含:一基板;一蓋體,結合於該基板上,該蓋體與該基板共同形成一腔體,該蓋體具有一上表面及一下表面,以及貫通該上表面及該下表面的至少一通孔,該至少一通孔與該腔體相互連通,該蓋體為採用模具成型製成;至少一感測晶片,位於該腔體內部,且設置於該基板上方,所述感測晶片用以感測該腔體內部的至少一氣體;及一保護膜,其在該蓋體成型時嵌設於該蓋體內,使該保護膜之一頂面與該蓋體的下表面相互接合,並與該至少一通孔軸向重疊,該保護膜用以可選擇性地允許外界部分氣體經由所述通孔進入該腔體內部。In order to achieve the above purpose, the invention provides a gas sensor packaging structure, including: a substrate; a cover, combined on the substrate, the cover and the substrate together form a cavity, the cover has an upper surface And the lower surface, and at least one through hole passing through the upper surface and the lower surface, the at least one through hole communicates with the cavity, the cover is made by molding; at least one sensing chip is located inside the cavity , and arranged above the substrate, the sensing chip is used to sense at least one gas inside the cavity; and a protective film, which is embedded in the cover when the cover is formed, so that the protective film A top surface is jointed with the lower surface of the cover and axially overlaps with the at least one through hole, and the protective film is used to selectively allow some gas from the outside to enter the cavity through the through hole.

在一些實施例中,該蓋體具有一頂壁,以及連接該頂壁的一環周壁,該蓋體以該環周壁結合於該基板,使該頂壁、該環周壁與該基板共同形成該腔體,該頂壁具有該上表面及該下表面,以及貫通該上表面及該下表面的該至少一通孔。In some embodiments, the cover has a top wall and a peripheral wall connected to the top wall, the cover is combined with the substrate by the peripheral wall, so that the top wall, the peripheral wall and the substrate jointly form the cavity body, the top wall has the upper surface and the lower surface, and the at least one through hole passing through the upper surface and the lower surface.

在一些實施例中,該環周壁的其中至少一側設有一凹槽,該保護膜具有一本體部,以及連接該本體部的至少一延伸部,該本體部的該頂面與該蓋體的下表面相互接合,並與該至少一通孔軸向重疊,該延伸部穿伸結合於該凹槽。In some embodiments, at least one side of the circumferential wall is provided with a groove, the protective film has a body portion, and at least one extension portion connected to the body portion, the top surface of the body portion and the cover body The lower surfaces engage with each other and axially overlap with the at least one through hole, and the extension part is stretched and combined with the groove.

在一些實施例中,該基板上表面設置至少一第一焊點,所述感測晶片具有至少一第二焊點,所述第二焊點以一導線電性連接所述第一焊點。In some embodiments, at least one first soldering point is disposed on the upper surface of the substrate, the sensing chip has at least one second soldering point, and the second soldering point is electrically connected to the first soldering point by a wire.

在一些實施例中,該導線為金、銀或銅電導率較高的金屬導線。In some embodiments, the wire is a metal wire with high conductivity such as gold, silver or copper.

在一些實施例中,該保護膜為一四氟乙烯膜。In some embodiments, the protective film is a tetrafluoroethylene film.

在一些實施例中,所述感測晶片包含一硫化氫感測晶片、一一氧化碳感測晶片、一二氧化碳感測晶片、一可燃性氣體感測晶片、一揮發性有機氣體感測晶片、一二氧化氮感測晶片、一氨氣感測晶片及一二氧化氯感測晶片中的至少一個。In some embodiments, the sensing chip includes a hydrogen sulfide sensing chip, a carbon monoxide sensing chip, a carbon dioxide sensing chip, a combustible gas sensing chip, a volatile organic gas sensing chip, a two At least one of a nitrogen oxide sensing chip, an ammonia sensing chip and a chlorine dioxide sensing chip.

