JP2008216159A - Detecting method of defective part of moving article, image processing program, and data processor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a preprocessing method of image processing data of a moving article, an image processing program and a data processor, capable of executing detection processing in a short time, by accurately and surely detecting a defect part of a moving article with an inexpensive device constitution. <P>SOLUTION: Physical data from a moving article continuously input by a detecting means, is read at a required reading interval, and a plurality of reading data per unit time are successively stored by a storage means. The stored physical data from the article are read out to a frame successively divided as pixel data, and extracted from the data of the respective frames in an extraction width corresponding to a moving distance of the article correlated to a moving speed and a reading time interval of the article, and extracted pixel data are respectively generated from the respective frame data, and the defect part is detected by processing these data based on the extracted pixel data. Thus, detecting time is shortened, and highly accurate detection is realized. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a ceramic substrate for incorporating an electronic circuit, other various raw materials, semi-finished products, etc., with a non-contact and high detection accuracy for a defect portion including a crack on the surface of the product or an internal surface or adhesion of surface foreign matter, and a high level of accuracy. The present invention relates to a method for detecting a defective part of a moving article that can be detected efficiently, an image processing program, and a data processing apparatus.

  Inspection of the presence or absence of surface or internal cracks on metal, ceramic products, and other products is required in various processes during product manufacture. Regarding the material surface inspection, in particular, a crystal material such as a silicon wafer has been conventionally proposed by, for example, Japanese Patent Laid-Open No. 11-326233.

JP-A-11-326233

  The apparatus of Patent Document 1 mounts a test object on a movable stage, flashes illumination means while the stage is moving, and captures an image of a part of the test object as image data by the imaging means. A predetermined number of image data is superimposed and recorded on the image sensor, and the defect of the test object is evaluated through image processing using the predetermined number of image data. In the apparatus disclosed in Patent Document 1, when the subject reaches a predetermined position while the subject is transported and moved by the movement of the subject transport stage, the illuminating means is flashed in synchronism with this. A predetermined number of image data is overlaid on one CCD, and the image data recorded on the CCD is subjected to image processing by an image processing apparatus and a computer to calculate the distribution, number, shape, density, etc. of crystal defects. Therefore, a high-performance CCD element is required, a light emission source for detection by visible light is required, and furthermore, an expensive, high-performance optical system and an image processing device are required, which makes the whole device expensive. There is. Further, for example, the surface states of five measurement positions on the wafer sample are recorded on a single CCD, and when this is image-processed by the image processing apparatus, the entire field of view of the image sensor is eventually obtained. All the five imaged frames of the recorded image data need to be processed with data including their overlapping portions, and there is a problem that the calculation value at the time of the processing calculation becomes large and a calculation load is applied. Furthermore, in order to image a moving article, it is necessary to process an overlapping portion of five imaging frames due to a shift in the imaging range with respect to the object to be inspected. There was a problem.

  The present invention has been made in view of the above-described conventional problems, and one object of the present invention is to accurately detect a defective part of a moving article accurately and reliably with a low-cost apparatus configuration, and to perform detection processing in a short time. An object of the present invention is to provide a method for detecting a defective part of a moving article, an image processing program, and a data processing apparatus.

  In order to achieve the above object, the present invention detects a moving article J by the detecting means 18 and processes the obtained physical data as an image to detect a defective part of the article, etc. The physical data R from the moving article J continuously input by the detection means 18 is read at a required reading interval H, and a plurality of read data per unit time is sequentially read by the storage means 26. The physical data from the stored article is read into the frames F1, F2,... Sequentially divided as pixel data, corresponding to the movement amount of the article correlated with the article moving speed VJ and the reading time interval H. Extracted from the data of each frame with the extraction width W to generate extracted pixel data S1, S2,... From each frame data, and based on the extracted pixel data It consists method of detecting a defective portion such as the moving article for detecting a defective portion such as by treatment. By associating the extracted data with the physical data reading order from the article and cutting it out as data corresponding to the amount of movement of the article, they are connected without overlapping parts, and when these are connected together, the original image frame data is restored. Therefore, it is possible to reduce the processing load without the need for detection of overlapping portions, correction processing, and the like. Furthermore, by extracting a part of the image frame for each row or column having a predetermined width, the extracted data is greatly reduced in the calculation process and the calculation speed is improved.

  At that time, the average value of the data for each row and each column of the extracted pixel data S1, S2,... Is calculated, and the difference value between the average value and each pixel in the pixel data is replaced for each pixel data. Then, the presence or absence of a defective portion or the like may be determined by comparing the difference value with a threshold value.

