TWM634456U - High performance waste gas purification system - Google Patents

Abstract

A high-efficiency exhaust gas purification system, which includes at least one purification unit and an incineration unit; The purification unit includes a first runner and a second runner arranged at the downstream end of the first runner; the surface of each runner is divided into an adsorption zone, a cooling zone, and a desorption zone for processing the adsorption process The volatile organic compounds in the exhaust gas can then be desorbed by the desorption gas to desorb the volatile organic compounds in the rotor, and sent to the incineration unit for incineration, thereby removing more than 98% of the volatile organic compounds in the process exhaust gas sexual organic compounds.

Description

High-efficiency exhaust gas purification system

This work is about a treatment system for volatile organic compounds, especially a treatment system using a runner and incineration equipment

With the vigorous development of semiconductor and optoelectronic technology, it has also led to the rapid growth of Taiwan's technology industry in recent years; on the other hand, it has also spawned many problems closely related to environmental protection, especially in semiconductor components or optoelectronic components. Most of the manufacturing process needs to be completed by chemical reaction. During the production process, a large amount of volatile organic compounds (VOCs, Volatile Organic Compounds) will be emitted, and most of these VOCs are harmful air pollutants (Hazardous Air Pollutants; HAPs). Long-term exposure of the human body to an environment containing high concentrations of VOCs will cause poisoning and carcinogenic tumors. Furthermore, the VOCs present in the atmosphere will produce photochemical reactions, resulting in an increase in the concentration of ozone in the atmosphere and the production of highly oxidative pollutants. Therefore, these exhaust gases containing volatile organic compounds must be treated before they are discharged, and they cannot be directly discharged into the atmosphere to avoid environmental hazards.

Due to the large amount of waste gas emissions from the semiconductor manufacturing and optoelectronic industries, and the concentration of VOCs is in the low-to-medium range, the design of the incinerator for high-temperature incineration treatment can effectively treat the waste gas emissions.

However, although the above-mentioned system can achieve the function of treating VOCs, it needs to consume a lot of energy (fuel) when incinerating waste gas with high air volume and low concentration at an operating temperature above 700°C, thus causing a lot of waste of energy in waste gas treatment. . If the two treatment facilities are combined, such as using a zeolite runner with an incinerator, the exhaust gas is absorbed and concentrated by a single runner, and then incinerated by combustion And other methods for post-processing to save fuel costs in the waste gas incineration process, but it cannot meet the high reduction rate requirement of more than 98%.

In view of this, this creation artificially improves and solves the above-mentioned deficiencies. It has devoted itself to research and combined with the application of academic theories, and finally proposes a reasonable design that effectively improves the above-mentioned deficiencies. The high-efficiency exhaust gas purification system of this creation can reduce the load of system smoke and the amount of smoke processed by the incineration unit in the system to achieve the effect of energy saving and reduce the overall operating cost.

That is, the purpose of this invention is to provide a high-efficiency exhaust gas purification system for treating process exhaust gas containing volatile organic compounds, including: at least one purification unit and an incineration unit. The purification unit includes a first runner and a second runner arranged at the downstream end of the first runner; the first runner can be divided into a first adsorption zone, a first cooling zone, and a first desorption zone; the first adsorption zone is used to introduce the process exhaust gas to adsorb at least a part of the volatile organic compounds in the process exhaust gas and send out a first filtered gas; the first cooling zone is used to introduce a first cooling gas, It is used to lower the temperature of the first runner that accumulates heat and heats up due to desorption; the first desorption area is used to introduce a first desorption gas to desorb the volatile adsorbed by the first runner. organic compound and send out a first VOC concentrated gas; the second runner can be divided into a second adsorption zone, a second cooling zone, and a second desorption zone; the second adsorption zone is for importing into the first A filtered gas is used to adsorb at least a part of the volatile organic compounds in the first filtered gas and send out a second filtered gas; the second cooling zone is used to introduce a second cooled gas for desorbing and accumulating The heat and the temperature of the second runner is lowered; the second desorption area is used to introduce a second desorption gas to desorb the volatile organic compounds adsorbed by the second runner and send a second VOC concentration Gas; the incineration unit has at least one incineration device, and the incineration unit is set to be communicated with the first desorption zone to incinerate the volatile organic compounds in the first VOC concentrated gas to generate a post-incineration gas and discharge.