本創作的氣體感測器封裝構造具有下列特點:係可以藉由將該保護膜在該蓋體成型時嵌設於該蓋體內,使該保護膜之一頂面與該蓋體的下表面相互接合,以防止保護膜脫落;再者,由於該保護膜設置於該蓋體內部,因此,在該氣體感測器封裝構造的整體軸向高度上,與習知的氣體感測器封裝體相同時,本創作之腔體空間具有較大的空間,亦可以容納更多層的感測晶片。如此,本創作的氣體感測器封裝構造,可以達到穩定感測晶片準確性及提升良率等功效。The gas sensor packaging structure of the present invention has the following characteristics: by embedding the protective film in the cover when the cover is molded, one of the top surfaces of the protective film and the lower surface of the cover can be mutually to prevent the protective film from falling off; moreover, since the protective film is arranged inside the cover, the overall axial height of the gas sensor package structure is the same as that of the conventional gas sensor package At the same time, the cavity space of the present invention has a larger space and can also accommodate more layers of sensing chips. In this way, the gas sensor packaging structure of the present invention can achieve the functions of stabilizing the accuracy of the sensing chip and improving the yield rate.

茲配合圖式將本創作實施例詳細說明如下,其所附圖式主要為簡化之示意圖,僅以示意方式說明本創作之基本結構,因此在該等圖式中僅標示與本創作有關之元件,且所顯示之元件並非以實施時之數目、形狀、尺寸比例等加以繪製,其實際實施時之規格尺寸實為一種選擇性之設計,且其元件佈局形態有可能更為複雜。The embodiment of this creation is described in detail as follows in conjunction with the drawings. The accompanying drawings are mainly simplified schematic diagrams, which only illustrate the basic structure of this creation in a schematic way. Therefore, only components related to this creation are marked in these drawings. , and the displayed components are not drawn according to the number, shape, size ratio, etc. of the actual implementation. The actual size of the actual implementation is a selective design, and the layout of the components may be more complicated.

以下各實施例的說明是參考附加的圖式,用以例示本創作可據以實施的特定實施例。本創作所提到的方向用語,例如「上」、「下」、「前」、「後」等,僅是參考附加圖式的方向。因此,使用的方向用語是用以說明及理解本申請,而非用以限制本申請。另外,在說明書中,除非明確地描述為相反的,否則詞語“包含”將被理解為意指包含所述元件,但是不排除任何其它元件。The following descriptions of various embodiments refer to the accompanying drawings to illustrate specific embodiments in which the invention may be practiced. The directional terms mentioned in this creation, such as "upper", "lower", "front", "back", etc., are only referring to the directions of the attached drawings. Therefore, the directional terms used are used to illustrate and understand the application, but not to limit the application. Also, in the specification, unless it is clearly described to the contrary, the word "comprising" will be understood as meaning including the stated elements, but not excluding any other elements.

請參照圖2所示,其係本創作氣體感測器封裝構造的一較佳實施例,係包含:一基板1、一蓋體2、至少一感測晶片3及一保護膜4,該蓋體2及該至少一感測晶片3分別結合於該基板1,該保護膜4設置於該蓋體2。Please refer to Fig. 2, which is a preferred embodiment of the gas sensor packaging structure of the present invention, and includes: a substrate 1, a cover 2, at least one sensing chip 3 and a protective film 4, the cover The body 2 and the at least one sensing chip 3 are respectively bonded to the substrate 1 , and the protective film 4 is disposed on the cover 2 .

在本實施例中,該基板1可以為一印刷電路板或一柔性電路板,該基板1上表面設置至少一第一焊點11。所述第一焊點11與該基板1上的電子組件電性連接。In this embodiment, the substrate 1 may be a printed circuit board or a flexible circuit board, and at least one first soldering point 11 is provided on the upper surface of the substrate 1 . The first solder joint 11 is electrically connected to the electronic components on the substrate 1 .

該蓋體2結合於該基板1上,該蓋體2與該基板1共同形成一腔體C。該蓋體2具有一上表面21及一下表面22,以及貫通該上表面21及該下表面22的至少一通孔23,該至少一通孔23與該腔體C相互連通。在本實施例中,該蓋體2為採用模具成型製成,所述通孔23可以為一圓形或一橢圓形等態樣。The cover 2 is combined with the substrate 1 , and the cover 2 and the substrate 1 form a cavity C together. The cover 2 has an upper surface 21 and a lower surface 22 , and at least one through hole 23 passing through the upper surface 21 and the lower surface 22 , and the at least one through hole 23 communicates with the cavity C. In this embodiment, the cover body 2 is formed by molding, and the through hole 23 may be in the form of a circle or an ellipse.

