TWM602206U - Equipment for object detection - Google Patents

Abstract

The present model provides a device for object detection including at least one object carrier with a cover, wherein the device also includes at least one infrared (IR) camera, at least one infrared illuminator, at least one band pass filter and a personal computer (PC) system, The object detection device can perform infrared detection on at least one object placed on the object carrier.

Description

Equipment for object detection

A device for object detection includes at least one object carrier with a cover, wherein the device also includes at least one infrared (IR) camera, at least one infrared illuminator, at least one band-pass filter, and a personal computer (PC) system. The infrared detection can be performed on at least one object placed on the object carrier.

Nowadays, automatic or automated optical inspection (AOI) machines are the key technology used in the electronic component testing process. Automatic optical inspection uses visible light sources to illuminate the surface of the object to be measured, and uses an image capture device to capture one of the objects to be detected . Nevertheless, the aforementioned automated optical inspection machines and final visual inspection (FVI) machines in the back-end wafer level wafer scale packaging (WLCSP) process cannot perform infrared (IR) internal inspections, so internal defects on semiconductor devices or components will Shipped to end users or customers without being detected.

The Japanese patent JP 2000260376 A of Yoshihiro et al. discloses a defect inspection device equipped with a linear scanning table control device, wherein the range of the XY linear scanning area RB is a rectangular area and contains a specified position at the center position W0 of the surface of the inspected wafer W Area, and divided into a plurality of belt-shaped parts with a specified scanning width, the XY table driving device is controlled so that the electron beam scans the plurality of belt-shaped parts sequentially; and a rotating scanning table control device, wherein the rotating scanning area RA is formed Between the inner setting circle W2 provided on the inner side of the rectangular area RB on the surface of the inspection wafer W and the outer setting circle W1 provided on the outer side, and the range is divided into a plurality of ring portions RA0, RA1 having a designated scan width. .., RA1189, the driving device of the rotary table is controlled so that the electron beam scans a plurality of ring parts in sequence. However, JP 2000260376 A does not disclose the use of infrared (IR) internal detection. Therefore, cracks or disconnections in the device cannot be detected.

Therefore, having a system for infrared (IR) inspection will help alleviate the shortcomings, where the system can simultaneously detect internal and external defects on each side of the object.

The main purpose of the present invention is to provide a system for infrared (IR) detection, whereby the system can simultaneously detect internal and external defects on the top and bottom of an object.

Another object of the present invention is to provide a device for object detection, whereby the system can utilize a larger infrared wavelength range to provide a better defect detection range.

Another object of the present invention is to provide a device for object detection, whereby the system provides traceability of each object.

Another object of the present invention is to provide a device for object detection, whereby the system target 0% rejected and 0% over rejected as unqualified items will be judged by the user.

Another object of the present invention is to provide a device for object detection, whereby the system can generate a map file with detection results.

By understanding the following detailed description of the invention or when the invention is actually applied, other further purposes of the invention will become apparent.

According to a preferred embodiment of the present invention, the following are provided:

A device for object detection includes: at least one object carrier with a cover; the object includes electronic components, dies, chips, or any other similar objects; and is characterized in that: the object detection equipment can be placed opposite to the At least one of the objects of the object carrier performs infrared detection, and includes at least one infrared (IR) camera, at least one infrared illumination provided on one side of the at least one infrared (IR) camera, and at least one band-pass filter provided on the infrared illumination And a PC system.

(1): Equipment for object detection

(101): Object carrier

(103): Lid

(105): Infrared (IR) camera

(107): Infrared lighting

(109): Band pass filter

(111): Object

(113): Housing Department

(115): Adhesive surface

Figure 1 shows a schematic structural diagram of an embodiment of the present invention.

Fig. 2A shows an embodiment view of a tray with objects.

Fig. 2B shows a diagram of an embodiment of a gel package with objects.

Figure 3A shows the method flow of an embodiment of the present invention.

Figure 3B shows the method flow of another embodiment of the present invention.

In the following detailed description, many specific details are explained to provide a detailed understanding of the present invention. However, those skilled in the art will understand that the present invention can be implemented without these specific details. In other cases, the conventional methods, procedures, and/or components are not described in detail, so as not to make the present invention obscure.

The present invention will be understood more clearly from the description of the following embodiments, which are provided as examples with reference to the drawings, and the drawings are not drawn to scale.

As used in the present disclosure and in the scope of the attached patent application, the singular forms "a" and "the" include plural referents, unless the context clearly indicates or otherwise indicates.

In the disclosure of the entire specification and the scope of the patent application, the word "including" and its variations mean "including, but not limited to", and it is not intended to exclude other components, whole things or steps. "Example" means "an example" and is not intended to imply a preferred or ideal embodiment. "For example" is not used in a restrictive sense but for explanatory purposes.