  The subject article J is applied with thermal elements different in heating and cooling at the same time to form a required temperature difference region Re, and the detection means 18 detects the thermal energy or temperature detected from the temperature difference region and performs the required reading. It is good to read at intervals.

  Furthermore, the detection means 18 may be an infrared imaging means for detecting thermal energy from the moving article and generating thermal image data, particularly in metal products such as iron-based sintered bodies and ceramic products. , The effective detection can be obtained.

  Further, when the article J moves on a plane while being heated 171 or cooled 175, a cooling fluid or a heating fluid is sprayed from the surface to form a temperature difference region Re, which corresponds to the visual field range 185 of the detection means 18. The position P corresponding to the temperature difference region in the frame that is sequentially read as pixel data from the physical data from the article may be set as the extraction position in the image frame F.

  Moreover, this invention is comprised from the image processing program containing the process of making a computer perform the detection method of the defect part etc. of the moving article in any one of Claims 1 thru | or 5.

  Furthermore, the present invention is constituted by the data processing device 12 having the storage unit 26 in which the program according to claim 6 is installed.

  According to the method for detecting a defective portion of a moving article of the present invention, the moving article has a defect of a moving article that detects the moving article by a detecting unit and processes the obtained physical data as an image to detect a defective portion of the article. The physical data from the moving article continuously input by the detection means is read at a required reading interval, and a plurality of read data per unit time is sequentially stored by the storage means. The physical data from the acquired article is read out into the sequentially divided frames as pixel data, and extracted from the data of each frame with an extraction width corresponding to the movement amount of the article that correlates with the movement speed of the article and the reading time interval. Extraction pixel data is generated from each frame data, and these are processed on the basis of the extracted pixel data to detect a defective portion or the like. Simple device configuration for detecting defective parts etc. by creating pre-processed data by creating extracted data from article reading data in association with article movement speed and reading time interval Moreover, it can be realized with high accuracy in a short time. In particular, since data is extracted at an extraction interval corresponding to the amount of movement of the article based on the movement speed of the article and the reading time, only the extracted data is taken into consideration without considering the overlapping part when combining the extracted data. Since processing can be performed to detect the presence or absence of a defective portion, the presence or absence of a defective portion can be detected by calculating the extracted region portion. As a result, the calculation load is greatly reduced, the calculation speed is increased, and the detection time can be shortened. . At the same time, in the case of image processing for the entire pixel frame, it is often the case that averaging processing is applied to the whole by feature extraction, correction processing, etc., and in this case, the detection accuracy of defective portions and the like is likely to deteriorate. Since the detection calculation is performed by limiting individual detection ranges, the detection accuracy can be greatly improved.

  Also, the average value of the data for each row and column of the extracted pixel data is calculated, the difference value between the average value and each pixel in the pixel data is replaced for each pixel data, and the threshold value of the difference value It is possible to specifically realize a significant improvement in detection accuracy without degrading the detection accuracy of the defective portion or the like by the averaging process for the entire pixel frame by determining the presence or absence of the defective portion or the like by comparing with Is possible.

  In addition, a thermal element different in heating and cooling is simultaneously applied to the article to form a required temperature difference region, and the detection means detects thermal energy or temperature detected from the temperature difference region and reads it at a required reading interval. Therefore, for example, temperature detection or detection of defective parts of an article by the amount of radiant energy in detecting the amount of infrared rays of the article, etc., the temperature difference or radiant energy difference can be expressed by forcing the temperature difference. , Monitoring function can be improved. In addition, the temperature range in which a defective portion or the like is most likely to be developed due to the temperature difference can be utilized in the image processing process, which can contribute to improvement in detection accuracy and reduction in processing time.

Further, the detecting means is an infrared imaging means for detecting the amount of thermal energy from the moving article and generating thermal image data, thereby giving a temperature difference in detecting the infrared quantity of the article, etc. The presence / absence and position information can be expressed, the monitoring function can be improved, and the temperature range at which the defect portion or the like is most likely to be expressed by the temperature difference is specifically reflected in the image processing process, thereby improving the processing efficiency.

  Further, when the article moves on a plane while being heated or cooled, a cooling fluid or a heating fluid is sprayed from the surface to form a temperature difference region, and the frame corresponds to the visual field range of the detection means, By setting the position corresponding to the temperature difference area in the frame sequentially read out from the physical data from the article as pixel data as the extraction position in the image frame, for example, temperature detection or radiant energy in detecting the infrared amount of the article About what detects the defective part of an article | item by quantity, the presence or absence of a defective part etc. and position information can be expressed by giving a temperature difference forcibly, and a monitoring function can be improved. In addition, the temperature range in which a defective portion or the like is most likely to be developed due to the temperature difference can be utilized in the image processing process, which can contribute to improvement in detection accuracy and reduction in processing time.