具體而言,該蓋體2具有一頂壁2a,以及連接該頂壁2a的一環周壁2b,該蓋體2以該環周壁2b結合於該基板1,使該頂壁2a、該環周壁2b與該基板1共同形成該腔體C。該頂壁2a具有該上表面21及該下表面22,以及貫通該上表面21及該下表面22的該至少一通孔23。Specifically, the cover 2 has a top wall 2a, and a peripheral wall 2b connected to the top wall 2a, the cover 2 is combined with the substrate 1 by the peripheral wall 2b, so that the top wall 2a, the peripheral wall 2b The cavity C is formed together with the substrate 1 . The top wall 2 a has the upper surface 21 and the lower surface 22 , and the at least one through hole 23 passing through the upper surface 21 and the lower surface 22 .

該至少一感測晶片3位於該腔體C內部,且設置於該基板1上方。所述感測晶片3用以感測該腔體C內部的至少一氣體,在本實施例中,所述感測晶片3可以被選擇地使用,例如可以為包含一硫化氫感測晶片、一一氧化碳感測晶片、一二氧化碳感測晶片、一可燃性氣體感測晶片、一揮發性有機氣體感測晶片、一二氧化氮感測晶片、一氨氣感測晶片及一二氧化氯感測晶片中的至少一個,並分別用以感測硫化氫、一氧化碳、二氧化碳、可燃性氣體、揮發性有機氣體、二氧化氮、氨氣與二氧化氯等氣體。所述感測晶片3具有至少一第二焊點31,所述第二焊點31以一導線32電性連接所述第一焊點11,舉例而言,該導線32可為金、銀或銅等電導率較高的金屬導線。其中,當所述感測晶片3的數量為複數個時,該數個感測晶片3為相互堆疊,且透過環氧樹脂(Epoxy)或其他具有黏性的高分子材料黏合於該基板1上方。The at least one sensing chip 3 is located inside the cavity C and disposed above the substrate 1 . The sensing chip 3 is used to sense at least one gas inside the cavity C. In this embodiment, the sensing chip 3 can be used selectively, for example, it can include a hydrogen sulfide sensing chip, a Carbon monoxide sensing chip, a carbon dioxide sensing chip, a combustible gas sensing chip, a volatile organic gas sensing chip, a nitrogen dioxide sensing chip, an ammonia sensing chip and a chlorine dioxide sensing chip At least one of them is used to sense hydrogen sulfide, carbon monoxide, carbon dioxide, combustible gas, volatile organic gas, nitrogen dioxide, ammonia gas, chlorine dioxide and other gases. The sensing chip 3 has at least one second soldering point 31, the second soldering point 31 is electrically connected to the first soldering point 11 by a wire 32, for example, the wire 32 can be gold, silver or Metal wires with high electrical conductivity such as copper. Wherein, when the number of the sensing chips 3 is plural, the sensing chips 3 are stacked on each other, and bonded on the substrate 1 through epoxy resin (Epoxy) or other viscous polymer materials. .

該保護膜4在該蓋體2成型時嵌設於該蓋體2內,使該保護膜4之一頂面41與該蓋體2的下表面22相互接合,並與該至少一通孔23軸向重疊。該保護膜4用以可選擇性地允許外界部分氣體經由所述通孔23進入該腔體C內部。在本實施例中,該保護膜4為一四氟乙烯(PTFE)膜。The protective film 4 is embedded in the cover body 2 when the cover body 2 is molded, so that a top surface 41 of the protective film 4 is joined to the lower surface 22 of the cover body 2, and is axially connected with the at least one through hole 23. to overlap. The protection film 4 is used to selectively allow part of the outside gas to enter the cavity C through the through hole 23 . In this embodiment, the protection film 4 is a tetrafluoroethylene (PTFE) film.

請參照圖3所示,在另一實施例中,該蓋體2呈矩形狀,該蓋體2的該環周壁2b的其中至少一側設有一凹槽24。該保護膜4具有一本體部4a,以及連接該本體部4a的至少一延伸部4b,該本體部4a的該頂面41與該蓋體2的下表面22相互接合,並與該至少一通孔23軸向重疊。該延伸部4b穿伸結合於該凹槽24。Please refer to FIG. 3 , in another embodiment, the cover body 2 is rectangular, and at least one side of the peripheral wall 2 b of the cover body 2 is provided with a groove 24 . The protective film 4 has a body portion 4a, and at least one extension portion 4b connected to the body portion 4a, the top surface 41 of the body portion 4a is engaged with the lower surface 22 of the cover body 2, and is connected to the at least one through hole. 23 Axial overlap. The extension portion 4 b is stretched and combined with the groove 24 .

