TWM613552U - Micro lens module improvement for light sensor - Google Patents
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Abstract
一種光感測器之微透鏡模組改良,係於光感測器上設有光電二極體(photodiode),以將外部射入的光線轉換成電子信號,所述光電二極體(photodiode)的上端面設有一微透鏡模組;其特徵在於:所述微透鏡模組係由多數微透鏡或多數微透鏡陣列所組成者,藉此達到射入光電二極體(photodiode)的光線不論是小角度光或大角度光,均可透過該微透鏡模組達到射入光線的均勻化,以此提升光感測器之精準感測與判讀者。 An improvement of the micro lens module of the light sensor, which is provided with a photodiode on the light sensor to convert the light incident from the outside into an electronic signal. The photodiode There is a micro lens module on the upper end surface; it is characterized in that: the micro lens module is composed of a plurality of micro lenses or a plurality of micro lens arrays, so as to achieve whether the light entering the photodiode (photodiode) is Both small-angle light and large-angle light can achieve uniformity of the incident light through the microlens module, thereby improving the precise sensing and judgment of the light sensor.
Description
本新型係有關一種光感測器之微透鏡模組,特別是指於光感測器之光電二極體(photodiode)上端面設有由多數微透鏡或多數微透鏡陣列所組成之微透鏡模組。 This new model relates to a microlens module of a photo sensor, especially a photodiode (photodiode) of the photo sensor with a microlens model composed of a plurality of microlenses or a plurality of microlens arrays. group.
隨著電子科技的快速發展,利用光敏元件將光訊號轉換為電信訊號的光感測器(Light Sensor),應用範圍日漸廣泛,舉凡智慧型手機、平板電腦、數位單眼相機、穿戴式運動裝置以及健身裝置等都是被大量應用的相關產品。 With the rapid development of electronic technology, Light Sensors, which use photosensitive elements to convert light signals into telecommunication signals, are increasingly used in a wide range of applications, such as smart phones, tablet computers, digital single-lens cameras, wearable sports devices, and Fitness devices, etc. are related products that are widely used.
如第1、2圖所示,習見光感測器100,其表面除了形成必要的電路佈局,必須設置至少一光電二極體101,藉由光電二極體101收到光訊號時,將光訊號轉變成電信訊號的特性,達到監測或控制之目的。如圖所示,為了提昇光電二極體101接收光線的準確度,光電二極體101的上端面會再設置一微透鏡102,使光線會先通過微透鏡102聚焦再射入光電二極體101以增加其收光量,進而提高感測的準確性。然而,隨著電子產品小型化的發展,以及
因應封裝的扁平化要求,入射光角度超過60度已然是未來的趨勢。以現有製程來說,傳統透過降低鍍膜膜層的結構及厚度的作法僅能解決部份問題,例如第3圖係鍍膜厚度為5um而入射光角度分別為0度、5度、10度、15度、20度、25度、30度及35度的光譜示圖;第4圖係鍍膜厚度降到0.6um,由上而下入射光角度分別為0度、10度、20度、30度、40度、50度及60度的光譜示圖,第5圖則是使用特殊顏料鍍膜,分別使用藍光、綠光及紅光而入射光角度分別為0度、10度、20度、30度、40度、50度及60度的光譜示圖。該等光譜示圖顯示出,以大角度光入射時多會造成光譜偏移的現象,實有改善之必要。
As shown in Figures 1 and 2, in addition to forming the necessary circuit layout on the surface of the
創作人有鑑於前述先前技術之缺點,乃依其從事各種相關製造經驗和技術累積,針對上述缺失悉心研究各種解決的方法,在經過不斷的研究、實驗與改良後,終於開發設計出本新型之一種全新光感測器之微透鏡模組改良,期能摒除先前技術所產生之缺失。 In view of the aforementioned shortcomings of the prior art, the creators are engaged in various related manufacturing experience and technology accumulation, and carefully research various solutions to the above-mentioned shortcomings. After continuous research, experimentation and improvement, they finally developed and designed a new type of this new type. The improvement of the micro-lens module of the new light sensor is expected to eliminate the defects caused by the previous technology.
