TWM635490U - Automatic acoustic microscopic imaging system and its test probe module - Google Patents

Abstract

An automated acoustic microscopic imaging system and its test probe module are used to measure an object to be tested immersed in a liquid. The test probe comprises a liquid storage tube, an ultrasonic probe, and a liquid level control unit, wherein the ultrasonic probe is located in the liquid storage tube. The liquid level control unit independently raises the liquid level in the liquid storage tube, so that the front end of the ultrasonic probe is immersed in the liquid inside the liquid storage tube, thus reducing the liquid pressure on the object to be tested. The automatic acoustic microscopy imaging system includes a test station with the above-mentioned test probe and a vacuum heating and drying station, the vacuum heating and drying station heats the object to be tested under a vacuum environment so as to quickly evaporate the residual liquid. The use of a dry and wet isolation area can be thus omitted. Moreover, this system has a water extraction air knife device to generate vacuum suction to remove the residual liquid and avoid the environment from being filled with water.

Description

Automatic Acoustic Microscopic Imaging System and Its Test Probe Module

The present invention relates to an acoustic microscopic imaging system and its testing probe, in particular to an automatic acoustic microscopic imaging system and its testing probe module.

Scanning Acoustic Microscopy (SAM), also known as Acoustic Micro Imaging (AMI), is a non-destructive inspection technique that can detect hidden defects in elastic and biological samples as well as non-transparent hard materials. By monitoring the internal characteristics of the DUT through three-dimensional integration, physical defects such as cracks, voids and delaminations can be effectively found with high sensitivity. A traditional AMI system is to immerse the acoustic wave generator and the object to be measured directly in the aqueous solution of the water tank, and then use the scanning ultrasonic wave to couple with the object to be measured through the water. However, the deeper the object to be tested is immersed in the aqueous solution of the water tank, the greater the pressure it bears, and the less likely it is to move up and down in the water tank. Another traditional AMI system uses a waterfall structure to form a continuous water waterfall between the acoustic wave generator and the object under test. Although the size of this continuously flowing water waterfall can cover the entire ultrasonic wave, it has good ultrasonic wave transmission for measurement. However, this method is easy to create a humid scanning environment.

Taking the object to be tested as a wafer as an example, the wafer must be stored in a wafer storage box after being inspected by the AMI system. In other words, wafers must be completely dry after being inspected in the humid environment of AMI Only then can it be returned to the wafer storage box. On the other hand, a vacuum end effector is usually used for the robot arm used to transfer wafers, but the humid environment is not conducive to this commonly used robot arm, that is, it is not conducive to the automatic inspection system. Therefore, this traditional technology needs to set up a dry and wet isolation zone specially.

In view of this, one or more purposes of this invention is to provide an automatic acoustic microscopic imaging system and its test probe module to solve the above-mentioned problems in the prior art.

In order to achieve the aforementioned purpose, the present creation proposes a test probe module for measuring an object to be tested immersed in a liquid, comprising: a liquid storage tube, one end of the liquid storage tube has a sensing hole, the storage tube The end of the liquid pipe is immersed in the liquid; an ultrasonic probe, the ultrasonic probe is an ultrasonic transducer (Ultrasonic Transducer), and the ultrasonic transducer is arranged on an inside of the liquid storage pipe; and a liquid level control unit, the liquid level control unit raises a liquid level of the liquid in the interior of the liquid storage tube, so that a front end of the ultrasonic probe is immersed in the liquid in the interior of the liquid storage tube , wherein the ultrasonic probe measures the analyte immersed in the liquid through the sensing hole of the liquid storage tube.

Wherein, the liquid level control unit raises the liquid level of the liquid inside the liquid storage tube by pumping air.

Wherein, the liquid level control unit is a vacuum pump and communicates with the interior of the liquid storage pipe.

Wherein, the liquid level control unit raises the liquid level of the liquid inside the liquid storage tube according to the height difference between the front end of the ultrasonic probe and the liquid level of the liquid inside the liquid storage tube height, so that the front end of the ultrasonic probe is immersed in the liquid inside the liquid storage tube.

Wherein, one side wall of the end portion of the liquid storage tube has a through hole through which the liquid enters or exits the liquid storage tube.

In order to achieve the above-mentioned purpose, this creation proposes an automatic acoustic microscopic imaging system, including: a storage station, which is used to place a test object; a transmission mechanism, which is taken out from the storage station and transports the test object and a scanning ultrasonic microscopic imaging test station, which uses an ultrasonic microscopic imaging device with a test probe module to scan and measure the object under test transmitted by the transmission mechanism and immersed in a liquid.

Wherein, the scanning ultrasonic microscopic imaging test station includes a tank body, a first carrying platform, the ultrasonic microscopic imaging device and a holding mechanism, wherein the tank system is used to accommodate the liquid, and the first carrying platform is arranged in the tank body, the transmission mechanism is to place the object to be tested on the first carrying platform in the tank body through a notch of the tank body, and the test probe module is used to raise the liquid The height of the liquid level is such that the space between the front end of the ultrasonic probe and the object to be tested is filled with the liquid, and the test probe module of the ultrasonic microscopic imaging device is set on the holding mechanism for scanning measurement immersed in the The analyte in the liquid.

