TWM609818U - Substrate module integrated with piezoelectric component - Google Patents

Substrate module integrated with piezoelectric component Download PDF

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TWM609818U
TWM609818U TW109213828U TW109213828U TWM609818U TW M609818 U TWM609818 U TW M609818U TW 109213828 U TW109213828 U TW 109213828U TW 109213828 U TW109213828 U TW 109213828U TW M609818 U TWM609818 U TW M609818U
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substrate
piezoelectric
planar
spacer
layer
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TW109213828U
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Chinese (zh)
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鄭岳世
古宜訓
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華一聲學股份有限公司
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Publication of TWM609818U publication Critical patent/TWM609818U/en

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Abstract

一種整合壓電組件的基板模組,其中包括:一基板,具有至少一功能區塊,每一功能區塊中具有至少一間隔層貼合於基板的背面,及至少一平面式壓電組件,至少一平面式壓電組件貼合於間隔層相對於基板的一側面;其中,至少一平面式壓電組件能夠接收一訊號源輸出的電壓訊號後因逆壓電效應產生震動進而驅動基板產生震動,或者能夠受到基板的震動或應變而被驅動,而使得平面式壓電組件因壓電效應產生一響應訊號。A substrate module integrating piezoelectric components, which includes: a substrate with at least one functional block, each functional block having at least one spacer layer attached to the back of the substrate, and at least one planar piezoelectric component, At least one planar piezoelectric element is attached to a side surface of the spacer layer opposite to the substrate; wherein, at least one planar piezoelectric element can receive a voltage signal output by a signal source and then vibrate due to the inverse piezoelectric effect, thereby driving the substrate to vibrate , Or can be driven by the vibration or strain of the substrate, so that the planar piezoelectric component generates a response signal due to the piezoelectric effect.

Description

整合壓電組件的基板模組Substrate module integrating piezoelectric components

本創作涉及一種整合壓電組件的基板模組,特別是涉及一種使用於行動裝置顯示面板、筆記本面板、顯示器或其它類型電子裝置基板上的整合壓電組件的基板模組。The present creation relates to a substrate module integrating piezoelectric components, in particular to a substrate module integrating piezoelectric components used on the substrates of mobile device display panels, notebook panels, displays or other types of electronic devices.

現有的電子產品為達到縮減體積的目的,通常將壓電組件整合於電路基板或面板模組上。例如:手機面板上整合有壓電揚聲器,而使得手機螢幕兼具有揚聲器功能。In order to reduce the volume of existing electronic products, piezoelectric components are usually integrated on a circuit substrate or a panel module. For example, a piezoelectric speaker is integrated on the panel of a mobile phone, so that the mobile phone screen also has a speaker function.

壓電組件的原理是透過壓電材料具有壓電效應的特性,而將壓電材料作為揚聲器、震動產生器、或者是傳感器的用途。然而現有的壓電組件整合於電路基板或面板的技術卻存在有壓電元件整合不易,並且整合的壓電組件的功能有限的問題存在。The principle of the piezoelectric component is to have the characteristics of the piezoelectric effect through the piezoelectric material, and the piezoelectric material is used as a speaker, a vibration generator, or a sensor. However, the existing technology of integrating piezoelectric components on a circuit substrate or a panel has problems that the integration of piezoelectric components is not easy, and the functions of the integrated piezoelectric components are limited.

本創作主要目的,在於解決現有壓電組件整合於面板或電路基板上時整合不易的問題。The main purpose of this creation is to solve the problem of difficult integration when the existing piezoelectric components are integrated on a panel or a circuit substrate.

為解決上述問題,本創作一實施例提供一種整合壓電組件的基板模組,其中包括:一基板,所述基板具有相對的正面及背面,所述基板能夠規劃出至少一功能區塊,每一所述功能區塊中具有:至少一間隔層,至少一所述間隔層貼合於所述基板的背面;及至少一平面式壓電組件,至少一所述平面式壓電組件朝向所述基板的一側貼合於所述間隔層相對於所述基板的一側面;其中,至少一所述平面式壓電組件能夠接收一訊號源輸出的電壓訊號後因逆壓電效應產生震動進而驅動所述基板產生震動,或者能夠受到所述基板的震動或應變而被驅動,而使得所述平面式壓電組件因壓電效應產生一響應訊號。In order to solve the above-mentioned problems, an embodiment of the present invention provides a substrate module integrating piezoelectric components, which includes: a substrate having opposite front and back surfaces, the substrate being able to plan at least one functional block, each One of the functional blocks has: at least one spacer layer, at least one of the spacer layers is attached to the back of the substrate; and at least one planar piezoelectric element, at least one of the planar piezoelectric element faces the One side of the substrate is attached to a side surface of the spacer layer opposite to the substrate; wherein, at least one of the planar piezoelectric components can receive a voltage signal output by a signal source and then vibrate due to the inverse piezoelectric effect to drive The substrate is vibrated, or can be driven by the vibration or strain of the substrate, so that the planar piezoelectric component generates a response signal due to the piezoelectric effect.

本創作一優選實施例,其中至少一所述平面式壓電組件分別具有至少一壓電震動體,至少一所述壓電震動體包括一壓電材料層以及兩電極層,兩所述電極層分別接觸於所述壓電材料層相對的兩側面。In a preferred embodiment of the present invention, at least one of the planar piezoelectric components has at least one piezoelectric vibrating body, and at least one of the piezoelectric vibrating bodies includes a piezoelectric material layer and two electrode layers, and the two electrode layers They are respectively in contact with two opposite sides of the piezoelectric material layer.

本創作一優選實施例,其中所述壓電震動體的所述壓電材料層為壓電性樹脂薄膜或為壓電陶瓷薄膜。In a preferred embodiment of the invention, the piezoelectric material layer of the piezoelectric vibrating body is a piezoelectric resin film or a piezoelectric ceramic film.

本創作一優選實施例,其中每一所述平面壓電組件具有一個所述壓電震動體,或者具有多個所述壓電震動體相互疊合。In a preferred embodiment of the present invention, each of the planar piezoelectric components has one piezoelectric vibrating body, or has a plurality of piezoelectric vibrating bodies superimposed on each other.

本創作一優選實施例,其中所述間隔層的兩側面分別透過一接合層貼合於所述基板的背面和所述平面式壓電組件的表面。In a preferred embodiment of the present invention, the two side surfaces of the spacer layer are respectively attached to the back surface of the substrate and the surface of the planar piezoelectric component through a bonding layer.