因此,本新型旨在提供一種光感測器之微透鏡模組改良,係於光感測器之光電二極體(photodiode)上端面設有由多數微透鏡或多數微透鏡陣列所組成之微透鏡模組者。 Therefore, the present invention aims to provide an improved micro-lens module of a photo sensor. The photodiode (photodiode) of the photo sensor is provided with a micro lens composed of a plurality of microlenses or a plurality of microlens arrays. Lens module.
依本新型之光感測器之微透鏡模組改良,藉由 在光電二極體(photodiode)的上端面形成多數微透鏡或多數微透鏡陣列,可以將側向入光時的光源導正,以達到大角度入光時也可以收到正確的光譜的要求,進而使光電二極體接收的光訊號更為準確,為本新型之次一目的。 According to the improvement of the micro lens module of the light sensor of this new type, by Many microlenses or many microlens arrays are formed on the upper end surface of the photodiode, which can guide the light source when the light is incident from the side, so as to achieve the requirement of receiving the correct spectrum when the light is incident at a large angle. Furthermore, the optical signal received by the photodiode is more accurate, which is the second purpose of this new type.
依本新型之光感測器之微透鏡模組改良,透過在光電二極體(photodiode)上端面設置包含多數微透鏡或多數微透鏡陣列的微透鏡模組,可應用於3D感測的飛時測距(Time of Flight,ToF)、影像感測器(Image sensor)或環境光感測器(Ambient light sensor),為本新型之再一目的。 According to the improvement of the micro lens module of the photo sensor of the present invention, by arranging a micro lens module containing a large number of micro lenses or a large number of micro lens arrays on the upper end of the photodiode, it can be applied to the flying of 3D sensing. Time of Flight (ToF), Image sensor or Ambient light sensor are another purpose of the new model.
依本新型之光感測器之微透鏡模組改良,設於光電二極體上端面的微透鏡陣列(Microlens array)可以為1至500個,每一微透鏡陣列中的微透鏡數量可以為1至100,000顆,為本新型之又一目的。 According to the improvement of the microlens module of the photo sensor of the present invention, the number of microlens arrays (Microlens array) arranged on the upper end of the photodiode can be 1 to 500, and the number of microlenses in each microlens array can be 1 to 100,000, which is another purpose of the new model.
依本新型之光感測器之微透鏡模組改良,設於光電二極體上端面的微透鏡陣列,是以晶圓級製程(wafer level process)製作,採用正型光阻(Positive PR)或負型光阻(Negative PR)經黃光製程圖形化後,再以高溫回焊(thermal reflow)或以圖形化後乾蝕刻(photo-etching)成型,為本新型之又一目的。 According to the improvement of the micro-lens module of the photo sensor of the present invention, the micro-lens array arranged on the upper end of the photodiode is manufactured by a wafer level process and adopts positive photoresist (Positive PR) Or the negative photoresist (Negative PR) is patterned by the yellow light process, and then formed by thermal reflow or patterned dry etching (photo-etching), which is another purpose of the new model.
依本新型之光感測器之微透鏡模組改良,設於光電二極體上端面的多數微透鏡,每一微透鏡的尺寸可為0.3μm至500μm,各微透鏡之間的間距(gap)可以從無間距 (zero gap)至300μm的間距,微透鏡(Microlens)的曲率半徑(curvature)則可以從0.1μm至1000μm,為本新型之又一目的。 According to the improvement of the microlens module of the photo sensor of the present invention, most of the microlenses arranged on the upper end surface of the photodiode, the size of each microlens can be 0.3μm to 500μm, and the gap between the microlenses (gap ) Can be from no spacing (zero gap) to 300μm, the curvature radius of the microlens (microlens) can be from 0.1μm to 1000μm, which is another purpose of this new type.
