TWM616240U - A semiconductor wafer box storage and transportation structure system - Google Patents

Abstract

The present invention is a semiconductor wafer box storage and transportation structure system, which is mainly composed of a wafer box lifting and transporting structure, a wafer box storage rack structure, an arm structure, an arm grabbing wafer box structure, and a wafer box storage The structure is composed of a cassette storage rack structure system suspended on the ceiling, the cassette lifting and transport structure is used to lift the cassette to the inlet and outlet, and the arm structure is used to grab the cassette and transport it by rail The wafer cassette storage structure is used as a precise wafer cassette pick-up and place. Since the wafer cassettes are stored in the wafer cassette storage structure suspended on the ceiling, the system of the present invention saves space and is convenient to pick and place the wafer cassettes. Characteristics.

Description

Semiconductor wafer box storage and transportation structure system

This creation is related to a semiconductor wafer cassette storage and transportation structure system, especially including the wafer cassette lifting and transporting structure, the wafer cassette storage structure, the arm structure, the arm grasping the wafer cassette structure and the wafer The round box storage structure is assembled into a semiconductor storage wafer box structure system.

According to Taiwan No. 107131751, the "wafer cassette storage system" includes a rectangular frame body 10, a lifting device 30, a planar three-axis robot 40, and a man-machine interface 50 of a manipulating unit. The lifting device 30 is on one side of the rectangular frame body 10. The planar three-axis robot 40 is installed in the center of the rectangular frame body 10, and the man-machine interface 50 of the control unit is installed in the side space of the rectangular frame body 10. Although this invention solves the space for storing wafer cassettes, this invention The case still occupies the ground space, reducing the utilization of the space in the factory, and the number of wafer cassettes stored is small and the economic efficiency is not reached.

The main purpose of this creation is to propose a patent application for a semiconductor wafer cassette storage and transportation structure system, which is mainly composed of a wafer cassette lifting and transporting structure, a wafer cassette storage rack structure, an arm structure, and an arm grabbing wafer cassette structure Body and a wafer box storage structure, of which the wafer box lifting and transporting structure system It is a rectangular parallelepiped ladder-like structure, mainly composed of a lifting device structure, a positioning device, and a roller conveying device. The robot is used at the inlet and outlet, and the wafer cassette is transported to the lifting device structure by the roller conveying device. It is in the support frame. The side end surface is equipped with a positioning device as the positioning function of the wafer cassette.

The wafer cassette storage rack structure is composed of track rods, support rods, connecting rods, and auxiliary support rods. Two parallel and equidistant track rods are installed in the center. The two support rods are suspended from the ceiling, and the support rods on both sides are connected to the auxiliary support. The rods are connected by connecting rods, and several long boxes are installed below the two rail rods as storage and retrieval wafer boxes. The arm structure system is composed of an arm structure and an arm base. The arm structure is equipped with a drive belt to drive the arm line rails on both sides, and the arm line rails are inserted into the two sides of the wafer box against the side wings of the wafer box, and then take out or place Wafer box. The arm grabs the wafer cassette structure with the arm structure to take in the wafer cassette, and transports it to the cassette storage structure by rails to automate the picking and placing of semiconductor wafer cassettes.

