TWM612787U - Grating type luminous efficiency detection device - Google Patents

Abstract

A grating-type luminous efficiency detection device includes an object platform, a light source, an objective lens, a grating and an image sensing element. The storage platform is used to place a test sample. The light source is arranged on one side of the storage platform. The objective lens is arranged on one side of the object platform, and the objective lens can be moved for focusing. The grating is arranged on one side of the objective lens. The image sensing element is arranged on one side of the grating.

Description

Grating type luminous efficiency detection device

This creation is related to a grating-type luminous efficiency detection device.

Micro LED display technology is the most important display technology in the next generation. The Micro LED Display produced by this technology has a higher performance than TFT-LCD displays and OLED displays. Brightness, low power consumption, high resolution and high saturation, etc. The principle of Micro LED display technology is to miniaturize and array the LED structure design, and reduce the LED size to below 100 microns (that is, one percent of the original LED). For a large display with a 4K resolution, at least 24 million red, blue, and green micro-light-emitting diode (Micro LED) chips are required. Is each red, blue-green and micro-light-emitting diode (Micro LED) chip correct? Luminescence, luminous intensity and even luminous wavelength will greatly affect the image quality of Micro LED Display, so the inspection of Micro LED chips will be extremely important in the production process. A process. Due to the extremely large number of Micro LED chips used in Micro LED Displays and the extremely small micro LED chips, it is time-consuming and difficult to test. At present, there is no fast and accurate method for testing whether a micro-light-emitting diode (Micro LED) chip emits light and its luminous intensity.

In view of this, the main purpose of this creation is to provide a raster-style luminous effect The rate detection device does not need to be energized and contact with the Micro LED chip, that is, it can quickly detect whether the Micro LED chip is luminous and its luminous intensity. It has the advantages of fast speed and high accuracy. , Which can greatly improve the detection speed and reliability.

The grating-type luminous efficiency detection device of this invention includes an object platform, a light source, an objective lens, a grating and an image sensing element. The storage platform is used to place a test sample. The light source is arranged on one side of the storage platform. The objective lens is arranged on one side of the object platform, and the objective lens can be moved for focusing. The grating is arranged on one side of the objective lens. The image sensing element is arranged on one side of the grating.

The magnification of the objective lens can be 5 times, 10 times, or between 5 and 10 times.

The light source is a laser light source or an LED light source.

The wavelength of the laser light source can be 375nm, 405nm or 532nm, and the wavelength of the LED light source can be 375nm, 405nm or 532nm.

The grating-type luminous efficiency detection device of this invention may further include a single-mode fiber and a fiber collimator. The single-mode fiber is set on one side of the light source, and the fiber collimator is set on one side of the single-mode fiber. The light beam is transmitted through the single-mode fiber, and then irradiated to the test sample through the fiber collimator.

The grating is a transmissive grating or a reflective grating.

The image sensing element can move along an axis.

The image sensor is a charge coupled device (CCD) or a complementary metal oxide semiconductor (CMOS) image sensor.

The resolution of the image sensor element is 1024 pixels×1024 pixels or 2048 pixels×2048 pixels.

In order to make the above-mentioned purpose, features, and advantages of this creation more obvious and understandable, the following Wen specially gives a detailed description of the preferred embodiments in conjunction with the accompanying drawings.

1: Grating type luminous efficiency detection device

10: Storage platform

20: light source

201: Laser

2011: laser beam

202: Single-mode fiber

203: Fiber collimator

30: Objective

40: grating

50: Image sensor

DUT: test sample

M: mirror

VLB: Visible light

Figure 1 is a schematic diagram of an embodiment of a grating-type luminous efficiency detection device based on this creation.

Figure 2 is a schematic diagram of the optical path of the embodiment of the grating-type luminous efficiency detection device according to the present creation during testing.

Some materials can be directly irradiated by a high-energy short-wavelength light source to cause the material to emit fluorescence. This process of luminescence excited by light is called photoluminescence. By analyzing the excited fluorescence, the material can be known from the spectral characteristics. Important information such as the characteristics of the carrier, the carrier transmission path or the carrier life cycle, so photoluminescence is often used to detect the electronic structure of the material. The advantage of this method is that it does not need to contact the material and does not damage the material. The grating-type luminous efficiency detection device of this creation uses the principle of photoluminescence to determine whether the test sample can emit light, the luminous intensity, and the luminous wavelength by measuring the fluorescence emitted by the test sample, especially for micro-luminescence two The inspection of the polar body (Micro LED) chip can greatly shorten the inspection time.

Please refer to Figure 1. Figure 1 is a schematic diagram of an embodiment of the grating-type luminous efficiency detection device created by this invention. The grating-type luminous efficiency detection device 1 includes an object platform 10, a light source 20, an objective lens 30, a grating 40 and an image sensor 50.

The storage platform 10 is used to place a test sample (not shown), and the test sample may be a micro-light-emitting diode (Micro LED) chip.

The light source 20 is arranged on one side of the object platform 10. The light source 20 includes a laser 201, a single-mode fiber 202, and a fiber collimator 203. One end of the single-mode fiber 202 is connected to the laser 201 is connected, and the other end is connected to the fiber collimator 203. The laser 201 emits laser light. The laser light is first coupled into the single-mode fiber 202, and the single-mode fiber 202 transmits the laser light to the other end, and finally exits through the fiber collimator 203 .

