TWM612742U - Magnetic wheel transmission device - Google Patents

Abstract

This creation discloses a magnetic wheel transmission device, which is suitable for the conveying work area of wet process equipment, and is used to convey at least one workpiece. The positions of the first pressing unit and the second pressing unit are arranged in parallel, and are arranged on the seat body. In the process of conveying the workpiece, the transmission module is used to drive the first shaft of the first pressing unit to rotate, so that the first magnetic pressing wheel of the first pressing unit and the second magnetic pressing wheel of the second pressing unit are magnetic. Attracting each other, synchronously driving the second magnetic pressing wheel to rotate in the reverse direction, which is used to clamp the two sides of the pressing work piece, so as to improve the stability of work piece conveying. Furthermore, the use of magnetic attraction as a non-contact magnetic transmission method can solve the problem of wear caused by the existing gear transmission.

Description

Magnetic wheel drive

This creation is related to a magnetic wheel transmission device, especially to a conveying mechanism used in a wet process, which can automatically adjust the pressure according to the thickness of the workpiece for stable conveying.

According to, the conveying system is an indispensable part of modern factory automation. The conveying system is equipped with multiple conveying wheels to transport the parts to be processed from the end of one process directly to the next process. At the beginning, it can save the transportation cost of moving parts to be processed between different processes. For small-sized parts to be processed or processing procedures with immersion process, it is common to use gears and gears to mesh and rotate simultaneously, and the shaft seat is axially connected to the gear, and there are multiple rollers on the shaft seat, and the gear is used to drive the roller pivot. The workpiece is rotated and conveyed, and the workpiece can be moved by the friction between the roller and the workpiece. Because of the low cost of the roller and the simple structure and easy maintenance, it is widely used.

Continuing the application of semiconductor wet process, in the process of roller conveying the workpiece, due to the different thickness of the workpiece itself, the prior art uses upper and lower matching pressing wheels or springs to give the workpiece an appropriate pressing force, but there are still workpieces In the process of conveying, it is easy to slip and deviate from the conveying line. In addition, the existing conveying structures are all immersed in the liquid medicine. For example, the rollers and gears used will reduce the service life due to the erosion of the liquid medicine, or even damage it and affect the conveying efficiency. Therefore, how to improve the service life of conveying elements and the stability of workpiece conveying is an urgent problem to be solved.

In view of the problems of the above-mentioned known techniques, the main purpose of this creation is to provide a non-contact magnetic transmission method that uses magnetic attraction as a non-contact magnetic transmission method, which can not only solve the wear problem caused by the existing gear transmission, but also cannot respond to the workpiece. The thickness is adjusted in real time to provide appropriate pressure, and the transmission structure is immersed in the wet process and is corroded by the chemical liquid, causing many problems such as short service life or damage.

Another purpose of this creation is to provide a non-contact magnetic transmission method using magnetic attraction, which can improve the smoothness and stability of the conveying.

According to the purpose of this creation, a magnetic wheel transmission device is proposed for the conveying work area of wet process equipment, and the magnetic wheel transmission device is used for conveying at least one workpiece in the conveying work area. The magnetic wheel transmission device includes a base, a first pressing unit, a second pressing unit, and a transmission module. The first pressing unit is arranged on the base. The first pressing unit includes a first shaft and at least one first magnetic pressing wheel, and the first shaft is axially connected with the first magnetic pressing wheel. The second pressing unit is arranged on the base, and the second pressing unit is arranged in parallel with the position of the first pressing unit. The second pressing unit includes a second shaft and at least one second magnetic pressing wheel, and the second shaft is axially connected with the second magnetic pressing wheel. The transmission module is coupled to the first pressing unit. The transmission module is used to drive the first shaft to drive the first magnetic pressing wheel to rotate. The second magnetic pressing wheel is driven synchronously by the magnetic attraction between the first magnetic pressing wheel and the second magnetic pressing wheel. Rotate in the direction of rotation, and then apply the force of clamping and pressing the workpiece, so that the workpiece will not be moved or floated unstable due to the impulse of the liquid or gas jet during the conveying process, so as to achieve the stability of the workpiece conveying.