  The best mode for carrying out the present invention will be described below with reference to the accompanying drawings. In the present invention, when detecting a defective portion or the like of a moving article by image processing, the physical data from the article is pre-processed and the pre-processed data is image-processed, thereby achieving high accuracy with an inexpensive apparatus configuration. In addition, a detection method, an image processing program, and a data processing device for a defective part of a moving article that realizes a reduction in detection time by increasing the detection speed, and the best embodiment thereof is, for example, a thin plate-like iron-based sintered product A detection apparatus and a detection method for such defective portions will be described. By the way, iron-based sintered products (such as steel with ferrite phase and cast iron products) of thin discs as one of the specific products are automobiles, industrial machinery, robots, factory facilities, measuring instruments, etc. The application part having the drive part is frequently used in the rotation control part corresponding to the amount of movement by the drive, and there is a great need for industrial parts.

  FIG. 1 shows an embodiment of the present invention, and FIG. 1 is a schematic configuration diagram of a detection device 10 for detecting a defective portion of an article, to which a pre-processing unit of one characteristic component of the present invention is applied. FIG. 2 is a block configuration diagram of the detection device of FIG. 1, and particularly shows an enlarged block configuration of the data processing device 12 including the preprocessing unit. A thin plate-like iron-based sintered product according to the present embodiment will be described as a specimen article J, and a detection system for a defective portion of the article J will be described below.

  The thin plate-like iron-based sintered product as the article J in this embodiment is, for example, a product having a plate thickness of 3 mm and a size of about 50 mm × 50 mm in length and width. Any size, shape, material, etc. of the subject article can be set. In FIG. 1, a detection device 10 such as a defective portion of an article includes a moving device 14, a temperature difference receiving table 16 supported and transferred by the moving device, and a moving device mounted on the temperature difference receiving table and moved by the moving device. An object J to be measured, a thermal action device 17 that applies a thermal action so as to generate a required temperature difference region on the article J, an infrared imaging device 18, a data processing device 12, and a display device 20. .

  The moving device 14 includes an X, Y drive table device that linearly moves the tables 141, 142 in the X, Y orthogonal direction (FIG. 3) on a substantially horizontal plane. The moving device 14 is a receiving means for moving the receiving table 16 in a direction perpendicular to the plane by fixing and supporting the receiving table 16 by fitting or suction support, for example. A structure that can be moved in a three-dimensional direction having Y and Z axes may also be used, or a transfer device that moves in an annular shape may be used. The moving device 14 conveys and moves the article J in a desired direction via the cradle 16. The tables 141 and 142 are driven by, for example, a pulse motor, a step motor, or the like that can control the rotational position and amount of rotation with high accuracy by an electrical signal. In the present embodiment, the moving device 14 is driven via a motor drive control device (not shown) in response to a control signal from the data processing device 12 described later. The conveyance speed of the subject article J determines the movement speed VJ of the subject article. As described later, the temperature correlation data reading or reading time interval corresponding to the amount of infrared rays and the extraction width setting on the pixel frame are set. It becomes the basis of the occasion. In this embodiment, the moving speed of the table is moved and conveyed while maintaining the speed constant at a required speed at least from immediately before the subject article J enters the visual field range of the infrared camera until it completely leaves the visual field range. To do. In the present embodiment, the constant speed at that time is, for example, 10 mm / s to 50 mm / s.

  The temperature difference receiving table 16 detachably receives the subject article J, determines and supports the article J at a fixed position, and forcibly forms a required thermal energy difference region with respect to the article J in this state. In this state, the article J is a temperature difference forming auxiliary means having a positioning function for conveying and moving the article J in the set direction. In this embodiment, for example, the upper surface of the rectangular parallelepiped ceramic block table 165 has good thermal conductivity. For example, a heat transfer plate 166 made of, for example, a metal material is fixed, and a concave portion into which the article J can be detachably attached is formed on the upper surface thereof, and the article J is placed thereon. For attachment of the article J to the heat transfer plate, for example, a method in which a part or all of the heat transfer plate is a magnet and the article J is magnetically adsorbed, or is detachably fixed by air adsorption can be used. A heater 171 such as a rod heater or a panel heater having a heat source is inserted into the block base 165 to heat the heat transfer plate 166 and further heat the subject article to increase the amount of radiant heat energy of the article J.

