TWM625571U - Temperature sensing automatic tracking system and silicon carbide crystal growth equipment - Google Patents

Abstract

This creation provides a temperature sensing automatic tracking system and silicon carbide crystal growth equipment. The system includes a controller, the temperature capture device is set in the silicon carbide crystal growth equipment and captures the temperature of the heating raw materials in the crucible. The displacement device is connected to the temperature capture device and control the movement of the temperature capture device. When the displacement device receives the correction data of the temperature capture result sent by the controller, the displacement device controls the temperature capture device to move to calibrate the temperature capture position of temperature capture device.

Description

Temperature Sensing Automatic Tracking System and Silicon Carbide Crystal Growth Equipment

The present invention relates to a temperature sensing tracking control, in particular to a temperature sensing automatic tracking system and silicon carbide crystal growth equipment.

Silicon carbide has a wide range of applications, especially for silicon carbide wafers used in semiconductor wafers. Since silicon carbide must be refined at high temperature and for a long time in the process of crystal growth, the subject of heating-related processes is often derived, and it is related to crystal growth products. yield rate.

Therefore, how to effectively monitor the temperature of the SiC crystal growth process is a major issue to be solved.

In view of the problems raised by the prior art, the present invention provides a temperature sensing automatic tracking system and a silicon carbide crystal growth device to solve the problem of how to effectively monitor the temperature during the crystal growth process.

According to an embodiment of the present invention, a temperature sensing automatic tracking system is proposed, which automatically tracks the temperature of a heating material of a crucible of a silicon carbide crystal growth equipment. The system includes: a controller; a temperature acquisition device , electrically connected to the controller, the temperature acquisition device is arranged on the silicon carbide crystal growth equipment and performs one or more temperature acquisitions on the heating raw material of the crucible, and returns the temperature acquisition results to the controller a mobile device, electrically connected to the controller, the mobile device is connected to the temperature acquisition device and controls the movement of the temperature acquisition device, wherein when the mobile device receives the correction of the temperature acquisition result sent by the controller When the data is obtained, the moving device controls the temperature capturing device to move, so as to correct the temperature capturing position of the heated raw material of the crucible by the temperature capturing device.

In one embodiment, an image capture device and an image analysis circuit are further included, which are respectively electrically connected to the controller. When the temperature capture device captures the temperature of the heating material of the crucible, the image is also transmitted through the image. The capture device captures the image of the crucible heating raw material, the image analysis circuit receives the image capture device to capture the image of the crucible heating raw material for image analysis, and returns the analysis result to the controller, the controller according to The correction data of the image analysis result is used to control the moving device to move the temperature capturing device, so as to correct the temperature capturing position of the heating material of the crucible by the temperature capturing device.

In one embodiment, when the controller controls the image capture device to capture the image of the crucible heating material as a real-time image or a recorded image, the image analysis circuit analyzes the real-time image or the recorded image. For the position of the thermal light source image, the controller obtains the distance that the temperature acquisition device needs to correct for the temperature acquisition position of the heated raw material of the crucible through the image analysis circuit.

In one embodiment, the thermal light source image is one of a hot spot of an unspecified light source, a central point of a light source, or an unspecified light source region in the image of the crucible heating the raw material.

In one embodiment, calibrating the temperature capturing position of the heating material of the crucible by the temperature capturing device is to find the position or range with the highest temperature in the thermal light source image.

In one embodiment, it further includes a display screen disposed on the silicon carbide crystal growth equipment, and the display screen receives and displays the image captured by the image capturer of the heating material in the crucible, so as to be controlled by the mobile device When the temperature capturing device is moved to correct the temperature capturing position of the heating raw material of the crucible, the display screen displays the image of the heating raw material in coordination with the temperature capturing device for the heating raw material of the crucible. Temperature capture and tracking.