Refer to Figure 1, which shows an embodiment diagram of a device (1) for object detection. The device (1) for object detection includes at least one object carrier (101) with a cover (103); the object (111) ) Includes electronic components, dies, chips or any other similar objects. The object detection equipment (1) can perform infrared detection on at least one object (111) placed on the object carrier (101), and includes at least one An infrared (IR) camera (105), at least one infrared illuminator (107) provided on the side of the at least one infrared (IR) camera (105), and at least one band-pass filter (109) provided on the infrared illuminator (107) ) And a PC system. The object carrier (101) includes a tape, a tray, a gel package or any suitable object carrier. The object carrier (101) also includes at least one accommodating portion (113) to accommodate one object (111). The material of the object carrier (101) can be penetrated by infrared rays to allow top infrared detection, bottom infrared detection or a combination thereof, and the object (111) detection includes internal detection, external detection or a combination thereof. The internal inspection includes internal cracks, delamination, debris, and pollution, while the external inspection includes debris, pollution, cracks, and so on. The band pass filter (109) can filter specific infrared wavelengths ranging from 750 nanometers (nm) to 3000 nanometers. The object detection equipment (1) also includes a map file with detection results to provide the traceability of each object. The map file contains the relative detection result of the accommodating part or object coordinate, and And produced from upstream or reproduced after detection. The object detection device (1) also includes a component counting mechanism for comparing the value entered by the user with the actual unit after the detection. At the same time, the object detection equipment (1) also includes a marking mechanism for marking defective objects (111).

The cover (103) can be made of polyester film or any suitable material capable of infrared penetration. The thickness of the cover (103) is usually in the range of 48 micrometers (micrometer) to 62 micrometers. For example, an infrared wavelength of 1100 nm is required to detect the cover (103) with a thickness of 50 microns and the object (111) with a thickness of 80 to 100 microns, wherein the cover (103) is made of polyester film .

Refer to FIG. 2A and FIG. 2B, which show an embodiment diagram of a tray with an object and a gel package with an object. The tray includes at least one containing portion (113) with a cover (103), wherein the containing portion (113) contains an object (111). The glue package includes an adhesive surface (115) with a cover (103), wherein the adhesive surface (115) contains an object (111).

A method for performing infrared detection on an object (111), wherein the object (111) is placed on an object carrier (101); the object carrier (101) includes a cover (103). The object carrier (101) includes a tape, a tray, a gel package or any suitable object carrier. In addition, the material of the object carrier (101) can be penetrated by infrared rays to allow top infrared detection, bottom infrared detection or a combination thereof, wherein the infrared detection includes internal detection, external detection or a combination thereof. The infrared detection can detect the object (111) with a wavelength of 750 nm to 3000 nm. The infrared detection can generate or update a map file by obtaining the detection result. In addition, the infrared detection result can be viewed and updated by the user using the stored image.

Refer to FIG. 3A, which shows the flow of an embodiment method for infrared detection. The user will load an input (S201), where the input includes the object carrier (101) with the cover (103), perform alignment check, and perform infrared scanning (S203). If any unqualified defects are detected (S205), Then the user will review it, and the user will decide to finally reject or accept the object (111) (S207). Optionally, the object detection device (1) can be set to mark the object finally rejected (S208). After the detection is completed, the map file is updated, and the object carrier (101) with the cover (103) is uninstalled (S209). If the unqualified defect is not detected (S205), the inspection continues until the inspection is completed, the map file is updated, and the object carrier (101) with the cover (103) is uninstalled (S209).

Refer to FIG. 3B, which shows the method flow of another embodiment for infrared detection. The user will load an input (S201), where the input includes the object carrier (101) with the cover (103), perform alignment check, and perform infrared scanning (S203). After the detection is completed, the map file will be updated (S301). If any unqualified defect is detected (S303), the user will review it, and the user will decide to reject or accept the object (111) (S305). Optionally, the object detection device (1) can be configured to mark the object finally rejected (S307). Finally, unload the article carrier (101) with the cover (103). If no unqualified defects are detected (S303), the article carrier (101) with the cover (103) is unloaded (S309).

(1): Equipment for object detection

(101): Object carrier

(103): Lid

(IR): infrared

(105): Camera

(107): Infrared lighting

(109): Band pass filter

(111): Object

(113): Housing Department

Claims (9)

A device for object detection, comprising: at least one object carrier (101) with a cover (103); the object (111) includes an electronic component, die, chip or any other similar object; characterized by: The object detection device (1) can perform infrared detection on at least one of the objects (111) placed on the object carrier (101), and includes at least one infrared (IR) camera (105), and at least one set on the at least one An infrared illuminator (107) on the side of an infrared (IR) camera (105), at least one band-pass filter (109) arranged on the infrared illuminator (107), and a personal computer (PC) system. The device for object detection according to claim 1, wherein the object carrier (101) includes a tape, a tray, a gel package or any suitable object carrier. The device for object detection according to claim 1, wherein the object carrier (101) further includes at least one accommodating portion (113), wherein the accommodating portion (113) accommodates the object (111). The device for object detection according to claim 1, wherein the material of the object carrier (101) can be penetrated by infrared rays to allow top infrared detection, bottom infrared detection, or a combination thereof. The device for object detection according to claim 1, wherein the object (111) detection includes internal detection, external detection or a combination thereof. The device for object detection according to claim 1, wherein the band pass filter (109) can filter infrared wavelengths ranging from 750 nm to 3000 nm. The device for object detection according to claim 1, wherein the device (1) for object detection further includes a map file with detection results. The device for object detection according to claim 1, wherein the object detection device (1) further includes a component counting mechanism for comparing a user input value with an actual unit after detection. The device for object detection according to claim 1, wherein the device (1) for object detection further includes a marking mechanism for marking the object (111) with defects.

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