A: Wafer cassette lifting transportation structure

B: Wafer box storage rack structure

C: Arm structure

C1: Arm structure

C11, C12: arm line rail

C13, C141: drive belt

C14: Wafer box placement seat

C2: Arm base

D: The arm grabs the wafer box structure

D1: Line rail

D11: L-shaped plate

E: Wafer box storage structure

F: belt clip

G: Positioning sensor

H: Lifting screw

M1, M2: Motor

1: Lifting structure frame

2: positioning device

21: Baffle

22: Activity wheel

3, 31, 32: Roller conveyor

4: rail frame

41: track rod

42: U-shaped connecting rod

5: Suspension support rod

6: Auxiliary support rod

61: L-shaped rod

62: Crossbar

63: Triangular block

7: connecting rod

8: storage frame

9: auxiliary block

11,12,13,14,15: support rod

B1: Belt

P: Support plate

P1: Feeding direction

P2: Discharge direction

P3: Feed direction

R1~R6, R7, R8, R9, R10: driving wheel

S, S1, S2: wafer cassette

S11, S3: flanks

S2: positioning block

S’,S’1,S’2: Wafer box group

Figure 1 is a diagram of an embodiment of a wafer cassette lifting and transporting structure of the creation of a semiconductor wafer cassette storage and transportation structure system.

Figure 2 is the front view of the wafer cassette lifting and transporting structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 3 is a schematic diagram of the positioning device of the wafer cassette lifting and transporting structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 4 is a top view of the wafer cassette lifting and transporting structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 5 is the right side view of the wafer cassette lifting and transporting structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 6 is the rear view of the wafer cassette lifting and transporting structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 7 is the left side view of the wafer cassette lifting and transporting structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 8 is a three-dimensional exploded view of the wafer cassette storage rack structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 9 is one of the three-dimensional exploded views of the wafer cassette storage rack structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 10 is one of the three-dimensional exploded views of the wafer cassette storage rack structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 11 is a perspective view of the track frame part of the wafer cassette storage rack structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 12 is a schematic diagram of the auxiliary support rods of the wafer cassette storage rack structure of the creative semiconductor wafer cassette storage and transportation structure system. The L-shaped rods and the cross rods are assembled with triangle blocks.

Figure 13 is a schematic diagram of the storage frame and auxiliary blocks of the wafer cassette storage rack structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 14 is a schematic diagram of the auxiliary support rods and suspension support rods of the wafer cassette storage rack structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 15 is one of the three-dimensional views of the wafer cassette storage rack structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 16 is the second three-dimensional view of the wafer cassette storage rack structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 17 is a top view of the arm structure of the creative semiconductor wafer box storage and transportation structure system.

Figure 18 is a cross-sectional view of the arm structure (A-A) of the creative semiconductor wafer box storage and transportation structure system.

Figure 19 is a cross-sectional view of the arm structure (B-B) of this creative semiconductor wafer box storage and transportation system structure system.

Figure 20 is a cross-sectional view of the arm structure (C-C) of the creative semiconductor wafer box storage and transportation structure system.

Figure 21 is a cross-sectional view of the arm structure (D-D) of the creative semiconductor wafer box storage and transportation structure system.

Figure 22 is a bottom view of the arm structure of the creative semiconductor wafer box storage and transportation structure system.

Figure 23 is a schematic diagram of the arm structure grabbing wafer cassettes of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 24 is the right side view of the arm structure grabbing the wafer cassette of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 25 is one of the top views of the arm base of the creative semiconductor wafer box storage and transportation structure system.

Figure 26 is the front view of the arm base of the creative semiconductor wafer box storage and transportation structure system.

Figure 27 is a cross-sectional view of the arm base (B-B) of the creative semiconductor wafer box storage and transportation structure system.

Figure 28 is a cross-sectional view of the arm base (A-A) of the creative semiconductor wafer box storage and transportation structure system.

Figure 29 is the second top view of the arm base of the creative semiconductor wafer box storage and transportation structure system.

Figure 30 is a bottom view of the arm base of the creative semiconductor wafer box storage and transportation structure system.

Figure 31 is the bottom side view of the arm base of the creative semiconductor wafer box storage and transportation structure system.

Figure 32 is the front view of the wafer cassette structure being grasped by the arm of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 33 is a cross-sectional view of the right side part of the wafer cassette structure being grasped by the arm of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 34 is a cross-sectional view of the left part of the wafer cassette structure by the arm of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 35 is a cross-sectional view of the wafer box storage of the wafer box structure by the arm of the creative semiconductor wafer box storage and transportation structure system.