Wherein, the first carrying platform is an elevating platform, and the holding mechanism is an X-Y moving platform or an X-Y-Z moving platform.

Among them, a vacuum heating and drying station is further included, the transmission mechanism is to transport the object to be tested from the scanning ultrasonic microscopic imaging test station to the vacuum heating and drying station, and the vacuum heating and drying station A vacuum environment is provided and the object to be tested that has been measured by the scanning ultrasonic microscopic imaging testing station is heated and dried in the vacuum environment.

Wherein, the vacuum heating and drying station includes a second carrying platform, a cavity, a vacuum pumping device and a heating seat, and the second carrying platform is arranged on the heating seat for placing the The object under test transported by the transport mechanism from the scanning ultrasonic microscopic imaging test station, the heating seat is used to heat the object under test and the vacuum pumping device is to reduce the air pressure in the cavity at the same time, so as to evaporate the remaining The liquid on the test object.

Wherein, a gas supply source (Gas Supplier) is further included for providing a nitrogen gas into the cavity, and the transport mechanism is used to transport the test object from the vacuum heating and drying station to the storage station.

Among them, a water extraction air knife device (Water extraction air knife device) is installed on the path of the transmission mechanism from the scanning ultrasonic microscopic imaging test station to the vacuum heating and drying station. The air knife device is connected with the vacuum pumping device, and the vacuum pumping device pumps air to generate high-speed fluid on the object to be tested, so as to absorb the liquid remaining on the object to be tested.

Wherein, the ultrasonic microscopic imaging device includes a pulse generating unit, a pulse receiving unit, a test probe module, a processing control unit and a display unit, the pulse generating unit is electrically connected to the test probe module to drive the The test probe module outputs an ultrasonic wave, the pulse receiving unit receives a reflected signal of the ultrasonic wave reflected by the object under test, and the processing control unit performs imaging processing on the reflected signal, so as to display a detection image on the display unit superior.

Based on the above, the automatic acoustic microscopic imaging system and its test probe module of this creation have the following advantages:

(1) The test probe module can only increase the height of the liquid at the position of the ultrasonic probe, not only can the front end of the ultrasonic probe and the object under test be filled with liquid for detection, but also reduce the entire object under test in the liquid The depth, so it can reduce the liquid pressure on the object to be tested.

(2) When the test probe module is testing, there will not be a lot of liquid splashing, so it is easy to keep the testing environment dry, which can reduce the interference to each component, and does not need to set up a dry and wet isolation area.

(3) The vacuum heating and drying station can provide a vacuum environment and heat the object to be tested, so as to quickly evaporate the liquid remaining on the surface of the object to be tested, and no additional dry and wet isolation areas are required.

(4) The water pumping air knife device can generate vacuum suction to absorb the residual liquid on the surface of the object to be tested, and there will be no traditional high-pressure air jet dewatering method to spray liquid and cause the environment to be filled with water vapor, and an additional dry and wet isolation area needs to be set up The problem.

(5) This invention can effectively dry the residual moisture of the semiconductor element structure on the wafer, especially the semiconductor element structure with a large aspect ratio.

In order to make Jun Shen have a further understanding and understanding of the technical characteristics of this creation and the technical effects that can be achieved, I would like to accompany it with a better embodiment and a detailed description as follows.

10: Test probe module

11: Ultrasonic

12: liquid

13: Reflected signal

14: The object to be tested

16: Liquid storage tube

17: end

18: Ultrasonic probe

19: Sensing hole

20: Liquid level control unit

21: Through hole

22: Lateral extension board

23: front end

25: Extraction pipeline

30: Ultrasonic microscopic imaging device

32: Pulse generating unit

34: Pulse receiving unit

36: Processing control unit

38: Display unit

100: Automatic Acoustic Microscopic Imaging System

200: storage station

250: Wafer edge finder

300: Test station

310: tank body

312: notch

320: The first carrying platform

330: holding mechanism

400: Transmission Mechanism

500: Vacuum heating and drying station

510: the second carrying platform

520: Cavity

522: airtight element

530: vacuum pumping device

532: Gas pipeline

540: heating seat

542: heating element

550: Gas supply source

600: Pumping air knife device

610: Sink

612: Gas pipeline

620: deflector

S10, S20, S30, S40: steps

S100, S110, S120, S130, S140: steps

h1: first height

h2: second height

FIG. 1 is a schematic diagram of an embodiment of an automatic acoustic microscopic imaging device with a test probe module of the present invention.

FIG. 2 is a schematic diagram illustrating an embodiment of the test probe module of the present invention.

Fig. 3 is a schematic diagram showing another embodiment of the test probe module of the present invention.

FIG. 4 is a schematic diagram illustrating an embodiment of the automatic acoustic microscopy imaging system of the present invention.

Fig. 5 is a schematic view showing an embodiment of a scanning ultrasonic microscopic imaging test station of the automatic acoustic microscopic imaging system of the present invention.

Fig. 6 is a schematic diagram showing an embodiment of the vacuum heating and drying station and the water suction air knife device of the automatic acoustic microscopic imaging system of the present invention.

