TWM609818U - Substrate module integrated with piezoelectric component - Google Patents
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Abstract
一種整合壓電組件的基板模組,其中包括:一基板,具有至少一功能區塊,每一功能區塊中具有至少一間隔層貼合於基板的背面,及至少一平面式壓電組件,至少一平面式壓電組件貼合於間隔層相對於基板的一側面;其中,至少一平面式壓電組件能夠接收一訊號源輸出的電壓訊號後因逆壓電效應產生震動進而驅動基板產生震動,或者能夠受到基板的震動或應變而被驅動,而使得平面式壓電組件因壓電效應產生一響應訊號。A substrate module integrating piezoelectric components, which includes: a substrate with at least one functional block, each functional block having at least one spacer layer attached to the back of the substrate, and at least one planar piezoelectric component, At least one planar piezoelectric element is attached to a side surface of the spacer layer opposite to the substrate; wherein, at least one planar piezoelectric element can receive a voltage signal output by a signal source and then vibrate due to the inverse piezoelectric effect, thereby driving the substrate to vibrate , Or can be driven by the vibration or strain of the substrate, so that the planar piezoelectric component generates a response signal due to the piezoelectric effect.
Description
本創作涉及一種整合壓電組件的基板模組,特別是涉及一種使用於行動裝置顯示面板、筆記本面板、顯示器或其它類型電子裝置基板上的整合壓電組件的基板模組。The present creation relates to a substrate module integrating piezoelectric components, in particular to a substrate module integrating piezoelectric components used on the substrates of mobile device display panels, notebook panels, displays or other types of electronic devices.
現有的電子產品為達到縮減體積的目的,通常將壓電組件整合於電路基板或面板模組上。例如:手機面板上整合有壓電揚聲器,而使得手機螢幕兼具有揚聲器功能。In order to reduce the volume of existing electronic products, piezoelectric components are usually integrated on a circuit substrate or a panel module. For example, a piezoelectric speaker is integrated on the panel of a mobile phone, so that the mobile phone screen also has a speaker function.
壓電組件的原理是透過壓電材料具有壓電效應的特性,而將壓電材料作為揚聲器、震動產生器、或者是傳感器的用途。然而現有的壓電組件整合於電路基板或面板的技術卻存在有壓電元件整合不易,並且整合的壓電組件的功能有限的問題存在。The principle of the piezoelectric component is to have the characteristics of the piezoelectric effect through the piezoelectric material, and the piezoelectric material is used as a speaker, a vibration generator, or a sensor. However, the existing technology of integrating piezoelectric components on a circuit substrate or a panel has problems that the integration of piezoelectric components is not easy, and the functions of the integrated piezoelectric components are limited.
本創作主要目的,在於解決現有壓電組件整合於面板或電路基板上時整合不易的問題。The main purpose of this creation is to solve the problem of difficult integration when the existing piezoelectric components are integrated on a panel or a circuit substrate.
為解決上述問題,本創作一實施例提供一種整合壓電組件的基板模組,其中包括:一基板,所述基板具有相對的正面及背面,所述基板能夠規劃出至少一功能區塊,每一所述功能區塊中具有:至少一間隔層,至少一所述間隔層貼合於所述基板的背面;及至少一平面式壓電組件,至少一所述平面式壓電組件朝向所述基板的一側貼合於所述間隔層相對於所述基板的一側面;其中,至少一所述平面式壓電組件能夠接收一訊號源輸出的電壓訊號後因逆壓電效應產生震動進而驅動所述基板產生震動,或者能夠受到所述基板的震動或應變而被驅動,而使得所述平面式壓電組件因壓電效應產生一響應訊號。In order to solve the above-mentioned problems, an embodiment of the present invention provides a substrate module integrating piezoelectric components, which includes: a substrate having opposite front and back surfaces, the substrate being able to plan at least one functional block, each One of the functional blocks has: at least one spacer layer, at least one of the spacer layers is attached to the back of the substrate; and at least one planar piezoelectric element, at least one of the planar piezoelectric element faces the One side of the substrate is attached to a side surface of the spacer layer opposite to the substrate; wherein, at least one of the planar piezoelectric components can receive a voltage signal output by a signal source and then vibrate due to the inverse piezoelectric effect to drive The substrate is vibrated, or can be driven by the vibration or strain of the substrate, so that the planar piezoelectric component generates a response signal due to the piezoelectric effect.