The objective lens 30 is arranged on one side of the object platform 10, and the magnification of the objective lens 30 can be 5 times, 10 times, or between 5 and 10 times. The objective lens 30 is used to focus visible light so that the test sample (not shown) can be clearly imaged. You can also use other magnification objectives, which should also fall within the scope of this creation.

The grating 40 is arranged on one side of the objective lens 30, and the grating 40 is used to measure the frequency spectrum. The grating 40 can be a transmissive grating or a reflective grating.

The image sensor 50 is disposed on one side of the grating 40. The image sensor 50 can be a charge coupled device (CCD) or a complementary metal oxide semiconductor (CMOS) image sensor. The image sensor 50 receives data from The visible light of the objective lens 30 converts the visible light into an image signal.

The following will further explain the grating-type luminous efficiency detection device applied to the micro light emitting diode (Micro Light Emitting Diode) wafer detection process.

Please refer to FIG. 2. FIG. 2 is a schematic diagram of the optical path of the embodiment of the grating-type luminous efficiency detection device according to the present invention during testing. First place a reflector M on the object platform 10, turn on the laser 201 power, make the laser 201 emit laser light, the laser light is first coupled into the single-mode fiber 202, the single-mode fiber 202 transmits the laser light to the other end, and finally through The optical fiber collimator 203 emits the laser beam 2011, and then the optical fiber collimator 203 is adjusted to make the laser beam 2011 directed to the mirror M, and then the objective lens 30 is moved to adjust the distance between the objective lens 30 and the reflector M so that the reflector M is on The area irradiated by the laser beam 2011 can be clearly imaged on the image sensor element 50. At this time, the image sensor element 50 will simultaneously output image signals to a control computer (not shown), and then the image sensor element 50 along a line The axis (not shown) moves so that the image sensor 50 measures the spectral image, and the computer (not shown) can be controlled to simultaneously measure the spectral image signal I _{O of the} unplaced test sample, and finally the laser 201 is turned off. It is worth noting that after the light passes through the grating, some of the light will be deflected outwards, which may cause the image sensor 50 not to receive it. Therefore, the image sensor 50 needs to be moved to receive the light.

Then first move the mirror M away from the stage 10, and then place a test sample DUT, such as a micro-light emitting diode (Micro LED) chip on the stage 10, turn on the power of the laser 201, so that the laser beam 2011 is irradiated Micro LED chip, when the laser beam 2011 irradiates the Micro LED chip, based on the photoluminescence function, the Micro LED chip will emit Visible light VLB, visible light VLB first passes through the objective lens 30, and then through the grating 40, and finally focuses the image on the image sensor 50. The image sensor 50 outputs the image signal to the control computer (not shown), and then the image sensor 50 moves along an axis (not shown), so that the image sensor 50 can measure the spectral image of the visible light VLB emitted by the Micro LED chip, which can be measured at the same time by controlling the computer (not shown) The visible light VLB spectral image signal I _E emitted by the Micro LED chip, and finally the laser 201 power is turned off.

The intensity of the spectral image signal I _E measured by the grating 40 can represent the intensity of visible light emitted by a micro-light emitting diode (Micro LED) chip. The measured I _E /I _O ratio can further determine the micro Whether the light emitting diode (Micro LED) chip has clear light emission, luminous intensity and luminous wavelength.

Although this creation has been disclosed in a preferred embodiment as above, it is not intended to limit this creation. Anyone with ordinary knowledge in the technical field to which they belong will not deviate from the essence of this creation. Within the scope of Shenhe, some changes and modifications can still be made. Therefore, the scope of protection of this creation shall be subject to the scope of the attached patent application.

1: Grating type luminous efficiency detection device

10: Storage platform

20: light source

201: Laser

202: Single-mode fiber

203: Fiber collimator

30: Objective

40: grating

50: Image sensor

Claims (9)

A raster type luminous efficiency detection device, including: A storage platform; A light source; An objective lens A grating; and An image sensing element; The storage platform is used to place a test sample; The light source is arranged on one side of the storage platform; The objective lens is arranged on one side of the object platform, and the objective lens can be moved for focusing; The grating is arranged on one side of the objective lens; The image sensing element is arranged on one side of the grating. According to the grating-type luminous efficiency detection device described in item 1 of the scope of patent application, the magnification of the objective lens can be 5 times, 10 times, or between 5 and 10 times. According to the grating-type luminous efficiency detection device described in item 1 of the scope of patent application, the light source is a laser light source or an LED light source. For the grating-type luminous efficiency detection device described in item 3 of the scope of patent application, the wavelength of the laser light source can be 375nm, 405nm or 532nm, and the wavelength of the LED light source can be 375nm, 405nm or 532nm. The grating-type luminous efficiency detection device described in item 1 of the scope of patent application further includes a single-mode fiber and a fiber collimator. The single-mode fiber is arranged on one side of the light source, and the fiber is collimated. The straightener is arranged on one side of the single-mode optical fiber, and the light beam emitted by the light source is first transmitted through the single-mode optical fiber, and then irradiates the test sample through the optical fiber collimator. According to the grating-type luminous efficiency detection device described in item 1 of the scope of patent application, the grating is a transmissive grating or a reflective grating. According to the grating-type luminous efficiency detection device described in the first item of the scope of patent application, the image sensing element can move along an axis. According to the grating-type luminous efficiency detection device described in the first item of the patent application, the image sensor is a charge coupled device (CCD) or a complementary metal oxide semiconductor (CMOS) image sensor. According to the grating-type luminous efficiency detection device described in the first item of the scope of patent application, the resolution of the image sensor element is 1024 pixels×1024 pixels or 2048 pixels×2048 pixels.

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