FIG. 7 is a flow diagram illustrating an embodiment of an operating method of the test probe module of the present invention.

FIG. 8 is a schematic flow chart illustrating an embodiment of the operation method of the automatic acoustic microscopic imaging system of the present invention.

In order to facilitate the understanding of the technical features, content and advantages of this creation and the effects it can achieve, this creation is hereby combined with the drawings and described in detail in the form of embodiments as follows, and the ideas used in it are only for the purpose of For the purpose of illustration and auxiliary instructions, it may not be the true proportion and precise configuration of this creation after its implementation. Therefore, the scale and configuration relationship of the attached drawings should not be interpreted or limited to the scope of rights of this creation in actual implementation. In addition, for ease of understanding, the same elements in the following embodiments are described with the same symbols.

In addition, the terms used in the entire specification and patent claims generally have the ordinary meanings of each term used in this field, in the disclosed content and in the special content, unless otherwise specified. Certain terms used to describe the invention are discussed below or elsewhere in this specification to provide those skilled in the art with additional guidance in describing the invention.

Regarding the use of "first", "second", "third", etc. in this article, it does not specifically refer to the meaning of order or order, nor is it used to limit the creation, it is just to distinguish components described with the same technical terms or operation only.

Secondly, if the words "comprising", "including", "having", "containing" etc. are used in this article, they are all open terms, meaning including but not limited to.

Please refer to FIG. 1 to FIG. 8 , the present invention proposes an automatic acoustic microscopic imaging system and its test probe module and operation method, which are used to measure the object under test 14 immersed in the liquid 12 . FIG. 1 is a schematic diagram of an embodiment of an automatic acoustic microscopic imaging device with a test probe module of the present invention. FIG. 2 is a schematic diagram of an embodiment of the test probe module of the present invention. FIG. 3 is a schematic diagram of another embodiment of the test probe module of the present invention.

As shown in Figure 1, the test probe module 10 of the present invention is installed in an ultrasonic micro imaging device 30, and the ultrasonic micro imaging device (Acoustic micro imaging device) 30 includes a pulse generating unit (Pulse generating unit) 32 , a pulse receiving unit (Pulse receiving unit) 34 , a test probe module 10 , a processing control unit 36 and a display unit 38 . The pulse generating unit 32 is electrically connected to the test probe module 10 to drive the test probe module 10 to output the ultrasonic wave 11, the pulse receiving unit 34 receives the reflection signal 13 of the ultrasonic wave reflected by the object under test 14, and the processing control unit 36 responds to the above reflection The signal 13 undergoes imaging processing, so as to display the detection image on the display unit 38 . For example, the pulse generating unit 32 is an electric pulse generator for generating a first electric pulse signal, and the test probe module 10 can convert the first electric pulse signal into an ultrasonic wave and output the ultrasonic wave to the outside. The pulse receiving unit 34 It is to receive the reflected signal of the ultrasonic wave reflected by the object under test 14. For example, the test probe module 10 can first convert the reflected wave of the ultrasonic wave reflected by the object under test 14 into a reflected signal 13 (second electrical pulse signal), and the pulse receiving The unit 34 is an electric pulse receiver for receiving the second electric pulse signal. Next, the processing control unit 36 performs imaging processing on the second electrical pulse signal, so as to display the detection image on the display unit 38 .

As shown in Fig. 1 and Fig. 2, in one embodiment, the test probe module 10 of the present invention includes a liquid storage tube 16, an ultrasonic probe 18 and a liquid level control unit 20, and the test probe module 10 is used for measuring The test object 14 immersed in the liquid 12 . The liquid 12 is, for example, water, alcohol or other fluids. The liquid storage tube 16 is a hollow column, and the ultrasonic probe 18 is arranged on the inside of the liquid storage tube 16 . The end 17 of the liquid storage tube 16 has a sense Measuring hole 19. The ultrasonic probe 18 is an ultrasonic transducer (Ultrasonic Transducer). The structure of the ultrasonic transducer includes, for example, a stacked acoustic resistance matching layer, a piezoelectric ceramic layer and a shock-absorbing layer located in the casing, which are electrically connected. The pulse generating unit 32 shown in FIG. 1 can convert the first electrical pulse signal of the pulse generating unit 32 into an ultrasonic wave, or can receive the reflected wave of the ultrasonic wave reflected by the object under test 14 and convert it into a reflected signal (the first Two electrical pulse signals). When the user wants to measure the object 14 to be tested, the user can immerse the end 17 of the liquid storage tube 16 into the liquid 12, and use the liquid level control unit 20 to raise the liquid level of the liquid 12 inside the liquid storage tube 16. The surface height, for example, raises the liquid level of the liquid 12 from the first height h1 to the second height h2, so that the front end 23 of the ultrasonic probe 18 is immersed in the liquid 12 inside the liquid storage tube 16 . Thereby, the ultrasonic probe 18 can measure the object 14 immersed in the liquid 12 through the sensing hole 19 of the liquid storage tube 16 . During the process of the test probe module 10 moving and scanning the test object 14, the liquid storage tube 16 helps to keep the microbubbles generated when the test probe module 10 stirs the liquid 12 away from the ultrasonic probe 18, which can avoid microbubbles. Affects the effect of ultrasound imaging. The frequency range of the ultrasonic wave generated by the test probe module 10 of the present invention is, for example, from about 1 MHz to about 2,000 MHz, the resolution range is from about 300 μm to about 0.3 μm, the penetration depth range is from about 15 mm to about 0.01 mm, and the focal length The range is from about 19mm to about 0.05mm.

