TWM628206U - Hot air roasting device - Google Patents

Abstract

A hot air roasting device comprises a chamber, a roasting rack, an air flow unit, a heating unit, and a filtering unit; the chamber has an opening communicated with the inside thereof, and the roasting rack is arranged in the chamber and is opposite to the opening, The airflow unit is arranged at the back of the chamber opposite to the baking rack, the heating unit is arranged at at least one side of the chamber, and the filter unit is arranged at one side of the baking rack; wherein, the airflow unit makes the air inside the chamber generate a the air flow direction, and the filter unit is located at the upper wind of the air flow direction relative to the baking rack.

Description

Hot air roasting device

This creation is related to a semiconductor manufacturing process, especially a hot air baking device.

According to the existing baking equipment used in processes such as semiconductors, in order to meet the high cleanliness requirements and standards of products, it is usually carried out in a dust-free and oxygen-free environment. In the existing equipment, the above-mentioned baking operation is often carried out in a closed chamber; that is, before baking, the air in the dust-free and oxygen-free room is preliminarily filtered through, for example, a blower, and then introduced into the chamber, and The air inside the chamber will also undergo purification operations such as air extraction, so as to meet the requirements and standards of air cleanliness as much as possible.

However, even so, since the air is heated by heating during the baking process, it is still difficult to avoid the generation of particles or fine dust suspended in the air and adhering to the surface of the baking parts such as wafers, thus affecting the product quality. .

In view of this, in order to improve and solve the above-mentioned deficiencies, the author of this book has devoted himself to research and the application of academic principles, and finally proposed a book with a reasonable design and effective improvement of the above deficiencies.

The main purpose of this creation is to provide a hot air roasting device, which can achieve further air cleanliness in roasting operations, and at the same time, has uniform temperature rise, and can be operated in accordance with the output, so as to have energy-saving performance.

In order to achieve the above-mentioned purpose, the present invention provides a hot air baking device, which includes a chamber, a baking rack, an air flow unit, a heating unit, and a filter unit; The grill is arranged in the cavity and is opposite to the opening, the airflow unit is arranged in the cavity and opposite to the back of the baking rack, the heating unit is arranged at at least one side of the cavity, and the filter unit is arranged at one side of the baking rack; wherein, The air flow unit generates an air flow direction for the air inside the chamber, and the filter unit is located at the upper wind of the air flow direction relative to the baking rack.

In order to further disclose the features and technical content of this creation, please refer to the following detailed description and accompanying drawings of this creation. However, the accompanying drawings are only for reference and description, and are not intended to limit this creation.

Please refer to FIG. 1 and FIG. 2 , which are a three-dimensional exploded schematic diagram and a top-view cross-sectional schematic diagram of the present invention, respectively. This creation system provides a hot air baking device, comprising a chamber 1, a baking rack 2, an air flow unit 3, a heating unit 4, and a filter unit 5; wherein:

The chamber 1 has an opening 10 communicating with the interior thereof, and a valve 11 for opening or closing the opening 10 may be provided on the chamber 1 . As shown in FIG. 2 and FIG. 3 , the valve 11 can be driven by a driver such as a pneumatic cylinder to move laterally, so that the valve 11 covers and closes the opening 10 , thereby forming a closed chamber in the chamber 1 . space; or leave the opening and make the opening 10 open.

The baking rack 2 is used for carrying the baking components 200 such as wafers, glass sheets or substrates of composite materials, and is placed in the above-mentioned chamber 1 to perform heating processes such as baking. As shown in FIG. 1 , the baking rack 2 has an opening 20 in the shape of an opening, so that the baking element 200 can be inserted into the baking rack 2 through the inlet and outlet 20 , or can be inserted into the baking rack 2 . It can be taken out, and can be arranged in the baking rack 2 in a manner that the upper and lower parts of each baking element 200 are stacked at intervals, and the inlet and outlet 20 are opposite to the opening 10 of the chamber 1 . On the two sides of the baking rack 2 , the space for the upper and lower parts of the baking element 200 to be stacked at intervals can be seen, so that a plurality of transverse air flow holes 21 are respectively correspondingly arranged.