According to an embodiment of the present invention, the high-efficiency exhaust gas purification system further includes a third heater and a second heater, the third heater and the second heater are both connected to the first wheel and the second The runner is in gas communication.

According to an embodiment of the present invention, the second cooling gas discharged from the second cooling zone is introduced into the second heater for heating and then output as the second desorption gas.

According to an embodiment of the present invention, the first cooling gas discharged from the first cooling zone is introduced into the second heater for heating and then output as the second desorption gas.

According to an embodiment of the present invention, the second VOC-enriched gas is introduced into the third heater for heating and then output as the first desorbed gas.

According to an embodiment of the present invention, the high-efficiency exhaust gas purification system further includes a first heater, and the first concentrated VOC gas is introduced into the first heater for heating before being introduced into the incineration device.

According to an embodiment of the present invention, the third heater, the second heater, and the first heater are respectively heat exchangers, and the incinerated gas flows through the first heater, the second heater in sequence. The heater and the third heater are used as heat sources for heat exchange.

100: High-efficiency exhaust gas purification system

1: Purification unit

10: First wheel

101: The first adsorption zone

102: The first cooling zone

103: The first desorption zone

20: Second wheel

201: Second adsorption zone

202: Second Cooling Zone

203: The second desorption zone

50: Incineration unit

60, 60': chimney

70: The third heater

80:Second heater

90: First heater

W: Process waste gas

W ₁ : the first filtered gas

W ₂ : Second filtered gas

D ₁₁ : first cooling gas

D ₁₂ : the first desorption gas

D ₁₃ : the first VOC concentrated gas

D ₂₁ : second cooling gas

D ₂₂ : the second desorption gas

D ₂₃ : Second VOC concentrated gas

H: gas after incineration

FIG. 1 is a schematic diagram showing the system configuration of the first embodiment of the present invention.

FIG. 2 shows the wheel layout of the first runner 10 and the second runner 20 .

FIG. 3 is a schematic diagram of the system configuration of the second embodiment of the present invention.

In order to make the purpose, technical features and advantages of this creation more understandable to those in the relevant technical field, and to be able to implement this creation, hereby cooperate with the attached drawings to specifically illustrate this creation. The technical characteristics and implementation modes of the work, and enumerate the preferred embodiments for further description. The diagrams compared in the following text are for the purpose of expressing the representation related to the characteristics of this creation, and do not and need not be completely drawn according to the actual situation.

As used herein, the singular forms "a", "an" and "the" also include the plural forms unless the context clearly dictates otherwise. Furthermore, it should be understood that when used in this specification, the terms "comprising" and/or "comprising" specify the presence of stated features, elements and/or units, but do not exclude the presence or addition of one or more other features, elements and/or elements Or units, together first describe. In addition, in the following detailed descriptions of various embodiments with reference to the drawings, it will be clearly presented that the directional terms mentioned in the following embodiments are, for example: "upper", "lower", "left", "right", "Front", "rear", etc., are only referring to the directions of the attached illustrations. Accordingly, the directional terms used are for illustration and not for limitation of this creation.

Furthermore, those who are familiar with this technology should also be clear: the enumerated embodiments and the attached drawings are only for reference and description, and are not used to limit the creation; Creations completed through modifications or changes are also deemed to be within the scope of the spirit and intent of this creation, and of course such creations are also included in the patent application scope of this creation.