為便 貴審查委員能對本新型之目的、形狀、構造裝置特徵及其功效,做更進一步之認識與瞭解,茲舉實施例配合圖式,詳細說明如下: In order to facilitate your reviewer to have a further understanding and understanding of the purpose, shape, features and effects of the structure and device of the present invention, a detailed description is given as follows:
100:光感測器 100: light sensor
101:光電二極體 101: photodiode
102:微透鏡 102: Micro lens
200:光感測器 200: light sensor
300:光電二極體 300: photodiode
400:微透鏡模組 400: Micro lens module
41、42、43:微透鏡 41, 42, 43: micro lens
510:矽晶圓 510: silicon wafer
520:光阻層 520: photoresist layer
530:線路圖案 530: Line pattern
540:光學薄膜 540: Optical film
第1圖為習見光感測器之平面示意圖。 Figure 1 is a schematic plan view of a conventional light sensor.
第2圖為習見光感測器上設置微透鏡的剖面示意圖。 Figure 2 is a schematic cross-sectional view of a conventional light sensor with a microlens.
第3圖為習見光感測器之第一光譜示意圖。 Figure 3 is a schematic diagram of the first spectrum of a conventional light sensor.
第4圖為習見光感測器之第二光譜示意書。 Figure 4 is a schematic diagram of the second spectrum of the conventional light sensor.
第5圖為習見光感測器之第三光譜示意圖。 Figure 5 is a schematic diagram of the third spectrum of the conventional light sensor.
第6圖為本新型之光感測器之微透鏡模組改良的平面示意圖。 Figure 6 is a schematic plan view of the improved microlens module of the new light sensor.
第7圖為本新型之光感測器之製作流程示意圖。 Figure 7 is a schematic diagram of the manufacturing process of the new light sensor.
第8圖為本新型之光感測器實施時與習見採用單顆微透鏡之光譜示意圖。 Figure 8 is a schematic diagram of the spectrum of a single microlens used in the implementation of the new light sensor and the conventional one.
本新型之光感測器之微透鏡模組改良,如第6圖所示,係設有一光感測器200,光感測器200的表面除了必要的電路佈局,至少設有一光電二極體
(photodiode)300,光電二極體(photodiode)300的上端面設有一微透鏡模組400,該微透鏡模組400為包含多數微透鏡41、42、43...或多數微透鏡陣列所構成者。藉由多數微透鏡41、42、43...或多數微透鏡陣列的設置,可以將側向入光時的光源導正,以達到大角度入光時也可以收到正確的光譜的要求。而且光線不論是來自小角度光或大角度光,均可以透過該等多數微透鏡41、42、43...或多數微透鏡陣列達到均勻化,進而提高光電二極體(photodiode)300的感測效能。
The improved micro-lens module of the photo sensor of the present invention, as shown in Figure 6, is provided with a
本新型之光感測器之微透鏡模組改良,由於外部射入的光線均可透過多數微透鏡41、42、43...或多數微透鏡陣列均勻化,其得應用於需要高度感測而以感測影像為主的影像感測器(Image sensor),或者用以感測環境光變化為主的環境光感測器(Ambient light sensor),甚至用於感測3D變化的飛時測距(Time of Flight,ToF)。
The micro-lens module of the light sensor of the new type is improved. Since the light from the outside can pass through most of the
本新型之光感測器之微透鏡模組改良,於光電二極體(photodiode)300上端面形成的多數微透鏡或微透鏡陣列,係可經由晶圓級製程(wafer level process)製作,採用正型光阻(Positive PR)或負型光阻(Negative PR)經黃光製程圖形化後,再以高溫回焊(thermal reflow)或以圖形化後乾蝕刻(photo-etching)成型。
The micro-lens module of the photo sensor of the present invention is improved. Most of the micro-lens or micro-lens array formed on the upper end surface of the
所述形成於光電二極體(photodiode)300上端