As shown in FIG. 2 , the air flow unit 3 can be a blower or a fan, and is disposed on the side of the chamber 1 away from the opening 10 , so as to be opposite to the back of the baking rack 2 . The airflow unit 3 may include a hood 30 and a fan blade 31 running in the hood 30 . The fan blade 31 may be driven by a motor 310 , and the motor 310 is disposed outside the chamber 1 , the fan blade 31 can be connected by extending the motor shaft into the chamber 1 , so as to achieve the purpose of running the fan blade 31 and avoid the motor 310 operating in the high temperature environment in the chamber 1 .

As mentioned above, the air hood 30 of the airflow unit 3 has a diversion opening 300 and a diversion opening 301 , and the diversion opening 300 corresponds to the fan blade 31 , and the diversion opening 301 extends through the air hood 30 . To the inner side of the above-mentioned chamber 1, the fan blade 31 can be a centrifugal fan blade, so that after the air outside the air hood 30 is inhaled by the air guide opening 300, it is guided to the air guide opening 301 through the inside of the air hood 30. Exhaust, thereby providing the flow direction of the airflow inside the chamber 1 .

The heating unit 4 is arranged on one side of the chamber 1 , or further, a heating unit 4 is respectively arranged on two sides of the chamber 1 . The heating unit 4 can be a heater, and has a heating pipe 40 , and the heating pipe 40 can be formed by a single pipe body bent in a circuitous manner, or a plurality of pipe bodies can be arranged at intervals. The heating unit 4 can heat up the interior of the chamber 1 so as to perform a baking process on the baking parts 200 placed in the baking rack 2 .

As shown in Figures 2 and 3, the present invention mainly disposes the above-mentioned filter unit 5 on one side of the baking rack 2, and depends on the flow direction of the airflow inside the chamber 1 (ie, as shown by the arrow in Figure 3), to filter The unit 5 is located upwind in the airflow direction relative to the roasting rack 2; that is, when the airflow is driven by the above-mentioned airflow unit 3, it at least passes through the filter unit 5 first and then passes through the airflow hole 21 on the side of the roasting rack 2. into the interior of the roasting rack 2 . The filter unit 5 can be made of a high temperature resistant material such as glass fiber as a filter element, which can be disposed on one side of the baking rack 2 through a positioning frame 50, and has a first surface 500 and a first surface away from each other. Two surfaces 501 , wherein the second surface 501 is adjacent to one side of the baking rack 2 , so that when the airflow flows according to the flow direction, the first surface 500 first enters the filter unit 5 for filtering, so as to maintain the chamber 1 at a height. The degree of particle purification of the interior air. In addition, the first surface 500 preferably faces any heating unit 4 .

Accordingly, as shown in FIG. 3 , when the baking element 200 on the baking rack 2 is to be baked, the valve 11 of the chamber 1 is closed first, so that a closed space is formed inside the chamber 1 . Then, the heating unit 4 starts to heat and raise the temperature inside the chamber 1, and through the operation of the fan blades 31 of the airflow unit 3, the air inside the chamber 1 starts to circulate in a predetermined flow direction in sequence; wherein, After the air is discharged from the guide port 301, it can be blown to the heating unit 4 to help heat to the temperature, and then enter through the first surface 500 of the filter unit 5, so as to filter the remaining particles or fine dust in the air, Therefore, the high-temperature air discharged from the second surface 501 of the filter unit 5 can prevent the wafer from being easily oxidized during the baking process or avoid the occurrence of particles and dust adhesion problems, so as to meet the requirements of the wafer in high cleanliness. Standard, carry out the required baking process. At the same time, this creation makes the high-temperature air bake in a surrounding flow manner, which can effectively make the air inside the chamber 1 flow, which is helpful for the uniformity of the temperature rise of the air in the chamber 1, and avoids the high temperature being concentrated on the heater, etc. near the component.