First, please refer to FIG. 1 , which is a structural configuration diagram showing a high-efficiency exhaust gas purification system 100 in the first embodiment of the present invention. The high-efficiency exhaust gas purification system 100 can be used to treat volatile organic compounds (Volatile Organic Compounds; VOCs) process waste gas W, the source of process waste gas W is not particularly limited, for example, it can come from petrochemical industry, semiconductor industry, steel factory, or process waste gas that requires the use of organic solvents, and the process waste gas W is The volatile organic compounds contained can be alkanes, aromatics, esters, ketones; for example, but not limited to, propane, butane, benzene, toluene, ethylbenzene, methanol, ethanol, isopropanol, isopropanol, Penta Alcohol, acetone, butanone, tetrachloroethylene, chlorobenzene, propylene glycol methyl ether acetate (PGMEA), monoethanolamine (MEA), and dimethylsulfoxide (DMSO).

The high-efficiency exhaust gas purification system 100 includes a purification unit 1 and an incineration unit 50; the purification unit 1 includes a first runner 10 and a second runner 20, wherein the first runner 10 and the second runner 20 are respectively The honeycomb structure is composed of adsorbents capable of adsorbing volatile organic compounds, and can be driven by a motor (not shown) to rotate at a specific speed.

Please refer to FIG. 2 at the same time, which is a wheel surface configuration diagram of the first runner 10 and the second runner 20. The first runner can be divided into a first adsorption zone 101, a first cooling zone 102, and a second runner. A desorption zone 103, when the process exhaust gas W passes through the first adsorption zone 101, the adsorbent will adsorb at least a part of the VOCs in the process exhaust gas and discharge the _first filtered gas W1; and the VOCs adsorbed by the adsorbent will follow The first runner 10 rotates to the first desorption zone 103 to contact with a first desorption gas D12 and desorbs from the first runner ₁₀ into the first desorption gas _D12 , and sends out the first VOC Concentrated gas D ₁₃ . Since the first desorption gas _D12 is a high-temperature gas with a temperature between 180°C and 220°C, when the first runner ₁₀ performs the desorption step with the first desorption gas D12, the first desorption gas will be caused by heat conduction. The temperature of the rotor 10 increases, so a first cooling gas D ₁₁ is introduced into the first cooling zone 102 to lower the temperature of the first rotor 10. The first cooling gas D ₁₁ can be external air or obtained by diverting the process exhaust gas W . Moreover, in this embodiment, after the first cooling gas _D11 is discharged from the first cooling zone 102, it can be merged with the _first filtered gas W1 for subsequent treatment.

On the above, the second runner 20 is arranged in the downstream area of the first runner 10, and can be divided into a second adsorption zone 201, a second cooling zone 202, and a second desorption zone similarly to the first runner 10. Attached area 203. The second adsorption zone 201 is used to receive the first filtered gas W ₁ discharged from the first runner 10 , when the first filtered gas W ₁ passes through the second adsorption zone 201 , the adsorbent will adsorb the first filtered gas W ₁ The VOCs are discharged into the second filtered gas W ₂ , which can be transported to the chimney 60 to be discharged to the outside, or used for other purposes.

The VOCs adsorbed by the adsorbent then follow the rotation of the second runner 20 to the second desorption zone 203 to contact with a second desorption gas D ₂₂ and desorb from the second runner 20 to the second desorption gas D ₂₂ , and send out the second VOC-enriched gas D ₂₃ . Same as the first runner 10, since the second desorption gas D ₂₂ is a high-temperature gas with a temperature between 180°C and 220°C, the second runner 20 desorbs with the second desorption gas D ₂₂ During the step, the temperature of the second runner 20 will increase due to heat conduction, so a second cooling gas D ₂₁ is introduced into the second cooling zone 202 to lower the temperature of the second runner 20. The second cooling gas D ₂₁ can be external air Or obtained by splitting the _first filtered gas W1.