In one embodiment, when the image analysis circuit receives the image capturer to capture the image of the crucible heating raw material for image analysis, grayscale thermal image analysis, thermal image analysis, spectral image analysis, and color image analysis are used for image analysis. , one of visual inspection analysis or image comparison analysis to generate the image analysis result, the controller controls the mobile device to move the temperature capture device according to the calibration data of the image analysis result, so as to calibrate the temperature capture device The temperature of the heated feedstock for the crucible is captured at the location.

In one embodiment, the moving device is a linear moving device, comprising one or more stepping motors, the linear moving device controls the temperature capturing device to move linearly, so as to correct the heating of the crucible by the temperature capturing device The temperature capture position of the raw material.

In one embodiment, the linear movement device is a single-axis control or a dual-axis control linear movement device.

According to another embodiment of the present invention, a silicon carbide crystal growth device is provided, which has the temperature sensing automatic tracking system.

The possible technical effect of this creation is that the automatic temperature sensing capture position can be calibrated, which can improve the temperature sensing accuracy of the crystal growth process and avoid the temperature sensing during the crystal growth process that does not meet the requirements or is inaccurate. Therefore, this creation can improve the crystal growth process, optimize the temperature monitoring in the crystal growth process, and indirectly improve the yield of crystal growth products.

In order to have a further understanding of the technology and function adopted by this creation to achieve its intended purpose, please refer to the following detailed descriptions and diagrams of this creation. It is believed that the purpose, features and characteristics of this creation can be used to gain an in-depth and specific understanding. , however, the attached drawings are only for reference and description, and are not intended to limit the creation.

The following is a description of the implementation of the "temperature sensing automatic tracking system and silicon carbide crystal growth equipment" disclosed in this creation through specific specific embodiments. Those skilled in the art can understand the advantages and disadvantages of this creation from the content disclosed in this specification. Effect. This creation can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this creation. In addition, the drawings in this creation are only for simple schematic illustration, and are not drawn according to the actual size, and are stated in advance. The following embodiments will further describe the related technical contents of the present creation in detail, but the disclosed contents are not intended to limit the protection scope of the present creation.

In order to illustrate the technical solutions in the embodiments of the present invention more clearly, the following briefly introduces the accompanying drawings used in the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary knowledge and ordinary skill in the art, other drawings can also be obtained from these drawings without undue effort.

The present invention discloses a temperature sensing automatic tracking system and silicon carbide crystal growing equipment. The silicon carbide crystal growing equipment can be equipped with a temperature sensing automatic tracking system to monitor the temperature of the crucible heating raw material. When the temperature sensing position deviates, does not meet the requirements or does not meet the optimal temperature sensing position, this creation can timely find and change the temperature sensing position of the heating material, and perform temperature acquisition and correction to avoid the process of crystal growth process. Inaccurate control of the temperature of the raw material heated by the crucible can avoid manual misjudgment.

The temperature sensing automatic tracking system disclosed in the present creation can cooperate with mobile electronic devices for remote monitoring, timely return the image analysis results of the heating material and the temperature of the heating material for real-time monitoring, which can avoid time-consuming and labor-intensive manual monitoring by personnel, and After the image analysis result is known, the temperature sensing position of the heating raw material for the crucible is corrected in time. The user interface of the software program in the mobile electronic device can also be used for real-time monitoring and real-time temperature acquisition and correction.

The silicon carbide crystal growth method used by the silicon carbide crystal growth equipment disclosed in the present invention can be achieved by liquid phase epitaxy (LPE) epitaxy technology, high temperature chemical vapor deposition (HTCVD) or High temperature sublimation method (physical vapor transport, PVT) is used for crystal growth, which can be used in various crucible configurations to monitor the temperature of crystal growth raw materials.

According to an embodiment of the present invention, please refer to FIG. 1 , which is a schematic diagram of the temperature sensing automatic tracking system for automatically tracking the temperature of the heating material of the crucible of the silicon carbide crystal growth equipment according to the first embodiment of the present invention.