Figure 36 is a cross-sectional view of the right side part of the wafer box storage of the wafer box structure by the arm grabbing the wafer box structure of the creative semiconductor wafer box storage and transportation structure system.

Figure 37 is a cross-sectional view of the left side part of the wafer cassette storage by the arm grabbing the wafer cassette structure of the creative semiconductor wafer cassette storage and transportation system structure system.

Figure 38 is a schematic diagram of the wafer box storage arrangement of the wafer box structure that the arm grasping the wafer box structure of the creative semiconductor wafer box storage and transportation structure system.

Figure 39 is a schematic diagram of the wafer cassette storage and positioning of the wafer cassette structure by the arm of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 40 is a schematic diagram of the right part of the wafer cassette storage arrangement of the wafer cassette structure by the arm of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 41 is a schematic diagram of the left part of the wafer cassette storage arrangement of the wafer cassette structure by the arm of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 42 is a side cross-sectional view of the structure of the wafer cassette being grasped by the arm of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 43 is a side cross-sectional view of the structure of the wafer cassette grasped by the arm of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 44 is a top view of the structure of the wafer cassette grasped by the arm of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 45 is a schematic diagram of the right part of the top view of the structure of the wafer cassette grasped by the arm of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 46 is a schematic diagram of the left part of the top view of the structure of the wafer cassette grasped by the arm of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 47 is a schematic diagram of the unstorage wafer cassette structure of the wafer cassette storage structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 48 is the front view of the wafer cassette storage structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 49 is a schematic diagram of the right part of the wafer cassette storage structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 50 is a schematic diagram of the right part of the wafer cassette storage structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 51 is a top view of the wafer cassette storage structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 52 is a cross-sectional view of the left side of the wafer cassette storage structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 53 is a schematic diagram of the right part of the wafer cassette storage structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 54 is a partial schematic diagram of the left side of the wafer cassette storage structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 55 is a schematic diagram of the lifting structure of the left side of the wafer cassette storage structure of the creative semiconductor wafer cassette storage and transportation structure system.

Figure 56 is a top view of the location of the wafer cassette storage structure for the storage wafer cassette of the creative semiconductor wafer cassette storage and transportation structure system.

This creation is a semiconductor wafer box storage and transportation structure system, which is mainly composed of wafer box lifting and transporting structure A, wafer box storage rack structure B, arm structure C, arm grabbing wafer box structure D and The wafer cassette storage structure E is composed of the wafer cassette lifting transport structure A which is a rectangular parallelepiped ladder structure, which is mainly composed of a lifting structure frame 1, a positioning device 2, and a roller conveying device 31, 32, as shown in Figure 1~ The lifting structure 1 shown in 7 is a long box lifting structure 1 composed of several supporting rods 11, 12, 13, 14, 15, in which the side end of the supporting rod 11 is equipped with a setting device 2 which is composed of a baffle 21 Assemble with the movable wheel 22, and serve as the side wing S11 that supports the wafer cassette S1. The wafer cassettes S1 and S2 are placed above the roller conveyors 31 and 32. Therefore, robots are used to transport at the inlet and outlet ports. Wafer cassettes S1 and S2 are transported to The lifting structure frame 1 uses the roller conveyor 31 to transport the wafer cassette S1 in the feeding direction P1, and the roller conveyor 32 to transport the wafer cassette S2 in the discharge direction P2, and the wafer cassette S1 enters the wafer in the feeding direction P3. Round box storage structure E.

