TWM635888U - Wide area atmospheric pressure plasma device - Google Patents

Abstract

A wide area atmospheric pressure plasma device includes a metal casing, a metal electrode, and a dielectric layer. The metal casing includes a chamber, at least one gas channel, and a plasma jet channel, in which the plasma jet channel is located under the chamber. The metal electrode is disposed within the chamber, is adjacent to the plasma jet channel, and extends along a length direction of the plasma jet channel. An outlet of the gas channel is adjacent to a bottom of the metal electrode, such that a working gas in the gas channel is sprayed towards the bottom of the metal electrode. The dielectric layer wraps the metal electrode.

Description

Wide Atmospheric Plasma Device

The present disclosure relates to an atmospheric plasma technology, and in particular to a wide-format atmospheric plasma device.

Atmospheric plasma is plasma produced at or near atmospheric pressure. Since the atmospheric plasma system has no vacuum equipment, the workpiece can be processed continuously. Therefore, compared with the vacuum plasma system, the atmospheric plasma system has advantages in terms of equipment and process costs.

According to the different forms of plasma, atmospheric plasma can be roughly divided into corona discharge, dielectric barrier discharge (DBD), plasma jet (Plasma jet), and plasma torch (Plasma torch), etc. . In order to obtain large-area plasma treatment efficiency, dielectric discharge technology is often used. Although this technology can achieve the effect of large-area plasma treatment, there are problems such as weak energy, which leads to a slowdown of the process rate and device discharge.

Therefore, an object of the present disclosure is to provide a wide-format atmospheric plasma device, the metal shell of which is pierced with a gas channel, so as to guide the working gas directly to the bottom of the metal electrode adjacent to the plasma injection channel. In this way, the working gas can be dissociated to form plasma near the plasma injection channel, thus avoiding the formation of plasma in the cavity of the metal shell, avoiding unnecessary waste of power, and making the plasma more concentrated and more efficient. Close to the workpiece to be treated, which can improve the effect of plasma treatment.

Another object of the present disclosure is to provide a wide-format atmospheric plasma device, which can use a sealing ring to surround the outer side of the dielectric layer to seal the cavity of the metal casing, so that the plasma can be more effectively avoided. formed in the chamber.

Another object of the present disclosure is to provide a wide-format atmospheric plasma device, the outlet section of the gas passage includes a reduced portion with a smaller radial dimension adjacent to the outlet. In this way, the gas can be compressed at the shrinking part first, and then expanded at the outlet, so that the pressure at the outlet can be slightly lower than the atmospheric pressure, which is favorable for the discharge to dissociate the working gas into plasma.

Another object of the present disclosure is to provide a wide-width atmospheric plasma device, the outlet end of the gas channel is an inclined surface or a concave arc facing the dielectric layer, so that the area of the outlet end closer to the dielectric layer can be increased , is conducive to discharge.

According to the above purpose of the present disclosure, a wide-format atmospheric plasma device is proposed. The wide-format atmospheric plasma device includes a metal casing, metal electrodes, and a dielectric layer. The metal casing includes a chamber, at least one gas passage, and electrical The plasma injection channel is located under the chamber. The metal electrode is arranged in the chamber, adjacent to the plasma injection channel and extending along the length direction of the plasma injection channel. The outlet of the gas channel is adjacent to the bottom of the metal electrode, so that the working gas in the gas channel is sprayed toward the bottom of the metal electrode. The dielectric layer covers the metal electrodes.

According to an embodiment of the present disclosure, the above-mentioned wide-format atmospheric plasma device further includes a sealing ring, wherein the sealing ring is embedded in the inner wall of the chamber, and surrounds and resists the outer side of the dielectric layer, and the outlet is located at the sealing below the ring.

According to an embodiment of the present disclosure, the above-mentioned gas channel includes an outlet section, and the outlet section includes a first part, a second part, and a third part joined in sequence, and the outlet is located in the third part. The radial dimension of the second portion is smaller than the radial dimension of the first portion and the radial dimension of the third portion.

According to an embodiment of the present disclosure, the wide-format atmospheric plasma device further includes a metal connection block and a connecting piece. The metal connection block is electrically connected with the metal electrode. The connecting piece is arranged at the end of the metal connection block, and configured to connect the power line and the metal connection block.