According to the technical idea of this creation, on the wheel surface of the first runner 10, the area ratio of the first adsorption zone 101, the first cooling zone 102, and the first desorption zone 103 is 10:1:1 or 6:1 : 1; on the wheel surface of the second runner 20, the area ratio of the second adsorption zone 201, the second cooling zone 202, and the second desorption zone 203 is 10:1:1 or 6:1:1.

Upholding, the adsorption material constituting the first runner 10 and the second runner 20 is not particularly limited, for example, it can be selected from activated carbon, hydrophobic zeolite, silica gel, activated alumina, and combinations thereof either. In addition, the adsorbent materials constituting the first rotating wheel 10 and the second rotating wheel 20 can also be the same or different materials, which can be set according to actual needs, and are not limited here.

Please refer to FIG. 1 again. The high-efficiency exhaust gas purification system 100 also includes a third heater 70 and a second heater 80. The second desorption zone 203 of the rotor 20 is in gas communication, and the second heater 80 is in gas communication with the second cooling zone 202 of the second rotor 20 and the second desorption zone 203 .

The second heater 80 is used to receive the second cooling gas D ₂₁ discharged from the second cooling zone 202, and heat it to the second desorption temperature to generate the second desorption gas D ₂₂ , and then the second desorption gas D ₂₂ is transported to the second desorption zone 203 for desorption, and then the second VOC concentrated gas D ₂₃ is discharged; then, the second VOC concentrated gas D ₂₃ is introduced into the third heater 70 and heated to the first desorption temperature to generate the first desorption gas D ₁₂ , and then transport the first desorption gas D ₁₂ to the first desorption zone 103 for desorption, and then discharge the first VOC concentrated gas D ₁₃ .

The incineration unit 50 is arranged to be in gas communication with the first desorption zone 103, and the incineration unit 50 includes an incineration device capable of incinerating the volatile organic compounds in the first VOC concentrated gas D ₁₃ to generate an incineration The gas H is discharged to the outside. Applicable incinerators include, but are not limited to, direct fired incinerators, catalytic incinerators, regenerative incinerators, or regenerative catalytic incinerators.

The incineration unit 50 may further include auxiliary combustion equipment (not shown), the auxiliary combustion equipment is connected with the incineration equipment, when the waste gas calorific value of the first VOC concentrated gas D ₁₃ in the incineration equipment is insufficient to burn to the required temperature , the auxiliary combustion equipment can transport natural gas and other fuels to assist gas incineration operations.

Also, according to the technical thought of this creation, the third heater 70 and the second heater 80 are respectively heat exchangers, such as plate heat exchangers or shell-and-tube heat exchangers, preferably shell-and-tube heat exchangers; The incinerated gas H discharged from the incineration unit 50 flows through the second heater 80 and the third heater 70 to exchange heat with the second cooling gas D ₂₁ and the second VOC concentrated gas D ₂₃ as a heat source.

In addition, in this embodiment, the high-efficiency exhaust gas purification system 100 further includes a first heater 90, and the first heater 90 is in gas communication with the first desorption zone 103 in the first runner 10 and the incineration unit 50, It is used to receive the first concentrated VOC gas D ₁₃ , heat it and send it to the incineration unit 50 for incineration.

The first heater 90 can also be a heat exchanger, such as a plate heat exchanger and a shell-and-tube heat exchanger, preferably a shell-and-tube heat exchanger, and is connected with the second heater 80 and the third heater. 70 in series. The incinerated gas H discharged from the incineration unit 50 can sequentially flow through the first heater 90, the second heater 80, and the third heater 70, together with the first VOC concentrated gas D ₁₃ , the second cooling gas D ₂₁ , The second VOC-enriched gas D ₂₃ is subjected to heat exchange so that the final temperature of the incinerated gas H is between 200°C and 280° C., and finally introduced into the chimney 60 ′ for discharge to the outside or for subsequent use. Thereby, the thermal energy of the incinerated gas H can be effectively utilized, and the temperature at which the incinerated gas H is discharged to the outside can be reduced.