According to the above technical feature, there is a first distance between the first magnetic pressing wheel and the second magnetic pressing wheel.

According to the above technical feature, the first distance is smaller than the total thickness of the workpiece.

According to the above technical feature, the seat has a first mounting portion and a second mounting portion on two opposite sides, the first shaft is mounted on the first mounting portion, and the second shaft is mounted on the second mounting Part, so that a second distance is formed between the first shaft and the second shaft, and the first distance is adjusted correspondingly according to the second distance.

According to the above technical feature, the seat body further has a lifting adjustment member that connects the first mounting portion and the second mounting portion, and is used to adjust the distance between the first mounting portion and the second mounting portion , Adjust the second distance range accordingly.

According to the above technical feature, wherein the first magnetic pressing wheel is provided with a plurality of equidistant first magnetic members around the center position outwards, and the second magnetic pressing wheel is provided with equidistant pluralities surrounding the center position outwards. A second magnetic piece.

According to the above technical feature, the first magnetic pressing wheel and the second magnetic pressing wheel are both magnetic disks.

According to the above technical features, the transmission module includes a motor and a transmission component. The transmission member is coupled to the motor and the first shaft of the first pressing unit, and the motor is used to drive the transmission member to operate, so that the transmission member rotates and drives the first shaft.

In order to help your examiners understand the technical features, content and advantages of this creation and its achievable effects, this creation is accompanied by drawings and detailed descriptions in the form of embodiments are as follows, and the diagrams used therein are as follows: The subject matter is only for illustrative and auxiliary manual purposes, and may not be the true proportions and precise configuration after the implementation of the creation. Therefore, the scale and configuration relationship of the attached drawings should not be interpreted or limited to the scope of rights of the creation in actual implementation. Hexian stated.

Magnetic drive technology was put forward for discussion and research as early as the 1930s. After the 1970s, industrial production paid more and more attention to the demand for new technologies and the protection of the environment, and promoted the development and utilization of new technologies and new products. Magnetic transmission mainly uses the magnetic force generated by permanent magnet materials or electromagnets to realize the coupling without mechanical connection through the non-contact transmission of force and torque. In this creation, in order to improve the existing wet process transmission components can not be given corresponding pressure in response to the thickness of the workpiece and the transmission components are easily damaged, etc., magnetic transmission technology is used, and new types of people have undergone in-depth research and development to create novel The magnetic transmission device can not only promote the development of the industry, but also improve the process efficiency.

Please refer to Figure 1, Figure 2, Figure 3 and Figure 4 at the same time. Figure 1 is a schematic diagram of the structure of the creation applied to wet process equipment; Figure 2 is a three-dimensional view of the structure of the creation; Figure 3 is a side view of the structure of the creation; Figure 4 is a side view of the structure from another perspective. The magnetic wheel transmission device is suitable for the conveying work area 101 of the wet process equipment 100, that is, there are multiple magnetic wheel transmission devices. As shown in Figure 1, these magnetic wheel transmission devices are arranged in horizontal intervals in the conveying work area. Area 101. These magnetic wheel transmission devices are used to transport workpieces for wet process procedures in the conveying work area 101. The wet process equipment 100 can be used as an etching machine, a film stripper, a cleaning machine or a developing machine, etc. The creation is not limited to the wet process equipment 100 As long as the magnetic wheel transmission device is used in the wet process equipment 100, it is the patent protection category of this creation.