承上所述,本創作的氣體感測器封裝構造,係可以藉由將該保護膜在該蓋體成型時嵌設於該蓋體內,使該保護膜之一頂面與該蓋體的下表面相互接合,以防止保護膜脫落;再者,由於該保護膜設置於該蓋體內部,因此,在該氣體感測器封裝構造的整體軸向高度上,與習知的氣體感測器封裝體相同時,本創作之腔體空間具有較大的空間,亦可以容納更多層的感測晶片。如此,本創作的氣體感測器封裝構造,可以達到穩定感測晶片準確性及提升良率等功效。Based on the above, the packaging structure of the gas sensor of the present invention can be embedded in the cover body when the cover body is molded, so that one of the top surfaces of the protection film and the lower surface of the cover body The surfaces are mutually bonded to prevent the protective film from falling off; moreover, since the protective film is arranged inside the cover, the overall axial height of the gas sensor package structure is different from that of the conventional gas sensor package. At the same time, the cavity space of this invention has a larger space and can accommodate more layers of sensing chips. In this way, the gas sensor packaging structure of the present invention can achieve the functions of stabilizing the accuracy of the sensing chip and improving the yield rate.

上述揭示的實施形態僅例示性說明本創作之原理、特點及其功效,並非用以限制本創作之可實施範疇,任何熟習此項技藝之人士均可在不違背本創作之精神及範疇下,對上述實施形態進行修飾與改變。任何運用本創作所揭示內容而完成之等效改變及修飾,均仍應為下述之申請專利範圍所涵蓋。The embodiments disclosed above are only illustrative of the principles, characteristics and effects of this creation, and are not intended to limit the scope of implementation of this creation. Anyone who is familiar with this technology can do so without violating the spirit and scope of this creation. Modifications and changes are made to the above-mentioned embodiments. Any equivalent changes and modifications accomplished by utilizing the content disclosed in this creation shall still be covered by the scope of the following patent application.

﹝本創作﹞ 1:基板 11:第一焊點 2:蓋體 2a:頂壁 2b:環周壁 21:上表面 22:下表面 23:通孔 24:凹槽 3:感測晶片 31:第二焊點 32:導線 4:保護膜 4a:本體部 4b:延伸部 41:頂面 C:腔體 ﹝習用﹞ 9:氣體感測器封裝體 91:基板 92:蓋體 93:保護膜 94:焊點 95:感測晶片 96:腔體 97:通孔 98:導線 99:黏著層 ﹝This creation﹞ 1: Substrate 11: The first solder joint 2: cover body 2a: top wall 2b: Circumferential wall 21: upper surface 22: lower surface 23: Through hole 24: Groove 3: Sensing chip 31: The second solder joint 32: wire 4: Protective film 4a: Body part 4b: Extension 41: top surface C: Cavity ﹝used to use﹞ 9: Gas sensor package 91: Substrate 92: cover body 93: Protective film 94: solder joints 95: Sensing chip 96: Cavity 97: Through hole 98: wire 99: Adhesive layer

[圖1]為一種習知氣體感測器封裝體的剖視圖; [圖2]為本創作一實施例之氣體感測器封裝構造的剖視圖; [圖3]為本創作另一實施例之氣體感測器封裝構造的剖視圖。 [FIG. 1] is a cross-sectional view of a conventional gas sensor package; [Fig. 2] is a cross-sectional view of a gas sensor package structure according to an embodiment of the invention; [ Fig. 3 ] is a cross-sectional view of a package structure of a gas sensor according to another embodiment of the present invention.