Next, the method for purifying exhaust gas using the high-efficiency exhaust gas purification system of this invention in this embodiment is described below, including the following steps: first adsorption step S1: sending a process exhaust gas W containing volatile organic compounds to the first adsorption Zone 101, and after adsorbing at least a part of the volatile organic compounds in the first adsorption zone 101, a first filtered gas W ₁ is sent out.

Second adsorption step S2: introducing the _first filtered gas W1 into the second adsorption zone 201, and sending out a second filtered gas after adsorbing at least a part of the volatile organic compounds through the second adsorption zone.

Desorption step S3: make the second cooling gas D ₂₁ pass through the second cooling zone 202, then raise the temperature of the second cooling gas D ₂₁ to generate the second desorption gas D ₂₂ , and then send the second desorption gas D ₂₂ to the second desorption gas D 22 Two desorption zone 203, the second desorption gas _D22 desorbs the volatile organic compounds adsorbed by the second runner 20 from the second runner 20 and sends a second VOC concentrated gas _D23 , and then The second VOC-enriched gas D ₂₃ is heated up to generate the first desorption gas D ₁₂ , and then the first desorption gas D ₁₂ is sent to the first desorption zone 103, and the first desorption gas D ₁₂ takes the first rotor 10 The adsorbed volatile organic compounds are desorbed from the first runner 10 and a first VOC concentrated gas D ₁₃ is sent out.

Incineration step S4: transport the first VOC concentrated gas _D13 to the incineration equipment in the incineration unit 50, and incinerate the volatile organic compounds in the first VOC concentrated gas _D13 through the incineration equipment to generate an incinerated Gas H is discharged.

According to the technical idea of this creation, the ratio of the rotational speed of the first runner 10 to the second runner is generally between 16:1 and 1:10; preferably between 7:1 and 1:7; More preferably between 5:1 and 1:5; optimally between 3:1 and 1:3.

The first cooling temperature of the first cooling gas D ₁₁ when entering the first cooling zone 102 is below 40°C, and the temperature when it is discharged from the first cooling zone 102 is between 100°C and 130°C; the first desorption gas The first desorption temperature of D ₁₂ when entering the first desorption zone 103 is between 180°C and 220°C. The second cooling temperature of the second cooling gas D ₂₁ when entering the second cooling zone 202 is below 40°C, and the temperature when it is discharged from the second cooling zone 202 is between 100°C and 130°C; the second desorption The second desorption temperature of the gas D ₂₂ when entering the second desorption zone 203 is between 180°C and 220°C.

In addition, according to the technical idea of this creation, a filter unit (not shown) can be provided at the feed end of the first runner 10, and the process waste gas W will pass through the filter unit before entering the first runner 10, so as to remove Remove larger dust particles. The first runner 10 and the second runner 20 can also be connected with the fire-fighting pipeline respectively. When there is an emergency or a smoldering situation, water can be sprinkled immediately, and the waste water after use can be discharged through a waste water pipeline. An emergency discharge pipeline is also provided at the upstream end of the first runner 10, so that when an emergency occurs, the process exhaust gas is first guided to other places or the chimney 60 to avoid equipment loss or disaster expansion.

In this embodiment, the chimney 60 for discharging the _second filtered gas W2 and the chimney 60' for discharging the incinerated gas H are independent devices, and can monitor the _second filtered gas W2 and the incinerated gas H individually. gas quality. But not limited to separate devices, the second filtered gas W ₂ and the incinerated gas H can also be combined and discharged into the same chimney as in other embodiments.

Next, please refer to FIG. 3 , which is a structural configuration diagram showing a high-efficiency exhaust gas purification system 100 in the second embodiment of the present invention, wherein the configuration of the first runner 10, the second runner 20, and the incineration unit 50 is the same as The above-mentioned first embodiment is the same and will not be repeated here.