  The heater 171 is an infrared radiation amount increasing means for heating the subject article J to increase the temperature of the article itself and increase the amount of infrared radiation, and is physically brought into contact with a heating device that emits heat. In addition to heating by direct heat conduction, a heating method by spraying a heating fluid such as gas, liquid, or the like, or heating through electromagnetic waves or the like may be used. The heater 171 is a part of the heat operating device 17 for forming a required temperature difference region in the subject article J, and cooling air is placed on the moving article J placed on a cradle and moving as will be described later. Thus, a desired temperature difference region is formed. In the present embodiment, the heater 171 heats the article through the temperature adjustment device 172 at a heating temperature (for example, 80 ° C. to 120 ° C.) set by an initial setting input to the data processing device 12. In order to form the temperature difference region due to the thermal action through the temperature difference receiving table 16, the receiving table itself may be cooled, and the article J may be further heated from the outside while being cooled. As a means for generating a thermal effect for this purpose, in addition to direct thermal conduction such as contact as described above, a method of thermally stimulating by blowing a gas, liquid or other fluid, and further a thermal effect via electromagnetic waves, etc. An adding method may be used. Further, the temperature difference receiving table itself may be heated and cooled simultaneously to form a required temperature difference region.

  In addition, a cooling device 175 is provided that performs a cooling action on the article J along with heating by the heater 171 during the transfer movement of the article J by the moving device 14. The cooling device 175 is a cooling means for cooling the subject article J so as to apply a reverse thermal action simultaneously with the heating by the heater 171. In this embodiment, the cooling device 175 is above the moving path by the moving device and is an infrared imaging device. The cooling fluid is blown out and supplied in a direction perpendicular to the article J. The cooling device 175 has a fan drive control panel 176 together with a blower fan, a blowout nozzle, etc. (not shown), and receives a control signal from the data processing device 12 to change the fan air volume via the drive control panel 176. The cooling temperature can be set. It is advantageous to use a blowout nozzle as a fluid blowout opening from a straight slit-like nozzle opening because the outline of the temperature difference region can be easily formed. In this embodiment, the cooling fluid is room temperature air, but other pressurized cooling gas or the like may be used. In the present embodiment, for example, cooling by spraying normal temperature air (compressed air: ~ 0.2 MPa) or cold air (5 ° C to 15 ° C) is used. The nozzle opening and the subject article J are spaced apart by about 1 mm to 10 mm, for example, and by simultaneously injecting these cooling (heating) fluids to the subject at a close distance, simultaneous heating and cooling can be effectively performed. I try to do it. The interval between the nozzle port and the article J is not limited to the above, and can be arbitrarily set according to the fluid temperature, the flow velocity, the flow rate, and the like. The direction of the nozzle opening may be jetted so as to blow down at right angles from above to the surface of the subject, but as shown in FIG. It may be set so as to blow down, or may be set so as to blow down like a tailwind from obliquely downward from the upper rear side. Thus, after the cooling fluid is sprayed on the surface of the subject, it can be sprayed so as to spread on the surface of the subject. By spraying the cooling fluid on the upper surface side of the subject heated from the lower surface side in a wide surface shape, a wide range of dose detection by the infrared sensor can be secured. In addition, the nozzle opening of the cooling device of this embodiment is good also as a structure which has arrange | positioned the some square hole or round hole linearly and discontinuously like FIG. 10 (a) and FIG.10 (b).

  The heating device 171 and the cooling device 175 constitute the heat action device 17. By simultaneously applying a heating stimulus to the article J via the heater 171 and a cooling stimulus by the cooling device 175, the cooling stimulus in the cooling device 175 is applied to the surface of the article J locally, in a strip shape, or in a slit shape. As a result, a temperature difference region close to a rectangular shape having a unitary area is formed on the outer edge portion of the portion that is exposed to the cold air. Then, by using a method of cutting out and synthesizing the pixel area corresponding to this portion, the calculation load can be greatly reduced and the calculation speed can be greatly improved.

  The infrared imaging device 18 is an infrared detection unit that detects infrared rays of thermal energy radiated from the article during simultaneous heating and cooling of the subject article J. In this embodiment, opposite thermal actions are simultaneously applied. Then, the amount of infrared radiation from the article in a state where the required temperature difference region is formed is measured, and the measurement data is continuously supplied to the data processing device 12.