本創作一優選實施例,其中所述基板為可撓性基板或為剛性基板,當所述基板為可撓性基板時,所述間隔層的楊氏係數大於所述基板的楊氏係數,當所述基板為剛性基板時,所述間隔層的楊氏係數小於所述基板的楊氏係數。In a preferred embodiment of the present invention, the substrate is a flexible substrate or a rigid substrate. When the substrate is a flexible substrate, the Young's coefficient of the spacer layer is greater than the Young's coefficient of the substrate. When the substrate is a rigid substrate, the Young's coefficient of the spacer layer is smaller than the Young's coefficient of the substrate.

本創作一優選實施例,其中至少一所述間隔層可以為發泡橡膠層、或為樹脂材料層、或為高分子壓電膜。In a preferred embodiment of the present invention, at least one of the spacer layers can be a foamed rubber layer, or a resin material layer, or a polymer piezoelectric film.

為使能更進一步瞭解本創作的特徵及技術內容,請參閱以下有關本創作的詳細說明與圖式,然而所提供的圖式僅用於提供參考與說明,並非用來對本創作加以限制。In order to further understand the features and technical content of this creation, please refer to the following detailed descriptions and drawings about this creation. However, the drawings provided are only for reference and explanation, and are not used to limit this creation.

以下是通過特定的具體實施例來說明本創作所公開有關“整合壓電組件的基板模組”的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本創作的優點與效果。本創作可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不悖離本創作的構思下進行各種修改與變更。另外,本創作的附圖僅為簡單示意說明,並非依實際尺寸的描繪,事先聲明。以下的實施方式將進一步詳細說明本創作的相關技術內容,但所公開的內容並非用以限制本創作的保護範圍。The following is a specific embodiment to illustrate the implementation of the "substrate module integrated with piezoelectric components" disclosed in this creation. Those skilled in the art can understand the advantages and effects of this creation from the content disclosed in this specification. This creation can be implemented or applied through other different specific embodiments, and various details in this specification can also be based on different viewpoints and applications, and various modifications and changes can be made without departing from the concept of this creation. In addition, the drawings of this creation are merely schematic illustrations, and are not depicted in actual size, and are stated in advance. The following implementations will further describe the related technical content of this creation in detail, but the disclosed content is not intended to limit the protection scope of this creation.

應當可以理解的是,雖然本文中可能會使用到“第一”、“第二”、“第三”等術語來描述各種元件或者訊號,但這些元件或者訊號不應受這些術語的限制。這些術語主要是用以區分一元件與另一元件,或者一訊號與另一訊號。另外,本文中所使用的術語“或”,應視實際情況可能包括相關聯的列出項目中的任一個或者多個的組合。It should be understood that although terms such as “first”, “second”, and “third” may be used in this document to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are mainly used to distinguish one element from another, or one signal from another signal. In addition, the term "or" used in this document may include any one or a combination of more of the associated listed items depending on the actual situation.

如圖1至圖2所示,為本創作整合壓電組件的基板模組1的第一實施例, 本創作整合壓電組件的基板模組1主要包括:一基板10、至少一間隔層20、及至少一平面式壓電組件30。As shown in Figures 1 to 2, this is the first embodiment of creating a substrate module 1 integrating piezoelectric components. The substrate module 1 creating integrated piezoelectric components mainly includes: a substrate 10 and at least one spacer layer 20 , And at least one planar piezoelectric component 30.

其中,基板10可以為顯示面板,或者是顯示面板背蓋、顯示器保護蓋板、電路載板,或者是其它類型的基板。基板10可以為具有可撓性的板體,也可以為剛性的基板。具體來說,本創作的其中一實施例,基板10可以為可撓性的OLED或MICRO LED顯示面板,而在本創作另一實施例中,基板10可以為剛性的液晶顯示面板,或者為顯示面板的保護背蓋或保護蓋板。當然,本創作基板10的類型不限上述實施例所列舉。Wherein, the substrate 10 may be a display panel, or a display panel back cover, a display protection cover, a circuit carrier, or other types of substrates. The substrate 10 may be a flexible plate or a rigid substrate. Specifically, in one embodiment of the invention, the substrate 10 may be a flexible OLED or MICRO LED display panel, and in another embodiment of the invention, the substrate 10 may be a rigid liquid crystal display panel or a display panel. The protective back cover or protective cover of the panel. Of course, the type of the creative substrate 10 is not limited to those listed in the above-mentioned embodiment.

基板10具有相對的正面及背面,本創作將間隔層20安排設置於基板10的背面,且將平面式壓電組件30安排設置於間隔層20相對於基板10的一側。The substrate 10 has opposite front and back surfaces. In this creation, the spacer layer 20 is arranged on the back surface of the substrate 10 and the planar piezoelectric component 30 is arranged on the side of the spacer layer 20 opposite to the substrate 10.

本實施例中,間隔層20包括一基材層21,基材層21朝向基板10的一側透過一接合層22貼合在基板10的背面,並且朝向平面式壓電組件30的一側面設置另一接合層22,且透過接合層22將平面式壓電組件30貼合在間隔層20相對於基板10的一側面。In this embodiment, the spacer layer 20 includes a base material layer 21. The base material layer 21 is attached to the back of the substrate 10 through a bonding layer 22 toward the side of the substrate 10, and is disposed toward one side of the planar piezoelectric component 30. Another bonding layer 22 is used to bond the planar piezoelectric element 30 to a side surface of the spacer layer 20 opposite to the substrate 10 through the bonding layer 22.