The main difference between this embodiment and the aforementioned first embodiment is that the second heater 80 is gas-connected with the first cooling zone 102 of the first rotor 10 and the second desorption zone 203 of the second rotor 20 . The second heater 80 is used to receive the first cooling gas D ₁₁ discharged from the first cooling zone 102, and heat it to the second desorption temperature to generate the second desorption gas D ₂₂ , and then the second desorption gas D ₂₂ is transported to the second desorption zone 203 for desorption, and then the second VOC concentrated gas D ₂₃ is discharged; then, the second VOC concentrated gas D ₂₃ is introduced into the third heater 70 and heated to the first desorption temperature to generate the first desorption gas D ₁₂ , and then transport the first desorption gas D ₁₂ to the first desorption zone 103 for desorption, and then discharge the first VOC concentrated gas D ₁₃ . In addition, in this embodiment, after the second cooling gas _D21 is discharged from the second cooling zone 202, it is confluent with the _second filtered gas W2 and transported to the chimney 60 to be discharged to the outside, or used for other purposes.

Furthermore, the method for purifying exhaust gas using the high-efficiency exhaust gas purification system in this embodiment includes the following steps: first adsorption step X1: a process exhaust gas containing volatile organic compounds is transported to the first adsorption zone, and passes through the The first adsorption zone adsorbs at least a part of the volatile organic compounds and sends out a first filtered gas.

The second adsorption step X2: introducing the first filtered gas into the second adsorption zone, and sending out a second filtered gas after adsorbing at least a part of the volatile organic compound through the second adsorption zone.

Desorption step X3: make the first cooling gas D ₁₁ pass through the first cooling zone 102, then raise the temperature of the first cooling gas D ₁₁ to generate the second desorption gas D ₂₂ , and then send the second desorption gas D ₂₂ to the first cooling zone 102 Two desorption zone 203, the second desorption gas _D22 desorbs the volatile organic compounds adsorbed by the second runner 20 from the second runner 20 and sends a second VOC concentrated gas _D23 , and then The second VOC-enriched gas D ₂₃ is heated up to generate the first desorption gas D ₁₂ , and then the first desorption gas D ₁₂ is sent to the first desorption zone 103, and the first desorption gas D ₁₂ takes the first rotor 10 The adsorbed volatile organic compounds are desorbed from the first runner 10 and a first VOC concentrated gas D ₁₃ is sent out.

Incineration step X4: transport the first VOC concentrated gas _D13 to the incineration equipment in the incineration unit 50, and incinerate the volatile organic compounds in the first VOC concentrated gas _D13 through the incineration equipment to generate an incinerated Gas H is discharged.

In this way, the high-efficiency exhaust gas purification system of this invention can adopt the first cooling gas or the second cooling gas to continuously desorb the volatile organic compounds in the first runner and the second runner according to the demand. Compared with using the first cooling gas and the second cooling gas to desorb the volatile organic compounds in the first runner and the second runner respectively, the flow rate of the VOC concentrated gas can be reduced, the system load can be reduced, and it is helpful To save operating costs and achieve energy-saving effects.

To sum up, the content of this creation has been illustrated with the above embodiments, but this creation is not limited to these implementations. Those with ordinary knowledge in the technical field of this creation can make various changes and modifications without departing from the spirit and scope of this creation; for example, combining or changing the various technical contents illustrated in the foregoing embodiments become new implementation methods, and these implementation methods are of course regarded as one of the contents of this creation. Therefore, the scope of protection in this case also includes the scope of the patent application and the scope defined later.