The liquid level control unit 20 used in the test probe module 10 of the present invention is, for example, a vacuum pump, and is connected to the inside of the liquid storage pipe 16 through a pumping pipeline 25 , for example. The liquid level control unit 20 raises the liquid level height of the liquid 12 inside the liquid storage pipe 16 by pumping air (that is, discharging the gas inside the liquid storage pipe 16 ), so that the front end 23 of the ultrasonic probe 18 Immersed in the liquid 12 inside the liquid reservoir 16 . After the vacuum pumping device stops pumping air (steady pressure state), the front end 23 of the ultrasonic probe 18 is kept immersed in the liquid 12 inside the liquid storage tube 16 . In addition, in another embodiment, the liquid level control unit 20 can selectively raise the liquid level of the liquid storage tube 16 according to the height difference between the front end 23 of the ultrasonic probe 18 and the liquid level of the liquid 12 inside the liquid storage tube 16. The liquid level height of the internal liquid 12 makes the ultrasonic probe 18 End 23 is submerged in liquid 12 inside reservoir tube 16 . In other words, the greater the height difference between the front end 23 of the ultrasonic probe 18 and the liquid level of the liquid 12 inside the liquid storage tube 16, the liquid level control unit 20 will pump out more gas to make the inside of the liquid storage tube 16 The liquid level of the liquid 12 rises more, so that the liquid 12 inside the liquid storage tube 16 submerges the front end 23 of the ultrasonic probe 18 .

As shown in Figure 3, in another embodiment, one side wall of the end 17 of the liquid storage tube 16 has a through hole 21, and the liquid 12 can enter the liquid storage tube 16 through the through hole 21 or flow from the liquid storage tube 16. discharge. In addition, the side wall of the end 17 of the liquid storage tube 16 can optionally have a lateral extension plate 22 , and the lateral extension plate 22 can prevent microbubbles from affecting the ultrasonic imaging. When the test probe module 10 moves and scans the object 14 to be tested, the lateral extension plate 22 helps to make the micro-bubbles generated when the test probe module 10 moves the liquid 12 away from the sensing hole 19, and even reduces the micro-bubbles generated by the test probe module 10. Generation of bubbles. The end edge of the laterally extending plate 22 can be vertical (as shown in FIG. 3 ) or can be inclined to provide a flow guiding effect.

Fig. 4 is a schematic diagram of an embodiment of the automatic acoustic microscopy imaging system of the present invention. Please also refer to FIG. 1 to FIG. 4 , the automatic acoustic microscopy imaging system 100 of the present invention includes, for example, a storage station 200 , a testing station 300 and a transmission mechanism 400 . Taking the object under test 14 as a wafer as an example, the storage station 200 is, for example, a wafer storage box, and the specification of the wafer storage box corresponds to the wafer. The transfer mechanism 400 is, for example, a mechanical arm, and is, for example, electrically connected to a controller (such as the above-mentioned processing control unit 36), for transferring the object to be tested 14 between the stations of the automatic acoustic microscopic imaging system 100, For example, the DUT 14 is taken out from the storage station 200 and transferred to the testing station 300 . Wherein, taking the object under test 14 as a wafer as an example, after the transfer mechanism 400 takes the object under test 14 out of the storage station 200, before transferring the object under test 14 to the test station 300, it may optionally include firstly placing the object under test 14 is sent to the wafer edge finder (Aligner) 250 for positioning measurement. The test station 300 is, for example, a scanning ultrasonic microscopic imaging test station, which is an ultrasonic microscopic imaging device 30 with a test probe module 10 as shown in FIGS. Object 14.

Fig. 5 is a schematic diagram of an embodiment of a testing station of the automatic acoustic microscopic imaging system of the present invention. Please refer to Fig. 1 to Fig. 4 and Fig. 5 at the same time, the test station 300 of the automatic acoustic microscopic imaging system 100 of the present invention includes a tank body 310, a first carrying platform 320, an ultrasonic microscopic imaging device 30 and a holding mechanism 330. Wherein, the liquid 12 is contained inside the tank body 310 , and the first carrying platform 320 is arranged in the tank body 310 . The transmission mechanism 400 places the object under test 14 on the first carrying platform 320 in the tank body 310 through the notch 312 of the tank body 310 . The test probe module 10 of the ultrasonic microscopic imaging device 30 is arranged on the holding mechanism 330 . The characteristic of the test probe module 10 of the ultrasonic microscopic imaging device 30 of the present invention is that the liquid level of the liquid 12 can be raised to at least cover the front end 23 of the ultrasonic probe 18 . For example, the invention can use the liquid level control unit 20 to raise the liquid level of the liquid 12 inside the liquid storage tube 16, so that the space between the front end 23 of the ultrasonic probe 18 and the object 14 to be tested is filled with the liquid 12, thereby The ultrasonic probe 18 can measure the object 14 immersed in the liquid 12 through the sensing hole 19 of the liquid storage tube 16 . Since the test probe module 10 can locally raise the liquid level of the liquid 12, the invention can greatly reduce the depth of the object under test 14 in the liquid 12, and can reduce the impact on the object under test 14 (such as a wafer). The liquid pressure makes it easy for the wafer to move up and down in the tank 310 .

