TWM612742U - Magnetic wheel transmission device - Google Patents
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Abstract
本創作係揭露一種磁輪傳動裝置,適用於濕製程設備的輸送工作區域,用以輸送至少一工件。第一抵壓單元與第二抵壓單元的位置平行配置,並設置在座體上。輸送工件過程中,利用傳動模組驅動第一抵壓單元的第一軸桿旋轉作動,使第一抵壓單元的第一磁性抵壓輪與第二抵壓單元的第二磁性抵壓輪磁性相吸,以同步帶動第二磁性抵壓輪反向旋轉,用來夾持抵壓工件的兩側邊,以提高工件輸送的穩定性。再者,利用磁性相吸作為無接觸的磁力傳動方式,能夠解決現有齒輪傳動所產生的耗損問題。This creation discloses a magnetic wheel transmission device, which is suitable for the conveying work area of wet process equipment, and is used to convey at least one workpiece. The positions of the first pressing unit and the second pressing unit are arranged in parallel, and are arranged on the seat body. In the process of conveying the workpiece, the transmission module is used to drive the first shaft of the first pressing unit to rotate, so that the first magnetic pressing wheel of the first pressing unit and the second magnetic pressing wheel of the second pressing unit are magnetic. Attracting each other, synchronously driving the second magnetic pressing wheel to rotate in the reverse direction, which is used to clamp the two sides of the pressing work piece, so as to improve the stability of work piece conveying. Furthermore, the use of magnetic attraction as a non-contact magnetic transmission method can solve the problem of wear caused by the existing gear transmission.
Description
本創作是有關於一種磁輪傳動裝置,特別是有關於一種應用於濕製程的輸送機構,能根據工件的厚度以自動相應調整抵壓而穩定輸送的磁輪傳動裝置。This creation is related to a magnetic wheel transmission device, especially to a conveying mechanism used in a wet process, which can automatically adjust the pressure according to the thickness of the workpiece for stable conveying.
按,輸送系統為現代工廠自動化一貫生產不可或缺的一部分,輸送系統設置複數輸送輪,以藉由輸送輪的承載運送,可將待加工件由一製程的末端處直接輸送至下一製程的開始處,其可節省待加工件於不同製程之間移動的運送成本。對於小尺寸的待加工件或是有浸泡製程的加工程序,常見使用齒輪與齒輪間相嚙合同動轉動,而軸座軸接於齒輪,軸座上設有多個滾輪,利用齒輪帶動滾輪樞轉並輸送工件,藉由滾輪與工件之間的摩擦力使得工件得以進行移動,因為滾輪成本低廉以及結構簡單維修容易的因素而被廣泛應用。According to, the conveying system is an indispensable part of modern factory automation. The conveying system is equipped with multiple conveying wheels to transport the parts to be processed from the end of one process directly to the next process. At the beginning, it can save the transportation cost of moving parts to be processed between different processes. For small-sized parts to be processed or processing procedures with immersion process, it is common to use gears and gears to mesh and rotate simultaneously, and the shaft seat is axially connected to the gear, and there are multiple rollers on the shaft seat, and the gear is used to drive the roller pivot. The workpiece is rotated and conveyed, and the workpiece can be moved by the friction between the roller and the workpiece. Because of the low cost of the roller and the simple structure and easy maintenance, it is widely used.
續就半導體濕製程的應用上,在滾輪輸送工件的過程中,由於工件本身的厚度不一,因此現有技術是使用上、下相配合壓制輪或彈簧給予工件適當的壓制力,但是仍存在工件在輸送的過程中易有打滑而偏離輸送動線的問題。此外,現有的輸送結構都是浸泡在藥液中,例如所應用到的滾輪與齒輪都會因藥液侵蝕而降低使用壽命,更甚者損壞而影響輸送效能。因此如何提升輸送元件的使用壽命與工件輸送的穩定性是亟待解決的問題。Continuing the application of semiconductor wet process, in the process of roller conveying the workpiece, due to the different thickness of the workpiece itself, the prior art uses upper and lower matching pressing wheels or springs to give the workpiece an appropriate pressing force, but there are still workpieces In the process of conveying, it is easy to slip and deviate from the conveying line. In addition, the existing conveying structures are all immersed in the liquid medicine. For example, the rollers and gears used will reduce the service life due to the erosion of the liquid medicine, or even damage it and affect the conveying efficiency. Therefore, how to improve the service life of conveying elements and the stability of workpiece conveying is an urgent problem to be solved.