In the present embodiment, the infrared imaging device 18 includes an infrared thermograph or an infrared camera that obtains a temperature distribution image or a thermal energy distribution image based on the amount of infrared energy emitted from the article J. The infrared imaging device 18 is, for example, a photosensor such as InSb (indium antimony) or HgCdTe (cadmium mercury telluride), a thermal sensor using a pyroelectric element such as a photoconductive quantum sensor, thermopile, or PZT. Can be used. In the present embodiment, for example, an infrared camera is used as the infrared imaging device 18, and has the imaging element 181 as described above, and supplies data corresponding to the amount of infrared radiation emitted from the article side to the data processing unit 12. To do.

The data processing device 12 is detection means that performs image processing on data from the infrared imaging device 18 to detect the presence / absence of cracks, scratches, dust adhesion, etc. on the article. In this embodiment, the data processing device 12 is connected to, for example, an infrared camera. For example, it is composed of a computer including a general-purpose personal computer. The imaged image data is displayed on the display device 20 so that the operator can visually know the presence or absence of a crack or the like.

FIG. 2 is a block configuration diagram of the data processing device 12. In the figure, the data processing device 12 preprocesses the data before inputting the infrared amount data from the infrared imaging device 18 to the image processing unit. A preprocessing unit 22 for processing, an image processing unit 24 that receives preprocessed data from the preprocessing unit 22 and performs image processing, a storage unit 26 that stores a processing program 28, and a condition prior to system operation And an operation input unit 30 for setting and inputting data, and a control unit 32 for instructing and instructing each unit of the entire data processing apparatus to control functions of each unit of the entire apparatus.

The preprocessing unit 22 reads the infrared amount data from the infrared imaging device 18 and reads it into a plurality of image frames, extracts and generates extracted data from the frame data with a cutout width determined by a predetermined relationship, and extracts the extracted data as an image. It is a preprocessing fetching unit for data supplied to the processing unit 24. In the present embodiment, the preprocessing unit 22 includes a read data processing unit 34, a recording unit 36, and a read / extraction processing unit 38.

  The read data processing unit 34 is data fetching means for reading the infrared amount data from the infrared camera (18) at a required read interval and generating a plurality of read data per unit time. For example, temperature data from an infrared imaging device. Are sequentially read at a required time interval. The reading time interval may be an arbitrary reading interval determined by the processing capability of the computer, but in the present embodiment, for example, the reading time interval is continuously performed at a time interval between 1/5 second and 1/30 second, and a plurality of read data is read. Form. The read data is temporarily stored and held in the storage unit 26 in accordance with the reading order.

  The recording unit 36 is a storage unit that sequentially reads and stores the quantized data sequentially read by the read data processing unit 34 at a required time interval into image frames divided as pixel data.

  The readout / extraction processing unit 38 is a data extraction processing unit that sequentially reads out the pixel data stored in the recording unit 36 and generates extraction data with a predetermined extraction width from each of the image frames. Is extracted and extracted with an extraction width corresponding to the amount of movement of the article determined in correlation with the movement speed of the article and the reading time set at the reading time interval, as described below.

(Formula 1)
Movement speed (V) x reading time (T) (reading time interval) = extraction width (W) (number of pixels)

  For example, if the moving speed of the object is 50 mm / s (50 millimeters per second) and the reading time is 1/10 s (0.1 seconds), the number of frames read per unit time (second) is 10 frames, and the object moves 5 mm. One frame is acquired when Therefore, the data of the article moved in the traveling direction by 5 mm is read out in each image frame. These frame-by-frame data frames moved by 5 mm are recorded for a plurality of frames. Then, the number of pixels along the vertical or horizontal moving direction corresponding to the moving amount of 5 mm of the article is set as the extraction width W (FIG. 7), and extracted from each image frame. At this time, data outside the extracted extraction range is discarded. These extracted data are stored and managed in the order of each frame, and these data are supplied to the image processing unit 24. Since the extracted data is associated in the order of reading by the data processing unit from the infrared camera and is extracted as data corresponding to the amount of movement of the article, the original image frame data is obtained by connecting them together. Can be restored. At this time, since the connection is performed in a state where there is no overlapping portion, the processing load is reduced without specifying the overlapping portion, correction processing, or the like. Further, as shown in FIG. 7, the extracted data is obtained by cutting out a part of the image frame for each row or column having a predetermined width, so that the calculation processing can be greatly reduced and the calculation speed can be improved. . Furthermore, as described later, for example, by detecting and determining the presence or absence of cracks for each piece of strip-shaped extracted data, the detection unit is reduced, the resolution for detection is improved, and the detection accuracy is improved. Can do.