本創作一優選實施例,其中至少一所述平面式壓電組件分別具有至少一壓電震動體,至少一所述壓電震動體包括一壓電材料層以及兩電極層,兩所述電極層分別接觸於所述壓電材料層相對的兩側面。In a preferred embodiment of the present invention, at least one of the planar piezoelectric components has at least one piezoelectric vibrating body, and at least one of the piezoelectric vibrating bodies includes a piezoelectric material layer and two electrode layers, and the two electrode layers They are respectively in contact with two opposite sides of the piezoelectric material layer.
本創作一優選實施例,其中所述壓電震動體的所述壓電材料層為壓電性樹脂薄膜或為壓電陶瓷薄膜。In a preferred embodiment of the invention, the piezoelectric material layer of the piezoelectric vibrating body is a piezoelectric resin film or a piezoelectric ceramic film.
本創作一優選實施例,其中每一所述平面壓電組件具有一個所述壓電震動體,或者具有多個所述壓電震動體相互疊合。In a preferred embodiment of the present invention, each of the planar piezoelectric components has one piezoelectric vibrating body, or has a plurality of piezoelectric vibrating bodies superimposed on each other.
本創作一優選實施例,其中所述間隔層的兩側面分別透過一接合層貼合於所述基板的背面和所述平面式壓電組件的表面。In a preferred embodiment of the present invention, the two side surfaces of the spacer layer are respectively attached to the back surface of the substrate and the surface of the planar piezoelectric component through a bonding layer.
本創作一優選實施例,其中所述基板為可撓性基板或為剛性基板,當所述基板為可撓性基板時,所述間隔層的楊氏係數大於所述基板的楊氏係數,當所述基板為剛性基板時,所述間隔層的楊氏係數小於所述基板的楊氏係數。In a preferred embodiment of the present invention, the substrate is a flexible substrate or a rigid substrate. When the substrate is a flexible substrate, the Young's coefficient of the spacer layer is greater than the Young's coefficient of the substrate. When the substrate is a rigid substrate, the Young's coefficient of the spacer layer is smaller than the Young's coefficient of the substrate.
本創作一優選實施例,其中至少一所述間隔層可以為發泡橡膠層、或為樹脂材料層、或為高分子壓電膜。In a preferred embodiment of the present invention, at least one of the spacer layers can be a foamed rubber layer, or a resin material layer, or a polymer piezoelectric film.
為使能更進一步瞭解本創作的特徵及技術內容,請參閱以下有關本創作的詳細說明與圖式,然而所提供的圖式僅用於提供參考與說明,並非用來對本創作加以限制。In order to further understand the features and technical content of this creation, please refer to the following detailed descriptions and drawings about this creation. However, the drawings provided are only for reference and explanation, and are not used to limit this creation.
以下是通過特定的具體實施例來說明本創作所公開有關“整合壓電組件的基板模組”的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本創作的優點與效果。本創作可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不悖離本創作的構思下進行各種修改與變更。另外,本創作的附圖僅為簡單示意說明,並非依實際尺寸的描繪,事先聲明。以下的實施方式將進一步詳細說明本創作的相關技術內容,但所公開的內容並非用以限制本創作的保護範圍。The following is a specific embodiment to illustrate the implementation of the "substrate module integrated with piezoelectric components" disclosed in this creation. Those skilled in the art can understand the advantages and effects of this creation from the content disclosed in this specification. This creation can be implemented or applied through other different specific embodiments, and various details in this specification can also be based on different viewpoints and applications, and various modifications and changes can be made without departing from the concept of this creation. In addition, the drawings of this creation are merely schematic illustrations, and are not depicted in actual size, and are stated in advance. The following implementations will further describe the related technical content of this creation in detail, but the disclosed content is not intended to limit the protection scope of this creation.
應當可以理解的是,雖然本文中可能會使用到“第一”、“第二”、“第三”等術語來描述各種元件或者訊號,但這些元件或者訊號不應受這些術語的限制。這些術語主要是用以區分一元件與另一元件,或者一訊號與另一訊號。另外,本文中所使用的術語“或”,應視實際情況可能包括相關聯的列出項目中的任一個或者多個的組合。It should be understood that although terms such as “first”, “second”, and “third” may be used in this document to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are mainly used to distinguish one element from another, or one signal from another signal. In addition, the term "or" used in this document may include any one or a combination of more of the associated listed items depending on the actual situation.