According to an embodiment of the present disclosure, the outlet end surface of the above-mentioned gas channel is an inclined surface, and the inclined surface faces the dielectric layer.

According to an embodiment of the present disclosure, an outlet end surface of the gas channel is a concave arc surface, and the concave arc surface faces the dielectric layer.

According to an embodiment of the present disclosure, the above-mentioned dielectric layer is a circular tube structure.

According to an embodiment of the present disclosure, the above-mentioned dielectric layer is a quartz tube.

According to an embodiment of the present disclosure, the above-mentioned dielectric layer is a rectangular box-like structure.

According to an embodiment of the present disclosure, the above-mentioned dielectric layer is a rectangular ceramic long box.

100: Wide format atmospheric plasma device

100a: wide-format atmospheric plasma device

100b: Wide-format atmospheric plasma device

110: metal casing

112: chamber

112a: Medial wall

114: gas channel

114a: Export

114b: Outlet end face

116: Plasma Jet Channel

118: gas channel

118a: Export

118b: Outlet end face

118c: Export section

118c1: Part I

118c2: Part II

118c3: The third part

120: metal electrode

120a: bottom

130: dielectric layer

130a: Outer side

140: sealing ring

150: Metal connection block

152: end

160: link

170: metal shell

172: chamber

172a: Medial wall

174: gas channel

174a: Export

174b: Outlet end face

176: Plasma Jet Channel

180: metal electrode

180a: bottom

190: dielectric layer

A: part

A-A: line

B: part

C: part

LD1: Length direction

LD2: Length direction

In order to make the above and other purposes, features, advantages and embodiments of this disclosure more obvious and easy to understand, the description of the attached drawings is as follows: [Fig. A three-dimensional schematic diagram of a plasma device; [Figure 2] is a schematic top view of a wide-format atmospheric plasma device according to an embodiment of the present disclosure; [Figure 3] is a schematic diagram of a wide-format atmospheric plasma device according to an embodiment of the present disclosure A schematic side view of a wide-format atmospheric plasma device; [Fig. 4] is a schematic bottom view of a wide-format atmospheric plasma device according to an embodiment of the present disclosure; [Fig. 5A] is a diagram along the The cross-sectional schematic diagram of the wide-format atmospheric plasma device obtained by cutting the line A-A of Fig. 3; [Fig. 5B] is an enlarged cross-sectional schematic diagram showing part A of Fig. 5A; [Fig. 6A] is another schematic diagram according to the present disclosure A schematic cross-sectional view of a wide-format atmospheric plasma device according to an embodiment; [Fig. 6B] is an enlarged schematic cross-sectional view showing part B of Fig. 6A; [Fig. 7A] is a schematic diagram showing a device according to another embodiment of the present disclosure wide format A schematic cross-sectional view of an atmospheric plasma device; and [FIG. 7B] is an enlarged schematic cross-sectional view showing part C of FIG. 7A.

Please refer to FIG. 1 to FIG. 5B , wherein FIG. 1 to FIG. 4 are schematic perspective views, schematic top views, schematic side views, and schematic bottom views of a wide-format atmospheric plasma device according to an embodiment of the present disclosure. , FIG. 5A is a schematic cross-sectional view of the wide-format atmospheric plasma device obtained by cutting along the line A-A of FIG. 3, and FIG. 5B is an enlarged schematic cross-sectional view of part A of FIG. 5A. The wide-format atmospheric plasma device 100 may be a dielectric discharge atmospheric plasma device. The wide-format atmospheric plasma device 100 is mainly applicable to cleaning and coating. The wide-format atmospheric plasma device 100 mainly includes a metal casing 110 , a metal electrode 120 , and a dielectric layer 130 .

The metal casing 110 may be, for example, a long rectangular body. As shown in FIG. 5A , the metal casing 110 includes a chamber 112 , at least one gas channel 114 , and a plasma injection channel 116 . The chamber 112 is the inner space of the metal housing 110 . The gas passage 114 penetrates the metal casing 110 to direct the working gas to the metal electrode 120 . In some embodiments, as shown in FIG. 5A , the metal housing 110 includes several gas channels 114 .