其中,基材層21可以選用具有彈性的發泡材料、樹脂層,或者為高分子材料和陶瓷或金屬顆粒混合的複合材料所製成。當基材層21選用發泡材料時,可列舉的材料包括:乙烯丙烯橡膠發泡體、丁基橡膠發泡體、腈橡膠發泡體、天然橡膠發泡體、苯乙烯丁二烯橡膠發泡體、矽氧樹脂發泡體等。當基材層21採用樹脂材料製成時,可列舉的材料包括:乙烯丙烯橡膠層、丁基橡膠層、腈橡膠層、天然橡膠、矽氧樹脂、丙烯酸樹脂層等。當基材層21為樹脂材料或發泡材料和金屬顆粒或陶瓷顆粒混合的複合材料時,可以為上述列舉的樹脂材料或發泡材料和陶瓷顆粒,如:氧化鋁、氧化鋯、碳化矽等顆粒材料,或金屬顆粒:如:銅、鋁、鐵、鎢等金屬顆粒的一種或多種顆粒的混合。Among them, the base material layer 21 can be made of an elastic foam material, a resin layer, or a composite material mixed with a polymer material and ceramic or metal particles. When a foamed material is selected for the base layer 21, the materials that can be enumerated include: ethylene propylene rubber foam, butyl rubber foam, nitrile rubber foam, natural rubber foam, styrene butadiene rubber foam Foam, silicone resin foam, etc. When the base material layer 21 is made of a resin material, the materials that can be enumerated include: ethylene propylene rubber layer, butyl rubber layer, nitrile rubber layer, natural rubber, silicone resin, acrylic resin layer, and the like. When the base material layer 21 is a composite material of a resin material or a foamed material and metal particles or ceramic particles, it may be the resin material or foamed material and ceramic particles listed above, such as alumina, zirconia, silicon carbide, etc. Particulate materials, or metal particles: such as: one or more of metal particles such as copper, aluminum, iron, tungsten, etc., are mixed.

基材層21兩側面的接合層22則為塗布在基材層21兩側面的膠層或黏著劑層所構成,因此能夠將間隔層20實質上視為雙面膠,而能夠方便地用以將平面式壓電組件30貼附於基板10的背面。The bonding layer 22 on both sides of the substrate layer 21 is composed of a glue layer or an adhesive layer coated on both sides of the substrate layer 21. Therefore, the spacer layer 20 can be essentially regarded as a double-sided tape and can be conveniently used The planar piezoelectric component 30 is attached to the back surface of the substrate 10.

平面式壓電組件30具有至少一個壓電震動體31,壓電震動體31包括一壓電材料層311,以及設置於壓電材料層311兩側面的兩電極層312,兩電極層312分別接觸所述壓電材料層311,而使得兩電極層312能夠和壓電材料層311的兩側面形成電性傳導。The planar piezoelectric component 30 has at least one piezoelectric vibrating body 31. The piezoelectric vibrating body 31 includes a piezoelectric material layer 311, and two electrode layers 312 arranged on both sides of the piezoelectric material layer 311. The two electrode layers 312 are in contact with each other. The piezoelectric material layer 311 enables the two electrode layers 312 to form electrical conduction with the two sides of the piezoelectric material layer 311.

壓電震動體31的壓電材料層311能夠選用高分子壓電薄膜,或者是壓電性陶瓷薄膜所製成,當選用高分子壓電薄膜時,壓電材料層311能夠選用的材料可列舉:聚偏氟乙烯、尼龍、聚氯乙烯、聚甲基丙烯酸甲酯、聚丙烯等。當壓電材料層311選用壓電性陶瓷薄膜時,可列舉材料包括:鋯酸鉛、鋯鈦酸鉛、鈦酸鋯酸鑭鉛、鈦酸鋇、Bi層狀化合物、鎢青銅構造化合物等。The piezoelectric material layer 311 of the piezoelectric vibrating body 31 can be made of a polymer piezoelectric film or a piezoelectric ceramic film. When a polymer piezoelectric film is selected, the materials that can be selected for the piezoelectric material layer 311 can be listed : Polyvinylidene fluoride, nylon, polyvinyl chloride, polymethyl methacrylate, polypropylene, etc. When a piezoelectric ceramic film is selected for the piezoelectric material layer 311, the materials may include: lead zirconate, lead zirconate titanate, lead lanthanum zirconate titanate, barium titanate, Bi layered compound, tungsten bronze structural compound, etc.

兩電極層312透過蒸鍍、濺鍍、沈積、塗怖、印刷等方式設置於壓電材料層311的兩側面。兩電極層312能夠選用的材料包括導電性奈米材料層、奈米金屬材料層、金屬氧化導電層、導電高分子材料層、或導電膠材料層。The two electrode layers 312 are disposed on the two sides of the piezoelectric material layer 311 through methods such as evaporation, sputtering, deposition, coating, and printing. The materials that can be selected for the two electrode layers 312 include a conductive nano material layer, a nano metal material layer, a metal oxide conductive layer, a conductive polymer material layer, or a conductive adhesive material layer.

當電極層312為奈米導電材料或奈米金屬時,可以選用的材料種類包括:奈米碳管、石墨烯、奈米碳球、奈米金、奈米銀、奈米金屬線等類型材料。當電極層312為金屬氧化導電層時,可以為氧化銦錫層(ITO)。此外,電極層312也能夠選用高分子導電材料或者是導電膠,其中導電高分子材料可以為本質型導電聚合物(intrinsically conductive polymer),例如:聚乙炔、PEDOT。也可以為摻雜或混煉導電粒子的高分子材料薄膜。When the electrode layer 312 is made of nano conductive material or nano metal, the types of materials that can be selected include: carbon nanotubes, graphene, carbon nanospheres, nano gold, nano silver, nano metal wires, etc. . When the electrode layer 312 is a metal oxide conductive layer, it may be an indium tin oxide layer (ITO). In addition, the electrode layer 312 can also be selected from a polymer conductive material or a conductive glue, where the conductive polymer material can be an intrinsically conductive polymer, such as polyacetylene and PEDOT. It can also be a polymer material film doped or mixed with conductive particles.

如圖2所示,本創作的平面式壓電組件30的工作原理,為每一壓電震動體31兩側面的電極層312分別連接於一訊號源32,訊號源32輸出的電壓訊號傳導到電極層312時,將使得壓電材料層311的兩側面帶有電場,且因逆壓電原理而使得壓電材料層311產生震動,而使得平面式壓電組件30因震動產生聲音,或者產生反饋的震動。當平面式壓電組件30震動時,能夠透過間隔層20帶動基板10沿著基板10表面的法線方向震動或變形,因此使得基板10能夠成為震動體的一部份,而使得基板10能夠大面積地產生聲音或震波。As shown in FIG. 2, the working principle of the planar piezoelectric component 30 of the present invention is that the electrode layers 312 on both sides of each piezoelectric vibrating body 31 are respectively connected to a signal source 32, and the voltage signal output by the signal source 32 is conducted to When the electrode layer 312 is used, the two sides of the piezoelectric material layer 311 will have electric fields, and the piezoelectric material layer 311 will vibrate due to the inverse piezoelectric principle, so that the planar piezoelectric component 30 will generate sound due to the vibration, or produce Vibration of feedback. When the planar piezoelectric component 30 vibrates, the substrate 10 can be driven to vibrate or deform along the normal direction of the surface of the substrate 10 through the spacer layer 20, so that the substrate 10 can become a part of the vibrating body, and the substrate 10 can be enlarged. Generate sound or shock waves on a large scale.