有鑑於上述習知技藝之問題,本創作之主要目的就是提供一種利用磁性相吸作為無接觸的磁力傳動方式,應用於濕製程中,不僅可解決現有齒輪傳動所產生的耗損問題、無法因應工件厚度即時相應調整給予適當的抵壓力,以及傳動結構因浸泡在濕製程中受藥液侵蝕所造成的使用壽命短或損壞等諸多問題。In view of the problems of the above-mentioned known techniques, the main purpose of this creation is to provide a non-contact magnetic transmission method that uses magnetic attraction as a non-contact magnetic transmission method, which can not only solve the wear problem caused by the existing gear transmission, but also cannot respond to the workpiece. The thickness is adjusted in real time to provide appropriate pressure, and the transmission structure is immersed in the wet process and is corroded by the chemical liquid, causing many problems such as short service life or damage.
本創作之另一目的就是提供一種利用磁性相吸作為無接觸的磁力傳動方式,可提高輸送順暢度以及輸送的穩定度。Another purpose of this creation is to provide a non-contact magnetic transmission method using magnetic attraction, which can improve the smoothness and stability of the conveying.
根據本創作之目的,提出一種磁輪傳動裝置,用於濕製程設備的輸送工作區域,磁輪傳動裝置於輸送工作區域中用以輸送至少一工件。磁輪傳動裝置包括一座體、一第一抵壓單元、一第二抵壓單元以及一傳動模組。第一抵壓單元設置於座體上,第一抵壓單元包括一第一軸桿與至少一第一磁性抵壓輪,第一軸桿與第一磁性抵壓輪相軸接。第二抵壓單元設置於座體上,且第二抵壓單元與第一抵壓單元的位置平行配置。第二抵壓單元包括一第二軸桿與至少一第二磁性抵壓輪,第二軸桿與第二磁性抵壓輪相軸接。傳動模組耦接於第一抵壓單元。傳動模組用以驅動第一軸桿帶動第一磁性抵壓輪旋轉,藉由第一磁性抵壓輪與第二磁性抵壓輪間的磁性相吸,以同步帶動第二磁性抵壓輪反向旋轉,進而施予夾持抵壓工件之作用力,使得工件在輸送過程中不會受藥液或是氣體噴出衝力而產生移動或是浮動不穩的問題,藉以達到工件輸送的穩定性。According to the purpose of this creation, a magnetic wheel transmission device is proposed for the conveying work area of wet process equipment, and the magnetic wheel transmission device is used for conveying at least one workpiece in the conveying work area. The magnetic wheel transmission device includes a base, a first pressing unit, a second pressing unit, and a transmission module. The first pressing unit is arranged on the base. The first pressing unit includes a first shaft and at least one first magnetic pressing wheel, and the first shaft is axially connected with the first magnetic pressing wheel. The second pressing unit is arranged on the base, and the second pressing unit is arranged in parallel with the position of the first pressing unit. The second pressing unit includes a second shaft and at least one second magnetic pressing wheel, and the second shaft is axially connected with the second magnetic pressing wheel. The transmission module is coupled to the first pressing unit. The transmission module is used to drive the first shaft to drive the first magnetic pressing wheel to rotate. The second magnetic pressing wheel is driven synchronously by the magnetic attraction between the first magnetic pressing wheel and the second magnetic pressing wheel. Rotate in the direction of rotation, and then apply the force of clamping and pressing the workpiece, so that the workpiece will not be moved or floated unstable due to the impulse of the liquid or gas jet during the conveying process, so as to achieve the stability of the workpiece conveying.
依據上述技術特徵,其中該第一磁性抵壓輪與該第二磁性抵壓輪之間具有一第一間距。According to the above technical feature, there is a first distance between the first magnetic pressing wheel and the second magnetic pressing wheel.
依據上述技術特徵,其中該第一間距小於該工件的總厚度。According to the above technical feature, the first distance is smaller than the total thickness of the workpiece.