As shown in FIG. 4 and FIG. 5A , the plasma injection channel 116 penetrates the bottom of the metal casing 110 and is located below the chamber 112 . The plasma injection channel 116 can be used for ejecting the plasma formed by the wide-width atmospheric plasma device 100 . In some embodiments, the plasma injection channel 116 is a long and narrow channel extending along the length direction LD1 of the metal shell 110 . due to plasma spray The injection channel 116 extends along the length direction LD1 of the metal casing 110 , so the length direction LD2 of the plasma injection channel 116 is parallel to the length direction LD1 of the metal casing 110 .

The metal electrode 120 is disposed in the chamber 112 and adjacent to the plasma injection channel 116 . The metal electrode 120 can be a long columnar structure, and can extend along the length direction LD2 of the plasma injection channel 116 . For example, as shown in FIG. 5A , the metal electrode 120 may be a cylindrical-like structure. The material of the metal electrode 120 can be any suitable metal, such as aluminum. Please also refer to FIG. 5B , the outlet 114a of the gas channel 114 is adjacent to the bottom 120a of the metal electrode 120 , so that the gas channel 114 can spray the working gas injected therein toward the bottom 120a of the metal electrode 120 .

The dielectric layer 130 covers the metal electrode 120 . In an example where the metal electrode 120 is a cylinder-like structure, as shown in FIG. 5A , the dielectric layer 130 may be a circular tube structure, and the metal electrode 120 may be inserted in the dielectric layer 130 . In some embodiments, the dielectric layer 130 is a quartz cylinder.

Through the gas channel 114, the working gas can be directly guided to the bottom 120a of the metal electrode 120 adjacent to the plasma injection channel 116, so that the working gas can be greatly reduced from entering the chamber 112 of the metal casing 110, and the working gas can be in the The discharge near the plasma injection channel 116 dissociates into plasma. Therefore, the plasma formed in the chamber 112 of the metal shell 110 can be effectively reduced, unnecessary waste of power can be avoided, and the plasma can be more concentrated, and the formed plasma can be closer to the workpiece to be processed, thereby enabling Improve the effect of plasma treatment on the workpiece.

In some embodiments, as shown in FIG. 5B , the outlet end surface 114 b of the gas channel 114 may be an inclined surface or a concave arc surface, and the inclined surface or the concave arc surface faces the dielectric layer 130 . In this way, compared with the straight outlet end surface, the area of the outlet end surface 114b closer to the dielectric layer 130 is increased, that is, the discharge point is increased, which is beneficial to plasma discharge.

In some embodiments, as shown in FIGS. 5A and 5B , the wide-format atmospheric plasma device 100 further includes a sealing ring 140 . The sealing ring 140 can be embedded in the inner side wall 112 a of the cavity 112 , and surround and abut against the outer side 130 a of the dielectric layer 130 . That is to say, the sealing ring 140 is interposed between the inner wall 112 a of the cavity 112 and the outer side 130 a of the dielectric layer 130 to seal the cavity 112 . In addition, the outlet 114 a of the gas passage 114 is located below the sealing ring 140 . Therefore, the sealing ring 140 can block gas communication between the gas channel 114 and the chamber 112 . Therefore, the working gas flowing out from the outlet 114 a of the gas channel 114 will not flow into the chamber 112 , and the formation of plasma in the chamber 112 can be prevented more effectively.

Referring to FIG. 1 , in some embodiments, the wide-format atmospheric plasma device 100 may further include a metal connecting block 150 and a connecting piece 160 . The metal connection block 150 is electrically connected to the metal electrode 120 . For example, the metal connection block 150 can be directly bonded to the metal electrode 120 to achieve electrical connection. The metal connection block 150 is used to transmit current to the metal electrode 120 . The material of the metal connection block 150 can be any suitable metal, such as copper. The connecting piece 160 is disposed at one end 152 of the metal connecting block 150 . The connecting piece 160 can be locked on the end 152 of the metal connecting block 150 by using, for example, screws. The connecting piece 160 can be used to connect the power line (not shown) and the metal connection block 150, and transmit the current supplied by the power supply to the metal connection block 150. The electric current is transmitted to the metal electrode 120 through the metal connection block 150, so that plasma can be easily ignited.