The present invention provides an automatic tracking system for temperature sensing, which includes but is not limited to: a controller 11 , a temperature capture device 12 and a mobile device 13 . The temperature capture device 12 is electrically connected to the controller 11 , and the temperature capture device 12 is installed on the silicon carbide crystal growth equipment 2 to capture one or more temperatures of the heating raw material 210 of a crucible 21 , and calculate the temperature. The retrieved results are sent back to the controller 11 .

Moreover, the mobile device 13 is electrically connected to the controller 11 . The mobile device 13 is connected to the temperature capture device 12 and controls the movement of the temperature capture device 12 . When the mobile device 13 receives the calibration data of the temperature capture result sent by the controller 11 , , the moving device 13 controls the temperature capturing device 12 to move, so as to correct the temperature capturing position of the heating raw material 210 of the crucible 21 by the temperature capturing device 12 .

In one embodiment, the mobile device 13 receives the correction data of the temperature acquisition result sent by the controller 11, and the correction data may be based on the temperature difference between the heating material 210 of the crucible 21 by the temperature acquisition device 12 before and after the time point. Correction data, for example, the temperature of the heating material 210 of the crucible 21 captured by the temperature acquisition device 12 at the first time point is 800 degrees, and the temperature of the heating material 210 of the crucible 21 captured by the temperature acquisition device 12 at the second time point The temperature is 900 degrees, so the controller 11 can calculate and know that the temperature difference between the heating material 210 at the front and back time points is 100 degrees, so the controller 11 can determine that the heating material 210 has been continuously heated and increased by 100 degrees or has been cooled by 100 degrees. The correction data of the temperature difference between the time points before and after, if the controller 11 determines that the heating raw material 210 has been heated and increased by 100 degrees to 900 degrees, that is, the moving device 13 controls the temperature capturing device 12 to move, so as to correct the temperature capturing device 12 for the crucible. The temperature acquisition position of the heating raw material 210 of 21, for example, the temperature acquisition position is randomly moved from the center point of the heating raw material 210 of the crucible 21 to the vicinity of the center point (ie, other positions relative to the center point of the heating raw material 210), so as to determine the heating raw material Whether the heating of the heating material 210 has been completed as a whole, or the non-center point of the heating material 210 of the crucible 21 is moved to the center point of the heating material 210 to detect whether the heating material 210 is completely heated. This creation can widely measure the temperature of the heating material 210. Detecting and changing the temperature capturing position, monitoring the heating quality of the heating material 210 in time, and the present invention is not limited to the foregoing.

In one embodiment, the mobile device 13 receives the correction data of the temperature acquisition result sent by the controller 11 , and the correction data may also be based on the temperature difference between the two positions of the heating raw material 210 of the crucible 21 by the temperature acquisition device 12 . correction data. For example, the temperature captured by the temperature capture device 12 at the first position of the heating raw material 210 of the crucible 21 is 800 degrees, and the temperature captured by the temperature capture device 12 at the second position of the heated raw material 210 of the crucible 21 is 900 degrees , so the controller 11 can know through calculation that the temperature difference between the first position and the second position of the heating material 210 is 100 degrees. Therefore, the controller 11 can judge that the heating of the first position of the heating material 210 is insufficient, so the temperature difference between the first position and the second position is 100 degrees. The correction data of the temperature difference of the second position, if the controller 11 judges that the heating of the first position of the heating material 210 is insufficient (800 degrees), that is, the moving device 13 controls the temperature capturing device 12 to move to calibrate the temperature capturing device 12. The temperature capturing position of the heating raw material 210 of the crucible 21, for example, the temperature capturing position 12 is moved from the second position of the heating raw material 210 of the crucible 21 to the first position to monitor the heating condition of the first position of the heating raw material 210 or To determine whether the subsequent heating has been completed as a whole, the present invention can extensively detect the temperature of the heating material 210 and change the temperature capturing position, and monitor the heating quality of the heating material 210 in time, and the present invention is not limited to the foregoing.

Please continue to refer to FIG. 2 . FIG. 2 shows a schematic diagram of the temperature sensing automatic tracking system according to an embodiment of the present invention further including an image capture device and an image analysis circuit.