In the automatic acoustic microscopic imaging system 100 of the present invention, the test station 300 is, for example, a scanning ultrasonic microscopic imaging test station, wherein the ultrasonic microscopic imaging device 30 is scanned to measure and is immersed in the liquid 12 and is located at the first The object under test 14 on the carrying platform 320 . In other words, the first carrying platform 320 of the test station 300 of the present invention and the ultrasonic microscopic imaging device 30 are relatively displaced, so as to achieve the effect of scanning measurement. For example, both the first carrying platform 320 and the holding mechanism 330 can be selected from one of an elevating platform, an X-Y moving platform, or an X-Y-Z moving platform, and they can be the same or different. In this invention, the first carrying platform 320 is an elevating platform and the holding mechanism 330 is an X-Y moving platform as an example, but it is not limited thereto.

Fig. 6 is a schematic diagram showing an embodiment of the vacuum heating and drying station of the automatic acoustic microscopy imaging system of the present invention. Please refer to Fig. 1 to Fig. 6 at the same time, the automatic acoustic microscopic imaging system of this creation The system 100 may optionally add a drying station, such as the vacuum heating drying station 500 . After the test station 300 measures the object under test 14 immersed in the liquid 12 , the transport mechanism 400 transports the object under test 14 from the test station 300 to the next station, such as the vacuum heating and drying station 500 . The vacuum heating and drying station 500 provides a vacuum environment for heating and drying the DUT 14 that has been measured by the testing station 300 under the vacuum environment. After the vacuum heating and drying station 500 dries the test object 14 , the transport mechanism 400 transports the test object 14 from the vacuum heating and drying station 500 to the next station, such as the storage station 200 .

The vacuum heating and drying station 500 includes, for example, a second carrying platform 510 , a cavity 520 , a vacuum suction device 530 and a heating seat 540 . The second carrying platform 510 is set on the heating base 540 for placing the object under test 14 transported by the above-mentioned transport mechanism 400 from the scanning ultrasonic microscopic imaging testing station. The heating base 540 has a heating element (such as an infrared heating unit) 542 for heating the test object 14, and the vacuum pumping device 530 simultaneously reduces the air pressure in the cavity 520, so as to speed up the evaporation of the liquid 12 remaining on the test object 14 . Because the boiling point of water and other liquids will decrease as the air pressure drops, and the external heat source can accelerate the evaporation of water. Especially in the part of the semiconductor device structure on the wafer with a large aspect ratio, it is difficult to remove the water in it by traditional mechanical rotation. The use of vacuum heating in this creation can achieve the effect of quickly removing moisture. Moreover, because no mechanical rotation is used, the system environment of this invention can be kept dry to reduce the interference of water vapor on the measuring components. In the implementation of the present invention, the cavity 520 may have a vacuum chamber, or the cavity 520 may be moved to combine with the heating seat 540 to form a vacuum chamber, and the vacuum pumping device 530 is, for example, through The gas pipeline 532 is connected to the inside of the cavity 520 for reducing the pressure of the vacuum chamber in the cavity 520 . The above-mentioned vacuum pumping device 530 can also be, for example, the above-mentioned vacuum pumping device (Vacuum Pump) used as the liquid level control unit 20 .

The vacuum heating and drying station 500 of the automatic acoustic microscopy imaging system 100 of the present invention can also optionally add a gas supply source 550, as shown in FIG. Gas line 532 provides nitrogen (eg, dry nitrogen) to the vacuum chamber of chamber 520 In the process, the cavity 520 of the vacuum heating and drying station 500 is returned to atmospheric pressure. Although the embodiment of the invention takes the cavity 520 moving down to combine with the heating seat 540 to form a vacuum chamber as an example, it is not limited thereto. Moreover, the joint surface of the cavity 520 and the heating seat 540 can also achieve an airtight effect, for example, by using an airtight element 522 (such as an O-ring). After the gas supply source 550 provides nitrogen gas so that the vacuum chamber of the cavity 520 returns to atmospheric pressure, the cavity 520 can, for example, move up to leave the heating seat 540, so that the transport mechanism 400 can transport the object 14 to be tested from the vacuum heating and drying station 500 To the next station, such as storage station 200.

In addition, the automatic acoustic microscopic imaging system 100 of the present invention can also optionally include a water pumping air knife device 600 (as shown in FIG. 6 ) installed in the transmission mechanism 400 to transport the object 14 to be tested from the testing station 300 to the vacuum heating and drying station 500 on the path. The water suction air knife device 600 is, for example, connected to the vacuum suction device 530 of the vacuum heating and drying station 500 through the gas pipeline 612, and the high-speed fluid can be generated on the test object 14 by the vacuum suction device 530, so as to absorb the remaining The liquid 12 on the test object 14. In other words, the structure of the water suction air knife device 600 is not particularly limited, as long as the vacuum suction device 530 can generate vacuum suction to suck up the moisture on the object 14 to be tested, it can be applicable to this invention.