Next, the components and assembly methods of each magnetic wheel transmission device will be described in detail. The magnetic wheel transmission device includes a base 10, a first pressing unit 20, a second pressing unit 30 and a transmission module 40. The transmission module 40 is coupled to the first pressing unit 20. The first pressing unit 20 is disposed on the base 10, and the first pressing unit 20 includes a first shaft 21 and at least one first magnetic pressing wheel 22 that is axially connected to the first shaft 21; Two ends of a shaft 21 are respectively provided with a first magnetic pressing wheel 22 and a first magnetic pressing wheel 22'. The second pressing unit 30 is disposed on the base 10, and the second pressing unit 30 and the first pressing unit 20 are arranged in parallel. The second pressing unit 30 includes a second shaft 31 and at least one second magnetic pressing wheel 32 axially connected to the second shaft 31. A preferred design is that two ends of the second shaft 31 are respectively provided with a second magnetic pressing wheel 32 and a second magnetic pressing wheel 32'. The first magnetic pressing wheel 22 corresponds to the position of the second magnetic pressing wheel 32; the first magnetic pressing wheel 22' corresponds to the position of the second magnetic pressing wheel 32'. There is a first distance D1 between the first magnetic pressing wheel 22 and the second magnetic pressing wheel 32; in the same way, there is also a first distance between the first magnetic pressing wheel 22' and the second magnetic pressing wheel 32'. A spacing D1.

The seat body 10 has a first mounting portion 11, a second mounting portion 12 and a lifting adjusting member 13 on two opposite sides; the lifting adjusting member 13 connects the first mounting portion 11 and the second mounting portion 12. The first shaft 21 of the first pressing unit 20 is mounted on the first mounting portion 11; the second shaft 31 of the second pressing unit 30 is mounted on the second mounting portion 12, so that the first shaft 21 and the second shaft A second distance D2 is formed between the rods 31. The lifting adjusting member 13 is used to adjust the distance between the first installation portion 11 and the second installation portion 12, and adjust the range of the second distance D2 accordingly. The first distance D1 is adjusted correspondingly according to the second distance D2, which will be described in detail later. Both the first magnetic pressing wheel 22 and the second magnetic pressing wheel 32 are magnetic disks. In this embodiment, the first magnetic pressing wheel 22 and the second magnetic pressing wheel 32 have magnetism, and the first magnetic pressing wheel 22 is provided with a plurality of equidistant first magnetic members 221 around the center position outward. ; The second magnetic pressing wheel 32 is provided with a plurality of equidistant second magnetic members 321 around the center position outward.

After understanding the overall structure of this creation as described above, I will then elaborate on how this creation uses magnetic attraction as a non-contact magnetic transmission method to improve the smoothness and stability of the workpiece conveying. Please refer to Figure 5, Figure 6 and Figure 7 at the same time. Figure 5 is a schematic diagram of the state of the workpiece conveyed in the wet process equipment; Figure 6 is a schematic diagram of the state before the workpiece is conveyed; Figure 7 is this Schematic diagram of the state of the first embodiment in the creation of conveying workpieces. When the workpiece 50 is placed at the conveying end of the conveying work area 101, the first shaft 21 of the first pressing unit 20 further includes a plurality of conveying wheels 23 arranged at intervals, and the transmission module 40 is used to drive the first shaft 21 to drive The first magnetic pressing wheel 22 and the conveying wheel 23 rotate, wherein the transmission member 42 may be a coupling for pivotally connecting the first shaft 21. When the workpiece 50 hits the conveying wheel 23, it is driven to the path of the output end of the conveying work area 101. At the same time, by the magnetic attraction between the first magnetic pressing wheel 22 and the second magnetic pressing wheel 32, The second magnetic pressing wheel 32 is synchronously driven to rotate in the reverse direction. Then, the magnetic attraction between the first magnetic pressing wheel 22 and the second magnetic pressing wheel 32 will attract and press the upper and lower surfaces of the first side 51 of the workpiece 50, and give the clamping force according to the thickness of the workpiece 50 Road; similarly, the magnetic attraction between the first magnetic pressing wheel 22' and the second magnetic pressing wheel 32' will attract and resist the upper and lower surfaces of the second side 52 of the workpiece 50, and give the clamping according to the thickness of the workpiece 50 Please refer to the structure description in Figure 1 for the supporting pressure channel. By the magnetic attraction between the first magnetic pressing wheel 22 and the second magnetic pressing wheel 32, the effect of giving a corresponding pressing force according to the thickness of the workpiece 50 can be achieved.