Please refer to FIG. 6A and FIG. 6B , which are respectively a schematic cross-sectional view of a wide-format atmospheric plasma device according to another embodiment of the present disclosure, and an enlarged schematic cross-sectional view of part B of FIG. 6A . The structure of the wide-format atmospheric plasma device 100a is substantially the same as that of the above-mentioned wide-format atmospheric plasma device 100 . The difference between wide-format atmospheric plasma devices 100 a and 100 is that gas channel 118 of wide-format atmospheric plasma device 100 a includes an outlet section 118 c different from gas channel 114 of wide-format atmospheric plasma device 100 .

The outlet section 118c of the gas channel 118 includes a first portion 118c1 , a second portion 118c2 , and a third portion 118c3 joined in sequence. That is, the second part 118c2 is located between the first part 118c1 and the third part 118c3, and the opposite two ends of the second part 118c2 are connected with the first part 118c1 and the third part 118c3 respectively. The outlet 118a and the outlet end surface 118b are located in the third portion 118c3. The radial dimension of the second portion 118c2 is smaller than the radial dimension of the first portion 118c1 and also smaller than the radial dimension of the third portion 118c3.

When the working gas flows from the first part 118c1 into the second part 118c2, the second part 118c2 is compressed due to the smaller radial dimension. When the working gas then flows from the second portion 118c2 into the third portion 118c3, the radial dimension of the third portion 118c3 is larger than that of the second portion 118c2, resulting in an expansion effect. In this way, the third part 118c3 can be The pressure at the outlet 118a is slightly lower than the atmospheric pressure, that is, the density of the gas molecules at the outlet 118a is lower, which is beneficial for the discharge to dissociate the working gas into plasma and reduce the attenuation of the plasma.

In this embodiment, the outlet end surface 118b of the gas channel 118 can also be similar to the outlet end surface 114b of the gas channel 114, and have an inclined surface or a concave arc surface design.

Please refer to FIG. 7A and FIG. 7B , which are respectively a schematic cross-sectional view of a wide-format atmospheric plasma device according to another embodiment of the present disclosure, and an enlarged schematic cross-sectional view of part C of FIG. 7A . Similar to the structure of the wide-format atmospheric plasma device 100 described above, the wide-format atmospheric plasma device 100 b mainly includes a metal shell 170 , a metal electrode 180 , and a dielectric layer 190 . The difference between the wide-format atmospheric plasmonic devices 100 b and 100 is that the structure of the dielectric layer 190 is different from that of the dielectric layer 130 . According to the change of the structure of the dielectric layer 190, the structure of the metal shell 170 is modified.

The metal shell 170 can also be a long rectangular body. The metal housing 170 includes a chamber 172 , one or more gas channels 174 , and a plasma injection channel 176 . The gas channel 174 penetrates the metal casing 170 . The plasma spraying channel 176 penetrates the bottom of the metal casing 170 and is located below the chamber 172 . The plasma injection channel 176 can also be a long and narrow channel extending along the length direction of the metal shell 170 .

A metal electrode 180 is disposed in the chamber 172 adjacent to the plasma injection channel 176 . The dielectric layer 190 covers the metal electrode 180 . In this embodiment, the dielectric layer 190 is a rectangular long box structure. For example, the dielectric layer 190 is a rectangular ceramic long box. Metal electrodes 180 can be loaded on dielectric Inside layer 190. The metal electrode 180 can be, for example, a cylindrical structure. In addition, the inner wall 172 a of the cavity 172 that is bonded to the dielectric layer 190 is substantially straight to facilitate the bonding of the dielectric layer 190 to the cavity 172 .

The outlet 174 a of the gas channel 174 is adjacent to the bottom 180 a of the metal electrode 180 , so the gas channel 174 can inject the working gas toward the bottom 180 a of the metal electrode 180 . Therefore, the working gas can be discharged and dissociated into plasma near the plasma injection channel 176 .

In this embodiment, the outlet end surface 174b of the gas channel 174 can be an inclined surface or a concave arc surface facing the dielectric layer 190 . In addition, the gas channel 174 can also have the same design as the outlet section 118 c of the gas channel 118 . Through these designs, it is easier to discharge and generate plasma.