For example, as shown in the sectional structure shown in the dotted line box in the upper right of Figure 6, the structure of the water suction air knife device 600 includes a water suction groove 610 and a deflector 620, wherein the water suction groove 610 is located at the guide of the deflector 620 On the flow surface, for example in the center. When the vacuum suction device 530 pumps air, the water suction tank 610 of the water suction air knife device 600 will generate a low-pressure vacuum phenomenon, so the liquid 12 on the object 14 to be tested can be pumped out. Moreover, the gas in the area covered by the deflector 620 will be sucked into the water suction groove 610 along the deflector surface of the deflector 620 . In addition, the outer edge of the deflector surface of the deflector 620 is a chamfer, such as an arc-shaped chamfer. In other words, when the water suction air knife device 600 is located at a certain distance above the object under test 14, the gas around the deflector 620 can be sucked into the water suction groove 610 along the flow guide surface of the deflector 620 by the low-pressure vacuum phenomenon, that is, , this creation can make these gases flow towards the direction of the liquid 12 on the test object 14 first, and then flow into the water suction tank 610, so the liquid 12 on the test object 14 can be blown towards the direction of the water suction tank 610 instead of toward the liquid 12 on the test object 14. Therefore, not only the efficiency of pumping the liquid 12 can be increased, but also the liquid 12 can be prevented from splashing outward. Especially in the semiconductor device structure on the wafer, the aspect ratio is large Partly, it is difficult to remove the water by traditional air jet water removal. Since this invention draws the liquid 12 remaining on the object under test 14 by pumping air to generate a vacuum, rather than spraying off the liquid 12 on the object under test 14 by means of high-pressure jetting, the system environment of this invention can be kept Good drying to reduce moisture, and no need to add additional dry and wet isolation areas.

In addition, in other embodiments, the automatic acoustic microscopic imaging system 100 of the present invention can also, for example, classify the defects of the measurement results of the object 14 to be tested. Among them, the automatic acoustic micro-imaging system 100 is for example to use the processing control unit 36 to receive the detection data successively obtained by the ultrasonic micro-imaging device 30, and analyze whether there is a difference between the two detection data, or analyze the detection data and a Whether the difference exists between default profiles. For example, this creation can input the detection image obtained by the ultrasonic microscopic imaging device 30 of the automatic acoustic microscopic imaging system 100 into the learning and training model for edge computing (Edge Computing) and decision-making, so as to obtain the measurement results of the object under test 14 Immediately classify the defects, or update the scanning operation parameters of the automatic acoustic microscopy imaging system 100 in-situ corresponding to the ground in order to adjust the scanning movement mode of the first carrying platform 320 and the holding mechanism 330 to the optimum scanning movement mode and /Or adjust the operation mode of other components to an optimal operation mode.

FIG. 7 is a flow diagram illustrating an embodiment of an operating method of the test probe module of the present invention. Please refer to Fig. 1 to Fig. 7 at the same time, the operating method of the test probe module of the present invention comprises the following steps: Step S10: provide the test probe module 10 shown in Fig. 1 to Fig. 3, it has liquid storage tube 16 and super The ultrasonic probe 18, the ultrasonic probe 18 is an ultrasonic transducer (Ultrasonic Transducer), the ultrasonic transducer is located on the inside of the liquid storage tube 16, and the end of the liquid storage tube 16 has a sensing hole 19; Step S20: Carry out the immersion step, it is to immerse the end of the liquid storage tube 16 in the liquid 12; Step S30: carry out the liquid level height adjustment step, it is to only raise the liquid level height of the liquid 12 inside the liquid storage tube 16, make super The front end 23 of the ultrasonic probe 18 is immersed in the liquid 12 inside the liquid storage tube 16, so as to maintain the space between the front end 23 of the ultrasonic probe 18 and the object 14 to be filled with the liquid 12; and Step S40 : performing a measurement step, which is to measure the object 14 immersed in the liquid 12 with the ultrasonic probe 18 through the sensing hole 19 of the liquid storage tube 16 .

Wherein, during the process of adjusting the liquid level height S30, the liquid storage tube 16 of the test probe module 10 is selectively fixed against the object 14 to be tested, and during the step S40, the storage tube 16 of the test probe module 10 is The end of the liquid tube 16 is separated from the test object 14 by a distance.