It is worth noting that the first distance D1 is smaller than the total thickness W of the workpiece 50, so the first distance D1 is a narrow gap for the workpiece 50 to maintain a stable horizontal movement state, and is clamped by the pressure of magnetic attraction The pressure-resisting channel further solves the problem that the workpiece 50 in the prior art moves or floats unstable due to the impulse of the liquid spray during the wet process. Among them, the plurality of first magnetic members 221 on the first magnetic pressing wheel 22 and the plurality of second magnetic members 321 on the second magnetic pressing wheel 32 are directly affected by the distance between adjacent magnetic members and the number used. The magnetic force and permeability that affect the attraction, so this creation is to arrange the magnetic parts in equidistant arrangement to achieve the optimal smoothness of operation. In the first embodiment, the number of applications of the first magnetic element 221 and the second magnetic element 321 is both six.

As shown in Figure 8 again, it is a schematic diagram of the second embodiment of the present creation and conveying of workpieces. The second embodiment is similar to the first embodiment, which will not be repeated here, and only the differences will be described. Since the thickness of the workpiece 50 will also affect the magnetic attraction strength between the first magnetic pressing wheel 22 and the second magnetic pressing wheel 32, or the magnetic strength needs to be adjusted to meet the requirements of the manufacturing process, the second magnetic force to be configured may be adjusted as required. The number of applications of one magnetic element 221 and second magnetic element 321. In the second embodiment, the number of applications of the first magnetic member 221 and the second magnetic member 321 are both four, for example, applied to a workpiece 50 with a thin thickness, such as a flexible circuit board.

As shown in Fig. 9 again, it is a schematic diagram of the state of the third embodiment of the present creation and conveying of workpieces. The third embodiment is similar to the first embodiment, which will not be repeated here, and only the differences will be described. In the third embodiment, the number of applications of the first magnetic element 221 and the second magnetic element 321 is both nine, for example, applied to a thick workpiece 50, such as a glass substrate or a rigid circuit board. This creation improves the magnetic strength by increasing the number of applications of the first magnetic member 221 and the second magnetic member 321. Of course, the present creation is not limited to the number of applications of the first magnetic member 221 and the second magnetic member 321, and can be adjusted accordingly as required.

As shown in Fig. 10 again, it is a schematic diagram of the state of the fourth embodiment in the creation and conveying of workpieces. The lifting adjustment member 13 of the seat body 10 can be an air cylinder or any mechanical transmission method. In the fourth embodiment, the lifting adjusting member 13 can be installed on the first mounting portion 11. The lifting adjusting member 13 adjusts the distance between the first mounting portion 11 and the second mounting portion 12, and the first axis is adjusted accordingly. The second distance D2 between the rod 21 and the second shaft 31 is in the range, and the first distance D1 between the first magnetic pressing wheel 22 and the second magnetic pressing wheel 32 is adjusted correspondingly according to the second distance D2. Of course, the lifting adjustment member 13 can also be installed on the second installation part 12, and the distance between the second installation part 12 and the first installation part 11 is adjusted by the lifting adjustment member 13, and the present invention is not limited to the lifting adjustment part 13 here. As long as the distance between the first installation part 11 and the second installation part 12 can be adjusted for the installation position of, it is the scope of patent protection of this creation.