Furthermore, as shown in Figure 4, this creation can also be composed of multiple types, that is, multiple hot-air baking devices are arranged side by side on the left, right or up and down, for example, four sets of hot-air baking devices are used to form four chambers 1 type. Since the present invention can improve the cleanliness of the air filtration inside the chamber 1 and can be performed in a single chamber 1, it is also helpful to adapt to 200 batches of different quantities of baking parts for the baking process. For example, when the number of batches is large, each chamber 1 corresponds to a baking rack 2 for stacking a small number of baking parts 200, which can be applied to a large number of baking processes after the combination; When the number of times is small, only a single or several chambers 1 can be used to meet the situation of a small number of baking pieces 200, thereby saving the energy cost of the machine due to the high power required for heating in the baking operation. In order to make the production process less limited by the output.

Therefore, the hot air baking device of the present invention can be obtained by the above-mentioned structure.

To sum up, this creation is a rare new creation product, it can indeed achieve the intended purpose of use, and solve the lack of conventional knowledge, and because it is very novel and progressive, it fully meets the requirements for a new type of patent application. If you file an application in accordance with the Patent Law, please check carefully and grant the patent in this case to protect the rights of the creator.

However, the above descriptions are only the preferred feasible embodiments of this creation, and therefore the scope of the patent of this creation is limited. Therefore, any equivalent structural changes made by using the contents of the description and drawings of this creation are similarly included in this publication. Within the scope of creation, I agree to Chen Ming.

＜This creation＞ 1: Chamber 10: Opening 11: Valve 2: Baking rack 20: Entrance and exit 200: Baking Pieces 21: Air flow holes 3: Airflow unit 30: Windshield 300: Drainage port 301: diversion port 31: Fan blade 310: Motor 4: Heating unit 40: heat pipe 5: Filter unit 50: Positioning frame 500: first side 501: Second Side

Figure 1 is a three-dimensional exploded schematic diagram of this creation.

Figure 2 is a schematic top-view cross-sectional view of this creation.

Figure 3 is a schematic diagram of the action of this creation.

Figure 4 is a schematic diagram of the three-dimensional appearance of this creation composed of plural forms.

1: Chamber

10: Opening

11: Valve

2: Baking rack

3: Airflow unit

30: Windshield

300: Drainage port

301: diversion port

31: Fan blade

310: Motor

4: Heating unit

40: heat pipe

5: Filter unit

50: Positioning frame

500: first side

501: Second Side

Claims (10)

A hot air roasting device, comprising: a chamber having an opening communicating with its interior; a baking rack, disposed in the chamber and opposite to the opening of the chamber; an air flow unit, disposed in the chamber and opposite to the back of the baking rack; a heating unit disposed at at least one side of the chamber; and a filter unit, disposed at one side of the baking rack; Wherein, the air flow unit generates an air flow direction for the air inside the chamber, and the filter unit is located at the upper wind of the air flow direction relative to the baking rack. The hot air roasting device according to claim 1, wherein a valve for opening or closing the opening is arranged on the chamber. The hot air roasting device according to claim 1, wherein the roasting rack is provided with an opening in the shape of an opening, and the inlet and outlet are opposite to the opening of the chamber. The hot-air roasting device as claimed in claim 1 or 3, wherein two sides of the roasting rack are respectively provided with a plurality of transverse air circulation holes corresponding to the distance between the upper and lower sides of the roasting rack. The hot air roasting device as claimed in claim 1, wherein the airflow unit comprises a hood and a fan blade running in the hood. The hot-air roasting device as claimed in claim 5, wherein the air hood is provided with a diversion opening and a diversion opening, and the diversion opening corresponds to the fan blade, and the diversion opening extends through the air hood to the air diversion opening. on one side of the chamber. The hot air roasting device according to claim 5 or 6, wherein the fan blade is driven by a motor, and the motor is arranged outside the chamber. The hot air roasting device according to claim 1, wherein the heating unit is provided with a heating pipe, and the heating pipe is formed by a single pipe body which is bent in a circuitous manner, or is formed by a plurality of pipe bodies arranged at intervals. The hot air roasting device according to claim 1, wherein the filter unit is made of glass fiber material. The hot air roasting device according to claim 1, wherein the filter unit has a first side and a second side that are far away from each other, wherein the second side is adjacent to one side of the roasting rack, and the The first side faces the heating unit.

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