As shown in Figures 8-16, the wafer cassette storage rack structure B is composed of a track frame 4, a suspension support rod 5, an auxiliary support rod 6, a connecting rod 7 and a storage frame 8, with a track frame 4 installed in the center. The wafer cassette S1 is transported and walked. The suspension support rods 5 on both sides are suspended from the ceiling. The suspension support rods 5 on both sides are connected to the auxiliary support rod 6, and the connecting rod 7 is used as the connection to install the storage frame 8 above the track frame 4 as The storage and retrieval wafer cassette placement area, as shown in Figure 11, the rail frame 4 is assembled by the rail rods 41 on both sides and the central U-shaped connecting plate 42. As shown in Figure 12, the auxiliary support rod 6 is composed of L-shaped The rod 61 and the cross rod 62 are assembled with each other by the triangular block 63. FIG. 13 shows a schematic diagram of the separation of the storage frame 8 and the auxiliary block 9, and FIG. 14 refers to a schematic diagram of the auxiliary support rod 6 and the suspension support rod 5.

As shown in Figure 17~24, the arm structure C is composed of the arm structure C1 and the arm base C2. The arm structure C1 is an L-shaped body installed on both sides of the wafer cassette holder C14, inside the wafer cassette holder C14 Drive wheels R7 and R8 are installed on both sides to drive the drive belt C141, and the arm structure C1 is equipped with a drive belt C13 that passes through the drive wheels R1~R6 to drive the drive belt C13, and the drive drives the arm rails C11, C12 on both sides, The arm line rails C11 and C12 are inserted on both sides of the wafer cassette S on both sides of the wafer cassette S and facing the side wing S3 of the wafer cassette S, and the cassette S is taken out or placed. As shown in Figure 19, the arm structure C1 is installed at the bottom left A lifting screw H. As shown in Figures 25-29, the arm base C2 is installed at the bottom of the arm structure C1, a motor M1 is installed in the center, and a positioning sensor G is installed on one side of the motor M1, and one end is installed There is a motor M2 and a belt clamp F, and the belt clamp F clamps the belt to drive the arm structure C1.

As shown in Figure 32~46, the arm grabs the cassette structure D, the cassette S is raised to the cassette storage rack structure B via the cassette lifting and transporting structure A, and the wafer is transported by the roller conveyor 3 Box S, by the arm structure The arm line rails C11 and C12 of C1 grab the wafer cassette S on the roller conveyor 3, and install a line rail D1 on the left side of the arm base C2 under the arm structure C1 with the L-shaped plate D11 as the driving arm structure C to walk The rail frame 4 is shown in Figures 33 and 34. Figures 35 to 46 show that the arm structure C of the arm grabbing the cassette structure D stores the cassette S into a cassette group S', and installs driving wheels R9 on the inner side of the track, and R10 is driven by the belt B1 , Where the wafer cassette S is placed at the four corners and is equipped with positioning blocks S2 as the positioning function of the wafer cassette S. As shown in FIG. A supporting plate P and a U-shaped connecting plate 42 of the track frame 4 are installed at the place.

As shown in Figures 47-56, the wafer cassette storage structure E is suspended from the ceiling by the suspension support rod 5 and the auxiliary support rod 6, and the wafer cassette S is placed on the storage frame 8 by the arm structure C, as shown in FIG. Figures 52 to 56 show that the central arm structure C between the suspension support rods 5 grabs the wafer cassette S and places it on the left storage frame 8 to form a wafer cassette group S'1, which is placed on the right for storage A wafer cassette group S′2 is formed on the frame 8, and the wafer cassette S is placed on the storage frame 8, and four corners are equipped with positioning blocks S2 as storage for fixing the wafer cassette S.

This creation is a kind of semiconductor wafer box storage and transportation structure system, which has met the patent requirements. Today, I filed a patent application in accordance with the law.