It also includes an image capture device 14 and an image analysis circuit 15, which are electrically connected to the controller 11 respectively. When the temperature capture device 12 captures the temperature of the heating material 210 of the crucible 21, the image capture device 14 is also used to capture the temperature. The image of the crucible 21 heating the raw material 210 is captured, and the image analysis circuit 15 receives the image captured by the image capturer 14 of the crucible 21 heating the raw material 210 for image analysis, and returns the analysis result to the controller 11, and the controller 11 analyzes the image according to the image. The resulting correction data is controlled to move the moving device 13 to the temperature capturing device 12 to correct the temperature capturing position of the heating raw material 210 of the crucible 21 by the temperature capturing device 12 .

In conjunction with FIG. 3 , FIG. 3 is a schematic diagram showing the position of the thermal light source image for analyzing the crucible heating raw material according to an embodiment of the present invention.

When the controller 11 controls the image capture device 14 to capture the image of the heating material 210 in the crucible 21 as a real-time image or a recorded image, the image analysis circuit 15 analyzes the position of the thermal light source image 212 of the real-time image or the recorded image, and controls the The device 11 obtains the distance that the temperature acquisition device 12 needs to correct for the temperature acquisition position of the heating material 210 of the crucible 21 through the image analysis circuit 15 .

In one embodiment, the distance that needs to be corrected is, for example, when the image 151 generated by heating the raw material 210 in the crucible 21 is captured by the image capture device 14, and the image analysis circuit 15 is used to determine the position of the thermal light source image 212 in the image 151, This position is also, for example, the image coordinate position of the image 151 for the heating material 210 . Therefore, when the image analysis circuit 15 performs image analysis to find out the position of the thermal light source image 212 of the heating material 210, the mobile device 13 receives the correction data from the image analysis result and controls the temperature capturing device 12 to move to the heating material. The position of the thermal light source image 212 of the 210 is used to correct the temperature capturing position of the heating raw material 210 of the crucible 21 by the temperature capturing device 12 .

In one embodiment, the movement of the temperature capture device 12 controlled by the mobile device 13 can be adjusted according to the image coordinate distance of the image 151 , but the present invention is not limited to this.

Continuing with FIG. 4 , FIG. 4 shows a schematic diagram of an unspecified light source hot spot, a light source center point or an unspecified light source area in the image of the thermal light source image analyzed by the crucible heating raw material according to an embodiment of the present invention.

The thermal light source image 212 is one of the light source center points 212A, an unspecified light source hot spot 212B or an unspecified light source area 212C in the image 151 of the crucible 21 heating the raw material 210 , and even the whole area heat of the crucible 21 heating the raw material 210 is not excluded. Light source image.

In one embodiment, the calibration of the temperature acquisition position of the heating material 210 of the crucible 21 by the temperature acquisition device 12 is to find the position or range with the highest temperature in the thermal light source image 212 . That is, when the image capturer 14 captures the image 151 of the crucible 21 heating the raw material 210 and analyzes the image 151 through the image analysis circuit 15, it analyzes and finds out the position or range with the highest temperature in the thermal light source image 212 to calibrate the temperature capture The temperature capture position of the heating raw material 210 of the crucible 21 by the device 12 is the position or range where the temperature of the heating raw material 210 of the crucible 21 is the highest, so as to achieve the best temperature capture and monitoring effect, and the present invention is not limited to the foregoing.

In one embodiment, since the heating raw material 210 of the crucible 21 is continuously heated during the whole process, the heating raw material 210 exhibits a phase state change, so the generation of the thermal light source image 212 changes with time, so the thermal light source image 212 is generated with time. The unspecified light source area may also include specific or unspecified light source ripples, lines or tracks, etc. generated on the heating raw material 210 during the heating process, but the present invention is not limited to this.

In one embodiment, the temperature acquisition performed by the temperature acquisition device 12 on the heated raw material 210 of the crucible 21 is obtained through one or more temperatures of the temperature field change emitted by the heated raw material 210 , so the mobile device 13 receives the temperature. The calibration data of the temperature acquisition result sent by the controller 11 is obtained by comparing the theoretical reference value of the process data, but the present invention is not limited to the foregoing.