  Furthermore, by setting the extraction width according to the movement amount of the article correlated with the movement speed of the article and the reading time, the detection position of the actually moving article by the infrared camera can be further linked. That is, as shown in FIG. 6, the temperature difference at which infrared data can best be converted into image data among predetermined temperature difference regions due to opposite thermal effects, by matching the visual field region 185 of the infrared camera with the image frame at the time of data extraction. A range (for example, 3 ° C. or more) is set, and a pixel group in the image data corresponding to this portion can be set as the extraction region Re. Therefore, a clear image by infrared rays can be obtained, which contributes to improvement in detection accuracy.

  By moving the table of the moving device 14 as shown in FIGS. 8A and 8B, all the detection areas of the article can be read in the visual field range of the infrared camera, and scanning can be sequentially performed.

  The image processing unit 24 is a data processing unit that receives the extracted data from the read / extract processing unit 38 of the preprocessing unit 22 and processes the data, and detects the presence and position of the defective portion and the position thereof. The imaging data in which the brightness indicating the position and the defective portion is set is generated, and the imaging data is output to the display unit 20. In this embodiment, the average value of the data for each row and each column of the extracted pixel data is calculated, the difference value between the average value and each pixel in the pixel data is replaced for each pixel data, and the difference between them is calculated. It also includes a function for determining the presence or absence of a defective portion or the like by comparison with a threshold value.

  Specifically, in this image processing unit 24, for example, as shown in FIG. 12, (1) a value obtained by averaging the pixels in the vertical and horizontal directions (average) for the extracted data S1 (a) from the read / extract processing unit 38 Value 1, average value 2..., Average value I, average value II. In this case, the average value is an average for each pixel row or column. When the number of pixel data to be averaged exceeds 20, the average value is calculated by equally dividing so that the average pixel data is within 20. (2) Next, as shown in FIG. 13, the difference between each pixel data used for calculating the average value and the average obtained in (1) is calculated. In this case, the opposite difference may be obtained. (3) Then, an appropriate threshold value is provided for the numerical value obtained in (2), and the presence / absence of a defective portion or the like is determined by binarization processing by comparison with the difference. Then, the same processing is performed on each image data, and the processed image data is connected in the order of reading the infrared data of the original article, so that the position of the defect in the product is specified.

  Returning to FIG. 2, the storage unit 26 is for preprocessing steps of data including reading, storing, reading of frames, and extraction processing of infrared amount data from the infrared camera, and for displaying images of temperature zones by image processing of the extraction data. And a processing program 28 for executing the various image processing steps.

  The operation input unit 30 performs various condition input settings. For example, the operation input unit 30 sets the moving speed VJ of the moving device 14, the reading interval H as a sampling interval of infrared amount data from the infrared imaging device, and the viewing range of the camera. This includes setting the extraction position P corresponding to the temperature difference area on the article surface in the corresponding image data, article heating temperature, cooling fan wind speed setting, and the like. When forming the temperature difference region for the article, in the case of cooling or heating by an external fluid etc. at the same time as heating or cooling the article itself, for example, at a temperature such as 80 ° C. where only the thermal action of the article itself is fixed. In some cases, it may be carried out with experimentally determined wind speed on the cold air side, air volume, blowing nozzle angle with respect to the article, distance between the article and the nozzle, etc. Good.

  The control unit 32 reads the conditions from the operation input unit 30, reads the processing unit program 28 of the storage unit 26, controls each part when executing the pre-processing process and the image processing process, and controls the entire process Means, which includes an arithmetic unit CPU and performs necessary arithmetic processing. This control unit 32 is connected to a temperature control device, an inverter, or the like of the heating drive unit (171) and the cooling drive unit (175) when applying a contradictory thermal action to the moving article J, and controls and instructs each thermal action function. .