C1: Arm structure

C11, C12: arm line rail

C13: Drive belt

S: Wafer box

S1: Flank

Claims (5)

A semiconductor wafer cassette storage and transportation structure system, which includes a wafer cassette lifting transportation structure, a wafer cassette storage rack structure, an arm structure, an arm grabbing wafer cassette structure, and a wafer cassette storage structure ,in, -The wafer cassette lifting and transportation structure is a rectangular parallelepiped ladder-like structure, which is mainly composed of a lifting structure frame, a positioning device, and a roller conveying device. The lifting structure frame is a long box lifting structure assembled by several supporting rods. Rack, one of the support rods is equipped with several positioning devices on the side end surface, as the left side wing of the wafer cassette, and the wafer cassette is placed above the roller conveying device, and the robot is used to transport the wafers at the inlet and outlet The box is transported to the lifting structure by the roller conveying device, the wafer cassette is transported by the roller conveying device according to the feeding direction, and the wafer cassette is conveyed by the roller conveying device according to the discharging direction; -The wafer cassette storage rack structure is composed of a track frame, a suspension support rod, an auxiliary support rod, a connecting rod and a storage frame. A track frame is installed in the center for wafer cassette transportation and walking, and support rods are suspended on both sides Suspended from the ceiling, the suspension support rods on both sides are connected to the auxiliary support rods, and the storage frame is installed above the track frame as the storage and retrieval wafer cassette storage area with the connecting rod as the connection;, -The arm structure is composed of an arm structure and an arm base. The arm structure is an L-shaped body and is installed on both sides of the wafer cassette placement seat. Drive wheels are installed on both sides of the wafer cassette placement seat to drive the driving belt. A drive belt is installed inside the arm structure to drive the drive belt through the drive wheels, and the drive drives the arm line rails on both sides, and the arm line rails are inserted into the two sides of the wafer cassette on both sides to the side wings of the wafer cassette, and take it out Or place the wafer cassette, the arm base is installed at the bottom of the arm structure as a carrying arm structure; -The arm grabs the wafer cassette structure, the wafer cassette is raised to the cassette storage rack structure via the cassette lifting and transporting structure, and the wafer cassette is transported by the roller conveyor, which is grabbed by the arm line rail of the arm structure The wafer cassette on the roller transport device, and a linear rail is installed on the left side of the arm base under the arm structure with an L-shaped plate and the belt is used as a belt to drive the arm structure to walk on the rail frame; and -The wafer cassette storage structure is suspended from the ceiling with suspension support rods and auxiliary support rods, and the wafer cassette is placed on the storage frame by the arm structure, and the arm structure is centrally tied between the suspension support rods After grabbing the wafer cassette, place it on the left storage frame to form a wafer cassette group, and place it on the right storage frame to form a wafer cassette group. The wafer cassette is placed on the storage frame and has four corners. There is a positioning block as a storage and storage for fixing the wafer cassette; the wafer cassette is transported from the cassette lifting and transporting structure to the cassette storage rack structure suspended on the ceiling, and the arm structure is used to grab it with the arm The wafer box is stored in the wafer box storage structure as the pick and place of the wafer box. The semiconductor wafer cassette storage and transportation structure system according to claim 1, wherein the positioning device is assembled on the support rod with the baffle and the movable wheel. The semiconductor wafer cassette storage and transportation structure system described in claim 1, wherein the rail frame is assembled by rail rods on both sides and the central U-shaped connecting plate, and the auxiliary support rods are mutually formed by L-shaped rods and crossbars with triangular blocks. Assemble, the storage frame is assembled with the auxiliary block, and the auxiliary support rod and the suspension support rod are assembled with each other. The semiconductor wafer cassette storage and transportation structure system according to claim 1, wherein the arm structure of the arm grabs the wafer cassette structure to store the wafer cassettes to form a wafer cassette group, and the wafer cassettes are placed at four corners A positioning block is installed at the location as the positioning function of the wafer cassette. The wafer cassette is on the roller conveying device, and a support plate and a U-shaped connecting plate of the track frame are installed at the entrance of the track frame. In the semiconductor wafer cassette storage and transportation structure system described in claim 1, a motor is installed in the center of the arm base, and a positioning sensor is installed on the side of the motor, and the motor and belt are installed on the side end surface The belt clip clamps the belt to drive the arm structure.

Images