In one embodiment, the position of the temperature capturing device 12 for capturing the temperature of the heated raw material 210 of the crucible 21 may be set (defined) at the center point of the heated raw material 210 of the crucible 21 first. When the silicon carbide crystal growth equipment 2 system is running, the position of the temperature capturing device 12 to capture the temperature is shifted or moved due to the temperature change in the process, the physical vibration caused by the related moving mechanism components or the vibration caused by the external force. After the image 151 is generated by cooperating with the image capture device 14 to capture the heating material 210 of the crucible 21, the image analysis circuit 15 can analyze the distance to be corrected by the temperature capture device 12 by using the binarized grayscale image or area, and control the temperature capture device 12. The controller 11 controls the moving device 13 to perform closed-loop control in real time according to the calibration data of the image analysis result, and controls the movement of the temperature capturing device 12 to correct the temperature capturing position of the heating material 210 of the crucible 21 by the temperature capturing device 12 .

In one embodiment, the temperature capture position set (defined) by the temperature capture device 12 at the center point of the heated raw material 210 of the crucible 21 is based on the center point of the image 151 (for example, the origin coordinates of the center point in the image 151 ) and the corresponding extension coordinates) to obtain the correction distance of the temperature acquisition device 12 to the temperature acquisition position of the heating raw material 210 of the crucible 21 . Alternatively, the center point of the heating raw material 210 in the crucible 21 may be set (defined) in accordance with the temperature capture position, or the center point of the physical position characteristic of the temperature capture device 12 relative to the crucible 21 may be set. limited. Therefore, the present invention can keep the position of the temperature captured by the temperature capture device 12 at the position of the center point (defined) of the heating material 210 at any time, and the present invention is not limited to this.

In one embodiment, the heating system (not shown) of the SiC crystal growth apparatus 2 may be driven to perform closed-loop control to heat the raw material according to the temperature capture result of the temperature capture device 12 obtained by the controller 11 . The heating raw material 210 heated by the crucible 21 is maintained at the set temperature at any time, and the center point or the (defined) set position of the heating raw material 210 is tracked in real time for temperature control, and this creation is not limited to the foregoing.

Please continue to refer to FIG. 5 and FIG. 6 . FIG. 5 shows a schematic diagram of the temperature sensing automatic tracking system according to an embodiment of the present invention further including a display screen. FIG. 6 is a schematic diagram illustrating an image of heating raw materials on a display screen according to an embodiment of the present invention.

It also includes a display screen 16 disposed on the silicon carbide crystal growth equipment 2 , the display screen 16 receives and displays the image captured by the image capturer 14 for heating the raw material 210 in the crucible 21 , so as to control the temperature capture device 12 in the mobile device 13 When the temperature capturing device 12 moves to correct the temperature capturing position of the heating material 210 of the crucible 21, the display screen 16 displays the image of the heating material 210 in coordination with the temperature capturing device 12 to capture the temperature of the heating material 210 in the crucible 21 and track.

In one embodiment, the user or engineer can determine the temperature of the crucible 21 through the temperature capture position 161 (ie, the position where the temperature capture device 12 captures the temperature at the same time) located on the image of the heated raw material 210 displayed on the display screen 16 . The heating raw material 210 performs temperature capture and tracking, resulting in the effects of real-time image monitoring and temperature capture and tracking.

According to the above, in one embodiment, the image analysis circuit 15 receives the image captured by the image capturer 14 and captures the image of the raw material 210 heated by the crucible 21 for image analysis through grayscale thermal image analysis, thermal image analysis, spectral image analysis, color One of image analysis, visual inspection analysis or image comparison analysis generates an image analysis result, and the controller 11 controls the mobile device 13 to move the temperature capture device 12 according to the correction data of the image analysis result to calibrate the temperature capture device 12 The temperature of the heating raw material 210 of the crucible 21 is captured.