如圖1至圖2所示,為本創作整合壓電組件的基板模組1的第一實施例, 本創作整合壓電組件的基板模組1主要包括:一基板10、至少一間隔層20、及至少一平面式壓電組件30。As shown in Figures 1 to 2, this is the first embodiment of creating a
其中,基板10可以為顯示面板,或者是顯示面板背蓋、顯示器保護蓋板、電路載板,或者是其它類型的基板。基板10可以為具有可撓性的板體,也可以為剛性的基板。具體來說,本創作的其中一實施例,基板10可以為可撓性的OLED或MICRO LED顯示面板,而在本創作另一實施例中,基板10可以為剛性的液晶顯示面板,或者為顯示面板的保護背蓋或保護蓋板。當然,本創作基板10的類型不限上述實施例所列舉。Wherein, the
基板10具有相對的正面及背面,本創作將間隔層20安排設置於基板10的背面,且將平面式壓電組件30安排設置於間隔層20相對於基板10的一側。The
本實施例中,間隔層20包括一基材層21,基材層21朝向基板10的一側透過一接合層22貼合在基板10的背面,並且朝向平面式壓電組件30的一側面設置另一接合層22,且透過接合層22將平面式壓電組件30貼合在間隔層20相對於基板10的一側面。In this embodiment, the
其中,基材層21可以選用具有彈性的發泡材料、樹脂層,或者為高分子材料和陶瓷或金屬顆粒混合的複合材料所製成。當基材層21選用發泡材料時,可列舉的材料包括:乙烯丙烯橡膠發泡體、丁基橡膠發泡體、腈橡膠發泡體、天然橡膠發泡體、苯乙烯丁二烯橡膠發泡體、矽氧樹脂發泡體等。當基材層21採用樹脂材料製成時,可列舉的材料包括:乙烯丙烯橡膠層、丁基橡膠層、腈橡膠層、天然橡膠、矽氧樹脂、丙烯酸樹脂層等。當基材層21為樹脂材料或發泡材料和金屬顆粒或陶瓷顆粒混合的複合材料時,可以為上述列舉的樹脂材料或發泡材料和陶瓷顆粒,如:氧化鋁、氧化鋯、碳化矽等顆粒材料,或金屬顆粒:如:銅、鋁、鐵、鎢等金屬顆粒的一種或多種顆粒的混合。Among them, the
基材層21兩側面的接合層22則為塗布在基材層21兩側面的膠層或黏著劑層所構成,因此能夠將間隔層20實質上視為雙面膠,而能夠方便地用以將平面式壓電組件30貼附於基板10的背面。The
平面式壓電組件30具有至少一個壓電震動體31,壓電震動體31包括一壓電材料層311,以及設置於壓電材料層311兩側面的兩電極層312,兩電極層312分別接觸所述壓電材料層311,而使得兩電極層312能夠和壓電材料層311的兩側面形成電性傳導。The planar
壓電震動體31的壓電材料層311能夠選用高分子壓電薄膜,或者是壓電性陶瓷薄膜所製成,當選用高分子壓電薄膜時,壓電材料層311能夠選用的材料可列舉:聚偏氟乙烯、尼龍、聚氯乙烯、聚甲基丙烯酸甲酯、聚丙烯等。當壓電材料層311選用壓電性陶瓷薄膜時,可列舉材料包括:鋯酸鉛、鋯鈦酸鉛、鈦酸鋯酸鑭鉛、鈦酸鋇、Bi層狀化合物、鎢青銅構造化合物等。The
兩電極層312透過蒸鍍、濺鍍、沈積、塗怖、印刷等方式設置於壓電材料層311的兩側面。兩電極層312能夠選用的材料包括導電性奈米材料層、奈米金屬材料層、金屬氧化導電層、導電高分子材料層、或導電膠材料層。The two
當電極層312為奈米導電材料或奈米金屬時,可以選用的材料種類包括:奈米碳管、石墨烯、奈米碳球、奈米金、奈米銀、奈米金屬線等類型材料。當電極層312為金屬氧化導電層時,可以為氧化銦錫層(ITO)。此外,電極層312也能夠選用高分子導電材料或者是導電膠,其中導電高分子材料可以為本質型導電聚合物(intrinsically conductive polymer),例如:聚乙炔、PEDOT。也可以為摻雜或混煉導電粒子的高分子材料薄膜。When the
如圖2所示,本創作的平面式壓電組件30的工作原理,為每一壓電震動體31兩側面的電極層312分別連接於一訊號源32,訊號源32輸出的電壓訊號傳導到電極層312時,將使得壓電材料層311的兩側面帶有電場,且因逆壓電原理而使得壓電材料層311產生震動,而使得平面式壓電組件30因震動產生聲音,或者產生反饋的震動。當平面式壓電組件30震動時,能夠透過間隔層20帶動基板10沿著基板10表面的法線方向震動或變形,因此使得基板10能夠成為震動體的一部份,而使得基板10能夠大面積地產生聲音或震波。As shown in FIG. 2, the working principle of the planar
此外,在本創作另一運用實例中,平面式壓電組件30中各個壓電震動體31能夠在基板10震動或形變時,受到基板10的震動或變形而被驅動,而使得壓電震動體31的壓電材料層311因此產生彎曲或應變,並因壓電效應使得壓電材料層311相對兩側面帶有電荷,因此使得壓電震動體31產生一響應訊號。因此,本創作的平面式壓電組件30能夠透過壓電材料層311的壓電效應或逆壓電效應,而形成揚聲器、接收器、超聲波產生器、超聲波感測器、壓力感測器、震動感測器、變形感測器、震動產生器等各種不同功能的壓電組件的其中之一。In addition, in another application example of this creation, each piezoelectric vibrating