依據上述技術特徵,其中該座體具有兩相對側的一第一安裝部與一第二安裝部,該第一軸桿安裝於該第一安裝部,該第二軸桿安裝於該第二安裝部,使該第一軸桿與該第二軸桿之間形成一第二間距,該第一間距根據第二間距相應調整。According to the above technical feature, the seat has a first mounting portion and a second mounting portion on two opposite sides, the first shaft is mounted on the first mounting portion, and the second shaft is mounted on the second mounting Part, so that a second distance is formed between the first shaft and the second shaft, and the first distance is adjusted correspondingly according to the second distance.
依據上述技術特徵,其中該座體進一步具有一升降調整件,該升降調整件係連接該第一安裝部與該第二安裝部,並用以調整該第一安裝部與該第二安裝部之間的距離,相應調整該第二間距範圍。According to the above technical feature, the seat body further has a lifting adjustment member that connects the first mounting portion and the second mounting portion, and is used to adjust the distance between the first mounting portion and the second mounting portion , Adjust the second distance range accordingly.
依據上述技術特徵,其中該第一磁性抵壓輪以中心位置向外環繞設置有等距的多個第一磁性件,該第二磁性抵壓輪以中心位置向外環繞設置有等距的多個第二磁性件。According to the above technical feature, wherein the first magnetic pressing wheel is provided with a plurality of equidistant first magnetic members around the center position outwards, and the second magnetic pressing wheel is provided with equidistant pluralities surrounding the center position outwards. A second magnetic piece.
依據上述技術特徵,其中該第一磁性抵壓輪與該第二磁性抵壓輪皆為磁盤。According to the above technical feature, the first magnetic pressing wheel and the second magnetic pressing wheel are both magnetic disks.
依據上述技術特徵,其中該傳動模組包括一馬達以及一傳動件。傳動件耦接該馬達與該第一抵壓單元的該第一軸桿,馬達用以驅動該傳動件運作,使該傳動件旋轉帶動該第一軸桿。According to the above technical features, the transmission module includes a motor and a transmission component. The transmission member is coupled to the motor and the first shaft of the first pressing unit, and the motor is used to drive the transmission member to operate, so that the transmission member rotates and drives the first shaft.
為利 貴審查員瞭解本創作之技術特徵、內容與優點及其所能達成之功效,茲將本創作配合附圖,並以實施例之表達形式詳細說明如下,而其中所使用之圖式,其主旨僅為示意及輔助說明書之用,未必為本創作實施後之真實比例與精準配置,故不應就所附之圖式的比例與配置關係解讀、侷限本創作於實際實施上的權利範圍,合先敘明。In order to help your examiners understand the technical features, content and advantages of this creation and its achievable effects, this creation is accompanied by drawings and detailed descriptions in the form of embodiments are as follows, and the diagrams used therein are as follows: The subject matter is only for illustrative and auxiliary manual purposes, and may not be the true proportions and precise configuration after the implementation of the creation. Therefore, the scale and configuration relationship of the attached drawings should not be interpreted or limited to the scope of rights of the creation in actual implementation. Hexian stated.
磁力傳動技術早在20世紀30年代被提出討論與研究,到了70年代之後,工業生產中日益重視對新技術的需求和對環境的保護,促進新技術、新產品的開發和利用。磁力傳動主要是利用永磁材料或電磁鐵產生的磁力,透過力和轉矩無接觸傳遞,實現無機械連接的耦合。在本創作中,為能改善現有濕製程的傳動元件無法因應工件厚度而給予相應的抵壓力以及傳動元件容易受損等問題,故引用磁性傳動技術,並經過新型人深入研發以創造出新穎的磁性傳動裝置,不僅可促進產業發展,更可提高製程效率。Magnetic drive technology was put forward for discussion and research as early as the 1930s. After the 1970s, industrial production paid more and more attention to the demand for new technologies and the protection of the environment, and promoted the development and utilization of new technologies and new products. Magnetic transmission mainly uses the magnetic force generated by permanent magnet materials or electromagnets to realize the coupling without mechanical connection through the non-contact transmission of force and torque. In this creation, in order to improve the existing wet process transmission components can not be given corresponding pressure in response to the thickness of the workpiece and the transmission components are easily damaged, etc., magnetic transmission technology is used, and new types of people have undergone in-depth research and development to create novel The magnetic transmission device can not only promote the development of the industry, but also improve the process efficiency.