In one embodiment, the visual inspection analysis is that the image analysis circuit 15 obtains the position of the thermal light source image 212 by performing multi-resolution binarization processing on the original captured image 151 (as shown in FIG. 3 ) and removing noise, and The image comparison analysis is the position of the thermal light source image 212 in the synthesized image by comparing the original captured image 151 with the built-in image, and the present invention is not limited to the foregoing.

In an embodiment, in order to improve the accuracy of calibrating the temperature capturing position of the heating material 210 of the crucible 21 by the temperature capturing device 12, the moving device 13 can be configured as a linear moving device, including one or more stepping motors, linear The moving device controls the temperature capturing device 12 to move linearly to correct the temperature capturing position of the heating raw material 210 of the crucible 21 by the temperature capturing device 12 .

[Possible technical effects of this creation]

The possible technical effect of this creation is that the temperature sensing accuracy of the crystal growth process can be improved through the calibration of the automatic temperature sensing capture position, so as to avoid the temperature sensing during the crystal growth process that does not meet the requirements or is inaccurate. Therefore, this creation can improve the crystal growth process, optimize the temperature monitoring in the crystal growth process, and indirectly improve the yield of crystal growth products.

For the high-temperature hot spots or areas generated by the process of heating the material with the crucible in the silicon carbide crystal growth furnace (equipment), the temperature sensing and tracking are carried out. This creation can solve the problem that the temperature cannot be accurately judged through manual visual judgment and how to correct it accurately.

Specifically, through the temperature sensing process of the crucible crystal growth raw material, the image of the heated raw material (thermal light and shadow photo) is captured with the image capture device and the image is judged to find out the position where the temperature sensor needs to capture the temperature, for example, at any time. Find the highest temperature point of the heating material for accurate monitoring, avoid detecting inappropriate temperature positions, and monitor to maintain the temperature of the heating material to indirectly improve the yield of the crystal growth process.

Moreover, the temperature can be sensed through the temperature acquisition method of a temperature acquisition device such as an infrared thermometer, and the precise correction of the temperature acquisition position can be achieved in real time with the control mechanism above a single axis.

The invention can find out the specific or unspecified light source hot spot, center point or area during the heating process of the heating material, so as to perform the correction of the temperature acquisition position and the temperature sensing in real time, so as to maintain the reliability of the process.

The temperature sensing of this creation and the correction of the temperature capture position can be monitored through the display screen, and the real-time monitoring through the display screen of the silicon carbide crystal growth equipment is convenient for users or engineers to conduct visual monitoring of temperature sensing at any time.

Finally, it should be noted that, in the foregoing description, although the concept of the present creation technology has been specifically shown and described with a number of exemplary embodiments, those with ordinary knowledge in the field of this technology will understand that without Various changes in form and details may be made therein without departing from the scope of the concept of the inventive technology as defined by the following claims.

1: Temperature sensing automatic tracking system 11: Controller 12: Temperature capture device 13: Mobile Devices 14: Image grabber 15: Image analysis circuit 151: Video 16: Display screen 161: Temperature capture location 2: Silicon carbide crystal growth equipment 21: Crucible 210: heating raw materials 212: Thermal Light Source Image 212A: center point of light source 212B: Unspecified light source hot spot 212C: Unspecified light source area

FIG. 1 is a schematic diagram of the temperature sensing automatic tracking system for automatically tracking the temperature of the heating material of the crucible included in the silicon carbide crystal growth equipment according to an embodiment of the present invention.

FIG. 2 shows a schematic diagram of the temperature sensing automatic tracking system further comprising an image capture device and an image analysis circuit according to an embodiment of the present invention.

FIG. 3 is a schematic diagram showing the position of the image of the thermal light source for analyzing the crucible heating the raw material according to an embodiment of the present invention.

FIG. 4 is a schematic diagram illustrating a hot spot of a light source, a center point of a light source, or an area of an unspecified light source in an image of an unspecified light source in an image of a thermal light source that is analyzed by a crucible heating raw material according to an embodiment of the present invention.