Yet another embodiment, as shown in Figure 11, is a schematic diagram of a partial structure of this creation. The transmission module 40 of this creation, in addition to the aforementioned coupling as the transmission member 42, the transmission member 42 can also be designed as a mechanical transmission mode to meet industrial production costs and maintenance considerations. In this embodiment, the transmission member 42 includes a gear set 421 and a transmission shaft 422. The gear set 421 has a driving gear 4211 and a driven gear 4212. The transmission shaft 422 is pivotally connected between the motor 41 and the driving gear 4211. The gear 4211 and the driven gear 4212 mesh with each other, and the driven gear 4212 is pivotally connected to the first shaft 21. When the motor 41 is driven, the drive shaft 422 pivots to drive the driving gear 4211 to mesh with the driven gear 4212 to rotate synchronously, and the first shaft 21 is driven by the driven gear 4212 to rotate to drive the first magnetic pressing wheel 22 to rotate; The magnetic attraction between the magnetic pressing wheel 22 and the second magnetic pressing wheel 32 synchronously drives the second magnetic pressing wheel 32 to rotate in the opposite direction. The overall design of the magnetic wheel transmission device in this creation can not only simplify the transmission mode of the existing technology and a large number of gears, but also can be matched with an innovative magnetic transmission structure to improve the efficiency and smoothness of conveying workpieces, which has an industrial competitive advantage.

Looking at the above, it can be seen that this creation breaks through the previous technology and innovatively improves the transmission structure of the wet process equipment. It uses magnetic attraction as a non-contact magnetic transmission method to improve the stability and smoothness of the overall conveying workpiece, and then Improve production yield and efficiency. In addition, the mechanical transmission method that does not use gears in this creation can completely solve the problem of transmission wear between the existing gears and gears, and the problems of erosion when immersed in the chemical liquid, which affects the transmission efficiency and service life. Furthermore, this creation uses magnetic attraction as a non-contact magnetic transmission method to solve the slippage problem of the pressing wheel and spring pressing workpiece used in the prior art. It has indeed achieved the desired effect and is not familiar with it. This art is easy to think about. This creation has not been published before the application, and its progressiveness and practicality show that it has met the requirements of patent application. You file a patent application in accordance with the law, and I implore your office to approve this new patent application to encourage the new model, and it will be convenient .

The above-mentioned embodiments are only to illustrate the technical ideas and characteristics of this creation, and their purpose is to enable those who are familiar with the art to understand the content of this creation and implement them accordingly. When they cannot be used to limit the patent scope of this creation, That is to say, all equal changes or modifications made in accordance with the spirit of this creation should still be covered by the scope of the patent of this creation.

100: Wet process equipment 101: Conveying work area 10: Seat 11: The first installation part 12: The second installation part 13: Lifting adjustment piece 20: The first pressure unit 21: The first shaft 22, 22’: The first magnetic pressure roller 221: The first magnetic piece 23: Conveyor wheel 30: The second pressure unit 31: second shaft 32, 32’: The second magnetic pressure roller 321: The second magnetic part 40: Transmission module 41: Motor 42: Transmission parts 421: Gear Set 4211: driving gear 4212: passive gear 422: drive shaft 50: Workpiece 51: first side 52: second side D1: First pitch D2: second spacing W: total thickness

Figure 1 is a schematic diagram of the structure of the creation applied to wet process equipment. Figure 2 is a three-dimensional diagram of the structure of this creation. Figure 3 is a side view of the structure of this creation. Figure 4 is a side view of the structure from another perspective of this creation. Figure 5 is a schematic diagram of the state of conveying workpieces created in a wet process equipment. Figure 6 is a schematic diagram of the state before the creation and conveying of the workpiece. Figure 7 is a schematic diagram of the state of the first embodiment in creating and conveying workpieces. Figure 8 is a schematic diagram of the second embodiment in the process of creating and conveying workpieces. Figure 9 is a schematic diagram of the state of the third embodiment in creating and conveying workpieces. Figure 10 is a schematic diagram of the state of the fourth embodiment in creating and conveying workpieces. Figure 11 is a schematic diagram of the local structure of this creation.