請同時參閱第1圖、第2圖、第3圖與第4圖。第1圖為本創作應用於濕製程設備的結構示意圖;第2圖為本創作的結構立體圖;第3圖為本創作的結構側視圖;第4圖為本創作另一視角的結構側視圖。磁輪傳動裝置適用於濕製程設備100的輸送工作區域101,也就是磁輪傳動裝置的數量具有多個,如第1圖所示,此些磁輪傳動裝置是呈水平間隔排列設置在輸送工作區域101。此些磁輪傳動裝置在輸送工作區域101中用來輸送工件進行濕製程程序,濕製程設備100可作為蝕刻機、剝膜機、清洗機或顯影機等應用,本創作不侷限濕製程設備100的種類,只要在濕製程設備100使用磁輪傳動裝置即為本創作的專利保護範疇。Please refer to Figure 1, Figure 2, Figure 3 and Figure 4 at the same time. Figure 1 is a schematic diagram of the structure of the creation applied to wet process equipment; Figure 2 is a three-dimensional view of the structure of the creation; Figure 3 is a side view of the structure of the creation; Figure 4 is a side view of the structure from another perspective. The magnetic wheel transmission device is suitable for the
接著詳細說明每一個磁輪傳動裝置的組成元件及其組裝方式。磁輪傳動裝置包括一座體10、一第一抵壓單元20、一第二抵壓單元30以及一傳動模組40。傳動模組40耦接於第一抵壓單元20。第一抵壓單元20設置於座體10上,第一抵壓單元20包括一第一軸桿21與軸接第一軸桿21之至少一第一磁性抵壓輪22;較佳設計是第一軸桿21的兩端分別設置有第一磁性抵壓輪22與第一磁性抵壓輪22’。第二抵壓單元30設置於座體10上,且第二抵壓單元30與第一抵壓單元20的位置平行配置。第二抵壓單元30包括一第二軸桿31與軸接第二軸桿31之至少一第二磁性抵壓輪32。較佳設計是第二軸桿31的兩端分別設置有第二磁性抵壓輪32與第二磁性抵壓輪32’。其中第一磁性抵壓輪22與第二磁性抵壓輪32的位置相對應;第一磁性抵壓輪22’與第二磁性抵壓輪32’的位置相對應。第一磁性抵壓輪22與第二磁性抵壓輪32之間具有一第一間距D1;同理,第一磁性抵壓輪22’與第二磁性抵壓輪32’之間也具有一第一間距D1。Next, the components and assembly methods of each magnetic wheel transmission device will be described in detail. The magnetic wheel transmission device includes a
其中,座體10具有兩相對側的一第一安裝部11、一第二安裝部12與一升降調整件13;升降調整件13係連接第一安裝部11與第二安裝部12。第一抵壓單元20的第一軸桿21安裝於第一安裝部11;第二抵壓單元30的第二軸桿31 安裝於第二安裝部12,使第一軸桿21與第二軸桿31之間形成一第二間距D2。升降調整件13用以調整第一安裝部11與第二安裝部12之間的距離,相應調整第二間距D2範圍,第一間距D1根據第二間距D2相應調整,容後詳述。第一磁性抵壓輪22與第二磁性抵壓輪32皆為磁盤。在本實施例中,第一磁性抵壓輪22與第二磁性抵壓輪32具有磁性,是第一磁性抵壓輪22以中心位置向外環繞設置有等距的多個第一磁性件221;第二磁性抵壓輪32以中心位置向外環繞設置有等距的多個第二磁性件321。The
由上述了解本創作的整體的結構組成之後,接著詳述本創作如何利用磁性相吸作為無接觸的磁力傳動方式,來提高工件輸送順暢度以及輸送的穩定度。請同時參閱第5圖、第6圖以及第7圖,第5圖為本創作於濕製程設備中輸送工件的狀態示意圖;第6圖為本創作輸送工件前的狀態示意圖;第7圖為本創作輸送工件中的第一實施例狀態示意圖。將工件50放置於輸送工作區域101的輸送端時,第一抵壓單元20的第一軸桿21更包括多個間隔設置的輸送輪23,傳動模組40用以驅動第一軸桿21帶動第一磁性抵壓輪22與輸送輪23旋轉,其中傳動件42可為聯軸器,用以樞接第一軸桿21。工件50抵觸到輸送輪23時,即被帶動往輸送工作區域101的輸出端的路徑輸送移動,同時,藉由第一磁性抵壓輪22與第二磁性抵壓輪32間的磁性相吸,以同步帶動第二磁性抵壓輪32反向旋轉。接著,第一磁性抵壓輪22與第二磁性抵壓輪32間的磁性相吸會將工件50的第一側51上、下表面相吸抵壓,因應工件50厚度給予夾持的抵壓力道;同理第一磁性抵壓輪22’與第二磁性抵壓輪32’間的磁性相吸會將工件50的第二側52上、下表面相吸抵壓,因應工件50厚度給予夾持的抵壓力道,請同時參閱第1圖的結構說明。藉由藉由第一磁性抵壓輪22與第二磁性抵壓輪32間的磁性相吸,即可達到因應工件50厚度而給予相應的抵壓力的效果。