面的多數微透鏡41、42、43...或微透鏡陣列,其微透鏡陣列(Microlens array)可以為1至500個,每一微透鏡陣列中的微透鏡數量可以為1至100,000顆。每一微透鏡的尺寸可為0.3μm至500μm,各微透鏡之間的間距(gap)可以從無間距(zero gap)至300μm的間距,微透鏡(Microlens)的曲率半徑(curvature)可以從0.1μm至1000μm。
The formed on the upper end of the
請參照第7圖所示,本新型之光感測器之微透鏡模組改良,其製造流程包括:(a)晶圓清洗製程:清洗於內部設有光電二極體300之矽晶圓510表面;(b)光阻塗佈製程:以光阻塗佈機(Spin coater),藉由真空吸座吸住矽晶圓,由上方滴入光阻液並且使矽晶圓高速旋轉,使光阻液被離心力甩開,以在矽晶圓510的表面形成光阻層520;(c)曝光顯影製程:使用光學曝光系統,以紫外光照射光罩再投影到光阻層520,被紫外光照射過的區域光阻化學鍵結被破壞,使光阻容易被化學藥品溶解掉,光學曝光系統中的透鏡組則將光罩上的圖形縮小投影至矽晶圓510上,使矽晶圓上的光阻層形成線路圖案530;(d)光學鍍膜製程:經蒸鍍製程,於裸露的光阻層及光電二極體300上方被覆一光學薄膜540;(e)光阻去除製程:使用去光阻液將矽晶圓上殘留的光阻溶解並去除,使矽晶圓510僅保留被覆光電二極體300的光學薄膜540。(f)微透鏡陣列形成製程:於光學薄膜540及其周邊表面形成包含多數微透鏡41、42、43或多數微
透鏡陣列的微透鏡模組400。
Please refer to Figure 7, the improved micro-lens module of the photo sensor of the present invention, its manufacturing process includes: (a) Wafer cleaning process: cleaning
請參照第8圖所示,本新型之光感測器之微透鏡模組改良,藉由在光電二極體(photodiode)300的上端面形成包括多數微透鏡41、42、43...或多數微透鏡陣列的微透鏡模組400,實施時,以BP940nm BW20nm AOI分別為0度、10度、20度,以及使用多數微透鏡組(Microlens added)的比較例,可明顯看出當入射光的角度為0度、10度、20度角,尤其是大角度入射光時(如圖示中AOI-20相對之虛線部份),光譜會明顯向左位移。相對地,本新型使用多數微透鏡41、42、43...或多數微透鏡陣列的微透鏡模組400(如圖示中Microlens added相對之線條部份),則有明顯改善。當其應用於飛時測距(Time of Flight,ToF)時,即能使飛時測距(Time of Flight,ToF)的感測效能獲得提昇。
Please refer to Figure 8, the micro lens module of the photo sensor of the present invention is improved by forming a large number of
綜合以上所述,本新型之光感測器之微透鏡模組改良,確實具有前所未有之創新構造,其既未見於任何刊物,且市面上亦未見有任何類似的產品,是以,其具有新穎性應無疑慮。另外,本新型所具有之獨特特徵以及功能遠非習用所可比擬,所以其確實比習用更具有進步性,而符合我國專利法有關新型專利之申請要件之規定,乃依法提起專利申請。 In summary, the improved micro-lens module of the light sensor of the present invention has an unprecedented innovative structure. It has not been seen in any publications, and there is no similar product on the market. Therefore, it has Novelty should undoubtedly be considered. In addition, the unique features and functions of this new model are far from comparable to those of conventional ones, so it is indeed more progressive than conventional ones, and it meets the requirements of the patent law of my country regarding the requirements for applying for a new type of patent. A patent application is filed in accordance with the law.
以上所述,僅為本新型較佳具體實施例,惟本新型之構造特徵並不侷限於此,任何熟悉該項技藝者在本 新型領域內,可輕易思及之變化或修飾,皆可涵蓋在以下本案之專利範圍。 The above are only the preferred specific embodiments of the present invention, but the structural features of the present invention are not limited to this. In the new field, changes or modifications that can be easily thought of can be covered by the following patent scope in this case.
200:光感測器 200: light sensor
300:光電二極體(photodiode) 300: photodiode
400:微透鏡模組 400: Micro lens module
41、42、43:微透鏡 41, 42, 43: micro lens
Claims (4)
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