100: High-efficiency exhaust gas purification system

1: Purification unit

10: First wheel

101: The first adsorption zone

102: The first cooling zone

103: The first desorption zone

20: Second wheel

201: Second adsorption zone

202: Second Cooling Zone

203: The second desorption zone

50: Incineration unit

60, 60': chimney

70: The third heater

80:Second heater

90: First heater

W: Process waste gas

W ₁ : the first filtered gas

W ₂ : Second filtered gas

D ₁₁ : first cooling gas

D ₁₂ : the first desorption gas

D ₁₃ : the first VOC concentrated gas

D ₂₁ : second cooling gas

D ₂₂ : the second desorption gas

D ₂₃ : Second VOC concentrated gas

H: gas after incineration

Claims (10)

A high-efficiency exhaust gas purification system is used to treat process exhaust gas containing volatile organic compounds, and the high-efficiency exhaust gas purification system includes: at least one purification unit comprising a first wheel and a second wheel disposed downstream of the first wheel; and an incineration unit having at least one incineration facility and communicating with the purification unit; wherein The first runner can be divided into a first adsorption zone, a first cooling zone, and a first desorption zone, and on the wheel surface of the first runner, the first adsorption zone, the first The area ratio of the cooling zone and the first desorption zone is 10:1:1 or 6:1:1; the first adsorption zone is used to introduce the process exhaust gas to absorb at least a part of the volatile organic compound and send out a first filtered gas; the first cooling zone is used to introduce a first cooling gas to cool down the first runner that accumulates heat and heats up due to desorption, and the first cooling gas is Part of the process exhaust gas or external gas; the first desorption area is used to introduce a first desorption gas for desorption of volatile organic compounds adsorbed by the first runner and send out a first VOC concentrated gas ; The second wheel can be divided into a second adsorption area, a second cooling area, and a second desorption area, and on the wheel surface of the second wheel, the second adsorption area, the second The area ratio of the cooling zone and the second desorption zone is 10:1:1 or 6:1:1; the second adsorption zone is used to introduce the first filtered gas to adsorb at least A part of volatile organic compounds is sent out to a second filtered gas; the second cooling zone is used to introduce a second cooling gas to cool down the second runner that accumulates heat and heats up due to desorption, and the second The cooling gas is a partial flow of the first filtered gas or external air; the second desorption area is used to introduce a second desorption gas for desorbing the volatile organic compounds adsorbed by the second runner and sending a a second VOC enriched gas; and The incineration equipment is used to incinerate the volatile organic compounds in the first VOC concentrated gas to generate an incinerated gas and discharge it. The high-efficiency exhaust gas purification system as described in Claim 1 further includes a third heater and a second heater, the third heater and the second heater are both connected to the first runner and the second heater The two runners are gas-communicated. The high-efficiency exhaust gas purification system according to claim 2, wherein the second cooling gas discharged from the second cooling zone is introduced into the second heater for heating and then output as the second desorbed gas. The high-efficiency exhaust gas purification system according to claim 2, wherein the first cooling gas discharged from the cooling zone is introduced into the second heater for heating and then output as the second desorbed gas. The high-efficiency exhaust gas purification system according to claim 3 or 4, wherein the second VOC-enriched gas is introduced into the third heater for heating and then output as the first desorbed gas. The high-efficiency exhaust gas purification system as described in claim 5 further includes a first heater, and the first concentrated VOC gas is first introduced into the first heater for heating before being introduced into the incineration device. The high-efficiency exhaust gas purification system as described in Claim 6, wherein the third heater, the second heater, and the first heater are respectively heat exchangers, and the incinerated gas flows through the first The heater, the second heater, and the third heater are used as heat sources for heat exchange. The high-efficiency exhaust gas purification system as described in claim 1, wherein the adsorbents constituting the first runner and the second runner are selected from activated carbon, hydrophobic zeolite, silica gel, activated alumina, and any combination thereof A sort of. The high-efficiency exhaust gas purification system as described in Claim 1, wherein the incineration equipment includes a direct-fired incinerator, a catalytic incinerator, a regenerative incinerator, or a regenerative catalytic incinerator. The high-efficiency exhaust gas purification system as described in claim 1, wherein the feed end of the first runner is further provided with a filter unit, and the process exhaust gas will pass through the filter unit before entering the first runner, so as to remove Larger dust particles.

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