FIG. 5 is a schematic diagram of the temperature sensing automatic tracking system further comprising a display screen according to an embodiment of the present invention.

FIG. 6 is a schematic diagram illustrating an image of heating raw materials on a display screen according to an embodiment of the present invention.

1: Temperature sensing automatic tracking system

11: Controller

12: Temperature capture device

13: Mobile Devices

2: Silicon carbide crystal growth equipment

21: Crucible

210: heating raw materials

Claims (10)

A temperature sensing automatic tracking system for automatically tracking the temperature of a heating raw material of a crucible possessed by a silicon carbide crystal growing equipment, the system comprising: a controller; A temperature acquisition device electrically connected to the controller, the temperature acquisition device is arranged on the silicon carbide crystal growing equipment, and performs one or more temperature acquisitions on the heating raw material of the crucible, and records the results of the temperature acquisition back to the controller; a mobile device electrically connected to the controller, the mobile device is connected to the temperature acquisition device and controls the movement of the temperature acquisition device, wherein when the mobile device receives the correction data of the temperature acquisition result sent by the controller , the moving device controls the temperature capturing device to move, so as to correct the temperature capturing position of the heating raw material of the crucible by the temperature capturing device. The temperature sensing automatic tracking system as claimed in claim 1, further comprising an image capture device and an image analysis circuit, which are respectively electrically connected to the controller, when the temperature capture device measures the temperature of the heating material of the crucible When capturing, the image of the crucible heating raw material is also captured through the image capture device, and the image analysis circuit receives the image capture device to capture the image of the crucible heating raw material for image analysis, and returns the analysis result to The controller controls the moving device to move the temperature capturing device according to the correction data of the image analysis result, so as to correct the temperature capturing position of the heating material of the crucible by the temperature capturing device. The temperature sensing automatic tracking system according to claim 2, wherein when the controller controls the image capture device to capture the image of the crucible heating raw material as a real-time image or a recorded image, the image analysis circuit analyzes The position of the thermal light source image of the real-time image or the recorded image, the controller obtains the distance that the temperature acquisition device needs to correct for the temperature acquisition position of the heating material of the crucible through the image analysis circuit. The temperature sensing automatic tracking system as claimed in claim 3, wherein the thermal light source image is one of an unspecified light source hot spot, a light source center point or an unspecified light source area in the image of the crucible heating the raw material. The temperature sensing automatic tracking system according to claim 4, wherein calibrating the temperature capturing position of the heating raw material of the crucible by the temperature capturing device is to find the position or range with the highest temperature in the thermal light source image. The temperature sensing automatic tracking system as claimed in claim 2, further comprising a display screen disposed on the silicon carbide crystal growth equipment, the display screen receiving and displaying the image capture device of the crucible heating material captured by the display screen an image, so that when the moving device controls the movement of the temperature capture device to correct the temperature capture position of the temperature capture device for the heated raw material of the crucible, the display screen displays the image of the heated raw material to match the temperature capture The device captures and tracks the temperature of the heated raw material of the crucible. The temperature sensing automatic tracking system according to claim 2, wherein the image analysis circuit receives the image capturer to capture the image of the crucible heating raw material for image analysis through gray-scale thermal image analysis, thermal image analysis , spectral image analysis, color image analysis, visual inspection analysis or image comparison analysis to generate the image analysis result, the controller controls the mobile device to move the temperature capture device according to the correction data of the image analysis result , so as to correct the temperature acquisition position of the heating raw material of the crucible by the temperature acquisition device. The temperature sensing automatic tracking system of claim 1, wherein the moving device is a linear moving device, comprising one or more stepping motors, and the linear moving device controls the temperature capturing device to perform linear movement to correct the temperature The capturing device captures the position of the temperature of the heated raw material of the crucible. The temperature sensing automatic tracking system according to claim 8, wherein the linear moving device is a single-axis control or a dual-axis control linear moving device. A silicon carbide crystal growth equipment has the temperature sensing automatic tracking system according to any one of claims 1 to 9.

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