此外,在本創作另一運用實例中,平面式壓電組件30中各個壓電震動體31能夠在基板10震動或形變時,受到基板10的震動或變形而被驅動,而使得壓電震動體31的壓電材料層311因此產生彎曲或應變,並因壓電效應使得壓電材料層311相對兩側面帶有電荷,因此使得壓電震動體31產生一響應訊號。因此,本創作的平面式壓電組件30能夠透過壓電材料層311的壓電效應或逆壓電效應,而形成揚聲器、接收器、超聲波產生器、超聲波感測器、壓力感測器、震動感測器、變形感測器、震動產生器等各種不同功能的壓電組件的其中之一。In addition, in another application example of this creation, each piezoelectric vibrating body 31 in the planar piezoelectric component 30 can be driven by the vibration or deformation of the substrate 10 when the substrate 10 vibrates or deforms, so that the piezoelectric vibrating body Therefore, the piezoelectric material layer 311 of 31 is bent or strained, and the piezoelectric material layer 311 is charged on opposite sides due to the piezoelectric effect, so that the piezoelectric vibrating body 31 generates a response signal. Therefore, the planar piezoelectric component 30 of the present invention can form a speaker, a receiver, an ultrasonic generator, an ultrasonic sensor, a pressure sensor, and a vibration through the piezoelectric effect or the inverse piezoelectric effect of the piezoelectric material layer 311. One of piezoelectric components with various functions such as sensors, deformation sensors, and vibration generators.

平面壓電組件30透過間隔層20連接於基板10的背面,因此使得平面壓電組件30震動時,能夠透過間隔層20將平面壓電組件30的震動傳導到基板10,或者在基板10彎曲或變形時,透過間隔層20帶動平面壓電組件30一起震動或變形。The planar piezoelectric component 30 is connected to the back of the substrate 10 through the spacer layer 20, so that when the planar piezoelectric component 30 vibrates, the vibration of the planar piezoelectric component 30 can be transmitted to the substrate 10 through the spacer layer 20, or the substrate 10 can be bent or bent. When deformed, the planar piezoelectric component 30 is driven to vibrate or deform together through the spacer layer 20.

為達到使得平面壓電組件30和基板10之間能夠透過間隔層20相互傳導震動或應變的目的,間隔層20本身必須具有適當的剛性,以使得震動或應變能夠透過間隔層20傳遞時不會產生能量消耗或延遲的情形。具體來說,本創作的間隔層20的剛性能夠以間隔層20材料和基板10材料的楊氏係數來表示,當基板10為剛性的基板時,間隔層20的楊氏係數安排為低於基板10的楊氏係數,而當基板10為可撓性基板10時,則間隔層20的楊氏係數安排為大於基板10的楊氏係數。In order to enable the planar piezoelectric component 30 and the substrate 10 to transmit vibration or strain to each other through the spacer layer 20, the spacer layer 20 itself must have appropriate rigidity so that the vibration or strain can not be transmitted through the spacer layer 20. Circumstances that produce energy consumption or delays. Specifically, the rigidity of the spacer layer 20 of the present creation can be expressed by the Young's coefficient of the material of the spacer layer 20 and the material of the substrate 10. When the substrate 10 is a rigid substrate, the Young's coefficient of the spacer layer 20 is arranged to be lower than that of the substrate. When the substrate 10 is a flexible substrate 10, the Young's coefficient of the spacer layer 20 is arranged to be greater than the Young's coefficient of the substrate 10.

本實施例中,基板10規劃有至少一功能區塊11,且在至少一功能區塊11中設置單一的間隔層20,並且平面式壓電組件30是由單獨一層的壓電震動體31所構成。更詳細地說,本實施例中,在平面視角方向上,間隔層20的面積大致上和基板10的功能區塊11的面積相符,因此使得基板10的至少一功能區塊11被間隔層20所覆蓋。並且間隔層20的面積大於或等於平面式壓電組件30的面積。換句話說,平面式壓電組件30的面積不大於功能區塊11的面積。In this embodiment, the substrate 10 is planned to have at least one functional block 11, and a single spacer layer 20 is provided in the at least one functional block 11, and the planar piezoelectric component 30 is composed of a single layer of piezoelectric vibrating body 31. constitute. In more detail, in this embodiment, the area of the spacer layer 20 is roughly the same as the area of the functional block 11 of the substrate 10 in the plane viewing angle direction, so that at least one functional block 11 of the substrate 10 is covered by the spacer layer 20. Covered. In addition, the area of the spacer layer 20 is greater than or equal to the area of the planar piezoelectric component 30. In other words, the area of the planar piezoelectric component 30 is not larger than the area of the functional block 11.

如圖3所示,為本創作整合壓電組件的基板模組1的第二實施例,本實施例中,基板10從平面視圖方向能夠定義出相互垂直的第一軸向D1和第二軸向D2,並且本實施例中,基板10規劃至少一功能區塊11,且在同一個功能區塊11中設置了單獨一個間隔層20,並且在每一間隔層20上分別設置多個概略呈矩形的平面式壓電組件30,多個所述平面式壓電組件30的面積小於間隔層20的面積,並且多個平面式壓電組件30是以沿著第一軸向D1相互間隔地排列設置於間隔層20相對於基板10的一側。As shown in FIG. 3, this is the second embodiment of creating a substrate module 1 integrating piezoelectric components. In this embodiment, the substrate 10 can define a first axis D1 and a second axis that are perpendicular to each other from the plane view direction. To D2, and in this embodiment, the substrate 10 is planned for at least one functional block 11, and a single spacer layer 20 is arranged in the same functional block 11, and a plurality of schematic representations are respectively arranged on each spacer layer 20 A rectangular planar piezoelectric element 30, the area of the plurality of planar piezoelectric elements 30 is smaller than the area of the spacer layer 20, and the plurality of planar piezoelectric elements 30 are arranged at intervals along the first axis D1 It is provided on the side of the spacer layer 20 opposite to the substrate 10.