After understanding the overall structure of this creation as described above, I will then elaborate on how this creation uses magnetic attraction as a non-contact magnetic transmission method to improve the smoothness and stability of the workpiece conveying. Please refer to Figure 5, Figure 6 and Figure 7 at the same time. Figure 5 is a schematic diagram of the state of the workpiece conveyed in the wet process equipment; Figure 6 is a schematic diagram of the state before the workpiece is conveyed; Figure 7 is this Schematic diagram of the state of the first embodiment in the creation of conveying workpieces. When the
值得注意的是,第一間距D1小於工件50的總厚度W,因此第一間距D1是為狹小隙縫以供工件50保持穩定水平移動狀態,並透過磁性相吸的抵壓作用而給予夾持的抵壓力道,進而解決現有技術工件50因濕製程過程中受藥液噴灑衝力而產生移動或是浮動不穩的問題。其中,第一磁性抵壓輪22上的多個第一磁性件221以及第二磁性抵壓輪32上多個第二磁性件321,會因為相鄰的磁性件距離以及所使用的數量而直接影響相吸的磁力強度與導磁率,因此本創作是將磁性件以等距配置來達到最優化的運作順暢度。 在第一實施例中,第一磁性件221與第二磁性件321的應用數量皆為六個。It is worth noting that the first distance D1 is smaller than the total thickness W of the
再如第8圖所示,為本創作輸送工件中的第二實施例狀態示意圖。第二實施例與第一實施例相同之處,在此不再贅述,僅說明差異點。由於工件50的厚度也會影響到第一磁性抵壓輪22與第二磁性抵壓輪32之間的磁性相吸強度,或者為因應製程需求而需要調整磁力強度,可視需求調整所要配置的第一磁性件221與第二磁性件321的應用數量。在第二實施例中,第一磁性件221與第二磁性件321的應用數量皆為四個,例如應用在厚度薄的工件50,例如軟性電路板。As shown in Figure 8 again, it is a schematic diagram of the second embodiment of the present creation and conveying of workpieces. The second embodiment is similar to the first embodiment, which will not be repeated here, and only the differences will be described. Since the thickness of the
再如第9圖所示,為本創作輸送工件中的第三實施例狀態示意圖。第三實施例與第一實施例相同之處,在此不再贅述,僅說明差異點。在第三實施例中,第一磁性件221與第二磁性件321的應用數量皆為九個,例如應用在厚度較厚的工件50,例如玻璃基板或硬式電路板。本創作藉由增加第一磁性件221與第二磁性件321的應用數量,來提升磁性強度。當然,本創作不侷限第一磁性件221與第二磁性件321的應用數量,可視需求而作相應的調整。As shown in Fig. 9 again, it is a schematic diagram of the state of the third embodiment of the present creation and conveying of workpieces. The third embodiment is similar to the first embodiment, which will not be repeated here, and only the differences will be described. In the third embodiment, the number of applications of the first
再如第10圖所示,為本創作輸送工件中的第四實施例狀態示意圖。座體10的升降調整件13可為氣缸或任何的機械傳動方式。在第四實施例中,升降調整件13可裝設於第一安裝部11,藉由升降調整件13調整第一安裝部11移動至第二安裝部12之間的距離,相應調整第一軸桿21與第二軸桿31之間的第二間距D2範圍,而第一磁性抵壓輪22與第二磁性抵壓輪32之間的第一間距D1是根據第二間距D2相應調整。當然升降調整件13也可以裝設於第二安裝部12,藉由升降調整件13調整第二安裝部12移動至第一安裝部11之間的距離,本創作在此不侷限升降調整件13的安裝位置,只要能調整第一安裝部11與第二安裝部12之間的距離即為本創作之專利保護範疇。As shown in Fig. 10 again, it is a schematic diagram of the state of the fourth embodiment in the creation and conveying of workpieces. The lifting