  Next, a detection method by the article detection system of the embodiment of the present invention will be described based on the flowchart of FIG. First, prior to detection execution, condition input is performed at the operation input unit on the personal computer (12) side (S1). At this time, set values such as the moving speed VJ of the X and Y tables of the moving device 14, the reading interval H of the infrared data, the setting of the extraction position P in the image frame, and the heat action conditions of heating and cooling are input. The heater 171 and the blower (175) are driven, the article J itself is heated by the heater 171 and heated to a set temperature (for example, 80 ° C.) (S2). The cooling fan on the cooling device side impinges cold air on a certain blowing area (L in FIG. 6) in the vicinity of the arrangement position of the infrared imaging device 18 that is fixedly arranged within the field of view 185 of the imaging element of the infrared imaging device. Thus, the angle of the nozzle 175a is fixedly set and the cooling air is blown within the field of view. Next, the capturing of the infrared amount data is started by the infrared camera. At the same time, the X and Y tables of the moving device 14 are driven to move the temperature difference receiving table 16 on which the heated article is mounted toward the detection position where the infrared camera is set (S3). The X and Y tables move at high speed to the detection position, and are conveyed at a constant feed speed (for example, 10 mm / s to 50 mm / s) before or just before the article enters the field of view of the infrared camera of the detection unit. When the article J placed on the temperature difference cradle 16 begins to enter the infrared camera field of view (S4) and passes through the same range, heating and just above the article (for example, the nozzle openings are spaced several millimeters apart). When the cold air blowing from the position is simultaneously received, a required temperature difference region Re is formed within the field of view of the camera. If this temperature difference region is 3 ° C. or higher, for example, it has been proved that the presence or absence of a defective portion or the like can be detected with good accuracy in image processing after data capture.

  In the field of view of the infrared camera, the element 181 efficiently detects the amount of infrared rays when the article J passes through a predetermined temperature difference region Re (FIG. 6) (S5). Actually, a low level dose is detected even before the heated article J enters the visual field range of the infrared camera and is close to a certain range, but when the image is processed as a temperature image. Is determined as other than an article when the amount of infrared rays is below a certain level. The data of the article J by infrared is read at a required time interval H by the read data processing unit 34 of the data processing device 12, and is temporarily stored in the storage unit 26 sequentially in the reading order (S6). Next, the quantized data sequentially read at a required time interval by the read data processing unit 34 is read from the storage unit 26 by the recording unit 36 and sequentially written and recorded in the image frames divided as pixel data. (S7). FIG. 9 shows the writing relationship of the data to the image frame at this time, and the data stored in the order in which the infrared information is read at the required time interval H is F1 (a), F1 (b), F1 ( c)..., F2 (a), F2 (b), F2 (c)... Next, extraction data is generated from each of these image frames at a predetermined position P and with a predetermined extraction width W (S8). Data in each of those image frames other than that extracted is discarded. FIG. 10 illustrates a process of cutting out a portion corresponding to the temperature difference region Re from each image frame. The article is determined by the product of the article moving speed VJ and the reading time TH set by the reading time interval H. 6 is secured in the direction along the moving direction of the article, and the frame is cut out in a direction perpendicular to the moving direction, for example, the temperature in the visual field range of the infrared camera in FIG. It is possible to extract at a position P matched with the difference area Re. This cutout extraction process is performed for each frame F1 (a), F1 (b), F1 (c)..., F2 (a), F2 (b), F2 (c). Sn (α) (n = natural number, α = a, b, c,...) Can be obtained. Then, as shown in FIG. 8, a plurality of scans are performed as necessary so that all the surfaces (upper surfaces) of the article J are detected in the field of view of the infrared camera, and this is performed in the vertical and horizontal directions. Repeat for each direction. Next, in the image processing unit 24, as shown in FIG. 12, an average value is calculated for each row and each column of the extracted data (S9), and a difference value from the average is replaced with each pixel data (S10) (FIG. 12). 13) Compared with a preset threshold value for those difference values, a value exceeding the threshold value is determined to be defective (S11). Then, the respective pixel frames are synthesized (FIG. 11), and the position of the defective portion or the like is specified (S12). The synthesized data is subjected to coloring, correction processing, and the like, and is output to the display device 20 to display an image of the article. Further, only the presence / absence of a defective portion of the article may be notified to the outside by sound, light, vibration, or the like using the synthesized data.

  As described above, the image processing program and the data processing apparatus including the detection method of the defective part or the like of the moving article according to the present invention extract data from the reading data of the article in association with the moving speed of the moving article and the reading time interval. Since the data pre-processed and created is used as a basis for data processing such as image processing, detection of a defective portion or the like can be realized with a simple device configuration and in a short time with high accuracy.

The detection method, the image processing program, and the data processing apparatus of the defective part of the moving article of the present invention are not limited to the above-described embodiments, and changes in the scope without departing from the scope of the claims of the present invention are also included in the present invention. included. For example, in the above-described embodiment, the infrared imaging device 18 is in a fixed state and images a subject in a fixed visual field region in a fixed visual field range. The infrared rays emitted from the subject may be detected while relatively moving. In addition, a moving device may be configured so that a plurality of articles can be moved at the same time by providing corresponding imaging devices and data processing devices at a plurality of detection positions so that a plurality of defective portions can be detected at the same time. . In addition, the image processing method after the pre-processing of the thermal energy data captured from the infrared imaging device is not limited to the above-described difference processing, and may be detection of a defective portion or the like by any data processing that does not reduce the function in the pre-processing step. .