如圖4及圖5所示,本實施例由於多個平面式壓電組件30彼此相互間隔,因此使得每兩個相鄰的平面式壓電組件30之間形成間隙,因此使得位於每兩相鄰的平面式壓電組件30之間位置的基板10和間隔層20具有可彎曲的空間,而使得基板10和間隔層20彎曲時,平面式壓電組件30不會隨著基板10一起彎曲,或者使得平面式壓電組件30彎曲的幅度減小,因此本實施例特別適合運用在可撓性的基板10上。As shown in Figs. 4 and 5, in this embodiment, since the plurality of planar piezoelectric components 30 are spaced apart from each other, a gap is formed between every two adjacent planar piezoelectric components 30, so that they are located in every two phases. The substrate 10 and the spacer layer 20 between the adjacent planar piezoelectric components 30 have a bendable space, so that when the substrate 10 and the spacer layer 20 are bent, the planar piezoelectric component 30 will not bend along with the substrate 10. Or, the bending amplitude of the planar piezoelectric component 30 is reduced, so this embodiment is particularly suitable for use on the flexible substrate 10.

如圖6所示,為本創作整合壓電組件的基板模組1的第三實施例,本實施例的間隔層20和平面式壓電組件30的配置方式和第二實施例類似,為在每一功能區塊11中配置單一的間隔層20,並且間隔層20上配置多個面積較小的平面式壓電組件30。本實施例的不同之處,在於多個平面式壓電組件30是以分別沿著基板10的第一軸向D1和第二軸向D2,而以矩陣方式設置在間隔層20相對於基板10的一側面,因此使得本實施例的整合壓電組件的基板模組1的基板10能夠沿著第一軸向D1和第二軸向D2彎曲。As shown in FIG. 6, this is the third embodiment of the substrate module 1 with integrated piezoelectric components. The arrangement of the spacer layer 20 and the planar piezoelectric component 30 in this embodiment is similar to that of the second embodiment. A single spacer layer 20 is arranged in each functional block 11, and a plurality of planar piezoelectric components 30 with a small area are arranged on the spacer layer 20. The difference of this embodiment is that the plurality of planar piezoelectric components 30 are arranged along the first axis D1 and the second axis D2 of the substrate 10 respectively, and are arranged in a matrix on the spacer layer 20 opposite to the substrate 10. Therefore, the substrate 10 of the piezoelectric component-integrated substrate module 1 of this embodiment can be bent along the first axis D1 and the second axis D2.

如圖7所示,為本創作整合壓電組件的基板模組1的第四實施例,本實施例中,為在基板10的同一功能區塊11設置多個間隔層20,多個間隔層20大致上是呈矩形的形狀,並且沿著基板10的第一軸向D1相互間隔地設置於基板10的功能區塊11中。並且本實施例中,平面壓電組件30的面積大於各個間隔層20的面積,並且每一平面壓電組件30同時覆蓋多個間隔層20,而透過多個間隔層20將平面壓電組件30結合於基板10的背面。As shown in FIG. 7, this is a fourth embodiment of creating a substrate module 1 integrating piezoelectric components. In this embodiment, a plurality of spacer layers 20 are provided on the same functional block 11 of the substrate 10. 20 has a substantially rectangular shape, and is arranged in the functional block 11 of the substrate 10 at intervals along the first axis D1 of the substrate 10. Moreover, in this embodiment, the area of the planar piezoelectric element 30 is larger than the area of each spacer layer 20, and each planar piezoelectric element 30 covers a plurality of spacer layers 20 at the same time, and the planar piezoelectric element 30 is separated through the plurality of spacer layers 20. Bonded to the back surface of the substrate 10.

因此,如圖8所示,本創作整合壓電組件的基板模組1的第四實施例形成多個間隔層20夾合在平面式壓電組件30和基板10之間的三明治狀結構,並且各個間隔層20之間具有間隙。Therefore, as shown in FIG. 8, the fourth embodiment of the substrate module 1 that integrates piezoelectric components of the present invention forms a sandwich structure in which a plurality of spacer layers 20 are sandwiched between the planar piezoelectric component 30 and the substrate 10, and There are gaps between each spacer layer 20.

如圖9所示,為本創作整合壓電組件的基板模組1的第五實施例,本實施例和第四實施例相似,為在每一功能區塊11中配置多個間隔層20,並且由一個平面式壓電組件30貼合於多個間隔層20相對於基板10的一側面。本實施例的不同之處,在於多個間隔層20是以分別沿著基板10的第一軸向D1和第二軸向D2,而以矩陣方式設置在間隔層20相對於基板10的一側面。As shown in FIG. 9, this is a fifth embodiment of creating a substrate module 1 integrated with piezoelectric components. This embodiment is similar to the fourth embodiment in that multiple spacer layers 20 are arranged in each functional block 11. In addition, a planar piezoelectric component 30 is attached to a side surface of the plurality of spacer layers 20 opposite to the substrate 10. The difference of this embodiment is that the plurality of spacer layers 20 are arranged along the first axis D1 and the second axis D2 of the substrate 10 in a matrix manner on a side surface of the spacer layer 20 opposite to the substrate 10. .

如圖10及圖11所示,如圖12所示,為本創作整合壓電組件的基板模組1的第七實施例,本實施例相較於前述各實施例的不同點,在於將間隔層20和平面式壓電組件30的配置方式,變更為在每一工作區域內設置多個間隔層20,多個間隔層20沿著基板10的第一軸向D1相互間隔排列,或者同時沿著第一軸向D1和第二軸向D2以矩陣方式設置於基板10的背面。並且每一間隔層20相對於基板10的一側面分別設置一平面式壓電組件30,並且每一平面式壓電組件30的面積等於或小於相對應的間隔層20的面積。As shown in Figures 10 and 11, as shown in Figure 12, this is a seventh embodiment of creating a substrate module 1 integrated with piezoelectric components. The difference between this embodiment and the previous embodiments lies in the spacing The arrangement of the layer 20 and the planar piezoelectric component 30 is changed to provide a plurality of spacer layers 20 in each working area, and the plurality of spacer layers 20 are arranged at intervals along the first axis D1 of the substrate 10, or at the same time. The first axis D1 and the second axis D2 are arranged on the back surface of the substrate 10 in a matrix manner. In addition, each spacer layer 20 is provided with a planar piezoelectric component 30 on a side surface of the substrate 10, and the area of each planar piezoelectric component 30 is equal to or smaller than the area of the corresponding spacer layer 20.