再一實施例,如第11圖所示,為本創作的局部結構示意圖。本創作之傳動模組40,除了上述所提到使用聯軸器作為傳動件42之外,傳動件42更可設計為機械傳動方式,以因應產業製作成本與維修考量因素。在本實施例中,傳動件42包含一齒輪組421與一傳動軸422,齒輪組421具有一主動齒輪4211與一被動齒輪4212,傳動軸422是樞接馬達41與主動齒輪4211之間,主動齒輪4211與被動齒輪4212互相嚙合,被動齒輪4212樞接第一軸桿21。當馬達41驅動時,傳動軸422樞轉帶動主動齒輪4211嚙合被動齒輪4212同步旋轉,第一軸桿21受到被動齒輪4212旋轉驅動,即可帶動第一磁性抵壓輪22旋轉;藉由第一磁性抵壓輪22與第二磁性抵壓輪32間的磁性相吸,以同步帶動第二磁性抵壓輪32反向旋轉。本創作在磁輪傳動裝置的整體設計,不僅可簡化現有技術複雜且大量齒輪的傳動方式,又可搭配創新的磁力傳動結構來提升輸送工件的效率與流暢度,極具產業競爭優勢。Yet another embodiment, as shown in Figure 11, is a schematic diagram of a partial structure of this creation. The
綜觀上述,可見本創作在突破先前之技術下,對濕製程設備中的傳動結構上的創新改良,利用磁性相吸作為無接觸的磁力傳動方式來提升整體輸送工件的穩定性與順暢度,進而提升生產良率與效能。另,本創作不使用齒輪的機械傳動方式,除了可徹底解決現有齒輪與齒輪之間傳動耗損問題,以及浸泡在藥液中遭到侵蝕而影響傳動效能與使用壽命的問題。更進一步來說,本創作利用磁性相吸作為無接觸的磁力傳動方式,解決現有技術所用的壓制輪與彈簧壓制工件所存在的打滑問題,確實已達到所欲增進之功效,且也非熟悉該項技藝者所易於思及。本創作申請前未曾公開,且其所具之進步性、實用性,顯已符合專利之申請要件,爰依法提出專利申請,懇請 貴局核准本件新型專利申請案,以勵新型,至感德便。Looking at the above, it can be seen that this creation breaks through the previous technology and innovatively improves the transmission structure of the wet process equipment. It uses magnetic attraction as a non-contact magnetic transmission method to improve the stability and smoothness of the overall conveying workpiece, and then Improve production yield and efficiency. In addition, the mechanical transmission method that does not use gears in this creation can completely solve the problem of transmission wear between the existing gears and gears, and the problems of erosion when immersed in the chemical liquid, which affects the transmission efficiency and service life. Furthermore, this creation uses magnetic attraction as a non-contact magnetic transmission method to solve the slippage problem of the pressing wheel and spring pressing workpiece used in the prior art. It has indeed achieved the desired effect and is not familiar with it. This art is easy to think about. This creation has not been published before the application, and its progressiveness and practicality show that it has met the requirements of patent application. You file a patent application in accordance with the law, and I implore your office to approve this new patent application to encourage the new model, and it will be convenient .