FIG. 8 is a schematic flowchart illustrating the operation method of an embodiment of the automatic acoustic microscopic imaging system of the present invention. Please refer to Fig. 1 to Fig. 8 at the same time, the operating method of the automatic acoustic microscopic imaging system of the present invention comprises the following steps:

Step S100: Carry out the first transfer step, which is to transfer the object under test 14 from the storage station 200 to the test station 300, such as a scanning ultrasonic microscopic imaging test station; wherein, the transfer mechanism 400 (such as a mechanical arm) is to be The test object 14 (such as a wafer) is transferred from the storage station 200 (such as a wafer storage box) to the first carrier 320 (such as a wafer carrier) of the test station 300 (scanning ultrasonic microscopic imaging test station). Then, the transmission mechanism 400 exits, and then the test probe module 10 of the ultrasonic microscopic imaging device 30 is moved to the object under test 14 by the relative movement between the first carrying platform 320 and the holding mechanism 330 and contact with the object under test 14 to fix the object under test 14 . Next, the first carrying platform 320 and the test probe module 10 are submerged into the liquid (such as water) to a depth, such as about 5 mm. Subsequently, the liquid level control unit 20 (such as a vacuum suction device connected to the inside of the liquid storage pipe 16) is used to pump air, so that the liquid 12 in the tank body 310 of the test station 300 is sucked into the test probe module 10, And immerse the front end 23 of the ultrasonic probe 18 of the test probe module 10 in the liquid 12 until the liquid level height of the liquid 12 reaches the set height, the liquid level control unit 20 stops pumping again, so that the front end 23 of the ultrasonic probe 18 Immersion in liquid 12 is maintained.

Step S110: Perform a measurement step, which is to scan and measure the object 14 immersed in the liquid 12 with a scanning ultrasonic microscopic imaging test station having a test probe module 10 as shown in Figures 1 to 5; In other words, before performing the measurement step, the test probe module 10 is raised by a certain height relative to the object under test 14 through the relative movement between the first carrying platform 320 and the holding mechanism 330, for example For example, about 1mm, and then perform the measurement step, so as to perform positioning movement in the X-Y direction and perform fixed-point measurement until the measurement covering the entire area of the object under test 14 (such as a wafer) is completed.

Step S120: Carry out the second transfer step, which is to transfer the object under test 14 from the scanning ultrasonic microscopic imaging test station to the vacuum heating and drying station 500; in detail, the test probe module 10 is first moved to the object under test 14 and contact with the object to be tested 14 to fix the object to be tested 14, and then the liquid level control unit 20 (such as a vacuum pumping device) stops operating, so that the liquid 12 inside the test probe module 10 flows into the tank 310, Then the first carrying platform 320 and the test probe module 10 are raised to the position, and then the transport mechanism 400 is used to transport the object 14 to be tested from the scanning ultrasonic microscopic imaging test station to the second carrying platform 510 of the vacuum heating and drying station 500 superior. In addition, during the process of step S120 , the present invention can also optionally suck up the liquid 12 remaining on the surface of the object 14 to be tested through a suction air knife device 600 connected to the vacuum suction device 530 .

Step S130: Carry out a vacuum heating step, which is to heat the object 14 under vacuum with the vacuum heating and drying station 500 to evaporate the liquid 12 remaining on the object 14; in detail, when the transport mechanism 400 transfers the object 14 When transported from the scanning ultrasonic microscopic imaging test station to the second carrying platform 510 of the vacuum heating and drying station 500, the cavity 520 of the vacuum heating and drying station 500 can, for example, be lowered in height to combine the heating seat 540 and use the vacuum pumping device 530 performs a vacuuming step to reduce the pressure of the vacuum chamber in the cavity 520 . At the same time, the heating seat 540 of the vacuum heating drying station 500 starts to heat the object 14 to be tested with a heating element 542 (such as an infrared heating unit) so that the residual liquid evaporates rapidly; and

Step S140 : performing a third transfer step, which is to transfer the test object 14 from the vacuum heating and drying station 500 to the storage station 200 . In detail, after the vacuum heating and drying station 500 finishes drying the object 14 to be tested, the vacuum pumping device 530 stops vacuuming and sends in nitrogen gas, so that the vacuum heating and drying station 500 returns to the atmospheric pressure state. Then, stop feeding nitrogen gas (such as dry nitrogen gas), and raise the cavity 520 of the vacuum heating and drying station 500 . Subsequently, the transport mechanism 400 transports the object 14 to be tested from the vacuum heating and drying station 500 to the storage station 200 .

To sum up, the automatic acoustic microscopic imaging system and its test probe module of this creation have the following advantages:

(1) The test probe module can only increase the height of the liquid at the position of the ultrasonic probe, not only can the front end of the ultrasonic probe and the object under test be filled with liquid for detection, but also reduce the entire object under test in the liquid The depth, so it can reduce the liquid pressure on the object to be tested.

(2) When the test probe module is testing, there will not be a lot of liquid splashing, so it is easy to keep the testing environment dry, which can reduce the interference to each component, and does not need to set up a dry and wet isolation area.

(3) The vacuum heating and drying station can provide a vacuum environment and heat the object to be tested, so as to quickly evaporate the liquid remaining on the surface of the object to be tested, and no additional dry and wet isolation areas are required.

(4) The water pumping air knife device can generate vacuum suction to absorb the residual liquid on the surface of the object to be tested, and there will be no traditional high-pressure air jet dewatering method to spray liquid and cause the environment to be filled with water vapor, and an additional dry and wet isolation area needs to be set up The problem.