為本創作整合壓電組件的基板模組1的第六實施例,本實施例相較於前述各實施例的不同點,在於平面式壓電組件30是由多個壓電震動體31相互重疊而成,因此能夠透過將壓電震動體31堆疊的方式,調整或增強平面式壓電組件30的震動強度。This is the sixth embodiment of the creation of the substrate module 1 integrating piezoelectric components. Compared with the previous embodiments, this embodiment is different in that the planar piezoelectric component 30 is composed of a plurality of piezoelectric vibrating bodies 31 overlapping each other. Therefore, the vibration intensity of the planar piezoelectric component 30 can be adjusted or enhanced by stacking the piezoelectric vibrating body 31.

如圖13所示,為本創作整合壓電組件的基板模組1的第八實施例,本實施例的不同點,在於採用的間隔層20包括一高分子壓電膜23,且於高分子壓電膜23的兩側面分別設置一導電層231,因此使得本實施例的間隔層20能夠形成和平面式壓電組件30近似功能的壓電元件。As shown in FIG. 13, this is the eighth embodiment of the substrate module 1 with integrated piezoelectric components. The difference of this embodiment is that the spacer layer 20 used includes a polymer piezoelectric film 23 and is The two sides of the piezoelectric film 23 are respectively provided with a conductive layer 231, so that the spacer layer 20 of this embodiment can form a piezoelectric element that has a similar function to the planar piezoelectric component 30.

特別說明,本實施例中,間隔層20的兩電極層312能夠和平面式壓電組件30的電極層共同地連接至相同的訊號源或者訊號接收器,而和平面式壓電組件30共同執行相同的功能,例如,利用本實施例的間隔層20和平面式壓電組件30共同地構成揚聲器的發聲單體。或者,能夠將本實施例的間隔層20的兩導電層231和平面式壓電組件30的電極層分別連接至不同的訊號源或接收器,而使得間隔層20和平面式壓電組件30分別執行不同功能,例如:平面式壓電組件30連接一訊號源形成揚聲器或超聲波產生器,而間隔層20的兩電極層312連接於一訊號接收器,而形成震動或聲波接收器。In particular, in this embodiment, the two electrode layers 312 of the spacer layer 20 and the electrode layers of the planar piezoelectric component 30 can be connected to the same signal source or signal receiver together, and perform together with the planar piezoelectric component 30 With the same function, for example, the spacer layer 20 and the planar piezoelectric component 30 of this embodiment are used to jointly constitute the sound emitting unit of the speaker. Alternatively, the two conductive layers 231 of the spacer layer 20 and the electrode layer of the planar piezoelectric component 30 of this embodiment can be connected to different signal sources or receivers, so that the spacer layer 20 and the planar piezoelectric component 30 can be connected to different signal sources or receivers. Perform different functions. For example, the planar piezoelectric component 30 is connected to a signal source to form a speaker or an ultrasonic generator, and the two electrode layers 312 of the spacer layer 20 are connected to a signal receiver to form a vibration or sound wave receiver.

如圖14所示為本創作整合壓電組件的基板模組1的第九實施例,本實施例中,為在基板10上規劃多個不同的功能區塊11,在每一功能區塊11中分別設置至少一間隔層20和至少一平面式壓電組件30,並且每一功能區塊11中的平面式壓電組件30能夠規劃為多組相互獨立且分別用以執行不同類型功能的壓電組件,例如:多個不同功能區塊11能夠分別規劃為:揚聲器、接收器、超聲波產生器、超聲波感測器、壓力感測器、震動感測器、變形感測器、震動產生器等各種不同功能的壓電組件的其中之一或其組合。Fig. 14 shows a ninth embodiment of creating a substrate module 1 integrating piezoelectric components. In this embodiment, a plurality of different functional blocks 11 are planned on the substrate 10, and each functional block 11 At least one spacer layer 20 and at least one planar piezoelectric element 30 are respectively provided in the, and the planar piezoelectric element 30 in each functional block 11 can be planned as a plurality of groups of independent piezoelectric elements and used to perform different types of functions. Electrical components, for example: multiple different functional blocks 11 can be separately planned as: speaker, receiver, ultrasonic generator, ultrasonic sensor, pressure sensor, vibration sensor, deformation sensor, vibration generator, etc. One or a combination of various piezoelectric components with different functions.

〔實施例的可能功效〕[Possible effects of the embodiment]

綜上所述,本創作的有益效果主要在於能夠透過間隔層20作為將平面式壓電組件30設置於基板10背面的連結層,一方面能夠將平面式壓電組件30快速設置於基板10背面,另一方面能夠作為震動傳導的介質,且產生緩衝的效果,或者是透過改變間隔層20的材料密度、彈性係數而達到調整震動幅度或音質的目的。To sum up, the beneficial effects of this creation are mainly that the spacer layer 20 can be used as a connecting layer for the planar piezoelectric component 30 to be placed on the back of the substrate 10. On the one hand, the planar piezoelectric component 30 can be quickly placed on the back of the substrate 10. , On the other hand, it can be used as a vibration transmission medium and produce a buffering effect, or the purpose of adjusting the vibration amplitude or sound quality can be achieved by changing the material density and elastic coefficient of the spacer layer 20.

此外,透過本創作技術手段能夠使得基板模組1整合不同的功能的壓電組件,而減少了電子裝置的元件數量並減少厚度。In addition, through the creative technical means, the substrate module 1 can integrate piezoelectric components with different functions, thereby reducing the number of components and the thickness of the electronic device.

以上所述僅為本創作的較佳可行實施例,非因此侷限本創作的專利範圍,故舉凡運用本創作說明書及圖式內容所做的等效技術變化,均包含於本創作的保護範圍內。The above descriptions are only the preferred and feasible embodiments of this creation, which do not limit the scope of the creation of this creation. Therefore, all equivalent technical changes made using this creation specification and schematic content are included in the scope of protection of this creation. .

1:基板模組 10:基板 11:功能區塊 20:間隔層 21:基材層 22:接合層 23:高分子壓電膜 231:導電層 30:平面式壓電組件 31:壓電震動體 311:壓電材料層 312:電極層 32:訊號源1: substrate module 10: substrate 11: Function block 20: Interval layer 21: Substrate layer 22: Bonding layer 23: Polymer piezoelectric film 231: Conductive layer 30: Planar piezoelectric components 31: Piezoelectric vibrating body 311: Piezoelectric material layer 312: Electrode layer 32: signal source

圖1為本創作整合壓電組件的基板模組第一實施例的立體分解示意圖。FIG. 1 is a three-dimensional exploded schematic diagram of a first embodiment of creating a substrate module integrating piezoelectric components.