平面壓電組件30透過間隔層20連接於基板10的背面,因此使得平面壓電組件30震動時,能夠透過間隔層20將平面壓電組件30的震動傳導到基板10,或者在基板10彎曲或變形時,透過間隔層20帶動平面壓電組件30一起震動或變形。The planar
為達到使得平面壓電組件30和基板10之間能夠透過間隔層20相互傳導震動或應變的目的,間隔層20本身必須具有適當的剛性,以使得震動或應變能夠透過間隔層20傳遞時不會產生能量消耗或延遲的情形。具體來說,本創作的間隔層20的剛性能夠以間隔層20材料和基板10材料的楊氏係數來表示,當基板10為剛性的基板時,間隔層20的楊氏係數安排為低於基板10的楊氏係數,而當基板10為可撓性基板10時,則間隔層20的楊氏係數安排為大於基板10的楊氏係數。In order to enable the planar
本實施例中,基板10規劃有至少一功能區塊11,且在至少一功能區塊11中設置單一的間隔層20,並且平面式壓電組件30是由單獨一層的壓電震動體31所構成。更詳細地說,本實施例中,在平面視角方向上,間隔層20的面積大致上和基板10的功能區塊11的面積相符,因此使得基板10的至少一功能區塊11被間隔層20所覆蓋。並且間隔層20的面積大於或等於平面式壓電組件30的面積。換句話說,平面式壓電組件30的面積不大於功能區塊11的面積。In this embodiment, the
如圖3所示,為本創作整合壓電組件的基板模組1的第二實施例,本實施例中,基板10從平面視圖方向能夠定義出相互垂直的第一軸向D1和第二軸向D2,並且本實施例中,基板10規劃至少一功能區塊11,且在同一個功能區塊11中設置了單獨一個間隔層20,並且在每一間隔層20上分別設置多個概略呈矩形的平面式壓電組件30,多個所述平面式壓電組件30的面積小於間隔層20的面積,並且多個平面式壓電組件30是以沿著第一軸向D1相互間隔地排列設置於間隔層20相對於基板10的一側。As shown in FIG. 3, this is the second embodiment of creating a
如圖4及圖5所示,本實施例由於多個平面式壓電組件30彼此相互間隔,因此使得每兩個相鄰的平面式壓電組件30之間形成間隙,因此使得位於每兩相鄰的平面式壓電組件30之間位置的基板10和間隔層20具有可彎曲的空間,而使得基板10和間隔層20彎曲時,平面式壓電組件30不會隨著基板10一起彎曲,或者使得平面式壓電組件30彎曲的幅度減小,因此本實施例特別適合運用在可撓性的基板10上。As shown in Figs. 4 and 5, in this embodiment, since the plurality of planar
如圖6所示,為本創作整合壓電組件的基板模組1的第三實施例,本實施例的間隔層20和平面式壓電組件30的配置方式和第二實施例類似,為在每一功能區塊11中配置單一的間隔層20,並且間隔層20上配置多個面積較小的平面式壓電組件30。本實施例的不同之處,在於多個平面式壓電組件30是以分別沿著基板10的第一軸向D1和第二軸向D2,而以矩陣方式設置在間隔層20相對於基板10的一側面,因此使得本實施例的整合壓電組件的基板模組1的基板10能夠沿著第一軸向D1和第二軸向D2彎曲。As shown in FIG. 6, this is the third embodiment of the
如圖7所示,為本創作整合壓電組件的基板模組1的第四實施例,本實施例中,為在基板10的同一功能區塊11設置多個間隔層20,多個間隔層20大致上是呈矩形的形狀,並且沿著基板10的第一軸向D1相互間隔地設置於基板10的功能區塊11中。並且本實施例中,平面壓電組件30的面積大於各個間隔層20的面積,並且每一平面壓電組件30同時覆蓋多個間隔層20,而透過多個間隔層20將平面壓電組件30結合於基板10的背面。As shown in FIG. 7, this is a fourth embodiment of creating a
因此,如圖8所示,本創作整合壓電組件的基板模組1的第四實施例形成多個間隔層20夾合在平面式壓電組件30和基板10之間的三明治狀結構,並且各個間隔層20之間具有間隙。Therefore, as shown in FIG. 8, the fourth embodiment of the
如圖9所示,為本創作整合壓電組件的基板模組1的第五實施例,本實施例和第四實施例相似,為在每一功能區塊11中配置多個間隔層20,並且由一個平面式壓電組件30貼合於多個間隔層20相對於基板10的一側面。本實施例的不同之處,在於多個間隔層20是以分別沿著基板10的第一軸向D1和第二軸向D2,而以矩陣方式設置在間隔層20相對於基板10的一側面。As shown in FIG. 9, this is a fifth embodiment of creating a