  The detection method, the image processing program, and the data processing device of the defective part of the moving article of the present invention are effective in detecting various raw materials, semi-finished products, cracks on the surface or inside of the product, or defective parts including adhesion of surface foreign matters. It is applicable to.

It is a schematic structure explanatory drawing of the whole system using the detection method of the defective part etc. of the subject article concerning an embodiment of the present invention. FIG. 2 is an explanatory diagram of a block configuration of the system of FIG. 1. FIG. 2 is an enlarged plan explanatory view of a subject article portion in FIG. 1. It is a figure which shows the other nozzle arrangement example of the cooling fluid spraying structure to a to-be-tested object. It is a figure which shows the example of the shape and arrangement | sequence of various nozzle openings of the cooling fluid to a to-be-tested object. It is explanatory drawing which shows the visual field image of an infrared camera. It is explanatory drawing which shows the structure of each image frame, and the data extraction range in the same image frame. (A), (b) is a figure which shows the scanning method in the infrared camera visual field range by the movement by the article | item side. It is explanatory drawing which shows the example of multiple frame structure by the reading of the flame | frame at a predetermined space | interval, and the read order arrangement | sequence of each frame. It is explanatory drawing of the state which performs the extraction position and extraction range from each frame about each frame. It is explanatory drawing which shows the example of a joint composition in the reading order of each extraction data in an image process part. It is explanatory drawing which shows the example of a difference process before the synthetic | combination data joining in an image process part. It is explanatory drawing which shows the example of a difference process before the synthetic | combination data joining in an image process part. It is the flowchart figure which showed the movement of the whole system using the detection method of the defective part etc. of the to-be-examined article which concerns on embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Detection apparatus, such as a defective part of a goods 12 Data processing apparatus 14 Moving apparatus 16 Temperature difference receiving stand 17 Thermal action apparatus 18 Infrared imaging device 20 Display apparatus 22 Pre-processing part 24 Image processing part 26 Storage part 28 Processing program 32 Control part 34 Reading data processing unit 36 Recording unit 38 Reading / extraction processing unit 171 Heater 175 Cooling device 181 Imaging device 185 Infrared camera visual field J Subject article VJ Moving speed Re Temperature difference area W Extraction width H Infrared data reading interval P Image frame Extraction position at R Infrared

Claims (7)

It is a method for detecting a defective part of a moving article, which detects a moving article by a detection means, processes the obtained physical data as an image, and detects a defective part of the article, etc.
Physical data from the moving article that is continuously input by the detection means is read at a required reading interval, and a plurality of read data per unit time is sequentially stored by the storage means,
Read the physical data from the stored article as pixel data into sequentially divided frames,
Extracting from the data of each frame with an extraction width corresponding to the amount of movement of the article correlating with the movement speed of the article and the reading time interval, and generating each pixel data from each frame data,
A method for detecting a defective portion or the like of a moving article, which processes these based on the extracted pixel data to detect a defective portion or the like.   The average value of the data for each row and each column of the extracted pixel data is calculated, the difference value between the average value and each pixel in the pixel data is replaced for each pixel data, and the difference value threshold value is calculated. The method for detecting a defective portion or the like of a moving article according to claim 1, wherein the presence or absence of a defective portion or the like is determined by comparison. The article is subjected to simultaneous heating and cooling thermal elements to form the required temperature differential region,
3. The detection method for a defective portion or the like of a moving article according to claim 1, wherein the detecting means detects thermal energy or temperature detected from the temperature difference region and reads it at a required reading interval. 4. The defective part of the moving article according to claim 1, wherein the detecting means is an infrared imaging means for detecting thermal energy amount from the moving article and generating thermal image data. Detection method. When the article moves on a plane while being heated or cooled, a cooling fluid or a heating fluid is sprayed from the surface to form a temperature difference region,
A frame corresponding to the visual field range of the detection means, and a position corresponding to the temperature difference region in the frame sequentially read out as physical data from the article as pixel data is set as an extraction position in the image frame A method for detecting a defect portion or the like of a moving article according to any one of claims 1 to 4.   An image processing program comprising a step of causing a computer to execute the method for detecting a defective portion or the like of a moving article according to any one of claims 1 to 5. A data processing apparatus having a storage unit in which the program according to claim 6 is installed.

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