圖2為本創作整合壓電組件的基板模組第一實施例的工作原理示意圖。FIG. 2 is a schematic diagram of the working principle of the first embodiment of creating a substrate module integrating piezoelectric components.

圖3本創作整合壓電組件的基板模組第二實施例的立體分解示意圖。FIG. 3 is a three-dimensional exploded schematic diagram of the second embodiment of the substrate module with integrated piezoelectric components according to the present invention.

圖4為本創作整合壓電組件的基板模組第二實施例的剖面示意圖。4 is a schematic cross-sectional view of a second embodiment of the creation of a substrate module integrating piezoelectric components.

圖5為本創作整合壓電組件的基板模組第二實施例在基板彎曲狀態下的剖面示意圖。FIG. 5 is a schematic cross-sectional view of a second embodiment of a substrate module with integrated piezoelectric components created when the substrate is bent.

圖6為本創作整合壓電組件的基板模組第三實施例的立體分解示意圖。FIG. 6 is a three-dimensional exploded schematic diagram of a third embodiment of creating a substrate module integrating piezoelectric components.

圖7為本創作整合壓電組件的基板模組第四實施例的立體分解示意圖。FIG. 7 is a three-dimensional exploded schematic diagram of a fourth embodiment of creating a substrate module integrating piezoelectric components.

圖8為本創作整合壓電組件的基板模組第四實施例的剖面示意圖。FIG. 8 is a schematic cross-sectional view of a fourth embodiment of the creation of a substrate module integrating piezoelectric components.

圖9為本創作整合壓電組件的基板模組第五實施例的立體分解示意圖。FIG. 9 is a three-dimensional exploded schematic diagram of a fifth embodiment of creating a substrate module integrating piezoelectric components.

圖10為本創作整合壓電組件的基板模組第六實施例的立體分解示意圖。FIG. 10 is a three-dimensional exploded schematic diagram of a sixth embodiment of creating a substrate module integrating piezoelectric components.

圖11為本創作整合壓電組件的基板模組第六實施例的剖面示意圖。FIG. 11 is a schematic cross-sectional view of a sixth embodiment of creating a substrate module integrating piezoelectric components.

圖12為本創作整合壓電組件的基板模組第七實施例的剖面示意圖。FIG. 12 is a schematic cross-sectional view of a seventh embodiment of a substrate module with integrated piezoelectric components.

圖13為本創作整合壓電組件的基板模組第八實施例的剖面示意圖。FIG. 13 is a schematic cross-sectional view of an eighth embodiment of creating a substrate module integrating piezoelectric components.

圖14為本創作整合壓電組件的基板模組第九實施例的剖面示意圖。14 is a schematic cross-sectional view of a ninth embodiment of a substrate module with integrated piezoelectric components.

1:基板模組 1: substrate module

10:基板 10: substrate

11:功能區塊 11: Function block

20:間隔層 20: Interval layer

30:平面式壓電組件 30: Planar piezoelectric components

Claims (17)