以上所述之實施例僅係為說明本創作之技術思想及特點,其目的在使熟習此項技藝之人士能夠瞭解本創作之內容並據以實施,當不能以之限定本創作之專利範圍,即大凡依本創作所揭示之精神所作之均等變化或修飾,仍應涵蓋在本創作之專利範圍內。The above-mentioned embodiments are only to illustrate the technical ideas and characteristics of this creation, and their purpose is to enable those who are familiar with the art to understand the content of this creation and implement them accordingly. When they cannot be used to limit the patent scope of this creation, That is to say, all equal changes or modifications made in accordance with the spirit of this creation should still be covered by the scope of the patent of this creation.
100:濕製程設備
101:輸送工作區域
10:座體
11:第一安裝部
12:第二安裝部
13:升降調整件
20:第一抵壓單元
21:第一軸桿
22 、22’:第一磁性抵壓輪
221:第一磁性件
23:輸送輪
30:第二抵壓單元
31:第二軸桿
32、32’:第二磁性抵壓輪
321:第二磁性件
40:傳動模組
41:馬達
42:傳動件
421:齒輪組
4211:主動齒輪
4212:被動齒輪
422:傳動軸
50:工件
51:第一側
52:第二側
D1:第一間距
D2:第二間距
W:總厚度
100: Wet process equipment
101: Conveying work area
10: Seat
11: The first installation part
12: The second installation part
13: Lifting adjustment piece
20: The first pressure unit
21: The
第1圖 為本創作應用於濕製程設備的結構示意圖。 第2圖 為本創作的結構立體圖。 第3圖 為本創作的結構側視圖。 第4圖 為本創作另一視角的結構側視圖。 第5圖 為本創作於濕製程設備中輸送工件的狀態示意圖。 第6圖 為本創作輸送工件前的狀態示意圖。 第7圖 為本創作輸送工件中的第一實施例狀態示意圖。 第8圖 為本創作輸送工件中的第二實施例狀態示意圖。 第9圖 為本創作輸送工件中的第三實施例狀態示意圖。 第10圖 為本創作輸送工件中的第四實施例狀態示意圖。 第11圖 為本創作的局部結構示意圖。 Figure 1 is a schematic diagram of the structure of the creation applied to wet process equipment. Figure 2 is a three-dimensional diagram of the structure of this creation. Figure 3 is a side view of the structure of this creation. Figure 4 is a side view of the structure from another perspective of this creation. Figure 5 is a schematic diagram of the state of conveying workpieces created in a wet process equipment. Figure 6 is a schematic diagram of the state before the creation and conveying of the workpiece. Figure 7 is a schematic diagram of the state of the first embodiment in creating and conveying workpieces. Figure 8 is a schematic diagram of the second embodiment in the process of creating and conveying workpieces. Figure 9 is a schematic diagram of the state of the third embodiment in creating and conveying workpieces. Figure 10 is a schematic diagram of the state of the fourth embodiment in creating and conveying workpieces. Figure 11 is a schematic diagram of the local structure of this creation.
10:座體 10: Seat
11:第一安裝部 11: The first installation part
12:第二安裝部 12: The second installation part
13:升降調整件 13: Lifting adjustment piece
20:第一抵壓單元 20: The first pressure unit
21:第一軸桿 21: The first shaft
22、22’:第一磁性抵壓輪 22, 22’: The first magnetic pressure roller
30:第二抵壓單元 30: The second pressure unit
31:第二軸桿 31: second shaft
32、32’:第二磁性抵壓輪 32, 32’: The second magnetic pressure roller
42:傳動件 42: Transmission parts
D2:第二間距 D2: second spacing
Claims (10)
Priority Applications (1)
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TW110201026U TWM612742U (en) | 2021-01-27 | 2021-01-27 | Magnetic wheel transmission device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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TW110201026U TWM612742U (en) | 2021-01-27 | 2021-01-27 | Magnetic wheel transmission device |
Publications (1)
Publication Number | Publication Date |
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TWM612742U true TWM612742U (en) | 2021-06-01 |
Family
ID=77518677
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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TW110201026U TWM612742U (en) | 2021-01-27 | 2021-01-27 | Magnetic wheel transmission device |
Country Status (1)
Country | Link |
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TW (1) | TWM612742U (en) |
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2021
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