1:基板 1: Substrate

11:第一焊點 11: The first solder joint

2:蓋體 2: cover body

2a:頂壁 2a: top wall

2b:環周壁 2b: Circumferential wall

21:上表面 21: upper surface

22:下表面 22: lower surface

23:通孔 23: Through hole

3:感測晶片 3: Sensing chip

31:第二焊點 31: The second solder joint

32:導線 32: wire

4:保護膜 4: Protective film

41:頂面 41: top surface

C:腔體 C: Cavity

Claims (7)

一種氣體感測器封裝構造,包含: 一基板; 一蓋體,結合於該基板上,該蓋體與該基板共同形成一腔體,該蓋體具有一上表面及一下表面,以及貫通該上表面及該下表面的至少一通孔,該至少一通孔與該腔體相互連通,該蓋體為採用模具成型製成; 至少一感測晶片,位於該腔體內部,且設置於該基板上方,所述感測晶片用以感測該腔體內部的至少一氣體;及 一保護膜,其在該蓋體成型時嵌設於該蓋體內,使該保護膜之一頂面與該蓋體的下表面相互接合,並與該至少一通孔軸向重疊,該保護膜用以可選擇性地允許外界部分氣體經由所述通孔進入該腔體內部。 A gas sensor packaging structure, comprising: a substrate; A cover, combined on the substrate, the cover and the substrate jointly form a cavity, the cover has an upper surface and a lower surface, and at least one through hole passing through the upper surface and the lower surface, the at least one through hole The hole communicates with the cavity, and the cover is formed by molding; At least one sensing chip is located inside the cavity and disposed above the substrate, the sensing chip is used for sensing at least one gas inside the cavity; and A protective film, which is embedded in the cover when the cover is formed, such that one of the top surfaces of the protective film and the lower surface of the cover are joined to each other and axially overlap the at least one through hole. Part of the gas from the outside can be selectively allowed to enter the cavity through the through hole. 如請求項1所述之氣體感測器封裝構造,其中,該蓋體具有一頂壁,以及連接該頂壁的一環周壁,該蓋體以該環周壁結合於該基板,使該頂壁、該環周壁與該基板共同形成該腔體,該頂壁具有該上表面及該下表面,以及貫通該上表面及該下表面的該至少一通孔。The gas sensor packaging structure according to claim 1, wherein the cover body has a top wall and a peripheral wall connected to the top wall, and the cover body is combined with the substrate by the peripheral wall, so that the top wall, The circumferential wall and the base plate jointly form the cavity, the top wall has the upper surface and the lower surface, and the at least one through hole passing through the upper surface and the lower surface. 如請求項2所述之氣體感測器封裝構造,其中,該環周壁的其中至少一側設有一凹槽,該保護膜具有一本體部,以及連接該本體部的至少一延伸部,該本體部的該頂面與該蓋體的下表面相互接合,並與該至少一通孔軸向重疊,該延伸部穿伸結合於該凹槽。The gas sensor packaging structure according to claim 2, wherein at least one side of the circumferential wall is provided with a groove, the protective film has a body part and at least one extension part connected to the body part, the body The top surface of the part is engaged with the lower surface of the cover body and axially overlaps with the at least one through hole, and the extension part is stretched and combined with the groove. 如請求項1所述之氣體感測器封裝構造,其中,該基板上表面設置至少一第一焊點,所述感測晶片具有至少一第二焊點,所述第二焊點以一導線電性連接所述第一焊點。The gas sensor package structure according to claim 1, wherein at least one first solder joint is provided on the upper surface of the substrate, the sensing chip has at least one second solder joint, and the second solder joint is connected with a wire electrically connected to the first welding spot. 如請求項4所述之氣體感測器封裝構造,其中,該導線為金、銀或銅電導率較高的金屬導線。The package structure of the gas sensor according to claim 4, wherein the wire is a metal wire with high conductivity such as gold, silver or copper. 如請求項1所述之氣體感測器封裝構造,其中,該保護膜為一四氟乙烯膜。The gas sensor package structure as claimed in claim 1, wherein the protective film is a tetrafluoroethylene film. 如請求項1所述之氣體感測器封裝構造,其中,所述感測晶片包含一硫化氫感測晶片、一一氧化碳感測晶片、一二氧化碳感測晶片、一可燃性氣體感測晶片、一揮發性有機氣體感測晶片、一二氧化氮感測晶片、一氨氣感測晶片及一二氧化氯感測晶片中的至少一個。The gas sensor package structure according to claim 1, wherein the sensing chip includes a hydrogen sulfide sensing chip, a carbon monoxide sensing chip, a carbon dioxide sensing chip, a combustible gas sensing chip, a At least one of the volatile organic gas sensing chip, a nitrogen dioxide sensing chip, an ammonia sensing chip and a chlorine dioxide sensing chip.
TW111211054U 2022-10-11 2022-10-11 Gas sensor packaging structure TWM636617U (en)

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