一種整合壓電組件的基板模組,其中包括: 一基板,所述基板具有相對的正面及背面,所述基板能夠規劃出至少一功能區塊,每一所述功能區塊中具有: 至少一間隔層,至少一所述間隔層貼合於所述基板的背面;及 至少一平面式壓電組件,至少一所述平面式壓電組件朝向所述基板的一側貼合於所述間隔層相對於所述基板的一側面; 其中,至少一所述平面式壓電組件能夠接收一訊號源輸出的電壓訊號後因逆壓電效應產生震動進而驅動所述基板產生震動,或者能夠受到所述基板的震動或應變而被驅動,而使得所述平面式壓電組件因壓電效應產生一響應訊號。 A substrate module integrating piezoelectric components, which includes: A substrate, the substrate has opposite front and back surfaces, the substrate can plan at least one functional block, and each functional block has: At least one spacer layer, and at least one spacer layer is attached to the back surface of the substrate; and At least one planar piezoelectric component, at least one side of the planar piezoelectric component facing the substrate is attached to a side surface of the spacer layer opposite to the substrate; Wherein, at least one of the planar piezoelectric components can receive a voltage signal output by a signal source and then vibrate due to the inverse piezoelectric effect to drive the substrate to vibrate, or can be driven by the vibration or strain of the substrate, As a result, the planar piezoelectric component generates a response signal due to the piezoelectric effect. 如請求項1所述整合壓電組件的基板模組,其中至少一所述平面式壓電組件分別具有至少一壓電震動體,至少一所述壓電震動體包括一壓電材料層以及兩電極層,兩所述電極層分別接觸於所述壓電材料層相對的兩側面。The substrate module integrated with piezoelectric components according to claim 1, wherein at least one of the planar piezoelectric components has at least one piezoelectric vibrating body, and at least one of the piezoelectric vibrating bodies includes a piezoelectric material layer and two An electrode layer, the two electrode layers are respectively in contact with two opposite sides of the piezoelectric material layer. 如請求項2所述整合壓電組件的基板模組,其中所述壓電震動體的所述壓電材料層為壓電性樹脂薄膜或為壓電陶瓷薄膜。The substrate module integrating piezoelectric components according to claim 2, wherein the piezoelectric material layer of the piezoelectric vibrating body is a piezoelectric resin film or a piezoelectric ceramic film. 如請求項3所述整合壓電組件的基板模組,其中每一所述平面壓電組件具有一個所述壓電震動體,或者具有多個所述壓電震動體相互疊合。The substrate module integrated with piezoelectric components according to claim 3, wherein each of the planar piezoelectric components has one piezoelectric vibrating body, or has a plurality of piezoelectric vibrating bodies superimposed on each other. 如請求項4所述整合壓電組件的基板模組,其中所述間隔層的兩側面分別透過一接合層貼合於所述基板的背面和所述平面式壓電組件的表面。The substrate module integrated with piezoelectric components according to claim 4, wherein the two side surfaces of the spacer layer are respectively attached to the back surface of the substrate and the surface of the planar piezoelectric component through a bonding layer. 如請求項5所述整合壓電組件的基板模組,其中所述基板為可撓性基板或為剛性基板,當所述基板為可撓性基板時,所述間隔層的楊氏係數大於所述基板的楊氏係數,當所述基板為剛性基板時,所述間隔層的楊氏係數小於所述基板的楊氏係數。The substrate module integrated with piezoelectric components according to claim 5, wherein the substrate is a flexible substrate or a rigid substrate, and when the substrate is a flexible substrate, the Young's coefficient of the spacer layer is greater than that of the spacer layer. For the Young's coefficient of the substrate, when the substrate is a rigid substrate, the Young's coefficient of the spacer layer is smaller than the Young's coefficient of the substrate. 如請求項6所述整合壓電組件的基板模組,其中至少一所述間隔層可以為發泡橡膠層、或為樹脂材料層、或為高分子壓電膜。According to claim 6 of the substrate module integrated with piezoelectric components, at least one of the spacer layers may be a foamed rubber layer, or a resin material layer, or a polymer piezoelectric film. 如請求項7所述整合壓電組件的基板模組,其中,當所述間隔層為高分子壓電膜時,所述高分子壓電膜的兩側面分別具有一導電層,並且兩所述導電層分別能夠導入電壓後使得所述高分子壓電膜產生震動,或者所述高分子壓電膜受到基板驅動而產生應變時產生的電壓導入到兩所述導電層中。The substrate module integrated with piezoelectric components according to claim 7, wherein, when the spacer layer is a polymer piezoelectric film, both sides of the polymer piezoelectric film have a conductive layer, and the two The conductive layers can respectively introduce voltages to cause the piezoelectric polymer film to vibrate, or the voltage generated when the piezoelectric polymer film is driven by the substrate to generate strain is introduced into the two conductive layers. 如請求項7或8其中任一項所述整合壓電組件的基板模組,其中每一所述功能區塊中分別具有一個所述間隔層,所述間隔層上分別設置一所述平面式壓電組件,所述平面式壓電組件的面積等於或小於所述間隔層的面積。The substrate module integrated with piezoelectric components according to any one of claim 7 or 8, wherein each of the functional blocks has one of the spacer layers, and the spacer layer is respectively provided with the plane type The piezoelectric component, the area of the planar piezoelectric component is equal to or smaller than the area of the spacer layer. 如請求項7或8其中任一項所述整合壓電組件的基板模組,其中每一所述功能區塊中分別具有一個所述間隔層,每一所述間隔層上分別設置多個所述平面式壓電組件,多個所述平面式壓電組件的面積小於所述間隔層的面積。The substrate module integrating piezoelectric components according to any one of claim 7 or 8, wherein each of the functional blocks has one of the spacer layers, and each of the spacer layers is provided with a plurality of spacers. In the planar piezoelectric component, the area of the plurality of planar piezoelectric components is smaller than the area of the spacer layer. 如請求項10所述整合壓電組件的基板模組,其中所述基板能夠定義出相互垂直的第一軸向和第二軸向,多個所述平面式壓電組件沿著所述第一軸向排列設置於所述間隔構件上,且每兩相鄰的所述平面式壓電組件之間形成一間隙。According to claim 10, the substrate module integrating piezoelectric components, wherein the substrate can define a first axis and a second axis that are perpendicular to each other, and a plurality of the planar piezoelectric components are along the first axis. The axial arrangement is arranged on the spacer member, and a gap is formed between every two adjacent planar piezoelectric components. 如請求項11所述整合壓電組件的基板模組,其中多個所述平面壓電組件沿著所述第一軸向和第二軸向以矩陣方式排列設置於至少一所述間隔構件上。The substrate module integrated with piezoelectric components according to claim 11, wherein a plurality of the planar piezoelectric components are arranged on at least one of the spacer members in a matrix manner along the first axis and the second axis . 如請求項7或8其中任一項所述整合壓電組件的基板模組,其中所述基板能夠定義出相互垂直的第一軸向和第二軸向,所述基板的每一所述功能區塊中分別設置多個所述間隔構件,多個所述間隔構件沿著所述第一軸向排列設置於所述基板的背面,或者多個所述間隔構件沿著所述第一軸向和第二軸向以矩陣方式排列設置於所述基板的背面。The substrate module integrating piezoelectric components according to any one of claim 7 or 8, wherein the substrate can define a first axis and a second axis that are perpendicular to each other, and each of the functions of the substrate A plurality of the spacer members are respectively arranged in the block, and a plurality of the spacer members are arranged on the back of the substrate along the first axial direction, or a plurality of the spacer members are arranged along the first axial direction. And the second axis are arranged in a matrix on the back of the substrate. 如請求項13所述整合壓電組件的基板模組,其中每一所述功能區塊中設置至少一所述平面式壓電組件,至少一所述平面式壓電組件的面積大於所述間隔構件的面積,且至少一所述平面式壓電組件同時覆蓋多個所述間隔構件。The substrate module integrated with piezoelectric components according to claim 13, wherein at least one of the planar piezoelectric components is provided in each of the functional blocks, and the area of at least one of the planar piezoelectric components is larger than the interval The area of the component, and at least one of the planar piezoelectric components simultaneously covers a plurality of the spacer components. 如請求項13所述整合壓電組件的基板模組,其中每一所述間隔構件相對於所述基板的一側面分別設置一個所述平面式壓電組件。The substrate module integrated with piezoelectric components according to claim 13, wherein each of the spacer members is provided with one planar piezoelectric component relative to a side surface of the substrate. 如請求項7或8其中任一項所述整合壓電組件的基板模組,其中所述基板能夠規劃出多個功能區塊,每一所述功能區塊的範圍內分別設置至少一所述間隔構件和至少一所述平面式壓電組件。The substrate module integrating piezoelectric components according to any one of claim 7 or 8, wherein the substrate can plan a plurality of functional blocks, and at least one of the functional blocks is provided in the range of each of the functional blocks. A spacer member and at least one of the planar piezoelectric components. 如請求項16所述整合壓電組件的基板模組,其中基板的多個所述功能區塊中的所述平面式壓電組件分別形成揚聲器、接收器、超聲波產生器、超聲波感測器、壓力感測器、震動感測器、變形感測器、震動產生器等各種不同功能的壓電組件的其中之一。The substrate module integrating piezoelectric components according to claim 16, wherein the planar piezoelectric components in the plurality of functional blocks of the substrate respectively form a speaker, a receiver, an ultrasonic generator, an ultrasonic sensor, Pressure sensor, vibration sensor, deformation sensor, vibration generator and other piezoelectric components with different functions.
TW109213828U 2020-10-21 2020-10-21 Substrate module integrated with piezoelectric component TWM609818U (en)

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