(5) This invention can effectively dry the residual moisture of the semiconductor element structure on the wafer, especially the semiconductor element structure with a large aspect ratio.

The above descriptions are illustrative only, not restrictive. Any equivalent modification or change that does not deviate from the spirit and scope of this creation shall be included in the scope of the appended patent application.

10: Test probe module

11: Ultrasonic

13: Reflected signal

14: The object to be tested

30: Ultrasonic microscopic imaging device

32: Pulse generating unit

34: Pulse receiving unit

36: Processing control unit

38: Display unit

Claims (13)

A test probe module for measuring a test object immersed in a liquid, comprising: a liquid storage tube, one end of the liquid storage tube has a sensing hole, and the end of the liquid storage tube is immersed in the liquid; An ultrasonic probe, the ultrasonic probe is an ultrasonic transducer (Ultrasonic Transducer), and the ultrasonic transducer is arranged on the inside of one of the liquid storage tubes; and A liquid level control unit, the liquid level control unit raises a liquid level of the liquid in the interior of the liquid storage tube, so that a front end of the ultrasonic probe is immersed in the liquid in the interior of the liquid storage tube , wherein the ultrasonic probe measures the analyte immersed in the liquid through the sensing hole of the liquid storage tube. The test probe module as claimed in claim 1, wherein the liquid level control unit raises the liquid level of the liquid inside the liquid storage tube by pumping air. The test probe module as described in claim 2, wherein the liquid level control unit is a vacuum pump connected to the interior of the liquid storage tube. The test probe module as described in claim 1, wherein the liquid level control unit raises the storage liquid according to a height difference between the front end of the ultrasonic probe and the liquid level of the liquid inside the liquid storage tube The liquid level of the liquid in the inner portion of the tube is such that the front end of the ultrasonic probe is immersed in the liquid in the inner portion of the liquid storage tube. The test probe module as claimed in claim 1, wherein a side wall of the end of the liquid storage tube has a through hole through which the liquid enters or exits the liquid storage tube. An automated acoustic microscopy imaging system comprising: a storage station, which is used to place a test object; a transfer mechanism, which takes out and transfers the test object from the storage station; and A scanning ultrasonic microscopic imaging test station, which uses an ultrasonic microscopic imaging device with a test probe module as described in any one of claims 1 to 5 to scan and measure the transmission mechanism and immersion The analyte in a liquid. The automatic acoustic microscopic imaging system as described in claim 6, wherein the scanning ultrasonic microscopic imaging test station includes a tank body, a first carrying platform, the ultrasonic microscopic imaging device and a holding mechanism, wherein the The tank system is used to accommodate the liquid, the first bearing platform is set in the tank body, and the transmission mechanism is the first bearing platform that places the object under test in the tank body through a notch of the tank body Above, the test probe module raises the liquid level of the liquid so that the space between the front end of the ultrasonic probe and the object to be tested is filled with the liquid, the test probe module of the ultrasonic microscopic imaging device It is arranged on the holding mechanism to measure the object to be measured immersed in the liquid in a scanning manner. The automatic acoustic microscopic imaging system as described in Claim 7, wherein the first stage is an elevating stage, and the holding mechanism is an X-Y movable stage or an X-Y-Z movable stage. The automatic acoustic microscopic imaging system as described in claim 6, further comprising a vacuum heating and drying station, the transmission mechanism is to transport the object to be tested from the scanning ultrasonic microscopic imaging test station to the vacuum heating and drying station, The vacuum heating and drying station provides a vacuum environment and heats and dries the object to be tested that has been measured by the scanning ultrasonic microscopic imaging test station in the vacuum environment. The automatic acoustic microscopic imaging system as described in claim 9, wherein the vacuum heating and drying station includes a second carrying platform, a cavity, a vacuum suction device and a heating seat, and the second carrying platform is located on the On the heating seat, it is used to place the object under test transported by the transmission mechanism from the scanning ultrasonic microscopic imaging test station. The heating seat is used to heat the object under test and the vacuum pumping device is to simultaneously lower the cavity The air pressure in order to evaporate the liquid remaining on the analyte. The automatic acoustic microscopy imaging system as described in Claim 10 further comprises a gas supply source for providing a nitrogen gas into the cavity, and the transport mechanism is to transport the analyte from the vacuum heating and drying station to The storage station. The automatic acoustic microscopic imaging system as described in claim 10, further comprising a suction air knife device installed on the transport mechanism from the scanning ultrasonic microscopic imaging test station to transport the object to be tested to the vacuum heating and drying station On the way, the water suction air knife device is connected with the vacuum suction device, and the vacuum suction device pumps air to generate high-speed fluid on the object to be tested, so as to absorb the liquid remaining on the object to be tested. The automatic acoustic microscopic imaging system as described in claim 6, wherein the ultrasonic microscopic imaging device includes a pulse generating unit, a pulse receiving unit, a test probe module, a processing control unit and a display unit, the pulse The generating unit is electrically connected to the test probe module to drive the test probe module to output an ultrasonic wave, the pulse receiving unit receives a reflected signal of the ultrasonic wave reflected by the object under test, and the processing control unit performs the reflected signal The imaging process is used to display a detection image on the display unit.

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