如圖10及圖11所示,如圖12所示,為本創作整合壓電組件的基板模組1的第七實施例,本實施例相較於前述各實施例的不同點,在於將間隔層20和平面式壓電組件30的配置方式,變更為在每一工作區域內設置多個間隔層20,多個間隔層20沿著基板10的第一軸向D1相互間隔排列,或者同時沿著第一軸向D1和第二軸向D2以矩陣方式設置於基板10的背面。並且每一間隔層20相對於基板10的一側面分別設置一平面式壓電組件30,並且每一平面式壓電組件30的面積等於或小於相對應的間隔層20的面積。As shown in Figures 10 and 11, as shown in Figure 12, this is a seventh embodiment of creating a
為本創作整合壓電組件的基板模組1的第六實施例,本實施例相較於前述各實施例的不同點,在於平面式壓電組件30是由多個壓電震動體31相互重疊而成,因此能夠透過將壓電震動體31堆疊的方式,調整或增強平面式壓電組件30的震動強度。This is the sixth embodiment of the creation of the
如圖13所示,為本創作整合壓電組件的基板模組1的第八實施例,本實施例的不同點,在於採用的間隔層20包括一高分子壓電膜23,且於高分子壓電膜23的兩側面分別設置一導電層231,因此使得本實施例的間隔層20能夠形成和平面式壓電組件30近似功能的壓電元件。As shown in FIG. 13, this is the eighth embodiment of the
特別說明,本實施例中,間隔層20的兩電極層312能夠和平面式壓電組件30的電極層共同地連接至相同的訊號源或者訊號接收器,而和平面式壓電組件30共同執行相同的功能,例如,利用本實施例的間隔層20和平面式壓電組件30共同地構成揚聲器的發聲單體。或者,能夠將本實施例的間隔層20的兩導電層231和平面式壓電組件30的電極層分別連接至不同的訊號源或接收器,而使得間隔層20和平面式壓電組件30分別執行不同功能,例如:平面式壓電組件30連接一訊號源形成揚聲器或超聲波產生器,而間隔層20的兩電極層312連接於一訊號接收器,而形成震動或聲波接收器。In particular, in this embodiment, the two
如圖14所示為本創作整合壓電組件的基板模組1的第九實施例,本實施例中,為在基板10上規劃多個不同的功能區塊11,在每一功能區塊11中分別設置至少一間隔層20和至少一平面式壓電組件30,並且每一功能區塊11中的平面式壓電組件30能夠規劃為多組相互獨立且分別用以執行不同類型功能的壓電組件,例如:多個不同功能區塊11能夠分別規劃為:揚聲器、接收器、超聲波產生器、超聲波感測器、壓力感測器、震動感測器、變形感測器、震動產生器等各種不同功能的壓電組件的其中之一或其組合。Fig. 14 shows a ninth embodiment of creating a
〔實施例的可能功效〕[Possible effects of the embodiment]
綜上所述,本創作的有益效果主要在於能夠透過間隔層20作為將平面式壓電組件30設置於基板10背面的連結層,一方面能夠將平面式壓電組件30快速設置於基板10背面,另一方面能夠作為震動傳導的介質,且產生緩衝的效果,或者是透過改變間隔層20的材料密度、彈性係數而達到調整震動幅度或音質的目的。To sum up, the beneficial effects of this creation are mainly that the
此外,透過本創作技術手段能夠使得基板模組1整合不同的功能的壓電組件,而減少了電子裝置的元件數量並減少厚度。In addition, through the creative technical means, the
以上所述僅為本創作的較佳可行實施例,非因此侷限本創作的專利範圍,故舉凡運用本創作說明書及圖式內容所做的等效技術變化,均包含於本創作的保護範圍內。The above descriptions are only the preferred and feasible embodiments of this creation, which do not limit the scope of the creation of this creation. Therefore, all equivalent technical changes made using this creation specification and schematic content are included in the scope of protection of this creation. .