It can be seen from the above-mentioned embodiments that one of the advantages of the present disclosure is that the metal shell of the wide-format atmospheric plasma device of the present disclosure is pierced with a gas channel to guide the working gas directly to the metal electrode adjacent to the plasma injection channel. bottom. In this way, the working gas can be dissociated to form plasma near the plasma injection channel, so it can avoid the formation of plasma in the cavity of the metal shell, avoid unnecessary waste of power, and make the plasma more concentrated and more efficient. Close to the workpiece to be treated, which can improve the effect of plasma treatment.

Another advantage of the present disclosure is that because the wide-format atmospheric plasma device of the present disclosure can use a sealing ring to surround and abut against the outer side of the dielectric layer to seal the chamber of the metal casing, it can more effectively prevent the plasma from entering the chamber. indoor formation.

Another advantage of the present disclosure is that the outlet section of the gas channel of the wide-width atmospheric plasma device of the present disclosure includes a reduced portion with a smaller radial dimension Proximity to the exit. In this way, the gas can be compressed at the shrinking part first, and then expanded at the outlet, so that the pressure at the outlet can be slightly lower than the atmospheric pressure, which is favorable for the discharge to dissociate the working gas into plasma.

Another advantage of the present disclosure is that the outlet end face of the gas channel of the wide-width atmospheric plasma device of the present disclosure is an inclined surface or a concave arc surface facing the dielectric layer, so the area of the outlet end face closer to the dielectric layer can be increased , is conducive to discharge.

Although the present disclosure has been disclosed above with embodiments, it is not intended to limit the present disclosure. Any person with ordinary knowledge in this technical field may make various modifications and modifications without departing from the spirit and scope of the present disclosure. Therefore, the scope of protection of this disclosure should be defined by the scope of the appended patent application.

100: Wide format atmospheric plasma device

110: metal casing

112: chamber

112a: Medial wall

114: gas channel

114a: Export

116: Plasma Jet Channel

120: metal electrode

120a: bottom

130: dielectric layer

130a: Outer side

140: sealing ring

150: Metal connection block

160: link

A: part

Claims (10)

A wide-format atmospheric plasma device, comprising: A metal casing, wherein the metal casing includes a chamber, at least one gas channel, and a plasma injection channel, the plasma injection channel is located below the chamber; a metal electrode disposed in the chamber adjacent to the plasma injection channel and extending along a length direction of the plasma injection channel, wherein an outlet of the at least one gas channel is adjacent to a bottom of the metal electrode to injecting a working gas in the at least one gas channel toward the bottom of the metal electrode; and A dielectric layer covers the metal electrode. The wide-format atmospheric plasma device as claimed in claim 1, further comprising a sealing ring, wherein the sealing ring is embedded in one of the inner sidewalls of the chamber, and surrounds and bears against one of the outer surfaces of the dielectric layer , the outlet is located below the sealing ring. The wide-format atmospheric plasma device as claimed in claim 1, wherein the at least one gas channel includes an outlet section, and the outlet section includes a first part, a second part, and a third part joined in sequence, the The outlet is located in the third portion, wherein a radial dimension of the second portion is smaller than a radial dimension of the first portion and a radial dimension of the third portion. The wide-format atmospheric plasma device as described in Claim 1 further includes: a metal connection block electrically connected to the metal electrode; and A connecting piece is arranged at one end of the metal connection block and configured to connect a power line with the metal connection block. The wide-format atmospheric plasma device according to claim 1, wherein an outlet end surface of the at least one gas channel is an inclined surface, and the inclined surface faces the dielectric layer. The wide-format atmospheric plasma device according to claim 1, wherein an outlet end surface of the at least one gas channel is a concave arc surface, and the concave arc surface faces the dielectric layer. The wide-format atmospheric plasma device as claimed in claim 1, wherein the dielectric layer is a circular tube structure. The wide-format atmospheric plasma device as claimed in claim 7, wherein the dielectric layer is a quartz circular tube. The wide-format atmospheric plasma device as claimed in claim 1, wherein the dielectric layer is a rectangular long box structure. The wide-format atmospheric plasma device as described in Claim 9, wherein the dielectric layer is a type of rectangular ceramic long box.

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