10: Seat

11: The first installation part

12: The second installation part

13: Lifting adjustment piece

20: The first pressure unit

21: The first shaft

22, 22’: The first magnetic pressure roller

30: The second pressure unit

31: second shaft

32, 32’: The second magnetic pressure roller

42: Transmission parts

D2: second spacing

Claims (10)

A magnetic wheel transmission device is suitable for a conveying work area (101) of a wet process equipment (100). The magnetic wheel transmission device is used to convey at least one workpiece (50) in the conveying work area (101). The wheel drive includes: A body (10); A first pressing unit (20) is arranged on the base (10). The first pressing unit (20) includes a first shaft (21) and a shaft connected to the first shaft (21). At least one first magnetic pressing wheel (22); A second pressing unit (30) is arranged on the base (10), and the second pressing unit (30) is arranged in parallel with the position of the first pressing unit (20), and the second pressing unit (30) is arranged in parallel with the position of the first pressing unit (20). The unit (30) includes a second shaft (31) and at least one second magnetic pressing wheel (32) axially connected to the second shaft (31); and A transmission module (40), coupled to the first pressing unit (20), the transmission module (40) for driving the first shaft (21) to drive the first magnetic pressing wheel (22) When rotating, the magnetic attraction between the first magnetic pressing wheel (22) and the second magnetic pressing wheel (32) synchronously drives the second magnetic pressing wheel (32) to rotate in reverse. The magnetic wheel transmission device according to claim 1, wherein there is a first distance (D1) between the first magnetic pressing wheel (22) and the second magnetic pressing wheel (32). The magnetic wheel transmission device according to claim 2, wherein the first distance (D1) is smaller than the total thickness (W) of the workpiece (50). The magnetic wheel transmission device according to claim 1, wherein the base body (10) has a first mounting portion (11) and a second mounting portion (12) on two opposite sides, and the first shaft (21) Is mounted on the first mounting portion (11), the second shaft (31) is mounted on the second mounting portion (12), so that between the first shaft (21) and the second shaft (31) A second distance (D2) is formed. There is a first distance (D1) between the first magnetic pressing wheel (22) and the second magnetic pressing wheel (32). The first distance (D1) is Adjust the two spacing (D2) accordingly. The magnetic wheel transmission device according to claim 4, wherein the base body (10) further has a lifting adjusting member (13), and the lifting adjusting member (13) is connected to the first mounting portion (11) and the second The mounting portion (12) is used for adjusting the distance between the first mounting portion (11) and the second mounting portion (12), and adjusting the second distance (D2) range accordingly. The magnetic wheel transmission device according to claim 1, wherein the first magnetic pressing wheel (22) is provided with a plurality of equidistant first magnetic members (221) around the center position outward, and the second magnetic pressing wheel (22) The wheel (32) is provided with a plurality of equidistant second magnetic members (321) around the center of the wheel (32). The magnetic wheel transmission device according to claim 1, wherein the first magnetic pressing wheel (22) and the second magnetic pressing wheel (32) are both magnetic disks. The magnetic wheel transmission device according to claim 1, wherein the transmission module (40) includes: A motor (41); and A transmission member (42) coupled to the motor (41) and the first shaft (21) of the first pressing unit (20); The motor (41) is used to drive the transmission member (42) to operate, so that the transmission member (42) rotates to drive the first shaft (21). The magnetic wheel transmission device according to claim 8, wherein the transmission member (42) is a coupling, and the coupling is used for pivotally connecting the first shaft (21). The magnetic wheel transmission device according to claim 8, wherein the transmission member (42) includes a gear set (421) and a transmission shaft (422), and the gear set (421) has a driving gear (4211) and a passive gear Gear (4212), the transmission shaft (422) is pivotally connected between the motor (41) and the driving gear (4211), the driving gear (4211) and the driven gear (4212) mesh with each other, and the driven gear (4212) ) Is pivotally connected to the first shaft (21).

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