1:基板模組 10:基板 11:功能區塊 20:間隔層 21:基材層 22:接合層 23:高分子壓電膜 231:導電層 30:平面式壓電組件 31:壓電震動體 311:壓電材料層 312:電極層 32:訊號源1: substrate module 10: substrate 11: Function block 20: Interval layer 21: Substrate layer 22: Bonding layer 23: Polymer piezoelectric film 231: Conductive layer 30: Planar piezoelectric components 31: Piezoelectric vibrating body 311: Piezoelectric material layer 312: Electrode layer 32: signal source
圖1為本創作整合壓電組件的基板模組第一實施例的立體分解示意圖。FIG. 1 is a three-dimensional exploded schematic diagram of a first embodiment of creating a substrate module integrating piezoelectric components.
圖2為本創作整合壓電組件的基板模組第一實施例的工作原理示意圖。FIG. 2 is a schematic diagram of the working principle of the first embodiment of creating a substrate module integrating piezoelectric components.
圖3本創作整合壓電組件的基板模組第二實施例的立體分解示意圖。FIG. 3 is a three-dimensional exploded schematic diagram of the second embodiment of the substrate module with integrated piezoelectric components according to the present invention.
圖4為本創作整合壓電組件的基板模組第二實施例的剖面示意圖。4 is a schematic cross-sectional view of a second embodiment of the creation of a substrate module integrating piezoelectric components.
圖5為本創作整合壓電組件的基板模組第二實施例在基板彎曲狀態下的剖面示意圖。FIG. 5 is a schematic cross-sectional view of a second embodiment of a substrate module with integrated piezoelectric components created when the substrate is bent.
圖6為本創作整合壓電組件的基板模組第三實施例的立體分解示意圖。FIG. 6 is a three-dimensional exploded schematic diagram of a third embodiment of creating a substrate module integrating piezoelectric components.
圖7為本創作整合壓電組件的基板模組第四實施例的立體分解示意圖。FIG. 7 is a three-dimensional exploded schematic diagram of a fourth embodiment of creating a substrate module integrating piezoelectric components.
圖8為本創作整合壓電組件的基板模組第四實施例的剖面示意圖。FIG. 8 is a schematic cross-sectional view of a fourth embodiment of the creation of a substrate module integrating piezoelectric components.
圖9為本創作整合壓電組件的基板模組第五實施例的立體分解示意圖。FIG. 9 is a three-dimensional exploded schematic diagram of a fifth embodiment of creating a substrate module integrating piezoelectric components.
圖10為本創作整合壓電組件的基板模組第六實施例的立體分解示意圖。FIG. 10 is a three-dimensional exploded schematic diagram of a sixth embodiment of creating a substrate module integrating piezoelectric components.
圖11為本創作整合壓電組件的基板模組第六實施例的剖面示意圖。FIG. 11 is a schematic cross-sectional view of a sixth embodiment of creating a substrate module integrating piezoelectric components.
圖12為本創作整合壓電組件的基板模組第七實施例的剖面示意圖。FIG. 12 is a schematic cross-sectional view of a seventh embodiment of a substrate module with integrated piezoelectric components.
圖13為本創作整合壓電組件的基板模組第八實施例的剖面示意圖。FIG. 13 is a schematic cross-sectional view of an eighth embodiment of creating a substrate module integrating piezoelectric components.
圖14為本創作整合壓電組件的基板模組第九實施例的剖面示意圖。14 is a schematic cross-sectional view of a ninth embodiment of a substrate module with integrated piezoelectric components.
1:基板模組 1: substrate module
10:基板 10: substrate
11:功能區塊 11: Function block
20:間隔層 20: Interval layer
30:平面式壓電組件 30: Planar piezoelectric components
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